CN108117272B - Coating nozzle and coating device - Google Patents
Coating nozzle and coating device Download PDFInfo
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- CN108117272B CN108117272B CN201810002442.8A CN201810002442A CN108117272B CN 108117272 B CN108117272 B CN 108117272B CN 201810002442 A CN201810002442 A CN 201810002442A CN 108117272 B CN108117272 B CN 108117272B
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- 238000000576 coating method Methods 0.000 title claims abstract description 101
- 239000011248 coating agent Substances 0.000 title claims abstract description 100
- 239000000919 ceramic Substances 0.000 claims abstract description 96
- 230000010287 polarization Effects 0.000 claims abstract description 16
- 239000007921 spray Substances 0.000 claims abstract description 14
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 8
- 238000010521 absorption reaction Methods 0.000 claims description 17
- 238000002955 isolation Methods 0.000 claims description 13
- 230000008602 contraction Effects 0.000 claims description 11
- 230000003139 buffering effect Effects 0.000 claims description 5
- 239000002861 polymer material Substances 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 8
- 239000003292 glue Substances 0.000 description 19
- 239000000463 material Substances 0.000 description 16
- 238000007789 sealing Methods 0.000 description 11
- 230000008859 change Effects 0.000 description 7
- 239000000565 sealant Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- 238000007599 discharging Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000013016 damping Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Nozzles (AREA)
- Special Spraying Apparatus (AREA)
- Coating Apparatus (AREA)
Abstract
The invention discloses a coating nozzle and a coating device, and belongs to the field of coating. The coating nozzle comprises a nozzle body, a piezoelectric ceramic ring and a control unit; the piezoelectric ceramic ring is arranged at the outlet end of the spray head body; the piezoelectric ceramic ring is internally provided with an adjusting hole corresponding to the outlet direction of the nozzle body; the piezoelectric ceramic ring is made of piezoelectric ceramic materials, and the polarization direction is arranged along the radial direction of the adjusting hole; the control unit is respectively connected with two poles of the piezoelectric ceramic ring in the polarization direction. The coating sprayer and the coating device can adapt to different coating requirements and do not need to be replaced, so that the coating efficiency and the corresponding production efficiency of products are improved, the working procedures are saved, and the product yield is improved.
Description
Technical Field
The invention relates to the technical field related to material coating, in particular to a coating nozzle and a coating device.
Background
At present along with the rapid development of high-precision technology, the preparation of relevant equipment becomes more and more meticulous for in the preparation of these meticulous equipment, often need utilize the mode of coating to realize the preparation of certain structure, but based on different coating demands, the shower nozzle size of its corresponding needs is also different, leads to often needing to change the shower nozzle in the preparation of certain product like this, leads to coating inefficiency.
For example: in the production of the liquid crystal display panel, two glass substrates are jointed by a box-to-box process, and one of the key processes for realizing the jointing is to coat frame sealing glue on the glass substrates. At present, frame sealing glue coating equipment uniformly extrudes frame sealing glue from a nozzle outlet by adopting air pressure, and forms regular and uniform coating patterns along with the movement of the nozzle. And because the different panel products use different types of glue, silicon balls and gold balls, the required wet glue area and coating precision are different, so different production lines need to be replaced by new spray heads. In actual production, after the new nozzle is replaced by the equipment, the Dummy Sealant needs to be discharged, so that the area of the wet Sealant is corrected to a set value, and people often need to manually enter the equipment to clean the nozzle in the period, so that the efficiency is low, particles (dust particles) can be artificially introduced, and the product yield is reduced. In addition, although the nozzle discharges the Dummy Sealant for a long time to prevent unstable discharge of the initial Sealant, the Sealant coated by the nozzle is still prone to have the phenomena of thin and thick Sealant and Sealant failure in actual production, which not only reduces the yield of products, but also affects the subsequent processes.
Therefore, in the process of implementing the present application, the inventors found that the prior art has at least the following problems: current coating equipment requires replacement of the spray heads based on differences in coating requirements, resulting in inefficient coating and affecting product yield.
