KR20190091766A - Cooler - Google Patents

Abstract

A cooler includes: a cooling device cooling first fluid; and a heat exchanger cooling the first fluid and second fluid by heat exchange for supplying the same to a load. The heat exchanger can include: at least one first heat exchange unit cooling the first fluid at least once; and at least one second heat exchange unit connected to a first heat exchange block and cooling the second fluid at least once. The first and second heat exchange units respectively include: a first heat exchange part; a second heat exchange part provided on a first side of the first heat exchange part; a third heat exchange part provided on a second side of the first heat exchange part; a first cold heat part provided between the first heat exchange part and the second heat exchange part; and a second cold heat part provided between the first heat exchange part and the third heat exchange part. The first fluid can be supplied to the second and third heat exchange parts of the second heat exchange unit after the first fluid is cooled in the first heat exchange part of the first heat exchange unit.

Description

Cooler {Cooler}

An embodiment relates to a chiller.

In the process of manufacturing a semiconductor device, the semiconductor processing equipment must maintain a constant temperature inside the chamber at all times, and the equipment that serves to maintain the temperature is a cooler.

The cooler has a circulation cycle in which the coolant is provided to the semiconductor processing equipment and the coolant used in the semiconductor processing equipment is returned to the cooler.

Conventional coolers are equipped with a variety of members such as compressors, condensers and evaporators, such that the cooled fluid through heat exchange by these members is provided to a semiconductor process facility.

Therefore, the conventional cooler must be provided with various members, so that it is heavy and bulky.

In addition, the conventional cooler has a problem that the cooling loss is generated in the heat exchange process by the various members to reduce the heat exchange efficiency.

In addition, the conventional cooler has a limit to cool even more cryogenic.

The embodiment aims to solve the above and other problems.

Another object of the embodiment is to provide a cooler having a new structure.

Another object of the embodiment is to provide a cooler capable of rapid cooling.

Another object of the embodiment is to provide a cooler that can improve cooling performance.

According to an aspect of an embodiment to achieve the above or another object, the cooler, the cooler for cooling the first fluid; And a heat exchanger for cooling the second fluid by the first fluid and the heat exchange to supply the load. The heat exchanger includes: at least one first heat exchange unit cooling the first fluid at least once; And at least one second heat exchange unit connected to the first heat exchange block and cooling the second fluid at least once. Each of the first and second heat exchange units may include a first heat exchanger; A second heat exchanger disposed on a first side of the first heat exchanger; A third heat exchanger disposed on a second side of the first heat exchanger; A first cold heat unit disposed between the first heat exchange unit and the second heat exchange unit; And a second cooling unit disposed between the first heat exchange unit and the third heat exchange unit. After the first fluid is cooled in the first heat exchange unit of the first heat exchange unit, the first fluid may be supplied to the second and third heat exchange units of the second heat exchange unit.

According to another aspect of an embodiment, the cooler comprises: a chiller for cooling the first fluid; And a heat exchanger for cooling the second fluid by the first fluid and the heat exchange to supply the load. The heat exchanger includes: at least one first heat exchange unit cooling the first fluid at least once; A first selection valve disposed between the at least one first heat exchange unit; At least one second heat exchange unit connected to the first heat exchange block and cooling the second fluid at least once; And a second selection valve disposed between the at least one second heat exchange unit. Each of the first and second heat exchange units may include a first heat exchanger; A second heat exchanger disposed on a first side of the first heat exchanger; A third heat exchanger disposed on a second side of the first heat exchanger; A first cold heat unit disposed between the first heat exchange unit and the second heat exchange unit; And a second cooling unit disposed between the first heat exchange unit and the third heat exchange unit. The first fluid cooled in the first heat exchange unit may be supplied to the load or the next first heat exchange unit by valve control of the first selection valve. The second fluid cooled in the previous second heat exchange unit may be supplied to the load or the next second heat exchange unit by valve control of the second selection valve.

According to another aspect of an embodiment, the cooler comprises: a chiller for cooling the first fluid; And a heat exchanger configured to cool the second fluid by the first fluid and the heat exchanger to supply the load. The heat exchanger includes: at least one first heat exchange unit cooling the first fluid at least once; And at least one second heat exchange unit connected to the first heat exchange block and cooling the second fluid at least once. Each of the first and second heat exchange units may include a plurality of heat exchange blocks connected in parallel with each other. The heat exchange block, the first heat exchange unit; A second heat exchanger disposed on a first side of the first heat exchanger; A third heat exchanger disposed on a second side of the first heat exchanger; A first cold heat unit disposed between the first heat exchange unit and the second heat exchange unit; And a second cooling unit disposed between the first heat exchange unit and the third heat exchange unit. After the first fluid is cooled in the first heat exchange unit of each of the heat exchange blocks of the first heat exchange unit, the first fluid may be supplied to the second and third heat exchange units of each of the heat exchange blocks of the second heat exchange unit.

Referring to the effect of the cooler according to the embodiment as follows.

According to at least one of the embodiments, the first heat exchange unit and the second heat exchange unit is connected, by cooling the second fluid in the second heat exchange unit by the first fluid and heat exchanged in the first heat exchange unit, 2 The fluid is cooled more quickly, so the load can be cooled precisely and quickly to the desired cooling temperature.

According to at least one of the embodiments, at least one heat exchange unit is connected to each other to cool the first fluid or the second fluid at least once, thereby cooling the first or second fluid more quickly and precisely. There is an advantage.

According to at least one of the embodiments, a selection valve is provided between the plurality of heat exchange units, the first fluid or the second fluid output from the previous heat exchange unit by the valve control of the selection valve is supplied to the load or the next heat exchange unit, The advantage is the instant response to the desired temperature of the load.

According to at least one of the embodiments, the heat exchange unit includes a plurality of heat exchange blocks connected in parallel to each other in the input pipe or the output pipe in parallel with each other, the first fluid or the second fluid cooled in each heat exchange block is combined in one pipe output Therefore, since the first fluid or the second fluid is cooled to a lower temperature, there is an advantage that accurate and rapid temperature control of the load using such a fluid is possible.

Further scope of the applicability of the embodiments will become apparent from the detailed description below. However, various changes and modifications within the spirit and scope of the embodiments can be clearly understood by those skilled in the art, and therefore, specific embodiments, such as the detailed description and the preferred embodiments, are to be understood as given by way of example only.

1 shows a cooler according to a first embodiment.
2 shows a heat exchange unit according to an embodiment.
3 shows a cooler according to a second embodiment.
4 shows a cooler according to a third embodiment.
5 shows a cooler according to a fourth embodiment.
6 shows a cooler according to a fifth embodiment.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments disclosed herein will be described in detail with reference to the accompanying drawings, and the same or similar components will be given the same reference numerals regardless of the reference numerals, and redundant description thereof will be omitted. The suffixes "module" and "unit" for components used in the following description are given or used in consideration of ease of specification, and do not have distinct meanings or roles from each other. In addition, in describing the embodiments disclosed herein, when it is determined that the detailed description of the related known technology may obscure the gist of the embodiments disclosed herein, the detailed description thereof will be omitted. In addition, the accompanying drawings are intended to facilitate understanding of the embodiments disclosed herein, but are not limited to the technical spirit disclosed herein by the accompanying drawings, all changes included in the spirit and scope of the embodiments, It should be understood to include equivalents and substitutes.

