KR20120090811A - Stage apparatus and cooling unit - Google Patents

Abstract

PURPOSE: A stage device and a cooling unit are provided to minimize heat transfer from a movable element to a moving element by interposing a cooling member having a bracket function between the movable element and the moving element. CONSTITUTION: A stage device(1A) has an X-axial moving element(6) driven by an X-axial shaft motor(5), a Y-axial moving element(4) driven by a Y-axial shaft motor comprising a Y-axial fixed element(31) and a Y-axial movable element(32), an X-axial fixed element(51), and an X-axial movable element(52). Cooling jackets(8A,9A) and a tube are selectively attached to or detached from one or more areas of the peripheries of the X- and Y-axial movable elements. The area to install the cooling jackets is properly selected according to the calorific values of the X- and Y-axial shaft motors.

Description

Stage apparatus and cooling unit

This application claims priority based on Japanese Patent Application No. 2011-025184 for which it applied on February 8, 2011. All content of that application is incorporated herein by reference.

The present invention relates to a stage device having cooling means for cooling a shaft motor, and a cooling unit.

Background Art Conventionally, a stage apparatus having cooling means for cooling a shaft motor is known. For example, Patent Document 1 below discloses a heat radiation sleeve for an axial linear motor as a cooling means. This heat dissipation sleeve is made of a member extending in a cross-section C shape, and its inner circumferential surface is a fitting space having the same contour as that of the mover of the linear motor (shaft motor). The heat dissipation sleeve is mounted on the circumferential surface of the mover so as to sandwich the mover in the fitting space.

Japanese Patent Publication No. 2008-148399

Here, in the stage apparatus, components, such as a guide member which guides the movement of a moving body, are normally arrange | positioned around a mover. Therefore, in attaching or detaching the above-mentioned heat dissipation sleeve to the mover in such a stage device, the components arranged around the mover interfere with the heat dissipation sleeve, which may make it difficult to attach or detach the heat dissipation sleeve.

In addition, in the above-described heat dissipation sleeve, when the heat dissipation amount by the heat dissipation sleeve is remarkably large or small with respect to the heat generation amount of the shaft motor, it is not easy to adjust the heat dissipation amount, and there is a concern that it is difficult to cool the shaft motor stably. have.

The present invention has been made to solve such a problem, and an object thereof is to provide a stage device and a cooling unit capable of improving customization and cooling the shaft motor stably.

A stage apparatus according to the present invention has a movable body moving on a surface plate in a predetermined direction, an axial stator along a predetermined direction, and a movable element provided in the movable body, and the movable body is moved in a predetermined direction. A shaft motor for driving the engine, a fluid inlet for introducing the fluid, a fluid flow path for distributing the fluid, and a fluid outlet for discharging the fluid, the cooling being selectively removable for one or a plurality of areas on the outer circumferential surface of the mover And a hard or soft inlet tube connected to the fluid inlet, the fluid inlet to the cooling member, and a hard or soft outlet tube connected to the fluid outlet, for outflowing the fluid from the cooling member. .

In addition, the cooling unit according to the present invention includes a movable body moving on a surface plate in a predetermined direction, an axial stator along a predetermined direction, and a movable element provided in the moving body, and a shaft for driving the moving body in a predetermined direction. A cooling unit mounted to a stage device having a motor, the cooling unit having a fluid inlet for introducing a fluid, a fluid passage for distributing the fluid, and a fluid outlet for discharging the fluid, for one or a plurality of areas on the outer peripheral surface of the mover. Optionally detachable cooling member, a hard or soft inlet tube connected to the fluid inlet, for introducing fluid into the cooling member, and a hard or soft outlet tube connected to the fluid outlet, for outflowing the fluid from the cooling member. It is characterized by one.

In the stage device and the cooling unit according to the present invention, it is possible to selectively attach and detach a cooling member having a fluid passage with respect to one or a plurality of regions of the outer circumferential surface of the mover. Therefore, even when a part is arranged around the mover, the cooling member can be selectively attached or detached in an area where the part does not interfere, so that the cooling member can be easily detached from the mover. In addition, since the cooling member can be selectively attached or detached to one or a plurality of regions in this manner, the cooling amount can be adjusted by appropriately selecting the region in which the cooling member is mounted in accordance with the heat generation amount of the shaft motor. Therefore, according to the present invention, the shaft motor can be cooled with high customization and stability.

