KR20130125867A - Glass substrate carrier, polishing apparatus and separating apparatus of glass substrate using the same - Google Patents

Abstract

Disclosed are a glass substrate carrier where a separation process for separating a glass substrate from an adsorption pad can be performed in the process of transferring the glass substrate, and a polishing apparatus and a separating apparatus for a glass substrate using the same. The separating apparatus for a glass substrate prepared by the present invention comprises a transfer unit which transfers a carrier where a glass substrate is adsorbed to an adsorption pad; a fluid supply unit which supplies a fluid for separation between the adsorption pad and the glass substrate; and a separation unit which separates the glass substrate from the adsorption pad by being opposed to the glass substrate and adsorbing the glass substrate.

Description

Glass substrate carrier, polishing apparatus and separating apparatus of glass substrate using the same}

The present invention relates to a carrier of a glass substrate, a polishing apparatus and a separation device of the glass substrate using the same, and more particularly, a carrier of a glass substrate used to polish the glass substrate and to separate the glass substrate from the adsorption pad, The present invention relates to a polishing apparatus and a separating apparatus for a glass substrate.

Glass substrates are used for PDP (Plasma Display Panel), LCD (Liquid Crystal Display), and AMOLED (Active Matrix Organic Light Emitting Diodes), which have recently become popular as display devices.

Among them, a glass substrate used in a TFT LCD (Thin Film Transistor Liquid Crystal Display) is a substrate attached to a TFT array and a color filter, and is used as a core material of a TFT LCD panel. Therefore, the glass substrate is required to have a flat surface that can not be distinguished from the naked eye, and high quality characteristics such as no deformation due to heat.

However, in the process of producing a glass substrate, melting defects are generated on the surface of the glass substrate, and melting defects cause a problem that it is difficult to use the glass substrate in a display device. Therefore, conventionally, the surface of the glass substrate is polished to remove a melting defect, so that a certain level of waviness is secured on the glass substrate.

As such, the technique of polishing the glass substrate and separating the polished glass substrate from the mounting pad has already been filed and disclosed by the present applicant, "Korean Patent Application Publication No. 2011-0116764; Glass plate mounting system for a polishing device. And a glass plate polishing method.

The patent discloses that the vacuum is released between the glass substrate and the mounting pad by supplying a liquid to a hole formed in the mounting pad to separate the polished glass substrate from the mounting pad.

However, as disclosed in the above-mentioned patent, in the related art, since the separation process of separating the glass substrate from the mounting pad has to be made in a state where the transfer of the glass substrate is stopped, the tack time required for the separation process is delayed. There is a problem that the productivity is lowered.

Republic of Korea Patent Publication No. 2011-0116764 (published Oct. 26, 2011)

SUMMARY OF THE INVENTION An object of the present invention is to provide a carrier of a glass substrate, a polishing apparatus for a glass substrate using the same, and a separation apparatus for separating a glass substrate from a suction pad, so that the glass substrate is transported.

The carrier for a glass substrate according to the present invention includes a pad for supporting a glass substrate, a main body for supporting the pad, and support protrusions protruding from a bottom surface of the main body, the polishing apparatus for a glass substrate for polishing a surface of the glass substrate. The glass substrate may be transferred to a separator for separating a glass substrate from the pad, and the support protrusion may be clamped in the polishing apparatus for the glass substrate and the separator for separating the glass substrate.

The pad may be any one of a suction pad for supporting the glass substrate by a vacuum suction force, an adhesive pad for supporting the glass substrate by an adhesive force, and an adhesive pad for supporting the glass substrate by adhesive force.

The glass substrate carrier has an adsorption hole opening to an upper surface of the adsorption pad, an adsorption oil communicating with the adsorption hole, a communication hole communicating with the adsorption flow path and opening to the bottom surface of the adsorption pad, and communicating with the communication hole. A desorption hole may be formed to be opened to the bottom of the main body to detach the exhaust pipe.

On the other hand, the polishing apparatus of the glass substrate according to the present invention includes a support portion for supporting a carrier on which the glass substrate is supported, an adsorption portion detachable to the carrier to adsorb the glass substrate to the carrier and the glass substrate supported on the support portion. And a polishing portion for polishing the surface.

The carrier includes a support protrusion protruding from the bottom surface, the support portion is a stage for supporting the carrier, a clamping unit installed on the stage to clamp the support projection, the protrusion protrudes from the stage to prevent sagging of the carrier Prophylaxis may be included.

Desorption grooves are formed on the bottom of the carrier, the adsorption unit is a vacuum pump, an exhaust pipe connected to the vacuum pump, the expansion pipe is connected to the open end of the exhaust pipe and stretched the full length and the open end of the expansion pipe is the removable hole It may include a stretch tube desorption unit for stretching the stretch tube to be detachable.