The cooler described below may be a chiller, an air conditioner, a heat pump, a freezer, a heat energy use engine, but is not limited thereto.

1 shows a cooler according to the first embodiment, and FIG. 2 shows a heat exchange unit according to the embodiment.

Referring to FIG. 1, the cooler according to the first embodiment may include a heat exchanger 20. The heat exchanger 20 may cool the second fluid using an endothermic and exothermic operation to supply the load 30 to the load 30, and recover the second fluid used in the load 30. That is, the second fluid may be cooled by the endotherm generated by the heat exchanger 20. In addition, the second fluid may be cooled in the heat exchanger 20 by the first fluid provided from the cooling device 10. A third fluid may be used to cool the first fluid in the chiller 10.

The load 30 is equipment for maintaining an object at a constant temperature, and may be, for example, a facility for a semiconductor process, but is not limited thereto. In this case, the object may be a semiconductor substrate.

The cooler according to the first embodiment may include a cooling device 10. The cooling device 10 may cool the first fluid circulating in the heat exchange device 20. The first fluid may be supplied to the heat exchanger 20 after being cooled by the cooling device 10. The heat generated in the heat exchanger 20 may be transferred to the first fluid and fed back to the cooling device 10. The fed back first fluid may be cooled again by the cooling device 10. In the heat exchanger 20, endothermic and heat generation may be generated by the cooling units 107a, 107b, 109a, and 109b. These cold parts 107a, 107b, 109a, 109b will be described later in detail.

The first to third fluids may include a coolant. For example, refrigerants include ammonia, freon (ClFC, chloro-fluoro-carbon), hydrochlorochlorofluorocarbons (HCFC), and hydrofluorocarbons (HFC, hydro- fluoro-carbon), hydrofluorinated olefins (HFO), methyl chloride, etc., and liquid helium and liquid hydrogen are used to bring them to cryogenic temperatures.

Alternatively, the first and second fluids may include a refrigerant, and the third fluid may include cooling water. PCW (process cooling water) may be used as the cooling water, but is not limited thereto.

The heat exchanger 20 may include a plurality of heat exchange units 21 and 22. For example, the heat exchanger 20 may include a first heat exchange unit 21 and a second heat exchange unit 22, but is not limited thereto.

The first pipe 161 is connected between one side of the cooling device 10 and one side of the first heat exchange unit 21, and a second between the other side of the cooling device 10 and the other side of the first heat exchange unit 21. Pipe 162 may be connected.

The detailed structure of each of the first and second heat exchange units 21 and 22 may be the same. Although the first heat exchange unit 21 is shown in FIG. 2, the structure of the second heat exchange unit 22 may be the same as the first heat exchange unit 21, and thus, the first heat exchange unit 21 shown in FIG. It can be easily understood from the structure of).

As illustrated in FIG. 2, the first heat exchange unit 21 may include first to third heat exchangers 101a, 103a and 105a and first and second cold heat units 107a and 109a. Each of the first and second cooling units 107a and 109a may generate heat and heat generation by the applied power.

The first cold heat unit 107a may be disposed between the first heat exchange unit 101a and the second heat exchange unit 103a. One side of the first cold heat unit 107a may contact one side of the first heat exchange unit 101a, and the other side of the first cold heat unit 107a may contact one side of the second heat exchange unit 103a.

The first cold heat unit 107a may be a device that is electrically driven to endotherm or generate heat at one side, and generate or heat at the other side. For example, when a positive voltage is applied to the first cooling unit 107a, one side of the first cooling unit 107a may be absorbed and the other side of the first cooling unit 107a may generate heat. For example, when a negative voltage is applied, one side of the first cooling unit 107a may generate heat and the other side of the first cooling unit 107a may endothermic.

In the first embodiment, one side of the first cooling unit 107a in contact with one side of the first heat exchange unit 101a is endothermic, and the first cooling unit 107a in contact with one side of the second heat exchange unit 103a. The other side may generate heat.

The first cold heat unit 107a may include a plurality of thermoelectric modules 110a, 110b, and 110c. The thermoelectric modules 110a, 110b, and 110c may include a first substrate 41, an n-type semiconductor device 43, a p-type semiconductor device 45, and a second substrate 47. The first substrate 41 and the second substrate 47 may be heat transfer layers having excellent thermal conductivity. The first substrate 41 and the second substrate 47 may be insulating substrates. The first substrate 41 and the second substrate 47 may be, for example, aluminum oxide (Al 2 O 3), but are not limited thereto.

The first substrate 41 may include a plurality of electrodes. The second substrate 47 may include a plurality of electrodes. The electrode may be formed of a metal material having excellent electrical conductivity. The electrode may be made of copper (Cu), but is not limited thereto.

The n-type semiconductor device 43 may be formed of a semiconductor material including an n-type dopant, and the p-type semiconductor device 45 may be formed of a semiconductor material including a p-type dopant. The n-type semiconductor device 43 may be electrically connected to an electrode of the first substrate 41 and an electrode of the second substrate 47. The p-type semiconductor device 45 may be electrically connected to an electrode of the first substrate 41 and an electrode of the second substrate 47.

Power may be applied to the electrodes of the first substrate 41 and the electrodes of the second substrate 47. In this case, the first substrate 41 and the second substrate due to the Peltier effect of the n-type semiconductor element 43 and the p-type semiconductor element 45 disposed between the first substrate 41 and the second substrate 47. One of the substrates 47 may endothermic and the other may generate heat.

The second cooling unit 109a may be disposed between the first heat exchanger 101a and the third heat exchanger 105a. One side of the second cooling unit 109a may be in contact with one side of the first heat exchange unit 101a, and the other side of the second cooling unit 109a may be in contact with one side of the third heat exchange unit 105a.

The second cooling unit 109a may be a device that is electrically driven to endotherm or generate heat at one side, and generate or heat at the other side. For example, when a positive voltage is applied to the second cooling unit 109a, one side of the second cooling unit 107a may be absorbed and the other side of the second cooling unit 109a may generate heat. For example, when a negative voltage is applied, one side of the second cooling unit 109a may generate heat and the other side of the second cooling unit 109a may endothermic.

In the first embodiment, one side of the second cooling unit 109a in contact with one side of the first heat exchange unit 101a is absorbed and the second cooling unit 109a in contact with one side of the third heat exchange unit 105a. The other side may generate heat.