In addition, the cooling member preferably includes a bracket disposed between the movable body and the movable body to fix the movable body to the movable body. In this case, the cooling member which serves as a bracket is interposed between the movable body and the movable body, and the movement of heat from the movable body to the movable body can be suppressed.

According to the present invention, it becomes possible to provide a stage device and a cooling unit capable of improving the customization and cooling the shaft motor stably.

1 is a perspective view showing a stage device according to a first embodiment of the present invention.
FIG. 2 is a schematic perspective view showing an example of a liquid circulation path in a cooling unit attached to an X-axis actuator of the stage apparatus shown in FIG. 1.
FIG. 3 is a schematic perspective view showing an example of a flow path of liquid in a cooling unit attached to the Y-axis mover of the stage apparatus shown in FIG. 1.
4 is a schematic perspective view showing an example of a liquid circulation path in the cooling unit attached to the X-axis actuator of the stage apparatus according to the second embodiment of the present invention.
Fig. 5 is a schematic perspective view showing an example of a liquid circulation path in a cooling unit attached to the Y-axis mover of the stage apparatus according to the second embodiment of the present invention.
Fig. 6 is a schematic perspective view showing an example of a liquid circulation path in the cooling unit attached to the X-axis actuator of the stage apparatus according to the third embodiment of the present invention.

EMBODIMENT OF THE INVENTION Hereinafter, preferred embodiment of the stage apparatus and cooling unit which concern on this invention is described in detail, referring drawings. In addition, in the following description, the same code | symbol is attached | subjected to the same element and the overlapping description is abbreviate | omitted. In addition, the words "up" and "down" correspond to the up-down direction of the drawing and are convenient.

1 is a perspective view showing a stage device according to a first embodiment of the present invention. As shown in FIG. 1, the stage apparatus 1A according to the present embodiment is used, for example, for a semiconductor inspection apparatus for inspecting a semiconductor, a semiconductor exposure apparatus for exposing a semiconductor, and the like. The stage apparatus 1A includes a surface plate 2, Y-axis shaft motors 3 and 3, Y-axis movable body 4, X-axis shaft motors 5 and 5, X-axis movable body 6 and a table portion ( 7), cooling jacket (cooling member) 8A, 9A and pump 500 are provided. However, "X-axis direction" is any one direction (predetermined direction) parallel to the upper surface 2a of the surface plate 2, and "Y-axis direction" is parallel to the upper surface 2a and perpendicular to the X-axis direction. The other direction (predetermined direction).

The surface plate 2 is made of a rectangular parallelepiped stone, and the top surface 2a is raised in plan view by performing planar processing. Moreover, among the side surfaces extended in the Y-axis direction in the surface plate 2, the planar processing is performed also about the side surface 2b which air is injected from the Y-axis yaw air bearing 43 mentioned later, and the top view is raised. .

The Y-axis shaft motors 3 and 3 are for driving the Y-axis movable body 4, and have Y-axis stators 31 and Y-axis movers 32, respectively.

The Y-axis stator 31 has a plurality of magnets therein, and the same poles of the plurality of magnets are joined to form a shaft shape. The pair of Y-axis stators 31 and 31 are provided along the X-axis direction both ends in the upper surface 2a of the surface plate 2, respectively, and extend along the Y-axis direction. In FIG. 1, both ends of the Y-axis stator 31 on the right side of the ground are fixed by pillars 33 and 33 protruding upward from the upper surface 2a of the surface plate 2. In FIG. 1, the Y-axis stator 31 at the lower left of the page is fixed at both ends by pillars 34 and 34 protruding upward from the side surface 2b of the surface plate 2.

The Y-axis mover 32 moves along the Y-axis stator 31 and is extrapolated to the Y-axis stator 31. The Y-axis mover 32 has a coil surrounding the Y-axis stator 31 therein, and is driven by passing a current through the coil.

