KR20120063945A - Printing apparatus and method for forming pattern using the same - Google Patents

Abstract

PURPOSE: A printing device and a pattern formation method using the same are provided to prevent an exhilaration phenomenon of PDMS(Polydi-methylsiloxane) by improving height and slipping difference between a print area and a non print area. CONSTITUTION: A roll(103) is rotated by a rotary shaft(101). A blanket(105) is attached to the roll. The blanket is composed of a print area(B) and non print areas(A1, A2). The blanket is composed of a PDMS layer and a cushioning layer in which force of restitution is strong. The cushioning layer is formed in an area except for the non print area of the blanket. The PDMS layer comprises a PET layer. The PDMS layer is installed to the roll by a tension unit formed on a supporting stand. Ink is coated on the PDMS layer.

Description

Printing apparatus and pattern formation method using the same {PRINTING APPARATUS AND METHOD FOR FORMING PATTERN USING THE SAME}

The present invention relates to a printing apparatus of a liquid crystal display, and more particularly, to a printing apparatus and a pattern forming method using the same.

Recently, with increasing interest in information display and increasing demand for using a portable information medium, a lightweight thin film flat panel display replacing a conventional display device, a cathode ray tube (CRT), is disclosed. The research and commercialization of FPD) is focused on. In particular, the liquid crystal display device of the flat panel display device is an image representing the image using the optical anisotropy of the liquid crystal, and is excellent in resolution, color display and image quality, and is actively applied to laptops and desktop monitors.

The liquid crystal display is largely composed of a color filter substrate and an array substrate, and a liquid crystal display layer formed between the color filter substrate and the array substrate.

The manufacturing process of the liquid crystal display device basically requires a number of photolithography (photolithograpy) process for the production of an array substrate and a color filter substrate including a thin film transistor.

In addition, in order to form a predetermined pattern generally applied to information storage, a small sensor, a photonic crystal and an optical device, a microelectromechanical device, a display device, a display, and a semiconductor, the above-described photolithography process of forming a pattern using light is used. Will be used.

The photolithography process is a series of processes in which a pattern drawn on a mask is transferred onto a substrate on which a thin film is deposited to form a desired pattern as one of photolithography processes, and a plurality of complex processes such as photoresist coating, alignment and exposure, and development processes are as follows. It consists of a process.

However, the photolithography process has a disadvantage in that the initial investment is increased due to the expensive exposure equipment and the process cost required for the resolution mask is excessive as the pattern is ultra-fine. In addition, every time a pattern is formed, a complicated process such as exposure, post-exposure bake, development, post-development bake, etching process, and cleaning process must be performed, resulting in a long process time and repeated photo processes. Is lowered.

Thus, a method of forming a pattern using a roll printing method has been proposed in place of the photolithography technique, which is simple in cost and process.

A pattern forming method using a roll printing apparatus used in such a general roll printing technique will be described with reference to FIG. 1 as follows.

1A to 1C are process drawings schematically illustrating a pattern forming method using a general roll printing technique.

As shown in FIG. 1A, a blanket 15 is first formed on a cylindrical roll 11 surface, and then the blanket 15 is slit nozzle 20 from a resist ink supply device (not shown). The resist ink is applied to the surface to form a resist ink film 23.

Next, as shown in FIG. 1B, a printing plate 30 having a plurality of convex patterns (not shown) is prepared on the surface, and then the printing apparatus 10 having the resist ink film 23 formed on the surface of the printing plate 30. By rotating in the contact state, the resist ink film 23 in contact with the convex pattern (not shown) of the printing plate 30 is removed from the blanket 15 and formed on the surface of the printing plate 30. The portion of the resist ink film 23 which is not in contact with the convex pattern (not shown) of the printing plate 30 remains from the blanket 15 so that a predetermined resist pattern 23a is formed on the blanket 15. Is formed.