The second cold heat unit 109a may include a plurality of thermoelectric modules 111a, 111b, and 111c. The thermoelectric modules 111a, 111b, and 111c may include a first substrate 51, an n-type semiconductor device 53, a p-type semiconductor device 55, and a second substrate 57. The first substrate 51 and the second substrate 57 may be heat transfer layers having excellent thermal conductivity. The first substrate 51 and the second substrate 57 may be insulating substrates. The first substrate 51 and the second substrate 57 may be, for example, aluminum oxide (Al 2 O 3), but are not limited thereto.

The first substrate 51 may include a plurality of electrodes. The second substrate 57 may include a plurality of electrodes. The electrode may be formed of a metal material having excellent electrical conductivity. The electrode may be made of copper (Cu), but is not limited thereto.

The n-type semiconductor device 53 may be formed of a semiconductor material including an n-type dopant, and the p-type semiconductor device 55 may be formed of a semiconductor material including a p-type dopant. The n-type semiconductor device 53 may be electrically connected to an electrode of the first substrate 51 and an electrode of the second substrate 57. The p-type semiconductor device 55 may be electrically connected to an electrode of the first substrate 51 and an electrode of the second substrate 57.

Power may be applied to the electrodes of the first substrate 51 and the electrodes of the second substrate 57. In this case, the first substrate 51 and the second substrate are due to the Peltier effect of the n-type semiconductor element 53 and the p-type semiconductor element 55 disposed between the first substrate 51 and the second substrate 57. One of the substrates 57 may endothermic and the other may generate heat.

According to the first embodiment, since the first heat exchange part 101a is cooled not only by the first cold heat part 107a but also by the second cold heat part 109a, the cooling rate of the first heat exchange part 101a is greatly increased. The cooling performance can be improved.

According to the first embodiment, the heat of the first cold heat unit 107a is released by the second heat exchange unit 103a, and the heat of the second cold heat unit 109a is emitted by the third heat exchange unit 105a. The first and second cooling parts 107a which are generated as the heat of the first and second cooling parts 107a and 109a are released slowly by dissipating the heat of the first and second cooling parts 107a and 109a quickly. , 109a) can be prevented from deteriorating in cooling performance.

The first heat exchange part 101a may include a housing 111 and a heat dissipation part 121 provided at one side of the housing 111. The interior of the housing 111 may be an empty space and may have first and second openings opened to upper and lower sides facing each other, respectively. The first and second openings and the empty space may be in communication. The heat dissipation part 121 may be disposed in an empty space of the housing 111 through the first and second openings. The heat dissipation unit 121 may include a plurality of rods 121c disposed between the first heat dissipation plate 121a, the second heat dissipation plate 121b, and the first and second heat dissipation plates 121a and 121b.

For example, the inlet terminal 131a and the outlet terminal 133a may be disposed on one side of the housing 111. The inlet terminal 131a may be connected to the first pipe 161 and the outlet terminal 133a may be connected to the third pipe 163. Therefore, the first fluid is input to the inlet terminal 131a through the first pipe 161, flows between the plurality of rods 121c of the heat dissipation unit 121 in the housing 111, and then the outlet terminal 133a. It may be drawn out to the third pipe 163 through.

 For example, the first endothermic generated from the first cold heat unit 107a is transferred to the plurality of rods 121c via the first heat dissipation plate 121a of the heat dissipation unit 121, and the second cold heat unit ( The second endotherm generated from 109a may be transmitted to the plurality of rods 121c via the second heat dissipation plate 121b of the heat dissipation unit 121.

The plurality of rods 121c are rapidly cooled by the first and second endotherms, and the first fluid passing between the plurality of rods 121c by the rapidly cooled plurality of rods 121c is cooled by heat exchange. Can be. Therefore, after the first fluid inputted through the first pipe 161 to the inlet terminal 131a is cooled while passing between the plurality of rods 121c of the heat dissipation unit 121, the first fluid is cooled through the outlet terminal 133a. 3 may be discharged to the pipe 163. For example, the first fluid discharged through the third pipe 163 may be supplied to the second heat exchange unit 22.

Each of the second and third heat exchange parts 103a and 105a may have the same structure as that of the first heat exchange part 101a.

For example, the second heat exchange part 103a may include a housing 113 and a heat radiating part 123 provided at one side of the housing 113. The interior of the housing 113 may be an empty space and may be provided with an opening opened downwardly. The opening and the empty space may be in communication. The heat dissipation unit 123 may be disposed in the empty space of the housing 113 through the opening. The heat dissipation unit 123 may include a heat dissipation plate 123a and a plurality of rods 123b extending in an upper direction from an upper surface of the heat dissipation plate 123a.

For example, the inlet terminal 131b and the outlet terminal 133b may be disposed on one side of the housing 113. The inlet terminal 131b may be connected to the first pipe 161 and the outlet terminal 133a may be connected to the second pipe 162. Accordingly, the first fluid is input to the inlet terminal 131a through the first pipe 161, flows between the plurality of rods 123b of the heat dissipation unit 123 in the housing 113, and then the outlet terminal 133b. It may be drawn out to the second pipe 162 through.

The first fluid input to the inlet terminal 131b through the first pipe 161 flows between the plurality of rods 123b of the heat dissipation unit 123 in the housing 113 and then withdrawn through the outlet terminal 133b. Can be.

For example, heat generated from the first cold heat unit 107a may be transmitted to the plurality of rods 123b via the heat radiating plate 123a of the heat radiating unit 123. The exothermic heat is exchanged by the first fluid passing between the plurality of rods 123b, and the heat-exchanged first fluid may be discharged through the outlet terminal 133b. Therefore, the heat generated from the first cold heat unit 107a is transferred to the first fluid supplied to the first pipe 161 and the inlet terminal 131b, and heat exchanged by the first fluid, and then through the outlet terminal 133b. Can be released.

In addition, the third heat exchange part 105a may include a housing 115 and a heat dissipation part 125 provided at one side of the housing 115. The interior of the housing 115 may be an empty space and have an opening that is open upward. The opening and the empty space may be in communication. The heat dissipation unit 125 may be disposed in an empty space of the housing 115 through the opening. The heat dissipation unit 125 may include a heat dissipation plate 125a and a plurality of rods 125b extending in an upper direction from an upper surface of the heat dissipation plate 125a.

For example, the inlet terminal 131c and the outlet terminal 133c may be disposed on one side of the housing 115. The inlet terminal 131c may be connected to the first pipe 161 and the outlet terminal 133c may be connected to the second pipe 162. Accordingly, the first fluid is input to the inlet terminal 131c through the first pipe 161, flows between the plurality of rods 125b of the heat dissipation unit 125 in the housing 115, and then the outlet terminal 133c. Can be withdrawn through.

For example, heat generated from the second cold heat unit 109a may be transmitted to the plurality of rods 125b via the heat radiating plate 125a of the heat radiating unit 125. The exothermic heat is exchanged by the first fluid passing between the plurality of rods 125b and the first heat exchanged heat may be discharged through the outlet terminal 133c. Therefore, the heat generated from the second cold heat unit 109a may be delivered to the first fluid supplied to the inlet terminal 131c and heat exchanged by the first fluid, and then released through the outlet terminal 133c.

