KR101533856B1 - Apparatus for controlling temperature of canister - Google Patents

Abstract

The canister temperature regulating apparatus according to the present invention is for maintaining the canister at a constant temperature and includes a jacket body 110 wrapped around the canister 200 to contact the outer circumferential surface of the canister 200 and circulating a heat transfer medium therein, A circulation pump 130 for circulating the heat transfer medium cooled or heated by the thermoelectric module part to the inside of the jacket body 110, and a thermoelectric module part for controlling the thermoelectric module part And a controller 140 for controlling the temperature of the heat transfer medium to maintain the temperature of the canister at a constant level. The jacket body 110 has a structure in which a thermo pad 112 whose one side is in contact with the outer circumferential surface of the canister and an insulating pad 116 and a cover 118 are laminated in order, And a circulation hose 114 provided with an outlet and providing a path through which the heat transfer medium circulates.

Description

[0001] Apparatus for controlling temperature of canister [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a canister temperature regulating apparatus, and more particularly to a canister temperature regulating apparatus for maintaining a constant temperature of a canister (bubbler) used in a semiconductor manufacturing process, a display manufacturing process, will be.

In general, various kinds of source gases are used in a semiconductor manufacturing process for manufacturing a semiconductor device, a display process, or an LED manufacturing process for manufacturing an LED device.

A typical semiconductor manufacturing process consists of a step of adapting a multilayer thin film with a semiconductor, a conductor, and an insulator material, and etching a pattern necessary for each thin film to form a circuit element. Here, the process of forming a thin film with various materials is most essential And belong to the general process. There are various methods of laminating the thin films. Among them, chemical vapor deposition (CVD) and physical vapor deposition (PVD) are typical examples. Among them, a CVD method , A wafer is placed in a process chamber, a reaction gas divided into a plurality of canisters (bubbler) is injected through an injector, an interlayer insulating film is formed on the wafer using a chemical reaction material, or a film formed on the wafer A silicon oxide film, a silicon nitride film, or the like is formed to achieve another purpose.

On the other hand, the temperature controller of the canister (bubbler) is used for maintaining the temperature of the canister at a constant level to maintain a stable bubble reaction, which is an essential requirement for realizing a process technology which is very important in the CVD process. In particular, to maintain the temperature of the canister (bubbler), it is necessary to precisely control the various reaction gases used to fabricate various LED substrates in the metal organic chemical vapor deposition (MOCVD) It is a required technology.

Conventional canister thermostat devices usually employ a bath structure in which various types of bubblers are immersed in a temperature-controllable bath. The bath structure keeps the temperature of the metal canister constant by controlling the temperature of the fluid filled in the bath. Depending on the control temperature, the fluid used in the bath will use water for normal temperatures and antifreeze for low temperatures. Referring to FIG. 1, a bath temperature control device includes a bath 10 in which a liquid as a heating medium is contained, a cooling device 30 (a refrigerant compressor or a thermoelectric device) for cooling the temperature of the heating medium, (40, heater, thermoelectric element, etc.) for heating the temperature of the heating medium, a stirrer or pump (50) for distributing the temperature of the heating medium at a uniform temperature in the bath (10) And a controller 60 for temperature control. The canister 20 is contained in a heating medium accommodated in the bath 10. Such a conventional Bath structure uses a canister having various sizes and shapes, and is convenient because it is a method of inserting the canister 20 into the bath 10 containing the liquid.

However, since the inside of the bath is filled with liquid in order to maintain the temperature of the canister, there are the following problems. First, when the liquid is used for a long period of time, there is a problem of deteriorating the constant temperature function and performance due to the liquid level failure due to leakage or evaporation of the liquid. Second, since the amount of liquid used in the bath is increased, the size of the apparatus becomes larger, which causes difficulties in facility management. Particularly, in the semiconductor manufacturing process, several tens to several hundred canisters are required. However, since each temperature control device is used for each canister, this problem becomes even more serious.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a canister temperature control device that maintains a temperature of a canister at a constant level without using a bath structure.

According to an aspect of the present invention, there is provided a canister temperature control apparatus for maintaining a canister at a predetermined temperature, the apparatus comprising: a jacket body surrounding the outer surface of the canister to circulate a heat transfer medium therein; A thermoelectric module part for cooling or heating the heat transfer medium by endothermic or exothermic reaction; A circulation pump circulating the heat transfer medium into the jacket body; And a controller for controlling the temperature of the heat transfer medium by controlling the thermoelectric module to maintain the temperature of the canister at a constant level.

Wherein the jacket body has a structure in which a thermo pad having one side in contact with an outer circumferential surface of the canister and an insulating pad and a cover are stacked in order, wherein the thermo pad has an inlet and an outlet, A circulation hose is provided to provide a path for the discharge.