 Subsequently, as shown in FIG. 1C, the blanket 15 is rotated while the printing apparatus 10 having the resist pattern 23a remaining on the surface is rotated in contact with the etching target layer 41 of the substrate 40. The resist pattern 23a remaining on the substrate is transferred to the surface of the etching target layer 41, and the resist pattern 23a transferred to the etching target layer 41 is heated at a predetermined temperature to be finally formed on the etching target layer 41. A resist film pattern 25a is formed.

Subsequently, in a state in which a part of the etching target layer 41 is blocked by the resist film pattern 25a, an etching solution is applied to the etching target layer 41 to selectively etch the etching target layer 41 to form the resist layer pattern ( 25a) A predetermined pattern (not shown) is formed below.

The roll printing apparatus according to the related art applied to the pattern forming method will be described with reference to FIGS. 2 to 7 as follows.

Figure 2 is a perspective view schematically showing a roll printing apparatus used in the roll printing method according to the prior art.

3 is a plan view schematically showing a blanket of a roll printing apparatus according to the prior art.

4 is a cross-sectional view taken along line IV-IV of FIG. 2, and is a cross-sectional view of a roll printing apparatus according to the prior art.

5 is a cross-sectional view schematically showing a print area and a non-print area in which a roll printing apparatus according to the prior art is in contact with a substrate.

FIG. 6 is a cross-sectional view of a blanket schematically showing a portion in which a cushion layer of a roll printing apparatus according to the prior art is pressed against and in contact with a substrate.

7 is a plan view schematically illustrating a failure of a pattern formed when the number of printing processes using the roll printing apparatus according to the prior art is increased.

As such, the roll printing unit 10 according to the prior art applied to the roll printing technique used in place of the photolithography technique used in the conventional pattern formation, as shown in FIGS. It comprises a roll 13 rotated by), and a blanket 15 attached to the roll 13 and to which the resist ink 23 is applied.

Here, the blanket 15 is composed of a cushion layer 15a, a PET layer 15b and a PDMS layer 15c.

At this time, the cushion layer (15a) is a portion in direct contact with the roll 11 is composed of an adhesive material.

In addition, the PDMS layer 15c is a layer coated with ink, and is mounted on the roll 11 by a tension unit 51 provided on the support 50.

The roll printing apparatus 10 according to the related art having the above configuration has a first and second non-printing areas A1 and A2 and the first and second non-printing areas A1 as shown in FIGS. 3 and 4. , A2 is divided into a print area B located between them.

The first and second non-printing areas A1 and A2 are areas that are not in contact with the printing plate or the substrate, and the first non-printing area A1 is immediately before the printing is started by the roll printing apparatus 10, that is, printing. The second non-printing area A2 refers to the area before the area, and the second non-printing area A2 means the area after the printing is finished in the print area by the roll printing apparatus 10, that is, the area after the print area.

In addition, the printing area B means an area in which the roll printing apparatus 10 is in contact with the printing plate or the substrate.

However, according to the roll printing apparatus according to the related art, as shown in FIG. 5, in the case of continuous printing using the roll printing apparatus 10, the printing area B is continuously supported by the substrate 40. Pressing occurs, but the non-printing areas A1 and A2 are not pressed.

In the case of such a large number of printing processes, as the substrate 40 is pressed, the pressed region C of the lower cushion layer 15a may not be sufficiently restored as shown in FIG. 6, thereby increasing the height of the non-printed region A2. Differences occur, which results in slippage and the lifting of the PDMS layer.

Therefore, a distortion phenomenon and a lifting phenomenon of the PDMS layer occur in the non-printing area A2, which is the end of the printing of the roll printing apparatus according to the prior art, and thus, as shown in "D" of FIG. The defective pattern 41b is formed, and as the number of printing increases, the lifting area also increases.

Accordingly, the present invention has been made to solve the above problems, the object of the present invention is to remove the cushion layer located in the non-printing area of the end of the printing of the roll printing apparatus even if the continuous printing process is carried out the print area and non-printing The present invention provides a printing apparatus and a pattern forming method using the same, which can prevent distortion of a pattern by improving a height and sliding difference between regions to prevent lifting of the PDMS layer.