The first pipe 161 is commonly connected to the first to third heat exchange parts 101a, 103a and 105a, and the second pipe 162 is commonly connected to the second and third heat exchange parts 103a and 105a. The third pipe 163 may be connected to the first heat exchanger 101a. Accordingly, the first fluid input to the first heat exchange part 101a through the first pipe 161 is cooled and then output through the third pipe 163, and the second and second fluids through the first pipe 161. Heat generated by each of the first and second cooling units 107a and 109a may be transmitted to the first fluid input to each of the third heat exchangers 103a and 105a to be discharged through the second pipe 162. The first fluid output to the second pipe 162 may be fed back to the cooling apparatus 10 to be cooled, and the first fluid output to the third pipe 163 may be supplied to the second heat exchange unit 22.

On the other hand, the insulating layer 135a may be disposed on the outer surface of the housing 111 of the first heat exchanger 101a. An insulating layer 135b may be disposed on an outer surface of the housing 113 of the second heat exchanger 103a. An insulating layer 135c may be disposed on an outer surface of the housing 115 of the third heat exchange part 105a. As such, the insulating layers 24a, 24b, and 24c are disposed on the outer surfaces of the housings 20a, 20b, and 20c of each of the first to third heat exchangers 101a, 103a, and 105a, thereby providing the housings 20a, 20b, and 20c. ) Is formed of a metal material, electrical short with the power line electrically connected to the thermoelectric modules (110a, 110b, 110c, 111a, 111b, 111c) can be prevented.

The first to third heat exchange parts 101a, 103a, and 105a may be fastened using bolts. That is, the screw (not shown) penetrates the edge of the housing 10a of the first heat exchange part 101a and the edge of the housing 10b of the second heat exchange part 103a, so that the housing of the third heat exchange part 105a ( It may be fastened to the edge of 10c).

The first and second cooling parts 107a and 109a and the first to third heat exchange parts 101a, 103a and 105a may be fixed with a thermally conductive adhesive such as thermal grease, but are not limited thereto. Do not.

In addition, referring to FIG. 1, the second heat exchange unit 22, like the first heat exchange unit 21 described above, includes the first to third heat exchangers 101b, 103b, and 105b and the first and second cooling units. 107b, 109b).

The first cold heat unit 107b is disposed between the first heat exchange unit 101b and the second heat exchange unit 103b, and the second cold heat unit 109b is the first heat exchange unit 101b and the third heat exchange unit 105b. ) May be disposed between.

The third pipe 163 may be commonly connected to the second and third heat exchange parts 103b and 105b, and the fourth pipe 164 may be connected to the first heat exchange part 101b. Specifically, the third pipe 163 is connected to each of the inlet terminal of the second heat exchange part 103b and the inlet terminal of the third heat exchange part 105b, and the fourth pipe 164 is the first heat exchange part 101b. It can be connected to the inlet terminal of.

The fourth pipe 164 may be connected between the storage container 27 and the inlet terminal of the first heat exchange part 101b of the second heat exchange part 103b. The storage container 27 may be a place where the second fluid is stored.

The second fluid may be supplied from the storage container 27 to the inlet terminal of the first heat exchange part 101b of the second heat exchange unit 22 through the fourth pipe 164. Inlet terminal of the second heat exchange unit 103b of the second heat exchange unit 22 through the third pipe 163 from the outlet terminal of the first heat exchange unit 101b of the first heat exchange unit 21 and It may be supplied to the inlet terminal of the third heat exchange part 105b.

The fifth pipe 165 may be commonly connected to the second and third heat exchange parts 103b and 105b, and the sixth pipe 166 may be connected to the first heat exchange part 101b. Specifically, the fifth pipe 165 is connected to the outlet terminal of the second heat exchange part 103b and the outlet terminal of the third heat exchange part 105b, and the sixth pipe 166 is connected to the outlet terminal of the first heat exchange part 101b. It can be connected to the outlet terminal. The sixth pipe 166 may be connected between the outlet terminal of the first heat exchange part 101b of the second heat exchange unit 22 and the load 30. Meanwhile, a seventh pipe 167 may be connected between the storage container 27 and the load 30.

Endothermic generated from the first cold heat unit 107b is transferred to the first heat exchange unit 101b of the second heat exchange unit 22, and heat generated from the first cold heat unit 107b is transferred to the second heat exchange unit 22. It may be delivered to the second heat exchanger (103b).

Endothermic generated from the second cold heat unit 109b is transferred to the first heat exchange unit 101b of the second heat exchange unit 22, and heat generated from the second cold heat unit 109b is transmitted to the second heat exchange unit 22. It may be delivered to the third heat exchanger 105b. Accordingly, the second fluid flowing to the first heat exchange unit 101b of the second heat exchange unit 22 is rapidly cooled by the endotherm transmitted from each of the first and second cold heat units 107b and 109b, and the first cold heat. The heat generated from the unit 107b is transferred to the first fluid flowing through the second heat exchange unit 103b of the second heat exchange unit 22, and the heat generated from the second cold heat unit 109b is transferred to the second heat exchange unit ( 22 may be delivered to the first fluid flowing to the third heat exchanger 105b.

The rapidly cooled second fluid is transferred to the load 30 through the sixth pipe 166 to cool the load 30 to be maintained at a constant temperature. The first fluid flowing into the second and third heat exchange parts 103b and 105b may be fed back to the cooling device 10 through the fifth pipe 165 and cooled.

Therefore, the first heat exchanger 101b is cooled by the endotherm of each of the first and second cooling units 107b and 109b through heat exchange, and the second and second heat exchangers 13b and 105b are formed through heat exchange. Each of the first and second cooling parts 107b and 109b may emit heat.

Referring to FIG. 1, in the embodiment, the heat exchanger 20 is connected to the first heat exchange unit 21 and the second heat exchange unit 22, so that the first heat exchange unit 21 cools the first fluid first. The second heat exchange unit 22 may supply the load 30 by second cooling the second fluid using the first cooled first fluid. In the first heat exchange unit 21, the first fluid may be first cooled by the first and second cooling units 107a and 109a. The second fluid is second-cooled by using the first cooled first fluid and the first and second cooling parts 107b and 109b input from the first heat exchange unit 21 in the second heat exchange unit 22. As the second fluid cools more rapidly, the load 30 can be precisely and quickly cooled to the desired cooling temperature.

3 shows a cooler according to a second embodiment.

The second embodiment is similar to the first embodiment except that one more cooling step is added. That is, in the second embodiment, the first fluid may be first cooled in the first heat exchange unit 21 and secondly cooled in the second heat exchange unit 22. The description omitted in the second embodiment can be easily understood from the description of the first embodiment.

Referring to FIG. 3, the cooler according to the second embodiment may include a heat exchanger 20.

