KR20110102202A - Film forming apparatus - Google Patents

Abstract

(Problem) The film forming apparatus in which the conditions for film formation are not limited is provided.
(Solution means) The film-forming apparatus 1 is a roll-to-roll system film-forming apparatus which forms a film | membrane in the sheet | seat 3, The conveyance path 27 which conveys the sheet | seat 3 in the film-forming chamber 2 is set, and this conveyance is carried out. 40 flange holes 26 are formed in the upper part 24 of the film-forming chamber 2 located above the furnace 27 side. In the flange hole 26, the target part 5 which forms a film | membrane in the sheet | seat 3 conveyed by the conveyance path 27 is provided so that attachment or detachment is possible. In addition, the target part 5 is arrange | positioned at the both sides of the conveyance path 27. As shown in FIG.

Description

Film deposition apparatus {FILM FORMING APPARATUS}

The present invention relates to a film forming apparatus.

When forming a film in a sheet | seat, a film-forming apparatus, such as a roll-to-roll system, is currently used (for example, refer patent document 1).

The film-forming apparatus of the roll-to-roll system shown in patent document 1 is comprised from the unwinding body which takes out a sheet, the winding-up body which winds up a sheet, and the sputter | spatter part which forms a film | membrane in the sheet taken out from a unwinding body, The film is taken out, and a desired film is formed on one surface of the taken out sheet by the sputtering part, and after the formation of the film into the sheet is finished, the sheet is wound up by the winding body. In this film forming apparatus, one kind of one layer film is formed on one surface of the sheet.

Japanese Patent Publication No. 2009-298571

By the way, in patent document 1, the number of sputter | spatter parts is determined and the conditions of film formation are limited.

Then, in order to solve the said subject, an object of this invention is to provide the film-forming apparatus in which the conditions of film formation are not limited.

In order to achieve the above object, the film forming apparatus according to the present invention is a roll-to-roll type film forming apparatus which forms a film on a sheet, wherein a conveying path for conveying the sheet in the film forming chamber is set, and is located above the conveying path side. A plurality of casing balls are formed in the upper part of the film formation chamber, and a target part for forming a film on the sheet conveyed to the conveying path is detachably installed in the casing ball, and the target parts are arranged on both sides of the conveying path. It is characterized by.

According to the present invention, the plurality of casing balls are formed in an upper portion of the deposition chamber located above the conveying path side, at least the target portion is detachably installed in the casing ball, and the target portions are disposed on both sides of the conveying path. Therefore, it becomes possible to correspond to the conditions of desired film formation, without limiting the number and kind of target parts.

Moreover, since the said target part is arrange | positioned at the both sides of the said conveyance path, it becomes possible to form a film | membrane on both surfaces of a sheet by one film-forming process by the said several target part.

In the said structure, it is preferable that the said target part is arrange | positioned over two places along both sides of the said conveyance path.

In the said structure, the target part may be provided with the target material which is a film-forming material, and the gas injection part which injects the reactive gas corresponding to the said target material into the said film-forming chamber.

In this case, since the said target material and the said gas injection part are provided in the said target part, it becomes possible to inject the said gas from the said gas injection part in the vicinity of the said target material in each said target part, As a result, each said target part This makes it possible to form stable films on the sheets, respectively.

In the above structure, an exhaust portion for exhausting gas may be provided adjacent to one or more of the target portions in the film formation chamber.

In this case, since the said exhaust part is provided adjacent to one or more said target part in the said film-forming chamber, it becomes possible to exhaust each gas generate | occur | produced by each said target part by the said exhaust part. As a result, it becomes possible to suppress that the respective gases generated by the respective target portions are mixed, and to form a film of good quality on the sheet.

In the said structure, the said conveyance path may be set so that the sheet | seat may be conveyed in the attitude | position which the width direction follows a perpendicular direction.