The Y-axis mover 32 is fixed to the Y-axis mover 4 by the bracket 10A. The bracket 10A is disposed between the Y-axis mover 32 and the first Y-axis mover 4a (described later), and between the Y-axis mover 32 and the second Y-axis mover 4b (described later), L-shaped. The bracket 10A is detachably attached to both ends of the Y-axis mover 32 in the Y-axis direction along the side surfaces 32d and the lower surface 32c of the Y-axis mover 32 by bolts (not shown). It is in contact with the side surface 32d and the lower surface 32c. Here, the bracket 10A does not necessarily need to be mounted along the side surfaces 32d and the lower surface 32c, but may be mounted along the side surfaces 32d and the upper surface 32a. In addition, it is not necessary to necessarily use two bracket 10A, You may use one or three or more. As described above, the bracket 10A is selectively detachable with respect to one or a plurality of regions (hereinafter also referred to as "mounting regions") of the outer circumferential surface of the Y-axis mover 32. In this embodiment, Both ends on the side surface 32d and the lower surface 32c are selected as the mounting area.

A fluid flow path 10L is formed in the bracket 10A (see FIG. 2). As a result, the bracket 10A distributes water (fluid) to the fluid flow path 10L, thereby absorbing heat generated by the operation of the Y-axis mover 32 to cool the Y-axis mover 32. It is possible. As such, the bracket 10A is included in the cooling member.

The Y-axis mover 4 has a first Y-axis mover 4a and a second Y-axis mover 4b. The first Y-axis mover 4a and the second Y-axis mover 4b each have a block shape, and are connected to each other by the X-axis stators 51 and 51 described later. And the Y-axis movable body 4 drives each Y-axis mover 32, and moves on the upper surface 2a of the surface plate 2 in a Y-axis direction.

The Y-axis guide 41 which guides the movement of the Y-axis movable body 4 in the Y-axis direction is attached to the 2nd Y-axis movable body 4b. The Y-axis guide 41 has a side plate 42 and Y-axis yaw air bearings 43 and 43.

The side plate 42 is a member for supporting the Y-axis yaw air bearings 43 and 43 and forms a rectangular parallelepiped shape. The upper side of this side plate 42 is attached to the lower part of the 2nd Y-axis movable body 4b, and has the surface 42a which opposes the side surface 2b of the surface plate 2.

The Y-axis yaw air bearings 43 and 43 function as gas static pressure bearings for injecting air, and are mounted on the surface 42a of the side plate 42 spaced apart from each other in the Y-axis direction. In the Y-axis guide 41 configured as described above, the Y-axis yaw air bearings 43 and 43 inject air toward the side surface 2b of the surface plate 2 to guide the movement of the Y-axis movable body 4.

The guide rail 44 which guides the movement of the X-axis movable body 6 in the X-axis direction is connected between the 1st Y-axis movable body 4a and the 2nd Y-axis movable body 4b. The guide rail 44 extends in the X-axis direction and forms a c-shaped cross section with an upper opening.

The X-axis shaft motors 5 and 5 are for driving the X-axis movable body 6, and have an X-axis stator 51 and an X-axis mover 52, respectively. The X-axis stator 51 and the X-axis mover 52 have the same configuration as the Y-axis stator 31 and the Y-axis mover 32, respectively. The pair of X-axis stators 51 and 51 are spaced apart from each other in the Y-axis direction between the first Y-axis mover 4a and the second Y-axis mover 4b, respectively, and extend along the X-axis direction. have. The X-axis mover 52 is extrapolated to the X-axis stator 51 and moves along the X-axis stator 51.

The X-axis movable body 52 is fixed to the X-axis moving body 6 by the bracket 10A similarly to the Y-axis movable body 32 mentioned above. That is, the said bracket 10A can distribute the water to the fluid flow path 10L, and can absorb the heat generate | occur | produced by the operation of the X-axis actuator 52, and can cool the said X-axis actuator 52. have.