The heat exchanger 20 may include first to third heat exchange units 21, 22, and 23. For example, the first fluid is first cooled in the first heat exchange unit 21, the first fluid cooled first in the second heat exchange unit 22 is second cooled, and the third heat is exchanged in the third heat exchange unit 23. The second fluid may be supplied to the load 30 after the second fluid is cooled by the endotherm generated in the first and second cooling parts 107c and 109c together with the cooled first fluid. Cooling is more rapid by the endotherm generated in the first and second cooling sections 107c and 109c as well as the first fluid having secondary cooling and secondary cooling), thereby allowing more precise and rapid freezing.

The first heat exchange unit 21 includes first and second cold heat units 107a disposed between the first to third heat exchange units 101a, 103a and 105a and the first to third heat exchange units 101a, 103a and 105a. , 109a).

One side of the first cold heat unit 107a may be in contact with one side of the first heat exchange unit 101a, and the other side of the first cold heat unit 107a may be in contact with one side of the second heat exchange unit 103a. One side of the second cooling unit 109a may be in contact with the other side of the first heat exchange unit 101a, and the other side of the second cooling unit 109a may be in contact with one side of the third heat exchange unit 105a.

The first and second pipes 171 and 172 may be connected between the cooling device 10 and the first heat exchange unit 21. The first fluid of the cooling device 10 is supplied to the first heat exchange unit 21 through the first pipe 171, and the first fluid is supplied to each of the first and second cooling units from the first heat exchange unit 21. After receiving the heat generation may be fed back to the cooling device 10 through the second pipe (172).

Therefore, the heat generated in the first and second cooling units 107a and 109a of the first heat exchange unit 21 may be discharged by the first fluid fed back to the cooling apparatus 10. For example, the first pipe 171 may be commonly connected to the inlet terminals of the first to third heat exchangers 101a, 103a and 105a of the first heat exchange unit 21. The second pipe 172 may be commonly connected to the outlet terminals of each of the second and third heat exchange parts 103a and 105a of the first heat exchange unit 21.

The third pipe 173 may be connected between the first heat exchange unit 21 and the second heat exchange unit 22. The third pipe 173 may be connected to the outlet terminal of the first heat exchange part 101a of the first heat exchange unit 21. The third pipe 173 may be commonly connected to the inlet terminals of the first to third heat exchangers 101b, 103b, and 105b of the second heat exchange unit 22. First to third heat exchangers 101b of the second heat exchange unit 22 are firstly cooled by the first heat exchange unit 101a of the first heat exchange unit 21 through the third pipe 173. , 103b, 105b).

The second heat exchange unit 22 may include first to third heat exchangers 101b, 103b and 105b and first and second cold heat units 107b and 109b disposed between the first to third heat exchangers. have.

One side of the first cold heat unit 107b may be in contact with one side of the first heat exchange unit 101b, and the other side of the first cold heat unit 107b may be in contact with one side of the second heat exchange unit 103b. One side of the second cooling unit 109b may be in contact with the other side of the first heat exchange unit 101b, and the other side of the second cooling unit 109b may be in contact with one side of the third heat exchange unit 105b.

The fourth pipe 174 may be connected between the second heat exchange unit 22 and the cooling device 10. For example, the fourth pipe 174 may be commonly connected to the outlet terminals of each of the second and third heat exchange parts 103b and 105b of the second heat exchange unit 22. The first fluid radiated from the second and third heat exchange parts 103b and 105b may be fed back to the cooling apparatus 10 through the fourth pipe 174.

The fifth pipe 175 may be connected between the second heat exchange unit 22 and the third heat exchange unit 23. For example, the fifth pipe 175 may be commonly connected to the inlet terminals of the second and third heat exchangers 103c and 105c of the third heat exchange unit 23. The first and second heat exchangers 103c of the third heat exchange unit 23 are secondly cooled by the first heat exchange unit 101c of the second heat exchange unit 22 through the fifth pipe 175. , 105c).

The sixth pipe 176 may be connected between the storage container 27 and the third heat exchange unit 23. For example, the sixth pipe 176 may be connected to the inlet terminal of the first heat exchange unit 101c of the third heat exchange unit 23. The second fluid of the storage container 27 may be supplied to the first heat exchange part 101c of the third heat exchange unit 23 through the sixth pipe 176.

The third heat exchange unit 23 includes first and second cold heat units 107c disposed between the first to third heat exchangers 101c, 103c and 105c and the first to third heat exchangers 101c, 103c and 105c. , 109c).

One side of the first cold heat unit 107c may be in contact with one side of the first heat exchange unit 101c, and the other side of the first cold heat unit 107c may be in contact with one side of the second heat exchange unit 103c. One side of the second cooling unit 109c may be in contact with the other side of the first heat exchange unit 101c, and the other side of the second cooling unit 109c may be in contact with one side of the third heat exchange unit 105c.

The seventh pipe 177 may be connected between the third heat exchange unit 23 and the cooling device 10. For example, the seventh pipe 177 may be commonly connected to each of the second and third heat exchangers 103c and 105c of the third heat exchange unit 23. The first fluid radiated from the second and third exchangers 103c and 105c may be fed back to the cooling apparatus 10 through the seventh pipe 177.

The eighth pipe 178 may be connected between the third heat exchange unit 23 and the load 30. For example, the eighth pipe 178 may be connected to the outlet terminal of the first heat exchange part 101c of the third heat exchange unit 23. The second fluid cooled by the first heat exchange unit 101c of the third heat exchange unit 23 is supplied to the load 30 through the eighth pipe 178 to more precisely control the load 30 to a desired temperature. Can be frozen quickly. Meanwhile, the ninth pipe 179 may be connected between the storage container 27 and the load 30.

In the first embodiment, the first fluid is cooled once, whereas in the second embodiment, the first fluid may be cooled two or more times. As described above, by cooling the second fluid to be supplied to the load 30 by using the first fluid cooled two or more times, the cooling performance may be significantly improved. By using this same manner, a plurality of heat exchange units may be configured such that the first fluid is cooled two or more times.

4 shows a cooler according to a third embodiment.

The third embodiment is similar to the first embodiment except that one more cooling step is added. That is, in the third embodiment, the second fluid may be first cooled in the second heat exchange unit 22 and secondly cooled in the third heat exchange unit 23.

In the second embodiment, the first fluid used for cooling the second fluid is cooled in each of the first and second heat exchange units 21 and 22, whereas in the third embodiment, the second fluid supplied directly to the load is supplied. It can be cooled in each of the second and third heat exchange units 22 and 23.

The third embodiment is similar to the first or second embodiment except that the fluid cooled from each of the heat exchange units 21, 22, 23 is directly supplied to the load 30. The description omitted in the third embodiment can be easily understood from the description of the first or second embodiment.

Referring to FIG. 4, the cooler according to the third embodiment may include a heat exchanger 20.

The heat exchanger 20 may include first to third heat exchange units 21, 22, and 23.

The first pipe 181 may be connected between the cooling device 10 and the inlet terminal of each of the first to third heat exchangers 101a, 103a and 105a of the first heat exchange unit 21.

The second pipe 182 may be connected between the outlet terminal of each of the second and third heat exchange parts 103a and 105a of the first heat exchange unit 21 and the cooling device 10.