Disclosure of Invention
In view of the above, the present invention is directed to a coating nozzle and a coating apparatus, which can meet different coating requirements without replacing the nozzle, thereby improving coating efficiency and production efficiency, saving process steps, and improving product yield.
The invention provides a coating nozzle based on the above purpose, comprising: the nozzle comprises a nozzle body, a piezoelectric ceramic ring and a control unit; the piezoelectric ceramic ring is arranged at the outlet end of the spray head body; the piezoelectric ceramic ring is internally provided with an adjusting hole corresponding to the outlet direction of the nozzle body; the piezoelectric ceramic ring is made of piezoelectric ceramic materials, and the polarization direction is arranged along the radial direction of the adjusting hole; the control unit is respectively connected with two poles of the piezoelectric ceramic ring in the polarization direction.
Optionally, the piezoelectric ceramic ring includes at least two groups of first fan-shaped piezoelectric ceramic units, the first fan-shaped piezoelectric ceramic units are arranged at intervals, and the inner sides of the first fan-shaped piezoelectric ceramic units form the adjusting holes.
Optionally, the piezoceramic ring further comprises a fan-shaped contraction unit; the fan-shaped contraction units are arranged between the adjacent first fan-shaped piezoelectric ceramic units; the size of the fan-shaped contraction unit is matched with that of the first fan-shaped piezoelectric ceramic unit.
Optionally, the fan-shaped shrinkage unit is made of a polymer material with a shrinkage property.
Optionally, the diameter range of the adjusting hole is 0.1 mm-0.35 mm.
Optionally, the coating nozzle further comprises a piezoelectric vibration unit; the piezoelectric vibration unit is arranged on one side of the piezoelectric ceramic ring, which is far away from the outlet, and a vibration hole corresponding to the adjusting hole is arranged in the piezoelectric vibration unit; wherein the aperture of the vibration hole is larger than or equal to the aperture of the adjusting hole.
Optionally, the piezoelectric vibration unit includes at least two groups of second fan-shaped piezoelectric ceramic units, the second fan-shaped piezoelectric ceramic units are arranged at intervals, and the vibration holes are formed on the inner sides of the second fan-shaped piezoelectric ceramic units; the second fan-shaped piezoelectric ceramic unit is made of piezoelectric ceramic materials, and the polarization direction is arranged along the circumferential direction of the vibration hole; and the control unit is respectively connected with two poles of each group of second fan-shaped piezoelectric ceramic units in the polarization direction.
Optionally, the piezoelectric vibration unit further includes a vibration buffering unit; the vibration buffer units are arranged between the adjacent second fan-shaped piezoelectric ceramic units; the size of the vibration buffering unit is matched with that of the second fan-shaped piezoelectric ceramic unit.
Optionally, a vibration absorption isolation layer is arranged between the piezoelectric vibration unit and the piezoelectric ceramic ring; the vibration absorption isolation layer is internally provided with vibration absorption holes corresponding to the adjusting holes; wherein the aperture of the vibration absorption hole is larger than or equal to the aperture of the adjusting hole.
Optionally, a vibration conduction layer is arranged on one side of the piezoelectric vibration unit, which is far away from the piezoelectric ceramic ring; a conduction hole corresponding to the vibration hole is formed in the vibration conduction layer; wherein the aperture of the conducting hole is larger than or equal to the aperture of the vibrating hole.
Optionally, the piezoelectric ceramic ring, the vibration absorption isolation layer, the piezoelectric vibration unit, the vibration conduction layer and the control unit are all disposed on the inner wall of the nozzle body.
Optionally, the piezoelectric ceramic ring, the vibration absorption isolation layer, the piezoelectric vibration unit, and the vibration conduction layer are all obliquely arranged along the outlet direction.
The application also provides a coating device which comprises the coating spray head.
