JP4514014B2 - Substrate grinding method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention is capable of performing a wide variety of grinding operations with a single grinding machine, such as chamfering grinding of edges of liquid crystal substrates, glass substrates, etc., grinding of rectangular corners, and external shape grinding that adjusts the outer diameter. The present invention relates to a multi-grinding wheel that is high and effective for performing efficiently and a grinding apparatus using the same.
[0002]
[Prior art]
A liquid crystal substrate, a glass substrate, etc. are cut | disconnected for a predetermined | prescribed magnitude | size by a break process etc. and are used.
Since this cut surface of the substrate has an edge shape, conventionally, chamfering grinding of the end surface and grinding of the corner portion of the rectangular substrate are performed.
Further, in order to adjust the outer diameter dimension of the rectangular substrate to a target dimension, outer shape adjustment grinding and the like are widely performed.
[0003]
Here, the chamfering of the substrate is opposite to the grindstone 104 that rotates w1 from the front surface 7a toward the end surface direction 7c with respect to the ridge corners of the front and back surfaces of the substrate 7, as shown in FIG. In addition, a method is adopted in which the grindstone 105 rotating w2 from the back surface 7b toward the end surface direction 7c is moved relative to the substrate and the pair of grindstones while being in sliding contact with the ridges.
In this case, the grindstone is divided in stages for rough grinding, medium grinding, finishing, and the like.
Further, a method of rotating and sliding the cup-shaped grindstone so as to follow the ridge corner portion is also employed.
[0004]
The corner portion of the rectangular substrate is ground so as to lightly contact the corner portion of the substrate 7 with the cutting edge of a rotating grindstone 162 as shown in FIG.
[0005]
As shown in FIG. 8, the external shape grinding for adjusting the outer diameter of the substrate to a target size employs a method in which the end surface of the substrate is slidably brought into contact with the cutting edge of a rotating grindstone 161 for grinding.
[0006]
As described above, since chamfering grinding, square corner grinding, and external shape grinding are different in grinding methods, conventionally, a plurality of grinding devices are arranged in parallel according to each purpose and are sequentially ground.
Therefore, a transfer device for transferring the workpiece is required between the plurality of grinding processing devices, and not only the line configuration becomes long and complicated, but also the workpiece must be set again for each grinding device. As a result, the machining accuracy was difficult to build.
In addition, as the line configuration becomes longer, the number of semi-finished products that are introduced in the meantime increases, and the technical problem that the production tact becomes longer is inherent.
[0007]
On the other hand, when trying to cope with these various types of grinding methods with a single grinding machine, not only a plurality of types of grinding stones corresponding to each of them are required, but also a grinding stone replacement setup man-hour is required. Meanwhile, the line stops.
In addition, the semi-finished product stays in the line, and there is a technical problem that the line configuration becomes complicated and it is difficult to build quality.
[0008]
[Problems to be solved by the invention]
In view of the technical problems inherent in the above-described conventional technology, the present invention can perform a plurality of grinding operations such as chamfering grinding, square corner grinding, and external shape adjustment grinding with a single type of multi-grinding stone having a simple structure. It is an object of the present invention to provide a method for grinding a square substrate capable of forward and backward reciprocating grinding .
[0009]
[Means for Solving the Problems]
The method for grinding a square substrate according to the present invention maximizes the outer diameter of the finishing grindstone veneer at the central portion, and is used for medium cutting toward the ends on both axial sides of the central grindstone veneer. A plurality of grindstone single plates are arranged in parallel at a predetermined interval so that the outer diameter size of the roughing grindstone single plate is small, and the outer shape of the grindstone single plate arranged at the outermost end is Using a multi-grinding wheel with a tapered shape that the outer diameter dimension decreases toward the outside in the direction of rotation axis extension,
Grinding by chamfering or contouring the edge of the one side by sliding one side of the square substrate parallel to the axial direction of the multi-grinding stone, and turning the square substrate to make the other side multi-grinding Grinding for chamfering the edge of the other side by crushing or retreating to the edge or grinding for external shaping and grinding for corner grinding of a rectangular substrate with a tapered shape of a single grindstone plate arranged at the end are performed as described above. It is characterized by using a grindstone .
[0010]
Here, the outer diameter dimension of the center side grindstone veneer was set larger than the outer diameter dimension of the grindstone veneer arranged on the outer side of the grindstone veneer. In the direction, the outer diameter of the grinding wheel single plate at the center is maximized, and the cutting edge outer diameter of the grinding stone single plate is reduced toward the left and right ends, so that grinding is possible not only in the forward direction of the workpiece but also in the backward direction. Act as you can.