On the other hand, the separator of the glass substrate according to the present invention is a transfer unit for transporting the carrier with the glass substrate adsorbed on the suction pad, a fluid supply unit for supplying a separation fluid between the suction pad and the glass substrate and the glass substrate Opposed to and adsorbs the glass substrate to separate the glass substrate from the suction pad rotor.

The fluid supply unit may include a gas supply line for supplying gas between the adsorption pad and the glass substrate and a separation solution supply line for supplying a separation solution between the adsorption pad and the glass substrate.

The separation liquid injection line generates a separation liquid injection nozzle opened between the glass substrate and the suction pad, the separation liquid supply pipe and the microbubble connected to the tank and the injection nozzle, and the separation It may include a bubble generator for joining the microbubble to the liquid supply pipe.

The tank may be added with a surfactant that increases the inner wall of the tank and the surface tension of the injection liquid.

The surfactant may be a glycerin-based surfactant.

The fluid supply unit is installed in the inlet pipe for introducing the discharge liquid discharged to the tank by the separation liquid is injected into the glass substrate and the adsorption pad to the tank and a filter for filtering foreign substances from the injection liquid It may further include.

The gas supply line may include a compressor for compressing gas, a gas injection nozzle opened between the glass substrate and the suction pad, and a gas supply pipe connected to the compressor and the gas injection nozzle.

The transfer unit extends from the fluid supply unit to the separation unit and is connected to a separation transfer conveyor for transferring the glass substrate adsorbed on the suction pad, an import conveyor connected to an inlet side of the separation transfer conveyor, and an outlet side of the separation transfer conveyor. It may include an export conveyor.

The carrier includes support protrusions protruding from a bottom surface, and the separation conveying conveyor includes the driving pulley, a driven pulley spaced apart from the driving pulley, a conveyor belt connected to the driving pulley and the driven pulley, and the driving pulley and the driven pulley. A deflection prevention frame disposed between the pulleys to prevent deflection of the conveyor belt, wherein the conveyor belt has an open end portion enlarged in a curved section through which the conveyor belt passes through the driving pulley or the driven pulley, and the conveyor belt The glass substrate separating apparatus, characterized in that the support groove is formed in the open end is reduced in a straight section between the drive pulley and the driven pulley.

The separator may separate the glass substrate from the edge of the suction pad.

The separation unit supports a plurality of separation pads and the plurality of separation pads disposed to correspond to the entire area of the glass substrate, respectively, and sequentially lifts and descends sequentially from the separation pads corresponding to the edges of the glass substrate, among the plurality of separation pads. It may include a plurality of lifting unit.

The separating part includes a plurality of separation pads disposed to correspond to the entire surface of the glass substrate, a plurality of support members linearly supporting a plurality of separation pads arranged in the width direction of the glass substrate, and a plurality of support pads. Among the glass substrate may include a plurality of lifting units for sequentially lifting from the support corresponding to the edge of the glass substrate.

The separation unit includes a plurality of separation pads disposed to correspond to the entire area of the glass substrate, a plurality of support pads linearly supporting the plurality of separation pads arranged in the longitudinal direction of the glass substrate, and a plurality of the separation pads. The support may include a plurality of lifting units to sequentially lift from the support corresponding to the edge of the glass substrate.

The separating part may include a plurality of separation pads arranged to correspond to the entire area of the glass substrate, a plurality of linear supports of at least one separation pad disposed in an oblique direction crossing the length direction of the glass substrate or the width direction of the glass substrate. It may include a plurality of lifting units to sequentially lift from the support and the support corresponding to the edge of the glass substrate of the plurality of supports.

The separation unit includes a plurality of separation pads disposed to correspond to the entire area of the glass substrate, a plurality of support pads supporting the plurality of separation pads in a ring shape extending from the center portion of the glass substrate in the rim direction of the glass substrate; Among the plurality of supports may include a plurality of lifting units for sequentially lifting from the support corresponding to the edge of the glass substrate.

The separation part includes a plurality of separation pads disposed to correspond to the entire surface of the glass substrate, a support surface having a convex curved surface toward the glass substrate, and supporting the plurality of adsorption pads on the curved surface, a hinge installed at the center of the support. And it may include a lifting unit for lifting the support so that the support is rotated about the hinge.

The separating unit may further include a conveying unit supporting the lifting unit and conveying the conveying block at a conveying speed synchronized with a conveying speed of the glass substrate.

Carrier of the glass substrate according to the present invention, the polishing apparatus and the separation device of the glass substrate using the same, since the separation process of separating the glass substrate from the suction pad is carried out during the transfer of the glass substrate, it is possible to shorten the tack time to improve productivity It works.