From the above, the coating nozzle and the coating device provided by the invention have the advantages that the piezoelectric ceramic ring is arranged at the outlet of the nozzle body, and the inner side of the piezoelectric ceramic ring forms the adjusting hole, so that the size of the outlet of the coating nozzle can be adjusted; specifically, the piezoelectric ceramic ring is made of piezoelectric ceramic materials, and the polarization direction is arranged along the radial direction of the adjusting hole, so that the control unit can enable the piezoelectric ceramic ring to contract or expand along the proceeding direction by inputting corresponding voltage, and the size of the aperture of the adjusting hole can be correspondingly adjusted. Through the design, even if different coating requirements are required in the preparation process of the same product, the pore size of the adjusting hole can be adjusted by directly outputting different voltages through the control unit, and the coating nozzle does not need to be frequently replaced. Therefore, this application coating shower nozzle and coating device can adapt to different coating demands and need not change the shower nozzle, not only improves coating efficiency and the corresponding production efficiency of product, saves the process moreover, improves the product yield.
Drawings
FIG. 1 is a schematic structural view of one embodiment of a coating nozzle provided in the present invention;
FIG. 2 is a schematic structural view of one embodiment of a piezoceramic ring provided by the present invention;
fig. 3 is a schematic structural diagram of an embodiment of a piezoelectric vibration unit provided in the present invention;
FIG. 4 is a schematic view of a connection structure of a coating nozzle and a hose according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments and the accompanying drawings.
It should be noted that all expressions using "first" and "second" in the embodiments of the present invention are used for distinguishing two entities with the same name but different names or different parameters, and it should be noted that "first" and "second" are merely for convenience of description and should not be construed as limitations of the embodiments of the present invention, and they are not described in any more detail in the following embodiments.
The utility model provides a to the problem that often need change the shower nozzle among the current coating equipment, the reason of discovery change mainly lies in need designing different spout sizes, consequently proposes can not design the spout structure of a variable size at a shower nozzle, and then need not change the shower nozzle and just can adapt to different coating demands.
Referring to fig. 1, a schematic structural diagram of an embodiment of a coating nozzle according to the present invention is shown. The coating nozzle comprises a nozzle body 1, a piezoelectric ceramic ring 2 and a control unit 3. Wherein, the nozzle body 1 is designed into a hollow structure which is used as a spraying path of the coating material; the piezoelectric ceramic ring 2 is arranged at the outlet end of the nozzle body 1, so that the coating material needs to be sprayed out through the piezoelectric ceramic ring 2; referring to fig. 2, an adjusting hole 22 corresponding to the outlet direction of the nozzle body 1 is formed in the piezoelectric ceramic ring 2; the piezoelectric ceramic ring 2 is made of piezoelectric ceramic materials, and the polarization direction is arranged along the radial direction of the adjusting hole 22; the control unit 3 is respectively connected with two poles of the piezoelectric ceramic ring 2 in the polarization direction. In this way, the control unit 3 outputs different voltages to the two poles of the piezoelectric ceramic ring 2, so that the piezoelectric ceramic ring 2 contracts or expands in the radial direction of the adjustment hole 22 based on the inverse piezoelectric effect, that is, the size of the adjustment hole 22 can be adjusted.
According to the embodiment, the coating nozzle is provided with the piezoelectric ceramic ring 2 at the outlet of the nozzle body, and the inner side of the piezoelectric ceramic ring forms the adjusting hole, so that the size of the outlet of the coating nozzle can be adjusted; specifically, the piezoceramic ring 2 is made of a piezoceramic material, and the polarization direction is arranged along the radial direction of the adjusting hole 22, so that the control unit can contract or expand the piezoceramic ring 2 along the proceeding direction by inputting corresponding voltage, that is, the size of the hole diameter of the adjusting hole 22 can be adjusted correspondingly. Through the design, even if different coating requirements are required in the preparation process of the same product, the control unit 3 can directly output different voltages to adjust the aperture size of the adjusting hole 22, and the coating spray head does not need to be frequently replaced. Therefore, the coating nozzle can adapt to different coating requirements and does not need to be replaced, the coating efficiency and the corresponding production efficiency of products are improved, the working procedures are saved, and the product yield is improved.
