KR20120124317A - Method of aligning substrate for vacuum assembly and method of fabricating liquid crystal display device using thereof - Google Patents

Abstract

PURPOSE: A method for aligning substrates for vacuum coupling and a method for manufacturing a liquid crystal display device using the same are provided to form a liquid crystal layer by a liquid crystal dropping method, thereby quickly dropping liquid crystals. CONSTITUTION: An upper substrate(105) is inputted into a bonding machine chamber(200). The minimum point or the maximum point of light source strength is obtained by rotating a first polarizer(330) and a second polarizer(340). A rubbing axis of the upper substrate is checked and aligned. A lower substrate(110) is inputted between the first polarizer and the second polarizer. The minimum point or the maximum point of light source strength is obtained by rotation of the first polarizer and the second polarizer. The rubbing axis of the lower substrate is checked and aligned.

Description

Substrate alignment method for vacuum bonding and manufacturing method of liquid crystal display device using the same {METHOD OF ALIGNING SUBSTRATE FOR VACUUM ASSEMBLY AND METHOD OF FABRICATING LIQUID CRYSTAL DISPLAY DEVICE USING THEREOF}

The present invention relates to a substrate alignment method for vacuum bonding and a method of manufacturing a liquid crystal display device using the same. More particularly, in the case of forming a liquid crystal layer by a liquid crystal dropping method, a substrate alignment method for vacuum bonding and a liquid crystal using the same A method for manufacturing a display device.

Recently, interest in information display has increased, and a demand for using portable information media has increased, and a light-weight flat panel display (FPD) that replaces a cathode ray tube (CRT) And research and commercialization are being carried out. Particularly, among such flat panel display devices, a liquid crystal display (LCD) is an apparatus for displaying an image using the optical anisotropy of a liquid crystal, and is excellent in resolution, color display and picture quality and is actively applied to a notebook or a desktop monitor have.

In general, a liquid crystal display device is a display device in which a data signal according to image information is individually supplied to liquid crystal cells arranged in a matrix form so as to display a desired image by adjusting light transmittance of the liquid crystal cells. .

Hereinafter, a liquid crystal display will be described in detail with reference to FIG. 1.

1 is an exploded perspective view schematically showing a structure of a general liquid crystal display device.

As shown in the figure, the liquid crystal display device is largely a color filter substrate 5 and an array substrate 10 and a liquid crystal layer formed between the color filter substrate 5 and the array substrate 10. (liquid crystal layer) 40.

The color filter substrate 5 includes a color filter C composed of red (R), green (G), and blue (B) subcolor filters (7) and the subcolor filter ( 7) a black matrix 6 that separates the light and blocks light passing through the liquid crystal layer 40, and a transparent common electrode 8 that applies a voltage to the liquid crystal layer 40. .

The array substrate 10 has gate lines 16 and data lines 17 arranged vertically and horizontally to define the pixel region P. FIG. In this case, a thin film transistor (TFT) T, which is a switching element, is formed in an intersection region of the gate line 16 and the data line 17, and each pixel region P includes a pixel electrode 18. ) Is formed.

The pixel region P is a sub pixel corresponding to one sub color filter 7 of the color filter substrate 5, and the color image is the three types of sub color filters 7 of red, green, and blue. ) In combination. That is, three subpixels of red, green, and blue are gathered to form one pixel, and the thin film transistor T is connected to the red, green, and blue subpixels, respectively.

An alignment film (not shown) for aligning the liquid crystal molecules of the liquid crystal layer 40 is printed on the upper surface of the color filter substrate 5 and the array substrate 10 configured as described above.

FIG. 2 is a flowchart sequentially illustrating a method of manufacturing a general liquid crystal display, and illustrates a method of manufacturing a liquid crystal display when a liquid crystal layer is formed by a conventional liquid crystal injection method.

The manufacturing process of the liquid crystal display device may be classified into a driving element array process of forming a driving element on a lower array substrate, a color filter process of forming a color filter on an upper color filter substrate, and a cell process.

First, a plurality of gate lines and data lines arranged on an array substrate to define a pixel region are formed by an array process, and thin film transistors, which are driving elements connected to the gate lines and data lines, are formed in each of the pixel regions (S1). ). In addition, the pixel electrode is connected to the thin film transistor through the array process to drive the liquid crystal layer as a signal is applied through the thin film transistor.

In addition, a color filter layer and a common electrode are formed on the color filter substrate, the color filter layer including red, green, and blue sub-color filters that implement color by a color filter process (S3).

