KR20130070214A - Illuminance measuring module and multi channel detector using thereof - Google Patents

Abstract

PURPOSE: An illumination and intensity measuring module and a multi-channel measuring device using the same are provided to accurately measure the illumination and the intensity of radiation as filters and a sensor are formed into one module by being embedded in the device. CONSTITUTION: An illumination and intensity measuring module(200) comprises a housing unit(210), a diffuser(220), an ND filter(230), a band-pass filter(240), and a sensor(250). The housing unit includes an opening(211) in the center. The diffuser is installed inside the housing unit and regularly changes the wavelengths of lights irradiated by a reference light source arranged in the front side of the housing unit. The ND filter is installed under the diffuser and reduces the intensity of the lights having high energy transmitted through the diffuser. The band-pass filter is installed under the ND filter and transmits selectively a wavelength band of a specific domain. The sensor is installed in the bottom surface of the housing unit and receives the light transmitted through the band-pass filter.

Description

Light intensity and light intensity measurement module and multi-channel detector using same

The present invention relates to a light intensity and light quantity measuring module and a multi-channel measuring device using the same.

In general, industrial and research equipment that uses light sources in the ultraviolet (Ultra Violet), visible (VIS) and infrared (IR) areas, in particular exposure equipment for patterning semiconductors or substrates, is uniform by the light emitted from the light source. In order for one exposure to be made, the light energy in the exposure machine needs to be uniformly distributed.

For uniform light energy distribution in the exposure machine, the light intensity of various wavelength bands irradiated from the light source of the exposure machine should be measured. For this purpose, the light emitted from the standard light source is received by the sensor according to the spectral characteristics within an arbitrary wavelength band. The magnitude of the light intensity and the energy integration in the wavelength band are calculated by the irradiation area of the light, and energy integration per unit time is performed through the Full Width Half Maximum (FWHM).

However, conventional light illuminance measurement has a disadvantage in that it is possible to measure illuminance of a wide light range using various measurement algorithms, but is not optimized for a spectrum of a specific wavelength band.

Therefore, measurement can be performed in a wide range of general wavelength bands, but in industrial or research equipment that needs to manage the wavelength range of the main peak, all sub peaks in addition to the main peak are measured, so that data selection for proper light intensity calculation is performed. Difficult problems are pointed out.

In addition, since light intensity measurement is performed in a wide range of wavelength bands, the sensor sensitivity of the optical sensor may be measured insensitively rather than in a specific wavelength band, thereby causing an error in light intensity measurement.

In addition, the conventional light illuminance measuring module is installed on a separate stage in the exposure machine to measure illuminance of each exposure area in the exposure machine. To measure illuminance of the entire area in the exposure machine, the individual measurement module positions are repeatedly moved repeatedly. There is a problem that can only be made roughness measurement.

Korean Patent Publication No. 2004-5387

The present invention has been devised to solve the above-mentioned disadvantages and problems raised in the conventional light intensity measurement module. An object of the present invention is to provide an optical illuminance and a light quantity measuring module capable of measuring an optimal optical energy in a specific wavelength range and minimizing a measurement error.

The object of the present invention, the housing having an opening in the center; A diffuser installed in the housing and constantly changing a wavelength of light emitted from a standard light source disposed in front of the housing; An ND (Neutral Density) filter disposed below the diffuser and configured to reduce the intensity of light of high energy via the diffuser; A band pass filter disposed below the ND filter and selectively transmitting a wavelength band of a specific region; And a sensor installed on a bottom surface of the housing and receiving a light transmitted through the band pass filter.

The housing may be configured to have an enclosure, and an opening may be formed at an upper portion thereof. In addition, the housing is preferably to adopt a structure that can discharge the internal heat to the outside, it may be preferable to use a material having excellent thermal conductivity to discharge the internal heat to the outside.