On the other hand, the jacket body is provided with fixing means for fixing the canister by wrapping it.

The canister thermostat according to the present invention has a jacket structure that directly surrounds the canister without using a bath structure for maintaining a constant temperature of the canister. First, the conventional bath structure solves the deterioration of the thermostatic function and the performance deterioration due to the leakage of liquid and evaporation, thereby improving the productivity of the work and solving the problems of the facility management, thereby improving the efficiency of the manufacturing process. In addition, there is an effect of solving the safety problem of the electric device due to leakage of liquid or the like. In addition, the volume of the entire apparatus can be reduced, and the power consumption is small, so that the energy efficiency is good and the cost is reduced.

1 is a schematic structural view of a conventional canister thermostat,
FIG. 2 is a structural view of a canister thermostat according to an embodiment of the present invention. FIG.
Fig. 3 is an enlarged cross-sectional view of the jacket body of Fig. 2,
4 is a view illustrating an application example of a canister temperature control apparatus according to an embodiment of the present invention,
5 is a structural view of a canister thermostat according to another embodiment of the present invention.

These and other objects, features and other advantages of the present invention will become more apparent by describing in detail preferred embodiments of the present invention with reference to the accompanying drawings. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a canister temperature control apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

2, the canister thermostat is for maintaining the canister at a predetermined temperature. The canister thermostat includes a jacket body 110, a thermoelectric module 120, A circulation pump 130, and a control unit 140. The jacket body 110 is wrapped around the outer circumferential surface of the canister 200 in close contact with each other, and the heat transfer medium circulates inside the jacket body 110 to maintain the canister 200 at a constant temperature. The thermoelectric module part 120 performs an endothermic or exothermic reaction to cool or heat the heat transfer medium. The circulation pump 130 circulates the heat transfer medium cooled or heated by the thermoelectric module 120 to supply and recover the heat transfer medium into the jacket body 110. The control unit 140 controls the temperature of the heat transfer medium by controlling the thermoelectric module 120 so that the temperature of the canister 200 is maintained constant.

Referring to FIG. 3, the jacket body 110 has a structure in which a summer pad 112, an insulating pad 116, and a cover 118 are stacked in order.

One side of the thermal pad 112 is brought into contact with the outer circumferential surface of the canister 200 in close contact. A circulation hose 114 having an inlet port and an outlet port is provided in the inside of the thermal pad 112. The heat transfer medium (liquid) circulates through the circulation hose 114. In this way, the heat transfer medium circulates through the circulation hose 114 through the summer pad 112, so that the canister 200 maintains a constant temperature. In order for the entire canister 200 to maintain a constant temperature, the heat transfer medium must circulate evenly, so that the circulating hose 114 must be evenly distributed to the summer pad 112. 2, the circulation hoses 114 are disposed in the left and right width direction of the summer pad 112 and are arranged at a predetermined interval in the vertical direction. Or one circulating hose may be arranged in such a manner that it is wound at regular intervals such as a spiral, and the present invention is not limited thereto. However, when one circulating hose is disposed, the arrival path of the heat transfer medium becomes long, and it may be difficult to maintain the entire canister at a constant temperature. Therefore, it is preferable to dispose a plurality of circulating hoses as shown. The circulating hose 114 is preferably made of a material capable of maintaining elasticity and airtightness. Further, since the thermal pad 112 also has a winding structure, it is preferable that the thermal pad 112 is made of a stretchable material and is made of a material having excellent thermal conductivity.

The insulating pad 116 is located on the other side of the thermal pad 112 to prevent heat from leaking out and a cover 118 is provided on one side of the insulating pad 116 to protect the thermal pad 112, Thereby protecting the pad 116.

On the other hand, the end of the jacket body 110 is provided with a fixing means 119 for fixing and fixing the canister 200. The jacket body 110 is fixed to the canister 200 in close contact with the fixing means 119. The fixing means 119 may be, for example, a velcro tape, an adhesive button, a zipper, or other binder.

Most canister (bubbler) structures are based on the shape of a cylinder, but may have a polygonal shape such as a square or hexagonal cross section. Therefore, according to the embodiment of the present invention, the canisters of various shapes can be closely adhered to each other by the jacket body and the fixing means, and the temperature of the canister can be efficiently maintained.

