KR20130025812A - Splitting device - Google Patents

Abstract

PURPOSE: A splitting device is provided to shorten scribing time and to enable simplification and miniaturization. CONSTITUTION: A splitting device comprises a scribing device(10), an inverter, a brake device, and a transfer device. The scribing device comprises a plurality of cutting blades(11), a beam(12), a first support(13), a first support moving device(14), an elevating device(15), and a position adjusting device(16).

Description

Splitting Device

The present invention relates to a dividing apparatus for forming a scribe line on a brittle plate and dividing the brittle plate into a plurality of urea plates by brittle fracture of the brittle plate along the scribe line.

A brittle plate material, such as a glass substrate which comprises a semiconductor wafer or a flat-panel display panel, can be segmented into several element board material by the dividing apparatus which performs a scribe process. The brittle plate is a plate-shaped member composed of a brittle material, and the brittle material includes semiconductors, glass, quartz, ceramics, and the like. In addition, a flat display panel is a liquid crystal display panel, an organic electroluminescence (EL) panel, etc., for example.

The conventional dividing apparatus which performs a scribe process is disclosed by patent document 1, patent document 2, etc., for example. Scribing is realized by the scribe process and the brake process.

A scribe process is a process of forming a scribe line with respect to the surface of a brittle board material along the boundary line of several element board material. The scribe line is a crack formed in a straight line or a curved shape from one edge to another edge in the brittle plate. In addition, a scribe line is formed by a high hardness cutting edge such as diamond sliding or rolling the surface of the brittle plate, or by laser light.

Hereinafter, the working point which forms a scribe line in a brittle board | plate material, such as a cutting edge or the output part of a laser beam, is called a scribe process edge part. In addition, the cutting edge, for example, is formed on the outer peripheral portion of the disk-shaped rotating body, the annular diamond blade is formed, the surface of the scribing wheel or contacting the surface of the brittle plate material or the surface of the brittle plate material Such as sliding diamond point.

A brake process is a process of brittle-breaking a brittle plate material along a scribe line by pressing a brake bar along a scribe line with respect to the surface on the opposite side to the surface in which the scribe line in a brittle plate material was formed. The brake bar used in the brake process is a member whose tip forms a ridgeline along the scribe line. The brittle plate is divided into a plurality of element plates along the scribe line by brittle fracture along the scribe line, that is, the scribing line (linear crack) formed on one side is advanced to the opposite side.

Moreover, the glass substrate used as a base material of a liquid crystal display panel has a structure which two glass plates overlapped between the liquid crystal layers. As disclosed in Patent Literature 1, such a brittle plate member is divided into a plurality of urea plate members by performing a scribing step and a brake step on each of the two glass plates.

Moreover, in the scribing process disclosed by patent document 1 and patent document 2, the scribe line which crosses a brittle plate material, and the scribe line which terminates a brittle plate material are formed in the state which mutually crosses.

By the way, in the manufacturing process of relatively small panel components, such as a small flat display panel with a mobile telephone or a smart phone, a narrow and long brittle board | plate material may be divided only in the scribe line crossing in the width direction. have. In this case, in the scribing step, only a scribe line that traverses the elongate brittle plate in the width direction is formed. Hereinafter, the scribing process including such a scribing process is called transverse scribe process.

8 and 9 show a separation step according to the first conventional example and a separation step according to the second conventional example, in which the conventional dividing apparatus disclosed in Patent Documents 1 and 2 is applied to the cross scribe processing of a brittle plate. Schematic diagram of each. In the dividing process shown in FIG.8 and FIG.9, the workpiece | work 9 which is a brittle plate | plate material of a process object is conveyed along the linear main path R1 covering several processes, including a scribe process and a brake process.

8 and 9, the X-axis direction is a linear direction along the main path R1, the Y-axis direction is a width direction orthogonal to the direction of the main path R1, and the Z-axis direction Is a height direction orthogonal to the direction of the main path R1 and the width direction.

8A and 8B are diagrams respectively showing a state before execution and a state after execution of the scribing step in the dividing step according to the first conventional example. In the scribing process of a 1st prior art example, the scribing apparatus 100A provided with the scribing edge part 101 which reciprocates in the width direction (Y-axis direction) is used.

In the scribing process in a 1st prior art example, the workpiece | work 9 is conveyed by fixed distance along the main path R1 in the state in which the longitudinal direction follows the direction of the main path R1. Moreover, the scribing edge part 101 moves along the width direction whenever the workpiece | work 9 is conveyed by a fixed distance, and is plural parallel scribes which traverse the workpiece | work 9 with respect to one surface of the workpiece | work 9. The line Ls is formed.

In the first conventional example, an inversion step is performed after the scribing step. 8C is a diagram illustrating an inversion step. In the inversion process, the inversion mechanism 200 inverts the workpiece | work 9 in which the some scribe line Ls was formed up and down.

In the first conventional example, the brake process is performed after the inversion process. FIG. 8D is a diagram illustrating a state after the brake step is executed. In the brake step in the first conventional example, a brake device 300 having a brake bar 301 that is supported along the width direction (Y axis direction) and reciprocates in the height direction (Z axis direction) is used. do.

In the scribing process in a 1st prior art example, the workpiece | work 9 is conveyed by fixed distance along the main path R1 in the state in which the longitudinal direction follows the direction of the main path R1. In addition, the brake bar 301 presses the other surface of the workpiece | work 9 along the scribe line Ls by moving in the height direction every time the workpiece | work 9 is conveyed by fixed distance. Thereby, the workpiece | work 9 is brittle-broken along each of the some scribe line Ls, and is divided into the some element board | plate material 91. As shown in FIG.

