KR20130122240A - Interlocking solenoid valve and control system using it - Google Patents

Abstract

The present invention relates to a solenoid valve with an interlocking function and a control system using same including a communication part; a checking part at the rear end of the communication part to receive the electrical signal of the communication part; and an operation part to connect or disconnect voltage supply to an actuator. The solenoid valve with an interlocking function and the control system using same are capable of avoiding dangerous situations or process errors by receiving opening and closing commands for a solenoid valve from a device control part and checking the opened or closed state of the solenoid valve in an interlocking step before adjusting the flow rate and direction of air according to the opening and closing commands; connecting the device control part to the solenoid valve with various communication methods including a one-to-one direct connection method; and eliminating necessity for securing an installation space and protecting noise in comparison with an existing solenoid valve to be installed with an interlocking module. [Reference numerals] (10) Device control part;(AA,BB) Feedback signal;(CC) Air line

Description

Solenoid valve with interlock function and control system using it {Interlocking solenoid valve and control system using it}

The present invention relates to a solenoid valve having an interlock function and a control system using the same.

In general, the solenoid valve is a device that controls the flow rate or the flow of air by receiving an electrical signal, when the electrical signal is applied to the electromagnet coil is adjusted the flow rate or direction of air passing through the air flow path of the solenoid block.

At this time, the solenoid valve applied to the equipment or the device receives the opening / closing command from the control unit and receives the electric signal, and then immediately performs the function of adjusting the flow rate or amount of air or separate interlock board before being transferred from the control unit to the solenoid valve. However, if the condition is not met, it will not be delivered to the solenoid valve.

In this case, when a procedure or an interlock function for checking whether the operation of the equipment or the device is suitable for any safety condition is passed, it is essential to install a separate interlock module having such a function. Therefore, by constructing and using the interlock circuit in a special path before the electrical signal is transmitted to the solenoid valve, additional devices and spaces for installing the device are needed, and the equipment or device is complicated by adding a signal path, as well as various propagation. It is vulnerable to noise and gradually increases the probability of malfunctioning equipment, which can have a fatal effect on the process or cause the quality of the product.

In addition, when applied to a gas supply device, it is necessary to prevent certain gases from being mixed with each other to prevent a risk of explosion or chemical reaction and to prevent a gas supply under a specific state to protect workers from danger.

In the drawings of the prior art described below (FIGS. 1 to 10), even if there are the same numbers, it is noted that the components are different for each embodiment.

The technique disclosed in Korean Patent No. 481 882 (Registration Date: March 25, 2005. Name of the Invention: Gas Supply Apparatus for Semiconductor Manufacturing Equipment with Interlock Device and Interlock Method thereof) proposed as one embodiment of this prior art is shown in FIG. 1 and 2, at least one solenoid valve for supplying or interrupting the gas supplied from at least one gas supply source to the semiconductor manufacturing equipment side by its opening and closing operation; A main controller for outputting a driving signal of the semiconductor manufacturing equipment or an electrical signal for opening and closing the solenoid valve; A driving unit receiving a signal of the main controller and applying a driving voltage to the solenoid valve side; Comparing means for receiving input and output voltage values for driving the solenoid valve and comparing them with a reference voltage value and transmitting the result to the main controller side, and displaying the abnormal state when an abnormal state occurs in the voltage value compared by the comparing means. And interlock means including display means.

Such a configuration can reduce the occurrence of a process error due to a gas supply malfunction by accurately recognizing the open / closed state of the solenoid valve and generating an interlock signal to stop the operation of the facility when an abnormal state occurs.

