KR20120001918A - Dustproof right angle coordinate robot - Google Patents

Dustproof right angle coordinate robot Download PDF

Info

Publication number
KR20120001918A
KR20120001918A KR1020100062547A KR20100062547A KR20120001918A KR 20120001918 A KR20120001918 A KR 20120001918A KR 1020100062547 A KR1020100062547 A KR 1020100062547A KR 20100062547 A KR20100062547 A KR 20100062547A KR 20120001918 A KR20120001918 A KR 20120001918A
Authority
KR
South Korea
Prior art keywords
guide member
coordinate robot
rectangular coordinate
dustproof
roller
Prior art date
Application number
KR1020100062547A
Other languages
Korean (ko)
Inventor
고임섭
장인종
Original Assignee
주식회사 로보스타
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 로보스타 filed Critical 주식회사 로보스타
Priority to KR1020100062547A priority Critical patent/KR20120001918A/en
Publication of KR20120001918A publication Critical patent/KR20120001918A/en

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/08Protective coverings for parts of machine tools; Splash guards
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075Means for protecting the manipulator from its environment or vice versa
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/02Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/02Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041Cylindrical coordinate type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/02Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/045Polar coordinate type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/08Arrangements for covering or protecting the ways

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • General Engineering & Computer Science (AREA)
  • Manipulator (AREA)

Abstract

PURPOSE: A dustproof rectangular coordinate robot is provided to prevent dust due to friction of a dustproof plate with a roller and dust due to the rotation of the roller from becoming emitting to the outside of a rectangular coordinate robot. CONSTITUTION: A dustproof rectangular coordinate robot(100) comprises a body(120), an actuator, a moving guide member(140), a dustproof plate(160), and a moving body(180). The actuator is installed in the body. The moving guide member slides with the actuator in the length direction of the body. The dustproof plate covers the top of the moving guide member and the opened upper part of the body. The body is fixed to the upper part of the moving guide member. The moving guide member comprises a guide roller and a fixing roller. When the moving guide member slides, the guide roller lifts up the dustproof plate.

Description

Dustproof right angle coordinate robot

The present invention relates to a dustproof rectangular robot, and more particularly, by installing a fixed roller having a permanent magnet in the movement guide member of the rectangular coordinate robot so that the fixed roller is not located on the upper side of the dustproof plate, It relates to a dust-proof rectangular coordinate robot that can prevent the dust due to the friction of the fixed roller and the dust due to the rotation of the fixed roller to be scattered to the outside.

The present invention relates to a dustproof rectangular coordinate robot.

As is generally known, a robot implements factory automation and automation of individual machinery. The robot works by repeatedly performing a specific cycle according to the operation of a control signal.

The robot is divided into a rectangular coordinate robot and a linear robot, a horizontal articulated robot, a desktop robot, a 1-axis controller and a 2 / 4-axis controller.

Cartesian coordinate robot is divided into serial type, parallel type, combination type, etc. The serial type can perform work alone, and the parallel type can perform work by combining a plurality, and the combination type is serial type. You can do this with a combination of and parallel.

The rectangular coordinate robot is applied in an automation factory, a laboratory, a laboratory, and various automation lines. The rectangular coordinate robot is formed to be open in a state in which a body, an actuator, a ball screw, and a moving body are coupled to each other to freely move foreign materials in the room. will be.

However, the Cartesian coordinate robot cannot be used in automation inspection systems such as semiconductor inspection equipment, LCD factories, and PDP factories where actuators, ballscrews, and moving bodies are coupled to the body in an open state and foreign substances (dust) are restricted. There is this.

Therefore, as shown in FIG. 1, a rectangular coordinate robot provided with a dustproof plate is used.

1 and 2, the conventional rectangular coordinate robot is installed on the shaft of the actuator 1 fixed to one side of the body 1 and the body 1 is formed with an inner space and the top is open. The movement guide member 7 and the movement guide member 7 installed in the ball screw 5 and the ball screw 5 to slide in the longitudinal direction of the body 1 according to the operation of the actuator 3. It is made of a dustproof plate (9) which is fitted in and covers the upper portion of the body (1) and the movable body (11) is fixed to the upper side of the movable guide member (7) to block foreign matter movement from the outside.

The rotational movement of the ball screw (5) is made by an actuator (3) operated according to a control signal, the movement guide member (7) by the rotational movement of the ball screw (5) in the longitudinal direction of the body (1) Sliding movement will be performed.

