KR20130095024A - Dispenser type nozzle device - Google Patents

Abstract

PURPOSE: A dispenser type nozzle device is provided to minutely control the amount of an ink supply and to remarkably improve response features of the ink supply. CONSTITUTION: A dispenser type nozzle device supplying a liquid material on a substrate (5) includes an internal chamber (20) capable of receiving the liquid material; a nozzle body (10) with an outlet (24a) discharging the liquid material charged inside the internal chamber; and a chamber pressing member (30) pressing the internal chamber for discharging the liquid material via the outlet. The internal chamber includes a main chamber (22) introducing the liquid material and charging the same; an elastic tube (32) of an elastic transformation material which seals the periphery of the main chamber; and a tube pressing member (34) forcibly discharging the liquid material charged inside the main chamber by periodically pressing a part of the elastic tube to an inner direction. [Reference numerals] (21) Ink supplying source; (54a) High-voltage authorization part

Description

Dispenser type nozzle unit {DISPENSER TYPE NOZZLE DEVICE}

The present invention relates to a dispenser nozzle apparatus, and more particularly, it is possible to finely pattern the substrate on the substrate, to be miniaturized and slimmed, to reduce the manufacturing cost, to minimize the risk of shortening the life and failure A dispenser nozzle apparatus is provided.

The manufacturing process of an organic light emitting display (OLED Display), an organic solar cell, etc. includes the process of patterning an organic light emitting layer on a board | substrate.

The patterning process of the organic light emitting layer is a process of supplying liquid ink (hereinafter referred to as " ink ") on a substrate to form a specific light emitting pattern, which is a very important process that influences the quality of a product.

This patterning process is performed by an ink supply apparatus. The ink supply apparatus includes an air pressurized ink supply apparatus, a screw pressurized ink supply apparatus, a piston pressurized ink supply apparatus, and the like.

As shown in FIG. 1, the air pressurized ink supply device supplies ink to the internal chamber 3 of the nozzle body 1, and then supplies high pressure air to the internal chamber 3, thereby supplying high pressure air. It is a technique of supplying ink onto the substrate 5 through the substrate.

As shown in FIG. 2, the screw pressurized ink supply device supplies ink to the inner chamber 3 of the nozzle body 1, and then pressurizes the ink with a transfer screw 7 installed in the inner chamber 3. It is a technique to supply on the board | substrate 5.

As shown in FIG. 3, the piston pressurized ink supply device supplies ink to the inner chamber 3 of the nozzle body 1, and then pressurizes the ink to the piston 9 installed in the inner chamber 3 to form a substrate. (5) It is a technique to supply on a phase.

However, these conventional ink supply apparatuses have disadvantages in that the supply amount of the ink is very difficult to control, the response characteristics of the ink supply are poor, the continuous ink supply is difficult, and the manufacturing cost is increased by using expensive parts.

In particular, since the air pressurized ink supply device has a structure in which the ejection amount of ink is controlled by controlling the supply amount of air, it is very difficult to finely control the supply amount of ink, and there is a disadvantage in that the response characteristic of the ink supply is remarkably degraded. Therefore, there is a problem that a fine light emission patterning operation is difficult.

In addition, since the screw pressurized ink supply device must have a transfer screw 7 and a servomotor 7a for controlling it, the device is very complicated, its size is increased, and the manufacturing cost of the device is significantly increased. There is this. In addition, since the transfer screw 7 is a structure in which the organic ink is exposed, there is a disadvantage that there is a risk of corrosion, there is a problem that there is a risk of shortening the life and failure due to this disadvantage.

In addition, the piston pressurized ink supply device has a disadvantage in that it is difficult to continuously supply ink because it is a structure for supplying ink through the reciprocating motion of the piston 9, and thus, there is a problem in that the patterning efficiency of the light emitting layer is significantly decreased. .

In addition, the conventional ink supply apparatuses are a so-called wetting in which ink ejected from the nozzle hole 1a of the nozzle body 1 is wetted and formed in a drop shape at the periphery of the nozzle hole 1a when ink is supplied. Phenomenon occurs, and there is a problem that a large amount of ink may be supplied on the substrate 5 at one time because of this disadvantage.