Subsequently, after the alignment film is printed on the color filter substrate and the array substrate, the alignment control force or the surface fixing force (that is, the pretilt angle and orientation) is applied to the liquid crystal molecules of the liquid crystal layer formed between the color filter substrate and the array substrate. Direction) to rub the alignment film (S2, S4).

After the predetermined alignment film is inspected, spacers for maintaining a constant cell gap are dispersed on the array substrate, and a sealing material is coated on the outer portion of the color filter substrate (S5, S6, S7), and then the color filter substrate and the array The substrate is pressed by applying pressure to the substrate (S8).

On the other hand, the color filter substrate and the array substrate is composed of a large area mother substrate. In other words, a plurality of panel regions are formed in a large area mother substrate, and a thin film transistor and a color filter layer serving as driving elements are formed in each of the panel regions, so that the mother substrate is cut and processed in order to manufacture a single liquid crystal display panel. Must be (S9). Thereafter, the liquid crystal is injected into the liquid crystal display panel processed as described above through the liquid crystal inlet, and the liquid crystal inlet is encapsulated to form a liquid crystal layer, and then the liquid crystal display panel is manufactured by inspecting each liquid crystal panel (S10 and S11). ).

At this time, the injection of the liquid crystal uses a vacuum injection method using a pressure difference, the vacuum injection method is a container filled with the liquid crystal in a chamber in which a constant vacuum is set in the liquid crystal inlet of the unit liquid crystal display panel separated from the mother substrate of a large area The liquid crystal is filled into the liquid crystal display panel by injecting the liquid crystal into the liquid crystal display panel by the pressure difference between the inside and the outside of the liquid crystal display panel by dipping the liquid into a liquid. The liquid crystal layer of the liquid crystal display panel is formed. Therefore, when the liquid crystal layer is formed on the liquid crystal display panel through a vacuum injection method, a part of the failure turn should be opened to have a function of the liquid crystal injection hole.

However, the vacuum injection method as described above has the following problems.

First, it takes a very long time to fill the liquid crystal in the liquid crystal display panel. In general, since the bonded liquid crystal display panel has a gap of several μm in an area of several hundred cm ² , the amount of liquid crystal injection per unit time is very small even when a vacuum injection method using a pressure difference is applied. For example, when manufacturing a liquid crystal display panel of about 15 inches takes about 8 hours to fill the liquid crystal there is a problem that the production of the liquid crystal display panel takes a lot of time, productivity is lowered. In addition, as the size of the liquid crystal display panel increases in size, the time required for filling the liquid crystal becomes longer, resulting in poor filling of the liquid crystal, and as a result, the size of the liquid crystal display panel cannot be coped with.

Second, the consumption of liquid crystal is high. In general, the amount of liquid crystal actually injected into the liquid crystal display panel is very small compared to the amount of liquid crystal filled in the container, and when the liquid crystal is exposed to the atmosphere or a specific gas, it reacts with the gas and deteriorates. Therefore, even if the liquid crystal filled in the container is filled in a plurality of liquid crystal display panels, a large amount of liquid crystals remaining after the filling should be discarded. As such, the expensive liquid crystals are discarded, resulting in an increase in the cost of the liquid crystal display panel. It is a factor that weakens the price competitiveness of the product.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object thereof is to provide a method of manufacturing a liquid crystal display device in which a liquid crystal layer is formed through a liquid crystal dropping method.

Another object of the present invention is to provide a substrate alignment method for vacuum bonding and a method of manufacturing a liquid crystal display device using the same when forming a liquid crystal layer by the liquid crystal dropping method.

Yet another object of the present invention is a substrate alignment method for vacuum bonding in which a rubbing axis is aligned by measuring optical axes of upper and lower substrates even in a color filter on TFT (COT) structure without an alignment key on an upper substrate. And to provide a method of manufacturing a liquid crystal display device using the same.

Further objects and features of the present invention will be described in the configuration and claims of the invention which will be described later.

In order to achieve the above object, the substrate alignment method for vacuum bonding according to the present invention includes a light source and a detector, and a first polarizer and a second polarizer positioned between the light source and the combiner chamber and the combiner chamber and the detector. Providing a vacuum adapter having a polarizer; Introducing an upper substrate into the combiner chamber; Identifying and aligning a rubbing axis of the upper substrate by finding a minimum or maximum point of a light source intensity through rotation of the first and second polarizers; Putting a lower substrate between a first polarizer and a second polarizer aligned with the rubbing axis of the upper substrate; And finding and aligning a rubbing axis of the lower substrate by finding a minimum or maximum point of light source intensity through rotation of the first and second polarizers.