The third pipe 183 may be connected between the outlet terminal of the first heat exchange unit 101a of the first heat exchange unit 21 and the first selection valve 151.

The fourth pipe 184 may be connected between the first selection valve 151 and the inlet terminal of each of the second and third heat exchange parts 103a and 105a of the second heat exchange unit 22. The fifth valve may be connected between the first selection valve 151 and the load 30. The first selection valve 151 may selectively connect the third pipe 183 to the fourth pipe 184 or the fifth pipe 185. For example, when the fourth pipe 184 is connected to the third pipe 183, the fifth pipe 185 is not connected to the third pipe 183. Accordingly, the first fluid cooled in the first heat exchange part 101a of the first heat exchange unit 21 may be output to the fourth pipe 184 or the fifth pipe 185 through the third pipe 183. have.

The sixth pipe 186 may be connected between the storage container 27 and the inlet terminal of the first heat exchange unit 101b of the second heat exchange unit 22.

The seventh pipe 187 may be connected between the outlet terminal of the second heat exchange unit 103b of the second heat exchange unit 22 and the inlet terminal of the second heat exchange unit 103c of the third heat exchange unit 23.

The eighth pipe 188 may be connected between the outlet terminal of the third heat exchange unit 105b of the second heat exchange unit 22 and the inlet terminal of the third third heat exchange unit 105c of the third heat exchange unit 23. have.

The ninth pipe 189 may be connected between the outlet terminal of the first heat exchange part 101b of the second heat exchange unit 22 and the second selection valve 153. The tenth pipe 190 may be connected between the second selection valve 153 and the inlet terminal of the first heat exchange part 101c of the third heat exchange unit 23.

The fifth pipe 185 may be connected between the second selection valve 153 and the load 30. The fifth pipe 185 may be commonly connected to the first selection valve 151 and the second selection valve 153. The second selection valve 153 may selectively connect the ninth pipe 189 to the tenth pipe 190 or the fifth pipe 185. For example, when the tenth pipe 190 is connected to the ninth pipe 189, the fifth pipe 185 is not connected to the ninth pipe 189. Accordingly, the second fluid cooled in the first heat exchange part 101b of the second heat exchange unit 22 may be output to the tenth pipe 190 or the fifth pipe 185 through the ninth pipe 189. have.

The eleventh pipe 191 may be connected between the outlet terminal of each of the second and third heat exchange parts 103c and 105c of the third heat exchange unit 23 and the cooling device 10. The twelfth pipe 192 may be connected between the outlet terminal of the first heat exchange part 101c of the third heat exchange unit 23 and the load 30. Meanwhile, the thirteenth pipe 193 may be connected between the storage container 27 and the load 30.

The operation of the heat exchanger 20 configured as described above will be described.

First, the first fluid cooled by the third fluid in the cooling device 10 is supplied to the first to third heat exchange parts 101a, 103a, and 105a of the first heat exchange unit 21 through the first pipe 181. Can be. The first fluid is cooled by the endotherm of each of the first and second cooling units 107a and 109a in the first heat exchange unit 21 and the second heat exchange unit 22 through the third and fourth pipes 183 and 184. ) May be supplied to the second and third heat exchangers 103b and 105b. The heat generated in each of the first and second cold heat units 107a and 109a of the first heat exchange unit 21 is transferred to the first fluid flowing through the second and third heat exchange units 103a and 105a so that the second pipe ( 182 may be released. The first fluid discharged as described above may be cooled again in the cooling device 10.

In the second heat exchange unit 22, the second fluid supplied from the storage container 27 is cooled by the endotherm of each of the first and second cooling units 107b and 109b to cool the ninth and tenth pipes 189 and 190. It may be supplied to the first heat exchange unit 101c of the third heat exchange unit 23 through. Heat generated in each of the first and second cold heat units 107b and 109b of the second heat exchange unit 22 is transferred to the first fluid flowing through the second and third heat exchange units 103b and 105b, thereby allowing the seventh and the second 8 may be supplied to the second and third heat exchangers 103c and 105c of the third heat exchange unit 23 through the pipes 187 and 188.

The second fluid input from the first heat exchange part 10ab of the second heat exchange unit 22 is cooled by the endotherm of each of the first and second cool heat units 107c and 109c in the third heat exchange unit 23, and thus 12 may be supplied to the load 30 through the pipe (192). The heat generated in each of the first and second cold heat units 107c and 109c of the third heat exchange unit 23 is transferred to the first fluid flowing through the second and third heat exchange units 103c and 105c and the eleventh pipe ( 191 may be supplied to the cooling device 10. The heat generated in each of the first and second cold heat units 107c and 109c of the third heat exchange unit 23 is transferred to the first fluid flowing through the second and third heat exchange units 103c and 105c and the eleventh pipe ( 191).

On the other hand, when the fifth pipe 185 is connected to the third pipe 183 by the valve control of the first selection valve 151, it is cooled in the first heat exchange unit 101a of the first heat exchange unit 21. The first fluid can be supplied directly to the load 30. In addition, when the fifth pipe 185 is connected to the ninth pipe 189 by the valve control of the second selection valve 153, the first heat exchange part 101b of the second heat exchange unit 22 is cooled. The second fluid can be supplied directly to the load 30.

According to the third embodiment, when the first to third heat exchange units 21, 22, 23 are sequentially connected, and the third heat exchange unit 23 is connected to the load 30, the first heat exchange unit 21 is used. The first and second selector valves 151 and 153 are provided at the output end of the second heat exchanger unit 22 and the output end of the second heat exchanger unit 22, respectively. The first fluid cooled in the unit 21 or the second fluid cooled in the second heat exchange unit 22 may be supplied to the load 30 so as to immediately correspond to the desired temperature of the load 30.

According to the third embodiment, the second fluid of the storage container 27 is first cooled in the second heat exchange unit 22 and then secondly cooled in the third heat exchange unit 23, and the second fluid is twice The abnormal cooling allows the second fluid to be cooled more precisely and quickly.

If a plurality of heat exchange units are provided to cool the first fluid several times or a plurality of heat exchange units are provided to cool the second fluid several times, a selector valve is installed between these heat exchange units to cool down each heat exchange unit. The first fluid or the second fluid can be supplied directly to the load 30.

5 shows a cooler according to a fourth embodiment.

The fourth embodiment is similar to the first embodiment except that the second heat exchange unit 22 includes a plurality of heat exchange blocks 22a and 22b connected in parallel to the input pipe or the output pipe. The description omitted in the fourth embodiment can be easily understood from the description of the first embodiment. The structure of the fourth embodiment can be equally applied to the second or third embodiment.

Referring to FIG. 5, the cooler according to the fourth embodiment may include a heat exchanger 20.

The heat exchanger 20 may include first to second heat exchange units 21 and 22. The structure of the first heat exchange unit 21 may be the same as the structure of the first heat exchange unit 21 described in the first to third embodiments.