In addition, the other surface of the workpiece | work 9 is a surface opposite to the surface in which the scribe line Ls in the workpiece | work 9 was formed.

Next, a second conventional example will be described. 9 (a) and 9 (b) are diagrams showing a state before execution and a state after execution of the scribing step in the dividing step according to the second conventional example, respectively. In the scribing process in a 2nd prior art example, the scribing apparatus 100B provided with the some scribing edge part 101 arrange | positioned at intervals along the width direction (Y-axis direction) is used.

In the scribing process in a 2nd prior art example, the workpiece | work 9 is conveyed along main path R1 in the state along the direction (Y-axis direction) orthogonal to the direction of main path R1 orthogonal. . In addition, the plurality of scribing end portions 101 form a plurality of parallel scribe lines Ls that traverse the workpiece 9 with respect to one surface of the workpiece 9 during movement along the main path R1. .

In the second conventional example, the direction switching step is performed after the scribing step. FIG. 9C is a diagram illustrating a direction change step. In the direction change process, the direction change mechanism 400 rotates the workpiece | work 9 in which the some scribe line Ls was formed, and changes the direction of the workpiece | work 9 by 90 degrees.

In the second conventional example, the reversal process and the brake process are performed after the redirection step similarly to the first conventional example. FIG. 9D is a diagram showing an inversion process, and FIG. 9E is a diagram showing a state after the brake process is executed. The contents of the inversion step and the brake step in the second conventional example are the same as the contents of the inversion step and the brake step in the first conventional example described above.

Japanese Patent Application Publication No. 2006-315901 Japanese Patent Application Publication No. 2003-292333

When the 1st prior art example shown in FIG. 8 is employ | adopted, the dimension of the dividing apparatus in the width direction can be made small. However, the first conventional example has a problem in that the larger the number of parts of the brittle plate (work 9), that is, the larger the number of scribe lines Ls, the longer the time required for the scribing step.

On the other hand, when the 2nd conventional example shown in FIG. 9 is employ | adopted, the number of scribing edge parts 11 according to the parting number of a brittle plate material is provided, and the time required for a scribe process can be shortened. However, the second conventional example has a problem that the longer the length of the brittle plate is, the larger the size of the dividing device in the width direction orthogonal to the direction of the main path R1 becomes. Further, the second conventional example also has a problem that the dividing apparatus is enlarged and complicated as much as the one requiring the mechanism and the step of changing the brittle plate and the time required for the dividing process is long.

Moreover, as an application example of the 1st prior art example shown in FIG. 8, it is also conceivable that the mechanism which moves a plurality of scribing edge parts in the width direction of the elongate brittle board | plate material is provided. In this case, the member supporting the plurality of scribing ends is a long member along the first direction.

However, a long member supporting a plurality of scribed ends is a thick and heavy member because high rigidity is required. The mechanism for moving such a heavy member is not practical because it becomes a large mechanism.

An object of the present invention is to shorten the time required for the scribing step when a long brittle plate is divided along only a plurality of scribe lines traversing in the width direction by scribing, and at the same time, It can be simplified and downsized.

The dividing apparatus according to the first invention forms a scribe line on a brittle plate that is sequentially transferred to a plurality of positions in a main path along the first direction, and brittles and breaks the brittle plate along the scribe line. It is an apparatus for dividing, and is provided with each component shown below.

(1) A 1st component is a support stand which supports and fixes the said brittle board | plate material.

(2) The second component is a support moving mechanism for reciprocating the support in a second direction crossing the first direction from a predetermined position in the main path.

(3) A 3rd component is a some scribing edge part which forms the said scribe line with respect to the said brittle board | plate material.

(4) The fourth component supports each of the plurality of scribing end portions at intervals along the first direction, and with respect to the brittle plate member fixed to the support base during movement by the support movement mechanism. A machining end support mechanism for holding a scribe line at a machining position capable of being formed.

The dividing device according to the second invention, in addition to the structure of the dividing device according to the first invention, further includes the following structure. In other words, the dividing device according to the second invention further includes a transfer mechanism including a series of frames and a moving support shown below. The series of frames is a member formed along the first direction over a range from both the left and right sides of the main path to both sides of the processing reference position in the first direction. The movable support part is supported by the series of frames so as to be movable in the first direction, and selectively switches to a state of supporting the brittle plate and a state of releasing the support of the brittle plate, thereby changing the brittle plate. It is a mechanism for sequentially conveying to the several position in the said main path. Moreover, in the dividing apparatus which concerns on 3rd invention, the said process edge part support mechanism is arrange | positioned at the other side side among the left and right both sides of the said main path | route.

Moreover, in the dividing apparatus which concerns on 1st invention or 2nd invention, it is conceivable that the cutting edge which cuts a scribe line in contact with a brittle plate material is employ | adopted as a typical example of a scribe process edge part. In this case, the processing end support mechanism supports each of the plurality of cutting edges at intervals along the first direction, and moves one of the path and the return path by the support movement mechanism. It is a mechanism for selectively holding in the said processing position which contact | connects the said brittle plate fixed to the said support stand, and the retracted position spaced apart from the said brittle plate.

In the first invention, in a state in which a plurality of scribing end portions are held in the machining position, the brittle plate is moved in the second direction (width direction) intersecting with the first direction, which is the conveying direction, by the support moving mechanism. do. Therefore, according to the first invention, a plurality of scribe lines traversing the brittle plate in the second direction are simultaneously formed with respect to the surface of the brittle plate during movement. As a result, the time required for the scribing step is significantly shortened as compared with the first conventional example (see Fig. 8) in which one scribing end is reciprocated by the number of times according to the number of scribe lines.

