JP2013127442A - Illuminance and light quantity measuring module, and multichannel measuring apparatus using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an illuminance and light quantity measuring module, and a multichannel measuring apparatus using the same.SOLUTION: The illuminance and light quantity measuring module includes: a housing 210 having an opening in the center thereof; a diffuser 220 which is provided in the housing, scatters light emitted from a light source 100 arranged in front of the housing while making the light passing therethrough, and uniformly diffuses light energy; an ND (NeutralDensity) filter 230 which is provided on the lower part of the diffuser and reduces intensity of high energy light having passed through the diffuser; a band-pass filter 240 which is provided on the lower part of the ND filter and selectively transmits a wavelength region band of a specific region therethrough; and a sensor 250 which is provided on the bottom of the housing and receives light having transmitted through the band-pass filter.

Description

  The present invention relates to an illuminance and light quantity measurement module and a multi-channel measurement device using the same.

  In general, industrial and research equipment using light sources in the UV (Ultra Violet), VIS (Visible), and IR (Infrared ray) regions, in particular, an exposure apparatus for patterning a semiconductor or a substrate is diverged from the light source. In order to perform uniform exposure by light, it is necessary to uniformly distribute light energy in the exposure machine.

  For uniform light energy distribution in the exposure machine, the illuminances in various wavelength bands irradiated from the light source of the exposure machine must be measured. For this purpose, the light emitted from the standard light source is received by the sensor, and the intensity of the light based on the spectral characteristics in an arbitrary wavelength band and the energy integration of the wavelength band are calculated using the light irradiation area. . Further, energy integration per unit time is performed by FWHM (Full Width Half Maximum).

  However, the conventional illuminance measurement can measure the illuminance in a wide light region band by using various measurement algorithms, but has a disadvantage that it cannot be optimized for a spectrum in a specific wavelength band.

  Therefore, measurement in a wide and general wavelength band is possible, but in the industrial or research equipment that needs to manage the main peak wavelength band, all the serve peaks are measured in addition to the main peak. However, it has been pointed out that it is difficult to select data for calculating appropriate illuminance.

  In addition, when the illuminance measurement is performed in a wide wavelength band, the measurement sensitivity of the optical sensor is not specified in the specific wavelength band and is measured insensitively, so that an error occurs in the illuminance measurement.

  In addition, the conventional illuminance measurement module is provided on another stage in the exposure machine and measures the illuminance with respect to each exposure area in the exposure machine. In order to measure the illuminance with respect to the entire area in the exposure machine, an individual measurement module is used. There is a problem that illuminance measurement must be performed by repeatedly moving the position.

Korean Published Patent No. 10-2004-0005387 Korean Published Patent No. 10-1999-0038986

  The present invention has been derived in order to solve the disadvantages and problems that have been raised in the conventional illuminance measurement module. It is another object of the present invention to provide an illuminance and light quantity measurement module that can perform optimum light energy measurement in a specific wavelength band and minimize measurement errors.

  The object of the present invention is to uniformly disperse the light energy by scattering while passing the light emitted from a standard light source provided in the housing and disposed in front of the housing having an opening in the center. A diffusing diffuser, an ND (Neutral Density) filter provided at a lower portion of the diffuser for reducing the intensity of high energy light that has passed through the diffuser, and a lower portion of the ND filter, and a wavelength region band of a specific region This is achieved by providing an illuminance and light quantity measurement module including a band-pass filter that selectively transmits light and a sensor that is provided on the bottom surface of the housing and receives light transmitted through the band-pass filter. The

  The housing may have a box shape, and an opening may be formed at an upper portion. Further, the housing preferably uses a structure capable of discharging internal heat to the outside, and in order to discharge internal heat to the outside, it is preferable to use a material excellent in heat conduction.

  In addition, the opening can be adjusted in width in consideration of straightness and dispersion of light emitted from a standard light source in front of the housing, and the side surface of the opening can be formed as an inclined surface. . Here, the inclined surface may be configured as a downwardly inclined surface on the inner surface of the opening with reference to the light irradiation direction.