And it is pointed out that this problem is difficult to form a fine light emission pattern, and even a bad light emission pattern may be formed.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems, and an object thereof is to provide a dispenser nozzle apparatus capable of finely controlling the ink supply amount and remarkably improving the response characteristics of the ink supply. There is.

Another object of the present invention is to provide a dispenser nozzle apparatus capable of finely controlling the ink supply amount and improving the response characteristics of the ink supply, thereby enabling fine light emission patterning operations.

Still another object of the present invention is to provide a dispenser-type nozzle apparatus that can be miniaturized and slimmed, can reduce manufacturing costs, and has a low risk of shortening of life and failure.

Still another object of the present invention is to provide a dispenser-type nozzle apparatus capable of preventing a wetting phenomenon of ink and enabling fine ink supply on a substrate to form a fine light emission pattern.

Dispensing nozzle device of the present invention for achieving the above object, the dispenser nozzle device for supplying a liquid material on a substrate, the inner chamber that can accommodate the liquid material, and the liquid material filled in the inner chamber A nozzle body having a discharge port for discharging the liquid onto the substrate; And chamber compressing means for compressing the inner chamber so that the liquid material filled in the inner chamber can be extruded from the discharge port.

Preferably, the inner chamber includes a main chamber for introducing and filling the liquid material; The chamber crimping means includes an elastic tube made of an elastic deformation material that surrounds and seals a peripheral circumference of the main chamber, and periodically presses a portion of the elastic tube inward to extrude the liquid material filled in the main chamber to the discharge port. It characterized in that it comprises a tube pressing means for.

The tube pressing means is installed on the outer surface portion of the elastic tube, characterized in that the piezo actuator (Piezo Actuator) for pressing the elastic tube while vibrating in accordance with the applied voltage.

According to the dispenser type nozzle apparatus according to the present invention, since the ink is discharged by using the fine vibration of the piezo actuator, the supply amount of the ink can be finely controlled and the response characteristic of the ink supply can be significantly improved. There is.

In addition, since fine control of the ink supply amount is possible and the response characteristic of the ink supply can be improved, there is an effect that a fine light emission patterning operation is possible.

In addition, since the ink is extruded using the vibration of the piezo actuator, a complicated ink pumping device for extruding the ink is unnecessary. Therefore, the structure is simple, the device can be miniaturized and slim, and the manufacturing cost can be reduced.

In addition, since the piezo actuator for extruding the ink is provided in the outer portion of the inner chamber, the contact with the ink is prevented, whereby there is no fear of corrosion due to the contact with the ink. Therefore, there is an effect that the life of the device is shortened and there is little fear of failure.

In addition, since it is a structure capable of preventing the wetting phenomenon in which the ink discharged from the discharge port is formed in the peripheral portion in the form of drops, it is possible to prevent the excessive ink is supplied on the substrate. As a result, there is an effect that can prevent the production of a defective substrate due to excessive ink supply.

In addition, since the ink is discharged using the fine vibration of the piezo actuator, it is possible to precisely control the low viscosity ink. Accordingly, there is an effect that the ink of low viscosity can be efficiently supplied onto the substrate.

1 to 3 are side cross-sectional views showing conventional ink supply apparatuses,
Figure 4 is a side cross-sectional view showing the configuration of a dispenser nozzle apparatus according to the present invention,
5 is an operation diagram showing an operation example of the dispenser nozzle apparatus according to the present invention;
6 is a side sectional view showing a modification of the chamber crimping means constituting the dispenser nozzle device of the present invention;
7 is an operation diagram showing an operation example of the chamber compression means of the modification;
8 is a side cross-sectional view showing another embodiment of the dispenser nozzle apparatus according to the present invention;
9 to 11 are side cross-sectional views showing still another embodiment of the dispenser nozzle apparatus according to the present invention.

Hereinafter, preferred embodiments of the dispenser nozzle apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

First, referring to FIG. 4, the dispenser nozzle apparatus according to the present invention includes a nozzle body 10.

The nozzle body 10 is made of a metal material and has an internal chamber 20. The inner chamber 20 includes an upstream main chamber 22 and a downstream buffer chamber 24.