In addition, the invention disclosed in the Republic of Korea Patent No. 558546 (Registration Date: March 2, 2006, the name: photoresist supply device) proposed as another embodiment of the prior art is a semiconductor, as shown in Figure 3 and 4, A photoresist supply apparatus for coating equipment, comprising: a first and a second photoresist bottle storing a photoresist liquid of the same type and a first to be connected to the first and second photoresist bottles to supply an N 2 purge gas; And a first and a second solenoid valve installed on the second gas supply pipe, the first and second gas supply pipes to open or close the N 2 purge gas, and the first and second photoresist bottles. First and second purge start buttons for automatically generating a purge start key signal for setting photoresist when the replacement is performed, and on top of the first and second photoresist bottles, respectively. First and second photoresist supply tubes for supplying a photoresist liquid, and first and second terminals connected to the first and second photoresist supply tubes to receive photoresist supplied from the first and second photoresist bottles; A third photoresist supply pipe connected to the second trap tank, the first and second trap tanks to supply photoresist contained in the first and second trap tanks to a nozzle, and a third photoresist supply pipe. Nozzles for injecting photoresist onto the wafer, first and second empty sensors respectively installed on top of the first and second trap tanks to detect replacement states of the first and second photoresist bottles, and the first Third and fourth empty sensors respectively installed at the lower portions of the first and second trap tanks and detecting the stopped photoresist state, and connected to the upper portions of the first and second trap tanks, respectively. First and second discharge pipes for discharging the photoresist contained in the first and second trap tanks, respectively, and installed on the first and second discharge pipes to open and close the photoresist liquid to discharge or block the discharge. A third and fourth solenoid valve, first and second drain detection sensors for detecting a photoresist discharge stop state when the first or second photoresist bottle is replaced, and a purge from the first and second purge start buttons In response to the start key signal, the first and second solenoid valves and the third and fourth solenoid valves are driven to automatically control the photoresist setting, and the photoresist stop state can be detected from the third and fourth empty sensors. It includes a controller that controls to generate a time interlock.

This prior art configuration can reduce the loss of photoresist by automatically setting the photoresist solution when the photoresist solution is filled in the photoresist supply line when replacing the photoresist bottle in the semiconductor coating equipment, and also purge start Automatically purge the photoresist by pressing a button to reduce the waste of unnecessary manpower and reduce costs, and when the photoresist bottle is replaced, the operator is connected to the controller 100 without the operator having to manually purge the photoresist. When only the purge start button is pressed, the photoresist purge operation is automatically performed, so anyone can easily purge the photoresist.

In addition, the technique disclosed in the Republic of Korea Patent No. 591756 (Registration Date: June 3, 2006. Name of the invention: ion implantation system having an interlock function) as another embodiment according to the prior art (see FIG. 5) is as follows.

The Faraday assembly includes a solenoid 1202, a setup flag 1203, and a Faraday 1204, the solenoid 1202 in response to the key switch signal KEY_SW of the remote console 1400. Adjust setup flag 1203 to down state. When the setup flag 1203 is in the up state, the ion beam from the beam transmitting means 1100 is blocked by the setup flag 1203 so as not to be transferred into the chamber 1201. When the setup flag 1203 is in the down state, the ion beam from the beam transmitting means 1100 is delivered into the chamber 1201. A detailed description of the Faraday assembly will be omitted here. The solenoid 1202 sets the setup flag 1203 in the down state in response to the key switch signal KEY_SW output from the remote console 1400. Solenoid 1202 includes a down sensor 1202a, which down sensor 1202a detects whether the setup flag 1203 is in a down state (indicated by a dotted line in the figure), and as a result a down sensing signal. Output (DN)

In this embodiment, the scan system 1101 transfers the ion beam onto the setup flag 1203 according to the control voltage of the power amplifier 1300 in the beam setup mode. The scan system 1101 delivers the ion beam to the dump 1205 in accordance with the control voltage of the power amplifier 1300 in the ion implantation mode. The power amplifier 1300 is automatically controlled by the dose processor 1500 in the ion implantation mode and manually by the operator via the remote console 1400 in the beam setup mode. This will be described in detail below.

Subsequently, the remote console 1400 is operated by an operator, and generates various control signals for controlling the power amplifier 1300 according to the operator's operation. The remote console 1400 includes a key switch 1400a, which is operated by an operator when it is desired to switch from the beam setup mode to the ion implantation mode. Although not shown in the figure, the remote console 1400 will be configured to include various buttons for controlling the beam parameters. When the key switch 1400a is switched from the off state to the on state, the key switch signal KEY_SW has a ground voltage level. The dose processor 1500 detects whether the ion implantation start signal START is output from the end station 1200. When the ion implantation start signal START is detected, the dose processor 1500 automatically generates various control signals for controlling the power amplifier 1300.