The X-axis movable body 6 moves on the upper surface 2a of the surface plate 2 in the X-axis direction, and has a first X-axis movable body 6a and a second X-axis movable body 6b. The first X-axis movable body 6a and the second X-axis movable body 6b each have a rectangular parallelepiped shape. The 1st X-axis movable body 6a and the 2nd X-axis movable body 6b are mutually connected by the table part 7. As shown in FIG. And the X-axis movable body 6 moves each X-axis mover 52 on the upper surface 2a of the surface plate 2 in an X-axis direction. The table portion 7 is for providing a semiconductor or the like, and has a disk-shaped member on which the semiconductor or the like is provided.

The cooling jacket 8A absorbs heat generated by the operation of the Y-axis mover 32 and cools the Y-axis mover 32. The cooling jacket 9A absorbs heat generated by the operation of the X-axis mover 52 and cools the X-axis mover 52. The cooling jackets 8A and 9A each have a rectangular parallelepiped shape, and the bolts B and B are provided with respect to one or a plurality of mounting regions of the outer circumferential surface of the Y-axis actuator 32 and the X-axis actuator 52, respectively. It is selectively detachable by it.

The mounting area here is selected based on the arrangement and mounting of the parts provided around the Y-axis mover 32 and the X-axis mover 52. That is, the cooling jacket 8A is mounted so as to contact the upper surface 32a and the side surface 32d of the Y-axis mover 32 as a mounting area. The cooling jacket 9A is mounted so as to be in contact with the upper surface 52a and the lower surface 52c of the X-axis mover 52 as mounting regions. In particular, in this embodiment, the Y-axis guide 41 is arrange | positioned under the Y-axis movable body 32 attached to the 2nd Y-axis movable body 4b, and the lower surface of the outer peripheral surface of the said Y-axis movable body 32 is lowered. Since it is difficult to attach the cooling jacket 8A to the 32c, as described above, the upper surface 32a and the side surface 32b are selected as the mounting area with respect to the cooling jacket 8A.

The cooling jacket 8A is provided with a fluid flow path 8L (see FIG. 3), and absorbs heat generated by the operation of the Y-axis mover 32 by circulating water in the fluid flow path 8L. It is possible. In addition, a fluid flow path 9L is formed in the cooling jacket 9A (see FIG. 2), and water is flowed through the fluid flow path 9L to thereby generate heat generated by the operation of the X-axis actuator 52. It is possible to absorb.

The pump 500 is a feeding means for feeding water to the cooling jackets 8A, 9A and the bracket 10A. This pump 500 is separately provided, for example in the position away from the surface plate 2.

However, in the stage device 1A, one lift air bearing 100 for supporting the X-axis movable body 6 in the vertical direction is provided under the first X-axis movable body 6a and the second X-axis movable body 6b. It is installed in the lower part of 2). In addition, two lift air bearings 200 for supporting the Y-axis movable body 4 in the vertical direction are mounted at the bottom of the first Y-axis movable body 4a and two at the bottom of the second Y-axis movable body 4b. It is.

Next, the water circulation path in the cooling unit of this embodiment is demonstrated in detail.

FIG. 2 is a schematic perspective view showing an example of a water circulation path in a cooling unit mounted to the X-axis mover of the stage apparatus shown in FIG. 1; FIG. 3 is a cooling unit attached to the Y-axis mover of the stage apparatus shown in FIG. It is a schematic perspective view which shows an example of the water circulation path in water.

As shown in FIG. 2, the cooling unit U1 which cools the X-axis mover 52 is comprised by cooling jacket 9A, 9A, bracket 10A, 10A, and the tube t. In addition, as shown in FIG. 3, the cooling unit U2 which cools the Y-axis mover 32 is comprised by the cooling jacket 8A, 8A, the bracket 10A, 10A, and the tube t. .

As shown to FIG. 2 and FIG. 3, the fluid flow path 10L of 10 A of brackets distributes water, and is formed so that it may follow the external shape of the bracket 10A, ie, L-shape. The bracket 10A is provided with a fluid inlet 11 for introducing water into the fluid passage 10L and a fluid outlet 12 for discharging water from the fluid passage 10L. The fluid inlet 11 is located in one cross section, and the fluid outlet 12 is located in the other cross section.