The upstream main chamber 22 has an inlet port 22a and an outlet port 22b. The inlet port 22a is connected to the ink supply source 21 and introduces ink supplied from the ink supply source 21. Thus, the ink of the ink supply source 21 is filled in the main chamber 22.

Here, the inlet port 22a is configured such that its cross-sectional area gradually decreases toward the downstream side. Therefore, the cross-sectional area of the downstream portion is made small. The reason for this configuration is to prevent backflow of the ink introduced into the main chamber 22.

The discharge port 22b is connected to the buffer chamber 24 and is configured to discharge ink of the main chamber 22 to the buffer chamber 24. Here, the discharge port 22b is configured such that its cross-sectional area gradually decreases toward the downstream side. This is to prevent the ink discharged to the buffer chamber 24 from flowing back to the main chamber 22.

The buffer chamber 24 discharges the ink discharged from the main chamber 22 after being introduced for a predetermined time, and has a lower discharge port 24a.

The discharge port 24a is configured to discharge the ink introduced into the buffer chamber 24 to the outside. In particular, it discharges on the board | substrate 5 conveyed to the lower part of the nozzle body 10. FIG. Thus, ink is supplied onto the substrate 5.

Here, the discharge port 24a of the buffer chamber 24 is configured such that its cross-sectional area gradually increases toward the downstream side. Therefore, the downstream cross section of the discharge port 24a is configured to be larger than the cross section of the upstream side.

Preferably, the downstream diameter d of the discharge port 24a preferably has a size in the range of 0.1 to 1 mm.

Again, referring to FIG. 4, the nozzle apparatus of the present invention includes a chamber crimping means 30 for crimping the inner chamber 20 of the nozzle body 10.

The chamber crimping means 30 includes an elastic tube 32 of an elastic deformation material that encloses and seals a peripheral circumference of the main chamber 22 and a tube pressurizing means 34 that periodically presses one side of the elastic tube 32. It includes.

The elastic tube 32 is made of a material such as glass wool or silicon, and forms the main chamber 22 therein, and the elastic tube 32 thus formed is wrapped around the main circumference of the main chamber 22 to be sealed. do.

And the elastic tube 32 is wrapped around the periphery of the main chamber 22, as shown in Figure 4 and 5, the elastic movement in the inner or outer direction of the main chamber 22. Therefore, the volume of the main chamber 22 is reduced or increased. As a result, the internal pressure of the main chamber 22 is increased or decreased. As a result, the ink A filled in the main chamber 22 can be extruded with a predetermined pressure.

The tube pressurizing means 34 is composed of a piezo actuator 34a installed on the outer surface portion of the elastic tube 32, and the piezo actuator 34a thus configured is physically vibrated according to the applied voltage. While pressing the elastic tube (32).

In particular, the elastic tube 32 is moved inward or outward of the main chamber 22. Thus, the elastic tube 32 allows to reduce or increase the volume of the main chamber 22. As a result, the internal pressure of the main chamber 22 is increased or decreased. As a result, the ink A filled in the main chamber 22 can be discharged from the discharge port 24a while having a predetermined pressure. This allows the ink A to be supplied onto the lower substrate 5.

Preferably, two piezo actuators 34a of the tube pressing means 34 are provided in pairs on both sides of the elastic tube 32. In particular, it is preferable that a pair of piezo actuators 34a are provided symmetrically on both sides of the elastic tube 32.

The reason for this configuration is that the pair of piezo actuators 34a are capable of simultaneously crimping both parts of the elastic tube 32, which increases the compression efficiency of the elastic tube 32 so that the ink A This is to increase the discharge pressure.

On the other hand, the vibration of the piezo actuator 34a repeatedly increases or decreases the internal pressure of the main chamber 22, and the repeated increase or decrease of the internal pressure periodically changes the pressure of the ink A discharged from the main chamber 22. The pressure change of the ink A is extinguished through the buffer chamber 24.

The ink A in which the pressure change disappears is discharged from the discharge port 24a while maintaining a constant pressure without causing a pulsation phenomenon caused by the vibration of the piezo actuator 34a. Thus, the substrate 5 can be supplied in a constant amount.