Accordingly, the grindstone single plates on both sides of the multi grindstone in which the single plates are arranged in parallel are used for roughing, and the medium grinding or finishing grindstone is arranged toward the inside thereof.
In addition, the kind of grindstone is selected according to required quality.
[0011]
Also, in the above multi-grinding wheel, the outer shape of the grinding wheel on both sides is tapered so that the outer diameter decreases toward the outside. become.
[0012]
To enable multiple types of grinding in a single grinding device with a multi-grinding stone, a table for placing and fixing the substrate to be grinding, comprising a front-back direction (Y axis direction) movement control means, the substrate A pair of upper and lower multi-grinding stones according to claim 1 are arranged so as to be in sliding contact with or abutting against the side end surface in the direction of travel of the substrate. A grinding device may be used .
[0013]
Here, by arranging the multi-grinding stones as a pair vertically, chamfering grinding can be performed by making a relative sliding contact so that the multi-grinding stones are sandwiched between the ridge corners in the side direction of the substrate.
Also, the multi-grinding wheel moves the substrate mounting table in the vertical direction (Z-axis direction), and is arranged so that the single surface of the substrate is in contact with the grinding wheel in the tangential direction. Grinding becomes possible.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows a configuration diagram of a main part of a grinding apparatus 1 according to the present invention.
A substrate mounting table 3 is provided on the upper part of the grinding apparatus body 2.
The substrate mounting table 3 is provided with suction means 6 for suctioning with a vacuum pump or the like, and a liquid crystal substrate or the like to be ground is suction-fixed and controlled to move forward and backward (Y-axis direction).
A pair of upper and lower multi-grinding stones 4 and 5 are provided on the traveling direction side of the substrate.
In FIG. 1, a pair of grindstones are displayed only on the right side with respect to the traveling direction of the substrate. However, a pair of upper and lower grindstones are similarly provided on the left side, and two pairs of grindstones are provided on the gate. With such a configuration, chamfering of the ridges on both sides of the rectangular substrate, corner grinding, external shape grinding, and the like can be performed by a single progression.
In addition, since the multi-grinding stones 4 and 5 are capable of reciprocating grinding as will be described later, the substrate mounting table 3 is provided with a turning function, and the substrate is turned 90 ° after the completion of the advancement. The axial distance can be adjusted according to the dimensions of the substrate, and the other two sides can be chamfered when retreating.
In FIG. 1, only the multi-grinding stones 4 and 5 are schematically represented for the sake of clarity, but actually, the means for supporting the multi-grinding wheel, the rotation driving means, and the vertical direction (Z-axis direction). A stroke mechanism, an upper and lower grindstone interval adjusting mechanism, and a left-right (X-axis direction) movement control means are provided.
These mechanisms are not shown because various methods that have been widely used are employed.
[0015]
FIG. 2 shows an example of the multi-grinding stone 4 according to the present invention.
Since the multi-grinding wheel 5 has the same structure, the description thereof is omitted (the reference numerals in the drawing are described corresponding to the multi-grinding stone 4).
The example shown in FIG. 2 shows an example in which six grindstone single plates are provided in parallel, but the number of sheets can be selected and used as necessary in various combinations of rough cutting, medium cutting, and finishing.
The outer diameter dimension of the central grindstones 43a and 43b is larger than the outer diameter dimension of 42a and 42b located on the outer side.
Furthermore, the outer diameter dimensions of the grindstones 42a and 42b are larger than the outer diameter dimensions of the outer grindstones 41a and 41b.
The outer sides of the outermost grindstones 41a and 41b are tapered and used for corner grinding of a square substrate.
Further, the outer tapered portions of the grindstones 41a and 41b are different in grinding conditions from the other grindstones, and the wear speed of the outer peripheral portion is also different. Therefore, the grindstone single plate can be replaced or replaced depending on the wear state.
An example of the structure will be described with reference to FIG.
The main shaft 8 that rotationally drives the multi-grinding wheel is tapped at the center, and a non-rotating pin 4e is provided on the main shaft surface.
Each grindstone plate has a grindstone portion 4a formed on the outer circumference of a grindstone base material 4b.
Each grindstone single plate has a fitting structure 4c and is connected by a bolt 4d or the like, and is fitted with a notch recess provided on the side surface of the grindstone 41a and a non-rotating pin 4e on the main shaft surface. A bolt 4f is inserted from the hole and attached to the tap of the main shaft.
