KR20130109043A - Apparatus and method for grinding end face of glass substrate, and method for manufacturing glass substrate - Google Patents

Abstract

PURPOSE: A device and method for grinding the end surface of a glass substrate and a manufacturing method of a glass substrate are provided to grind a glass substrate in a specific shape by removing the angular portions of the end surface of the glass substrate. CONSTITUTION: A device for grinding the end surface of a glass substrate comprises a primary end surface grinding unit and a secondary end surface grinding unit. The primary and secondary end surface grinding units are successively installed on a glass substrate transfer path. Each of the primary and secondary end surface grinding units has a cylindrical grinding wheel (132) having a groove (133). The opening angle (31) of the groove formed on the grinding wheel of the primary end surface grinding unit is larger than the opening degree of the groove formed on the grinding wheel of the secondary end surface grinding unit.

Description

The end surface grinding apparatus of a glass substrate, the end surface grinding method of a glass substrate, and the manufacturing method of a glass substrate {APPARATUS AND METHOD FOR GRINDING END FACE OF GLASS SUBSTRATE, AND METHOD FOR MANUFACTURING GLASS SUBSTRATE}

This invention relates to the end surface grinding apparatus of a glass substrate, the end surface grinding method of a glass substrate, and the manufacturing method of a glass substrate.

Glass substrates, such as plate glass and a liquid crystal panel, are cut into predetermined | prescribed magnitude | size, and are processed into the glass substrate of a product outer diameter dimension by grinding and chamfering with respect to the four end surfaces.

Grinding processing which grinds and chamfers is carried out by rotating a cylindrical grindstone and conveying a glass substrate, making contact with the end surface of the glass substrate which is a to-be-grinded body to the groove formed along the circumference in the grindstone side surface, according to the shape of a groove. Chamfering and grinding are performed.

In particular, in recent years, in order to increase the productivity of the glass substrate, when a grinding process is performed, a plurality of grindstones are disposed on the conveyance path of the glass substrate, thereby reducing the load of each grindstone and increasing the transfer speed of the glass substrate. There is (for example, patent document 1).

Japanese Patent Laid-Open No. 2006-247768

In the past, when the plurality of grindstones are disposed on the conveyance path of the glass substrate and the glass substrate end face is ground as described above, the grooves formed on the side surfaces of the grindstones have the same shape.

For this reason, when grinding the glass substrate end surface by the grinding wheel of a front end, for example, if the center of the plate thickness direction of a glass substrate end surface shifts from the center position of the grindstone thickness direction of a groove | channel, Even if grinding was performed by the grindstone, the grinding (machining) surface at the front end remained on the glass substrate end surface, and the end surface shape might deviate from the prescribed shape.

Moreover, when it is going to adjust the groove position of a grindstone regularly, since adjustment takes time, the operation rate of an end surface grinding apparatus fell and there existed a problem in productivity.

Moreover, when the grinding | polishing process is performed by the grinding wheel of a front end, when the center of the plate thickness direction of a glass substrate end surface shifts from the center position of the grinding wheel thickness direction of a groove | channel, an angle remains in the end surface of a glass substrate, the grinding wheel of a rear end There was also a problem in that the load on the A was increased and the quality defects were easy to occur.

In view of the problems of the prior art, the present invention provides the front end (primary end face) when the center of the plate thickness direction of the glass substrate end face is subjected to the grinding treatment with a plurality of grindstones on the end face of the glass substrate. In the groove of the grindstone of a grinding part, even if it shifts from the center position of a grindstone thickness direction, each part of a glass substrate end surface is removed, and providing the end surface grinding apparatus of the glass substrate which can be ground-processed to a predetermined shape. The purpose.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, according to one viewpoint of this invention, it has a primary end surface grinding part and a secondary end surface grinding part in order from the upstream of a glass substrate conveyance path | route, and the said primary end surface grinding part and the said The secondary end surface grinding portion is each provided with a cylindrical grindstone having grooves formed in the circumferential direction on the side surface, and the cross-sectional shape of the groove when the cylindrical grindstone is cut from the plane including the central axis of the grindstone. Silver has a shape gradually expanded from the bottom side of the groove to the grindstone surface side, the opening angle of the groove is a groove formed in the grindstone for the end surface grinding of the secondary end surface grinding portion of the groove formed in the grindstone of the primary end surface grinding portion The glass substrate end surface grinding apparatus which becomes larger still, and the bottom part of the groove | channel formed in the grindstone of the said primary end surface grinding part is curved in convex toward the bottom side. Is provided.

According to the glass substrate end surface grinding apparatus of this invention, even if the center of the plate | board thickness direction of a glass substrate end surface shifts from the center position of the grindstone thickness direction of a groove in a primary end surface grinding part, it is secondary. In an end surface grinding part, the grinding process of the end surface of a glass substrate can be performed, without leaving the grinding surface ground by the primary end surface grinding part. For this reason, it becomes possible to improve a yield compared with the prior art.

In addition, since grinding can be performed without leaving each part of a glass substrate end surface in a primary end surface grinding part, the load on a secondary end surface grinding part can be reduced and a yield of a product can also be improved also in this point. Done.

In addition, since the position adjustment of each grindstone of the primary end surface grinding part and the secondary end surface grinding part does not have to be performed with high precision as in the prior art, the time required for the position adjustment can be shortened, so that the end surface grinding It is possible to increase the operation rate of the device.

