KR20120096014A - Transfer vehicle system - Google Patents

Transfer vehicle system Download PDF

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Publication number
KR20120096014A
KR20120096014A KR1020127015981A KR20127015981A KR20120096014A KR 20120096014 A KR20120096014 A KR 20120096014A KR 1020127015981 A KR1020127015981 A KR 1020127015981A KR 20127015981 A KR20127015981 A KR 20127015981A KR 20120096014 A KR20120096014 A KR 20120096014A
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KR
South Korea
Prior art keywords
container
conveyance
substrate
carrier
state detection
Prior art date
Application number
KR1020127015981A
Other languages
Korean (ko)
Inventor
마코토 야마모토
미츠야 토쿠모토
Original Assignee
무라다기카이가부시끼가이샤
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Publication of KR20120096014A publication Critical patent/KR20120096014A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Abstract

The transport vehicle system 1 of the present invention includes a transport vehicle 3, a CW sensor 57, and a production controller 21. The conveyance vehicle 3 conveys the carrier 49 with the board | substrate 50 between a some apparatus. The CW sensor 57 detects the state of the substrate 50 in the carrier 49. The manufacturing controller 21 controls the conveyance of the conveyance vehicle 3, and stops conveyance of the carrier 49 by the conveyance vehicle 3 when an abnormal signal is input from the CW sensor 57.

Description

Carrier system {TRANSFER VEHICLE SYSTEM}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transport vehicle system, and more particularly to a transport vehicle system for transporting a container having a plurality of substrates stored therein by a transport vehicle.

Background Art Conventionally, a transport vehicle system is known that includes a predetermined path, a plurality of stations provided on the path, and a plurality of transport cars that travel along the path to transport the goods. In the transport vehicle system, between the station and the transport vehicle, loading of goods (loading the goods from the station to the transport truck) or unloading of goods (loading the goods from the transport truck to the station) is performed.

As a representative example of a carrier system, the ceiling carrier system used by the conveyance system of a semiconductor factory is known. The ceiling carrier system is composed of a track provided on the ceiling and a ceiling carrier that can travel along the track. The ceiling transport vehicle mainly includes a traveling part engaged with the track, a holding part capable of holding a FOUP loaded with a semiconductor wafer, and a moving mechanism for moving the holding part up and down.

Ground carriers for transferring semiconductor wafers and liquid crystal glass are also known. The ground carrier has a vehicle body and a transfer device. A transfer device is comprised, for example with a transfer arm, a base, a turntable, and a transfer arm (for example, refer patent document 1).

In the ground carrier of patent document 1, the mapping sensor is provided in the transfer material which comprises a transfer arm. The mapping sensor detects whether a wafer is placed in each slot by detecting each slot in the buffer carrier.

Japanese Patent Laid-Open No. 2003-168718

In a conveyance vehicle system, a conveyance vehicle conveys the carrier in which the wafer was accommodated between a processing apparatus and a stocker. In this case, there may be a problem that the carrier is inclined during transportation and the wafer inside is inclined at the shelf or out of the slot. Further, in the processing apparatus, when the wafer is stored in the carrier, the wafer may sometimes deviate from the normal position of the slot. When conveying the carrier in the state in which the problem occurred in this way, the conveyance itself becomes unnecessary waste, and conveyance efficiency falls.

An object of the present invention is not to reduce the transport efficiency in a transport vehicle system.

Below, some aspect is demonstrated as a means to solve a subject. These aspects can be arbitrarily combined as needed.

The transport vehicle system according to the present invention includes a transport vehicle, a state detection device, and a transport control unit. A conveyance vehicle conveys the container with a board | substrate between some apparatus. The state detection device detects a state of the substrate in the container. The conveyance control part controls the conveyance of a conveyance vehicle, and stops conveyance of the container with respect to a destination, when an abnormal signal is input from the state detection apparatus.

In the system, the transport vehicle transports the container between the devices. However, when an abnormality arises in the state of the board | substrate in a container, a conveyance vehicle stops conveyance of a container with respect to a destination. As a result, unnecessary conveyance work is eliminated, and as a result, the conveyance efficiency of the conveyance vehicle system is hardly lowered.

The state detection apparatus may detect the state of the board | substrate in a container before a conveyance vehicle starts conveyance of a container with respect to a destination. In this case, the conveyance control part stops conveyance of the container to a destination, if an abnormal signal is input from the state detection apparatus before conveyance of the container to a destination is started.

In this system, unnecessary conveyance work is eliminated and as a result, conveyance efficiency of a conveyance vehicle system is hard to fall.