Further, in general, the brittle plate member having a long shape in which only scribe lines crossing in the width direction are formed is relatively small and lightweight, unlike the brittle plate member in which a scribe line having a lattice shape is formed. Therefore, the support movement mechanism in the first invention can be realized by a relatively small and simple mechanism.

In addition, in 1st invention, when a brittle plate is a long plate, the brittle plate is conveyed in the state along a 1st direction (direction of a main path | route) of a longitudinal direction. Then, the support movement mechanism may reciprocate the support on which the brittle plate is fixed by a short distance that is slightly longer than the small width of the brittle plate from a predetermined position on the main path in the width direction of the brittle plate. Therefore, according to 1st invention, the dimension of the dividing apparatus in the width direction orthogonal to a conveyance direction is suppressed comparatively small regardless of the length of a brittle board | plate material.

Further, according to the first invention, since the scribe line is formed in a state in which the longitudinal direction of the brittle plate is along the first direction (the direction of the main path), the brittle plate is changed in direction as in the second conventional example shown in FIG. No tools and processes are required. Therefore, the problem that the division | segmentation apparatus becomes large and complicated by the redirection of a brittle board material, and the time required for a division process becomes long does not arise, either.

As shown above, according to the first invention, when the elongated brittle plate is divided only in the scribe line along the width direction by scribing, the time required for the scribe process can be shortened. Therefore, the dividing device can be simplified and downsized.

Moreover, according to 2nd invention, the transfer mechanism and the process edge part support mechanism which transfer a brittle plate material along a main path are arrange | positioned separately to both left and right sides of a main path. In this case, in the transfer mechanism, the frame for movably supporting the movable support portion for supporting the brittle plate does not need to be disposed separately upstream and downstream of the machining reference position in order to avoid interference with the machining end support mechanism. . Therefore, in 2nd invention, the frame of a conveyance mechanism is formed in series over the range from the upstream side to the downstream side of a process reference position. As a result, the configuration of the transfer mechanism is simplified.

1 is a plan view of a dividing device 1 according to an embodiment of the present invention.
2 is a perspective view of the scribe device 10 included in the dividing device 1.
3 is a perspective view of the reversing device 20 included in the dividing device 1.
4 is a perspective view of the brake device 30 included in the dividing device 1.
5 is a perspective view of the transfer device 40 included in the dividing device 1.
FIG. 6: is a schematic diagram which shows the storing process and scribe process by the dividing apparatus 1. FIG.
7 is a schematic diagram showing an inversion step and a break step by the dividing device 1.
8 is a schematic diagram of a dividing step according to a first conventional example.
9 is a schematic view of a dividing step according to a second conventional example.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described, referring an accompanying drawing. The following embodiment is an example which actualized this invention, and is not the case which limits the technical scope of this invention.

<Embodiment>

First, with reference to FIGS. 1-5, the structure of the dividing apparatus 1 which concerns on embodiment of this invention is demonstrated. The dividing apparatus 1 is an apparatus which divides the workpiece | work 9 into the several element board material 91 by performing a scribe process with respect to the workpiece | work 9 which is a brittle plate material of a process object. More specifically, the dividing apparatus 1 forms the scribe line Ls in the workpiece | work 9 which is sequentially conveyed to the several position in the predetermined | prescribed main path | route R1, and the workpiece | work 9 is scribe line ( Brittle fracture is carried out along Ls) to divide into a plurality of urea plate members 91.

In this embodiment, the workpiece | work 9 is a narrow and long rectangular brittle plate material. In addition, the long workpiece 9 is provided with a plurality of scribe lines Ls that traverse in the width direction by the dividing device 1, and is divided only in the plurality of scribe lines Ls. In addition, the brittle plate is a plate-shaped member composed of a brittle material, and the brittle material includes a semiconductor, glass, quartz, ceramic, and the like.

As shown in FIG. 1, the dividing device 1 includes a scribe device 10, an inversion device 20, a brake device 30, and a transfer device 40.

<Feed device>

The conveying apparatus 40 is an apparatus which sequentially conveys the workpiece | work 9 to the several position in the main path R1 along a predetermined linear direction. More specifically, the conveying apparatus 40 conveys the workpiece | work 9 from the storing position P0 in the main path | route R1 to the machining reference position P1, and also transfers the workpiece | work 9 to a machining reference position. It transfers from (P1) to the inversion position P2. In addition, the conveying apparatus 40 moves the workpiece | work 9 which moved to the sending position P3 from the reverse position P2 by the brake apparatus 30 mentioned later to the position downstream from the sending position P3 further. Transfer.

That is, in the main path R1, the storage position P0, the processing reference position P1, the inversion position P2, and the feeding position P3 from the upstream side to the downstream side in the conveyance direction of the workpiece | work 9 are carried out. Each location is listed in turn.

In the following description, the linear direction along the main path R1 in the horizontal plane is called the main path direction. In addition, the direction orthogonal to a main path direction in a horizontal plane is called apparatus width direction. In addition, the direction orthogonal to a main path direction and an apparatus width direction is called a height direction. In addition, in the coordinate axis shown in each figure, the X-axis direction is a main path direction, the Y-axis direction is an apparatus width direction, and a Z-axis direction is a height direction.

As shown in FIG. 1 and FIG. 5, the transfer apparatus 40 includes a series of frames 41 and a movement support mechanism 42. The series of frames 41 are a series of members formed along the main path direction on either side of the left and right sides of the main path R1. This series of frames 41 are formed in series over the range from the storage position P0 in the main path direction to the post-process side rather than the delivery position P3.

In addition, in this embodiment, while the range which the series of frames 41 occupy in the main path direction is an example of the range which reaches both sides of the process reference position P1, it transmits the position P3 from the inversion position P2. It is also an example of the range up to) and the both sides.