The second heat exchange unit 22 may include a plurality of heat exchange blocks 22a and 22b. Each heat exchange block 22a, 22b may have the same structure. Each heat exchange block 22a, 22b may have the same structure as the first heat exchange unit 21 described in the first to third embodiments. Therefore, the structure of each heat exchange block 22a, 22b can be easily understood from the structure of the first heat exchange unit 21 described in the first to third embodiments, and thus, the detailed description is omitted.

The first pipe 201 may be the same as the first pipes 161, 171, and 181 described in the first to third embodiments. The second pipe 202 may be the same as the second pipe 162, 172, 182 described in the first to third embodiments.

The third pipe 203 may be connected between the first heat exchange unit 21 and the second heat exchange unit 22. The third pipe 203 may be connected to the outlet terminal of the first heat exchange part 101a of the first heat exchange unit 21. The third pipe 203 is provided at the inlet terminals of the second heat exchangers 103b and 103b 'and the third heat exchangers 105b and 105b' of the heat exchange blocks 22a and 22b of the second heat exchange unit 22, respectively. Can be connected in common.

The fourth pipe 204 may be connected between the storage container 27 and the second heat exchange unit 22. The fourth pipe 204 may be commonly connected to the inlet terminal of each of the first heat exchangers 101b and 101b 'of the heat exchange blocks 22a and 22b of the second heat exchange unit 22. The fifth pipe 205 may be connected between the second heat exchange unit 22 and the cooling device 10. The fifth pipe 205 is connected to the outlet terminals of the second heat exchangers 103b and 103b 'and the third heat exchangers 105b and 105b' of the heat exchange blocks 22a and 22b of the second heat exchange unit 22, respectively. Can be connected in common.

The sixth pipe 206 may be connected between the second heat exchange unit 22 and the load 30. The sixth pipe 206 may be commonly connected to the outlet terminals of each of the first heat exchangers 101b and 101b 'of the heat exchange blocks 22a and 22b of the second heat exchange unit 22. The seventh pipe 207 may be connected between the storage container 27 and the load 30.

The operation of the heat exchanger 20 configured as described above will be described.

First, the first fluid cooled by the third fluid in the cooling apparatus 10 may be supplied to the first to third heat exchangers 101a, 103a, and 105a of the first heat exchange unit 21 through the first pipe. . The first fluid is cooled by the endotherm of each of the first and second cooling units 107a and 109a in the first heat exchange unit 21, and each heat exchange block of the second heat exchange unit 22 through the third pipe 203. The second heat exchangers 103b and 103b 'and the third heat exchangers 105b and 105b' of the 22a and 22b may be supplied. The heat generated in each of the first and second cold heat units 107a and 109a of the first heat exchange unit 21 is transferred to the first fluid flowing through the second and third heat exchange units 103a and 105a so that the second pipe ( Through 202. The first fluid discharged as described above may be cooled again in the cooling device 10.

The second supplied from the storage container 27 by the endotherm of each of the first and second cold heat units 107b, 197b ', 109b, and 109b' of each of the heat exchange blocks 22a and 22b in the second heat exchange unit 22; The fluid may be cooled in each of the first heat exchangers 101b and 101b 'of each of the heat exchange blocks 22a and 22b and supplied to the load 30 through the sixth pipe 206. As such, the second fluid cooled in the first heat exchange part 101b of the first heat exchange block 22a and the second fluid cooled in the first heat exchange part 101b 'of the second heat exchange block 22b are sixth. By combining in the piping 206 and cooling the second fluid to a lower temperature and supplying this more cooled second fluid to the load 30, the load 30 can be cooled precisely and quickly.

Meanwhile, the heat generated by each of the first and second cold heat units 107b, 107b ', 109b, and 109b' of each of the heat exchange blocks 22a and 22b of the second heat exchange unit 22 is generated by the second heat exchange unit 103b. , 103b ') and the first fluid flowing through the third heat exchange parts 105b and 105b' may be discharged through the fifth pipe 205.

6 shows a cooler according to a fifth embodiment.

The fifth embodiment is similar to the fourth embodiment except that not only the second heat exchange unit 22 but also the first heat exchange unit 21 includes a plurality of heat exchange blocks 21a and 21b. The description omitted in the fifth embodiment can be easily understood from the description of the fourth embodiment. The structure of the fifth embodiment can be equally applied to the first to third embodiments.

Referring to FIG. 6, the cooler according to the fifth embodiment may include a heat exchanger 20.

The heat exchanger 20 may include first to second heat exchange units 21 and 22. The first heat exchange unit 21 may include a plurality of heat exchange blocks 21a and 21b, and the second heat exchange unit 22 may include a plurality of heat exchange blocks 22a and 22b. Each heat exchange block 21a, 21b, 22a, 22b may have the same structure. Each heat exchange block 21a, 21b, 22a, 22b may have the same structure as that of the first heat exchange unit 21 described in the first to third embodiments. Therefore, since the structure of each heat exchange block can be easily understood from the structure of the first heat exchange unit 21 described in the first to third embodiments, detailed description is omitted.

The first pipe 211 may be connected between the cooling device 10 and the first heat exchange unit 21. The first pipe 211 is the first heat exchanger 101a, 101a ', the second heat exchanger 103a, 103a' and the third heat exchanger of each heat exchange block 21a, 21b of the first heat exchange unit 21. It may be connected in common to the inlet terminal (105a, 105a '). The second pipe 212 may be connected between the cooling device 10 and the first heat exchange unit 21. The second pipe 212 is common to the outlet terminals of the second heat exchangers 103a and 103a 'and the third heat exchangers 105a and 105a' of the heat exchange blocks 21a and 21b of the first heat exchange unit 21. Can be connected.

The third pipe 213 may be connected between the first heat exchange unit 21 and the second heat exchange unit 22. The third pipe 213 may be commonly connected to the outlet terminals of the first heat exchangers 101a and 101a 'of the heat exchange blocks 21a and 21b of the first heat exchange unit 21. The third pipe 213 may be commonly connected to the inlet terminals of the second heat exchangers 103b and 103b 'and the third heat exchangers 105b and 105b' of each heat exchange block of the second heat exchange unit 22. .

Each of the fourth to seventh pipes 214, 215, 216, and 217 may be the same as the fourth to seventh pipes 204, 205, 206, and 207 in the fourth embodiment, and thus detailed description thereof is omitted.

According to the fifth embodiment, the first fluid cooled in the first heat exchange unit 101a of the first heat exchange block 21a of the first heat exchange unit 21 and the first heat exchange unit of the second heat exchange block 21b ( The first fluid cooled at 101a ′ may be combined in the third pipe 213 to cool the first fluid to a lower temperature. In addition, the second fluid cooled in the first heat exchange unit 101b of the first heat exchange block 22a in the second heat exchange unit 22 and cooled in the first heat exchange unit 101b 'of the second heat exchange block 22b. The second fluid may be combined in the sixth pipe 216 to cool the second fluid to a lower temperature. Accordingly, by further improving the cooling performance of the fluid output from each of the first heat exchange unit 21 and the second heat exchange unit 22, it is possible to precise and rapid temperature control of the load 30 by such a fluid.