It is a side view of the end surface grinding apparatus of the glass substrate in 1st Embodiment of this invention.
It is a top view of the end surface grinding apparatus of the glass substrate in 1st Embodiment of this invention.
It is a side view of the grindstone provided in the end surface grinding part in the end surface grinding apparatus of the glass substrate in 1st Embodiment of this invention.
It is explanatory drawing of the cross-sectional shape of the groove | channel formed in the grindstone side surface in 1st Embodiment of this invention.
It is explanatory drawing of the cross-sectional shape of the groove | channel formed in the grindstone side surface in 1st Embodiment of this invention.
It is explanatory drawing of the cross-sectional shape of the groove | channel formed in the grindstone side surface in 1st Embodiment of this invention.
It is explanatory drawing of the cross-sectional shape of the groove | channel formed in the grindstone side surface in 1st Embodiment of this invention.
It is explanatory drawing of the cross-sectional shape of the groove | channel formed in the grindstone side surface in Example 1 of this invention.
It is explanatory drawing of the cross-sectional shape of the groove | channel formed in the grindstone side surface in Example 1 of this invention.
It is explanatory drawing of the grinding state of the glass substrate end surface in Example 1 of this invention.
It is explanatory drawing of the grinding state of the glass substrate end surface in Example 1 of this invention.
It is explanatory drawing of the cross-sectional shape of the groove | channel formed in the grindstone side surface in Example 2 of this invention.
It is explanatory drawing of the cross-sectional shape of the groove | channel formed in the grindstone side surface in Example 2 of this invention.
It is explanatory drawing of the grinding state of the glass substrate end surface in Example 2 of this invention.
It is explanatory drawing of the grinding state of the glass substrate end surface in Example 2 of this invention.
It is explanatory drawing of the grinding state of the glass substrate end surface in Example 3 of this invention.
It is explanatory drawing of the grinding state of the glass substrate end surface in Example 3 of this invention.
It is explanatory drawing of the cross-sectional shape of the groove | channel formed in the grindstone side surface in the comparative example 1. FIG.
It is explanatory drawing of the grinding state of the glass substrate end surface in the comparative example 1. FIG.
It is explanatory drawing of the grinding state of the glass substrate end surface in the comparative example 1. FIG.
It is explanatory drawing of the grinding state of the glass substrate end surface in the comparative example 2. FIG.
It is explanatory drawing of the grinding state of the glass substrate end surface in the comparative example 2. FIG.
It is explanatory drawing of the cross-sectional shape of the groove | channel formed in the grindstone side surface in the comparative example 3. FIG.
It is explanatory drawing of the cross-sectional shape of the groove | channel formed in the grindstone side surface in the comparative example 3. FIG.
It is explanatory drawing of the grinding state of the glass substrate end surface in the comparative example 3. FIG.
It is explanatory drawing of the grinding state of the glass substrate end surface in the comparative example 3. FIG.
It is explanatory drawing of the cross-sectional shape of the groove | channel formed in the grindstone side surface in the comparative example 4. FIG.
It is explanatory drawing of the cross-sectional shape of the groove | channel formed in the grindstone side surface in the comparative example 4. FIG.
It is explanatory drawing of the grinding state of the glass substrate end surface in the comparative example 4. FIG.
It is explanatory drawing of the grinding state of the glass substrate end surface in the comparative example 4. FIG.
It is explanatory drawing of the grinding state of the glass substrate end surface in the comparative example 4. FIG.

EMBODIMENT OF THE INVENTION Hereinafter, although the form for implementing this invention is demonstrated with reference to drawings, this invention is not limited to the following embodiment, A various deformation | transformation and substitution are given to the following embodiment, without deviating from the range of this invention. Can be added.

[First Embodiment]

In this embodiment, the end surface grinding apparatus of the glass substrate of this invention is demonstrated.

First, the structural example of the end surface grinding apparatus of a glass substrate is demonstrated using FIG. 1A, FIG. 1B, FIG.

1A and 1B are schematic views of the end surface grinding apparatus 10 of a glass substrate, FIG. 1A is a side view, and FIG. 1B is a top view.

The rectangular workpiece W (glass substrate) to be ground is detachably held on the holding means 11 in a state where an end face is exposed from the holding means 11.

Here, it does not specifically limit about the material of the workpiece | work W (glass substrate), a manufacturing method, and plate | board thickness, Various glass substrates can be used. For example, as a material (material) of the work W, an alkali free glass, soda-lime glass, quartz glass, etc. which do not substantially contain the alkali metal oxide for glass substrates for liquid crystal displays can be used.

Moreover, it is not limited also about the shaping | molding method of the glass substrate used as a workpiece | work W, The glass substrate shape | molded by the general method, for example, the glass shape | molded by the float method, the fusion downdraw method, the slit downdraw method, the reedlow method, etc. Substrates can be used.

The plate thickness of the workpiece W (glass substrate) is not limited, and the plate thickness of the workpiece W and the size and shape of the groove formed on the side surface of the grindstone may be appropriate. However, when too thick, it becomes difficult to convey because of the load of a glass substrate, and when too thin, it becomes easy to be damaged when conveying a glass substrate, It is preferable that the board thickness of the workpiece | work W is 0.3 mm or more and 6 mm or less, and 0.3 It is more preferable that it is mm or more and 3 mm or less.

Next, the holding means 11 is arrange | positioned on the traveling body S which can move to the left-right direction (arrow direction in FIG. 1A, FIG. 1B) among FIG. 1A, FIG. It is comprised so that the workpiece | work W can be conveyed in the left-right direction among FIG. 1A and FIG. 1B through it. In addition, the conveyance mechanism 12 can be comprised so that the conveyance speed (feed rate) of the workpiece | work W can be controlled by the controller (control part) which is not shown in figure.

The workpiece | work W held on the holding means 11 is conveyed by the conveyance mechanism 12 to the position where the primary end surface grinding part 13 was provided, and grinding and Chamfering processing (hereinafter also referred to simply as "grinding processing") is performed. Subsequently, it is conveyed to the position in which the secondary end surface grinding part 23 was provided, and similarly, the grinding process is performed with respect to the both end surface parts of the workpiece | work W.

In FIG. 1B, the example which arrange | positioned the primary end surface grinding part 13 and the secondary end surface grinding part 23 one by one to the left-right (orthogonal direction with respect to the conveyance direction of the workpiece | work W) of the conveyance mechanism 12 is shown. However, in FIG. 1A, only one is described so that a structure may be easily understood), In order to perform mirror surface finishing with respect to the end surface of the workpiece | work W, you may further provide an end surface grinding | polishing part to the downstream side of a workpiece conveyance direction.

In addition, although the example which arrange | positioned only the primary end surface grinding part 13 and the secondary end surface grinding part 23 regarding the end surface of two sides among the workpiece | work in FIG. 1A and FIG. 1B is described, It can also be comprised so that a grinding process may be performed. For example, you may provide the swivel which changes the direction of the workpiece | work W upstream or downstream of the conveyance direction of a workpiece | work, and similarly, the primary end surface grinding part and the secondary end surface grinding part about 2 remaining sides.