  At this time, a coating surface made of a light absorbing material may be formed on a side surface of the opening.

  Meanwhile, the sensor may include a light receiving unit made of any one material of Si diode, GaP, and InGaP, and may be selected in consideration of detection sensitivity of a wavelength band to be detected.

  In addition, the illuminance and light quantity measurement module of the present invention can be configured as a multichannel by providing a plurality of modules on a plate-like stage at a predetermined interval. When configuring a multichannel, an I line (I line) ), H line (H line), and G line (G line) are preferably provided with a plurality of modules, and the I line (I line), H line (H line) and G line (G line) are preferably provided. A temperature / humidity measurement module capable of measuring the temperature and humidity in the exposure apparatus can be further provided between the plurality of modules having the wavelength band of).

  As described above, the illuminance and light quantity measurement module of the present invention includes a filter that converts light energy and separates a specific wavelength region band in the housing together with the sensor, and is configured as an integrated module. And has the advantage of being able to accurately measure the amount of light.

  In addition, the present invention can be configured such that the opening of the housing is formed so as to be inclined downward with respect to the light incident direction, or the side wall of the opening is formed of a coating surface made of a light absorbing material. It is possible to prevent the irregular reflection at the time of incidence, and to exert an effect that can significantly reduce the illuminance measurement error.

  In addition, the present invention irradiates from a light source by providing a multi-channel illuminance and light quantity measurement module capable of individually detecting the illuminance of I-line, H-line and G-line irradiated from a light source on one stage. It has an advantage that various light energies can be measured simultaneously.

It is a general | schematic route map of the normal exposure apparatus which measures internal illumination intensity using the illumination intensity and light quantity measurement module by this invention. It is sectional drawing of the illumination intensity and light quantity measurement module by this invention. It is sectional drawing to which the opening part of the illumination intensity and light quantity measurement module by one Embodiment of this invention was expanded. It is sectional drawing to which the opening part of the illumination intensity and light quantity measurement module by other embodiment of this invention was expanded. It is a top view of the multichannel measuring device using the illumination intensity and light quantity measurement module by this invention.

  The technical configuration and operational effects of the illuminance and light quantity measurement module according to the present invention can be clearly understood from the following detailed description with reference to the drawings in which preferred embodiments of the present invention are illustrated.

  FIG. 1 is a schematic diagram of a typical exposure apparatus that measures internal illuminance using the illuminance and light quantity measurement module according to the present invention.

  As shown in FIG. 1, an exposure apparatus that measures the energy inside the exposure apparatus using the illuminance and light quantity measurement module of the present invention includes a light source 100, a pair of mirrors 111 and 112, an integration lens 120, and an illuminance. And the light quantity measurement module 200.

  The light emitted from the light source 100 is reflected by the first mirror 111 and passes through the integration lens 120, and the light that has passed through the integration lens 120 is reflected by the second mirror 112 and enters the illuminance and light quantity measurement module 200. Can be incident.

  At this time, it is preferable that the illuminance and light quantity measurement module 200 is disposed where the product to be exposed is located. As a result, the optical energy in an arbitrary wavelength region band is accurately measured by the illuminance and light quantity measurement module 200, and exposure that realizes uniform quality using the light irradiated to the product to be exposed by the measured light energy is performed. Can be done.

  The exposure apparatus configured as described above can be provided in a chamber (not shown).

  The light source 100 may be composed of a source irradiated with light having different wavelength region bands, and an I line (I line, 365 nm) and an H line (H line, 405 nm) having different wavelengths. , G line (G line, 436 nm) is used as a source irradiated. Here, the light source 100 may be a standard light source.

  The I-line is a short-wavelength light having a high light energy and relatively low transparency in the resin. The H-line and G-line are light having higher transparency in the resin to be exposed than the I-line. It is.

  The light source 100 having such I-line, H-line, and G-line can be used as an exposure source having different wavelengths, and one or more light sources necessary for performing the exposure process are selected and used. be able to.