The conveyance control part may make a conveyance vehicle convey a container from an apparatus to an abnormality processing apparatus or an inspection apparatus, when an abnormal signal is input from a state detection apparatus.

In this system, an immediate response or inspection is made for abnormalities in the substrate in the container.

An apparatus is a substrate processing apparatus which processes a board | substrate, and a conveyance control part may make a conveyance vehicle carry out a container from a substrate processing apparatus, when an abnormal signal is input from a state detection apparatus.

In this case, the container is taken out of the substrate processing apparatus regardless of normal or abnormality. Therefore, the operation rate of a substrate processing apparatus becomes high.

The transport vehicle system may further include an automatic warehouse near the apparatus provided in the apparatus. In this case, the state detection device detects the state of the substrate in the container when the transport vehicle takes the container out of the automatic warehouse near the device to the device of the next step.

In this system, when there is an abnormality in the state of the board | substrate in a container, when a conveyance vehicle takes out a container from the automatic warehouse near a device to the apparatus of a next process, a conveyance vehicle stops conveyance of the container with respect to the target apparatus. Thereby, unnecessary conveyance work is eliminated and as a result, conveyance efficiency of a conveyance vehicle system is hard to fall.

The state detection device may be provided at the delivery port of the automatic warehouse near the device. In this case, the state detection device detects the state of the substrate in the container placed at the delivery port.

The state detection apparatus may be provided inside the automatic warehouse near the apparatus. In this case, the state detection device detects the state of the substrate in the container from the device.

The carrier system may further include a buffer which is disposed along the path of the carrier and can temporarily place the container. In such a case, the state detection device is provided in the buffer and detects the state of the substrate in the container in the buffer.

In this system, when there is an abnormality in the state of the board | substrate in a container, when a carrier carries out a container from a buffer, a carrier stops conveyance of a subsequent container. Thereby, unnecessary conveyance work is eliminated and as a result, conveyance efficiency of a conveyance vehicle system is hard to fall.

The transport vehicle system may further include a route arrangement automatic warehouse arranged along the route of the transport vehicle. In this case, the state detection apparatus is provided in the automatic path placement warehouse and detects the state of the substrate in the container in the automatic path placement warehouse.

In this system, when there is an abnormality in the state of the board | substrate in a container, when a conveyance vehicle takes out a container from a route placement automatic warehouse, a conveyance vehicle stops conveyance of a container. Thereby, unnecessary conveyance operation | movement disappears and as a result, conveyance efficiency of a conveyance vehicle system does not fall.

The state detection apparatus is provided in the transport vehicle, and may detect the state of the board | substrate in the container conveyed by a transport vehicle.

In this system, when there exists an abnormality in the state of the board | substrate in a container when a conveyance vehicle starts conveyance of a container, a conveyance vehicle stops conveyance of a container. Thereby, unnecessary conveyance operation | movement disappears and as a result, conveyance efficiency of a conveyance vehicle system hardly falls.

In the conveyance vehicle system which concerns on this invention, since the state of the board | substrate in a container is detected suitably, conveyance efficiency is hard to fall.

BRIEF DESCRIPTION OF THE DRAWINGS It is a partial top view which shows the layout of the carrier vehicle system which concerns on one Embodiment of this invention.
2 is a side view of the ceiling carrier vehicle.
3 is a front view when the ceiling transport vehicle is traveling between the processing apparatus and the side buffer.
4 is a schematic side view of the second processing apparatus.
5 is a perspective view illustrating a carrier and a CW sensor.
6 is a plan view showing a carrier and a CW sensor.
7 is a side view showing the carrier and the CW sensor.
8 is a block diagram illustrating a control system of a carrier vehicle system.
9 is a block diagram showing a communication configuration of a CW sensor and a processing apparatus.
It is a schematic diagram which shows the operation | movement which conveys a carrier from the apparatus front stocker.
It is a schematic diagram which shows the operation | movement which conveys a carrier from a processing apparatus, a stocker, and a buffer.
It is a schematic diagram which shows the operation | movement which a conveyance vehicle conveys a carrier from a processing apparatus.
13 is a flowchart showing a process of detecting a state of a substrate in a carrier.

(1) Layout of Carrier System

The carrier system 1 to which one embodiment of the present invention is applied is a system for running the plurality of carriers 3 on a predetermined route. The conveyance vehicle 3 travels on a route, loads an article from a target place in accordance with a conveyance command assigned by a higher controller, and then travels to a destination to drop the article to the destination.