In addition, the opening width may be adjusted in consideration of the straightness and dispersion of the light irradiated from the standard light source in front of the housing, the side surface of the opening may be formed as an inclined surface. In this case, the inclined surface may be configured as a downward inclined surface on the inner surface of the opening based on the irradiation direction of the light.

In this case, the side surface of the opening may be further formed with a coating surface made of a light absorbing material.

The sensor may include a light receiving unit made of any one material of a Si diode, GaP, or InGaP, and may be selected in consideration of sensing sensitivity of a wavelength band to be sensed.

In addition, the light intensity and light intensity measurement module of the present invention may be configured in a plurality of channels on a stage on a plate at a predetermined interval, I-line (I line) and H line (H line) and Preferably, a plurality of modules having a wavelength band of a G line is provided, and between the I line and a plurality of modules having a wavelength band of an H line and an H line. A temperature / humidity measurement module that can measure the temperature and humidity in the exposure machine may be further installed.

As described above, the light illuminance and light quantity measuring module of the present invention includes filters that convert energy of light in the housing and separate a specific wavelength range into a module together with a sensor, so that accurate measurement of light intensity and light quantity can be achieved. There are possible advantages.

In addition, the present invention can significantly reduce the light intensity measurement error by preventing the diffuse reflection of the light incident on the housing by forming the opening of the housing inclined downward with respect to the direction of light incidence or by forming a coating surface made of a light absorbing material on the side wall of the opening. It can have an effect.

In addition, the present invention provides various light energy irradiated from the light source by installing a multi-channel light intensity and light quantity measuring module that can individually detect the illumination of the I-line, H-line and G-line irradiated from the light source on one stage It has the advantage of being able to measure at the same time.

1 is a schematic view of a conventional exposure apparatus in which the internal light intensity is measured using the light intensity and light intensity measurement module according to the present invention
2 is a cross-sectional view of the light intensity and light intensity measurement module according to the present invention
Figure 3 is an enlarged cross-sectional view of an embodiment of the opening of the light intensity and light intensity measurement module of the present invention, Figure 4 is an enlarged cross-sectional view of another embodiment of the opening of the light intensity and light intensity measurement module of the present invention
5 is a plan view of a multi-channel measuring instrument using light intensity and light intensity measurement module according to the present invention.

Matters relating to the operational effects including the technical configuration of the light illuminance and the light quantity measuring module according to the present invention will be clearly understood by the following detailed description with reference to the drawings in which preferred embodiments of the present invention are shown.

First, FIG. 1 is a schematic diagram of a conventional exposure apparatus in which internal light intensity is measured by using a light intensity and light quantity measuring module according to the present invention.

As shown, the exposure apparatus in which the energy inside the exposure apparatus is measured using the light intensity and light quantity measuring module of the present invention includes a light source 100, a pair of mirrors 111 and 112, an integrating lens 120, and The light intensity and light amount measuring module 200 may be configured.

The light irradiated from the light source 100 is reflected by the first mirror 111 to pass through the integrating lens 120, and the light passing through the integrating lens 120 is reflected to the second mirror 112 to reflect light intensity. The light quantity measuring module 200 may be incident to the inside.

At this time, the position where the light illuminance and the light quantity measuring module 200 are disposed is preferably positioned where the product to be exposed is placed, which accurately measures the light energy of an arbitrary wavelength range by the light illuminance and the light quantity measuring module 200. In addition, the exposure may be performed to realize a uniform quality by the light irradiated to the product to be exposed by the measured light energy.

The exposure apparatus configured as described above may be installed in a chamber (not shown).

The light source 100 may be configured as a source to which light having different wavelength ranges are irradiated, and may have I lines (I line, 365 nm) and H lines (H line, 405 nm) having different wavelengths. , G line (G line, 436 nm) is used as the source to be irradiated. Here, the light source 100 may be a standard light source.

The I-rays are short wavelength light having strong light energy, and have relatively low permeability in the resin, while the H and G-rays are light having a higher permeability in the resin to which the exposure is performed.