The joint c is attached to the fluid inlet 11 and the fluid outlet 12, respectively. The joint t is connected to a tube t formed of a resin or the like, which is soft and flexible. The joint c is a so-called one-touch joint that can easily attach and detach the tube t here. The tube t connected to the fluid inlet 11 functions as an inlet tube for introducing water into the bracket 10A, and the tube t connected to the fluid outlet 12 allows water to flow out of the bracket 10A. It functions as an outflow tube. However, the tube t may be formed of metal or the like, and may be rigid and high rigidity.

As shown in FIG. 2, 9 L of fluid flow paths of 9 A of cooling jackets distribute | circulate water. This fluid flow path 9L has a linear shape when viewed from above in a U-shape and a side view from the Y-axis direction, and is extensively formed in the cooling jacket 9A. A fluid inlet 91 for introducing water into the fluid flow path 9L and a fluid flow path 9L in the side surface 9o and the side surface 9p of the cooling jacket 9A facing the X axis direction. A fluid outlet 92 for discharging water from the air is formed spaced apart from each other. The fluid inlet 91 and the fluid outlet 92 are equipped with a joint c to which the tube t is connected. The tube t connected to the fluid inlet 91 functions as an inlet tube for introducing water into the cooling jacket 9A, and the tube t connected to the fluid outlet 92 receives water from the cooling jacket 9A. It functions as an outflow tube for outflow.

In the cooling unit U1, one bracket 10A, the cooling jacket 9A attached to the lower surface 52c, the cooling jacket 9A attached to the upper surface 52a, and the other bracket 10A, The water is passed through this tube t in this order.

As shown in FIG. 3, 8L of fluid flow paths of 8 A of cooling jackets distribute | circulate water, and have the structure similar to the fluid flow path 9L (refer FIG. 2) of 9 A of cooling jackets. At the side surface 8o of the cooling jacket 8A, the fluid inlet 81 and the fluid outlet 82 are formed spaced apart from each other. At the fluid inlet 81 and the fluid outlet 82, a joint c to which the tube t is connected is mounted. The tube t connected to the fluid inlet 81 functions as an inlet tube for introducing water into the cooling jacket 8A, and the tube t connected to the fluid outlet 82 receives water from the cooling jacket 8A. It functions as an outflow tube for outflow.

In the cooling unit U2, one bracket 10A, the other bracket 10A, the cooling jacket 8A mounted on the side surface 32b, and the cooling jacket 8A mounted on the upper surface 32a, The water is passed through this tube t in this order.

In addition, a cable (not shown) is connected to the X-axis actuator 52 and the Y-axis actuator 32, respectively. These cables are provided with a cable protection member (for example, a cable bear (trademark), etc.) for supporting and protecting the cable. In addition, the tube t also follows this cable protection member. Thereby, even if the X-axis actuator 52 and the Y-axis actuator 32 move | move, it is suppressed that the tube t comes in contact with another component and is damaged.

In the stage apparatus 1A equipped with such cooling units U1 and U2, when the power is turned on, the pump 500 is first supplied to the cooling jacket 9A and the bracket 10A mounted on one of the X-axis actuators 52. A predetermined amount of water is pushed in from. The water is supplied to the cooling jacket 9A and the bracket 10A attached to the other X-axis mover 52, and then returned to the pump 500 to circulate the water. Further, when the power is turned on, a predetermined amount of water is pumped from the pump 500 to the cooling jacket 8A and the bracket 10A attached to one Y-axis mover 32. The water is supplied to the cooling jacket 8A and the bracket 10A attached to the other Y-axis mover 32, and then returned to the pump 500, whereby the water is circulated.

In addition, in the stage device 1A equipped with the cooling units U1 and U2, when the heat generation amount of the X-axis shaft motor 5 is larger than the cooling amount by the cooling jacket 9A and the bracket 10A, a new cooling member For example, the coolant is additionally mounted on the side surface 52b of the X-axis mover 52 and the like, and the flow path is changed (customized) by appropriately changing the connection of the tube t. It is possible to adjust.

In addition, in the stage apparatus 1A provided with the cooling units U1 and U2, for example, the heat generation amount of the X-axis shaft motor 5 and the heat generation amount of the Y-axis shaft motor 3 are the cooling jackets 8A, 9A and the bracket ( When smaller than the cooling amount by 10A), the cooling amount is adjusted according to the calorific value by removing at least one of these and changing the flow path by appropriately changing the connection of the tube t. It is possible to do.