On the other hand, the movement support mechanism 42 is a mechanism supported by the series of frames 41 to be movable along the main path direction. The moving support mechanism 42 selectively switches to a state of supporting the work 9 by vacuum suction and a state of releasing support of the work 9 by vacuum suction. And the movement support mechanism 42 moves to the target position along the series of frames 41 in the state which carried out the suction support of the workpiece | work 9, and releases the suction support of the workpiece | work 9 in a target position. Thereby, the movement support mechanism 42 sequentially conveys the workpiece | work 9 to the some position in main path R1.

More specifically, as shown in FIG. 5, the movement supporting mechanism 42 includes a work holding portion 421, a lifting mechanism 422, and a traveling mechanism 423. The traveling mechanism 423 moves the workpiece holding part 421 and the lifting mechanism 422 from the transfer start position to the target position along the series of frames 41. The lifting mechanism 422 raises the work holding part 421 once once in the transfer starting position and the target position, respectively.

The lifting mechanism 422 is configured by, for example, a servo motor or an air cylinder. In addition, the traveling mechanism 423 is comprised by a servo motor or the like.

The workpiece holding portion 421 sucks and holds the workpiece 9 when the workpiece holding portion 421 is lowered to the height of the workpiece 9 by the lifting mechanism 422 at the storage position P0. In addition, the workpiece | work holding part 421 releases suction of the workpiece | work 9 when it lowers to a desired height by the elevating mechanism 422 in the target position.

As for the surface which contact | connects the workpiece | work 9 in the workpiece | work holding part 421, the dimension of the main path direction (X-axis direction) is the apparatus width direction Y so that the long workpiece | work 9 can be efficiently supported without waste. It is formed larger than the dimension of the axial direction). And the conveying apparatus 40 conveys the long workpiece | work 9 along the main path R1 in the state in which the longitudinal direction is along the main path direction.

In addition, the workpiece | work 9 is not diverted in the state which the longitudinal direction is facing in the direction which cross | intersects with respect to the main path direction in the middle of being conveyed from the processing reference position P1 to the sending position P3.

In addition, in the example shown in FIG. 5, the movement support mechanism 42 includes two movement support mechanisms 42 with respect to the series of frames 41. However, the movement support mechanism 42 includes one movement support mechanism 42 with respect to the series of frames 41 or three or more movement support mechanisms 42 with respect to the series of frames 41. I can think of doing.

<Scribe device>

The scribing apparatus 10 is an apparatus which forms the scribe line Ls in one surface of the workpiece | work 9 conveyed by the feeder 40 to the machining reference position P1. In the following description, the surface of the side in which the scribe line Ls in the workpiece | work 9 is formed is called a 1st surface. In addition, the surface on the opposite side to the surface in which the scribe line Ls in the workpiece | work 9 was formed is called a 2nd surface.

As shown in FIG. 1 and FIG. 2, the scribe device 10 includes a plurality of cutting edges 11, a beam 12, a first support 13, a first support moving mechanism 14, and a lifting mechanism ( 15) and a position adjusting mechanism 16.

The 1st support stand 13 is a stand which supports the workpiece | work 9 from below and fixes the workpiece | work 9 by vacuum suction. Since the workpiece 9 to be processed has a long rectangular shape, the first support 13 has a dimension in the main path direction (X-axis direction) so that the workpiece 9 can be efficiently supported without waste. It is formed larger than the dimension of the apparatus width direction (Y-axis direction). The workpiece 9 is mounted on the first support 13 by the transfer device 40.

The 1st support movement mechanism 14 reciprocates the 1st support 13 in the direction which cross | intersects with respect to the main path direction (X-axis direction) from the machining reference position P1 in the main path R1. It is an appliance. In this embodiment, the 1st support stand moving mechanism 14 reciprocates the 1st support stand 13 in the apparatus width direction (Y-axis direction) from the process reference position P1. In addition, the apparatus width direction is an example of a 2nd direction.

More specifically, the first support movement mechanism 14 is supported by a pair of rails 141 that support the first support 13 so as to be movable in the apparatus width direction, and a pair of rails 141. A ball screw 142, which is a mechanism for linearly moving the first support base 13 along the pair of rails 141, and a driving device 143 for driving the ball screw 142 are provided.

In addition, the 1st support movement mechanism 14 may be another mechanism comprised by a servo motor etc.

The cutting edge 11 is a cutting tool which cuts the scribe line Ls in contact with the work 9, and is an example of the scribing end forming the scribe line Ls with respect to the work 9. For example, the cutting edge 11 is formed with an annular diamond blade formed on the outer circumferential portion of the disk-shaped rotating body, and a scribing wheel or a workpiece (which is rolled in contact with the surface of the workpiece 9). 9) such as diamond point to slide the surface.

In addition, in the example shown in FIG. 1 and FIG. 2, although the scribe apparatus 10 is equipped with three cutting edges 11, the scribe apparatus 10 has two cutting edges 11 or four or more cutting edges. It is also conceivable to include (11).

The beam 12 is a member that supports each of the plurality of cutting edges 11 at intervals along the main path direction, that is, parallel to the main path R1. The beam 12 is, for example, a rod-shaped metal member supported by a support in a state in which the longitudinal direction is along the main path direction.

In addition, the lifting mechanism 15 is a workpiece 9 in which each of the plurality of cutting edges 11 is fixed to the first support 13 in which one of the path and the return path is fixed by the first support movement mechanism 14. It is a mechanism for selectively holding in the processing position which contact | connects with respect to, and the retracted position spaced apart from the workpiece | work 9. The lifting mechanism 15 is configured by, for example, a servo motor or an air cylinder.