The target selection circuit 1600 selects the control signals output from the remote console 1400 in the beam setup mode, and selects the control signals output from the dose processor 1500 in the ion implantation mode. The machine interface 1700 is configured such that the target selecting circuit 1600 selects output signals of the remote console 1400 or output signals of the dose processor 1500 in response to the key switch signal KEY_SW output from the remote console 1400. Let's do it.

Although the key switch 1400a is turned on, the machine interface 1700 may not operate normally.

This causes the target selection circuit 1600 to continue to select the output signals of the remote console 1400. As described above, the ion beam must be moved to the dump 1205 because it has been switched from the beamsetup mode to the ion implantation mode. Movement of the ion beam to the dump is automatically performed by the dose processor 1500 in ion implantation mode. As a result, if the machine interface 1700 does not operate normally, the ion beam remains in the chamber in ion implantation mode. The interlock device 1800 detects whether the machine interface 1700 is operating normally, and outputs the down detection signal DN output from the down sensor 1202a according to the detection result of the end station 1200. To the controller 1206. The controller 1206 controls the wafer to be loaded into the chamber in response to the input of the down sensing signal DN, and simultaneously outputs an ion implantation start signal START to the dose processor 1500.

This prior art configuration can accurately detect a contact failure of a relay that controls the transition from the beam setup mode to the ion beam mode.

In addition, the technique disclosed in the Republic of Korea Patent No. 725102 (Registration Date: May 29, 2007. Name of the invention: roughing valve malfunction detection device of the ion implantation equipment) according to another embodiment according to the prior art is shown in Figs. As described above, in the roughing valve malfunction detection apparatus of an ion implantation facility, a valve driving control unit for generating first to fifth solenoid valve driving voltages according to a predetermined control signal, and first to fifth generations generated from the valve driving control unit. First to fifth solenoid driving parts supplying / blocking air for opening / closing the valve by the solenoid valve driving voltage, first to fifth roughing valves opened and closed by air supplied from the first to fifth solenoid driving parts, Drive by the first to fifth sensors for detecting the open / closed state of the first to fifth roughing valve, and the open state detection signal of the first sensor For example, a first relay for feeding back the open state detection signal of the first roughing valve to the valve driving control unit and a closed state detection signal of the first sensor to display the closed state of the first roughing valve A second relay for outputting a control signal, a third relay driven by the open state detection signal of the second sensor to feed back the open state detection signal of the second roughing valve to the valve driving controller, and the second relay; A fourth relay which is driven by a closed state detection signal of a sensor and outputs a control signal for indicating a closed state of the second roughing valve, and the roughing valve of the roughing valve from the first or second relay through the valve driving controller; It characterized in that it comprises a controller for generating an interlock when the open state detection signal is not fed back.

This prior art configuration monitors the malfunction of a plurality of roughing valves when a plurality of load lock chambers are formed in a high vacuum state in a plurality of ion implantation facilities, and generates an interlock when a malfunction of the roughing valve is detected. By stopping the operation, it is possible to prevent the occurrence of process defects, and also has the advantage of reducing the huge cost loss due to process defects.

However, the outline of the above-described configuration of the prior art is the same as in FIG. 10 as a whole.

First of all, the equipment control unit 10 refers to a control unit installed in a semiconductor device, an automotive electronic system, a special fire fighting facility, and the like.

First, referring to FIG. 10, the prior art system configuration includes an equipment control unit 10; A communication slave module 20 in communication connection with the equipment control unit 10; Interlock module (or device) 30 for selectively interlocking or releasing interlock according to a working condition detected from at least one external sensor 61 (63) in preference to a control signal from communication slave module 20. And, the interlock module 30 is composed of a solenoid valve 40 is directly connected to the signal 1: 1.