As shown in FIG. 1B, the primary end surface grinding portion 13 and the secondary end surface grinding portion 23 are grindstones for cylindrical end surface grinding (hereinafter, simply referred to as “grinding stones”) in the respective interiors. 132 and 232 and the motors 131 and 231 which rotate-drive the grindstone 132 and 232 at the time of a grinding process using the central axis of the grindstone 132 and 232 as a rotating shaft are arrange | positioned. In addition, during polishing, the used coolant is introduced through the coolant supply mechanisms 14 and 24 for supplying the coolant (coolant) around the contact portion between the grindstones 132 and 232 and the workpiece W. The suction mechanisms 15 and 25 can also be connected to each end surface grinding part.

The kind of grindstone can be selected according to the grinding amount (or processing amount) required. Moreover, also about the roughness of a grindstone, it can select according to the ratio of the grinding amount calculated | required by a primary end surface grinding part, a secondary end surface grinding part, the surface roughness of the finishing surface of a glass substrate, etc. For example, as long as the grinding amount in a primary end surface grinding part and a secondary end surface grinding part is about the same, the number of grindstones (roughness) of both may be made the same. In the manufacturing process of a glass substrate, generally, the grinding (grinding) surface is finished to a smooth surface (mirror surface) using the grindstone having a large (fine grained) number of grindstones as it goes to the downstream side of the glass substrate processing process. Is taking. For this reason, also in this invention, the number of grindstones for grinding of a primary end surface grinding part can be made smaller than the number of grindstones of a secondary end surface grinding part. That is, the grindstone of the secondary end surface grinding part is finer than the primary end surface grinding part.

In the case of the present invention, even when the number of grindstones is selected as described above, the grinding can be performed in the secondary end surface grinding portion without leaving the grinding surface formed in the primary end surface grinding portion, as described later. As such, it can be finished without leaving a rough surface on a part.

As can be seen from the side view of the grindstone shown in FIG. 2, grooves 133 and 233 are formed along the circumferential direction on the side surfaces (circumferential surfaces) of the grindstones 132 and 232, and the end faces of the workpiece W are formed. The grinding processing of the end surface of the workpiece | work W is performed by conveying the workpiece | work W, contacting this groove | channel. At this time, the chamfer of the end surface of the workpiece | work W is performed according to the shape of a groove | channel. In FIG. 2, an example in which three grooves 133 and 233 are formed at predetermined intervals in the central axis direction (thickness direction of the grindstone) is shown. However, this is a groove according to the grinding amount (or processing amount) without replacing the grindstone. In order to change the surface and perform grinding. The number of grooves is not limited and can be selected according to the size of the grindstone, the groove, and the like.

Next, the shape of the groove formed on the side of the grindstone will be described with reference to FIGS. 3A to 3D.

3A shows an example of a cross-sectional shape of the groove 133 formed on the side surface of the grindstone 132 of the primary end surface grinding portion, and FIGS. 3B to 3D illustrate grooves formed on the side surface of the grindstone 232 of the secondary end surface grinding portion. Examples of the cross-sectional shape of 233 are shown respectively.

The cross-sectional shape of the groove here means the cross-sectional shape of the groove when the cylindrical grindstone is cut (half the grindstone) from the plane (the plane orthogonal to the tangent on the side of the grindstone) including the central axis of the grindstone. have. In addition, a central axis means the line (axis) which connects the center of the circle | round | yen of the upper surface and bottom of a cylindrical grindstone.

In addition, the dashed-dotted line shown to each groove | channel in FIG. 3A-3D has shown the center position (center part) when it sees from the width direction (thickness direction of a grindstone) of the groove | channel in the cross-sectional shape of each groove | channel. In other drawings described with respect to the groove, the center position is indicated by the dashed-dotted line in the same manner.

As apparent from the relationship in Fig. 2, the upper side with the opening is the side of the grindstone surface (the surface of the grindstone side part), and the bottom side of the groove is arranged at the center side of the grindstone.

As shown in Figs. 3A to 3D, in any of the primary and secondary end face grinding portions, the cross-sectional shape of the groove is gradually enlarged from the bottom side of the groove to the grindstone surface (surface of the grindstone) (end) This perforated shape).

This is for chamfering a glass substrate, and the edge part of a glass substrate is inserted in the groove of a grindstone, and the chamfering of each part of a glass substrate edge part is performed according to the shape of the groove formed in the grindstone.

And the opening angle of the groove (cross-sectional shape) is larger in the groove formed in the grindstone of the primary end surface grinding part than the groove formed in the grindstone for the end surface grinding of the secondary end surface grinding part.

Here, the opening angle of the groove is an angle represented by 31 in Fig. 3A and 32 in Figs. 3B to 3D, and is an angle formed between both side portions of the groove.

Since the opening angle satisfies the above relationship, for example, the inclination angle of the groove side surface of the primary end surface grinding portion is gentle compared with that of the secondary end surface grinding portion when comparing Figs. 3A and 3B. For this reason, compared with the prior art in which the groove shape formed in the grindstone of the primary end surface grinding part and the secondary end surface grinding part is the same, compared with the prior art, the processing surface which the primary end surface grinding part gave to the end surface of a glass substrate was secondary-end surface grinding. It becomes possible to remove more reliably from a part.

Moreover, the bottom part of the groove | channel (cross-sectional shape) formed in the grindstone of the said primary end surface grinding part becomes a curve which convex toward the bottom part side. That is, the cross-sectional shape of the groove is a concave curve, and as shown in FIG. 3A, the groove formed in the grindstone of the primary end surface grinding portion can be, for example, a parabolic shape, a semicircle shape, or the like.

The curvature radius of the curve which is convex toward the bottom side formed in the bottom of such a groove | channel is not specifically limited, It can select suitably. For example, as shown in FIG. 3C, when the bottom of the groove is also convexly curved toward the bottom side, the bottom of the groove of the grindstone of the secondary end surface grinding portion is also curved. It is preferable that the radius of curvature of the curve of the bottom of the groove of the grindstone of the primary end face grinding portion is larger than the radius of curvature of.

By making the groove of the grindstone of the primary end surface grinding part the said shape, even if the center of the plate thickness direction of the workpiece | work W end surface shifted from the center position of the grindstone thickness direction of a groove when grinding in a primary end surface grinding part, It becomes possible to reliably remove the corner part of the end surface of the workpiece | work W.

About the cross-sectional shape of the groove formed in the grindstone of the secondary end surface grinding part, what is necessary is just to satisfy | fill the said requirement, and it is not specifically limited. It is preferable to select the shape and size of the groove for the secondary end surface grinding portion so as to be in the shape required for the product or the shape close to it.