According to an aspect of the present invention, there is provided a method of manufacturing a liquid crystal display device, including: providing a first mother substrate on which a plurality of color filter substrates are disposed; Providing a second mother substrate on which a plurality of array substrates are disposed; Performing a color filter process on the color filter substrates of the first mother substrate, and performing an array process on the array substrates of the second mother substrate; Forming an alignment layer on surfaces of the first and second mother substrates; Performing a rubbing process on the alignment layer; Providing a vacuum combiner having a light source and a detector, the vacuum combiner having the light source and the combiner chamber and a first polarizer and a second polarizer positioned between the combiner chamber and the detector; Inserting a first mother substrate on which the rubbing process is completed into the adapter chamber; Identifying and aligning a rubbing axis of the first mother substrate by finding a minimum or maximum point of light source intensity through rotation of the first and second polarizers; Inputting a second mother substrate on which the rubbing process is completed between a first polarizer and a second polarizer aligned with a rubbing axis of the first mother substrate; And finding and aligning a rubbing axis of the second mother substrate by finding the minimum or maximum point of the light source intensity through rotation of the first and second polarizers. Vacuum bonding the first and second mother substrates on which the rubbing axes are aligned; And cutting the bonded first and second mother substrates into a plurality of unit liquid crystal display panels.

In this case, the upper and lower substrates introduced into the combiner chamber are characterized in that the rubbing treatment is performed on the alignment layer.

The vacuum combiner includes a combiner chamber, a stage unit, a stage moving device, a vacuum device, a vent device, and a loader unit.

The upper substrate is characterized in that a predetermined failure turn is formed by applying a sealing material to the color filter substrate.

The lower substrate is characterized in that the liquid crystal is dropped into the array substrate.

Checking the rubbing axis of the lower substrate and at the same time characterized in that to form a vacuum in the adapter chamber through the pumping.

The rubbing axis of the lower substrate having the rubbing axis identified may be aligned by rotating the θ axis to coincide with the rubbing axis of the upper substrate.

At least one light source on the upper outer side of the combiner chamber and at least one detector on the lower outer side of the combiner chamber opposite the light source, while the light source and the combiner chamber and the combiner chamber and detector It is characterized by including a first polarizer and a second polarizer, respectively.

The first polarizer and the second polarizer may be arranged such that phases are perpendicular to or parallel to each other.

As described above, the manufacturing method of the liquid crystal display device according to the present invention can drop the liquid crystal in a short time compared to the conventional vacuum injection method by forming the liquid crystal layer in the liquid crystal drop method, when the liquid crystal display panel is enlarged Edo also provides an effect that can form the liquid crystal layer very quickly. In addition, since only the required amount of liquid crystal is dropped on the substrate, the price competitiveness of the liquid crystal display panel due to the disposal of expensive liquid crystal, such as a vacuum injection method, is prevented, thereby enhancing the price competitiveness of the product.

Substrate alignment method for vacuum bonding according to the present invention and a method of manufacturing a liquid crystal display device using the same in the case of the COT structure without the alignment key on the upper substrate proceeds vacuum bonding by aligning the rubbing axis by measuring the optical axis of the upper and lower substrates As a result, the degree of rubbing axis alignment of the upper and lower substrates is improved, and the black luminance and contrast ratio can be improved.

1 is an exploded perspective view schematically illustrating a structure of a general liquid crystal display device.
2 is a flowchart sequentially illustrating a manufacturing method of a general liquid crystal display device.
3 is a flowchart sequentially illustrating a method of manufacturing a liquid crystal display device according to an exemplary embodiment of the present invention.
Figure 4 is a cross-sectional view schematically showing the structure of a vacuum adapter according to an embodiment of the present invention.
FIG. 5 is an exemplary view schematically showing a concept of an optical axis measuring method in the vacuum combiner according to the embodiment of the present invention shown in FIG. 4.
6 is a flowchart sequentially illustrating a method of aligning a substrate for vacuum bonding according to an embodiment of the present invention.
7A to 7C are cross-sectional views sequentially illustrating a method of aligning a substrate for vacuum bonding according to an embodiment of the present invention.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the substrate alignment method for vacuum bonding and the method of manufacturing a liquid crystal display device using the same.