Here, the interlock module 30 is a device for interlocking or releasing interlock of electrical circuits or mechanical equipment. In addition, reference numerals 41 and 43 denote communication units and driving units of the solenoid valve 40, and reference numeral 50 denotes valves or actuators that are mechanically connected to the driving unit 43 of the solenoid valve 40.

In such a configuration, the interlock module 30 and the solenoid valve 40 are connected in a one-to-one direct signal connection method (Direct IO), which is vulnerable to the effects of various noises and has a separate method for noise protection. Of course, there is a problem that can not take advantage of the serial communication method at all.

An object of the present invention created to solve the above problems is to provide a solenoid valve with an interlock function and a control system using the same.

The object of the present invention, the communication unit; A verification unit provided at a rear end of the communication unit and receiving an electrical signal of the communication unit; It can be achieved by a solenoid valve with an interlock function including a drive unit for supplying or releasing voltage to the actuator according to the verification signal of the verification unit.

In detail, the communication unit of the present invention is connected to the equipment control unit installed in a semiconductor device, an automotive electronic system, a special fire fighting equipment, etc. in a serial communication method, receives an electrical signal of the equipment control unit and transmits the electrical signal to the verification unit, and selectively sends feedback information. To the equipment control unit.

In detail, the verification unit of the present invention compares the information detected from at least one sensor installed in the outside with the electrical signal transmitted from the communication unit by a preloaded program and transmits the verification signal to the driving unit.

Specifically, a plurality of verification units of the present invention are provided in parallel at the rear end of the communication unit.

Specifically, a plurality of verification units of the present invention are provided in series at the rear end of the communication unit.

Specifically, the present invention further includes a lamp type display unit for indicating the actuation or deactivation state of the drive unit.

In detail, the communication unit, the verification unit and the driving unit of the present invention is characterized in that it is formed integrally.

More specifically, the communication unit, the verification unit, the display unit and the driving unit of the present invention is characterized in that it is formed integrally.

More specifically, the communication unit, the verification unit, the display unit and the driving unit of the present invention is characterized in that each module is manufactured and assembled sequentially.

In addition, another object of the present invention, the equipment control unit; At least one sensor; At least one actuator; Add an interlock function to receive the electrical signal of the equipment control unit and the sensing information from the sensor to supply or release the voltage for operating the actuator in accordance with a pre-loaded program and to selectively send feedback information to the equipment control unit. One solenoid valve.

Specifically, the actuator of the present invention is a valve or actuator.

The configuration of the present invention as described above has the following advantages.

First, the present invention is a process error or a dangerous situation by the opening and closing command is transmitted to the solenoid valve in the equipment control unit and the operation after finally verifying the opening or closing in the interlock step before adjusting the flow or direction of air by the opening and closing command Can be avoided.

Second, the present invention is characterized in that the connection between the equipment control unit and the solenoid valve can be connected in a variety of communication methods, including one-to-one direct connection.

Third, the present invention has the advantage that no need to secure the installation space, noise protection measures, etc. that should be considered when installing the interlock module in the existing equipment.

1 is a configuration diagram schematically showing a gas supply apparatus of a semiconductor manufacturing apparatus according to a first embodiment of the prior art.
FIG. 2 is a flowchart illustrating a process of generating an interlock in the gas supply device of FIG. 1.
3 is a block diagram showing a photoresist supply apparatus of a semiconductor coating equipment according to a second embodiment of the prior art.
FIG. 4 is a flowchart for automatically controlling photoresist settings when replacing the photoresist bottle of FIG. 3.
5 is a block diagram showing an ion implantation system according to a third embodiment of the prior art.
6 is a block diagram of an ion implantation apparatus according to a fourth embodiment of the prior art.
FIG. 7 is a block diagram of an apparatus for detecting an open / closed state of the roughing valve of FIG. 6.
FIG. 8 is a schematic diagram illustrating an installation state of the first and second sensors of FIG. 7.
9 is a schematic diagram illustrating an installation state of the third to fifth sensors of FIG. 7.
10 is a schematic view showing a system of the prior art.
11 is a block diagram illustrating a control system using a solenoid valve to which an interlock function is added according to an embodiment of the present invention.
12 is a configuration diagram showing another embodiment of the solenoid valve to which the interlock function is added.
13 is a configuration diagram showing still another embodiment of the solenoid valve to which the interlock function is added.