  For example, the light rays of the I-line, H-line, and G-line have different reactivity on the surface or bottom of a solder resist (SR) applied to the surface of the substrate during the substrate exposure process. It can be selected in consideration of the process characteristics of the substrate or the component characteristics of the solder resist.

  In this case, in order to perform an accurate exposure process on the substrate, the light energy for each light beam can be measured at the position where the product to be exposed in the exposure machine is placed. Can be measured.

  On the other hand, conventionally, the light energy of each light beam, that is, the illuminance was measured by directly receiving the light beams of I, H and G rays emitted from the light source 100 by the sensor. Since the ray of light diverges high energy, there is a possibility of degrading the sensor when it is received by the sensor, and accurate light energy measurement is difficult.

  In addition, since the temperature around the sensor becomes high due to the high energy divergence, accurate light energy measurement due to temperature changes may be difficult, so the high energy of each light is converted to low energy and the temperature around the sensor Must be maintained at a relatively low temperature.

  Hereinafter, the configuration of the illuminance and light quantity measurement module 200 provided in the exposure apparatus will be described in detail.

  FIG. 2 is a cross-sectional view of an illuminance and light quantity measurement module according to the present invention.

  Here, in FIG. 2, the light source 100 is positioned in front of the illuminance and light quantity measurement module 200, but this is an example for illustrating a form in which light emitted from the light source is incident on the illuminance and light quantity measurement module It should be understood that in an actual embodiment, the light emitted from the light source is incident on the illuminance and light quantity measurement module through various means and paths.

  As shown in FIG. 2, the illuminance and light quantity measurement module 200 according to the present invention includes a housing 210, a diffuser 220 mounted in the housing 210, an ND filter 230, a bandpass filter 240, a sensor 250, Can be configured with.

  In the housing 210, a diffuser 220, an ND filter 230, and a band pass filter 240 may be sequentially stacked from above, and a sensor 250 is provided on the bottom surface of the housing 210 that is the lower side of the band pass filter 240. Can be fitted.

  The housing 210 may be formed in a box shape, and an opening 211 may be formed at an upper central portion. The opening 211 can receive light emitted from the light source 100 disposed in front of the illuminance and light quantity measurement module 200, and takes into account the straightness and dispersion of the light emitted from the light source 100. The width can be adjusted. It goes without saying that the amount of light entering the housing 210 can be adjusted by adjusting the width of the opening 211.

At this time, the light source 100 can be used as a source irradiated with I-line (I line, 365 nm), H-line (H line, 405 nm), and G-line (G line, 436 nm) having different wavelengths.

  The housing 210 is preferably made of a material having excellent heat conduction so as to discharge internal heat to the outside. Further, the housing 210 is preferably made of a material excellent in heat conduction and has a structure that allows internal heat to be discharged to the outside.

  The reason why the housing 210 is made of a material excellent in heat conduction or formed into a structure capable of discharging heat is that light incident through the opening 211 of the housing 210 has high light energy, and the inside of the housing 210 This is to reduce the illuminance detection error of the sensor 250 because there is a possibility that the temperature becomes high and an error in light energy detected by the sensor 250 may occur.

  As shown in FIG. 3, the opening 211 formed in the housing 210 may have a side surface formed in an inclined surface 212. The side wall of the opening 211 may be formed as a downwardly inclined surface based on the irradiation direction of light emitted from the light source 100.

  3 is an enlarged cross-sectional view of the opening of the illuminance and light quantity measurement module according to one embodiment of the present invention, and FIG. 4 is an opening of the illuminance and light quantity measurement module according to another embodiment of the present invention. FIG.

  In addition, as shown in FIG. 4, a coating surface 213 made of a light absorbing material may be formed on the side wall of the opening 211 and a portion adjacent to the side wall.