3 is a flowchart sequentially illustrating a method of manufacturing a liquid crystal display device according to an exemplary embodiment of the present invention, and illustrates a method of manufacturing a liquid crystal display apparatus when a liquid crystal layer is formed by a liquid crystal dropping method according to an exemplary embodiment of the present invention. .

As described above, the manufacturing process of the liquid crystal display device can be roughly divided into a driving element array process for forming driving elements on the lower array substrate, a color filter process for forming a color filter on the upper color filter substrate, and a cell process.

First, a plurality of gate lines and data lines arranged on an array substrate to define a pixel region are formed by an array process, and thin film transistors, which are driving elements connected to the gate lines and data lines, are formed in each of the pixel regions (S101). ). In addition, the pixel electrode is connected to the thin film transistor through the array process to drive the liquid crystal layer as a signal is applied through the thin film transistor.

In addition, the color filter substrate is formed with a color filter layer and a common electrode composed of red, green, and blue sub-color filters that implement color by a color filter process (S103). In this case, when a liquid crystal display device having an in-plane switching (IPS) method is manufactured, the common electrode is formed on a lower substrate on which the pixel electrode is formed through the array process.

Subsequently, after the alignment film is printed on the color filter substrate and the array substrate, the alignment control force or the surface fixing force (that is, the pretilt angle and orientation) is applied to the liquid crystal molecules of the liquid crystal layer formed between the color filter substrate and the array substrate. Direction) to rub the alignment film (S102, S104).

In general, in the manufacturing process of the liquid crystal display device, the alignment layer is a very important factor in determining the alignment of liquid crystal molecules and improving display characteristics. The alignment layer forming material is made of a polyamic acid or a soluble polyimide-based polymer which is an organic polymer, and after the coating, the alignment layer is formed by drying, heating and curing.

In this manner, the color filter substrate and the array substrate which have completed the rubbing process are inspected for defects of the alignment layer through a predetermined alignment layer inspector (S105).

If the rubbing is not uniform, the alignment degree of the liquid crystal molecules is not spatially constant, resulting in a defect that shows locally different optical characteristics.

Such a rubbing defect inspection method includes a first inspection for inspecting the presence of spots, streaks or pin holes on the surface of the coated alignment film after the alignment film is applied, and the uniformity and scratch of the surface of the rubbed alignment film after rubbing. There is a secondary test that checks for the presence of a scratch or the like.

In the case of using the liquid crystal dropping method according to the embodiment of the present invention, after completing the alignment layer inspection, a sealing material is applied to the color filter substrate to form a predetermined failure turn, and a liquid crystal is dropped on the array substrate. (S106, S107).

The dropping method uses a dispenser to drop and dispense liquid crystals in an image display area of a first mother substrate on which a plurality of color filter substrates are arranged or a second mother substrate of a large area on which a plurality of array substrates are arranged. The liquid crystal layer is formed by uniformly distributing the liquid crystals to the entire image display area by the pressure for bonding the first and second mother substrates together.

Therefore, when the liquid crystal layer is formed on the liquid crystal display panel by dropping, the failure turn should be formed in a closed pattern surrounding the pixel area region to prevent the liquid crystal from leaking out of the image display region.

The dropping method can drop the liquid crystal in a short time compared to the vacuum injection method, and can form the liquid crystal layer very quickly even when the liquid crystal display panel is enlarged.

In addition, since only the required amount of liquid crystal is dropped on the substrate, the price competitiveness of the liquid crystal display panel due to the disposal of expensive liquid crystal, such as a vacuum injection method, is prevented, thereby enhancing the price competitiveness of the product.

Thereafter, the first mother substrate and the second mother substrate are bonded together by the sealing material by applying pressure while the liquid crystal is dropped and the first mother substrate and the second mother substrate coated with the sealing material are aligned as described above. The liquid crystal dropped by the application of pressure is spread evenly over the entire liquid crystal display panel (S108). Through this process, a plurality of liquid crystal display panels having a liquid crystal layer are formed on the first and second mother substrates having a large area. The glass substrates are processed and cut and separated into a plurality of liquid crystal display panels. The liquid crystal display device is manufactured by inspecting (S109 and S110).

In this case, the liquid crystal dropping method uses a vacuum bonding machine for vacuum bonding, which will be described in detail with reference to the accompanying drawings.

Figure 4 is a cross-sectional view schematically showing the structure of a vacuum adapter according to an embodiment of the present invention.

As shown in the figure, the vacuum combiner according to the embodiment of the present invention includes a combiner chamber 200, a stage unit, a stage moving device, a vacuum device, a vent device, and a loader unit.