Specifically, for example, the bottom of the groove may be flattened as shown in FIG. 3B.

In addition, as shown in Fig. 3C, the convex curve, i.e., the shape of the groove, may be parabolic, semicircular, or the like as the groove of the grindstone of the primary end surface grinding portion.

And as shown in FIG. 3D, it is preferable that the cross-sectional shape of the groove | channel formed in the grindstone of the secondary end surface grinding part is a shape in which the notch part 33 was formed in the opening end part.

When grinding the end surface of the workpiece | work W as mentioned above, grinding is performed, supplying coolant around the part which the grindstone and the workpiece | work W contact, but the groove formed in the grindstone of the secondary end surface grinding part especially has an opening angle. Since the coolant is small, the coolant does not sufficiently enter the grooves, which may cause haze. For this reason, in order to make it easy to introduce a coolant into the groove formed in the grindstone of a secondary end surface grinding part, it is preferable to form a notch in the opening end part of a groove.

It does not specifically limit as a magnitude | size of a notch, It can select in consideration of the width | variety between a groove | channel, the opening angle of the groove | channel formed in the grindstone of a secondary end surface grinding part, the board thickness of the workpiece | work W, etc. For example, it is preferable that the width | variety 34 of the opening part of the groove | channel in a notch upper end part is 1.5 times or more and 2.5 times or less with respect to the plate | board thickness of the workpiece | work W, and it is more preferable that it is 1.8 times or more and 2.1 times or less. This is because, since the size of the cutout portion has such a range, in particular, the coolant can be easily introduced into the groove, and the generation of haze can be suppressed low.

Although the notch may be formed only at one end of the opening of the groove, it is more preferable to form at both ends of the opening of the groove as shown in FIG. 3D because the coolant easily enters the groove uniformly.

It does not restrict | limit about the specific shape of a notch, What is necessary is just the shape which becomes easy to enter a coolant. For example, an oblique cutout may be formed in the groove as shown in FIG. 3D. In this case, the inclination angle of the side surface portion of the groove changes in two stages, and when the grindstone surface (the surface of the side surface of the grindstone) is used as a reference, the inclination angle of the upper end side (cutout portion) of the groove is larger than the inclination angle of the bottom side of the groove. It is preferable that it is comprised so that it may be gentle. In this case, the opening angle of the groove formed in the grindstone of the primary end surface grinding portion is configured to be larger than the opening angle of the groove on the bottom side of the two inclination angles of the groove formed in the grindstone of the secondary end surface grinding portion.

Here, although forming a notch in the groove of the grindstone of a secondary end surface grinding part was demonstrated, you may similarly form the notch in order to make it easy to introduce a coolant into the groove of the grindstone of a primary end surface grinding part.

According to the end surface grinding apparatus of the glass substrate of this invention demonstrated above, the center of the plate thickness direction of the workpiece | work W (glass substrate) end surface in a primary end surface grinding part shifts from the center position of the grindstone thickness direction of a groove, and grinding Even if the processing is performed, the range in which the grinding processing of the end surface of the work can be performed without leaving the grinding surface formed at the primary end surface grinding portion in the secondary end surface grinding portion (that is, in the primary end surface grinding portion) Permissible range of the deviation width of the center of the plate | board thickness direction of a workpiece | work end surface direction, and the center position of the grindstone thickness direction of a groove | channel.

In addition, since grinding can be performed without leaving each part of the work end surface in the primary end surface grinding portion, the load on the secondary end surface grinding portion can be reduced. For these reasons, it becomes possible to improve the yield of a product.

In addition, since the work end surface can be ground to a predetermined shape without performing the position adjustment of each grindstone of the primary end surface grinding portion and the secondary end surface grinding portion as precisely as in the prior art as described above, The time required for adjusting the position of the grindstone can be shortened. For this reason, it becomes possible to raise the operation rate of an end surface grinding apparatus.

[Second Embodiment]

In this embodiment, the end surface grinding method of the glass substrate of this invention is demonstrated.

The end surface grinding method of the glass substrate of this invention is an end surface grinding method of the glass substrate which grinds in a secondary end surface grinding part after grinding in the primary end surface grinding part with respect to the end surface of a glass substrate, The primary end surface grinding portion and the secondary end surface grinding portion are each provided with a cylindrical grindstone having grooves formed in the circumferential direction on the side surface thereof, and the cylindrical grindstone includes the central axis of the grindstone. The cross-sectional shape of the groove in the case of cutting at the surface has a shape gradually expanded from the bottom side of the groove to the grindstone surface side, and the opening angle of the groove is a groove formed in the grindstone of the primary end surface grinding portion. It is larger than the groove formed in the grindstone of the end surface grinding part, The bottom part of the groove formed in the grindstone of the said primary end surface grinding part is a convex curve to the bottom side, It is characterized by the above-mentioned. Lee is an end face grinding method of the substrate.

According to the end surface grinding method of the glass substrate of this invention, even if the center of the plate | board thickness direction of the workpiece | work W end surface shifts from the center position of the grindstone thickness direction of a groove in a primary end surface grinding part, 2 The range where the grinding processing of the end surface of the work can be performed without leaving the grinding surface formed at the primary end surface grinding portion in the primary end surface grinding portion (that is, the plate thickness of the work end surface at the primary end surface grinding portion). Permissible range of the shift width between the center of the direction and the center position in the grindstone thickness direction of the groove).

Moreover, since grinding can be performed without leaving each part of a glass substrate end surface in a primary end surface grinding part, the load to a secondary end surface grinding part can be reduced. For these reasons, it becomes possible to improve the yield of a product.

In addition, since the grinding | polishing process of a glass substrate end surface can be performed to a predetermined shape, even if the position adjustment of each grindstone of a primary end surface grinding part and a secondary end surface grinding part is not performed with high precision as a prior art as mentioned above. Therefore, the time required for adjusting the position of the grindstone can be shortened. For this reason, it becomes possible to raise the operation rate of an end surface grinding apparatus.