Again, referring to FIG. 4, the nozzle apparatus of the present invention includes a hydrophobic coating layer 40 formed on a portion of the nozzle body 10 around the discharge port 24a.

The hydrophobic coating layer 40 is formed by coating a hydrophobic (Hydrophobic) coating agent, for example, Teflon or the like on the nozzle body 10 around the discharge port 24a through a method such as nano thin film coating or plasma coating.

The hydrophobic coating layer 40 improves the wettability of the peripheral portion around the discharge port 24a, that is, the wetting phenomenon. Thus, the ink discharged from the discharge port 24a is prevented from being wetted in the peripheral portion of the discharge port 24a to form a drop shape. This prevents a large amount of ink from being supplied onto the substrate 5 at one time. As a result, excessive ink supply is prevented.

Again, referring to FIG. 4, the nozzle apparatus of the present invention includes an electric field forming means 50 for allowing an electric field to be formed between the discharge port 24a of the nozzle body 10 and the substrate 5.

The electric field forming means 50 includes a nozzle body 10 and a substrate support table 52 made of a metal material corresponding to each other with the discharge port 24a and the substrate 5 interposed therebetween, and the nozzle body 10 and the substrate support. And a voltage supply device 54 for supplying a voltage to the table 52.

The nozzle body 10 is a metal conductor and forms a peripheral circumference of the discharge port 24a.

The substrate support table 52 is a metal conductor, and is configured to support the lower surface of the substrate 5.

The voltage supply device 54 includes a high voltage applying portion 54a, a first connection line 54b electrically connecting the negative electrode of the high voltage applying portion 54a and the nozzle body 10, and a high voltage applying portion ( And a second connecting line 54c for electrically connecting the positive electrode of 54a and the substrate support table 52 to each other.

In particular, the first connecting line 54b supplies the negative electrode voltage of the high voltage applying unit 54a to the nozzle body 10. Therefore, the negative electrode is charged to the nozzle body 10. The second connecting line 54c supplies the positive electrode voltage of the high voltage applying unit 54a to the substrate support table 52. Thus, the positive electrode is charged to the substrate support table 52.

As shown in FIG. 5, the voltage supply device 54 charges the nozzle body 10 to the negative electrode and charges the substrate support table 52 to the positive electrode. ) And the potential difference between the substrate support table 52 can be generated. As a result, a potential difference can also occur between the discharge port 24a of the nozzle body 10 and the substrate 5.

As a result, an electrically attracting force, that is, attractive force, can be generated between the discharge port 24a of the nozzle body 10 and the substrate 5. As a result, the ink A supplied to the substrate 5 overcomes the surface tension and moves toward the substrate 5 in the form of a reverse conical column. In particular, the end of the inverted cone-shaped pillars to form a tip (尖端 部) to face the substrate (5).

Thus, it is possible to finely control the amount of ink supplied on the substrate 5. As a result, a fine light emission patterning operation is possible, and as a result, a fine light emission pattern can be formed.

Next, an operation example of the present invention having such a configuration will be described with reference to FIGS. 4 and 5.

First, in the dispenser nozzle apparatus of the present invention, when the substrate 5 is transferred to the lower portion, ink starts to be supplied from the ink supply source 21.

When ink is supplied from the ink supply source 21, the supplied ink is introduced into the inner chamber 20 of the nozzle body 10. In particular, it is introduced into the main chamber 22 of the inner chamber 20, and the introduced ink is filled in the main chamber 22.

On the other hand, when the main chamber 22 is filled with ink, the controller (not shown) applies a voltage to the piezo actuator 34a of the chamber crimping means 30. Then, the piezo actuator 34a presses the elastic tube 32 while physically vibrating.

The pressurized elastic tube 32 increases and decreases the volume of the main chamber 22, and the increase and decrease of the main chamber 22 extrudes the ink therein while the pressure therein increases or decreases. In particular, it is extruded into the buffer chamber 24.

Then, the ink extruded into the buffer chamber 24, the pulsation phenomenon due to the vibration of the piezo actuator 34a disappears while passing through the buffer chamber 24. Therefore, the ink discharged from the discharge port 24a maintains a constant pressure. As a result, the ink supplied onto the substrate 5 maintains a constant amount.