The light sources 100 having I lines, H lines, and G lines may have different wavelengths, respectively, and may be used as an exposure source, and may selectively take one or more light sources required for performing a process in the exposure process.

For example, the light rays of the I, H, and G lines are different in reactivity from the surface or the bottom of the solder resist (SR) applied to the surface of the substrate during the exposure process of the substrate. It may be selected in consideration of the component properties and the like.

In this case, the light energy for each light ray may be measured at the position where the product to be exposed in the exposure apparatus is placed on the substrate for accurate exposure processing, which may be measured through the light illuminance and the light quantity measuring module to be described below.

Meanwhile, in the related art, light rays, i.e. illuminance of each ray are measured by receiving light of I rays, H rays, and G rays directly from the light source 100 directly to the sensor, and thus, rays of I rays, H rays, and G rays are high energy. When it was received by the sensor due to the emission of the sensor, the sensor could be deteriorated, making accurate light energy measurement difficult.

In addition, because the high energy is emitted, the temperature around the sensor is also high, so it is difficult to accurately measure the light energy according to the temperature change. There is.

Hereinafter, the configuration of the light illuminance and the light quantity measuring module 200 installed in the exposure machine will be described in detail.

2 is a cross-sectional view of the light intensity and light intensity measurement module according to the present invention.

Here, FIG. 2 illustrates a light source 100 located in front of the light intensity and light intensity measurement module 200. However, FIG. 2 briefly illustrates an example for showing a light incident from the light source incident on the light intensity and light intensity measurement module. In the actual embodiment, it is to be understood that the light irradiated from the light source is incident on the light intensity and light intensity measurement module through various means and paths.

As shown, the light intensity and light intensity measurement module 200 according to the present invention is a housing 210, a diffuser 220, an ND filter 230, a band pass filter 240 and a sensor mounted in the housing 210 250.

Inside the housing 210, a diffuser 220, an ND filter 230, and a band pass filter 240 may be sequentially stacked on the housing 210, and the housing 210 may be a lower side of the band pass filter 240. The bottom of the sensor 250 may be mounted.

The housing 210 may be configured in an enclosure type, and an opening 211 may be formed in the upper center portion. Light emitted from the light source 100 disposed in front of the light intensity and the light quantity measuring module 200 may be incident on the opening 211, and the width of the opening may be considered in consideration of the straightness and dispersion of the light emitted from the light source 100. Can be adjusted. The amount of light incident into the housing 210 may be controlled by adjusting the width of the opening 211.

In this case, the light source 100 may be used as a source to which I lines (I line, 365 nm), H lines (H line, 405 nm), and G lines (G line, 436 nm) of different wavelengths are irradiated.

In addition, the housing 210 is preferably made of a material having excellent thermal conductivity to discharge the heat inside. In addition, the housing 210 may be made of a material having excellent thermal conductivity, and may have a structure in which heat from the inside may be discharged to the outside.

The housing 210 is formed of a material having excellent thermal conductivity or formed of a structure capable of heat dissipation, because the light energy of the light incident through the opening 211 of the housing 210 is high. Since the internal temperature may be increased, an error of light energy detected by the sensor 250 may occur, thereby reducing an illumination detection error of the sensor 250.

As shown in FIG. 3, the opening 211 formed in the housing 210 may have an inclined surface 212. The inclined surface 212 may be configured such that a sidewall of the opening 211 is a downwardly inclined surface based on the irradiation direction of light emitted from the light source 100.

3 is an enlarged cross-sectional view of an embodiment of the light illuminance and the light quantity measuring module of the present invention, and FIG. 4 is an enlarged cross-sectional view of another embodiment of the light illuminance and the light quantity measuring module of the present invention.

In addition, as illustrated in FIG. 4, a coating surface 213 made of a light absorbing material may be formed at a portion adjacent to the sidewall including the sidewall of the opening 211.