Hereinafter, the configuration of the present invention will be described in detail with reference to Examples.

First, in the following description of the embodiments of the present invention may have the same reference numerals as those of the above-described prior art, which may be the same configuration or a completely different configuration, the symbols described below are solely the embodiment of the present invention Please note that it applies only to the description.

Fig. 11 is a block diagram showing a control system using a solenoid valve to which an interlock function is added according to the first embodiment of the present invention.

Referring to FIG. 11, the control system 100 of the present invention includes a sensor controller 50 including an equipment controller 10, an interlock solenoid valve 30, at least one sensor 51, 53, and It consists of an actuator 70.

Here, the equipment control unit 10 is a control unit installed in a semiconductor device, an automotive electronic system, a special firefighting equipment, etc., and transmits a control signal generated through the operation of the above-mentioned equipment by wired or wireless communication, and is installed at a rear stage. It is an apparatus for selectively receiving the feedback data provided from the.

The interlock solenoid valve 30, which is a core component of the present invention, has a voltage applied to the actuator 70 according to the communication unit 31, the verification unit 33 provided at the rear end of the communication unit 31, and the verification signal of the verification unit 33. It is composed of a driving unit 37 for supplying or releasing the supply and the display unit 35 provided to visually check whether the driving unit 37 is operated.

First, the communication unit 31 is connected to the equipment control unit 10 by a serial communication method and receives an open / close signal (or an electrical signal) of the equipment control unit 10. In addition, the solenoid valve 30 with the interlock function may selectively transmit feedback information to the equipment control unit 10.

The verification unit 33 compares and examines the opening / closing signal transmitted to the communication unit 31 with the separate information input from the sensors 51 and 53 and transmits the verification signal to the driver 37 according to a preloaded program. .

The display unit 35 may be implemented as an LED lamp or the like for displaying an operating state of the driving unit 37. For example, when the driving unit 37 supplies a voltage for operating the actuator 70, the display unit 35 may be turned on. It is advisable to turn the lamp on and vice versa if it is vice versa.

Here, the display unit 35 may be provided integrally with the interlock solenoid valve 30 or may be provided at a separate position.

The driver 37 is a module that supplies a voltage to an actuator 70 such as a valve 71 or an actuator 73 according to the verification signal transmitted from the verification unit 33.

The sensor unit 50 may be classified into a pressure sensor, a temperature sensor, a humidity sensor, various distance sensors, and the like, and various cooking options may be selected according to working conditions such as semiconductor equipment, automotive electronic system, and special fire fighting equipment. Here, the information detected by the sensor unit 50 is transmitted to the verification unit 33.

Here, the verification unit 33 transmits a verification signal under the following conditions.

Ⓐ When the signal transmitted from the sensor unit 50 is suitable for the pre-programmed working condition

The verification unit 33 transmits an opening / closing signal which is a verification signal corresponding to the driving unit 37 according to the opening / closing signal transmitted from the equipment control unit 10.

In other words, when the verification unit 33 transmits a verification signal to the driving unit 37 in the above case, the driving unit 37 supplies a voltage for operating the valve 71 or the actuator 73. As a result, the actuator 70 such as the valve 71 or the actuator 73 is operated in response to the open / close signal of the equipment control unit 10.

Ⓑ When the signal transmitted from the sensor unit 50 does not meet the pre-programmed working condition

The verification unit 33 receives the signal transmitted from the sensor unit 50 and transmits the verification signal to the driving unit 37 by a program in which an operation rule related to the working condition is preloaded, and then the driving unit 35 is a valve. A voltage for operating the 71 or the actuator 73 is supplied. As a result, the actuator 70, such as the valve 71 or the actuator 73, is operated in accordance with a pre-loaded verification signal by the program regardless of the open / close signal of the equipment control unit 10.

Unlike the above case, the verification unit 33 may not transmit any verification signal by a preloaded program. That is, the drive unit 37 does not supply a voltage for operating the valve 71 or the actuator 73 so that the actuator 70 remains in its current state of opening or closing.