1 is a cross-sectional view briefly showing a carrier of a glass substrate according to the present embodiment.
2 is a cross-sectional view schematically showing a polishing apparatus of a glass substrate according to the present embodiment.
3 is a plan view briefly showing a separator of the glass substrate according to the first embodiment.
4 is a side view briefly showing a separator of the glass substrate according to the first embodiment.
FIG. 5 is an enlarged view of a part of a conveyor belt in a separating apparatus of a glass substrate according to the first embodiment.
6 is a plan view briefly illustrating a separating part of the separating apparatus of the glass substrate according to the second embodiment.
7 is a plan view briefly showing a separating part of the separating apparatus of the glass substrate according to the third embodiment.
8 is a plan view briefly illustrating a separating part of the separating apparatus of the glass substrate according to the fourth embodiment.
9 is a plan view briefly illustrating a separating part of the separating apparatus of the glass substrate according to the fifth embodiment.
10 is a side view briefly showing a separating part of the separating apparatus of the glass substrate according to the sixth embodiment.
11 is a side view briefly showing a separation device of a glass substrate according to a third embodiment.

Hereinafter, embodiments of a carrier of a glass substrate according to the present invention, an apparatus for polishing and separating a glass substrate using the same, will be described with reference to the accompanying drawings. It should be understood, however, that the invention is not limited to the disclosed embodiments, but may be embodied in various forms and should not be construed as limited to the embodiments set forth herein, Is provided to fully inform the user.

1 is a cross-sectional view briefly showing a carrier of a glass substrate according to the present embodiment.

Referring to FIG. 1, a carrier (hereinafter, referred to as a “carrier”) 10 of a glass substrate includes a suction pad 20 and a main body 30.

The suction pad 20 sucks and supports the back surface of the glass substrate 1 by the vacuum suction force. The suction hole 21 is opened on the upper surface of the suction pad 20. An adsorption passage 22 communicating with the adsorption hole 21 is formed inside the adsorption pad 20. A communication hole 23 communicating with the adsorption flow passage 22 is formed at the bottom of the adsorption pad 20.

The main body 30 is provided as a flat plate to support the suction pad 20. Desorption hole 31 is communicated to the communication hole 23 in the main body 30, and the front end portion of the expansion tube 133, which is installed in the polishing apparatus 100 (see Fig. 2) of the glass substrate to be described later, is detached. This can be formed.

A support protrusion 32 is formed on the bottom of the main body 30. The support protrusion 32 allows the carrier 10 to be firmly supported by the clamping unit 122 of the polishing apparatus 100 of the glass substrate to be described later, and the separation device 300 of the glass substrate to be described later (FIG. 3, the carrier 10 is inserted into the support groove 424 formed in the conveyor belt 423 so that the carrier 10 is brought into close contact with the conveyor belt 423. The belt 423 can be firmly supported.

The carrier 10 adsorbs the glass substrate 1 so that the glass substrate 1 is firmly supported while the glass substrate 1 is polished in the polishing apparatus 100 (see FIG. 2) of the glass substrate to be described later. After the polishing of the glass substrate 1 is completed, the glass substrate 1 may be transported to the outside of the polishing apparatus 100 of the glass substrate in the adsorbed state.

In the above description, the carrier 10 has been described as including a suction pad 20 for adsorbing the glass substrate 1 by a vacuum suction force, the carrier 10 in place of the suction pad 20, the glass substrate ( An adhesive pad (for example, a polyurethane resin or the like) for adhering 1) by an adhesive force, or an adhesive pad for adhering the glass substrate 1 by an adhesive force may be employed.

2 is a cross-sectional view schematically showing a polishing apparatus of a glass substrate according to the present embodiment.

Referring to FIG. 2, the polishing apparatus (hereinafter, referred to as “polishing apparatus”) 100 of the glass substrate according to the present embodiment includes a polishing unit 110, a support unit 120, and an adsorption unit 130. .

The polishing unit 110 polishes the surface of the glass substrate 1 supported by the carrier 10 described above. The polishing unit 110 is capable of raising and lowering the plane of the glass substrate 1 and contacting the glass substrate 1. It includes a polishing pad 111 is rotated in. Since the polishing unit 110 is already well known in the art, a detailed description thereof will be omitted.

The support part 120 includes a stage 121 and a clamping unit 122. The stage 121 supports the carrier 10. The clamping unit 122 protrudes from the upper surface of the stage 121 to clamp the support protrusion 32 of the carrier 10. The clamping unit 122 allows the carrier 10 to be firmly supported on the stage 121. In addition, a sag prevention protrusion 123 may be formed on an upper surface of the stage 121 to prevent sagging of the carrier 10.