The grinding method of the said glass substrate end surface can be implemented by the end surface grinding apparatus of the glass substrate demonstrated in 1st Embodiment, for example. For this reason, since the structure of an apparatus overlaps with 1st Embodiment, it abbreviate | omits here, It is preferable to make it especially smaller than the number of grindstones of the primary end surface grinding part, and the number of grindstones of a secondary end surface grinding part. That is, it is preferable to make the grindstone of the secondary end surface grinding part finer than a primary end surface grinding part.

Even if the number of grindstones is selected as described above, the grinding can be performed at the secondary end surface grinding portion without leaving the grinding surface formed at the primary end surface grinding portion, and the surface has a rough surface in part as in the prior art. This is because you can finish without leaving. Moreover, since it becomes possible to ensure sufficient grinding amount (processing amount) in a primary end surface grinding part and to finish the surface of the end surface of a glass substrate in a secondary end surface grinding part by setting it as such a structure, The efficiency can be improved.

In addition, as described in the first embodiment, the number of grindstones can be selected according to the amount of grinding in the primary end surface grinding portion and the secondary end surface grinding portion, and for example, the grindstone of the same number can also be used. .

Moreover, it is preferable that especially the cross-sectional shape of the groove | channel formed in the grindstone of the secondary end surface grinding part is a shape in which the notch part 33 was formed in the opening end part as shown in FIG. 3D.

Also, as described in the first embodiment, when grinding the end face of the work W (glass substrate), the grinding is performed while supplying a coolant around the grinding part of the grinding wheel, but in particular, the grinding wheel of the secondary end surface grinding part Since the groove formed in the groove has a small opening angle, the coolant does not sufficiently enter the groove, which may cause haze. For this reason, it is preferable to form a notch in the opening end part of a groove | channel so that a coolant can be easily introduce | transduced into the groove | channel formed in the grindstone of the secondary end surface grinding part.

It does not specifically limit as the magnitude | size of the notch 33, It can select in consideration of the width | variety between a groove | channel, the opening angle of the groove | channel formed in the grindstone of a secondary end surface grinding part, the board thickness of the workpiece | work W, etc. For example, it is preferable that the width | variety 34 of the opening part of a groove | channel is 1.5 times or more and 2.5 times or less with respect to the plate | board thickness of the workpiece | work W, and it is more preferable that it is 1.8 times or more and 2.1 times or less.

Although the notch may be formed only at one end of the opening, it is preferable to form at both ends of the opening as shown in FIG. 3D because the coolant easily enters uniformly.

It does not restrict | limit about the specific shape of a notch, What is necessary is just the shape which becomes easy to enter a coolant. For example, an oblique cutout may be formed in the groove as shown in FIG. 3D. In this case, the inclination angle of the side surface portion of the groove is changed in two stages, and when the grindstone surface (the surface of the side surface of the grindstone) is used as a reference, the inclination angle of the upper end side (cutout portion) of the groove is greater than the inclination angle of the bottom side of the groove. It is preferable that it is comprised so that it may be gentle. In this case, the opening angle of the groove formed in the grindstone of the primary end surface grinding portion is configured to be larger than the opening angle of the groove on the bottom side of the two inclination angles of the groove formed in the grindstone of the secondary end surface grinding portion.

Here, although forming a notch in the groove of the grindstone of a secondary end surface grinding part was demonstrated, you may similarly form the notch in order to make it easy to introduce a coolant into the groove of the grindstone of a primary end surface grinding part.

And the end surface grinding method of the glass substrate demonstrated in this embodiment can be preferably applied to the end surface grinding process of the glass substrate in the manufacturing method of a glass substrate. That is, it can be set as the manufacturing method of the glass substrate using the end surface grinding method of the glass substrate demonstrated in 2nd Embodiment.

According to the manufacturing method of such a glass substrate, in the end surface grinding process of a glass substrate, in the primary end surface grinding part, the center of the plate | board thickness direction of the workpiece | work W end surface shifts from the center position of the grindstone thickness direction of a groove, and grinds. Even if the processing is performed, the range in which the grinding processing of the end surface of the work can be performed without leaving the grinding surface formed at the primary end surface grinding portion in the secondary end surface grinding portion (that is, in the primary end surface grinding portion) Permissible range of the deviation width of the center of the plate | board thickness direction of a workpiece | work end surface direction, and the center position of the grindstone thickness direction of a groove | channel.

Moreover, since grinding can be performed without leaving each part of a glass substrate end surface in a primary end surface grinding part, the load to a secondary end surface grinding part can be reduced.

In addition, since the grinding | polishing process of a glass substrate end surface can be performed to a predetermined shape, even if the position adjustment of each grindstone of a primary end surface grinding part and a secondary end surface grinding part is not performed with high precision as a prior art as mentioned above. Therefore, the time required for adjusting the position of the grindstone can be shortened.

For this reason, according to the manufacturing method of such a glass substrate, since the incidence rate of a defective product can be reduced in an end surface grinding process, it becomes possible to improve the yield of a product. Moreover, since the time required for adjustment of an end surface grinding apparatus becomes smaller than before, an operation rate can be raised and it becomes possible to raise productivity of the whole manufacturing process.

Example

Although a specific Example and a comparative example are given to the following and demonstrated, this invention is not limited to these Examples.

Example 1

In the end surface grinding apparatus of the glass substrate shown in FIG. 1, as a grindstone of a primary end surface grinding part and a secondary end surface grinding part, the side surface of a primary end surface grinding part and a secondary end surface grinding part is respectively shown in FIG. The glass substrate end surface was ground using the cylindrical grindstone in which the groove | channel of the shape shown in FIG. 4B was formed, respectively.

The groove formed in the grindstone of the primary end surface grinding portion gradually extends from the bottom side of the groove to the grindstone surface (surface of the grindstone side portion) as shown in Fig. 4A, and the bottom of the groove has a radius of curvature 42 of 0.5 mm. It is a convex curve on the bottom side. In addition, the opening angle 41 of the groove was 75 degrees.

And the groove formed in the grindstone of the secondary end surface grinding part is gradually expanding from the bottom side of the groove to the grindstone surface (surface of the grindstone side part) side as shown in FIG. 4B, and has the shape in which the flat part was formed in the bottom face of the groove. . The width 43 of the flat part of the bottom face was made into 32% of the plate | board thickness of the glass substrate which is grinding object, and the opening angle 44 of the groove | channel formed in the grindstone of the secondary end surface grinding part was 52 degrees. In addition, the notch 46 was formed in the upper end of the groove. Moreover, the opening angle 45 in the notch of the grindstone of a secondary end surface grinding part is 80 degree | times.