On the other hand, when the ink starts to be discharged from the discharge port 24a, the high voltage applying unit 54a of the voltage supply device 54 applies a voltage to each of the nozzle body 10 and the substrate support table 52.

Then, as shown in FIG. 5, a potential difference is generated between the nozzle body 10 and the substrate 5. The attraction force is generated between the nozzle body 10 and the substrate 5 due to the generated potential difference, and the ink discharged from the discharge port 24a of the nozzle body 10 due to the generated attraction force overcomes the surface tension and the substrate 5 The shape changes into a conical shape toward the side.

As a result, the amount of ink supplied on the substrate 5 is finely adjusted. As a result, a fine light emission patterning operation is made possible.

According to the present invention having such a configuration, since the ink is discharged using the fine vibration of the piezo actuator 34a, the supply amount of the ink can be finely controlled, and the response characteristic of the ink supply can be remarkably improved.

In addition, since fine control of the ink supply amount is possible and the response characteristic of the ink supply can be improved, a fine light emission patterning operation is possible.

In addition, since the ink is extruded using the vibration of the piezo actuator 34a, a complicated ink pumping device for extruding the ink is unnecessary. Therefore, the structure is simple, the device can be miniaturized and slim, and the manufacturing cost can be reduced.

In addition, since the piezo actuator 34a for extruding the ink is provided in the outer portion of the inner chamber 20, the contact with the ink is prevented, whereby there is no fear of corrosion due to the contact with the ink. Therefore, there is little fear of shortening the life of the device and failure.

In addition, since the wetting phenomenon in which the ink discharged from the discharge port 24a is formed in a drop shape at the periphery can be prevented, excessive ink can be prevented from being supplied onto the substrate 5. Thereby, the production of a defective substrate due to excessive ink supply can be prevented.

In addition, since the present invention has a structure in which ink is discharged by using the fine vibration of the piezo actuator 34a, low viscosity ink can be precisely controlled. Therefore, low viscosity ink can also be efficiently supplied onto the substrate 5.

Next, Fig. 6 and Fig. 7 show a view showing a modification of the chamber crimping means 30 constituting the nozzle apparatus of the present invention.

The chamber crimping means 30 of another embodiment includes an opening part 35 formed on the inner wall of the main chamber 22, a diaphragm 37 provided on the opening part 35, and a diaphragm 37. It includes a diaphragm pressing means 38 for pressing in the inward direction of the main chamber 22.

The opening part 35 is formed by cutting the nozzle body 10 portion of the inner wall of the main chamber 22, and two pairs are formed on both sides of the main chamber 22. 35 are formed symmetrically with respect to both sides of the main chamber 22.

The diaphragm 37 is installed to seal the opening 35, and as shown in FIG. 7, elastically moves inward or outward of the main chamber 22. Therefore, the volume of the main chamber 22 is reduced or increased. As a result, the internal pressure of the main chamber 22 is increased or decreased. As a result, the ink filled in the main chamber 22 can be extruded with a predetermined pressure.

The diaphragm pressurizing means 38 is comprised of the piezo actuator 38a provided in the outer surface part of the diaphragm 37, The piezo actuator 38a comprised in this way is a diaphragm, while vibrating physically according to the signal applied. Press (37).

In particular, the diaphragm 37 is moved inward or outward of the main chamber 22. Thus, the diaphragm 37 makes it possible to reduce or increase the volume of the main chamber 22. As a result, the internal pressure of the main chamber 22 is increased or decreased. As a result, the ink filled in the main chamber 22 can be discharged from the discharge port 24a with a predetermined pressure. Thus, ink can be supplied onto the lower substrate 5.

According to the chamber crimping means 30 of the modification having such a structure, the volume of the main chamber 22 is increased or decreased through the diaphragm 37 provided in the opening 35 of the main chamber 22. Unlike the embodiment, the volume of the main chamber 22 can be increased or decreased without installing the elastic tube 32. Therefore, there is an advantage that the structure is simple and easy to manufacture.

Next, FIG. 8 is a view showing another embodiment of the nozzle apparatus according to the present invention.