Adsorption unit 130 is to impart a vacuum suction force to the adsorption pad 20 of the carrier 10 described above, the vacuum pump 131, exhaust pipe 132, expansion pipe 133 and expansion pipe desorption unit 134 It includes.

The exhaust pipe 132 is connected to the vacuum pump 131, the expansion pipe 133 is coupled to the open end of the exhaust pipe 132. Bellows may be used as the expansion pipe 133. The expansion tube detachment unit 134 may be installed on the stage 121. The expansion pipe desorption unit 134 lifts the expansion pipe 133 so that the expansion pipe 133 is detached to the desorption hole 31 formed on the bottom surface of the carrier 10.

Of course, an airtight member (not shown), such as an o-ring, may be installed at the front end of the expansion pipe 133 or the peripheral portion of the detachable hole 31.

Thus, the polishing apparatus 100 is coupled to the expansion tube 133 to the front end of the exhaust pipe 132 connected to the vacuum pump 131, the expansion tube 133 is detachable to the carrier (10). Accordingly, the polishing of the glass substrate 1 after the polishing is completed can be carried out quickly, and the separation process of separating the glass substrate 1 from the adsorption pad 20 can be performed separately from the polishing process of the glass substrate 1. As such, when the polishing process and the separation process are performed separately, the tack time required for the separation process can be shortened, so that the continuous glass substrate 1 can be polished, thereby improving productivity.

3 is a plan view briefly showing a separator of the glass substrate according to the first embodiment, Figure 4 is a side view briefly showing a separator of the glass substrate according to the first embodiment.

3 and 4, the separating apparatus (hereinafter, referred to as a 'separating apparatus') 300 of the glass substrate according to the first embodiment is a suction pad 20 for the glass substrate 1 on which polishing is completed. By separating from the carrier, a carrier 10 installed around the polishing apparatus 100 and supporting the glass substrate 1 on which polishing has been completed can be carried in.

At this time, a transfer robot (not shown) may be installed between the polishing apparatus 100 and the separating apparatus 300 to carry the carrier 10 from the polishing apparatus 100 to the separating apparatus 300. The conveyor 410 may be installed to extend from the polishing apparatus 100 to the separator 300.

The separator 300 includes a transfer part 400, a fluid supply part 500, and a separation part 600.

The transfer unit 400 includes an import conveyor 410, a separation transfer conveyor 420, and an export conveyor 430.

As described above, the carry-in conveyor 410 may be carried by the carrier 10 (not shown) the carrier 10 taken out from the polishing apparatus 100.

The carry-in conveyor 410 is connected to the inlet side of the separation transfer conveyor 420, the export conveyor 430 is connected to the outlet side of the separation transfer conveyor 420. The loading conveyor 410 and the loading conveyor 430 may be provided in the form of a roller conveyor including a plurality of rollers.

The separated transfer conveyor 420 may include a driving pulley 421, a driven pulley 422, a conveyor belt 423, a sag prevention frame 425, and a driving motor (not shown). The driving pulley 421 is disposed on the side facing the carrying out conveyor 430. The driven pulley 422 is disposed on the side facing the loading conveyor 410. The conveyor belt 423 is connected to the driving pulley 421 and the driven pulley 422 and installed to transport the carrier 10 as the driving pulley 421 is rotated. The sag prevention frame 425 is disposed between the driving pulley 421 and the driven pulley 422 to prevent sagging of the conveyor belt 423.

FIG. 5 is an enlarged view of a part of a conveyor belt in a separating apparatus of a glass substrate according to the first embodiment.

Referring to FIG. 5, a support groove 424 is formed on an upper surface of the conveyor belt 423. When the conveyor belt 423 passes the curved section of the driving pulley 421 or the driven pulley 422, the open end of the support groove 424 is expanded, and the conveyor belt 423 is driven between the driving pulley 421 and the driven pulley ( When passing the planar section between 422, the open end of the support groove 424 is reduced compared to when passing the curved section.

The carrier 10 may be transferred to the conveyor belt 423 just before the support groove 424 passes the top of the driven pulley 422. At this time, since the open end of the support groove 424 is expanded, the support protrusion 32 may be smoothly inserted into the support groove 424.

Subsequently, in the state in which the support protrusion 32 is inserted into the support groove 424, the open end of the support groove 424 is reduced as the conveyor belt 423 enters the plane section, so that the conveyor belt 423 is supported. In close contact with the protrusion 32, the carrier 10 may be firmly supported.

Subsequently, after the glass substrate 1 is separated, the open end of the support groove 424 extends as the conveyor belt 423 enters the upper end of the driving pulley 421, so that the support protrusion 32 is supported by the support groove ( 424 may deviate smoothly. At this time, the carrier 10 may be transferred to the carrying-out conveyor 430 and taken out of the separated transfer conveyor 420.