  As described above, the reason why the side wall of the opening 211 is formed as a downwardly inclined surface or the coating surface 213 made of a material that absorbs light is that the light irradiated from the light source 100 disposed in front of the housing 210 is the opening. When the light is incident on the inside of the housing 210 via the 211, there is a possibility that irregular reflection may occur on the side wall of the opening 211. To remove this irregular reflection, the side wall of the opening 211 is directed downward to the inside of the housing 210. By inclining, the light incident on the inside of the housing 210 is prevented from being reflected through the side wall of the opening 211, and the occurrence of irregular reflection can be suppressed.

  Meanwhile, a diffuser 220 may be mounted on the upper side of the housing 210. The diffuser 220 can average the light output by uniformly dispersing the light output, that is, the light energy by light scattering while allowing the light emitted from the light source 100 disposed in front of the housing 210 to pass therethrough.

  An ND filter 230 may be stacked below the diffuser 220. The ND filter 230 can reduce the energy of light that has passed through the diffuser 220 linearly by the efficiency of the ND filter 230 and convert the light into a light beam having a wavelength region band (spectrum) averaged with low energy.

  The light emitted from the light source 100 and incident on the housing 210 passes through the diffuser 220 to make the light energy uniform and reduce the light intensity by a certain amount, but still has a high light intensity ( (intensity) is maintained, it is necessary to reduce the light intensity as a whole to convert from high energy to low energy.

  In other words, the ND filter 230 does not change the proportion of the spectrum of light emitted from the light source 100, and the I line (I line, 365 nm), H line (H line, 405 nm), and G line (G line, 436 nm) are emitted. The increase in the internal temperature of the housing 210 due to the light incident on the housing 210 is suppressed by converting the high energy to low energy.

  Thereby, deterioration of the bandpass filter 240 and the sensor 250 as well as the diffuser 220 provided in the housing 210 can be prevented.

  In addition, a band pass filter 240 may be provided below the ND filter 230. The band pass filter 240 can selectively pass a desired wavelength region band in the wavelength region band of the light whose light energy is converted from high energy to low energy by the ND filter 230. At this time, only one wavelength region band can be selected, or different wavelength region bands can be selected and passed at the same time.

  In addition, the light intensity can be reduced while passing through the bandpass filter 240, and the optical intensity of the bandpass filter 240 is reduced according to the optical density (OD) rate by reducing the light intensity. The energy intensity of light can be reduced.

  Finally, the energy intensity is reduced through the diffuser 220, the ND filter 230, and the band pass filter 240, and the spectrum averaged light can be incident on the sensor 250.

  The sensor 250 is provided on the bottom surface of the housing 210, which is a lower part of the band pass filter 240, and light incident through the opening 211 of the housing 210 passes through the diffuser 220, the ND filter 230, and the band pass filter 240 and enters. Can be done.

  The sensor 250 can include a light receiving unit 251 made of different types of materials depending on the type of light to be detected and the wavelength band. The light receiving unit 251 can be made of any one material of Si diode, GaP, and InGaP according to the wavelength band to be detected, and at least one in consideration of the detection sensitivity of the wavelength band to be detected. One or more than one mixture can be selected.

  As shown in FIG. 5, the illuminance and light quantity measurement module 200 of the present invention configured as described above is provided with a plurality of multi-channel measuring devices provided on the plate-like stage 310 at predetermined intervals. Can

  The multi-channel measuring device 300 of the present embodiment includes a plate-like stage 310 and a plurality of I-line illuminance and light quantity measurement modules 320 that can detect the wavelength bands of I-line, H-line, and G-line on the stage 310, respectively. The H-ray illuminance and light quantity measurement module 330 and the G-line illuminance and light quantity measurement module 340 can be provided, and a plurality of temperature measurement modules 350 and humidity measurement modules 360 are further provided between the plurality of illuminance and light quantity measurement modules. Can be provided.

  The multi-channel measuring device 300 configured as described above has a plurality of illuminance and light quantity measurement modules when one stage 310 is irradiated with light having I-line, H-line, and G-line characteristics. The illuminance of light can be selectively measured through 320 to 340.

  When measuring the illuminance through the temperature measurement module 350 and the humidity measurement module 360 provided on the stage 310 and the illuminance and light quantity measurement module as well as the temperature and humidity in the exposure apparatus, the temperature and humidity of each module. Measurement conditions can be detected.