In order to achieve the above object, the printing apparatus according to the present invention, the roll is rotated by a rotating shaft; Resist ink is applied to the roll and coated, and includes a blanket comprising a print area and a non-print area, wherein the blanket is composed of a cushioning layer and a PDMS layer having strong restoring force. Is formed in an area excluding the non-printing area of the blanket adjacent to the printing area where printing is finished.

In order to achieve the above object, the pattern forming method using a printing apparatus according to the present invention, providing a substrate on which an etching target layer is formed; Rolls rotated by a rotating shaft, and a blanket composed of a strong restoring cushion layer and a PDMS layer (Polydimethylsiloxane), and a blanket consisting of a print area and a non-print area, wherein the cushion layer is adjacent to the print area to finish printing; Providing a roll printing apparatus formed on a region excluding the non-printing region of the blanket; Applying a predetermined resist ink to the blanket; Providing a printing plate including a convex pattern having a shape substantially the same as a pattern to be formed; In the state where the blanket coated with the resist ink is rotated in contact with the printing plate on which the convex pattern is formed, the resist ink in contact with the convex pattern of the printing plate is removed from the blanket to provide a predetermined surface on the blanket surface. Forming a resist pattern; Transferring the resist pattern onto the etching target layer by acting on the substrate on which the etching target layer is formed by applying a blanket on which the predetermined resist pattern is formed; And etching the etching target layer by using the transferred resist pattern to form a predetermined pattern on the substrate.

According to the printing apparatus and the pattern forming method using the same according to the present invention has the following effects.

According to the printing apparatus and the pattern forming method using the same according to the present invention, when the continuous printing process is performed, the pressed area of the lower cushion layer is not sufficiently restored by the pressing of the substrate as in the prior art, so that the printed area and the non-printed area are not restored. In order to suppress the lifting of the PDMS layer caused by the difference in height and slip between the areas, in the present invention, continuous printing is performed by removing the cushion layer located in the non-printed area of the end of printing of the roll printing apparatus. Even if the process is performed, the height and slippage difference between the printed area and the non-printed area can be improved to prevent the PDMS layer from being lifted, thereby preventing distortion of the pattern.

1A to 1C are process drawings schematically illustrating a pattern forming method using a general roll printing technique.
Figure 2 is a perspective view schematically showing a roll printing apparatus used in the roll printing method according to the prior art.
3 is a plan view schematically showing a blanket of a roll printing apparatus according to the prior art.
4 is a cross-sectional view taken along line IV-IV of FIG. 2, and is a cross-sectional view of a roll printing apparatus according to the prior art.
5 is a cross-sectional view schematically showing a print area and a non-print area in which a roll printing apparatus according to the prior art is in contact with a substrate.
FIG. 6 is a cross-sectional view of a blanket schematically showing a portion in which a cushion layer of a roll printing apparatus according to the prior art is pressed against and in contact with a substrate.
7 is a plan view schematically illustrating a failure of a pattern formed when the number of printing processes using the roll printing apparatus according to the prior art is increased.
8 is a plan view schematically showing a blanket of the roll printing apparatus according to the present invention.
9 is a cross-sectional view taken along the line VII-VII of FIG. 8, and is a cross sectional view of the roll printing apparatus according to the present invention.
10 is a cross-sectional view schematically showing a print area and a non-print area in which a roll printing apparatus according to the present invention contacts a substrate.
FIG. 11 is a cross-sectional view of a blanket schematically showing a portion in which a cushion layer of the roll printing apparatus according to the present invention is pressed and not pressed in contact with a substrate.
12 is a plan view schematically illustrating a defect of a pattern formed when the number of printing processes using the roll printing apparatus according to the present invention is increased.
13A to 13C are process drawings schematically illustrating a pattern forming method using a roll fritting apparatus according to the present invention.
14A to 14H are cross-sectional views sequentially illustrating a method of manufacturing a liquid crystal display using a roll printing apparatus according to an exemplary embodiment of the present invention.