In this case, the conveying path is set so as to convey the sheet in a posture in which the width direction thereof is along the vertical direction. It becomes possible.

In the above configuration, a partition wall portion that isolates the target portions may be provided.

In this case, since the partition wall part which isolate | separates the said target part is provided, it becomes possible to form a film | membrane in a sheet | seat without mutually interfering with said target part.

In the above structure, a plurality of individual film forming spaces surrounded by the partition wall portion and the sheet may be formed in the film forming chamber.

In this case, since the said individual film-forming space is formed in multiple numbers in the said film-forming chamber, film formation to a sheet can be performed separately in the said several film-forming space in one said film-forming chamber.

(Effects of the Invention)

According to the film-forming apparatus by this invention, the conditions of film formation are not limited.

1 is a schematic plan view showing a configuration of a film forming apparatus according to the present embodiment.
2 is a schematic sectional view seen from the side showing the configuration of the film forming apparatus according to the present embodiment.
3 is a schematic plan view showing a configuration of a film forming apparatus according to another embodiment.
4 is a schematic plan view showing a configuration of a film forming apparatus according to another embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention (henceforth this embodiment) is described with reference to drawings.

Film forming apparatus (1)

In the film-forming apparatus 1 which concerns on this embodiment, as shown in FIG. 1 and FIG. 2, the 1st winding body 41 which unwinds or winds up the sheet | seat 3 to the film-forming chamber 2 which arrange | positioned the sheet | seat 3 ) And the second winding body 42, the rotary table 4 for rotating the first winding body 41 and the second winding body 42, and the sheet 3 disposed in the film formation chamber 2 to form a film. The target part 5 for this is provided. In addition, the sheet | seat 3 used by this embodiment turns into a roll-shaped body (henceforth a roll 33).

Film Formation Room (2)

The film forming chamber 2 is composed of a vacuum chamber 21 formed in a substantially cylindrical shape, and a film source 2 is provided with a vacuum source (not shown) for vacuuming the inside of the film forming chamber 2.

The lower part 22 of the film-forming chamber 2 is provided with the exhaust hole 23 which exhausts the gas in the film-forming chamber 2. Moreover, the upper part 24 of the film-forming chamber 2 has the flange ball 26 (casing ball called in this invention) which makes detachable the heater part 8 which heats the target part 5 and the sheet | seat 3 possible. The formed flange 25 is provided. 40 flange balls 26 are formed in the upper part 24 (the upper part of the casing of the film-forming apparatus 1) of the film-forming chamber 2 located above the conveyance path 27 (refer to the following).

In the film formation chamber 2, fifteen rollers 43, one first conveying roller 44, and one second conveying roller 45 are provided. The fifteen rollers 43 are rotatably arranged along the outer periphery of the film formation chamber 2 and in a state where the sheet 3 is unfolded between the first conveying roller 44 and the second conveying roller 45. It is a roller which conveys the sheet | seat 3. The 1st feed roller 44 is rotatably installed, is arrange | positioned in the vicinity of the 1st winding body 41 along the outer periphery of the film-forming chamber 2, and conveys (loading in) the sheet | seat 3 to the 1st winding body 41. And carrying out). The 2nd conveyance roller 45 is rotatably installed, is arrange | positioned in the vicinity of the 2nd winding body 42 along the outer periphery of the film-forming chamber 2, and conveys (loading) the sheet | seat 3 to the 2nd winding body 42. And carrying out). 1, the diameter of the 1st conveyance roller 44 and the 2nd conveyance roller 45 is larger than the diameter of the roller 43. As shown in FIG.

In this film-forming apparatus 1, the conveyance path 27 of the sheet | seat 3 is follows along the outer periphery in the film-forming chamber 2 by the roller 43, the 1st conveyance roller 44, and the 2nd conveyance roller 45. Is referred to as a conveyance path 27). This conveyance path 27 is set so that the sheet | seat 3 may be conveyed in the attitude | position which the width direction follows a perpendicular direction.