The nozzle apparatus of another embodiment includes a nozzle body 10, wherein the nozzle body 10 is configured in a horizontal form. Therefore, the overall shape and shape is different from the nozzle body 10 of the embodiment configured in the vertical form.

On the other hand, the nozzle device of this other embodiment, the nozzle body 10 is configured only in the horizontal form is different from the above embodiment, the other configuration is the same as the above embodiment.

Next, FIGS. 9 to 11 show still another embodiment of the nozzle apparatus according to the present invention.

The nozzle apparatus of FIGS. 9 to 11 includes a discharge port 24a of the nozzle body 10, and has a structure in which the discharge guider 60 is further installed in the discharge port 24a.

The discharge guide 60 is configured to face the substrate 5 side from the peripheral portion of the discharge port 24a.

In particular, the discharge guider 60 of FIG. 9 is composed of a plate body, and the discharge guider 60 of the plate body thus constructed extends in the form of a hopper along the circumferential direction from the peripheral portion of the discharge port 24a.

The hopper-type discharge guider 60 thus extended guides the ink discharged from the discharge port 24a onto the substrate 5. Therefore, the surface area of the ink discharged from the discharge port 24a is reduced, and the ink having the reduced surface area is effectively supplied onto the substrate 5.

In addition, the discharge guide 60 of FIG. 10 is configured as a rod type, and includes a horizontal rod portion 62 horizontally extending radially inward from the peripheral portion of the discharge port 24a and a horizontal rod portion. It consists of a vertical rod part 64 extending vertically from 62 to the lower substrate 5.

The rod-shaped discharge guider 60 thus constructed guides the ink discharged from the discharge port 24a onto the substrate 5. Therefore, the surface area of the ink discharged from the discharge port 24a is reduced, and the ink having the reduced surface area is effectively supplied onto the substrate 5.

In addition, the discharge guide 60 shown in FIG. 11 is formed in a rod shape, and extends radially inward from the peripheral portion of the discharge port 24a and is directed toward the substrate 5 side.

Therefore, it is comprised so that it may incline toward the board | substrate 5 in the peripheral part of the discharge port 24a. The discharge guider 60 thus configured reduces the surface area of the ink discharged from the discharge port 24a and effectively supplies the ink having the reduced surface area onto the substrate 5.

On the other hand, it is preferable that a hydrophobic coating layer (not shown) is coated on the outer surface portion of the discharge guider 60 shown in FIGS. 9 to 11 to improve the wettability of the ink.

Although the preferred embodiments of the present invention have been described above, the scope of rights of the present invention is not limited to these specific embodiments, but can be appropriately changed within the scope of the claims.

For example, in the present invention, the ejection of ink has been described as an example, but the present invention is not limited thereto, and any liquid may be ejected.

10: nozzle body 20: internal chamber (Chamber)
21: ink supply source 22: main chamber (Chamber)
22a: inlet 22b: outlet
24: Buffer Chamber
24a: discharge port 30: chamber compression means
32: elastic tube 34: tube pressing means
34a: Piezo Actuator
35: opening 37: diaphragm
38: diaphragm pressurizing means 38a: piezo actuator
40: hydrophobic coating layer 50: electric field forming means
52: substrate support table 54: voltage supply device
54a: high voltage application part 54b: first connection line
54c: second connecting line 60: discharge guider
62: horizontal rod portion 64: vertical rod portion

Claims (15)