The position adjustment mechanism 16 is a mechanism which adjusts the position in the main path direction (X-axis direction) of each of the some cutting edge 11. The position adjustment mechanism 16 adjusts the position in the main path direction of each of the plurality of cutting edges 11 in accordance with the position of each of the plurality of scribe lines Ls to be formed in the work 9. In addition, the beam 12, the lifting mechanism 15, and the position adjustment mechanism 16 are an example of a processing end support mechanism.

By the way, the beam 12 which supports the some cutting edge 11 and the support | pillar which support the beam 12 are thick and heavy members because high rigidity is calculated | required. Therefore, providing a mechanism for moving such a heavy member together with the plurality of cutting edges 11 in the width direction of the apparatus is not practical because it causes an increase in the size of the apparatus.

<Inverter>

The inversion apparatus 20 inverts the workpiece | work 9 in which the scribe line Ls which traverses in the apparatus width direction in the 1st surface is vertically inverted in the inversion position P2 in the main path R1. It is a device equipped with a mechanism. More specifically, as shown in FIG. 1 and FIG. 3, the inversion device 20 includes a reverse table 21, a rotation drive unit 22, a movable support member 23, and a lift mechanism 24.

The reverse table 21 is a table for holding the workpiece 9 conveyed by the conveying device 40 at the reverse position P2 by vacuum suction. Moreover, the elevating mechanism 24 raises and moves the movable support part 23 from the predetermined | prescribed height in the inversion position P2 to the delivery height lower than it in the inversion position P2 once.

The movable support member 23 is a member that supports the rotation drive unit 22. The rotation drive part 22 rotates the inversion stand 21 180 degrees around the rotation axis which follows the main path direction, and inverts the inversion stand 21 up and down when the movable support part 23 is located in receiving height. Thereby, the workpiece | work 9 held by the inversion table 21 with the inversion table 21 also inverts up and down. In addition, the rotary drive unit 22 returns the inverting plate 21 to its original state when the movable supporter 23 rises from the position of the delivery height to the position of the reception height or when it is returned to the position of the reception height. .

Moreover, when the movable support part 23 is located in the receiving height, the inversion table 21 attracts and holds the workpiece | work 9 conveyed to the inversion position P2 by the conveying apparatus 40, and is hold | maintained. In addition, the inversion table 21 releases the suction of the workpiece | work 9 when the movable support part 23 is located in the delivery height.

The inversion table 21 is formed so that the dimension of the main path direction (X-axis direction) is larger than the dimension of the apparatus width direction (Y-axis direction) so that the long workpiece | work 9 can be efficiently supported without waste.

Moreover, in the state where the movable support part 23 is located in the delivery height, the inversion stand 21 will be in the state adjacent to the 2nd support stand 33 mentioned later. Therefore, the workpiece | work 9 in which the holding | maintenance by the inversion stand 21 was canceled is mounted on the 2nd support stand 33. FIG.

The rotation drive part 22 is comprised by a servo motor etc., for example. Moreover, the lifting mechanism 24 is comprised by air sealing, a servo motor, etc., for example.

<Brake Device>

The brake device 30 brittles and breaks the workpiece | work 9 in which the several scribe line Ls was formed in the previous process along each scribe line Ls, and turns the workpiece | work 9 into the several element board | plate material 91. It is a device that divides.

As shown in FIGS. 1 and 4, the brake device 30 includes a brake bar 31, a lifting mechanism 32, a second support 33, a second support horizontal movement mechanism 34 and a second support longitudinal. A moving mechanism 35 is provided.

The 2nd support stand 33 is a stand which supports the workpiece | work 9 reversed by the reversing apparatus 20 from below, and fixes the workpiece | work 9 by vacuum suction. Since the workpiece 9 to be processed has a long rectangular shape, the second support 33 has a dimension in the main path direction (X-axis direction) so that the long workpiece 9 can be efficiently supported without waste. It is formed larger than the dimension of the apparatus width direction (Y-axis direction). The workpiece 9 is mounted on the second support 33 by the reversing device 20.

The 2nd support horizontal movement mechanism 34 moves the 2nd support 33 to the apparatus width direction between the position on the main path R1, and the position on the sub path R2 parallel to the main path R1. It is a mechanism to move. The sub path R2 is a path parallel to the main path R1 in parallel and shorter than the main path R1. On the other hand, the 2nd support stand vertical movement mechanism 35 is a mechanism which moves the 2nd support stand 33 along the sub path | route R2.

More specifically, the second support horizontal movement mechanism 34 includes a pair of rails 341 and a pair of rails 341 that support the second support 33 to be movable in the apparatus width direction. The ball screw 342 which is a mechanism which linearly moves the 2nd support stand 33 supported by the pair of rails 341 and the drive device 343 which drive the ball screw 342 are provided. In addition, the second support horizontal movement mechanism 34 is supported by the base 344.

On the other hand, the 2nd support vertical movement mechanism 35 is a pair of rail 351 which supports the base part 344 of the 2nd support horizontal movement mechanism 34 so that a movement is possible in a conveyance direction, and a pair of The ball screw 352 which is a mechanism which linearly moves the base part 344 supported by the rail 351 along the pair of rails 351, and the drive device 353 which drives the ball screw 352 are provided. do.

When the workpiece | work 9 inverted by the reversing apparatus 20 is fixed to the 2nd support stand 33, the 2nd support stand horizontal movement mechanism 34 will attach | attach the 2nd support stand 33 from the inversion position P2. It moves to the sub path start position P4 in the path R2. In addition, in FIG. 1, the 2nd support stand horizontal movement mechanism 34 when the 2nd support stand 33 is located in the sub path | route start position P4 is drawn by the virtual line (two dashed-dotted line).