Furthermore, when the coating nozzle is applied to the frame sealing glue coating in the relevant display equipment, the corresponding frame sealing glue coating nozzle adopts the inverse piezoelectric effect of piezoelectric ceramics to realize the adjustment of the nozzle opening size, so that the coating nozzle can correspond to the coating of different wet glue areas and can be compatible with the manufacture of displays with various sizes, such as large, medium and small; meanwhile, the frequency of replacing the frame sealing glue coating nozzle can be effectively reduced, the service life of the coating nozzle is prolonged, and the thread cutting efficiency of the coating equipment is improved.
It should be noted that although the control unit 3 in fig. 1 is disposed in the coating nozzle, the control unit 3 may be disposed at other available positions or connected to the piezoelectric ceramic ring 2 through a lead wire according to the requirement in practical application, which is not limited in this application.
Referring to fig. 2, a schematic structural diagram of an embodiment of a piezoelectric ceramic ring according to the present invention is shown. The piezoceramic ring 2 comprises at least two groups of first sector-shaped piezoceramic cells 21, the first sector-shaped piezoceramic cells 21 being arranged at a distance from one another and the adjustment holes 22 being formed on the inside. That is, the piezoelectric ceramic ring 2 is formed by splicing a plurality of first sector piezoelectric ceramic units 21, the control unit 3 respectively applies specified voltages to two poles of the first sector piezoelectric ceramic units 21, namely, the inner wall and the outer wall of the ring, and the output stable voltage enables the piezoelectric ceramic to generate inverse piezoelectric effect, namely, the external voltage enables the first sector piezoelectric ceramic units 21 to contract or expand along the radial direction so as to increase or reduce the aperture of the nozzle. In this way, individual control can be performed for each first fan-shaped piezoelectric ceramic unit 21, finer adjustment can be achieved, and the pressing force due to the change in the circumferential dimension of the piezoelectric ceramic ring 2 can be avoided. Preferably, the first fan-shaped piezoelectric ceramic units 21 are symmetrically distributed.
In some preferred embodiments of the present application, the piezoceramic ring 2 further comprises a fan-shaped contraction unit 23; the fan-shaped contraction units 23 are arranged between the adjacent first fan-shaped piezoelectric ceramic units 21; the size of the fan-shaped contraction unit 23 is matched with the size of the first fan-shaped piezoelectric ceramic unit 21. This makes the first fan-shaped piezoceramic unit 21 and the fan-shaped contracting unit 23 form a complete ring-shaped structure, and prevents coating material from remaining in the gap. Wherein the fan-shaped contraction unit 23 needs to have a certain contractibility to match the contraction of the piezoelectric ceramics. Preferably, the fan-shaped shrinking unit 23 is a polymer material having a shrinking property.
In some preferred embodiments of the present application, the coating nozzle further comprises a piezoelectric vibrating unit 4; the piezoelectric vibration unit 4 is arranged on one side of the piezoelectric ceramic ring 2 far away from the outlet, and a vibration hole 43 corresponding to the adjusting hole 22 is arranged in the piezoelectric vibration unit 4; wherein the aperture of the vibration hole 43 is larger than or equal to the aperture of the adjusting hole 22. Therefore, the sprayed coating material needs to be firstly vibrated by the piezoelectric vibration unit 4 and then sprayed out of the adjusting hole 22, so that the congestion condition can be avoided, the uniform discharge of the coating material is facilitated, and the coating quality is improved. Further, by making the vibration hole 43 larger than or equal to the adjustment hole 22, the discharging efficiency of the coating material is not affected.