Hereinafter, a roll printing apparatus used in forming a pattern according to the present invention will be described in detail with reference to the accompanying drawings.

8 is a plan view schematically showing a blanket of the roll printing apparatus according to the present invention.

9 is a cross-sectional view taken along the line VII-VII of FIG. 8, and is a cross sectional view of the roll printing apparatus according to the present invention.

10 is a cross-sectional view schematically showing a print area and a non-print area in which a roll printing apparatus according to the present invention contacts a substrate.

FIG. 11 is a cross-sectional view of a blanket schematically showing a portion in which a cushion layer of the roll printing apparatus according to the present invention is pressed and not pressed in contact with a substrate.

12 is a plan view schematically illustrating a defect of a pattern formed when the number of printing processes using the roll printing apparatus according to the present invention is increased.

The roll printing apparatus 100 applied to the roll printing technique according to the present invention includes a roll 103 rotated by the rotation shaft 101 and the roll 103 as shown in FIGS. 8 to 11. And a blanket 105 which is attached above and to which a resist ink (not shown) is applied.

Here, the blanket 105 is composed of a cushioning layer 105a having a strong restoring force, a PET layer 105b, and a PDMS layer (Polydimethylsiloxane) 105c.

At this time, the cushion layer (105a) is a portion in direct contact with the roll 101 is made of an adhesive material, is attached to the front of the roll (101).

In addition, the PDMS layer 105c is a layer coated with ink, and is mounted on the roll 101 by a tension unit 151 provided on the support 150. In this case, the PDMS layer 105c uses a material having low slip property with the cushion layer 105a.

9 and 10, the roll printing apparatus 100 having the above configuration includes first and second non-printing areas A1 and A2 and the first and second non-printing areas A1 and A2. It is divided into the print areas B located therebetween.

Here, the first and second non-printing areas A1 and A2 are areas that are not in contact with the printing plate or the substrate, and the first non-printing area A1 is directly started to print as the roll printing apparatus 100 is rotated. The second non-printing area A2 refers to an area before the area, and the second non-printing area A2 refers to an area after the printing of the printing area B is completed while the roll printing apparatus 100 is rotated.

In addition, the printing area B refers to an area in which the roll printing apparatus 100 is in contact with a printing plate or a substrate, that is, an area in which printing is performed.

9 to 11, although the cushion layer 105a constituting the blanket 105 is formed in the printing area B of the roll printing apparatus 100, the first and second ratios are not shown. It is not formed in the print areas A1 and A2. In this case, the cushion layer 105a may be formed in the first non-printing area A1 before the printing area B. FIG. However, the cushion layer 105a should not be formed in the second non-printing area A2 after the printing is finished.

This is because when the printing process proceeds in a number of ways, as shown in FIGS. 10 and 11, the pressed region C of the lower cushion layer 105a is not sufficiently restored, and thus the non-printed region A2 is not restored. Although there may be a difference in height, the existing cushion layer is removed in the non-printed area A2 so that a difference in height and slip between the printed area A1 and the non-printed area A2 does not occur and the PDMS layer ( The lifting phenomenon of 105c) does not occur.

Therefore, as shown in FIG. 12, the cushion layer 105a is left only in the printing area B of the roll printing apparatus 100 according to the present invention, and the cushion layer 105a is disposed in the non-printing areas A1 and A2. It can be seen that by removing the shape, the distortion phenomenon of the pattern, which occurred when the cushion layer was formed on the entire roll, is prevented.

A method of forming a pattern using the roll printing apparatus according to the present invention configured as described above will be described below with reference to FIGS. 13A to 13C.

13A to 13C are process drawings schematically illustrating a pattern forming method using a roll fritting apparatus according to the present invention.