  At this time, the illuminance and light quantity measurement modules 320 to 340 capable of individually measuring the I-line, H-line, and G-line are arranged in a line for each measurement module for each light beam, or the measurement modules for each light beam are mixed. Can be arranged at regular intervals.

  As described above, the preferred embodiments of the present invention have been described. However, those who have ordinary knowledge in the relevant technical field may fall within the spirit and scope of the present invention described in the claims. It will be understood that the invention is capable of various modifications and changes.

DESCRIPTION OF SYMBOLS 100 Light source 200 Illuminance and light quantity measurement module 210 Housing 211 Opening part 220 Diffuser 230 ND filter 240 Band pass filter 250 Sensor 300 Multichannel measuring device 310 Stage 350 Temperature measurement module 360 Humidity measurement module

Claims (12)

A housing having an opening in the center;
A diffuser that is provided in the housing and uniformly disperses light energy by scattering while passing light emitted from a standard light source disposed in front of the housing;
An ND filter provided at a lower portion of the diffuser for reducing the intensity of high-energy light that has passed through the diffuser;
A bandpass filter that is provided below the ND filter and selectively transmits a wavelength region of a specific region;
A sensor provided on a bottom surface of the housing and receiving light transmitted through the band-pass filter;
Illuminance and light quantity measurement module including   2. The illuminance and light quantity measurement module according to claim 1, wherein the housing is configured in a box shape, the opening is formed in an upper portion, and the housing is made of a material excellent in heat conduction that can discharge internal heat to the outside. .   2. The illuminance and light quantity measurement module according to claim 1, wherein an inner surface of the opening is formed as an inclined surface, and the inclined surface is configured as a downward inclined surface with reference to a light irradiation direction.   The illuminance and light quantity measurement module according to claim 1, wherein a coating surface made of a light absorbing material is formed on an inner surface of the opening.   The sensor may be made of any one material of Si diode, GaP, and InGaP, and includes at least one or a mixture of one or more in consideration of detection sensitivity of a wavelength band to be detected. The illuminance and light quantity measurement module according to claim 1 including a light receiving part.   2. The diffuser averages light output by uniformly dispersing light energy by light scattering while any one of I-ray, H-ray, and G-ray irradiated from the light source passes through the diffuser. Illuminance and light quantity measurement module as described.   The ND filter suppresses an increase in internal temperature due to light incident in the housing by converting the high energy of the I, H, and G rays emitted from the light source into low energy. The illuminance and light quantity measurement module according to claim 1.   The illuminance and light quantity measurement module according to claim 1, wherein the band pass filter selects only one wavelength region band or simultaneously selects and passes different wavelength region bands. A diffuser, an ND filter, a bandpass filter, and a sensor are built in a housing having an opening, and the light emitted from the light source in front of the housing is dispersed and averaged to selectively select a specific wavelength region band. A multi-channel measuring device provided with an illuminance and light quantity measurement module that is transmitted through and received by the sensor,
A plurality of illuminance and light quantity measuring modules for individually measuring I-line, H-line, and G-line are arranged on a plate-like stage, or a plurality of illuminances for detecting the I-line, H-line, and G-line And a multi-channel measuring device in which light quantity measurement modules are mixed and arranged at a constant interval.   The diffuser scatters light while uniformly irradiating light emitted from a standard light source disposed in front of the housing, and the ND filter distributes the intensity of high energy light that has passed through the diffuser. The multi-channel measurement device according to claim 9, wherein the band-pass filter selectively transmits a wavelength region band of a specific region.   The multi-channel measurement device according to claim 9, wherein a plurality of temperature measurement modules and humidity measurement modules are further provided between the plurality of illuminance and light quantity measurement modules.   The sensor may be made of any one material of Si diode, GaP, and InGaP, and includes at least one or a mixture of one or more in consideration of detection sensitivity of a wavelength band to be detected. The multi-channel measuring device according to claim 9 including a light receiving unit.

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