KR20120138336A - Transferring apparatus for boat in manufacturing a solar cell - Google Patents

Transferring apparatus for boat in manufacturing a solar cell Download PDF

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Publication number
KR20120138336A
KR20120138336A KR1020110057735A KR20110057735A KR20120138336A KR 20120138336 A KR20120138336 A KR 20120138336A KR 1020110057735 A KR1020110057735 A KR 1020110057735A KR 20110057735 A KR20110057735 A KR 20110057735A KR 20120138336 A KR20120138336 A KR 20120138336A
Authority
KR
South Korea
Prior art keywords
blade
boat
unit
solar cell
lifting
Prior art date
Application number
KR1020110057735A
Other languages
Korean (ko)
Inventor
박태우
Original Assignee
주식회사 한울솔루션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 한울솔루션 filed Critical 주식회사 한울솔루션
Priority to KR1020110057735A priority Critical patent/KR20120138336A/en
Publication of KR20120138336A publication Critical patent/KR20120138336A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876—Particular processes or apparatus for batch treatment of the devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Abstract

The boat transport apparatus for manufacturing a solar cell includes a blade on which the boat is placed and a forward drive and a backward drive based on a horizontal direction when the boat loaded with a plurality of substrates is transferred to a processing device, and the blade and the blade to support the blade. It is connected to, and provided with a blade unit for providing a driving force according to the forward drive and the backward drive of the blade, and the first lifting unit for lifting up and down the blade unit itself alone.

Description

Transfer device for solar cell manufacturing {Transferring apparatus for boat in manufacturing a solar cell}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a boat transfer apparatus for solar cell manufacture, and more particularly, to a boat transfer apparatus for solar cell manufacture for transferring a boat carrying a plurality of substrates to a processing apparatus.

Generally, a solar cell is manufactured by performing an impurity diffusion process, a thin film formation process, an electrode formation process, etc. And since the production of solar cells has to consider productivity aspects, it covers about 200 or more substrates in one process. Therefore, in the manufacture of solar cells, the transfer of the substrate also takes place in large quantities at one time.

Therefore, the manufacturing of the solar cell mentioned above uses a boat capable of loading a plurality of substrates, that is, 200 or more substrates. In the transfer of a substrate using a boat, a transfer apparatus including a blade which drives in a state where a boat on which a plurality of substrates are stacked is placed is used. At this time, in the case of the boat transport apparatus mentioned above, the blade has a structure in which the forward drive and the reverse drive and the blade itself are lifted up and down based on the horizontal direction.

However, in the case of the transfer using the boat transfer device with the mentioned blades, the situation frequently arises from the place loaded on the boat. In particular, in performing a process using a process apparatus that accommodates a boat in multiple stages, a situation in which the deviates from the place loaded on the boat occurs more frequently. This is because the boat is loaded with a plurality of substrates by using a blade, and when the boat is lifted up and down and placed in the process apparatus, the boat is severely impacted. In other words, when the boat is lifted up and down to seat the boat in the process equipment, the blade vibrates due to the weight of the boat loaded with a plurality of substrates. Because it is added. In particular, the longer the blade is moved up and down, the greater the vibration is generated, the more severe impact is applied to the boat.

As such, when the substrate is separated from the place loaded on the boat due to the impact applied to the boat during the transport of the boat, the process specification may not be satisfied, thereby causing a process defect or the like.

SUMMARY OF THE INVENTION An object of the present invention is to provide a boat transfer apparatus for manufacturing a solar cell for minimizing the impact on the boat so that the substrate is stably loaded at a predetermined place in the boat in the transfer of the substrate using the boat.

In the boat transport apparatus for manufacturing a solar cell according to an embodiment of the present invention for achieving the above object, the boat is placed when the boat on which a plurality of substrates are loaded is transferred to a processing apparatus, and the forward driving is performed based on the horizontal direction. A blade for driving backward, a blade unit connected to the blade to support the blade, providing a driving force according to the forward drive and the backward drive of the blade, and a first lift for lifting up and down the blade unit itself alone. A part is provided.