Referring to FIGS. 3 and 4 again, the fluid supply unit 500 supplies a separation fluid between the suction pad 20 and the glass substrate 1 transferred by the separation transfer conveyor 420 to separate the fluid by the separation fluid. The glass substrate 1 is separated from the suction pad 20 in advance, and includes a gas supply line and a separation liquid supply line.

The gas supply line supplies a compressor body between the glass substrate 1 and the suction pad 20, and includes a gas injection nozzle 511, a gas supply pipe 512, and a compressor 513. The gas injection nozzles 511 are disposed on both sides of the separation transfer conveyor 420 and are opened between the glass substrate 1 and the suction pad 20. The gas supply pipe 512 connects the gas injection nozzle 511 and the compressor 513.

The gas supply line sprays the compressor body between the glass substrate 1 and the adsorption pad 20 so that the glass substrate 1 is separated from the adsorption pad 20.

Separation liquid supply line is to supply the separation liquid between the glass substrate 1 and the suction pad 20, the tank 521, separation liquid injection nozzle 522, separation liquid supply pipe 523 and bubble generator 524 It includes.

In the tank 521, a separation liquid used to separate the glass substrate 1 from the suction pad 20 is accommodated. The tank 521 is added with a surfactant that increases the surface tension between the separation liquid and the inner wall of the tank 521 so that the separation liquid can be smoothly supplied from the tank 521. Glycerin-based surfactants may be used as the surfactant.

Separation liquid injection nozzle 522 is disposed on both sides of the separation transfer conveyor 420, and is opened between the glass substrate 1 and the suction pad (20). The separation liquid injection nozzle 522 may be alternately arranged with the gas injection nozzle 511. The separation liquid supply pipe 523 connects the separation liquid injection nozzle 522 and the tank 521.

The bubble generator 524 generates microbubbles having a diameter of 0.1 μm to 1 cm, and joins the microbubbles to the separation liquid supply pipe 523. Therefore, the separation liquid may penetrate between the glass substrate 1 and the adsorption pad 20 while the microbubbles are included. The glass substrate 1 may be smoothly separated from the adsorption pad 20 according to the buoyancy and the surface active effects of the microbubbles.

In addition, the fluid supply unit 500 may further include an inlet pipe 525 and a filter 526. The inlet pipe 525 allows the discharge liquid used for separation of the glass substrate 1 and the suction pad 20 to flow into the tank 521. The filter 526 is installed in the conduit of the inlet pipe 525 to filter foreign matter contained in the discharge liquid. The inlet pipe 525 and the filter 526 circulates and reuses the discharge liquid, thereby saving resources and preventing environmental pollution.

Meanwhile, the separating unit 600 adsorbs the glass substrate 1 and completely separates the adsorbed glass substrate 1 from the adsorption pad 20, and the plurality of separation pads 610 and the plurality of lifting units 620. It includes.

The plurality of separation pads 610 may be provided to correspond to the entire area of the glass substrate 1, and may be spaced apart from each other at uniform intervals. As the plurality of separation pads 610, adsorption pads for adsorbing the glass substrate 1 by vacuum adsorption force and adhesive pads for adhering the glass substrate 1 by adhesive force may be used.

The plurality of lifting units 620 individually support each separation pad 610, and individually lift each separation pad 610. In this case, the plurality of lifting units 620 may lift the plurality of separation pads 610 such that the glass substrate 1 is separated from the edge portion.

Hereinafter, a separator of the glass substrate according to another embodiment will be described in detail. In the following description, the same reference numerals are given to similar elements described in the description of the separating apparatus of the glass substrate according to the first embodiment described above, and the detailed description thereof will be omitted. Therefore, the components omitted in the following description will be understood with reference to the description of the separating apparatus of the glass substrate according to the first embodiment described above.

6 is a plan view briefly illustrating a separating part of the separating apparatus of the glass substrate according to the second embodiment.

Referring to FIG. 6, the separation unit 600 may further include a plurality of supports 630. The support 630 may linearly support the plurality of separation pads 610 disposed in the width direction of the glass substrate 1.

That is, the plurality of support members 630 are composed of first, second, ..., n support members 631, 632, ..., 63n disposed in the width direction of the glass substrate 1, and have a plurality of separation pads. 610 may be composed of a plurality of first, second, ..., n separation pads 611, 612, ..., 61n supported on each support 631, 632, ..., 63n. . In addition, the plurality of lifting units 620 may be configured to elevate the first, second, ..., n support (631, 632, ..., 63n), respectively.