As shown in FIG. 13A, first, the cushion layer 105a formed only on the printing area B on the surface of the cylindrical roll 101, the printing area B including the cushion layer 105a and the non-printing area A1, A2) a blanket 105 composed of a PET layer 105b and a PDMS layer 105c laminated thereon is formed, and then through the slit nozzle 120 from a resist ink supply device (not shown). Resist ink is applied to the surface of the jacket 105 to form a resist ink film 123.

Subsequently, as shown in FIG. 13B, a printing plate 130 having a plurality of convex patterns (not shown) is prepared on the surface, and then the printing apparatus 100 having a resist ink film 123 formed on the surface of the printing plate 130. ), The resist ink film 123 in contact with the convex pattern (not shown) of the printing plate 130 is removed from the blanket 105 to be convex of the printing plate 130. A portion of the resist ink formed on the pattern (not shown) surface and not in contact with the convex pattern of the printing plate 130 remains from the blanket 105 to form a predetermined resist ink layer pattern 123a. .

 Subsequently, as shown in FIG. 13C, the blanket is rolled by rotating the roll printing apparatus 100 having the resist ink film pattern 123a on the surface in contact with the etching target layer 141 of the substrate 140. The resist ink film pattern 123a remaining in the 105 is transferred to the surface of the etching target layer 141, and the resist ink film pattern 123a transferred to the etching target layer 141 is heated at a predetermined temperature to form the etching. The final resist pattern 125a is formed on the target layer 141.

Subsequently, in the state in which a part of the etching target layer 141 is blocked by the resist pattern 125a, an etching solution is applied to the etching target layer 141 to selectively etch the etching target layer 141 to thereby resist the resist pattern 125a. A predetermined pattern (not shown) is formed below.

A method of manufacturing a liquid crystal display device according to the present invention by applying a pattern forming method using a roll printing device having such a process sequence will be described below with reference to FIGS. 14A to 14H.

14A to 14H are cross-sectional views sequentially illustrating a method of manufacturing a liquid crystal display using a roll printing apparatus according to an exemplary embodiment of the present invention.

As shown in FIG. 14A, a first etching target layer 213 made of a first conductive layer is formed on the entire surface of the array substrate 211 made of a transparent material such as glass.

In this case, the first conductive layer may be formed of aluminum (Al), aluminum alloy, tungsten (W), copper (Cu), chromium (Cr), and molybdenum (Al) to form a gate electrode. Low resistance opaque conductive materials such as molybdenum (Mo), molybdenum alloy (Mo alloy) and the like can be used. In addition, the first conductive layer may have a multilayer structure in which two or more low resistance conductive materials are stacked.

Then, a predetermined resist ink is applied to the surface of the blanket 105, as shown in Figs. 13A to 13C, and a portion of the resist ink film pattern is removed by the printing plate 130 according to the embodiment of the present invention. After forming (123a), the resist ink film pattern 123a is transferred onto the first etching target layer 213 by rotating the blanket 105 in contact with the first etching target layer 213. The first resist pattern 280a is formed by heat treatment at a constant temperature.

Subsequently, as shown in FIG. 14B, by selectively etching the first etching target layer 213 in a state where a part of the first etching target layer 213 is blocked using the first resist pattern 280a as a mask, A gate electrode 213a formed of the first conductive layer is formed on the array substrate 211.

Next, a gate insulating layer 215 made of a silicon nitride film or a silicon oxide film is formed on the entire surface of the array substrate 211 on which the gate electrode 213a is formed. In this case, the gate insulating layer 215 may be formed of an organic insulating layer such as photoacryl or benzocyclobutene (BCB).

Subsequently, as shown in FIG. 14C, an amorphous silicon thin film or the like is deposited on the entire surface of the array substrate 211 on which the gate electrode 213a is formed, and then selectively etched through a photolithography process. A predetermined semiconductor layer 217 is formed on the gate electrode 213a. Although forming the semiconductor layer through the photolithography process is described here, the semiconductor layer 217 may be formed using the roll printing method of the present invention.

Thereafter, a second etching target layer 219 made of a second conductive layer is formed on the entire surface of the array substrate 211 on which the semiconductor layer 217 is formed.