12 is a configuration diagram showing another embodiment of the solenoid valve to which the interlock function is added.

11 and 12, the solenoid valve 30a with the interlock function according to the present invention includes a validator 33-1 having a communication unit 31, a plurality of verification units 33 arranged in parallel, and a display unit. It consists of 35 and the drive part 37. As shown in FIG.

First, the communication unit 31 is connected to the equipment control unit 10 by the serial communication method receives the opening and closing signal of the equipment control unit 10. In addition, the feedback information of the solenoid valve 30 with the interlock function is transmitted to the equipment control unit 10.

The verifier 33-1 compares the opening / closing signal transmitted to the communication unit 31 with the separate information received from the sensors 51 and 53, and transmits the verification signal to the driver 37. Here, the reason why the plurality of verification units 33 are provided in parallel is one way to increase the safety factor, and the verification method depends on a preloaded program, and the verifier 33-1 transmits one verification signal.

The display unit 35 may be implemented as an LED lamp or the like for displaying an operating state of the driving unit 37. For example, when the driving unit 37 supplies a voltage for operating the actuator 70, the display unit 35 may be turned on. It is advisable to turn the lamp on and vice versa if it is vice versa.

Here, the display unit 35 may be provided integrally with the interlock solenoid valve 30 or may be provided at a separate position.

The driver 37 is a module that supplies a voltage to an actuator 70 such as a valve 71 or an actuator 73 according to the verification signal transmitted from the verifier 33-1.

The sensor unit 50 may be classified into a pressure sensor, a temperature sensor, a humidity sensor, various distance sensors, and the like, and various cooking options may be selected according to working conditions such as semiconductor equipment, automotive electronic system, and special fire fighting equipment. Here, the information detected by the sensor unit 50 is transmitted to the verifier 33-1.

Here, since the verification signal transfer method of the verifier 33-1 is the same as the embodiment of FIG. 11, detailed description thereof will be omitted.

13 is a configuration diagram showing still another embodiment of the solenoid valve to which the interlock function is added.

11 and 13, the solenoid valve 30b with the interlock function according to the present invention includes a validator 33-2 having a communication unit 31, a plurality of verification units 33 installed in series, and a display unit. It consists of 35 and the drive part 37. As shown in FIG.

First, the communication unit 31 is connected to the equipment control unit 10 by the serial communication method receives the opening and closing signal of the equipment control unit 10. In addition, the feedback information of the solenoid valve 30 with the interlock function is transmitted to the equipment control unit 10.

The verifier 33-2 compares and examines the open / closed signal transmitted to the communication unit 31 with the separate information received from the sensors 51 and 53, and transmits the verification signal to the driver 37. Here, the reason for connecting the plurality of verification units 33 in series is one way to increase the safety factor, and the verification method depends on a preloaded program, and the verifier 33-2 transmits one verification signal.

The display unit 35 may be implemented as an LED lamp or the like for displaying an operating state of the driving unit 37. For example, when the driving unit 37 supplies a voltage for operating the actuator 70, the display unit 35 may be turned on. It is advisable to turn the lamp on and vice versa if it is vice versa.

Here, the display unit 35 may be provided integrally with the interlock solenoid valve 30 or may be provided at a separate position.

The driver 37 is a module for supplying a voltage to an actuator 70 such as a valve 71 or an actuator 73 according to the verification signal transmitted from the verifier 33-2.

The sensor unit 50 may be classified into a pressure sensor, a temperature sensor, a humidity sensor, various distance sensors, and the like, and various cooking options may be selected according to working conditions such as semiconductor equipment, automotive electronic system, and special fire fighting equipment. Here, the information detected by the sensor unit 50 is transmitted to the verifier 33-2.

Here, since the verification signal transfer method of the verifier 33-2 is the same as the embodiment of FIG. 11, a detailed description thereof will be omitted.

Embodiments of the present invention as described above are merely embodiments of the present invention in which the interlock function is applied to the solenoid valve, and the modified embodiments based on the technical idea of the present invention are naturally within the scope of the present invention.