At this time, in the state in which the transfer of the glass substrate 1 is paused, the plurality of lifting units 620 are provided with the first and n supports 631 and 63n, the second and n-1 supports 632 and 63n-1, ..., the plurality of supports 630 can be raised and lowered in the order of the m-th support 63m. Therefore, the glass substrate 1 may be lifted from the edge portion and separated from the suction pad 20 smoothly.

7 is a plan view briefly showing a separating part of the separating apparatus of the glass substrate according to the third embodiment.

Referring to FIG. 7, the plurality of supporters 630 may linearly support the plurality of separation pads 610 disposed in the longitudinal direction of the glass substrate 1.

That is, the plurality of supports 630 are composed of first, second, ..., n supports 631, 632, ..., 63n arranged in the longitudinal direction of the glass substrate 1, and a plurality of separation pads. 610 may be composed of a plurality of first, second, ..., n separation pads 611, 612, ..., 61n supported on each support 631, 632, ..., 63n. . In addition, the plurality of lifting units 620 may be configured to elevate the first, second, ..., n support (631, 632, ..., 63n), respectively.

At this time, in the state in which the transfer of the glass substrate 1 is paused, the plurality of lifting units 620 are provided with the first and n supports 631 and 63n, the second and n-1 supports 632 and 63n-1, ..., the plurality of supports 630 can be raised and lowered in the order of the m-th support 63m. Therefore, the glass substrate 1 may be lifted from the edge portion and separated from the suction pad 20 smoothly.

8 is a plan view briefly illustrating a separating part of the separating apparatus of the glass substrate according to the fourth embodiment.

Referring to FIG. 8, the plurality of supporters 630 may linearly support the plurality of separation pads 610 in an oblique direction crossing the length direction of the glass substrate 1 or the width direction of the glass substrate 1.

That is, the plurality of support members 630 may include first, second, ..., n support members 631, 632, arranged in an oblique direction crossing the longitudinal direction of the glass substrate 1 or the width direction of the glass substrate 1. ..., 63n), and the plurality of separation pads 610 are a plurality of first, second, ..., n separation pads 611 supported by the respective support bases 631, 632, ..., 63n. , 612, ..., 61n). In addition, the plurality of lifting units 620 may be configured to elevate the first, second, ..., n support (631, 632, ..., 63n), respectively.

At this time, in the state where the transfer of the glass substrate 1 is paused, the plurality of lifting units 620 are the first support 631, the second support 632, ..., the order of the n-th support 63n The plurality of supports 630 can be lifted up and down. Therefore, the glass substrate 1 may be lifted from the edge portion and separated from the suction pad 20 smoothly.

9 is a plan view briefly illustrating a separating part of the separating apparatus of the glass substrate according to the fifth embodiment.

Referring to FIG. 9, the plurality of supporters 630 may support the plurality of separation pads 610 in a ring shape extending from the center portion of the glass substrate 1 to the edge direction of the glass substrate 1. .

That is, the plurality of support members 630 are ring-shaped first, second, ..., n support members 631, 632,... Spaced apart from the edge of the glass substrate 1 toward the center of the glass substrate 1. , 63n), and the plurality of separation pads 610 are provided with a plurality of first, second, ..., n separation pads 611, 612 supported by the respective supports 631, 632, ..., 63n. , ..., 61n). In addition, the plurality of lifting units 620 may be configured to elevate the first, second, ..., n support (631, 632, ..., 63n), respectively.

At this time, in the state where the transfer of the glass substrate 1 is paused, the plurality of lifting units 620 are the first support 631, the second support 632, ..., the order of the n-th support 63n The plurality of supports 630 can be lifted up and down. Therefore, the glass substrate 1 may be lifted from the edge portion and separated from the suction pad 20 smoothly.

10 is a side view briefly showing a separating part of the separating apparatus of the glass substrate according to the sixth embodiment.

Referring to FIG. 10, the support 640 may have a curved surface that is convex toward the glass substrate 1, and may support the plurality of separation pads 610 on the curved surface. The hinge 641 may be installed at the central portion of the support 640. At this time, the elevating unit 642 may be provided in a single stage to elevate one side of the support 640.

That is, a plurality of first, second, ..., n separation pads 611, 612, ..., 61n arranged linearly in the width direction or the longitudinal direction of the glass substrate 1 are formed on the curved surface of the support 640. Can be supported. At this time, in the state in which the transfer of the glass substrate 1 is temporarily stopped, the support unit 640 is rotated about the hinge 641 as the lifting unit 642 lifts one side of the support 640. Accordingly, the plurality of first, second, ..., n-separation pads 611, 612,..., And 61n sequentially adsorb the glass substrate 1, and the glass substrate 1 is lifted from the edge portion and adsorbed. It can be separated smoothly from the pad (20).