Further preferably, the piezoelectric vibration unit 4 includes at least two sets of second fan-shaped piezoelectric ceramic units 41, the second fan-shaped piezoelectric ceramic units 41 are arranged at intervals, and the vibration holes 43 are formed inside; the second fan-shaped piezoelectric ceramic unit 41 is made of a piezoelectric ceramic material, and the polarization direction is arranged along the circumferential direction of the vibration hole; the control unit 3 is respectively connected with two poles of each group of the second fan-shaped piezoelectric ceramic units 41 in the polarization direction. The control unit 3 provides high-frequency voltage to be applied to the piezoelectric vibration unit 4, and the second fan-shaped piezoelectric ceramic unit 41 contracts or expands under the high-frequency voltage to form vibration waves, so that the vibration waves are beneficial to the coating material to fully fill the spray head, and further the small-caliber spray head to discharge, and the spray head is prevented from being blocked. Therefore, the added piezoelectric vibration unit 4 can effectively solve the problem of uneven coating of the nozzle in the earlier stage of tangent line glue changing, reduce the glue breaking rate, reduce the abnormal occurrence of glue width and finally improve the product yield.
In some preferred embodiments of the present application, the piezoelectric vibration unit 4 further includes a vibration damping unit 42; the vibration buffering units 42 are arranged between the adjacent second fan-shaped piezoelectric ceramic units 41; the size of the vibration damping unit 42 is matched with the size of the second fan-shaped piezoelectric ceramic unit 41. In this way, the second fan-shaped piezoelectric ceramic unit 41 and the vibration damping unit 42 can form a complete ring structure, which is beneficial to the installation of the whole structure and avoids coating material residue.
In some preferred embodiments of the present application, a vibration absorption isolation layer 5 is disposed between the piezoelectric vibration unit 4 and the piezoelectric ceramic ring 2; the vibration absorption isolation layer 5 is internally provided with vibration absorption holes corresponding to the adjusting holes 22; wherein, the aperture of the vibration absorption hole is larger than or equal to the aperture of the adjusting hole 22. In this way, the piezoelectric vibration unit 4 can be separated from the piezoelectric ceramic ring 2 by the vibration absorption isolation layer 5, so as to prevent the vibration of the piezoelectric vibration unit 4 from affecting the precision adjustment of the piezoelectric ceramic ring 2.
In some preferred embodiments of the present application, a vibration conduction layer 6 is disposed on a side of the piezoelectric vibration unit 4 away from the piezoelectric ceramic ring 2; a conduction hole corresponding to the vibration hole is formed in the vibration conduction layer 6; wherein the aperture of the conducting hole is larger than or equal to the aperture of the vibrating hole. In this way, by arranging the vibration conduction layer 6 above the piezoelectric vibration unit 4, not only a certain pressure-resistant effect can be achieved for the piezoelectric vibration unit 4, and the influence of the extrusion of the coating material on the piezoelectric vibration unit 4 is avoided, but also a sufficient vibration space can be provided for the piezoelectric vibration unit 4 and the vibration effect on the coating material can be improved through the vibration conduction of the vibration conduction layer 6.
In some optional embodiments of the present application, the piezoelectric ceramic ring 2, the vibration absorption isolation layer 5, the piezoelectric vibration unit 4, the vibration conduction layer 6, and the control unit 3 are disposed on the inner wall of the showerhead body 1. Therefore, the inner wall of the nozzle body 1 can be used as a fixed part, and the voltage applied by the piezoelectric ceramic ring 2 only can adjust the size of the adjusting hole 22, so that the adjusting hole 22 can be controlled and adjusted more accurately.
It should be noted that, in general, in order to ensure that the channels of the rest of the structure do not affect the discharging efficiency of the regulating hole 22, it is necessary to ensure that the size of the channels formed by the rest of the hierarchical structure is larger than or equal to the size of the regulating hole 22, and preferably, a discharging channel with a reduced aperture component is formed along the discharging direction.
In some alternative embodiments of the present application, the diameter of the adjustment hole ranges from 0.1mm to 0.35 mm. For example: diameters of 0.1mm, 0.15mm, 0.2mm, 0.25mm, 0.3mm, 0.35mm, and the like. Of course, the design can be adjusted according to the actual design requirement.