When the movement guide member 7 moves in the left and right directions, the anti-vibration plate 9 is moved while lifting the body 1 upward.

The anti-vibration plate 9 is caught by the movement guide member 7 while blocking the open space above the body 1 from the outside, and guide rollers 13, 13 ′, 13 ′ of the movement guide member 7. ') Is to be caught in the vibration-proof plate 9 is fitted.

The guide rollers 13, 13 ′, 13 ″ are installed on the upper side of the moving guide member 7, and the guide rollers 13 ′, 13 ″ located on both sides of the moving guide member 7 are provided. Positioning the dustproof plate 9 downward prevents the gap between the body 1 and the dustproof plate 9.

The guide roller 13 located in the center of the movement guide member 7 is to position the dust-proof plate 9 upwards so that the left and right movement of the movement guide member 7 is made stable.

The conventional rectangular coordinate robot as described above installs an actuator (3) having a ball screw (5) coupled to a body (1), and moves and installs a movement guide member (7) on the ball screw (5). After the dustproof plate 9 is coupled to the guide rollers 13, 13 ′, 13 '' of the guide member 7, both ends of the dustproof plate 9 are fixed to both sides of the body 1, and the dustproof plate 9 is provided. The inner and outer sides of the body 1 are closed by fixing the movable body 11 on the upper side of the movable guide member 7 to which the coupled member 7 is coupled.

The movable guide member 7 and the movable body 11 move in the left and right directions according to the rotational operation of the ball screw 5, and the dustproof plate 9 is fixed when the movable guide member 7 moves in the left and right directions. Ascending to height to move.

The anti-vibration plate 9 is guided along the guide rollers 13, 13 ′, 13 ″ of the movement guide member 7 and ascended to a certain height, and the guide rollers 13, 13 ′, 13 ″. ) Guides the anti-vibration plate 9 to a certain height to help the sliding movement of the movement guide member (7).

However, the conventional rectangular coordinate robot as described above has the following problems.

In the conventional rectangular coordinate robot, friction occurs between the dustproof plate 9 and the guide rollers 13, 13 ′, 13 ″ installed on the movement guide member 7 as the movement guide member 7 slides. Done.

Due to the constant friction between the dustproof plate 9 and the guide rollers, the upper surface of the dustproof plate and the surface of the guide rollers are damaged, and dust is generated. In this process, dust is generated during the reciprocating motion of the guide member in the longitudinal direction of the body. There is a problem that spills to the outside and scatters.

In addition, because the guide rollers located on both sides of the moving guide member operate on the upper side of the dustproof plate, there is a problem that dust generated from the guide roller itself is not filtered and scattered to the outside as the guide roller rotates.

Therefore, due to the above problems, it is not preferable to use in an automated line in a clean environment, such as a semiconductor inspection equipment and an LCD factory and a PDP factory in which the entry of foreign matter (dust) is strictly controlled.

The present invention has an object to solve the above technical problem, by providing a fixed roller having a permanent magnet in the movement guide member of the Cartesian coordinate robot, so that the fixed roller is located on the bottom surface of the anti-vibration plate It is an object of the present invention to provide a dust-proof rectangular coordinate robot that can prevent dust from being scattered by the rotation of the dust-proof plate and the fixed roller and dust from the rotation of the fixed roller.

Dustproof rectangular coordinate robot according to an embodiment of the present invention is a sliding motion in the longitudinal direction of the body by the drive device and the drive device is installed in the inner space of the body and the upper body is formed and the inner space is formed. In the anti-vibration rectangular Cartesian robot comprising a movement guide member and a dustproof plate covering the upper surface of the movement guide member and the open upper portion of the body and a movable body fixed to the upper side of the movement guide member, the movement guide member The guide member is provided with a guide roller and a permanent magnet for lifting the anti-vibration plate to the upper side when the movement guide member is a sliding movement, characterized in that it comprises a fixed roller to prevent the opening of the body and the anti-vibration plate.

In addition, the dust-proof rectangular coordinate robot according to an embodiment of the present invention is characterized in that the permanent magnet is attached to or embedded in the entire surface or part of the surface of the fixed roller.

In addition, the dust-proof rectangular coordinate robot according to an embodiment of the present invention is characterized in that the permanent magnet is located inside the fixed roller.

In addition, the dust-proof rectangular coordinate robot according to an embodiment of the present invention is characterized in that the fixed roller is a permanent magnet.