In the adapter chamber 200 constituting the vacuum adapter according to the embodiment of the present invention, the pressure and the pressure difference between the substrates 105 and 110 through pressurization between the substrates 105 and 110 are selectively formed inside the vacuum state or the atmospheric pressure state. Used bonding is performed sequentially, the outlet portion (not shown) is formed in the predetermined portion of the circumferential surface to carry in or out of each substrate.

At this time, the adapter chamber 200 is connected to an air discharge pipe 216 for receiving the air suction force transmitted from the vacuum device on one side of the circumferential surface and discharge the air present in the inner space, and the air from the outside, or Other gas (N ₂ ) inflow is made is connected to the vent pipe 217 for maintaining the interior of the adapter chamber 200 in the standby state is configured to be able to selectively form or release the vacuum state of the interior space.

In addition, the air discharge pipe 216 and the vent pipe 217 may be provided with an electronically controlled opening and closing valve (not shown) for the selective opening and closing of the pipe.

In addition, the vacuum device constituting the vacuum combiner according to the embodiment of the present invention serves to transfer the suction force so that the interior of the adapter chamber 200 can achieve a vacuum selectively, and generates a normal air suction force It consists of a suction pump (not shown) to drive, and the space provided with the suction pump is formed to communicate with the air discharge pipe 216 of the adapter chamber 200.

Here, the vent pipe 217 may be connected to at least two vent pipes 217 to the adapter chamber 200. 4 illustrates a discharge tube 216 and a vacuum pump one by one, substantially four low vacuum pumps and one high vacuum pump are configured to communicate with the discharge tube 216 to vacuum the combiner chamber 200. Can be. That is, the high vacuum pump is connected to the combiner chamber 200 through one discharge pipe 216, and the two low vacuum pumps are connected to the combiner chamber through another discharge pipe (not shown).

In addition, a shielding door (not shown) may be installed at the outlet of the adapter chamber 200 to selectively shield the opening portion due to the outlet.

In this case, the shielding door may be implemented as a conventional sliding door or a rotary door, and may be implemented as a configuration for opening and closing other openings. When the sliding door or the rotary door is configured, a sealing material for sealing the gap may be provided. It is more preferred that the configuration is included in the present invention, the detailed illustration of the portion is omitted.

The stage units constituting the vacuum combiner according to the embodiment of the present invention are installed in the upper space and the lower space in the combiner chamber 200, respectively, and are carried into the combiner chamber 200 through the loader unit. It comprises an upper stage 211a and a lower stage 211b which serve to fix each substrate 105, 110 to a corresponding working position in the combiner chamber 200.

At this time, at least one electrostatic chuck (ESC) 212a is mounted on the bottom surface of the upper stage 211a so as to fix the substrate by providing a constant power, and the vacuum force is transmitted to fix the substrate. At least one vacuum hole (not shown) may be formed to enable this.

The electrostatic chuck 212a as described above may be provided to form a pair having at least two different polarities so that DC power of different polarities may be applied to each substrate to allow electrostatic attachment of the substrates, but is not necessarily limited thereto. In addition, one electrostatic chuck 212a may be configured to provide constant power while simultaneously having both polarities.

In addition, at least one electrostatic chuck 212b is mounted on the upper surface of the lower stage 211b to allow the substrate to be fixed and to fix the substrate, and at least one or more substrates can be sucked and fixed to receive the vacuum force. Vacuum holes (not shown) may be formed.

In this case, the electrostatic chuck 212b and the vacuum hole may also be formed to have the same shape as the configuration of the upper stage 211a, but are not necessarily limited thereto. It is more preferable to arrange the electrostatic chuck 212b and the vacuum hole in consideration.

In addition, the stage shifting device constituting the vacuum combiner according to the embodiment of the present invention has a moving shaft 213 for driving the upper stage 211a to move up and down selectively, and selectively rotates the lower stage 211b left and right. A driving motor 214 having a rotating shaft 215 for driving the shaft, and selectively driving the respective shafts in a state in which the stages 211a and 211b are axially coupled to the inside or the outside of the adapter chamber 200. , Not shown).

Although not shown in the drawings, the loader unit constituting the vacuum combiner according to the embodiment of the present invention is an apparatus separate from the various components provided in the combiner chamber 200 and the combiner chamber 200. As a result, the lower substrate 110, on which the liquid crystal is dripped, or the upper substrate 105 coated with a sealing material, is delivered to the outer side of the adapter chamber 200, respectively, and the inside of the polymerizer chamber 200 of the vacuum combiner. Optionally import or export to.