 In addition, according to the fifth embodiment, the third pipe 213 in the second and third heat exchange parts 103b, 103b ', 105b, 105b' of each heat exchange block 22a, 22b of the second heat exchange unit 22. Heat generated in the first and second cold heat units 107b, 107b ', 109b, and 109b' of each of the heat exchange blocks 22a and 22b of the second heat exchange unit 22 by the first fluid lowered through It can be released more quickly. Accordingly, the heat dissipation performance of the second and third heat exchangers 103b, 103b ', 105b, and 105b' of each of the heat exchange blocks 22a and 22b of the second heat exchange unit 22 is improved, so that the second heat exchange unit Cooling performance at the first heat exchangers 101b and 101b 'by the first and second cold heat units 107b, 107b', 109b and 109b 'of each of the heat exchange blocks 22a and 22b in (22) is further increased. Can be improved.

The above detailed description should not be construed as limiting in all respects but should be considered as illustrative. The scope of the embodiments should be determined by reasonable interpretation of the appended claims, and all changes within the equivalent scope of the embodiments are included in the scope of the embodiments.

10: Chiller
20: heat exchanger
21, 22, 23: heat exchange unit
21a, 21b, 22a, 22b, 23a, 23b: heat exchange block
27: storage container
30: load
41, 51: first substrate
43, 53: n-type semiconductor element
45, 55: p-type semiconductor element
47, 57: second substrate
101a, 101b, 103a, 103b, 105a, 105b: heat exchange part
107a, 107b, 109a, and 109b: cold part
110a, 110b, 110c, 111a, 111b, 111c: thermoelectric module
111, 113, 115: housing
121, 123, 125: heat dissipation unit
121a, 121b, 123a, 125a: heat dissipation plate
121c, 123b, 125b: load
131a, 131b, and 131c: entrance terminal
133a, 133b, 133c: exit terminal
135a, 135b, 135c: insulation layer, 151, 153: selector valve

Claims (12)

A cooling device for cooling the first fluid; And
And a heat exchanger configured to cool the second fluid by the first fluid and the heat exchange to supply a load.
The heat exchanger,
At least one first heat exchange unit to cool the first fluid at least once; And
And at least one second heat exchange unit connected to the first heat exchange block and cooling the second fluid at least once.
Each of the first and second heat exchange units,
A first heat exchanger;
A second heat exchanger disposed on a first side of the first heat exchanger;
A third heat exchanger disposed on a second side of the first heat exchanger;
A first cold heat unit disposed between the first heat exchange unit and the second heat exchange unit; And
A second cooling unit disposed between the first heat exchange unit and the third heat exchange unit;
And a coolant supplied to the second and third heat exchange parts of the second heat exchange unit after the first fluid is cooled in the first heat exchange part of the first heat exchange unit. The method of claim 1,
Heat generated in each of the first and second cold heat units of the first heat exchange unit is transferred to the first fluid input to the second and third heat exchange units of the first heat exchange unit and supplied to the cooling device. cooler. The method of claim 1,
Further comprising a storage container for storing the second fluid,
After the second fluid is cooled in the first heat exchange part of the second heat exchange unit, the second fluid is supplied to the load,
And heat generated in each of the first and second cold heat units of the second heat exchange unit is transferred to the first fluid input to the second and third heat exchange units of the second heat exchange unit and supplied to the cooling device. A cooling device for cooling the first fluid; And
And a heat exchanger configured to cool the second fluid by the first fluid and the heat exchange to supply a load.
The heat exchanger,
At least one first heat exchange unit to cool the first fluid at least once;
A first selection valve disposed between the at least one first heat exchange unit;
At least one second heat exchange unit connected to the first heat exchange block and cooling the second fluid at least once; And
And a second selection valve disposed between the at least one second heat exchange unit.
Each of the first and second heat exchange units,
A first heat exchanger;
A second heat exchanger disposed on a first side of the first heat exchanger;
A third heat exchanger disposed on a second side of the first heat exchanger;
A first cold heat unit disposed between the first heat exchange unit and the second heat exchange unit; And
A second cooling unit disposed between the first heat exchange unit and the third heat exchange unit;
The first fluid cooled in the first heat exchange unit is supplied to the load or the next first heat exchange unit by the valve control of the first selection valve,
And the second fluid cooled in the previous second heat exchange unit is supplied to the load or the next second heat exchange unit by valve control of the second selection valve. The method of claim 4, wherein
And a coolant supplied to the second and third heat exchange parts of the second heat exchange unit after the first fluid is cooled in the first heat exchange part of the first heat exchange unit. The method of claim 4, wherein
Heat generated in each of the first and second cold heat units of the first heat exchange unit is transferred to the first fluid input to the second and third heat exchange units of the first heat exchange unit and supplied to the cooling device. cooler. The method of claim 4, wherein
Further comprising a storage container for storing the second fluid,
After the second fluid is cooled in the first heat exchange part of the second heat exchange unit, the second fluid is supplied to the load,
The cooler generated in each of the first and second cold heat units of the second heat exchange unit is transferred to the first fluid input to the second and third heat exchange units of the second heat exchange unit and supplied to the cooling device. . A cooling device for cooling the first fluid; And
And a heat exchanger configured to cool the second fluid by the first fluid and the heat exchange to supply a load.
The heat exchanger,
At least one first heat exchange unit to cool the first fluid at least once; And
And at least one second heat exchange unit connected to the first heat exchange block and cooling the second fluid at least once.
Each of the first and second heat exchange units,
Including a plurality of heat exchange blocks connected in parallel to each other,
The heat exchange block,
A first heat exchanger;
A second heat exchanger disposed on a first side of the first heat exchanger;
A third heat exchanger disposed on a second side of the first heat exchanger;
A first cold heat unit disposed between the first heat exchange unit and the second heat exchange unit; And
A second cooling unit disposed between the first heat exchange unit and the third heat exchange unit;
And a coolant supplied to the second and third heat exchangers of each of the heat exchange blocks of the second heat exchange unit after the first fluid is cooled in the first heat exchange unit of each of the heat exchange blocks of the first heat exchange unit. The method of claim 8,
A first selection valve disposed between each of the heat exchange blocks of the first heat exchange unit; And
And a second selection valve disposed between each of the heat exchange blocks of the second heat exchange unit. The method of claim 9,
The first fluid cooled in the previous heat exchange block in the first heat exchange unit is supplied to the load or the next heat exchange block by the valve control of the first selection valve. The method of claim 9,
The second fluid cooled in the previous heat exchange block in the second heat exchange unit is supplied to the load or the next heat exchange block by the valve control of the second selection valve. The method of claim 8,
The first heat generated in each of the first and second cold heat units of each of the heat exchange blocks of the first heat exchange unit is input to the second and third heat exchange units of each of the heat exchange blocks of the first heat exchange unit. A cooler delivered to the fluid and supplied to the cooling device.

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