Subsequently, the second support vertical movement mechanism 35 moves the second support 33 from the sub path starting position P4 to the sub path ending position P5 along the sub path R2. Moreover, the 2nd support stand horizontal movement mechanism 34 moves the 2nd support stand 33 from the sub path end position P5 to the delivery position P3 in the main path R1.

Moreover, after the 2nd support stand 33 is moved to the sending position P3, it is returned to the inversion position P2 in the main path R1 by the 2nd support stand longitudinal movement mechanism 35. As shown in FIG.

The brake bar 31 is a member whose tip forms a ridgeline along the scribe line Ls. In this embodiment, since the linear scribe line Ls is formed in the workpiece | work 9, the front end of the brake bar 31 forms the linear ridge line.

The brake bar 31 is supported by the elevating mechanism 32 in the direction in which the ridge line on which the tip is formed crosses the sub path R2. The brake bar 31 is supported to be movable up and down in a state along the direction in which the ridge line on which the tip is formed crosses the main path direction.

The elevating mechanism 32 is provided in the auxiliary path R2 from the press position and the workpiece 9 which contact the brake bar 31 to the second surface (upper surface) of the workpiece 9 on the second support 33. A device that is selectively held at spaced evacuation sites. The lifting mechanism 32 is configured by, for example, a servo motor or an air cylinder.

More specifically, the lifting mechanism 32 is a workpiece 9 in which the brake bar 31 is fixed to the second support 33 while the second support 33 moves along the sub-path R2. With respect to the 2nd surface in), it presses sequentially along each of the some scribe line Ls. That is, the lifting mechanism 32 moves the brake bar 31 from the evacuation position to the pressurized position each time each of the plurality of scribe lines Ls on the work 9 reaches immediately below the brake bar 31. After descending, raise to the evacuation site.

When the lifting mechanism 32 presses the tip of the brake bar 31 to the second surface of the work 9 at an appropriate pressure along the scribe line Ls, the work 9 follows the scribe line Ls. It is brittle and broken, and it divides into the several element board 91.

As shown in the above, the brake bar 31 and the lifting mechanism 32 are the workpiece | work fixed to the 2nd support base 33 while the 2nd support base 33 moves along the sub path R2. The pressing mechanism which divides the workpiece | work 9 into the some element board material 91 by pressing the 2nd surface in 9) along the scribe line Ls is comprised.

In addition, as shown in FIG. 1, the reversing apparatus 20, the lifting mechanism 32, and the brake bar 31 which comprise a press mechanism are located in the position which a part overlaps in the apparatus width direction (Y-axis direction). It is arranged.

<Segmentation process>

Next, the dividing process by the dividing apparatus 1 is demonstrated centering on the movement process of the workpiece | work 9 in the dividing apparatus 1, referring FIG. 6 and FIG. The dividing process includes a storing process, a scribe process, an inversion process and a brake process.

6 is a schematic diagram which shows the accommodating process and scribe process by the dividing apparatus 1. 7 is a schematic diagram which shows the reversal process and the brake process by the dividing apparatus 1. 6A is a view showing an accommodating step, FIG. 6B is a view showing a scribing step, and FIG. 6C is a diagram showing a state of transition from a scribing step to an inversion step. to be. 7A is a view showing an inversion step, FIG. 7B is a view showing a brake step, and FIG. 7C is a view showing a state in which the brake step is completed.

<Storing process>

In the dividing step, first, as shown in FIG. 6A, the work 9 placed at the storage position P0 is stored at the main path R1 by the transfer device 40 in the storage position P0. ) Is transported on the first support base 13 positioned at the machining reference position P1. In addition, the workpiece 9 loaded on the first support 13 by the transfer device 40 is fixed to the first support 13 by vacuum suction.

<Scribe process>

Next, as shown to Fig.6 (b), the 1st support stand 13 to which the workpiece | work 9 was fixed is the one side of the main path R1 by the 1st support base moving mechanism 14 next. WHEREIN: It reciprocates along the apparatus width direction (Y-axis direction) from the process reference position P1. The moving distance of each of the return path and the return path in the device width direction by the first support moving mechanism 14 is the distance of the width of the workpiece 9 or more.

In addition, as for the lifting mechanism 15 of the scribe apparatus 10, while the workpiece | work 9 fixed to the 1st support stand 13 is moving one of a path | route and a return path along the apparatus width direction (Y-axis direction), several Each cutting edge 11 is hold | maintained in the machining position which contact | connects the workpiece | work 9, and when it is outside, each of the several cutting edges 11 is hold | maintained in an evacuation position. As a result, a plurality of parallel scribe lines Ls along the moving direction of the work 9, that is, along the device width direction, are formed on the first surface of the work 9.

In the example shown in FIG. 6B, a plurality of cutting edges 11 are held in the machining position while the workpiece 9 fixed to the first support 13 moves along the path along the device width direction. It is an example. In addition, the some cutting edge 11 may be hold | maintained at a machining position, while the workpiece | work 9 is moving back along the apparatus width direction.

<Inversion process>

When the scribing step is completed, as shown in FIG. 6C, the workpiece 9 on which the plurality of scribe lines Ls are formed is positioned at the machining reference position P1 by the transfer device 40. From 1 support stand 13, it is conveyed to the inversion stand 21 located in inversion position P2. Moreover, the workpiece | work 9 mounted on the inversion stand 21 by the transfer apparatus 40 is fixed to the inversion stand 21 by vacuum suction.

Next, as shown to Fig.7 (a), the workpiece | work 9 is inverted up and down by the inversion apparatus 20, and is mounted on the 2nd support base 33. Then, as shown in FIG. In addition, the workpiece | work 9 is fixed to the 2nd support stand 33 in the state which a 2nd surface faces upward by vacuum suction.