In addition, the dustproof rectangular coordinate robot according to an embodiment of the present invention is characterized in that the permanent magnet is attached to or embedded in the entire surface or part of the surface of the guide roller.

In addition, the dustproof rectangular Cartesian robot according to an embodiment of the present invention is characterized in that the permanent magnet is located inside the guide roller.

In addition, the dust-proof rectangular coordinate robot according to an embodiment of the present invention is characterized in that the guide roller is a permanent magnet.

In addition, the dustproof rectangular coordinate robot according to an embodiment of the present invention is characterized in that the two guide rollers.

According to the dustproof rectangular coordinate robot of the present invention, the guide rollers and the fixed rollers for guiding the dustproof plate are positioned at the bottom of the dustproof plate, not at the top of the dustproof plate. The dust generated by the rotation of can be prevented from leaking to the outside of the rectangular coordinate robot.

In addition, according to the dustproof rectangular coordinate robot of the present invention, by installing a roller on the movement guide member to guide the dustproof plate, there is an effect that can reduce the generation of dust and noise due to friction with the dustproof plate.

1 is a schematic view of a state in which a moving object and a dustproof plate are separated as a conventional rectangular coordinate robot.
2 is a side cross-sectional view of a conventional rectangular coordinate robot.
3 is an external perspective view of a dustproof rectangular coordinate robot according to the present invention.
Figure 4 is a perspective view showing a state in which the moving body is separated as a dustproof rectangular coordinate robot according to the present invention.
5 is a perspective view illustrating a state in which a moving body and a dustproof plate are separated as a dustproof rectangular coordinate robot according to the present invention.
6 is a side cross-sectional view of the dustproof rectangular coordinate robot according to the present invention.
7 to 10 are cross-sectional perspective views showing various embodiments of the fixed roller of the dustproof rectangular coordinate robot according to the present invention.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings without limiting the present invention by way of example only.

The following examples of the present invention are not intended to limit or limit the scope of the present invention only to embody the present invention. It will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

In addition, repeated description of the same structure and operation as in the prior art will be omitted.

Figure 3 is a perspective view showing the appearance of the dust-proof rectangular coordinate robot according to the present invention, Figure 4 is a perspective view showing a state of the dust-proof rectangular coordinate robot is separated from the moving body, Figure 5 is a dust-proof dust separation plate and the moving object It is a perspective view which shows the state of a rectangular Cartesian coordinate robot, and FIG. 6 is a side sectional view of the dustproof Cartesian coordinate robot which concerns on this invention.

As shown in FIG. 3, the dustproof rectangular coordinate robot 100 according to the present invention includes a body 120 having an internal space formed therein and a drive device installed in an internal space of the body 120 and the above-mentioned. An upper side of the movement guide member 140 and the dustproof plate 160 covering the upper portion of the body 120 and the movement guide member 140 to slide in the longitudinal direction of the body 120 according to the operation of the driving device. It is fixed to the moving body 180 to block the movement of foreign matter is configured to include.

The dustproof plate 160 covers the upper side of the body 120. In addition, the anti-vibration plate 160 is fitted between the movement guide member 140 and the moving body 180. Therefore, as illustrated in FIG. 4, when the movable body 180 fixed to the upper side of the movable guide member 140 is separated, the dustproof plate 160 covering the upper portion of the body 120 and the movable guide member 140 is provided. Can be seen. The anti-vibration plate 160 is located between the moving guide member 140 and the moving body 180 while blocking the open space above the body 120 from the outside, and the roller 142 of the moving guide member 140. 144).

As shown in FIG. 5, the movement guide member 140 includes a plurality of rollers 144 and 142. The central portion of the moving guide member 140 is provided with a guide roller 144 for lifting the dust-proof plate 160 to the upper side of the body 120. The guide roller 144 is to lift the dustproof plate 160 to the upper side of the body 120 when the movement guide member 140 is sliding in the left and right direction, the movement guide member 140 is the A space for sliding movement under the dustproof plate 160 is secured. In addition, although not shown in the drawing, the guide roller 144 may be composed of a plurality of guide rollers. For example, when the two guide rollers 144 are provided, they are positioned symmetrically on top of the moving guide member 140.

Fixed rollers 142 are provided at both sides of the movable guide member 140. The fixed roller 142 is provided with a permanent magnet. As the guide roller 144 lifts the anti-vibration plate 160 to the upper side of the body 120, a space is formed between the anti-vibration plate 160 and the body 120 to be lifted, and fixed with a permanent magnet. The roller 142 pulls the dustproof plate 160 downward by magnetic attraction, thereby preventing the dustproof plate 160 from being lifted upward of the body 120.