As described above, the sidewall of the opening 211 is formed to be inclined downward, or the coating surface 213 made of a material that absorbs light is formed so that the light irradiated from the light source 100 disposed in front of the housing 210 is opened. When diffused into the housing 210 through the (211), because the diffuse reflection may occur on the side wall of the opening 211 is to remove this diffuse reflection, the side wall of the opening 211 to the inside of the housing 210 By inclining downward, the light flowing into the housing 210 is not reflected through the sidewall of the opening 211, thereby suppressing the occurrence of diffuse reflection.

Meanwhile, a diffuser 220 may be mounted on the upper side of the housing 210. The diffuser 220 uniformly outputs light, that is, light energy, by scattering light while passing through any one of I, H, and G rays emitted from the light source 100 disposed in front of the housing 210. Can be dispersed to average the light output.

An ND filter 230 may be stacked below the diffuser 220. The ND filter 230 may linearly reduce the energy of the light passing through the diffuser 220 according to the efficiency of the ND filter 230 and convert the light into a light beam having a low energy and an averaged wavelength range (spectrum).

Although the light irradiated from the light source 100 and introduced into the housing 210 passes through the diffuser 220, the light intensity is reduced by a certain amount with the uniformity of the light energy, but the intensity of the high light of the high power is still maintained. Because of this, it is necessary to reduce the light intensity as a whole and convert it from high energy to low energy.

That is, the ND filter 220 does not change the spectral ratio of the light irradiated from the light source 100, but I line (I line, 365 nm), H line (H line, 405 nm), G line (G line, 436). By converting the high energy possessed by the nanometer into low energy, the internal temperature of the housing 210 due to the light incident into the housing 210 can be properly maintained.

Accordingly, deterioration of the band pass filter 240 and the sensor 250 including the diffuser 220 installed in the housing 210 can be prevented.

In addition, a band pass filter 240 may be installed under the ND filter 230. The band pass filter 240 may selectively pass a desired wavelength range in a wavelength range of light in which light energy is converted from high energy to low energy in the ND filter 230. In this case, only one wavelength range may be selected or a plurality of different wavelength ranges may be selected and passed at the same time.

In addition, the intensity of light may be reduced again while passing through the band pass filter 240, and the decrease in the intensity of light may lower the energy intensity of light according to an optical density (OD) ratio indicating an optical density of the band pass filter 240. Can be.

Finally, light may be introduced into the sensor 250 through the diffuser 220, the ND filter 230, and the band pass filter 240 to reduce energy intensity and average the spectrum.

The sensor 250 is installed on the bottom of the housing 210, which is the lower part of the band pass filter 240, and the light introduced through the opening 211 of the housing 210 is diffused 220 and the ND filter 230. The light may be incident through the band pass filter 240.

The sensor 250 may include a light receiving unit 251 made of different kinds of materials according to the type and wavelength band of light to be sensed. The light receiver 251 may be made of any one material of a Si diode, GaP, or InGaP according to a wavelength band to be sensed, and at least one or more mixtures may be selected in consideration of sensing sensitivity of a wavelength band to be sensed. have.

As illustrated in FIG. 5, the light illuminance and light quantity measuring module 200 of the present invention configured as described above may be configured as a multi-channel measuring device by installing a plurality of units at predetermined intervals on the stage 310 on a plate.

The multi-channel measuring device 300 according to the present exemplary embodiment includes a plurality of I-line light intensity and light quantity measuring modules 320 capable of sensing wavelength bands of I-line, H-line, and G-line on the stage 310 and the stage 310 on the plate, respectively. And, the H-ray light intensity and light quantity measuring module 330 and the G-ray light intensity and light quantity measuring module 340 may be installed, a plurality of temperature measuring module 350 and humidity measuring module between the plurality of light intensity and light quantity measuring module 360 may be further installed.

The multi-channel measuring device 300 configured as described above includes a plurality of light illuminance and light quantity measuring modules 320 to 340 when the light having the characteristics of the I line and the H line and the G line is irradiated to one stage 310. The illumination intensity of light can optionally be measured through.