In addition, the vacuum combiner according to the embodiment of the present invention is carried into the combiner chamber 200 by the loader and checks the alignment between the substrates 105 and 110 loaded in the stages 211a and 211b. It is configured to further include an alignment device for.

At this time, the aligning device may be mounted on at least one of the outside of the adapter chamber 200 or at the inside of the adapter chamber 200, but the alignment device may be mounted on the outside of the adapter chamber 200.

In this case, in general, the bonding process forms an alignment key on the upper and lower substrates to perform alignment through a vision system, and performs alignment on the X, Y, and θ axes based on the key. do. That is, rough and fine keys are formed at each corner of the upper and lower substrates, aligned through the first rough key, lowered the alignment gap, and finally aligned through the fine keys.

As described above, when there is no alignment key, it is difficult to proceed with normal alignment, and there is no alignment function for the rubbing axis of the upper and lower substrates regardless of the presence or absence of the alignment key.

For example, in the case of the COT (Color filter on TFT) or TOC (TFT On Color filter) structure in which the upper substrate does not have an alignment key, the upper and lower substrates may not be aligned. That is, in the COT or TOC structure, only the rear ITO process is performed on the upper substrate, so that the upper substrate does not have a color filter layer, and thus the bonding margin for the X and Y positions is free, but there is no alignment key. Since the alignment of the upper and lower substrates with respect to the rubbing axis also depends on the mechanical alignment, it is difficult to manage the increase in the black brightness and the contrast ratio due to the rubbing axis shift.

Accordingly, in the exemplary embodiment of the present invention, an object of the present invention is to improve the above-described black brightness and contrast ratio by aligning the rubbing axis by measuring the optical axis of the upper and lower substrates to perform vacuum bonding. And a light source 310 and a detector 320 for measuring the optical axes of the upper and lower substrates 105 and 110, and the light source 310, the combiner chamber 200, and the combiner chamber ( And polarizers 330 and 340 positioned between the detector 200 and the detector 320.

For example, at least one detector 320 may be provided on at least one light source 310 outside the upper portion of the combiner chamber 200 and on the lower outer side of the combiner chamber 200 opposite to the light source 310. And a first polarizer 330 and a second polarizer between the light source 310 and the combiner chamber 200, and between the combiner chamber 200 and the detector 320, respectively. 340 may be provided. Here, the first polarizer 330 provided between the light source 310 and the adapter chamber 200 and the second polarizer 340 provided between the detector 320 and the adapter chamber 200 have a phase ( phases are arranged to be orthogonal or parallel to each other, and rubbing to find the minimum or maximum point of intensity of the light source detected by the detector 320 through the rotation of the first and second polarizers 330 and 340. Align the axes.

However, the present invention is not limited thereto, and is provided with at least one detector 320 on the upper outer side of the combiner chamber 200 and the lower outer side of the combiner chamber 200 facing the detector 320. A second polarizer 340 and a first light source between the detector 320, the combiner chamber 200, and the combiner chamber 200 and the light source 310, respectively. The polarizer 330 may be provided.

In this case, the adapter chamber 200 may transmit light in the optical path between the light source 310 and the detector 320 so that the light emitted from the light source 310 may be detected through the detector 320. A predetermined hole W is provided, and the same hole W is also provided in the upper stage 211a and the lower stage 211b in the combiner chamber 200.

The hole W is formed at a position corresponding to a dummy region in the upper and lower substrates 105 and 110 in order to prevent interference due to a pattern, but corresponds to a region through which even a part of light, such as an array region, can pass through. It is also possible to form in position.

As such, through the checking and alignment of the rubbing axis by measuring the optical axis of the upper and lower substrates, the rubbing axis can be aligned even without the alignment key. Therefore, the degree of X, Y axis bonding during vacuum bonding of the upper and lower substrates can be managed by mechanical alignment even if the existing alignment system is deleted, and the rubbing axis can be controlled by θ axis alignment through optical axis measurement. It is also possible to improve the black brightness and contrast ratio by adding rubbing axis alignment in the current vacuum bonding process via a general alignment key. In other words, when there is no alignment key like the COT structure, the rubbing axis identification system and the θ-axis rotation system are the basic structures to perform the alignment function. It is also possible to add a rubbing axis identification system to the axis alignment system.

FIG. 5 is an exemplary view schematically illustrating a concept of an optical axis measuring method in the vacuum combiner according to the embodiment of the present invention illustrated in FIG. 4.