The fixed roller 142 is located on the side of the moving guide member 140, when the moving guide member 140 is installed on the body 120, the fixed roller 142 is the upper portion of the outer peripheral surface of the body It is installed to be the same or partially protruded from the upper surface of 120.

6, the ball screw 5 is illustrated as a driving means, but the present invention is not limited thereto, and the driving means may include a ball screw, a linear motion guide, or a linear motor.

As shown, the movement guide member 140 is a sliding movement in the longitudinal direction of the body 120 in accordance with the operation of the ball screw 5 installed on the shaft of the actuator 3 fixed to one side of the body 120 Will be

7 to 10 illustrate various embodiments of the fixed roller 142 having a permanent magnet 146.

In the case of the fixed roller 142 of FIG. 7, the permanent magnet 146 is attached to the entire outer circumferential surface of the fixed roller. 8, the permanent magnet 146 is embedded in a portion of the outer circumferential surface of the fixed roller. In FIG. 8, the permanent magnet 146 is embedded in the longitudinal direction of the fixed roller 142, but the permanent magnet 146 may be buried in a donut shape along the circumferential direction of the fixed roller 142. .

9 and 10 show an embodiment in which the permanent magnet 146 is located inside the fixed roller. In addition, in some cases, the fixed roller itself may be configured as a permanent magnet.

In addition, although not shown in the drawings, the guide roller 144 may also be provided with a permanent magnet as in the case of the fixed roller 142.

As mentioned above, although this invention was demonstrated to the said Example, this invention is not limited to this. It will be understood by those skilled in the art that modifications and variations may be made without departing from the spirit and scope of the invention, and that such modifications and variations are also contemplated by the present invention.

1: Body 3: Actuator
5 ball screw 7 movement guide member
9: dustproof plate 11: mobile body
13,13 ', 13': Guide roller 100: Cartesian robot
120: body 140: moving guide member
142: fixed roller 144: guide roller
160: anti-vibration plate 180: moving body

Claims (8)

An internal space formed therein and an open top portion thereof;
A driving device installed in the inner space of the body 120;
A movement guide member 140 for sliding in the longitudinal direction of the body 120 by the driving device;
A dustproof plate 160 covering the upper surface of the movable guide member 140 and the open upper portion of the body 120;
In the anti-vibration rectangular coordinate robot comprising a moving body 180 is fixed to the upper side of the moving guide member,
The movement guide member 140,
A guide roller 144 for lifting the dustproof plate 160 upward when the movement guide member 140 performs a sliding motion;
A permanent magnet (146) is provided is a dust-proof rectangular coordinate robot, characterized in that it comprises a fixed roller (142) to prevent the opening of the body (120) and the dustproof plate (160).
The method of claim 1,
The fixed roller 142,
A permanent magnet 146 is attached to the entire surface of the fixed roller 142 or embedded in a portion of the surface-proof rectangular coordinate robot.
The method of claim 1,
The fixed roller 142,
Permanent magnet (146) is a dust-proof rectangular coordinate robot, characterized in that located in the interior of the fixed roller (142).
The method of claim 1,
The fixed roller 142,
Dustproof rectangular coordinate robot, characterized in that the permanent magnet.
The method according to any one of claims 1 to 4,
The guide roller 144,
Dust-proof rectangular coordinate robot, characterized in that the permanent magnet is attached to the entire surface of the guide roller (144) or embedded in a part of the surface.
The method of claim 5,
The guide roller 144,
Dust-proof rectangular coordinate robot, characterized in that the permanent magnet is located inside the guide roller (144).
The method of claim 5,
The guide roller,
Dustproof rectangular coordinate robot, characterized in that the permanent magnet.
The method of claim 5,
Dust guided rectangular coordinate robot, characterized in that the two guide rollers (144).
KR1020100062547A 2010-06-30 2010-06-30 Dustproof right angle coordinate robot KR20120001918A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020100062547A KR20120001918A (en) 2010-06-30 2010-06-30 Dustproof right angle coordinate robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020100062547A KR20120001918A (en) 2010-06-30 2010-06-30 Dustproof right angle coordinate robot

Publications (1)

Publication Number Publication Date
KR20120001918A true KR20120001918A (en) 2012-01-05