In the boat transport apparatus for manufacturing a solar cell according to the embodiment mentioned above, it may further include a second lifting unit for lifting up and down the blade alone along the vertical plane of the blade unit within the height range of the blade unit. .

In the boat transport apparatus for manufacturing a solar cell according to the above-mentioned embodiment, when the blade unit is lifted up and down by the first lifter, the blade is stopped and the blade is lifted by the second lifter. When moving up and down, the blade unit may further include a control unit for controlling each of the first lifting unit and the second lifting unit to maintain the stopped state.

The boat transport apparatus for manufacturing a solar cell of the present invention mentioned above is provided with a blade so that the blade unit can also be lifted up and down. Thus, in the transfer of a boat loaded with a plurality of substrates, the blade unit may be moved up and down together with the blade up and down.

As described above, the boat transport apparatus for manufacturing a solar cell of the present invention loads a plurality of substrates when the boat is seated in the processing apparatus by lifting up and down not only the blade but also the blade unit when transferring the boat on which the plurality of substrates are loaded. The weight of one boat can minimize the vibrations on the blades and, as a result, the impact on the boats can be minimized.

Therefore, in the transfer of the boat using the boat transfer apparatus for manufacturing a solar cell of the present invention, by minimizing the impact applied to the boat, the substrate can be stably loaded in a predetermined place in the boat, thereby preventing process defects caused by the detachment of the substrate. It can be minimized.

1 is a schematic configuration diagram showing a boat transport apparatus for manufacturing a solar cell according to an embodiment of the present invention.
FIG. 2 is a view showing a process apparatus in which a boat is transported using the boat transport apparatus of FIG. 1.

Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It is to be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but on the contrary, is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. In describing the drawings, similar reference numerals are used for similar components. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the invention, and are actually shown in a smaller scale than the actual dimensions in order to explain the schematic configuration. The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described on the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, parts, or combinations thereof.

On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

Example

FIG. 1 is a schematic configuration diagram illustrating a boat transport apparatus for manufacturing a solar cell according to an embodiment of the present invention, and FIG. 2 is a view illustrating a process apparatus in which a boat is transported using the boat transport apparatus of FIG. 1.

1 and 2, the boat transport apparatus 100 for manufacturing a solar cell includes a blade 11, a blade unit 13, a first lifting unit 17, a second lifting unit 15, and a controller 19. And the like. The process apparatus 200 for carrying out the process by receiving the boat 31 loaded with a plurality of substrates 20 will be described later, but the seat 31 has a multi-stage structure in which the boat 31 itself is vertically stacked to perform the process. 25).

Specifically, the blade 11 is a blade unit (31) is placed on the upper surface when the boat 31, a plurality of substrates 20 is loaded or transported to the processing apparatus 200, the blade unit ( The drive force provided from 13) advances and reverses the drive in the horizontal direction. The blade unit 13 is connected to the blade 11 to support the blade 11. In addition, the blade unit 13 provides a driving force according to the forward drive and the reverse drive of the blade 11 as mentioned. The driving force mentioned may be provided by hydraulic, pneumatic or mechanical such as screw movement. Thus, the blade 11 is connected to the blade unit 13 as mentioned, the forward drive and the backward drive by the driving force provided from the blade unit 13, the boat 31 having a plurality of substrates 20 loaded Can be put on the top. In other words, the blade 11 has a structure capable of driving in the horizontal direction by the blade unit (13). In addition, the blade unit 13 mainly has an arm structure. When the blade unit 13 has an arm structure, the blade 11 is inserted into and protrudes from the arm structure of the blade unit 13. Since it is connected, the blade 11 can drive forward and backward from the blade unit 13 as mentioned by insertion and protruding from the arm structure of the blade unit 13.