Specifically, the sheet 3 is formed along the conveying path 27 through the first conveying roller 44, the roller 43, and the second conveying roller 45 sequentially from the first winding body 41. It is conveyed to the winding body 42. Alternatively, the sheet 3 has a first winding body along the conveying path 27 which sequentially passes the second conveying roller 45, the roller 43, and the first conveying roller 44 from the second winding body 42. 41).

Configuration of the turntable 4

As shown in FIG. 2, the turntable 4 is provided in the lower part 22 of the film-forming chamber 2, and rotates the 1st winding body 41 and the 2nd winding body 42 clockwise and counterclockwise. A drive source (not shown) for rotating drive is provided.

Target part 5

The target part 5 is arrange | positioned along the conveyance path 27 along the both sides (inner side, outer side) of the conveyance path 27 over several places. Specifically, 24 target parts 5 in total are provided on both sides of the conveyance path 27 in total, 12 pieces each.

Six sets of target sets 6 (61, 63, 65, 67, 69, 611) are configured on the inside of the conveying path 27 with two target portions 5 adjacent to each other as one set. On the outer side of (27), six sets of targets (6 (62, 64, 66, 68, 610, 612)) are configured using two target portions 5 adjacent to each other as one set.

In addition, as shown in FIG. 1, the target sets 61, 63, 65, 67, 69, 611 and the target sets 62, 64, 66, 68, 610, which face each other via the conveyance path 27, respectively. 612 constitutes six target groups 7 (71 to 76).

As shown in FIG. 1, the target portion 5 has an external shape detachable to the flange hole 26 of the flange 25, and the target portion 5 is provided in the film formation chamber 2 so as to be detachable. One end part 51 of the target part 5 is made into the top plate which hangs on the upper end of the flange ball 26 and closes the flange ball 26. As shown in FIG. In the target portion 5, a gas capable of injecting a target material 52, which is a film forming material, and a reactive gas corresponding to the target material 52, into the film formation chamber 2 (specifically, a region near the target material 52). An injection section (not shown) is provided. The material of the target material 52 can be arbitrarily set according to the film-forming material to the sheet | seat 3.

Heater section (8)

The heater part 8 is provided adjacent to each target set 61-612. Degassing of the sheet | seat 3 by the heater part 8 makes it easy to form a film | membrane in the sheet | seat 3.

Like the target part 5, the heater part 8 is made into the external shape which can be attached or detached to the flange hole 26 of the flange 25, and is attached to the film-forming chamber 2 so that attachment is possible. One end portion 81 of the heater portion 8 is a top plate that is caught by an upper end of the flange hole 26 and closes the flange hole 26. The heater part 8 is arrange | positioned along the conveyance path 27 along the both sides (inner side, outer side) of the conveyance path 27 over several places. Specifically, 16 heater parts 8 in total are provided on both sides of the conveyance path 27, respectively.

The film formation to the sheet (3)

The roll 33 is arrange | positioned at either one of the 1st winding body 41 and the 2nd winding body 42 of the film-forming apparatus 1 which consists of said structure. In this embodiment, the film-forming to the sheet | seat 3 is demonstrated taking the case where the roll 33 is arrange | positioned to the 1st winding body 41 as an example.

The flange hole 26 of the flange 25 is disposed on the first roll 41 in the unfilmed state, and the respective target portions 5 using the respective target materials 52 made of arbitrary materials. ) And the deposition chamber 2 is vacuumed. At this time, each target part 5 and its surrounding area | region are heated by each heater part 8, and the gas removal is performed, and the inside of the film formation chamber 2 is vacuum-processed from the exhaust hole 23 at this time. .

The 1st winding body 41 which arrange | positioned the roll 33 is rotated counterclockwise by the rotation drive (constant rotational speed) of the rotary table 4. With the rotation of this 1st winding body 41, the sheet | seat 3 is taken out from the roll 33 to the 1st conveyance roller 44 (it carries out). At this time, the second winding body 42 is rotated counterclockwise by the rotational drive (constant rotational speed) of the rotary table 4.