The thermoelectric module part 120 is installed under the storage container 150 storing the heat transfer medium to cool or heat the heat transfer medium stored in the storage container 150. The thermoelectric module part 120 is disposed on the upper surface of the thermoelectric module 122 and the thermoelectric module 122 that can perform a function as a cooling system or a heat pump and is disposed in contact with the lower surface of the storage container 150, And a heat radiator 126 disposed on the lower surface of the thermoelectric module 122 to dissipate the heat generated from the thermoelectric module 122. The heat exchanger 124 is a heat exchanger that exchanges heat, . The thermoelectric module 122 is provided with a plurality of thermoelectric elements, and under the control of the controller 140, the power supplied from a power supply unit (not shown) absorbs heat or dissipates heat through both sides thereof. The thermoelectric module is an electronic component that can convert heat energy directly into electric energy or electric energy into thermal energy. By controlling the polarity of the power supplied, it reverses the direction of heat transfer, It can be moved from the surface to the heat release surface. In addition, by controlling the supplied voltage or current, it is possible to precisely control the temperature to the level of 0.05 ° C. Since there is no driving part for operating the device, there is no vibration noise and it is used as the thermoelectric characteristic of the thermoelectric semiconductor. And there is no pollution or pollution. The detailed structure and characteristics of the thermoelectric module are well known in the technical field to which the present invention pertains, so a detailed description thereof will be omitted. Meanwhile, the heat exchanging unit 124 may be omitted. In this case, the upper surface of the thermoelectric module 122 may be installed in contact with the bottom surface of the reservoir 150 to perform direct storage heat exchange. The heat dissipating unit 126 may be a water-cooled type that dissipates heat by water or cooling water, or an air-cooled type that dissipates heat by a fan. The present invention is not limited to any particular one, but a water- .

The control unit 140 controls the thermoelectric module 122 of the thermoelectric module 120 to adjust the temperature of the heat transfer medium to a desired temperature. Although not shown, a temperature sensor may be installed on the surface of the canister 200, the inner surface of the jacket body 110, or a pipe through which the heat transfer medium flows. Accordingly, the control unit 140 controls the output of the thermoelectric module using the temperature information received from the temperature sensor, thereby keeping the temperature of the canister 200 constant.

FIG. 4 illustrates an application example of a canister thermostat according to an embodiment of the present invention. As shown in the figure, each of the plurality of canisters 200 is enclosed with a respective jacket body 110, and one of the thermoelectric module 120, the circulation pump 130, and the controller 140 is installed, The heat transfer medium is circulated to the jacket body 110. As described above, when several to several hundred canisters are required in the semiconductor manufacturing process, when the set temperature of the canister is the same, the present invention can be applied as shown in FIG. 4, thereby improving productivity and convenience of management.

FIG. 5 illustrates a canister thermostat according to another embodiment of the present invention.

According to the present embodiment, a jacket body 110 for tightly covering the canister 200, a thermoelectric module 120 ', a circulation pump 130', and a controller 140 'are included. 2, the thermoelectric module 120 may be integrated with or coupled to the reservoir 150, but in the present embodiment, the thermoelectric module 120 'may be separated from the reservoir 150 . Accordingly, the configuration and function of the jacket body 110 are the same, and the thermoelectric module 120 ', the circulation pump 130', and the controller 140 'are not greatly different from the previous embodiments in terms of structure and function Since there is a difference in layout, only the difference will be described.

The heat exchange medium circulating through the jacket body 110 is recovered into the reservoir 150 '. The heat exchange medium stored in the storage container 150 is cooled or heated through the heat exchanging unit 124 'of the thermoelectric module 120' via the circulation pump 130 'and then flows into the jacket body 110 again . The control unit 140 'controls the temperature of the thermoelectric module 120 using the temperature information received from the surface of the canister 200 or the inner surface of the jacket body 110 or the temperature sensor installed on the pipe through which the heat transfer medium flows, 'To control the output of the heat exchange module 122' to be supplied at a desired temperature.

Although the preferred embodiments of the present invention have been described, the present invention is not limited to the specific embodiments described above. It will be apparent to those skilled in the art that numerous modifications and variations can be made in the present invention without departing from the spirit or scope of the appended claims. And equivalents should also be considered to be within the scope of the present invention.

110. Jacket body 112. Summer pad
114. Circulating hose 116. Insulation pad
118. Cover 119. Securing means
120. Thermoelectric module part 130. Circulating pump
140. Control section 200. Canister

Claims (3)

A temperature control apparatus for maintaining a canister at a constant temperature,
A jacket body which surrounds the outer circumferential surface of the canister so as to be in close contact with the outer circumferential surface of the canister and in which the heat transfer medium circulates;
A thermoelectric module part for cooling or heating the heat transfer medium by endothermic or exothermic reaction;
A circulation pump circulating the heat transfer medium into the jacket body; And
And a control unit controlling the temperature of the heat transfer medium by controlling the thermoelectric module unit to maintain the temperature of the canister at a constant level,
The jacket body includes:
A thermal pad in which one side is in contact with an outer circumferential surface of the canister, and an insulating pad and a cover are stacked in this order, wherein the thermal pad has an inlet and an outlet, And a circulation hose is installed in the canister.
delete The method according to claim 1,
Wherein the jacket body is formed with a fixing means for fixing the canister by wrapping the canister.

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