And as shown in FIG. 4C, the center (henceforth simply "the center of a glass substrate end surface") of the glass substrate end surface in a primary end surface grinding part is a grindstone of the groove of a grindstone. The grinding | polishing process of the glass substrate end surface was performed in the state shifted to the left side in FIG. 4C from the center position (henceforth simply a "center position of a groove | channel") of the thickness direction of the. In addition, in FIG. 4C, the position of the glass plate in the case where the center of the glass plate end surface exists in the center position of the groove of a grindstone is shown by the dotted line. The shift | offset width 47 from the case where the center of a glass substrate end surface exists in the center position of a groove | channel was made into 14% of the plate | board thickness of a glass substrate. As can be seen from FIG. 4C, in spite of the center of the glass substrate end face being shifted from the center position of the groove, the entire surface of the end face portion of the glass substrate is ground as shown by the diagonal lines in accordance with the shape of the groove, and the glass substrate Each part of is also ground.

Subsequently, as shown in FIG. 4D, the grinding process was performed by the secondary end surface grinding part so that it might become a predetermined grinding amount 48 with respect to the glass substrate processed by the primary end surface grinding part. At this time, the grinding process was performed in the state which the center position of the groove of a grindstone coincides with the center of the glass substrate end surface. In FIG. 4D, the portion 49 indicated by diagonal lines is ground and removed at the secondary end surface grinding portion. That is, even when the center of a glass substrate end surface and the center position of the groove of the grindstone of a primary end surface grinding part do not correspond, all the grinding surfaces formed in the primary end surface grinding part are polished without leaving in a secondary end surface grinding part. I could confirm that I could.

[Example 2]

In the present Example, the groove formed in the side surface of the grindstone of the secondary end surface grinding part was performed similarly to Example 1 except having made into the parabolic groove similarly to the grindstone of the primary end surface grinding part.

Specifically, the groove formed in the grindstone of the primary end surface grinding portion has the same shape as in the first embodiment as shown in FIG. 5A, and is gradually expanded from the bottom side of the groove to the grindstone surface (surface of the grindstone side). The bottom of the groove has a convex curve toward the bottom of which the curvature radius 52 is 0.5 mm. In addition, the opening angle 51 of the groove was 75 degrees.

The groove formed in the grindstone of the secondary end surface grinding portion gradually extends from the bottom side of the groove to the grindstone surface (surface of the grindstone side portion) as shown in Fig. 5B, and the bottom of the groove has a radius of curvature 54 of 0.356 mm. It was a convex curve at the bottom side, and the opening angle 53 of the groove was 60 degrees.

And as shown in FIG. 5C, in the primary end surface grinding part, the grinding process of the glass substrate end surface is performed in the state which shifted the center of the glass substrate end surface to the left side in FIG. 5C from the center position of the groove of a grindstone. Done. In addition, in FIG. 5C, the position of the glass plate in the case where the center of the glass plate end surface is in the center position of the groove of a grindstone is shown by the dotted line. The shift | offset width 55 from the case where the center of a glass substrate end surface exists in the center position of a groove | channel was made into 14% of the plate | board thickness of a glass substrate. As can be seen from FIG. 5C, in the present embodiment, even though the center of the end surface of the glass substrate is shifted from the center position of the groove, the entire end surface portion is ground as shown by the diagonal lines in accordance with the shape of the groove, Each part of a glass substrate is also ground.

Subsequently, as illustrated in FIG. 5D, the glass substrate subjected to the grinding processing at the primary end surface grinding portion was subjected to the grinding processing at the secondary end surface grinding portion so as to have a predetermined amount of grinding 56. At this time, the grinding process was performed in the state which the groove center position of a grindstone coincides with the center of the glass substrate end surface. In FIG. 5D, the portion 57 indicated by diagonal lines is ground and removed at the secondary end surface grinding portion. That is, even when the center of a glass substrate end surface and the center position of the groove of the grindstone of a primary end surface grinding part do not correspond, even in this embodiment, all the grinding surfaces formed in the primary end surface grinding part are secondary end surface grinding parts. It could be confirmed that it can be polished without leaving in.

[Example 3]

In the present embodiment, as the grindstone of the primary end face grinding portion and the grindstone of the secondary end face grinding portion, the grindstone having the same groove as that of Example 2 was used (that is, the grindstone of the primary end face grinding portion is The grindstone of the secondary end surface grinding part used the grindstone in which the groove of FIG. 5B was formed).

And as shown in FIG. 6A, the grinding process of a glass substrate end surface is performed in the state which shifted the center of the glass substrate end surface to the left side in FIG. 6A from the center position of the groove of a grindstone in a primary end surface grinding part. Done. In addition, in FIG. 6A, the position of the glass plate in the case where the center of the glass plate end surface is in the center position of the groove of a grindstone is shown by the dotted line. In this case, the shift width 61 from the case where the center of the glass substrate end face is at the center position of the groove was 21% of the plate thickness. As can be seen from FIG. 6A, although the glass substrate end face is shifted from the center position of the groove, the entire end surface part surface is ground as shown by the diagonal line in accordance with the shape of the groove, and the respective parts of the glass substrate are also ground. It is.

Subsequently, as shown in FIG. 6B, the grinding process was performed by the secondary end surface grinding part so that it might become the predetermined grinding amount 62 with respect to the glass substrate processed by the primary end surface grinding part. At this time, the grinding process was performed in the state which the center position of the groove of a grindstone coincides with the center of the glass substrate end surface. In FIG. 6B, the portion 63 indicated by an oblique line is ground and removed at the secondary end surface grinding portion. That is, even when the center of a glass substrate end surface and the center position of the groove of the grindstone of a primary end surface grinding part do not correspond, all the grinding surfaces formed in the primary end surface grinding part are polished without leaving in a secondary end surface grinding part. I could confirm that I could.

Comparative Example 1

In this comparative example, the glass substrate end surface was ground similarly to Example 1 using the end surface grinding apparatus of the glass substrate shown in FIG. As a grindstone of the primary end surface grinding part and the secondary end surface grinding part, the grinding process of the glass substrate end surface was performed using the grindstone in which the groove of the shape shown in FIG. 7A was formed in the side surface of the grindstone, respectively.