The carrier system 1 is applicable to a manufacturing plant for semiconductors and liquid crystals. In a manufacturing plant, a semiconductor device or a liquid crystal device is formed on a substrate through various processing configurations such as thin film formation, oxidation, and etching on a substrate such as a silicon wafer or a glass plate. Between these types of processing apparatuses, the conveyance vehicle 3 conveys the carrier in which the board | substrate was accommodated.

1 shows the layout of the transport vehicle system 1. The transport vehicle system 1 includes a plurality of circumferential traveling paths 5 and a period traveling path 7 that connects the plural circumferential traveling paths 5. The period traveling path 7 has a whole winding path. A plurality of first processing apparatuses 9 are provided along the main traveling route 5, and a plurality of stockers 11 are provided along the main traveling route 7. The stocker 11 realizes the function of a buffer between the first processing device 9 groups in the main traveling path 5.

The first processing apparatus 9 and the stocker 11 are provided with a receiving port 13 for carrying goods into the facility and a shipping port 15 for carrying out goods from the facility. In addition, the receiving port 13 and the leaving port 15 may be combined.

In addition, a plurality of second processing apparatuses 51 are provided along the circumferential traveling path 5. The second processing apparatus 51 includes a processing apparatus main body 53 and a stocker 55 in front of the processing apparatus. The stocker 55 in front of the processing apparatus is provided with a receiving port 13 and a shipping port 15.

A plurality of side buffers 17 are disposed inside the main traveling path 5. The side buffer 17 is provided with the mounting part 24 and the pair of support members 26 which hang this from the ceiling 29 of a clean room, as shown in FIG. In addition, a lower buffer 19 is disposed between the first processing apparatuses 9 and below the main traveling path 5. The lower buffer 19, like the side buffer 17, has a mounting portion and a pair of supporting members that suspend it from the ceiling.

(2) the structure of the carrier

The structure of the carrier vehicle 3 is demonstrated using FIG. 2 and FIG.

The main traveling route 5 is mainly composed of a travel rail 30. The traveling rail 30 is supported from the ceiling 29 of the clean room by the support column 31. The travel rail 30 is comprised from the travel rail main body 32 and the power supply rail 33. As shown in FIG.

The transport vehicle 3 includes a main body base 34, a travel drive unit 35, and a power receiving unit 36. The body base 34 is provided below the travel rail 30. The travel drive unit 35 travels inside the travel rail main body 32. The power receiver 36 receives power from the power supply rail 33.

The conveyance vehicle 3 is an apparatus for conveying the carrier 49 (for example, FOUP) between apparatuses. In the carrier 49, a plurality of substrates 50 (for example, wafers) are stored. The conveyance vehicle 3 is a suspension conveyance vehicle, and further includes a lateral movement mechanism 39, a lift drive unit 40, and a lift table 41. The lift drive unit 40 can lift the lift table 41 by a hanging member such as a belt, a wire, or a rope. The platform 41 can chuck and release the flange of the upper part of the carrier 49 by a hand. The horizontal movement mechanism 39 can horizontally move the lift drive unit 40, the lift table 41, and the carrier 49 in the direction orthogonal to the traveling direction of the travel rail 30 (in the left and right directions).

The front cover 37 and the rear cover 38 are provided on the front and back of the transport vehicle 3 so as to sandwich the carrier 49 from the front and rear.

As shown in FIG. 3, the transport vehicle 3 travels at a position where the side thereof is close to the side of the support member 26 of the side buffer 17. In addition, the transport vehicle 3 travels above the delivery port 15 of the first processing apparatus 9. In addition, although not shown, the transport vehicle 3 travels in a narrow space between the pair of supporting members of the lower buffer 19.

(3) Stocker in front of the device

4, the 2nd processing apparatus 51 is demonstrated. 4 is a schematic side view of the second processing apparatus.

As mentioned above, the 2nd processing apparatus 51 is equipped with the processing apparatus main body 53, and the stocker 55 in front of a processing apparatus. The processing apparatus main body 53 is an apparatus for appropriately processing a substrate. The stocker 55 in front of the processing apparatus is provided in proximity to and adjacent to the processing apparatus main body 53. The stocker 55 in front of the processing apparatus is provided for adjusting the processing time between the transport vehicle 3 and the processing apparatus main body 53. The stocker 55 in front of the processing apparatus is provided with a plurality of shelves and has a function of temporarily storing the carrier 49 carried in the processing apparatus main body 53 and the carrier 49 carried out from the processing apparatus main body 53. Equipped. The stocker 55 in front of the processing apparatus includes a receiving port 13 and a shipping port 15 on the opposite side to the processing apparatus main body 53. Moreover, the stocker 55 before a processing apparatus is provided with the delivery port 56 for carrying in / out of the carrier 49 with the processing apparatus main body 53. As shown in FIG.