In some alternative embodiments of the present application, the piezoelectric ceramic ring 2, the vibration absorbing isolation layer 5, the piezoelectric vibration unit 4, and the vibration conducting layer 6 are all disposed obliquely in the outlet direction. Therefore, the inclined arrangement is beneficial to fully filling the spray head with the coating material and reducing the residue of the coating material; but also plays a certain guiding role and improves the discharging efficiency of the coating material.
In some optional embodiments of the present application, the present application further provides a coating apparatus, which is shown in fig. 4, and is a schematic view of a connection structure between the coating nozzle and the hose according to the present invention. The coating device comprises the coating nozzle of any one of the above. As can be seen, the application head is connected via a structural part 7 to the respective coating material line 8 or container. It should be noted that the remaining equipment for implementing the coating process may be configured as the existing equipment, and therefore, the detailed description thereof is omitted.
Taking the frame sealing glue coating in the display related equipment as an example: the application provides a coating shower nozzle is a frame sealing glue shower nozzle, can solve the problem of the change shower nozzle that frame sealing glue coating equipment only adorns the shower nozzle of a size and arouses in present LCD production line. The sprayer utilizes the inverse piezoelectric effect of the piezoelectric ceramic, applies different voltages to the piezoelectric ceramic to adjust the sprayer to the required size, and provides a technical scheme for coating the frame sealing glue when different sizes and sizes are designed on the same glass substrate in a mixed mode. Meanwhile, the nozzle is provided with the piezoelectric vibration unit, the vibration unit vibrates under the condition that a certain frequency of voltage is applied, the frame sealing glue can be fully filled in the nozzle, and the defects of fine glue, glue breaking and the like in the initial stage of replacing the nozzle are avoided. Finally, the spray heads with different sizes can be provided under the condition that the spray heads are not replaced, the operation that people enter equipment to replace the spray heads can be reduced, and the introduction of particles by operators during line replacement is effectively avoided.
Those of ordinary skill in the art will understand that: the discussion of any embodiment above is meant to be exemplary only, and is not intended to intimate that the scope of the disclosure, including the claims, is limited to these examples; within the idea of the invention, also features in the above embodiments or in different embodiments may be combined, steps may be implemented in any order, and there are many other variations of the different aspects of the invention as described above, which are not provided in detail for the sake of brevity.
The embodiments of the invention are intended to embrace all such alternatives, modifications and variances that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, substitutions, improvements and the like that may be made without departing from the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (11)
1. A coating jet comprising: the nozzle comprises a nozzle body, a piezoelectric ceramic ring and a control unit; the piezoelectric ceramic ring is arranged at the outlet end of the spray head body; the piezoelectric ceramic ring is internally provided with an adjusting hole corresponding to the outlet direction of the nozzle body; the piezoelectric ceramic ring is made of piezoelectric ceramic materials, and the polarization direction is arranged along the radial direction of the adjusting hole; the control unit is respectively connected with two poles in the polarization direction of the piezoelectric ceramic ring;
the piezoelectric ceramic ring comprises at least two groups of first fan-shaped piezoelectric ceramic units, the first fan-shaped piezoelectric ceramic units are arranged at intervals, and the inner sides of the first fan-shaped piezoelectric ceramic units form the adjusting holes;
the piezoelectric ceramic ring also comprises a fan-shaped contraction unit; the fan-shaped contraction units are arranged between the adjacent first fan-shaped piezoelectric ceramic units; the size of the fan-shaped contraction unit is matched with that of the first fan-shaped piezoelectric ceramic unit.
2. The coating nozzle according to claim 1, wherein the fan-shaped shrinking unit is a polymer material having a shrinking property.
3. The coating nozzle according to claim 1 or 2, wherein the diameter of the regulating hole ranges from 0.1mm to 0.35 mm.
4. The coating nozzle according to claim 1 or 2, characterized in that it further comprises a piezoelectric vibrating unit; the piezoelectric vibration unit is arranged on one side of the piezoelectric ceramic ring, which is far away from the outlet, and a vibration hole corresponding to the adjusting hole is arranged in the piezoelectric vibration unit; wherein the aperture of the vibration hole is larger than or equal to the aperture of the adjusting hole.