Referring to FIG. 5, a light source 310 and a detector 320 are provided outside the upper and lower substrates 105 and 110, respectively, and between the light source 310 and the upper and lower substrates 105 and 110. A first polarizer 330 is provided and a second polarizer 340 is provided between the upper and lower substrates 105 and 110 and the detector 320.

In this state, phases of the first polarizer 330 and the second polarizer 340 are arranged to be orthogonal or parallel to each other, and the detector 320 is rotated by the first and second polarizers 330 and 340. The rubbing axes of the upper and lower substrates 105 and 110 are respectively identified by finding the minimum or maximum points of the detected intensity of the light source, and then the rubbing axes are aligned by θ-axis alignment.

In this way, the rubbing axes of the upper and lower substrates 105 and 110 between the first and second polarizers 330 and 340 are identified, and the upper and lower substrates 105 and 110 are connected with the θ axis rotation system. Will be aligned. That is, the rubbing axis check system and the θ axis rotation system are connected to each other to perform the rubbing axis check and rotation alignment.

In this case, when the phases of the first polarizer 330 and the second polarizer 340 are arranged to be orthogonal to each other, the rubbing axis may be aligned by finding a minimum point of the intensity of the light source detected by the detector 320. When the phases of the first polarizer 330 and the second polarizer 340 are arranged to be parallel to each other, the rubbing axis may be aligned by finding the maximum point of the intensity of the light source detected by the detector 320.

6 is a flowchart sequentially illustrating a method of aligning a substrate for vacuum bonding according to an embodiment of the present invention.

7A to 7C are cross-sectional views sequentially illustrating a method of aligning a substrate for vacuum bonding according to an embodiment of the present invention.

First, as shown in FIG. 7A, when the upper substrate 105 is inserted into the adapter chamber 200 of the vacuum combiner according to the embodiment of the present invention, the first polarizer 330 and the second polarizer 340. The rubbing axis of the upper substrate 105 is checked by looking for the minimum or maximum point of the light source intensity through the rotation of (S201).

In this case, as described above, the vacuum combiner according to the embodiment of the present invention includes a combiner chamber 200, a stage unit, a stage moving device, a vacuum device, a vent device, and a loader unit.

In addition, the vacuum combiner according to the embodiment of the present invention checks the alignment state between the substrates 105 and 110 loaded into each stage 211a and 211b by being loaded into the combiner chamber 200 by the loader unit. The alignment device for the further comprises.

At this time, the aligning device may be mounted on at least one of the outside of the adapter chamber 200 or at the inside of the adapter chamber 200, but the alignment device may be mounted on the outside of the adapter chamber 200.

The alignment device includes a light source 310 and a detector 320 for measuring optical axes of upper and lower substrates 105 and 110, while the light source 310, the combiner chamber 200, and the combiner And polarizers 330 and 340 positioned between the chamber 200 and the detector 320.

In this case, the upper substrate 105 is a color filter substrate, and a color filter layer and a common electrode formed of red, green, and blue sub-color filters that implement color by a color filter process are formed thereon, and an alignment layer is printed thereon. The rubbing process is performed. In addition, a sealing material is coated on the upper substrate 105 after the alignment film inspection is completed, and a predetermined failure turn 120 is formed.

Subsequently, as shown in FIG. 7B, the lower substrate 110 is inserted between the first polarizer 330 and the second polarizer 340 aligned with the rubbing axis of the upper substrate 105, and the first polarizer again. The rubbing axis of the lower substrate 110 is checked through the rotation of 330 and the second polarizer 340 (S202). At the same time, a vacuum is formed in the adapter chamber 200 through pumping.

In this case, the lower substrate 110 is an array substrate, a thin film transistor which is a driving element which is formed with a plurality of gate lines and data lines defining a pixel region by an array process and is connected to the gate line and the data line in each of the pixel regions. Will be formed. In addition, as the signal is applied through the thin film transistor through the array process, a pixel electrode for driving the liquid crystal layer is formed, an alignment film is printed thereon, and a rubbing process is performed. In addition, the lower substrate 110 after the alignment layer inspection is finished, and the liquid crystal 130 is dropped thereon to form a liquid crystal layer.

That is, as shown in FIG. 7C, the rubbing axis of the lower substrate 110 identified in the above-described manner is aligned through the θ axis rotation to coincide with the rubbing axis of the upper substrate 105. In this state, the vacuum bonding of the upper and lower substrates 105 and 110 is completed through the Z-axis movement and the vent of the upper substrate 105 through the movement of the moving shaft 213 (S203).