By providing the stocker 55 in front of the processing apparatus, even if the carrier 49 is delayed in or out of the carrier 49 due to the trouble of the processing apparatus main body 53 or the transport vehicle 3, the article can be continued without causing system down. Can be carried in and out of the second processing apparatus 51.

In addition, the following three types of apparatus are abbreviate | omitted in FIG.

Apparatus for transferring the carrier (49) between the receiving port (13) and the leaving port (15) and the processing unit body (53).

Stacker crane to move carrier 49 in stocker 55 in front of processing unit.

Apparatus for transferring the carrier (49) between the delivery port (56) and the processing body (53).

(4) CW sensor

5 to 7, a CW (Cassette Wafer) sensor 57 will be described. 5 is a perspective view showing a carrier and a CW sensor, FIG. 6 is a plan view showing a carrier and a CW sensor, and FIG. 7 is a side view showing a carrier and a CW sensor.

The CW sensor 57 is provided at the delivery port 15 of the stocker 55 in front of the processing apparatus. The CW sensor 57 includes a first photoelectric sensor 58 and a second photoelectric sensor 59. The first photoelectric sensor 58 and the second photoelectric sensor 59 are fixed to the other shaft 60.

Each of the first photoelectric sensor 58 and the second photoelectric sensor 59 is an independent reflective sensor, and irradiates electromagnetic waves containing light toward the carrier 49 in a state where the cover is closed. It can receive the electromagnetic wave reflected from the back. By the above operation, the 1st photoelectric sensor 58 and the 2nd photoelectric sensor 59 have the presence or absence of the board | substrate 50 in the carrier 49, and, if present, the board | substrate 50 is arrange | positioned normally in a slot, Can be detected. More specifically, the presence or absence of the board | substrate 50 in the slot of the whole carrier 49, and the presence or absence of the several board | substrate 50 in the said slot are detected. As mentioned above, it can be detected as an abnormal state that the board | substrate 50 is obliquely accommodated in the slot, the board | substrate 50 is accommodated in the unexpected slot, and the board | substrate 50 has a defect. .

The carrier 49 has transparency to radiation from the photoelectric sensor. Therefore, the state of the internal substrate can be known without opening the cover of the carrier 49. For example, the carrier 49 may be transparent or semi-transparent in whole or in part. In addition, the wavelength of an electromagnetic wave is not specifically limited.

In this embodiment, since the cover of the carrier 49 does not need to be opened, the detection operation is simple and quick.

(5) control system of carrier system

The control system 20 of the transport vehicle system 1 is demonstrated using FIG. 8 is a block diagram illustrating a control system of a carrier vehicle system.

The control system 20 includes a manufacturing controller 21, a logistics controller 23, a stocker controller 25, and a transport vehicle controller 27.

The logistics controller 23 is a controller higher than the stocker controller 25 and the carrier controller 27.

The carrier controller 27 manages a plurality of carriers 3 and has an assignment function for allocating a carrier instruction to them. In addition, a "return instruction | command" includes the command regarding a run, and the command regarding a goods loading position and a goods unloading position.

The production controller 21 can communicate with the first processing device 9 and the second processing device 51. The 1st processing apparatus 9 and the 2nd processing apparatus 51 transmit the conveyance request (item loading request-article unloading request) of the carrier 49 in which the process was completed, to the manufacturing controller 21.

The manufacturing controller 21 transmits a transfer request from the first processing unit 9 and the second processing unit 51 to the distribution controller 23, and the distribution controller 23 sends the report to the manufacturing controller 21. Send.

When the logistics controller 23 receives a return request from the manufacturing controller 21, when the receipt or release of the stocker 11 is accompanied, the distribution controller 23 sends the receipt instruction or the release instruction to the stocker controller 25 at a predetermined timing. . Then, the stocker controller 25 transmits the goods receipt or leaving order to the stocker 11. When the distribution controller 23 receives the conveyance request from the production controller 21, the distribution controller 23 converts it to a conveyance command and performs a conveyance command assignment operation for the conveyance vehicle 3.