In addition, the solenoid valve to which the interlock function of the present invention is added may be integrally formed with a communication unit, a verification unit, a display unit, a driving unit, etc., and may be modularized to be installed in parallel or in series according to a user's selection. In addition, the display unit may be manufactured integrally with the solenoid valve, may be separately installed as a module, or may be separately installed at a different position apart from the solenoid valve. Here, it is most preferable that the solenoid valve having the interlock function is assembled in the above-described order when the communication unit, the verification unit, the display unit, and the driving unit are manufactured as a module.

In addition, various modifications of the solenoid valve may include a verification unit, a communication unit, a driving unit, or a verification unit, a communication unit, a verification unit, a driving unit, and the like. However, these modified embodiments may be referred to as incomplete inventions that cannot completely solve the problems of the prior art.

10: equipment control unit
30: solenoid valve with interlock function
31: communication unit 33: verification unit
33-1, 33-2: Verifier
35 display unit 37 drive unit
50: sensor 51, 53: sensor
70: actuator 71: valve
73: actuator
100: control system using solenoid valve with interlock function

Claims (16)

A communication unit;
A verification unit provided at a rear end of the communication unit and receiving an electrical signal of the communication unit;
Solenoid valve having an interlock function including a drive unit for supplying or releasing voltage to the actuator in accordance with the verification signal of the verification unit.
The method of claim 1,
The communication unit is connected to a device control unit installed in a semiconductor device, an automotive electronic system, a special fire fighting facility, etc. in a serial communication method, receives an electrical signal from the device control unit, transmits the signal to the verification unit, and selectively transmits feedback information to the device control unit. Solenoid valve with an interlock function, characterized in that.
The method of claim 1,
The solenoid with the interlock function, wherein the verification unit transmits a verification signal to the driving unit by comparing the information sensed by at least one sensor installed in the outside with an electrical signal transmitted from the communication unit by a preloaded program. valve.
The method of claim 1,
The verification unit is a solenoid valve with an interlock function, characterized in that a plurality of installed in parallel to the rear end of the communication unit.
The method of claim 1,
The verification unit is a solenoid valve with an interlock function, characterized in that a plurality of serially installed in the rear end of the communication unit.
The method of claim 1,
Solenoid valve with an interlock function, characterized in that it further comprises a lamp-type display unit for indicating the operation or deactivation state of the drive unit.
The method of claim 1,
The solenoid valve having an interlock function, wherein the communication unit, the verification unit, and the driving unit are integrally formed.
7. The method according to claim 1 or 6,
And the communication unit, the verification unit, the display unit, and the driving unit are integrally formed.
7. The method according to claim 1 or 6,
The solenoid valve having an interlock function, wherein the communication unit, the verification unit, the display unit, and the driving unit are each manufactured by modules and sequentially assembled.
An equipment control unit;
At least one sensor;
At least one actuator;
It receives an electrical signal of the equipment control unit and the sensing information from the sensor to supply or release the voltage for operating the actuator in accordance with a pre-loaded program, and adds an interlock function to selectively transfer feedback information to the equipment control unit. Control system comprising a solenoid valve.
11. The method of claim 10,
And said actuator is a valve or an actuator.
11. The method of claim 10,
The solenoid valve which added the said interlock function,
A communication unit which receives an electrical signal of the equipment control unit and transmits it to the verification unit, and selectively transmits feedback information to the equipment control unit;
A verification unit installed at a rear end of the communication unit and transferring a verification signal to the driving unit by comparing the information detected by the sensor with an electrical signal transmitted from the communication unit by a preloaded program;
And a driver for supplying or releasing voltage to the actuator according to the verification signal of the verification unit.
13. The method of claim 12,
And a plurality of verification units are provided in series at the rear end of the communication unit.
13. The method of claim 12,
And a plurality of verification units are provided in series at the rear end of the communication unit.
13. The method of claim 12,
And a lamp type display unit for indicating the actuation or deactivation state of the driving unit.
The method according to claim 12 or 15,
And the communication unit, the verification unit, the display unit, and the driving unit are each manufactured as modules and sequentially assembled.

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