In this case, the second conductive layer may use a low resistance opaque conductive material such as aluminum, aluminum alloy, tungsten, copper, chromium, molybdenum, molybdenum alloy, etc. to form the source electrode and the drain electrode. In addition, the second conductive layer may be formed in a multilayer structure in which two or more low-resistance conductive materials are stacked.

Subsequently, a predetermined resist ink is applied to the roll surface as shown in FIGS. 13A to 13C, and a portion of the resist ink pattern is removed by the printing plate 130 according to the embodiment of the present invention to form a resist ink pattern. By rotating the roll in contact with the second etching target layer 219, the resist ink pattern is transferred onto the second etching target layer 219 to form a second resist pattern 280b.

Next, as shown in FIG. 14D, the second etching target layer 219 is selectively etched by blocking a part of the second etching target layer 219 using the second resist pattern 280b as a mask. The source electrode 219a and the drain electrode 219b formed of the second conductive layer are formed on the array substrate 211.

Subsequently, a protective layer 221 made of an inorganic insulating layer or an organic insulating layer is formed on the entire surface of the array substrate 211 on which the source / drain electrodes 219a and 219b are formed, and then a portion of the protective layer 221 is etched. A contact hole 223 exposing a part of the drain electrode 219b is formed. In this case, the contact hole 223 may be formed using the roll printing method of the present invention.

Thereafter, a third etching target layer 225 formed of a third conductive layer is formed on the entire surface of the array substrate 211 on which the protective layer 221 is formed. In this case, the third conductive layer may use a transparent conductive material such as indium tin oxide or indium zinc oxide to form a pixel electrode.

Subsequently, a predetermined resist ink is applied to the surface of the blanket 105 as shown in FIGS. 13A to 13C, and a portion of the resist ink is removed by the printing plate 130 according to the embodiment of the present invention to form a resist ink pattern. Thereafter, by rotating the blanket 105 in contact with the third etching target layer 225, a resist ink pattern is transferred onto the third etching target layer 225 to form a third resist pattern 280c. .

Subsequently, as shown in FIG. 14E, the third etching target layer 225 is selectively etched by blocking a part of the third etching target layer 225 using the third resist pattern 280c as a mask. The pixel electrode 225a is electrically connected to the drain electrode 219b through the contact hole 223.

On the other hand, as shown in Figure 14f, to form a color filter, a fourth etching consisting of a single layer of Cr, a double layer of Cr / CrO ₂ or an organic film on the color filter substrate 231 made of a transparent material such as glass The target layer 233 is formed.

Then, a predetermined resist ink is applied thereon, as shown in Figs. 13A to 13C, onto the surface of the blanket 105 and partially removed by the printing plate 130 according to the embodiment of the present invention. After the pattern is formed, the resist ink pattern is transferred onto the fourth etching target layer 233 by rotating the blanket 105 in contact with the fourth etching target layer 233 to form a fourth resist pattern 280d. To form.

Subsequently, as shown in FIG. 14G, by selectively etching the fourth etching target layer 233 in a state in which a part of the fourth etching target layer 233 is blocked using the fourth resist pattern 280d as a mask, A predetermined black matrix 233a is formed on the color filter substrate 231.

Next, a color filter layer 235 including red (R), green (G), and blue (B) colors sub-color filters on the color filter substrate 231 on which the black matrix 233a is formed. ), And a common electrode 237 made of indium tin oxide or indium zinc oxide is formed thereon. In this case, the color filter layer 235 including the red (R), green (G), and blue (B) sub-color filters uses a roll printing method using the roll printing apparatus of the present invention. It may be formed by.

Subsequently, as shown in FIG. 14H, after the color filter substrate 231 and the array substrate 211 are bonded together, a liquid crystal layer 241 is formed between the color filter substrate 231 and the array substrate 211. Thus, a liquid crystal display device is manufactured.