The carrier controller 27 continuously communicates with each of the carriers 3 in order to create a conveying instruction, and obtains the positional information based on the position data transmitted from each of the carriers 3. As an example of acquiring the position information, the following method is available. One of them is to set a plurality of points in the transport track and to transmit the passing signal to the transport vehicle controller 27 when the transport vehicle 3 passes the point. Moreover, the carrier controller 27 memorize | stores the point which the conveyance vehicle 3 passed most recently and the time which passed the point. Then, the position of the transport vehicle 3 is calculated and calculated based on the specified speed and time of the point section. The other is, for example, an encoder is provided in the transport vehicle 3, and the travel distance after passing the point is transmitted from the transport vehicle 3 to the transport vehicle controller 27 as position data, and the transport vehicle controller 27 is provided. This is to determine the position of the transport vehicle (3) through this.

Carrier controller 27 is a computer which consists of CPU, RAM, ROM, etc., and runs a program, and is provided with a control part and a memory. The carrier controller communicates with the carrier vehicle 3 and also communicates with the logistics controller 23. The route map is stored in the memory of the carrier controller 27. The route map is a map describing the arrangement of the traveling route, the position of the origin, and the coordinates of the reference position and the displacement position based on the origin. The coordinates are obtained by converting the travel distance from the origin into the number of output pulses of the encoder of the transport vehicle 3 and the like.

The transport vehicle 3 is provided with a control part and a memory. The control unit is a computer that executes a program consisting of a CPU, a RAM, a ROM, and the like. The control unit can communicate with the vehicle controller 27. The carrier vehicle 3 includes a route map in the memory, and continues to travel while comparing the coordinates described in the route map with its own internal coordinates (coordinates obtained by the encoder).

The stocker controller 25 is a computer which executes a program consisting of a CPU, a RAM, a ROM, and the like, and includes a control unit and a memory. The stocker controller 25 is connected to an inventory sensor and an ID reader (not shown), and can receive detection signals from them.

The stocker controller 25 is connected to the crane controller (not shown) so that communication is possible. The crane controller is connected to a stacker crane (not shown) and can transmit a control signal to the stacker crane.

(6) Communication configuration of CW sensor

The communication configuration of the CW sensor will be described with reference to FIG. 9. 9 is a block diagram showing a communication configuration of a CW sensor and a processing apparatus.

In the conveyance vehicle system 1, the 1st processing apparatus 9 and the 2nd processing apparatus 51 are arrange | positioned in multiple numbers, and the CW sensor 57 is provided correspondingly. A CW sensor controller 61 is connected to the CW sensor 57. The CW sensor controller 61 is a computer which executes a program which consists of a CPU, RAM, ROM, etc., and has a control part and a memory. The CW sensor controller 61 receives the detection information from the CW sensor 57 and determines the normality or abnormality of the substrate 50.

The production controller 21 is further connected to the CW sensor controller 61. The manufacturing controller 21 transmits a conveyance request or conveyance stop request to the distribution controller 23 based on the information from the CW sensor controller 61.

(7) Detecting the inside of the carrier before the start of conveyance

10 and 13, the operation of detecting the inside of the carrier when the carrier 3 conveys the carrier 49 from another stocker 55 in front of the processing apparatus of the second processing apparatus 51 to another apparatus. To explain. It is a schematic diagram which shows the operation | movement which conveys a carrier from the apparatus front stocker. 13 is a flowchart showing a process of detecting a state of a substrate in a carrier.

In step S1 of FIG. 13, the stacker crane (not shown) moves the carrier 49 to the delivery port 15 in the stocker 55 in front of the processing apparatus. In step S2, the CW sensor controller 61 judges whether the state of the board | substrate 50 in the carrier 49 is normal based on the detection information from CW sensor 57. FIG. If normal, the process proceeds to step S3. If there is a problem, the process proceeds to step S4.

On the other hand, as a modification, the place where the sensor is attached may be placed inside the stocker to immediately check the state of the wafer in the carrier after the treatment is finished. In addition, a carry instruction may be assigned to the carrier, the state of the wafer in the carrier may be checked in the waiting time until the carrier arrives, and if there is an error, the assignment of the carry out instruction may be stopped.

In step S3, the CW sensor controller 61 transmits to the production controller 21 that it is normal. In addition, the manufacturing controller 21 transmits a conveyance request to the logistics controller 23. Thereby, the conveyance vehicle 3 conveys the carrier 49 to the target apparatus. In the target apparatus, since the steady state of the board | substrate 50 is confirmed before arrival, it may not be necessary to confirm the state of the board | substrate 50 in a load port at the time of carrying in. In this case, the substrate 50 can be processed immediately after opening the carrier from the load port.

In step S4, the CW sensor controller 61 transmits to the manufacturing controller 21 that there is an error. Moreover, the manufacturing controller 21 transmits the conveyance request at the time of abnormality to the distribution controller 23. Thereby, the conveyance vehicle 3 conveys the carrier 49 to the abnormal carrier processing apparatus (not shown). In other words, the return to the destination is stopped. In the abnormal carrier processing apparatus, the substrate returns to the normal state. On the other hand, the process of changing the destination of the carrier to the inspection apparatus may be performed.