Many details are set forth in the foregoing description but should be construed as illustrative of preferred embodiments rather than to limit the scope of the invention. Therefore, the invention should not be construed as limited to the embodiments described, but should be determined by equivalents to the appended claims and the claims.

105: upper substrate 110: lower substrate
120: failure turn 130: liquid crystal
200: combiner chambers 211a, 211b: stage
212a, 212b: electrostatic chuck 213: moving shaft
215: rotating shaft 216: discharge pipe
217: vent tube 310: light source
320: detector 330, 340: polarizer

Claims (16)

Providing a vacuum combiner having a light source and a detector, the vacuum combiner having the light source and the combiner chamber and a first polarizer and a second polarizer positioned between the combiner chamber and the detector;
Introducing an upper substrate into the combiner chamber;
Identifying and aligning a rubbing axis of the upper substrate by finding a minimum or maximum point of a light source intensity through rotation of the first and second polarizers;
Putting a lower substrate between a first polarizer and a second polarizer aligned with the rubbing axis of the upper substrate; And
And finding and aligning a rubbing axis of the lower substrate by finding a minimum or maximum point of light source intensity through rotation of the first and second polarizers. The method of claim 1, wherein the lower substrate is subjected to a rubbing treatment to the alignment layer while being introduced into the combiner chamber. The method of claim 1, wherein the vacuum combiner comprises a combiner chamber, a stage unit, a stage moving unit, a vacuum unit, a vent unit, and a loader unit. The method of claim 1, wherein the upper substrate is coated with a color filter substrate, and a predetermined failure turn is formed by forming a sealing material. The method of claim 1, wherein the lower substrate is a liquid crystal loaded on the array substrate. The method of claim 1, wherein a vacuum is formed in the adhering chamber through the pumping while simultaneously confirming the rubbing axis of the lower substrate. The method of claim 1, wherein the rubbing axis of the lower substrate having the rubbing axis identified is aligned through a θ-axis rotation so as to coincide with the rubbing axis of the upper substrate. Providing a first mother substrate on which a plurality of color filter substrates are disposed;
Providing a second mother substrate on which a plurality of array substrates are disposed;
Performing a color filter process on the color filter substrates of the first mother substrate, and performing an array process on the array substrates of the second mother substrate;
Forming an alignment layer on surfaces of the first and second mother substrates;
Performing a rubbing process on the alignment layer;
Providing a vacuum combiner having a light source and a detector, the vacuum combiner having the light source and the combiner chamber and a first polarizer and a second polarizer positioned between the combiner chamber and the detector;
Inserting a first mother substrate on which the rubbing process is completed into the adapter chamber;
Identifying and aligning a rubbing axis of the first mother substrate by finding a minimum or maximum point of light source intensity through rotation of the first and second polarizers;
Inputting a second mother substrate on which the rubbing process is completed between a first polarizer and a second polarizer aligned with a rubbing axis of the first mother substrate; And
Identifying and aligning a rubbing axis of the second mother substrate by finding a minimum or maximum point of light source intensity through rotation of the first and second polarizers;
Vacuum bonding the first and second mother substrates on which the rubbing axes are aligned; And
And cutting the bonded first and second mother substrates into a plurality of unit liquid crystal display panels. The method of claim 8, wherein the first and second mother substrates are vacuum-bonded through Z-axis movement and venting of the first mother substrate. The method of claim 8, wherein the vacuum combiner comprises a combiner chamber, a stage unit, a stage moving unit, a vacuum unit, a vent unit, and a loader unit. 10. The method of claim 8, wherein a predetermined failure turn is formed by applying a sealing material on the first mother substrate on which the color filter process is performed. The method of claim 8, wherein the liquid crystal is dropped on the second mother substrate subjected to the array process. The method of claim 8, wherein a vacuum is formed in the adhering chamber through the pumping while confirming the rubbing axis of the second mother substrate. The method of claim 8, wherein the rubbing axis of the second mother substrate whose rubbing axis is identified is aligned by rotating the θ axis so as to coincide with the rubbing axis of the first mother substrate. 9. The apparatus of claim 8, further comprising at least one light source at the top outside of the combiner chamber and at least one detector at the bottom outside of the combiner chamber opposite the light source; And a first polarizer and a second polarizer, respectively, between the adapter chamber and the detector. The method of claim 8, wherein the first polarizer and the second polarizer are disposed so that phases are perpendicular to or parallel to each other.

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