As shown in FIG. 1, the sheet 3 drawn out to the 1st feed roller 44 is conveyed on the conveyance path 27 in the clockwise direction in the state which extended the sheet 3 with the roller 43, It is sent to the 2nd conveyance roller 45, and it carries in (winds up) to the 2nd winding body 42 from the 2nd conveyance roller 45. As shown in FIG.

In the conveyance of the sheet | seat 3 from this 1st winding body 41 to the 2nd winding body 42, the target set 61 located in the conveyance direction with respect to the one surface 31 of the sheet | seat 3 1 form a film. Further, the first film is formed by the target set 62 located outside the conveyance direction with respect to the other surface 32 of the sheet 3, and one layer of film is formed on both surfaces 31 and 32 of the sheet 3. (The above process is called a 1st film formation process.).

When the conveyance of the sheet | seat 3 from the 1st winding body 41 to the 2nd winding body 42 is complete | finished, the rotation drive of the 1st winding body 41 and the 2nd winding body 42 by the rotating table 4 is stopped. Thereafter, the rotary table 4 is rotated in a reverse rotation (constant rotational speed), and the second winding body 42 is rotated clockwise by this rotational drive. With the rotation of this 2nd winding body 42, the sheet | seat 3 is taken out from the roll 33 to the 2nd conveyance roller 45 (carry out). At this time, the 1st winding body 41 is rotated clockwise by the rotation drive (constant rotational speed) of the rotary table 4.

As shown in FIG. 1, the sheet 3 drawn out by the 2nd feed roller 45 is conveyed on the conveyance path 27 counterclockwise in the state which extended the sheet 3 by the roller 43. As shown in FIG. To the 1st conveyance roller 44, and it carries in (winds up) to the 1st winding body 42 from the 1st conveyance roller 44. As shown in FIG.

In the conveyance of the sheet | seat 3 from this 2nd winding body 41 to the 1st winding body 42, the target set 63 located in the conveyance direction with respect to the one surface 31 of the sheet | seat 3 2 form a film. In addition, a second film is formed by the target set 64 located outside the conveyance direction with respect to the other surface 32 of the sheet 3, and two layers of films are formed on both surfaces 31 and 32 of the sheet 3. (The above process is called a 2nd film formation process).

When the conveyance of the sheet | seat 3 from the 2nd winding body 42 to the 1st winding body 41 is complete | finished, the rotation drive of the 1st winding body 41 and the 2nd winding body 42 by the rotating table 4 is stopped. Thereafter, the rotary table 4 is rotated in a reverse rotation (constant rotational speed), and the first winding 41 is rotated counterclockwise by this rotational drive. With the rotation of this 1st winding body 41, the sheet | seat 3 is taken out from the roll 33 to the 1st conveyance roller 44 (it carries out). At this time, the 2nd winding body 42 is rotated clockwise by the rotation drive (constant rotational speed) of the rotary table 4. Hereinafter, the same process as the first film forming step is performed to form a third film on one surface 31 of the sheet 3 by the target set 65, and the other surface of the sheet 3 by the target set 66. A third film is formed on (32), and a third film is formed on both surfaces 31 and 32 of the sheet 3 (the above step is called a third film forming step).

After the third film formation step, the same process as the second film formation step is performed to form a fourth film on one side 31 of the sheet 3 by the target set 67, and the sheet 3 is formed by the target set 68. The fourth film is formed on the other side 32 of the sheet) and the fourth film is formed on both surfaces 31 and 32 of the sheet 3 (the above steps are referred to as a fourth film forming step).