The groove formed in the grindstone of the primary end face grinding portion and the secondary end face grinding portion gradually extends from the bottom side of the groove to the grindstone surface (surface of the grindstone side), as shown in FIG. 7A, and has a flat portion formed on the bottom. Have In addition, the width 71 of the flat part of the bottom face was 32% of the plate | board thickness of a glass substrate, and the opening angle 72 of the groove | channel was made into 52 degree | times.

And as shown in FIG. 7B, the glass substrate end surface was ground in the state which shifted to the left side in FIG. 7B from the center position of the groove of a grindstone in the primary end surface grinding part. In addition, in FIG. 7B, the position of the glass plate in the case where the center of the glass plate end surface is in the center position of the groove of a grindstone is shown by the dotted line. The shift | offset width 73 from the case where the center of a glass substrate end surface exists in the center position of a groove | channel was made into 14% of plate | board thickness.

In this case, as can be seen from FIG. 7B, the end face portion of the glass substrate is ground as shown by the diagonal lines in accordance with the shape of the groove, and the respective parts of the glass substrate are also ground.

Subsequently, as shown in FIG. 7C, the grinding | polishing process was performed by the secondary end surface grinding part so that it might become a predetermined grinding amount 74 with respect to the glass substrate grinding-processed by the primary end surface grinding part. Grinding amount 74 was made to be the same amount as the grinding amount 48 of Example 1, and the grinding process was performed in the state which the center position of the groove of a grindstone coincides with the center of the glass substrate end surface. In FIG. 7C, a portion 75 indicated by an oblique line is ground and removed at the secondary end surface grinding portion. However, in this amount of grinding, the portion indicated by 76 of the end faces of the glass substrate did not come into contact with the grooves of the grindstone, and thus could not be polished, and the grinding surface formed at the primary end surface grinding portion remained.

Comparative Example 2

In this comparative example, as a grindstone of a primary end surface grinding part and a grindstone of a secondary end surface grinding part, the grindstone in which the groove same as the groove | channel formed in the secondary end surface grinding part of Example 2 was formed (that is, a primary end The grindstone of the grinding | polishing part of a surface and a secondary end surface grinding part used the grindstone in which the groove of FIG. 5B was formed).

And as shown in FIG. 8A, in the primary end surface grinding part, the grinding process of the glass substrate end surface is performed in the state which the center of the glass substrate end surface shifted to the left side in FIG. 8A from the center position of the groove of a grindstone. Done. In addition, in FIG. 8A, the position of the glass plate in the case where the center of the glass plate end surface is in the center position of the groove of a grindstone is shown by the dotted line. In this case, the shift | deviation width 81 from the case where the center of a glass substrate is in the center position of the groove of a grindstone was 14% of plate | board thickness. As can be seen from FIG. 8A, the glass substrate end face is ground in accordance with the shape of the groove, and the entire end face portion surface is ground as shown by an oblique line, and the respective parts of the glass substrate are also ground.

Subsequently, as shown in FIG. 8B, the grinding | polishing process was performed by the secondary end surface grinding part so that it might become the predetermined grinding amount 82 with respect to the glass substrate grinding-processed by the primary end surface grinding part. The amount of grinding 82 was set to be equal to the amount of grinding 56 of Example 2, and the grinding processing was performed in a state where the center position of the groove of the grindstone coincided with the center of the glass substrate end face. In FIG. 8B, the portion 83 indicated by diagonal lines is ground and removed at the secondary end surface grinding portion. However, in this amount of grinding, the portion indicated by 84 of the end faces of the glass substrate was not in contact with the grooves of the grindstone, and thus could not be polished, and the grinding surface formed at the primary end surface grinding portion remained.

[Comparative Example 3]

In this comparative example, grinding of a glass substrate end surface is carried out using the grindstone in which the groove of the shape shown to FIG. 9A and 9B was formed in the side surface of a grindstone as grindstone of a primary end surface grinding part and a secondary end surface grinding part, respectively. Processing was performed.

As shown in Fig. 9A, the groove formed in the grindstone of the primary end surface grinding portion gradually extends from the bottom side of the groove to the grindstone surface (surface of the grindstone side portion), and has a shape in which a flat portion is formed on the bottom surface. In addition, the width 91 of the flat part of the bottom face was set to 61% of the plate thickness of the glass substrate, and the opening angle 92 of the groove was 60 degrees.

And the groove formed in the grindstone of the secondary end surface grinding part is gradually expanded from the bottom side of a groove to the grindstone surface (surface of a grindstone side part) side, as shown in FIG. 9B, and has a shape in which the flat part was formed in the bottom face. In addition, the width 93 of the flat part of the bottom face was made into 32% of the plate | board thickness of a glass substrate, and the opening angle 94 of the groove was 52 degrees.

And as shown in FIG. 9C, in the primary end surface grinding part, the center of the glass substrate end surface was displaced to the left side in FIG. 9C from the center position of the groove of a grindstone, as shown by the diagonal line, and a glass substrate end surface. Grinding was done. In addition, in FIG. 9C, the position of the glass plate in the case where the center of the glass plate end surface is in the center position of the groove of a grindstone is shown by the dotted line. The shift | offset width 95 from the case where the center of a glass substrate exists in the center position of the groove of a grindstone was 14% of plate | board thickness.

In this case, as shown in Fig. 9C, the corner portion 96 of the glass substrate cannot be polished in the primary end surface grinding portion, and when the grinding processing is performed in the secondary end surface grinding portion, a load on the grindstone is applied. It became big.

And as shown in FIG. 9D, the grinding process was performed by the secondary end surface grinding part so that it might become a predetermined grinding amount 97 with respect to the glass substrate grinding-processed by the primary end surface grinding part. The grinding amount 97 at this time was carried out so as to be the same amount as the grinding amount 48 of Example 1, and the grinding process was performed in the state which the center position of the groove of a grindstone coincides with the center of the glass substrate end surface. . In FIG. 9D, the portion 98 indicated by the diagonal lines is ground and removed at the secondary end surface grinding portion.

In this comparative example, although it is possible to grind in the secondary end surface grinding part without leaving the grinding surface formed in the primary end surface grinding part, when performing a grinding process in a primary end surface grinding part, a glass substrate is carried out. There is a problem that each part remains. For this reason, when grinding is performed in the secondary end surface grinding part, a load is applied and a product of poor quality is easy to generate | occur | produce, and the yield fell.