As described above, in the present embodiment, the cooling jacket 8A having the fluid flow path 8L can be selectively detached with respect to one or a plurality of mounting regions of the outer circumferential surface of the Y-axis mover 32. . In addition, the cooling jacket 9A having the fluid flow path 9L can be selectively detached to one or a plurality of mounting regions of the outer circumferential surface of the X-axis mover 52. In addition, the bracket 10A having the fluid flow path 10L can be detachably attached to one or a plurality of mounting regions of the outer circumferential surface of the X-axis mover 52 and the Y-axis mover 32. . Therefore, even when parts are arranged around the X-axis actuator 52 and the Y-axis actuator 32, the cooling jackets 8A, 9A and the bracket 10A are selectively mounted in the mounting area where the components do not interfere. I can attach it. Therefore, the stage apparatus 1A which concerns on this embodiment can improve customization.

In the present embodiment, the cooling jackets 8A and 9A and the bracket 10A can be selectively detached with respect to one or a plurality of mounting regions. Therefore, according to the heat generation amount of the X-axis shaft motor 5 and the Y-axis shaft motor 3, the mounting area of cooling jacket 8A, 9A and bracket 10A can be selected suitably, and cooling amount can be adjusted. Therefore, the stage apparatus 1A which concerns on this embodiment can cool the X-axis shaft motor 5 and the Y-axis shaft motor 3 stably.

In addition, in this embodiment, as mentioned above, the bracket 10A which fixes the X-axis movable body 52 to the X-axis movable body 6 is used as a cooling member. For this reason, the X-axis movable body 6 and the X-axis movable body 52 are prevented from directly contacting thermally by this bracket 10A. Therefore, the movement of heat from the X-axis mover 52 to the X-axis mover 6 can be suppressed, so that the X-axis mover 6 is thermally expanded and the precision of movement of the X-axis mover 6 is reduced. Can be. Similarly, the movement of heat between the Y-axis mover 4 and the Y-axis mover 32 can also be suppressed by the bracket 10A.

However, in the present embodiment, since the bracket 10A has an L shape and protrudes outward from the side surfaces of the X-axis mover 52 and the Y-axis mover 32, the fluid inlet 11 positioned at the lower portion 11 is located. ) Or the fluid outlet 12 is rarely covered by the X-axis mover 52, the Y-axis mover 32, and the peripheral member, so that the tube t is easily connected to the joint c. In the stage apparatus 1A, the tube t can be easily attached and detached by a joint c, which is a one-touch joint. Therefore, the change of the distribution route, maintenance, etc. can be performed easily.

In addition, in this embodiment, since two systems of the system which cools the X-axis movers 52 and 52 and the system which cools the Y-axis movers 32 and 32 are provided, all cooling jackets 8A and 9A are provided. ) And the efficiency of cooling can be improved compared to the case where water is passed through only one system to the bracket 10A.

Next, the stage apparatus concerning 2nd Embodiment of this invention is demonstrated. In the description of the present embodiment, however, differences from the first embodiment will mainly be described.

Fig. 4 is a schematic perspective view showing an example of a water circulation path in a cooling unit mounted to an X-axis mover of a stage device according to a second embodiment of the present invention. Fig. 5 is a stage device according to a second embodiment of the present invention. It is a schematic perspective view which shows an example of the water circulation path in the cooling unit attached to the Y-axis mover.

As shown in FIG. 4, the X-axis mover is different from the cooling unit U1 (see FIG. 2) in the cooling unit U3 attached to the stage device 1B according to the present embodiment. This is the point that two cooling jackets 9B are provided on the upper surface 52a of 52. In addition, as shown in FIG. 5, the cooling unit U4 attached to the stage apparatus 1B which concerns on this embodiment differs from the cooling unit U2 which concerns on 1st Embodiment (refer FIG. 3) of Y. FIG. This is the point that two cooling jackets 8B are provided on the upper surface 32a of the shaft mover 32.