In summary, the transport vehicle system 1 includes a transport vehicle 3, a CW sensor 57, and a production controller 21. The conveyance vehicle 3 conveys the carrier 49 with the board | substrate 50 between some apparatus. The CW sensor 57 detects the state of the substrate 50 in the carrier 49. The manufacturing controller 21 controls the conveyance of the conveyance vehicle 3, and when the abnormal signal is input from the CW sensor 57, the conveyance vehicle 3 conveys the carrier 49 from the apparatus to another apparatus. Stop it. On the other hand, the process of changing the destination of a carrier to an inspection apparatus may be performed.

In the above system, the transport vehicle 3 transports the carrier 49 between the devices. However, when an abnormality arises in the state of the board | substrate 50 in the carrier 49, the conveyance vehicle 3 will stop conveying the carrier 49 from another apparatus to another apparatus. As a result, unnecessary conveyance work is eliminated, and as a result, the conveyance efficiency of the conveyance vehicle system 1 is hardly lowered. That is, the subject of this invention is improving conveyance efficiency by reducing unnecessary conveyance, The solution of this invention is to detect the state of the board | substrate in a carrier before starting conveyance from an apparatus.

Moreover, in the said embodiment, when the carrier 49 is conveyed from the 2nd processing apparatus 51, the state of the board | substrate 50 is confirmed, and the carrier 3 is carrying the carrier 49 in any case of normal or abnormality. Is removed from the second processing apparatus 51. Therefore, the operation rate in the 2nd processing apparatus 51 becomes high.

(8) features of the present invention

The transport vehicle system 1 includes a transport vehicle 3, a CW sensor 57 (state detection device), and various controllers (transport control unit). The conveyance vehicle 3 conveys the carrier 49 with the board | substrate 50 between some apparatus. The CW sensor 57 detects the state of the substrate 50 in the carrier 49. The various controllers control the conveyance of the transport vehicle 3 and stop the conveyance of the carrier 49 to the destination when an abnormal signal is input from the CW sensor 57.

In the said conveyance vehicle system 1, the conveyance vehicle 3 conveys the carrier 49 between apparatuses. However, when an abnormality arises in the state of the board | substrate 50 in the carrier 49, the conveyance vehicle 3 stops conveying the carrier 49 to a destination. As a result, unnecessary conveyance work is eliminated, and as a result, the conveyance efficiency of the conveyance vehicle system 1 becomes difficult to fall.

The CW sensor 57 detects the state of the board | substrate 50 in the carrier 49 before the carrier vehicle 3 starts conveyance of the carrier 49 with respect to the destination. In this case, when the abnormality signal is input from the CW sensor 57 before the conveyance of the carrier 49 to a destination is started, the manufacturing controller 21 stops conveyance of the carrier 49 to a destination.

In the said conveyance vehicle system 1, unnecessary conveyance operation | work disappears and as a result, the conveyance efficiency of the conveyance vehicle system 1 hardly falls.

(9) Other Embodiment

As mentioned above, although embodiment of this invention was described, this invention is not limited to the said embodiment, A various change is possible in the range which does not deviate from the summary of invention. In particular, the plurality of embodiments and modifications described herein can be arbitrarily combined as necessary.

(9-1) Modifications in which CW sensors are installed in other devices

In the said embodiment, although the case where the CW sensor 57 was provided in the stocker 55 in front of a processing apparatus was demonstrated, this invention is not limited to this. In the embodiment according to the present invention, when the abnormality signal is input from the CW sensor 57, if the transport vehicle 3 stops conveying the carrier 49 from the device to another device, the CW sensor 57 The location can be anywhere.

As a first modification, an example in which the CW sensor 57 is provided in all or part of the first processing apparatus 9, stocker 11, side buffer 17, and lower buffer 19 will be described. 11 shows such an embodiment. It is a schematic diagram which shows the operation | movement which conveys a carrier from a processing apparatus, a stocker, and a buffer. In this case, when the carrier 49 is conveyed from the first processing apparatus 9, the stocker 11, the side buffer 17, and the lower buffer 19 to another apparatus, the processing of FIG. 13 is executed.