In addition, the second lifting unit 15 mentioned in the boat transport apparatus 100 for manufacturing a solar cell of the present invention may raise and lower the blade 11. In particular, the second lifting unit 15 lifts the blade 11 up and down by itself, and mainly moves the blade 11 along the vertical plane of the blade unit 13 within the height range of the blade unit 13. It can be lifted up and down alone. Here, the raising and lowering of the blade 11 by the second lifting unit 15 is mainly performed by raising and lowering the arm structure of the blade unit 13. That is, only the blade 11 is moved up and down by raising and lowering the arm structure of the blade unit 13 connected to the blade 11 up and down. Therefore, the lifting and lowering of the blade 11 by the second lifting unit 15 is made along the vertical plane of the blade unit 13, so that the blade 11 is within the height range of the blade unit 13. Lifting up and down is made. Here, even in the case of lifting up and down of the blade 11, it can be achieved by a driving force such as hydraulic, pneumatic, or mechanical such as screw movement.

In addition, the first elevating unit 17 may elevate the blade unit 13 itself up and down. That is, the first lifting unit 17 is capable of raising and lowering all the coupling members themselves coupled with the blade unit 13 together with the arm structure of the blade unit 13 as shown in FIG. 1. In other words, the first elevating unit 17 is capable of elevating the entire blade unit 13 up and down by providing a driving force capable of elevating the blade unit 13 up and down. Here, even in the case of lifting up and down of the blade unit 13, it can be achieved by a driving force such as hydraulic, pneumatic, or mechanical such as screw movement.

In the boat transport apparatus 100 for manufacturing a solar cell of the present invention mentioned above, the second lifting unit 15 is capable of elevating the blade 11 up and down, not the blade unit 13, and the first lifting unit 17. ) Is to move the blade unit 13 up and down, not the blade 11. In other words, in the boat transport apparatus 100 for manufacturing a solar cell of the present invention, the second lifting unit 15 may lift only the blade 11 up and down, and the first lifting unit 17 may include the blade unit 13. ) Can be lifted up and down. However, when the blade unit 13 is lifted up and down by using the first elevating unit 17, the blade 11 may be shown to be lifted up and down in addition to the blade unit 13. The elevating and lowering of the unit 13 is caused by raising and lowering the blade 11 itself and not lifting up and down independently.

In the boat transport apparatus 100 for manufacturing a solar cell of the present invention, the controller 19 controls driving force for lifting up and down with respect to each of the first lifting unit 17 and the second lifting unit 15. When the blade 11 is moved up and down by the second elevating unit 15, the blade unit 13 is in a stopped state, and the blade unit 13 is lifted by the first elevating unit 17. When moving up and down, the blade 11 is controlled to remain stopped. That is, the controller 19 controls the lifting of each of the first lifting unit 17 and the second lifting unit 15 up and down. As described above, the control unit 19 controls the first lifting unit 17. ) And the second lifting unit 15 can control the lifting up and down independently of each other. In other words, the boat transport apparatus 100 for manufacturing a solar cell of the present invention includes the aforementioned first lifting unit 17, the second lifting unit 15, and the controller 19 to load a plurality of substrates 20. When the boat 31 is transported and conveyed to the process apparatus 200, driving for lifting up and down of the first elevating unit 17 and the second elevating unit 15 is performed by the first elevating unit 17 and Each of the second lifting units 15 can be controlled independently.

Hereinafter, the boat 31 having a plurality of substrates 20 loaded thereon is transferred or transported to the seating portion 25 of the process apparatus 200 by using the boat transport apparatus 100 for manufacturing a solar cell of the present invention mentioned above. An example will be described.

First, the boat 31 in which the board | substrate 20 and at least 200 or more board | substrates 20 are mounted is mounted on the upper surface of the blade 11 using the blade 11. As shown in FIG. In other words, the blade 11 is projected to the rear surface of the boat 31 mentioned from the arm structure of the blade unit 13, so that the boat 31 is placed on the upper surface of the blade 11.