In addition, the temperature and humidity measurement conditions of each module when measuring the light illuminance through the temperature measurement module 350 and the humidity measurement module 360 installed on the stage 310, the light illuminance and the light quantity measurement module, including the temperature and humidity in the exposure machine Can be detected.

In this case, the light intensity and light quantity measuring modules 320 to 340 capable of measuring the I-line, the H-line, and the G-line individually are arranged in a line for each measurement module of each ray, or the measurement modules of each ray are mixed at regular intervals. It can be arranged as.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It will be understood that the invention may be varied and varied without departing from the scope of the invention.

100. Light source 200. Light intensity and light intensity measurement module
210.Housing 211.Openings
220. Diffuser 230.ND Filter
240. Band Pass Filter 250. Sensor
300. Multichannel meter 310. Stage
350. Temperature measuring module 360. Humidity measuring module

Claims (12)

A housing having an opening in the center;
A diffuser installed in the housing and constantly changing a wavelength of light emitted from a standard light source disposed in front of the housing;
An ND (Neutral Density) filter disposed below the diffuser and configured to reduce the intensity of light of high energy via the diffuser;
A band pass filter disposed below the ND filter and selectively transmitting a wavelength band of a specific region; And
A sensor installed at a bottom surface of the housing and receiving light transmitted through the band pass filter;
Light intensity and light intensity measurement module comprising a.
The method of claim 1,
The housing is formed in a housing shape, the opening is formed in the upper portion, the light illuminance and light quantity measuring module composed of a material having excellent thermal conductivity that can discharge the internal heat to the outside.
The method of claim 1,
The opening may have an inner surface formed as an inclined surface, and the inclined surface is configured to have a downward inclined surface with respect to a light irradiation direction.
The method of claim 1,
The inner surface of the opening is a light intensity and light quantity measuring module is formed with a coating surface made of a light absorbing material.
The method of claim 1,
The sensor may be made of any one material of a Si diode, GaP, InGaP, and includes a light receiving unit consisting of at least one or one or more mixtures in consideration of the sensing sensitivity of the wavelength band to be sensed.
The method of claim 1,
The diffuser is a light illuminance and light quantity measuring module for averaging the light output by uniformly dispersing the light energy by scattering light while passing through any one of the I-line, H-line or G-line irradiated from the light source.
The method of claim 1,
The ND filter is a light illuminance for appropriately maintaining the internal temperature by the light incident into the housing by converting the high energy of the I-line, H-line, G-line irradiated from the light source 100 into low energy Light intensity measurement module.
The method of claim 1,
The ND filter may select only one wavelength range or simultaneously select and pass a plurality of different wavelength ranges.
A diffuser, an ND filter, a band pass filter, and a sensor are built in a housing having an opening to disperse and average light emitted from a light source in front of the housing, and selectively transmit a specific wavelength range to be received by the sensor. In the multi-channel measuring instrument equipped with the light intensity and light intensity measurement module,
In the stage on the plate, a plurality of light intensity and light quantity measuring modules in which I, H, and G lines are individually measured are arranged in a line, or a plurality of light illuminance and light quantity measuring modules in which the I, H, and G lines are sensed are mixed. Multi-channel meter that is arranged at regular intervals.
10. The method of claim 9,
The diffuser constantly changes the wavelength of light irradiated from a standard light source disposed in front of the housing, the ND filter reduces the intensity of the high energy light via the diffuser, and the bandpass filter comprises a specific region. Multi-channel measuring instrument for selectively transmitting the wavelength range of the.
10. The method of claim 9,
And a plurality of temperature measuring modules and a humidity measuring module are installed between the plurality of light illuminance and light quantity measuring modules.
10. The method of claim 9,
The sensor may be made of any one material of a Si diode, GaP, InGaP, and includes a light receiving unit made of at least one or one or more mixtures in consideration of the sensing sensitivity of the wavelength band to be sensed.

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