Family

ID=45609411

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100062547A KR20120001918A (en) 2010-06-30 2010-06-30 Dustproof right angle coordinate robot

Country Status (1)

Country Link
KR (1) KR20120001918A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101321505B1 (en) * 2012-12-13 2013-10-28 (주)현준에프에이 Linear robot equipped with dustproof band
CN105082126A (en) * 2015-09-02 2015-11-25 浙江斯凯瑞机器人股份有限公司 High-speed mute full-closed right-angle coordinate mechanical arm
CN105363698A (en) * 2015-12-01 2016-03-02 天津莫德曼机器人有限公司 Sealed dust removal mechanism for linear guide rail
CN109093607A (en) * 2018-09-07 2018-12-28 浙江斯柯特科技有限公司 A kind of totally-enclosed right angle coordinate manipulator of high-speed silent
JP2019123065A (en) * 2018-01-19 2019-07-25 上銀科技股▲分▼有限公司 Dust removal cover of linear module operation part
US10393354B2 (en) 2016-10-28 2019-08-27 Andrew Michael Schneider Light assembly and alignment device
KR200492107Y1 (en) * 2019-05-17 2020-08-10 하이윈 테크놀로지스 코포레이션 Dustproof assembly for linear actuator
CN112664560A (en) * 2021-01-04 2021-04-16 航天信息股份有限公司 Dustproof sealing structure

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101321505B1 (en) * 2012-12-13 2013-10-28 (주)현준에프에이 Linear robot equipped with dustproof band
CN105082126A (en) * 2015-09-02 2015-11-25 浙江斯凯瑞机器人股份有限公司 High-speed mute full-closed right-angle coordinate mechanical arm
CN105082126B (en) * 2015-09-02 2016-07-13 浙江斯凯瑞机器人股份有限公司 The totally-enclosed right angle coordinate manipulator of high-speed silent
CN105363698A (en) * 2015-12-01 2016-03-02 天津莫德曼机器人有限公司 Sealed dust removal mechanism for linear guide rail
US10393354B2 (en) 2016-10-28 2019-08-27 Andrew Michael Schneider Light assembly and alignment device
JP2019123065A (en) * 2018-01-19 2019-07-25 上銀科技股▲分▼有限公司 Dust removal cover of linear module operation part
CN109093607A (en) * 2018-09-07 2018-12-28 浙江斯柯特科技有限公司 A kind of totally-enclosed right angle coordinate manipulator of high-speed silent
CN109093607B (en) * 2018-09-07 2023-09-05 浙江斯柯特科技有限公司 High-speed mute totally-enclosed rectangular coordinate manipulator
KR200492107Y1 (en) * 2019-05-17 2020-08-10 하이윈 테크놀로지스 코포레이션 Dustproof assembly for linear actuator
CN112664560A (en) * 2021-01-04 2021-04-16 航天信息股份有限公司 Dustproof sealing structure
CN112664560B (en) * 2021-01-04 2024-04-02 航天信息股份有限公司 Dustproof sealing structure

Similar Documents

Publication Publication Date Title
KR20120001918A (en) Dustproof right angle coordinate robot
US9841089B2 (en) Actuator
CN104863438A (en) Vehicle door handle covering device and vehicle comprising same
KR100812988B1 (en) Linear stage robot
KR20000042618A (en) Robot of cylindrical coordinates
JP2018134697A (en) robot
KR101163105B1 (en) Linear Actuator
KR101321505B1 (en) Linear robot equipped with dustproof band
KR101992638B1 (en) Linear actuator having enhanced dustproof structure
JP2017067077A (en) Linear motion guide bearing device
KR101416979B1 (en) A clean type linear robot
JP5502574B2 (en) Elevator cleaning device and elevator equipped with the same
US10214368B2 (en) System using magnetic coupling to move a carriage
CN204295680U (en) Dust prevention system high speed single axis robot
KR101309267B1 (en) Dust proof type linear robot
JP2021050066A (en) Support device
JP4753092B2 (en) Substrate transfer robot having dustproof mechanism and semiconductor manufacturing apparatus having the same
KR101398229B1 (en) A clean type linear robot
KR101357104B1 (en) A gate-valve operating device
TW201716701A (en) Positioning slider
TWI611119B (en) Positioning slider
KR200305533Y1 (en) Seal type dustproof right angle coordinate robot
JP4471874B2 (en) Linear drive
KR101037436B1 (en) Lift truck
KR101222000B1 (en) Non-touch type drive apparatus using magnet

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal