KR20120020025A - Apparatus for controlling temperature of canister - Google Patents

Abstract

PURPOSE: A canister temperature control apparatus is provided to improve work productivity by preventing degradation of performance and a constant temperature function due to liquid water leakage and evaporation. CONSTITUTION: A jacket body(110) is closely attached to the outer circumferential surface of a canister(200). A heat transfer medium is circulated inside of the jacket body. A thermoelectric module part(120) cools or heats the heat transfer medium. A circulation pump(130) circulates the heat transfer medium within the jacket body. A controller(140) controls the temperature of the heat transfer medium by controlling the thermoelectric module part.

Description

Canister temperature controlling device {Apparatus for controlling temperature of canister}

The present invention relates to a canister temperature control device, and more particularly, to a canister temperature control device for maintaining a constant temperature of a canister (bubble) used in a semiconductor manufacturing process, a display manufacturing process, or an LED manufacturing process. will be.

Generally, various kinds of source gases are used in a semiconductor manufacturing process, a display process for manufacturing a semiconductor device, or an LED manufacturing process for manufacturing an LED device.

Conventional semiconductor manufacturing processes consist of adapting multilayer thin films to semiconductor, conductor, and insulator materials, and etching circuits to form circuit elements by etching patterns required for each thin film. And belongs to the general process. There may be various methods of laminating thin films, and among them, chemical vapor deposition (CVD) and physical vapor deposition (PVD) are typical. After placing the wafer in the process chamber, a reaction gas contained in a plurality of canisters (bubbles) is introduced through an injector to form an interlayer insulating film on the wafer or to form a film formed on the wafer using a material produced by a chemical reaction. In order to planarize, or to achieve other objects, a silicon oxide film, a silicon nitride film, or the like is formed.

On the other hand, the temperature control (maintenance) device of the canister (bubble) is used for the purpose of maintaining a stable bubble reaction by keeping the canister temperature constant, which is an essential requirement to implement a very important process technology in the CVD process. In particular, maintaining the temperature of the canister (bubble) is essential for precise control of various reaction gases used to manufacture LED substrates of various characteristics in the metal organic chemical vapor deposition (MOCVD) apparatus of the LED manufacturing process. This is a required skill.

Conventional canister temperature control devices are usually applied to a bath structure in which various types of bubblers are immersed in a temperature-controlled bath. The bath structure maintains a constant temperature of the metal canister by controlling the temperature of the fluid filled in the bath. According to the control temperature, the fluid used in the bath uses water at room temperature and antifreeze at low temperature. Referring to FIG. 1, specifically, a temperature control device having a bath structure includes a bath 10 in which a liquid, which is a thermal medium, is accommodated, a cooling device 30 for cooling the temperature of the thermal medium (such as a refrigerant compressor or a thermoelectric element), a thermal medium. Heating device (40, heater or thermoelectric element, etc.) for heating the temperature of the temperature, the stirrer or pump 50 for setting the temperature of the thermal medium to be uniformly distributed in the bath 10, the temperature of the thermal medium A controller 60 or the like for controlling the temperature is used as a component. Canister 20 is immersed in a thermal medium housed in Bath 10. The conventional bath structure is a method of placing the canister 20 inside the bath 10 in which the liquid is contained in using a canister having various types and sizes, and thus is used a lot.

However, since the liquid is filled in the bath to maintain the temperature of the canister, there are the following problems. First, there is a problem of deterioration of the constant temperature function and performance due to the liquid level defect due to the leakage or evaporation of the liquid during long time use. Second, since the amount of liquid used inside the bath is large, the size of the device becomes large, which causes difficulties in facility management. In particular, in the semiconductor manufacturing process, dozens to hundreds of canisters are required, and this problem is further increased because each temperature control device is used for each canister.

The present invention has been made in view of the above problems, and an object thereof is to provide a canister temperature regulating device for maintaining a constant temperature of a canister without using a bath structure.

Canister temperature control device for maintaining the canister according to the present invention for achieving the above object at a constant temperature, the jacket body wraps to contact the outer peripheral surface of the canister, the heat transfer medium is circulated therein; A thermoelectric module unit cooling or heating the heat transfer medium by an endothermic or exothermic reaction; A circulation pump circulating the heat transfer medium into the jacket body; And a controller configured to control the thermoelectric module unit to adjust the temperature of the heat transfer medium to maintain a constant temperature of the canister.

The jacket body has a structure in which one side of the jacket is in contact with the outer circumferential surface of the canister, and an insulation pad and a cover are stacked in order, and the inside of the summer pad has an inlet and an outlet, and the heat transfer medium circulates. A circulating hose is provided that provides a path.

On the other hand, the jacket body is formed at the end with a fixing means for wrapping and fixing the canister.

The canister temperature control device according to the present invention has the following effects due to the jacket structure directly surrounding the canister without using a bath structure to maintain the canister's constant temperature. First, it can solve the problem of constant temperature and performance degradation due to liquid leakage and evaporation in the existing bath structure, which increases work productivity and solves the problem of facility management, thereby increasing the efficiency of the manufacturing process. In addition, there is an effect of solving the safety problem of the electrical device due to the leakage of liquid. In addition, the volume of the entire device can be reduced, and the power consumption is small, which leads to energy savings.

1 is a schematic structural diagram of a conventional canister temperature regulating device,
2 is a structural diagram of a canister temperature control device according to an embodiment of the present invention,
3 is an enlarged cross-sectional view of the jacket body of FIG.
4 is a view showing an application example of the canister temperature control device according to an embodiment of the present invention,
5 is a structural diagram of a canister temperature control device according to another embodiment of the present invention.

The above objects, features and other advantages of the present invention will become more apparent by describing the preferred embodiments of the present invention in detail with reference to the accompanying drawings. Hereinafter, a canister temperature regulating device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

The canister temperature control device is to maintain the canister (bubble) at a constant temperature, and the detailed configuration thereof may refer to FIG. 2. The jacket body 110, the thermoelectric module unit 120, and are wrapped to closely contact the canister 200. The circulation pump 130 and the control unit 140 is included. The jacket body 110 surrounds the outer circumferential surface of the canister 200 to be in close contact with each other, and the heat transfer medium circulates therein to maintain the canister 200 at a constant temperature. The thermoelectric module unit 120 performs an endothermic or exothermic reaction to cool or heat the heat transfer medium. The circulation pump 130 circulates to supply and recover the heat transfer medium cooled or heated by the thermoelectric module unit 120 into the jacket body 110. In addition, the controller 140 controls the thermoelectric module unit 120 to adjust the temperature of the heat transfer medium, thereby serving to maintain the temperature of the canister 200 constantly.

Referring to FIG. 3, the jacket body 110 has a structure in which the thermal pad 112, the insulating pad 116, and the cover 118 are sequentially stacked.

The thermal pad 112 thermally contacts one side of the thermal pad 112 in close contact with the outer circumferential surface of the canister 200. In addition, a circulation hose 114 having an inlet and an outlet is installed inside the thermal pad 112, and the heat transfer medium (liquid) is circulated through the circulation hose 114. As the heat transfer medium circulates the thermal pad 112 through the circulation hose 114, the canister 200 maintains a constant temperature. Since the heat transfer medium must be evenly circulated in order to maintain a constant temperature of the entire canister 200, the circulation hose 114 should be evenly distributed on the thermal pad 112. Therefore, the circulation hose 114 is installed in the left and right width direction of the thermal pad 112, as shown in Figure 2 and is disposed in plurality in a predetermined interval in the vertical direction. Alternatively, one circulation hose may be arranged in a spirally wound form such as a spiral, and the present invention is not limited thereto. However, when one circulation hose is disposed, it may be difficult to maintain the entire canister at a constant temperature because the path of arrival of the heat transfer medium becomes long, so it is preferable to arrange a plurality of circulation hoses as shown. The circulation hose 114 is preferably made of a material that can maintain elasticity and airtightness due to its characteristics. In addition, since the thermal pad 112 also has a wound structure, it is preferable to be made of an elastic material, and preferably applied to a material having excellent thermal conductivity.

The insulating pad 116 is positioned on the other side of the thermal pad 112 to prevent heat leakage, and the cover 118 is installed on one side of the insulating pad 116 to provide the internal thermal pad 112 and insulation. The pad 116 will be protected.

On the other hand, the end of the jacket body 110 is formed with a fixing means 119 that can be fixed to wrap the canister (200). The jacket body 110 is fixed in close contact with the canister 200 by the fixing means 119. Fastening means 119 may be applied, for example, Velcro tape, adhesive buttons, zippers, other binders and the like.

Most canister (bubble) structures are based on the shape of a cylinder, but the cross section may have a polygonal shape such as a square or a hexagon. Therefore, according to the embodiment of the present invention, the canister of various shapes can be completely in close contact by the jacket body and the fixing means, and thus there is an advantage that the temperature of the canister can be efficiently maintained.

The thermoelectric module unit 120 is installed under the storage container 150 in which the heat transfer medium is stored, thereby cooling or heating the heat transfer medium stored in the storage container 150. The thermoelectric module unit 120 is disposed on the upper surface of the thermoelectric module 122 and the thermoelectric module 122 to be able to perform a function as a cooling system or a heat pump and is arranged to contact the lower surface of the reservoir 150, the thermoelectric module Heat exchanger 124 for heat-exchanging heat generated by heat absorption or heat from the reservoir 150, and a heat sink 126 disposed on the lower surface of the thermoelectric module 122 to dissipate heat generated from the thermoelectric module 122. . The thermoelectric module 122 has a plurality of thermoelectric elements are arranged to absorb or dissipate heat through both sides by switching the polarity of the power supplied from the power supply not shown by the control of the controller 140. A thermoelectric module is an electronic component that can directly convert thermal energy into electrical energy or electrical energy into thermal energy. The thermoelectric module reverses the thermoelectric direction according to the control of the polarity of the supplied power, thereby allowing the functional conversion of the cooling or heating furnace to absorb heat. Can be moved from the surface to the heat dissipation surface. In addition, precise temperature control of 0.05 ℃ is possible by controlling the supplied voltage or current, and there is no vibration part because there is no driving part to operate the device, and it is used as the thermoelectric characteristics of the thermoelectric semiconductor. It is characterized by no pollution or pollution. Detailed structure and features of the thermoelectric module are well known in the art to which the present invention pertains, and thus detailed descriptions thereof will be omitted. On the other hand, the heat exchanger 124 may be omitted, and in this case, the upper surface of the thermoelectric module 122 may be installed to contact the bottom surface of the reservoir 150 to directly exchange heat with the reservoir. In addition, the heat dissipation unit 126 may be water-cooled to radiate by water or cooling water, or air-cooled to radiate by a fan, and the like. However, the present invention is not limited thereto, but water-cooled is applied to reduce the volume of the entire apparatus. It is preferable.

The controller 140 controls the thermoelectric module 122 of the thermoelectric module unit 120 to adjust the temperature of the heat transfer medium to a desired temperature. Although not shown, a temperature sensor may be installed on the surface of the canister 200 or the inner surface of the jacket body 110 or the pipe through which the heat transfer medium flows in and out. Therefore, the controller 140 controls the output of the thermoelectric module by using the temperature information received from the temperature sensor and eventually maintains the temperature of the canister 200 constant.

Figure 4 shows an application example of the canister temperature control device according to an embodiment of the present invention. As shown, each jacket body 110 is wrapped in close contact with each of the plurality of canisters 200, and the thermoelectric module unit 120, the circulation pump 130, and the controller 140 have one installed temperature. The heat transfer medium to the jacket body (110). As described above, when the canisters require tens or hundreds of canisters in the semiconductor manufacturing process, but the set temperature of the canisters is the same, the present invention can be applied as shown in FIG. 4, thereby increasing productivity and convenience of management.

Figure 5 shows a canister temperature control device according to another embodiment of the present invention.

According to the present exemplary embodiment, a jacket body 110 surrounding the canister 200 to be in close contact with the canister 200 includes a thermoelectric module unit 120 ′, a circulation pump 130 ′, and a controller 140 ′. As shown in FIG. 2, in the previous embodiment, the thermoelectric module unit 120 is configured to be integrally or coupled with the storage container 150, but in this embodiment, the thermoelectric module unit 120 ′ is separated from the storage container 150. It is composed. Accordingly, the jacket body 110 has the same configuration and function, and the thermoelectric module unit 120 ', the circulation pump 130', and the controller 140 'also have no significant difference from the previous embodiment in configuration and function. Since there are differences in arrangement, only the differences will be described.

The heat exchange medium circulating through the jacket body 110 is recovered to the reservoir 150 '. On the other hand, the heat exchange medium stored in the reservoir 150 is introduced into the jacket body 110 while being cooled or heated through the heat exchange unit 124 'of the thermoelectric module unit 120' via the circulation pump 130 '. Will be. The controller 140 ′ uses the temperature information received from the temperature sensor installed on the surface of the canister 200, the inner surface of the jacket body 110, or the pipe through which the heat transfer medium flows in and out. By controlling the output of the thermoelectric module 122 'of') it is controlled so that the heat exchange medium can be supplied at a desired temperature.

Although the preferred embodiments of the present invention have been described, the present invention is not limited to the specific embodiments described above. That is, those skilled in the art to which the present invention pertains can make many changes and modifications to the present invention without departing from the spirit and scope of the appended claims, and all such appropriate changes and modifications are possible. Equivalents should be considered to be within the scope of the present invention.

110. Jacket body 112. Summer pad
114. Circulation hose 116. Insulation pad
118. Cover 119. Fastening means
120. Thermoelectric module unit 130. Circulation pump
140. Control unit 200. Canister

Claims (3)

In the temperature control device for maintaining the canister at a constant temperature,
A jacket body wrapped in close contact with an outer circumferential surface of the canister and having a heat transfer medium circulated therein;
A thermoelectric module unit cooling or heating the heat transfer medium by an endothermic or exothermic reaction;
A circulation pump circulating the heat transfer medium into the jacket body; And,
And a control unit for controlling the thermoelectric module unit to adjust the temperature of the heat transfer medium to maintain a constant temperature of the canister.
The method of claim 1, wherein the jacket body,
One side is a thermal pad in contact with the outer circumferential surface of the canister, the insulating pad and the cover is laminated in order,
The canister temperature control apparatus having an inlet port and an outlet port inside the summer pad, and a circulation hose providing a path through which the heat transfer medium circulates.
The method of claim 1,
Canister temperature control device is characterized in that the jacket body is formed at the end of the fixing means for wrapping and fixing the canister.

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