In FIG. 10, the curved surface of the support 640 is convex in the center of the glass substrate 1 in the longitudinal direction, but the curved surface of the support 640 is convex in the central direction of the glass substrate 1 in the width direction. The change may be carried out.

Meanwhile, the above-described embodiments describe embodiments in which the glass substrate 1 is separated while the transfer of the glass substrate 1 is paused. In another embodiment, the separation unit 600 may separate the glass substrate 1 while the plurality of separation pads 610 are synchronized with the transfer speed of the glass substrate 1 and transferred together with the glass substrate 1.

11 is a side view briefly showing a separation device of a glass substrate according to a seventh embodiment.

Referring to FIG. 11, the separating unit 600 further includes a transfer unit 650 for supporting the plurality of lifting units 620 and transferring the plurality of lifting units 620, and the plurality of lifting units 620 may include a plurality of lifting units 620. The plurality of separation pads 610 may be elevated while being transferred together with the glass substrate 1 by the transfer unit 650.

As described above, by separating the glass substrate 1 while the plurality of lifting units 650 are transferred together with the glass substrate 1, the continuity of the transfer of the glass substrate 1 may be secured, thereby reducing the tack time.

The separator 600a of the separator for separating glass substrates according to the seventh embodiment of the present invention is a glass substrate separator for separating the glass substrates according to the third and fifth embodiments and a separator for separating the glass substrates according to the sixth embodiment. The separator may be applied to the glass substrate separating apparatus according to the other embodiments except for the embodiment in which the center portion is convex with respect to the width direction of the substrate.

The embodiments of the present invention described above and shown in the drawings should not be construed as limiting the technical idea of the present invention. The scope of protection of the present invention is limited only by the matters described in the claims, and those skilled in the art will be able to modify the technical idea of the present invention in various forms. Accordingly, such improvements and modifications will fall within the scope of the present invention as long as they are obvious to those skilled in the art.

1: glass substrate 10: carrier
20: adsorption pad 21: adsorption hole
22: adsorption flow path 30: main body
31: removable hole 32: support protrusion
100: polishing apparatus for glass substrate
110: grinding portion 120: support portion
130: adsorption unit
300: glass substrate separator
400: transfer unit 410: carry-on conveyor
420: separate transfer conveyor 421: driving pulley
422: driven pulley 423: conveyor belt
424: support groove 500: fluid supply
511 gas injection nozzle 512 gas supply pipe
513: compressor 521: tank
522: separation liquid injection nozzle 523: separation liquid supply pipe
524: bubble generator 525: inlet pipe
526: filter 600: separator
610: a plurality of separation pad 620: a plurality of lifting unit
630, 640: support 650: transfer unit

Claims (23)