After the fourth film forming step, the same process as the first film forming step is performed to form a fifth film on one side 31 of the sheet 3 by the target set 69, and the sheet 3 by the target set 610. The fifth film is formed on the other side 32 of the sheet) to form the fifth film on both surfaces 31 and 32 of the sheet 3 (the above steps are referred to as the fifth film forming step).

After the fifth film formation step, a process similar to the second film formation step is performed to form a sixth film on one side 31 of the sheet 3 by the target set 611, and the sheet 3 by the target set 612. 6th film | membrane is formed in the other surface 32 of (), and the 6th film | membrane is formed in the both surfaces 31 and 32 of the sheet | seat 3 (the above process is called 6th film formation process), and then the 1st winding body 41 ), The sheet 3 is wound up to finish the film formation on the sheet 3.

Effects of Effects by the Film-forming Apparatus 1

According to the film-forming apparatus 1 which concerns on this embodiment, the conveyance path 27 is set in the film-forming chamber 2, and 40 is formed in the upper part 24 of the film-forming chamber 2 located above this conveyance path 27 side. Two flange balls 26 are formed, and since at least the target portions 5 are detachably provided in the flange balls 26, the number and types of the target portions 5 are not limited, so as to correspond to the conditions of the desired film formation. Can be.

Moreover, since the target part 5 is arrange | positioned at the both sides of the conveyance path 27, a film | membrane can be formed in the both surfaces 31 and 32 of the sheet | seat 3 by the target part 5 by one film-forming process. It is preferable that especially the target part 5 is arrange | positioned in multiple places along both sides of the conveyance path 27, and in the film-forming apparatus 1 which concerns on this embodiment, 24 target parts 5 [12 target sets] (6)] is disposed along both sides of the conveying path 27.

Moreover, since the heater part 8 is provided adjacent to at least one target part 5 in the film-forming chamber 2, each gas which is generate | occur | produced by each target part 5 to the heater part 8 is provided. It can exhaust by this. As a result, the mixing of the respective gases generated by the target portions 5 can be suppressed, and a high quality film can be formed on the sheet 3.

Moreover, since the target material 52 and the gas injection part are provided in the target part 5, in each target part 5, gas can be injected from the gas injection part in the vicinity of the target material 52, As a result, each target part By (5), respectively, stable films can be formed on the sheet 3.

Moreover, since the conveyance path 27 is set so that the sheet | seat 3 may be conveyed in the attitude | position along the perpendicular direction, even if dust etc. generate | occur | produced when forming a film | membrane in the sheet | seat 3, a dust etc. will be carried out. It can prevent that it adheres to the target part 5 (specifically, the target material 52).

Modification example

In this embodiment, six layers of films (first to sixth films) are formed on the sheet 3, but the number of films formed on the sheet 3 is not limited to this, and may be any number of films. For example, five layers of SiO ₂ film, ITO film, MO alloy film, Al alloy film, and Mo alloy film may be formed sequentially from the sheet 3 using the target sets 61 to 610. In this case, for the thickness of the sheet 3, the thickness of the SiO ₂ film is 20 nm, the thickness of the ITO film is 20 nm, the thickness of the MO alloy film is 50 nm, the thickness of the Al alloy film is 200 nm, and the Mo alloy is 50 nm to 180 μm. By setting the thickness of the film to 50 nm, a wiring pattern having a low resistance value of 0.2? / Sq (cm 2) or less can be formed in the sheet 3. In addition, in this embodiment, although the metal film which consists of three layers of MO alloy film, Al alloy film, and Mo alloy film is used as a wiring pattern, it is not limited to this, The metal film which consists of one layer (for example, Ag alloy film) is used. The structure of the metal film may be arbitrarily set.

In addition, although 24 target parts 5 and 16 heater parts 8 are detachably attached to 40 flange balls 26 in this embodiment, the number of the target parts 5 and the heater parts 8 is It is not limited to this. For example, 30 target parts 5 and 10 heater parts 8 may be attached to 40 flange balls 26 so that attachment or detachment is possible. In addition, although 40 flange balls 26 are formed in this embodiment, the number of the flange balls 26 is not limited to this, It can set arbitrarily. In this manner, the number of the flange balls 26 and the number and arrangement of the target portions 5 and the heater portions 8 which are detachably installed in the flange balls 26 can be set in accordance with the desired film forming conditions.