The difference in the outer diameter between the grindstones 42 and 43 is set according to the grinding amount. If the final chamfer width is about 0.2 to 0.4 mm, the difference in the outer diameter between the grindstones is 0.1. Although it is about 0.2 mm, FIG. 2 expresses the difference very greatly for easy understanding.
[0016]
FIG. 3 shows a schematic diagram when chamfering the edge of the substrate.
The upper multi-grinding stone 4 and the lower multi-grinding stone 5 are respectively arranged so as to enter between the single plates of the grindstone.
The upper grindstone 4 rotates w1 from the surface 7a of the substrate 7 toward the end surface 7c.
On the other hand, the lower grindstone 5 rotates w2 in the reverse direction from the back surface 7b of the substrate 7 toward the end surface 7c.
With respect to the traveling direction of the substrate 7, the outer grindstones 42 (42 a, 42 b) and 43 (43 a, 43 b) are sequentially ground and finished (FIG. 3 shows a state in which the substrate 7 proceeds from the front of the paper toward the back. Showing).
Therefore, in the multi-grinding wheel according to the present invention, the outer diameter of the cutting edge of the grindstone at the center is larger than that of the grindstones on both sides of the grindstone, so that reciprocal grinding is possible.
[0017]
As shown in FIG. 4, in the case of external shaping grinding of the end face of the substrate, the end face of the substrate is in contact with the rotating outer diameter circular tangent of the grindstone by adjusting the vertical stroke of the grindstone or adjusting the vertical position of the substrate table 3. Make sliding contact.
[0018]
As shown in FIG. 5, when corner-grinding a square substrate, the corner portion of the substrate 7 and the outermost grindstone of the multi-grinding stone are lightly brought into contact with the tapered portions of the grindstones 41a and 41b in the example of FIG. Can be ground.
[0019]
【The invention's effect】
In the present invention, the structure of the multi-grinding wheel is set so that the outer diameter of the cutting edge of the central grindstone plate is larger than the outer diameter of the cutting edge of the outer grindstone plate. Since the cutting edge shape of a single plate is tapered and the vertical stroke of the grinding wheel is set larger than before, square substrate corner grinding can be performed.
Similarly, since the grindstone stroke is set large, tangential contact for the grindstone can be made with the end face of the substrate, and external shape grinding can also be performed.
[0020]
That is, in the grinding apparatus according to the present invention, by adopting the above-described configuration, various grinding processes can be performed with one grinding apparatus, the line configuration is simplified, and a transfer apparatus between conventional processing apparatuses is also provided. This eliminates the need for a series of grinding operations with a single centering of the substrate.
Therefore, it is easy to build quality.
Also, semi-finished products in the middle of the line will be wiped out.
[Brief description of the drawings]
FIG. 1 shows a configuration diagram of a main part of a grinding apparatus according to the present invention.
FIG. 2 shows an example of a multi-grinding wheel according to the present invention.
FIG. 3 shows a schematic diagram of a chamfering method.
FIG. 4 is a schematic diagram of external shape grinding.
FIG. 5 shows a schematic diagram of square substrate corner grinding.
FIG. 6 shows a conventional chamfering method.
FIG. 7 shows an example of conventional square substrate corner grinding.
FIG. 8 shows an example of conventional external shape grinding.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Grinding device 2 Grinding device main body 3 Substrate mounting table 4 Upper multi-grinding stone 5 Lower multi-grinding stone 6 Adsorption means 7 Substrate 8 Spindle

Claims (1)

The outer diameter dimension of the grinding stone veneer for finishing at the center is maximized, and the outer diameter dimension of the grinding stone veneer for intermediate cutting or roughing toward the ends on both sides in the axial direction of the central grinding wheel veneer. A plurality of grindstone single plates are arranged in parallel with a predetermined interval so as to be smaller, and the outer diameter of the grindstone single plate arranged at the outermost end is directed outward in the direction of rotation axis extension. Using a multi-grinding wheel with a tapered shape that reduces the
Grinding one side of the square substrate in parallel with the axial direction of the multi-grinding wheel to perform chamfering of the edge of the one side or external shaping grinding;
Grinding by turning a square substrate and sliding the other side to the multi-grinding wheel to retreat and chamfering the edge of the other side or external shaping grinding,
Grinding with corner grinding of a square substrate with the tapered shape of a single grindstone plate placed at the end,
A method for grinding a rectangular substrate, wherein the same multi-grinding stone is used .

Images