As shown in FIG. 4, the length in the Y-axis direction of the cooling jacket 9B is about half of the length in the Y-axis direction of the cooling jacket 9A. Thereby, the contact area of the cooling jacket 9B with respect to the X-axis actuator 52 is about half of the cooling jacket 9A, and it is possible to mount two cooling jackets 9B on the upper surface 52a. Similarly, as shown in FIG. 5, the length in the X-axis direction of the cooling jacket 8B becomes about half of the length in the Y-axis direction of the cooling jacket 8A, and is cooled by the upper surface 32a. It is possible to mount two jackets 8B.

4, in the cooling unit U3, the cooling jacket 9A attached to one bracket 10A, the lower surface 52c, and the one cooling jacket 9B attached to the upper surface 52a. The other cooling jacket 9B attached to the upper surface 52a and the other bracket 10A allow water to flow in this order through the tube t.

In addition, as shown in FIG. 5, in the cooling unit U4, it is attached to the cooling jacket 8A attached to one bracket 10A, the other bracket 10A, the side surface 32b, and the upper surface 32a. One cooling jacket 8B and the other cooling jacket 8B attached to the upper surface 32a distribute water in this order through the tube t.

It goes without saying that the stage device 1B including the cooling units U3 and U4 has the same effect as the stage device 1A according to the first embodiment.

In addition, in this embodiment, since the contact area of the cooling jacket 8B with respect to the Y-axis actuator 32 is about half of the cooling jacket 8A, it cools finely compared with the stage apparatus 1A. Can be adjusted. Similarly, since the contact area of the cooling jacket 9B with respect to the X-axis actuator 52 is about half of the cooling jacket 9A, the amount of cooling can be finely adjusted compared with the stage apparatus 1A.

Next, the stage apparatus which concerns on 3rd Embodiment of this invention is demonstrated. In the description of the present embodiment, however, differences from the first embodiment will mainly be described.

Fig. 6 is a schematic perspective view showing an example of the water circulation path in the cooling member attached to the X-axis mover of the stage apparatus according to the third embodiment of the present invention. As shown in FIG. 6, the X-axis mover differs from the cooling unit U5 (see FIG. 2) in the cooling unit U5 attached to the stage device 1C according to the present embodiment. Cooling jacket 9B is provided on upper surface 52a of 52, cooling jacket 9A is not provided on lower surface 52c, and bracket 10B is provided instead of bracket 10A. Is the point.

The bracket 10B has an I shape and is in contact with only the side surface 52d. Thereby, the contact area of the bracket 10B with respect to the X-axis mover 52 becomes about half of the bracket 10A. And in the cooling unit U5, one bracket 10B, the cooling jacket 9B, and the other bracket 10B let water flow in this order through the tube t.

It goes without saying that the stage device 1C including the cooling unit U5 exhibits the same effect as the stage device 1A according to the first embodiment.

In addition, in this embodiment, the contact area of the cooling jacket 9B with respect to the X-axis actuator 52 becomes about half of the cooling jacket 9A, and also with respect to the X-axis actuator 52 of the bracket 10B. Since the contact area is about half of the bracket 10A, the amount of cooling can be finely adjusted compared to the stage apparatus 1A.

As mentioned above, although preferred embodiment of this invention was described in detail, this invention is not limited to the said embodiment. For example, the flow path of water is not limited to the flow path shown in FIGS. 2-6, It is possible to make various flow paths by changing the connection of the tube t. In addition, in the said embodiment, although water is used as a fluid, liquids other than water may be used as a fluid, and gas, such as air, may be used as a fluid. In short, any fluid may be used to absorb heat generated from the shaft motor.

In the above embodiment, two systems of cooling systems for cooling the X-axis movers 52 and 52 and a system for cooling the Y-axis movers 32 and 32 are provided. The system may be divided into pieces and four cooling means may be provided. This further improves the efficiency of cooling.

In addition, in the said embodiment, although the X-axis shaft motors 5 and 5 and the Y-axis shaft motors 3 and 3 are used, only one shaft motor may be sufficient. In addition, in the said embodiment, although the seam c is what is called a one-touch seam, it is not necessary to be a one-touch seam.