Subsequently, the blade 11 or the blade unit 13 is lifted and slightly lifted the boat 31 on which the plurality of substrates 20 are loaded from the bottom on which the boat 31 is placed. At this time, the lifting up and down of the somewhat short distance is made by using the blade 11 or the blade unit (13). Particularly, in the present invention, the control unit 19 is configured such that only one of the blade unit 13 or the blade 11 is moved up and down, rather than the blade unit 13 and the blade 11 lifting up and down together. The elevator 17 and the second elevator 15 are controlled. In addition, the first and second elevating units 17 and 15 are lifted up and down by a long distance, so that the control unit 19 moves up and down by the blade unit 13 alone instead of the blades 11. ). That is, in the case of the process apparatus 200 which loads the boat 31 in multiple stages and performs a process, the blade unit (d) may be used to transfer the boat 31 from the bottom to the seating portion 25 of the first stage located at a somewhat lower height. 13) or only one of the blades 11 can be elevated up and down, but in the transfer of the boat 31 from the bottom to the seating portion 25 of the second or third stage located at a somewhat higher height, the blade Only the unit 13 is lifted up and down alone.

Subsequently, the boat 31 is lifted up and down in accordance with the height of each of the seating portions 25, and then the blade 11 is driven to protrude to the seating portion 25. After the boat 31 is positioned on the seating portion 25, the seating of the boat 31 is completed by inserting the blade 11 into the arm structure of the blade unit 13.

And in the case of conveyance from the seating part 25 of the process apparatus 200, the boat 31 can be achieved by going contrary to the conveyance mentioned.

In the case of the boat transport apparatus 100 for manufacturing a solar cell of the present invention mentioned above, the lifting up and down to a longer distance, that is, a higher height, uses the blade unit 13 itself rather than the blade 11. Thus, the vibration applied to the boat 31 placed on the blade 11 can be sufficiently reduced. In other words, when the blade 11 is used to move up and down to a somewhat higher height, the blade 11 moves up and down together with the weight of the boat 31 having a plurality of substrates 20 loaded thereon. By vibrating according to the movement of the boat 31 can be applied to severe vibration, but the blade 11 by lifting up and down the blade unit 13 itself rather than the blade 11, the blade 11 is a plurality of substrates 20 Since only the weight of the boat 31 on which the load has to be handled is sufficient, the vibration applied to the boat 31 can be sufficiently reduced.

As described above, the boat transport apparatus 100 for manufacturing a solar cell of the present invention can sufficiently reduce the vibration applied to the boat 31 when transporting or transporting the boat 31 on which the plurality of substrates 20 are loaded. have.

Therefore, in the transfer or conveyance of the boat using the boat transport apparatus for manufacturing a solar cell of the present invention, the vibration applied to the boat is sufficiently reduced, thereby minimizing the impact, so that the substrate can be stably loaded on the boat at a predetermined position. It is possible to minimize process defects caused by separation of the substrate.

Thus, when using the boat transport apparatus for manufacturing a solar cell of the present invention there is an advantage that can improve the process reliability according to the solar cell manufacturing.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. It can be understood that it is possible.

Claims (3)

A blade on which the boat is placed when transferring a boat loaded with a plurality of substrates to a processing apparatus, and which drives forward and backward based on a horizontal direction;
A blade unit connected to the blade to support the blade, the blade unit providing a driving force according to the forward driving and the backward driving of the blade; And
Boat transport apparatus for manufacturing a solar cell having a first lifting unit for elevating the blade unit itself up and down. The boat transfer apparatus of claim 1, further comprising a second lift unit configured to lift the blades alone up and down along a vertical plane of the blade unit within a height range of the blade unit. The blade unit of claim 2, wherein the blade unit is stopped when the blade unit is lifted up and down by the first lift unit, and the blade unit is lifted up and down by the second lift unit. And a control unit for controlling each of the first elevating unit and the second elevating unit so as to maintain the stopped state.
KR1020110057735A 2011-06-15 2011-06-15 Transferring apparatus for boat in manufacturing a solar cell KR20120138336A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020110057735A KR20120138336A (en) 2011-06-15 2011-06-15 Transferring apparatus for boat in manufacturing a solar cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110057735A KR20120138336A (en) 2011-06-15 2011-06-15 Transferring apparatus for boat in manufacturing a solar cell

Publications (1)

Publication Number Publication Date
KR20120138336A true KR20120138336A (en) 2012-12-26

Family

ID=47905139

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110057735A KR20120138336A (en) 2011-06-15 2011-06-15 Transferring apparatus for boat in manufacturing a solar cell

Country Status (1)

Country Link
KR (1) KR20120138336A (en)

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