[Comparative Example 4]

In this comparative example, grinding of a glass substrate end surface is carried out using the grindstone in which the groove of the shape shown in FIGS. 10A and 10B was formed in the side surface of a grindstone as grindstone of a primary end surface grinding part and a secondary end surface grinding part, respectively. Processing was performed.

The groove formed in the grindstone of the primary end surface grinding portion has a shape gradually enlarged from the bottom side of the groove to the grindstone surface (surface of the grindstone side portion) as shown in Fig. 10A, and has a shape in which a flat portion is formed on the bottom surface. In addition, the width 101 of the flat part of the bottom face was 54% of the plate | board thickness of a glass substrate, and the opening angle 102 of the groove | channel was 52 degrees.

As shown in Fig. 10B, the groove formed in the grindstone of the secondary end surface grinding portion is gradually expanded from the bottom side of the groove to the grindstone surface (surface of the grindstone side portion), and has a shape in which a flat portion is formed on the bottom surface. And the width 103 of the flat part of the bottom face was 32% of the plate | board thickness of a glass substrate, and the opening angle 104 of the groove | channel was 52 degrees.

As shown in FIG. 10C, in the primary end surface grinding part, the center of the glass substrate end surface is ground from the glass substrate end face as shown by the diagonal line in the state which shifted to the left side in FIG. 10C from the center position of the grindstone groove. Processing was performed. In addition, in FIG. 10C, the position of the glass plate in the case where the center of the glass plate end surface is in the center position of the groove of a grindstone is shown by the dotted line. The shift width 105 from the case where the center of the glass substrate end face is at the center position of the groove of the grindstone was 14% of the plate thickness.

And as shown to FIG. 10D, the grinding process was performed by the secondary end surface grinding part so that it might become a predetermined grinding amount 106 with respect to the glass substrate grinding-processed by the primary end surface grinding part. At this time, grinding was performed in the state in which the center position of the groove of the grindstone coincided with the center of the glass substrate end face. In FIG. 10D, the portion 107 indicated by diagonal lines is ground and removed at the secondary end surface grinding portion.

In order to show the contact state of the surface of the grindstone groove and the glass substrate surface at the time of grinding by a secondary end surface grinding part, the enlarged view of the part shown by the dotted line 109 of FIG. 10D is shown in FIG.

As can be seen from FIG. 10E, in this comparative example, a part 108 of the grinding surface formed at the primary end surface grinding portion remained in the secondary end surface grinding portion.

In the above comparative example, in the case where the position of the glass substrate was shifted by the same manner as in the example in the primary end surface grinding portion, the grinding surface formed in the primary end surface grinding portion could be polished even in the secondary end surface grinding portion. It turned out that it was left out, or each part of the glass substrate remained.

On the other hand, according to the Example which is the glass substrate end surface grinding apparatus of this invention, and the glass substrate end surface grinding method, even if the center position of a glass substrate end surface shifts from the center position of the groove of a grindstone in a primary end surface grinding part, In a secondary end surface grinding part, the end surface of a glass substrate can be ground, without leaving the grinding surface formed in the primary end surface grinding part. For this reason, it becomes possible to improve a yield compared with the prior art.

In addition, since grinding can be performed without leaving each part of a glass substrate end surface in a primary end surface grinding part, the load on a secondary end surface grinding part can be reduced and a yield of a product can also be improved also in this point. Done.

Moreover, in this invention, it is not necessary to perform the position adjustment of each grindstone of a primary end surface grinding part and a secondary end surface grinding part with high precision as compared with the prior art, and short time required for position adjustment is short. Because of this, it is possible to increase the operation rate of the end surface grinding apparatus.

13: Primary end face grinding
23: secondary end face grinding
132, 232: grindstone
133, 233: home
33: cutout

Claims (7)

It has a primary end surface grinding part and a secondary end surface grinding part in order from the upstream side of a glass substrate conveyance path | route,
The primary end surface grinding portion and the secondary end surface grinding portion are each provided with a cylindrical grindstone having grooves formed in a circumferential direction on a side surface thereof.
The cross-sectional shape of the groove when the cylindrical grindstone is cut from the surface including the central axis of the grindstone has a shape gradually expanded from the bottom side of the groove to the grindstone surface side, and the opening angle of the groove is the first order. The groove formed in the grindstone of the end surface grinding portion is larger than the groove formed in the grindstone for the end surface grinding portion of the secondary end surface grinding portion, and the bottom of the groove formed in the grindstone of the primary end surface grinding portion is curved toward the bottom side. The glass substrate end surface grinding apparatus characterized by the above-mentioned. The cross-sectional shape of the groove formed in the grindstone of the said secondary end surface grinding part is a shape in which the notch was formed in the opening end part, The glass substrate end surface grinding apparatus of Claim 1 characterized by the above-mentioned. The number of grindstones of a primary end surface grinding part is smaller than the number of grindstones of a secondary end surface grinding part, The glass substrate end surface grinding apparatus of Claim 1 or 2 characterized by the above-mentioned. It is an end surface grinding method of the glass substrate which grinds in a secondary end surface grinding part after grinding in the primary end surface grinding part about the end surface of a glass substrate,
The primary end surface grinding portion and the secondary end surface grinding portion are each provided with a cylindrical grindstone having grooves formed in a circumferential direction on a side surface thereof.
The cross-sectional shape of the groove when the cylindrical grindstone is cut from the surface including the central axis of the grindstone has a shape gradually expanded from the bottom side of the groove to the grindstone surface side, and the opening angle of the groove is the first order. The groove formed in the grindstone of the end surface grinding portion is larger than the groove formed in the grindstone of the secondary end surface grinding portion, and the bottom of the groove formed in the grindstone of the primary end surface grinding portion is curved toward the bottom side. The end surface grinding method of the glass substrate. The cross-sectional shape of the groove formed in the grindstone of the said secondary end surface grinding part is a shape in which the notch part was formed in the opening end part, The end surface grinding method of the glass substrate of Claim 4 characterized by the above-mentioned. The number of grindstones of a primary end surface grinding part is smaller than the number of grindstones of a secondary end surface grinding part, The end surface grinding method of the glass substrate of Claim 4 or 5 characterized by the above-mentioned. The end surface grinding method of the glass substrate in any one of Claims 4-6 was used, The manufacturing method of the glass substrate characterized by the above-mentioned.

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