5. The coating nozzle according to claim 4, wherein the piezoelectric vibration unit includes at least two sets of second fan-shaped piezoelectric ceramic units which are spaced apart from each other and inside which the vibration holes are formed; the second fan-shaped piezoelectric ceramic unit is made of piezoelectric ceramic materials, and the polarization direction is arranged along the circumferential direction of the vibration hole; and the control unit is respectively connected with two poles of each group of second fan-shaped piezoelectric ceramic units in the polarization direction.
6. The coating nozzle according to claim 5, wherein the piezoelectric vibration unit further comprises a vibration buffering unit; the vibration buffer units are arranged between the adjacent second fan-shaped piezoelectric ceramic units; the size of the vibration buffering unit is matched with that of the second fan-shaped piezoelectric ceramic unit.
7. The coating nozzle according to claim 4, wherein a vibration-absorbing isolation layer is provided between the piezoelectric vibrating unit and the piezoelectric ceramic ring; the vibration absorption isolation layer is internally provided with vibration absorption holes corresponding to the adjusting holes; wherein the aperture of the vibration absorption hole is larger than or equal to the aperture of the adjusting hole.
8. The coating nozzle according to claim 7, wherein a side of the piezoelectric vibration unit away from the piezoelectric ceramic ring is provided with a vibration conduction layer; a conduction hole corresponding to the vibration hole is formed in the vibration conduction layer; wherein the aperture of the conducting hole is larger than or equal to the aperture of the vibrating hole.
9. The coating nozzle as claimed in claim 8, wherein the piezoelectric ceramic ring, the vibration absorption isolation layer, the piezoelectric vibration unit, the vibration conduction layer, and the control unit are provided on an inner wall of the nozzle body.
10. The coating nozzle as claimed in claim 8, wherein the piezoelectric ceramic ring, the vibration absorption isolation layer, the piezoelectric vibration unit, and the vibration conduction layer are all disposed obliquely in an outlet direction.
11. A coating apparatus, characterized in that it comprises a coating nozzle according to any one of claims 1-10.
Priority Applications (1)
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CN201810002442.8A CN108117272B (en) | 2018-01-02 | 2018-01-02 | Coating nozzle and coating device |
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CN201810002442.8A CN108117272B (en) | 2018-01-02 | 2018-01-02 | Coating nozzle and coating device |
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CN108117272A CN108117272A (en) | 2018-06-05 |
CN108117272B true CN108117272B (en) | 2020-12-18 |
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CN115341274B (en) * | 2022-10-18 | 2023-05-09 | 苏州立琻半导体有限公司 | Semiconductor manufacturing apparatus and method |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201316685Y (en) * | 2008-11-24 | 2009-09-30 | 深圳市创唯星自动化设备有限公司 | Structure controlling flow of glue stuff in nozzle |
CN105584219A (en) * | 2016-03-21 | 2016-05-18 | 浙江百事德办公设备有限公司 | Spray head of color printer |
CN105642455A (en) * | 2016-03-10 | 2016-06-08 | 苏州百源基因技术有限公司 | Flow-controllable nozzle for automatic nucleic acid extraction apparatus and automatic nucleic acid extraction apparatus |
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2018
- 2018-01-02 CN CN201810002442.8A patent/CN108117272B/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201316685Y (en) * | 2008-11-24 | 2009-09-30 | 深圳市创唯星自动化设备有限公司 | Structure controlling flow of glue stuff in nozzle |
CN105642455A (en) * | 2016-03-10 | 2016-06-08 | 苏州百源基因技术有限公司 | Flow-controllable nozzle for automatic nucleic acid extraction apparatus and automatic nucleic acid extraction apparatus |
CN105584219A (en) * | 2016-03-21 | 2016-05-18 | 浙江百事德办公设备有限公司 | Spray head of color printer |
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