<Brake process>

When the reversal step is completed, as shown in FIGS. 7B and 7C, the workpiece 9 fixed to the second support 33 includes the second support horizontal movement mechanism 34 and The secondary path starting position P4 and the secondary part in the secondary path R2 parallel to the main path R1 from the inverted position P2 of the main path R1 by the second support vertical movement mechanism 35. It moves to the delivery position P3 of the main route R1 via the path | finish end position P5.

In addition, the lifting mechanism 32 of the brake device 30 is connected to the second surface of the work 9 while the work 9 fixed to the second support 33 moves along the sub-path R2. On the other hand, the brake bar 31 is sequentially pressed along each of the plurality of scribe lines Ls. Thereby, the workpiece | work 9 is brittle-broken along the scribe line Ls, is divided into the several element board material 91, and is conveyed to the delivery position P3.

<Effect>

In the dividing device 1, in the state where the plurality of cutting edges 11 are held at the machining position, the work 9 is driven by the first support moving mechanism 14 to be a main path direction X which is a conveying direction. It moves in the apparatus width direction (Y-axis direction) which cross | intersects with respect to an axial direction. Therefore, the plurality of scribe lines Ls that cross the workpiece 9 in the device width direction are simultaneously formed with respect to the first surface of the workpiece 9 during movement. As a result, the time required for the scribing step is significantly shortened compared with the first conventional example (see FIG. 8) in which one cutting edge 11 reciprocates by the number of times according to the number of scribe lines Ls.

In general, the workpiece 9, which is a long one in which only the scribe lines Ls traverse in the width direction, is formed, is relatively small and lightweight, unlike the workpiece in which the scribe lines of the grid shape are formed. Therefore, the 1st support movement mechanism 14, the 2nd support horizontal movement mechanism 34, and the 2nd support vertical movement mechanism 35 are realizable with a comparatively small and simple mechanism.

In addition, the workpiece | work 9 which is a long brittle board | plate material is conveyed with the longitudinal direction along a main path direction. And the 1st support base moving mechanism 14 and the 2nd support base horizontal movement mechanism 34 put the 1st support base 13 to which the workpiece | work 9 was fixed in the width direction of the workpiece | work 9 on the main path | route. The reciprocating movement may be performed from the machining reference position P1 by a short distance that is slightly longer than the small width of the workpiece 9. Therefore, the dimension of the dividing apparatus 1 in the apparatus width direction is suppressed relatively small regardless of the length of the workpiece | work 9.

In the dividing apparatus 1, the scribe line Ls is formed as the longitudinal direction of the workpiece | work 9 follows the main path direction. Therefore, the mechanism and the process which change the direction of the workpiece | work 9 are not required like the 2nd conventional example shown in FIG. Therefore, the problem that the apparatus is enlarged and complicated due to the change of direction of the workpiece 9 and the time required for the dividing process is long also does not occur.

As shown above, when the dividing apparatus 1 is adopted, when the long workpiece 9 is divided only in the scribe line Ls along the width direction by scribing, it is necessary for the scribing process. The time required for this operation can be shortened, and the device can be simplified and downsized.

Moreover, in the dividing apparatus 1, the mechanism (the beam 12 and the lifting and lowering) which support the conveying apparatus 40 (feed mechanism) which transfers the workpiece | work 9 along the main path R1, and the cutting edge 11 The mechanism 15 and the like] are disposed separately from both the left and right sides of the main path R1. Therefore, in the conveying apparatus 40, the elongate frame which supports the movement support mechanism 42, and the upstream side of the process reference position P1, in order to avoid interference with the mechanism which supports the cutting edge 11, It does not need to be arranged separately downstream. Therefore, a series of frames 41 are formed over the range from the upstream side to the downstream side of the machining reference position P1, and as a result, the structure of the conveying apparatus 40 is simplified.

In addition, in the dividing apparatus 1, the inversion process by the inversion apparatus 20 is performed in the inversion position P2 on the main path R1, and the brake process by the brake apparatus 30 is carried out by the main path R1. It is executed in the sub path R2 parallel to (). Therefore, the inversion apparatus 20 and the brake apparatus 30 are arrange | positioned shifting the position in the apparatus width direction (Y-axis direction).

Therefore, in the dividing apparatus 1, the whole of the inverting apparatus 20 and the brake apparatus 30 of the whole of the inverting apparatus 20 and the brake apparatus 30 are avoided, avoiding mutual interference of the inversion apparatus 20 and the brake apparatus 30, and ensuring the maintenance space of each apparatus. The dimension in the main path direction, that is, the dimension in the longitudinal direction can be reduced.

Moreover, in the dividing apparatus 1, the reversing apparatus 20 and the brake apparatus 30 (pressing mechanism) are arrange | positioned in the position which at least one part overlaps in the apparatus width direction (Y-axis direction). Therefore, the dimension in the main path direction of the inverting device 20 and the brake device 30 as a whole can be made smaller.

<Other>

In the dividing device 1, it is also conceivable that the first support movement mechanism 14 is a mechanism for moving the first support 13 in a direction where the first support movement mechanism 14 intersects at an angle other than 90 ° with respect to the main path direction. Can be. For example, when it is desired to divide the rectangular workpiece 9 into a plurality of element boards 91 of parallelogram shape, the first support movement mechanism 14 is in the main path direction (X-axis direction). What is necessary is just to reciprocate the 1st support stand 13 in the direction which intersects with respect to it.