In this case, the liquid crystal layer 241 may be formed by bonding the color filter substrate 231 and the array substrate 211 and injecting liquid crystal therebetween, but on the color filter substrate 231 or the array substrate 211. After dispensing the liquid crystal, the color filter substrate 231 and the array substrate 211 are bonded together, and a pressure is applied to the entire liquid crystal between the color filter substrate 231 and the array substrate 211 where the dropped liquid crystal is bonded. It can form by distributing uniformly over.

As described above, according to the printing apparatus according to the present invention and the pattern forming method using the same, when the continuous printing process is performed, the pressing area of the lower cushion layer is not sufficiently restored by the pressing of the substrate as in the conventional case. In order to suppress the lifting of the PDMS layer caused by the difference in height and slip between the printed area and the non-printed area, the present invention provides a cushion layer positioned in the non-printed area of the printing end of the roll printing apparatus. Even if the continuous printing process is performed by removing, improvement of the height and slippage difference between the print area and the non-print area is prevented to lift the PDMS layer, thereby preventing distortion of the pattern.

Although preferred embodiments of the present invention have been described in detail above, those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom.

Accordingly, the scope of the present invention is not limited thereto, and various modifications and improvements of those skilled in the art using the basic concept of the present invention as defined in the following claims also fall within the scope of the present invention.

100: roll printing device 101: rotation axis
103: roll 105: blanket
105a: cushion layer 105b: PET layer
105c: PDMS layer 120: slit nozzle
123: resist ink 123a: resist ink film pattern
125a: resist pattern 130: printing plate
131: convex pattern 140: substrate
141a: patterns A1 and A2: nonprinting area
B: print area

Claims (10)

A roll rotated by a rotating shaft;
Resist ink is applied on the roll to apply the ink, and comprises a blanket comprising a print area and a non-print area,
The blanket is made of a cushioning layer and a PDMS layer (Polydimethylsiloxane) having a strong resilience, the cushion layer is roll printing, characterized in that formed in the region other than the non-printing area of the blanket adjacent to the printing area where printing is finished Device. The roll printing apparatus of claim 1, wherein the cushion layer is formed only in a printing area of the blanket. The roll printing apparatus of claim 1, wherein the cushion layer is formed only in a non-printing area before printing, which is a printing area of the blanket and a previous area of the printing area, starts. The roll printing apparatus of claim 1, wherein the PDMS layer comprises a PET layer, and a material having a low slip property with the cushion layer is used. The roll printing apparatus of claim 1, wherein the cushion layer is formed only in a printing area in contact with a substrate. Providing a substrate on which an etching target layer is formed;
Rolls rotated by a rotating shaft, and a blanket composed of a strong restoring cushion layer and a PDMS layer (Polydimethylsiloxane), and a blanket consisting of a print area and a non-print area, wherein the cushion layer is adjacent to the print area to finish printing; Providing a roll printing apparatus formed on a region excluding the non-printing region of the blanket;
Applying a predetermined resist ink to the blanket;
Providing a printing plate including a convex pattern having a shape substantially the same as a pattern to be formed;
In the state where the blanket coated with the resist ink is rotated in contact with the printing plate on which the convex pattern is formed, the resist ink in contact with the convex pattern of the printing plate is removed from the blanket to provide a predetermined surface on the blanket surface. Forming a resist pattern;
Transferring the resist pattern onto the etching target layer by acting on the substrate on which the etching target layer is formed by applying a blanket on which the predetermined resist pattern is formed; And
And etching the etching target layer using the transferred resist pattern to form a predetermined pattern on the substrate. The method of claim 6, wherein the cushion layer is formed only in a print area of the blanket. The method of claim 6, wherein the cushion layer is formed only in a non-printing area before printing starts, which is a printing area of the blanket and a previous area of the printing area. The method of claim 6, wherein the PDMS layer comprises a PET layer, and a material having a low slip property with the cushion layer is used. The method of claim 6, wherein the cushion layer is formed only in a print area in contact with a substrate.

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