In the dispenser nozzle device for supplying a liquid substance on the substrate (5),
A nozzle body (10) having an inner chamber (20) capable of accommodating the liquid substance and a discharge port (24a) for discharging the liquid substance filled in the inner chamber (20) on the substrate (5);
Dispensing nozzle device characterized in that it comprises a chamber pressing means for pressing the inner chamber 20 so that the liquid material filled in the inner chamber 20 can be extruded from the discharge port (24a). The method of claim 1,
The inner chamber (20) includes a main chamber (22) for introducing and filling the liquid material;
The chamber crimping means 30, the elastic tube 32 of the elastic deformation material for wrapping and sealing the peripheral circumference of the main chamber 22, and by pressing a portion of the elastic tube 32 periodically inwardly to the And a tube pressurizing means (34) for extruding the liquid substance filled in the main chamber (22) to the discharge port (24a). The method of claim 2,
The tube press means 34,
Dispenser nozzle device, characterized in that the piezo actuator (34a) is installed on the outer surface portion of the elastic tube 32, and pressurizes the elastic tube 32 while vibrating in accordance with the applied voltage. The method of claim 1,
The inner chamber (20) includes a main chamber (22) for introducing and filling the liquid material;
The chamber crimping means 30 includes an opening part 35 formed on an inner wall of the main chamber 22, a diaphragm 37 provided on the opening part 35, and the diaphragm 37. And a diaphragm pressurizing means 38 for periodically pressing the inner side of the main chamber 22 to extrude the liquid material filled in the main chamber 22 to the discharge port 24a. . 5. The method of claim 4,
The diaphragm pressurizing means 38,
It is installed on the outer surface portion of the diaphragm 37, characterized in that the piezo actuator 38a for pressing the diaphragm 37 in the inward direction of the main chamber 22 while vibrating in accordance with the applied voltage Dispenser type nozzle device. 6. The method according to any one of claims 2 to 5,
The chamber compression means 30,
Dispenser type nozzle apparatus, characterized in that a pair is provided symmetrically on both sides of the main chamber (22) so that the main chamber (22) can be pressed on both sides. 6. The method according to any one of claims 2 to 5,
In order to alleviate the pressure fluctuation of the liquid material extruded from the main chamber 22, the buffer chamber 24 for discharging the liquid material extruded from the main chamber 22 for a predetermined time and then discharged to the discharge port 24a. Dispenser type nozzle apparatus further comprises a). 8. The method of claim 7,
It includes a discharge port (22b) for discharging the liquid material of the main chamber 22 to the buffer chamber 24,
The outlet 22b has a cross section that gradually decreases toward the buffer chamber 24 so that the liquid substance discharged to the buffer chamber 24 can be prevented from flowing back into the main chamber 22. Dispenser nozzle device. The method of claim 1,
Hydrophobic coating layer 40 is formed on the portion of the nozzle body 10 around the discharge port (24a) to prevent the liquid material discharged from the discharge port (24a) to wet the surrounding nozzle body (10) Dispenser nozzle device characterized in that it further comprises. The method of claim 1,
The discharge port 24a may change the liquid substance discharged from the discharge port 24a into a reverse conical column shape toward the substrate 5 due to a potential difference generated between the discharge port 24a and the substrate 5. And electric field forming means 50 for forming an electric field between the substrate and the substrate 5.
The electric field forming means (50) includes a nozzle body (10) and a substrate support table (52) made of a metal material corresponding to each other with the discharge hole (24a) and the substrate (5) therebetween;
A voltage supply device 54 for supplying a voltage to the nozzle body 10 and the substrate support table 52 so that an electric field is formed between the discharge port 24a and the substrate 5 to generate a potential difference therebetween. Dispenser type nozzle apparatus comprising a). The method according to any one of claims 1 to 5, 9 and 10,
The discharge port 24a,
A dispenser type nozzle apparatus having a cross section that gradually increases toward the downstream side. 12. The method of claim 11,
And a discharge guider (60) for guiding the liquid substance discharged from the discharge port (24a) onto the substrate (5). 13. The method of claim 12,
The discharge guide 60,
Dispenser nozzle device, characterized in that extending from the nozzle body (10) of the peripheral portion of the discharge port (24a) toward the substrate (5) in the form of a hopper (Hopper). 13. The method of claim 12,
The discharge guide 60 is a rod type,
A horizontal rod portion 62 extending horizontally radially inward from the nozzle body 10 at the peripheral portion of the discharge port 24a, and vertically from the horizontal rod portion 62 toward the lower substrate 5; Dispenser type nozzle device, characterized in that consisting of an extending vertical rod (64). 13. The method of claim 12,
The discharge guide 60 is a rod type,
Dispenser type nozzle apparatus, characterized in that it extends radially inward from the nozzle body (10) of the peripheral portion of the discharge port (24a) and inclined to face the substrate (5) side.

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