A pad supporting a glass substrate;
A main body supporting the pad; and
And a support protrusion protruding from the bottom of the main body.
The glass substrate is transferred from the polishing apparatus of the glass substrate to polish the surface of the glass substrate to the separating apparatus of the glass substrate that separates the glass substrate from the pad, and the supporting protrusions are removed from the polishing apparatus of the glass substrate and the separating apparatus of the glass substrate. Carrier for glass substrates, characterized in that the clamping. The method of claim 1, wherein the pad
And a suction pad for supporting the glass substrate by vacuum suction force, an adhesive pad for supporting the glass substrate by adhesive force, and an adhesive pad for supporting the glass substrate by adhesive force. The method of claim 2,
An adsorption hole opening to an upper surface of the adsorption pad;
An adsorption passage communicating with the adsorption hole;
A communication hole communicating with the suction passage and opening to the bottom of the suction pad; and
And a detachment hole communicating with the communication hole and opening to the bottom of the main body to detach the exhaust pipe. A support for supporting a carrier on which a glass substrate is supported;
An adsorption part detachable from the carrier to allow the glass substrate to be adsorbed onto the carrier; and
And a polishing unit for polishing a surface of the glass substrate supported by the support unit. 5. The method of claim 4,
The carrier includes a support protrusion protruding from the bottom,
The support
A stage supporting the carrier;
A clamping unit installed on the stage to clamp the support protrusion;
And a sag preventing protrusion protruding from the stage to prevent sagging of the carrier. 5. The method of claim 4,
Removable grooves are formed on the bottom of the carrier,
The adsorption unit
Vacuum pump;
An exhaust pipe connected to the vacuum pump;
An extension pipe coupled to the open end of the exhaust pipe and configured to expand and contract an electric field; and
And a flexible tube detachable unit configured to expand and contract the flexible tube so that the open end of the flexible tube is detached from the detachable hole. A transfer unit which transfers the carrier on which the glass substrate is adsorbed to the suction pad;
A fluid supply unit supplying a separation fluid between the suction pad and the glass substrate; and
And a separation unit facing the glass substrate and adsorbing the glass substrate to separate the glass substrate from the suction pad rotor. The method of claim 7, wherein the fluid supply unit
A gas supply line for supplying gas between the suction pad and the glass substrate; and
And a separation solution supply line for supplying a separation solution between the suction pad and the glass substrate. The method of claim 8, wherein the separation liquid injection line
A tank containing the separation liquid;
A separation liquid injection nozzle opened between the glass substrate and the suction pad;
Separation liquid supply pipe connected to the tank and the injection nozzle; And
And a bubble generator for generating microbubbles and joining the microbubbles to the separation liquid supply pipe. The glass substrate separation apparatus of claim 9, wherein a surfactant is added to the tank to increase an inner wall of the tank and a surface tension of the injection liquid. The glass substrate separating apparatus of claim 10, wherein the surfactant comprises a glycerin-based surfactant. The method of claim 9, wherein the fluid supply unit
An inlet pipe through which the separation liquid is injected into the glass substrate and the suction pad and discharges the discharged liquid discharged to the tank; and
And a filter installed in the conduit of the inlet pipe to filter foreign substances from the sprayed liquid. The method of claim 8, wherein the gas supply line
A compressor for compressing the gas;
A gas injection nozzle opened between the glass substrate and the suction pad; and
And a gas supply pipe connected to the compressor and the gas injection nozzle. The method of claim 7, wherein the transfer unit
A separation conveying conveyor extending from the fluid supply part to the separating part to convey the glass substrate adsorbed on the suction pad;
An import conveyor connected to the inlet side of the separation transfer conveyor; and
And a carrying-out conveyor connected to the outlet side of the separating transfer conveyor. The method of claim 14,
The carrier includes a support protrusion protruding from the bottom,
The separation conveying conveyor
The driving pulley;
A driven pulley spaced apart from the drive pulley;
A conveyor belt connected to the drive pulley and the driven pulley; and
And a sag prevention frame disposed between the driving pulley and the driven pulley to prevent sagging of the conveyor belt.
The conveyor belt has a support groove in which the open end is enlarged in a curved section in which the conveyor belt passes through the drive pulley or the driven pulley, and the conveyor belt is reduced in an open end in a straight section between the drive pulley and the driven pulley. Glass substrate separator, characterized in that formed. The method of claim 7, wherein the separation unit
And a glass substrate separating apparatus from the suction pad. The method of claim 16, wherein the separation unit
A plurality of separation pads disposed to correspond to the entire surface of the glass substrate; and
And a plurality of lifting units each supporting the plurality of separation pads and sequentially lifting the separation pads sequentially from the separation pads corresponding to the edges of the glass substrates of the plurality of separation pads. The method of claim 16, wherein the separation unit
A plurality of separation pads disposed to correspond to the entire area of the glass substrate;
A plurality of supports linearly supporting a plurality of separation pads disposed in the width direction of the glass substrate among the plurality of separation pads; and
And a plurality of elevating units for sequentially elevating from a support corresponding to the edge of the glass substrate among the plurality of supports. The method of claim 16, wherein the separation unit
A plurality of separation pads disposed to correspond to the entire area of the glass substrate;
A plurality of supports linearly supporting the plurality of separation pads disposed in the longitudinal direction of the glass substrate among the plurality of separation pads; and
And a plurality of elevating units for sequentially elevating from a support corresponding to the edge of the glass substrate among the plurality of supports. The method of claim 16, wherein the separation unit
A plurality of separation pads disposed to correspond to the entire area of the glass substrate;

A plurality of supports linearly supporting at least one separation pad disposed in an oblique direction crossing the length direction of the glass substrate or the width direction of the glass substrate; and
And a plurality of elevating units for sequentially elevating from a support corresponding to the edge of the glass substrate among the plurality of supports. The method of claim 16, wherein the separation unit
A plurality of separation pads disposed to correspond to the entire area of the glass substrate;
A plurality of supports for supporting the plurality of separation pads in a ring shape extending from the center portion of the glass substrate in the rim direction of the glass substrate;
And a plurality of elevating units for sequentially elevating from a support corresponding to the edge of the glass substrate among the plurality of supports. The method of claim 16, wherein the separation unit
A plurality of separation pads disposed to correspond to the entire area of the glass substrate;
A support for forming a convex curved surface toward the glass substrate and supporting the plurality of adsorption pads together on the curved surface;
A hinge installed at the center of the support; And
And an elevating unit for elevating the support so that the support is rotated about the hinge. The method of claim 17, wherein the separation unit
And a conveying unit supporting the elevating unit and conveying the conveying block at a conveying speed synchronized with a conveying speed of the glass substrate.

Images