In the above embodiment, the cooling jackets 8A, 8B, 9A, 9B and the brackets 10A, 10B are detachably attached to the X-axis mover 52 or the Y-axis mover 32 by bolts. It is not limited to this. For example, even if a projection is formed in one of a cooling member and a movable body, the engagement hole which engages with the said projection is formed in the other, and these projections and an engagement hole are engaged, even if a cooling member is detachably attached to a movable member, do. The cooling member may be detachably mounted to the movable member by an adhesive or a double-sided tape. In addition, a part of the cooling member may be provided with a fitting mechanism for fitting with the mover, and the fitting is detachably attached to the mover by fitting the fitting mechanism to the mover. In other words, the cooling member may be detachable from the movable member so that heat can be moved between the cooling member and the movable member.

In the fluid flow path 8L of the above embodiment, the fluid inlet 81 is formed at the side surface 8o, the fluid outlet 82 is formed at the side surface 8p, and the fluid inlet 81 and the fluid outlet are formed. The fluid flow path 8L may be formed so as to meander between the 82. That is, the fluid flow path 8L communicated with the fluid inlet 81 and the fluid outlet 82 may be sufficient. The same applies to the fluid passage 9L.

In addition, in the said embodiment, although a certain amount of water is circulated regardless of whether a mover is operating or stopping, water may be circulated only while a mover is operating. In addition, a certain amount of water may not be circulated, but the amount of water circulated may be adjusted according to the amount of heat generated by the mover.

In addition, in the said embodiment, although the X-axis mover 52 is attached to the X-axis movable body 6 via the brackets 10A and 10B, it does not go through the brackets 10A and 10B directly, but to the X-axis movable body 6 directly. It may be attached. The same applies to the mounting of the Y-axis mover 32 on the Y-axis movable body 4.

1A, 1B, 1C... Stage device; Table, 3... Y axis shaft motor, 4.. Y-axis moving body, 5... X axis shaft motor, 6.. X-axis moving body, 8A, 8B, 9A, 9B... Cooling jacket (cooling member), 8L, 9L… Fluid flow path, 10A, 10B... Bracket, 10L... . Fluid flow path, 11.. First connection port (fluid inlet, fluid outlet), 12.. Second connection port (fluid inlet, fluid outlet), 31.. Y-axis stator, 32... Y-axis mover, 51... X-axis stator, 52... X-axis actuators, 81, 91... First connection port (fluid inlet, fluid outlet), 82, 92... Second connection port (fluid inlet, fluid outlet), t.. Tube (inlet tube, outlet tube), U1, U2, U3, U4, U5... Cooling unit.

Claims (4)

A movable body moving on the surface plate in a predetermined direction,
A shaft motor for driving the movable body in the predetermined direction, having a shaft-shaped stator along the predetermined direction, and a movable element provided in the movable body;
A cooling member having a fluid inlet for introducing a fluid, a fluid passage for distributing the fluid, and a fluid outlet for discharging the fluid, the cooling member being selectively detachable with respect to one or a plurality of regions on the outer circumferential surface of the mover;
A hard or soft inlet tube connected to the fluid inlet and introducing the fluid into the cooling member;
A hard or soft outlet tube connected to the fluid outlet and for discharging the fluid from the cooling member;
With
Stage device characterized in that. The method according to claim 1,
The cooling member includes a bracket disposed between the movable body and the movable body to fix the movable body to the movable body.
Stage device characterized in that. A stage apparatus having a movable body moving on a surface plate in a predetermined direction, a shaft-shaped stator along the predetermined direction, and a movable element provided in the movable body, and having a shaft motor for driving the movable body in the predetermined direction. As a cooling unit mounted to
A cooling member having a fluid inlet for introducing a fluid, a fluid passage for distributing the fluid, and a fluid outlet for discharging the fluid, the cooling member being selectively detachable with respect to one or a plurality of regions on the outer circumferential surface of the mover;
A hard or soft inlet tube connected to the fluid inlet and introducing the fluid into the cooling member;
A hard or soft outlet tube connected to the fluid outlet and for discharging the fluid from the cooling member;
With
Cooling unit characterized in that. The method according to claim 3,
The cooling member includes a bracket disposed between the movable body and the movable body to fix the movable body to the movable body.
Cooling unit characterized in that.

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