For example, the CW sensor 57 is provided in the first processing apparatus 9 and detects the state of the substrate 50 in the carrier 49 in the first processing apparatus 9. In this system, when there is an abnormality in the state of the board | substrate 50 in the carrier 49, when the conveyance vehicle 3 carries out the carrier 49 from the 1st processing apparatus 9 to the apparatus which is separated, the conveyance vehicle ( 3) The conveyance of the carrier 49 is stopped. As a result, unnecessary conveyance work is eliminated, and as a result, conveyance efficiency of the conveyance vehicle system 1 is less likely to decrease.

In this modification, the state of the board | substrate 50 is confirmed when the carrier 49 is conveyed from the 1st processing apparatus 9, and the conveyance vehicle 3 removes the carrier 49 in any case of normal or abnormality. 1 Take out from the processing apparatus 9. Therefore, the operation rate in the 1st processing apparatus 9 becomes high.

For example, the CW sensor 57 is provided in the stocker 11 and detects the state of the substrate 50 in the carrier 49 in the stocker 11. In this system, when the conveyance vehicle 3 carries out the carrier 49 from the stocker 11 to the apparatus which is separated, if the state of the board | substrate 50 in the carrier 49 is abnormal, the conveyance vehicle 3 will The conveyance of the carrier 49 is stopped. As a result, unnecessary conveyance work is eliminated, and as a result, conveyance efficiency of the conveyance vehicle system 1 is less likely to decrease.

For example, the CW sensor 57 is provided in the side buffer 17 and the lower buffer 19, and the state of the board | substrate 50 in the carrier 49 in the side buffer 17 and the lower buffer 19 is shown. Detect. In this system, when the carrier vehicle 3 carries out the carrier 49 from the side buffer 17 and the lower buffer 19 to the apparatus which is separated, if the state of the board | substrate 50 in the carrier 49 is abnormal, The carrier vehicle 3 stops the subsequent conveyance of the carrier 49. As a result, unnecessary conveyance work is eliminated, and as a result, conveyance efficiency of the conveyance vehicle system 1 is less likely to decrease.

As a 2nd modification, the example in which the CW sensor 57 is provided in the conveyance vehicle 3 is demonstrated. 12 shows such an embodiment. It is a schematic diagram which shows the operation | movement which a conveyance vehicle conveys a carrier from a processing apparatus. In this system, when there is an abnormality in the state of the board | substrate 50 in the carrier 49, when the conveyance vehicle 3 starts conveyance of the carrier 49, the conveyance vehicle 3 will be the target position of the carrier 49 Stop return to the furnace. Thereby, unnecessary conveyance operation | movement disappears and as a result, conveyance efficiency of the conveyance vehicle system 1 hardly falls.

In this example, when the carrier 3 conveys the carrier 49 from the first processing apparatus 9, the stocker 11, and the side buffer 17 to another apparatus, the processing of FIG. 13 is executed.

(9-2) Another Modification

The CW sensor 57 may be provided only in one type of device, and may be provided in plural types of devices. However, as shown in FIG. 10, when the CW sensor 57 is installed in the stocker 55 in front of the processing apparatus, only once when the carrier 49 is conveyed from the stocker 55 in front of the processing apparatus to another processing apparatus. Since the state of the board | substrate 50 should just be detected, efficiency is favorable. Therefore, the embodiment in which the CW sensor 57 is provided only in the stocker in front of the processing apparatus is effective.

The type of CW sensor is not particularly limited as long as it is a non-contact sensor. For example, the CW sensor may be a transmissive photoelectric sensor or a sensor composed of a light projector and a camera.

There may be one CW sensor 57 in one place, and three or more may be sufficient as it.

The CW sensor 57 may be provided in a floor type buffer.

The CW sensor 57 may transmit a detection signal to the controller of the 1st processing apparatus 9 or the 2nd processing apparatus 51 instead of the manufacturing controller 21. FIG. In this case, the detection signal is transmitted to the manufacturing controller 21 from the controller of the first processing device 9 or the second processing device 51.

Moreover, the CW sensor 57 may transmit a detection signal to the controller of the apparatus of the place where it is installed. For example, the CW sensor 57 can transmit a detection signal to the stocker controller 25, the carrier controller 27, and the controller in the carrier vehicle 3.

The layout and control system of the transport vehicle system are not limited to the above embodiments. In addition, the kind of equipment to which a carrier vehicle system is applied is not limited to the said embodiment.

The kind of conveyance vehicle may be either a ceiling conveyance vehicle, an unmanned conveyance vehicle which runs on a trolley | bogie, or a tracked trolley | bogie.

(Industrial availability)

INDUSTRIAL APPLICABILITY The present invention can be widely applied to a transport vehicle system for transporting a container in which a transport vehicle houses a plurality of substrates therein.