Moreover, in the dividing apparatus 1, it can also be considered that the 1st support stand moving mechanism 14 is a mechanism which moves the 1st support stand 13 along a curved path in the direction which cross | intersects in a main path direction. Thereby, the curved scribe line Ls which crosses the workpiece | work 9 in the width direction is formed. In this case, however, the brake bar 31 is a member whose tip forms a curved ridgeline along the curved scribe line Ls.

In the dividing device 1, the entire pressing mechanism including the brake bar 31 and the lifting mechanism 32 in the brake device 30 is viewed from the device width direction (Y-axis direction) inverting device ( It is also conceivable to be arranged at a position overlapping with 20). Thereby, the dimension in the main path direction (X-axis direction) of the dividing apparatus 1 becomes smaller.

For example, the prop of the reversing apparatus 20 is used as one of two props which support the lifting mechanism 32 in the pressing mechanism, or the like so that the entire pressing mechanism is viewed in the width direction of the apparatus. It becomes possible to arrange | position in position overlapping with 20).

By the way, the workpiece | work 9 may have a structure where two brittle plate materials overlapped like the glass substrate used as a base material of a liquid crystal display panel. The work 9 of such a dual structure needs to perform a dividing process with respect to each of two brittle board | plate materials.

Therefore, when the workpiece | work 9 of a process object has a double structure, two dividing apparatus 1 should just be arrange | positioned side by side in the main path direction (X-axis direction). In this case, the delivery position P3 in the dividing apparatus 1 arrange | positioned at the front end will be the storing position P0 in the dividing apparatus 1 arrange | positioned at the rear end.

In addition, when the workpiece | work 9 of a process object has a double structure, the whole of the 2 dividing apparatus 1 arrange | positioned side by side in the main path direction has the several structure which has the double structure of the whole workpiece | work 9 of dual structure, respectively. It becomes a division system which divides into the urea plate 91. As shown in FIG.

In addition, when the two dividing apparatus 1 is arrange | positioned side by side in the main path direction (X-axis direction), the series of frames 41 in the conveying apparatus 40 are attached to both of the two dividing apparatuses 1. It is also conceivable to form a series over.

In addition, as mentioned above, the dividing apparatus 1 is an apparatus whose dimension of the width direction is very small with respect to the dimension of the longitudinal direction. Therefore, it is also conceivable that the plurality of dividing devices 1 are arranged side by side in the device width direction. For example, it is conceivable that the two dividing devices 1 are arranged symmetrically with respect to the center line along the main path direction. In this case, it is conceivable that the two frames 41 constituting the two transfer apparatuses 40 are disposed on both outer sides in the apparatus width direction.

In addition, when the workpiece | work 9 of a process object has a double structure, it is also conceivable that several sets of dividing systems each having two dividing apparatuses 1 arrange | positioned in the main path direction are arrange | positioned side by side in the apparatus width direction. . For example, it is conceivable that two sets of dividing device systems are arranged symmetrically with respect to the centerline along the main path direction.

In addition, in the dividing apparatus 1, the plurality of cutting edges 11 which form the scribe line Ls in the workpiece | work 9 outputs several laser beams which form the scribe line Ls in the workpiece | work 9. You can think of a wife too. In addition, the laser light emitting portion is an example of the scribed end portion.

1: Separation device
R1: main route
R2: minor path
P1: machining reference position
P2: reverse position
P3: delivery position
P4: secondary path starting position
P5: sub path end position
9: walk
10: scribe device
11: cutting edge
12: beam
13: first support stand
14: first support moving mechanism
15 lifting mechanism of the scribe device
16: position adjustment mechanism
20: reverse device
21: reverse
22: rotation drive unit
23: movable support member
24: lifting mechanism of the reversing device
30: brake device
31: brake bar
32: lifting mechanism of the brake device
33: second support
34: 2nd support horizontal movement mechanism
35: second support vertical movement mechanism
40: transfer device
41: frame
42: moving support mechanism
91: element board
141, 341, 351: rail
142, 342, 352: ball screw
143, 342, 353: drive unit
344: expectation
421: work holding part
422 lifting mechanism of the transfer device
423: Travel mechanism of the transfer device

Claims (3)

It is a dividing apparatus which forms a scribe line in the brittle plate material sequentially conveyed to the several position in the main path along a 1st direction, and divides the brittle plate material into a some element board material by carrying out brittle fracture along the said scribe line,
A support for supporting and fixing the brittle plate;
A support movement mechanism for reciprocating the support in a second direction crossing the first direction from a predetermined machining reference position in the main path;
A plurality of scribed ends forming the scribe line with respect to the brittle plate;
Each of the plurality of scribed ends is supported at intervals along the first direction, and held at a machining position capable of forming the scribe line with respect to the brittle plate fixed to the support during movement by the support movement mechanism. Separation device provided with the processing end support mechanism to support The method of claim 1,
A series of frames formed along the first direction over a range from one side of the left and right sides of the main path to both sides of the machining reference position in the first direction;
The frame is movably supported in the first direction by a series of frames, and is selectively switched to a state of supporting the brittle plate and a state of releasing the support of the brittle plate, and the brittle plate in the main path. It is further provided with a transfer mechanism including a moving support for sequentially transferring to a plurality of positions of,
The said processing end support mechanism is a dividing apparatus arrange | positioned at the other side of the left and right both sides of the said main path | route. The method according to claim 1 or 2,
The scribing end is a cutting edge to engrave the scribe line in contact with the brittle plate,
The processing end support mechanism supports each of the plurality of cutting edges at intervals along the first direction, and the brittle plate member fixed to the support while moving one of the path and the return path by the support movement mechanism. And a mechanism for selectively holding at the machining position in contact with and with respect to the retracted position spaced apart from the brittle plate.

Images