1: Carrier Car System
3: carrier
5: roundabout
7: period driving
9: first processing device
11: Stalker (path allocation automatic warehouse)
13: wearing port
15: Shipping port
17: side buffer (buffer)
19: Lower buffer (buffer)
20: control system
21: manufacturing controller (conveyance control unit)
23: logistics controller
24: tact
25: Stalker Controller
26 support member
27: carrier controller
29: ceiling
30: running rail
31: support pillar
32: running rail body
33: feeding rail
34: body base
35: driving drive unit
36: faucet
37: front cover
38: rear cover
39: lateral movement mechanism
40: lifting drive unit
41: platform
49 carrier (container)
50: substrate
51: second processing unit
53: processing unit body
55: Stocker in front of processing device (automatic warehouse near the device)
56: forwarding port
57: CW sensor (state detection device)
58: first photoelectric sensor
59: second photoelectric sensor
60: shaft
61: CW sensor controller

Claims (14)

A transport vehicle for transporting a container with a substrate between a plurality of devices,
A state detection device for detecting a state of the substrate in the container;
A conveyance control section which controls conveyance of the conveyance vehicle and stops conveying the container to a destination when an abnormal signal is input from the state detection device;
Carrier system with a. The method of claim 1,
The state detection device detects a state of a substrate in the container before the transport vehicle starts conveying the container to a destination,
The said conveyance control part stops conveying the said container to a destination, if an abnormal signal is input from the said state detection apparatus before the said conveyance vehicle starts conveying the said container to the destination. The method of claim 2,
And the conveyance control unit causes the conveyance vehicle to convey the container from the apparatus to the abnormality processing apparatus or the inspection apparatus when an abnormal signal is input from the state detection apparatus. The method of claim 2,
The apparatus is a substrate processing apparatus for processing the substrate,
And the conveyance control unit causes the conveyance vehicle to be unloaded from the substrate processing apparatus when an abnormal signal is input from the state detection apparatus. The method of claim 3, wherein
The apparatus is a substrate processing apparatus for processing the substrate,
And the conveyance control unit causes the conveyance vehicle to carry out the container from the substrate processing apparatus when an abnormal signal is input from the state detection apparatus. The method of claim 2,
It is equipped with an automatic warehouse near the device attached to the device,
The state detection device detects a state of the substrate in the container when the transport vehicle carries the container out of the automatic warehouse near the device to the device of the next step. The method according to claim 6,
And the conveying control unit causes the conveying vehicle to convey the container from the apparatus to the abnormality processing apparatus or the inspection apparatus when an abnormal signal is input from the state detection apparatus. The method according to claim 6,
The state detection device is installed in the delivery port of the automatic warehouse near the device,
The state detection apparatus detects a state of the substrate in the container placed at the delivery port. 8. The method of claim 7,
The state detection device is installed in the delivery port of the automatic warehouse near the device,
The state detection apparatus detects a state of the substrate in the container placed at the delivery port. The method according to claim 6,
The state detection device is installed inside the automatic warehouse near the device,
And the state detection device detects a state of the substrate in the container from which the container emerges from the device. 8. The method of claim 7,
The state detection device is installed inside the automatic warehouse near the device,
And the state detection device detects a state of the substrate in the container from which the container emerges from the device. The method of claim 2,
A buffer disposed along the path of the transport vehicle and capable of temporarily placing the container,
The said state detection apparatus is provided in the said buffer, The carrier vehicle system which detects the state of the said board | substrate in the said container in the said buffer. The method of claim 2,
It is further provided with an automatic route arrangement warehouse disposed along the route of the transport vehicle,
And the state detection device is provided in the route placement automatic warehouse and detects the state of the substrate in the container in the route placement automatic warehouse. The method of claim 2,
The said state detection apparatus is provided in the said conveyance vehicle, The conveyance vehicle system which detects the state of the said board | substrate in the said container conveyed by the said conveyance vehicle.
KR1020127015981A 2010-01-06 2010-10-08 Transfer vehicle system KR20120096014A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010000856A JP2011140366A (en) 2010-01-06 2010-01-06 Conveying vehicle system
JPJP-P-2010-000856 2010-01-06

Publications (1)

Publication Number Publication Date
KR20120096014A true KR20120096014A (en) 2012-08-29

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JP (1) JP2011140366A (en)
KR (1) KR20120096014A (en)
CN (1) CN102753458A (en)
TW (1) TW201140735A (en)
WO (1) WO2011083525A1 (en)

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JP2011140366A (en) 2011-07-21
TW201140735A (en) 2011-11-16
WO2011083525A1 (en) 2011-07-14

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