In addition, in this embodiment, the two target parts 5 comprise one set of target sets 6 (61-612), and the target set [6 (61-61) which opposes across the conveyance path 27 is provided. 612) constitutes a set of target groups 7 (71 to 76), but the present invention is not limited thereto. For example, the two target portions 5 facing each other via the conveyance path 27 are provided. One set of target groups may be comprised.

In addition, although the target part 5 of the inner side of the conveyance path 27 and the target part 5 of the outer side of the conveyance path 27 are arrange | positioned in this embodiment, this is a suitable example and is not limited to this. The target part 5 inside the conveyance path 27 and the target part 5 outside the conveyance path 27 do not need to be formed to face each other.

In addition, in this embodiment, although the conveyance path 27 is formed annularly, it is not limited to this, A linear conveyance path may be sufficient, and if it is formed in the film-forming chamber 2, a conveyance path can be arbitrarily set.

In addition, although the set of the target set 6 is comprised by the two target parts 5 in this embodiment, the number of the target parts 5 is not limited to this, It can set arbitrarily.

In addition, although 24 target parts 5 are used in this embodiment, it is not limited to this, You may use arbitrary number of target parts 5.

In addition, although the number of the rollers 43 is 15 in this embodiment, it is not limited to this, It can set arbitrarily.

In addition, in this embodiment, although the diameter of the 1st conveyance roller 44 and the 2nd conveyance roller 45 is larger than the diameter of the roller 43, the diameter of the roller 43 is not limited to this, It can set arbitrarily Do.

In addition, although this embodiment uses the heater part 8 for the purpose of degassing the sheet | seat 3 other than the target part 5 as what is removable to the flange hole 26, it is not limited to this, film-forming room The exhaust hole which exhausts the gas in (2) may be used, or the heater part 8 and the exhaust hole may be used together.

In addition, although a different material is used for each of the target sets 61-612 in this embodiment, it is not limited to this, The same material may be included.

In addition, in this embodiment, although the 1st winding body 41 and the 2nd winding body 42 are driven to rotate at a constant rotation speed, it is not limited to this, The rotation of the 1st winding body 41 and the 2nd winding body 42 is carried out. You may vary the speed according to the film-forming conditions in each target part 5. In this way, the lamination speeds of the first winding body 41 and the second winding body 42 are varied according to the film forming conditions in the respective target portions 5 so as to be laminated on both surfaces 31 and 32 of the sheet 3. The degree of freedom of formation of the film can be increased.

In addition, in the film-forming apparatus 1 which concerns on this embodiment, the sheet | seat 3 is conveyed to both surfaces 31 and 32 of the sheet | seat 3 while conveying once between the 1st winding body 41 and the 2nd winding body 42. FIG. Although the film | membrane of one layer is formed, it is not limited to this, By using the target material 52 of a different material for each target set 61-612, the sheet | seat 3 is made into the 1st winding body 41 and the 2nd winding body ( A plurality of layers of films may be formed on both surfaces 31 and 32 of the sheet 3 during the one-time transfer between 42).

Other Embodiments

Next, the film-forming apparatus 1 by other film deposition apparatus 1 which concerns on this embodiment and other embodiment (henceforth another embodiment) is demonstrated using FIG. The film forming apparatus 1 according to another embodiment adds the partition wall 91 (refer to FIG. 3) to the film forming apparatus 1 according to the present embodiment described above, and the other structure has the same configuration. Therefore, the same code | symbol is attached | subjected about the same structure and the description is abbreviate | omitted.

In another embodiment, as shown in FIG. 3, the partition part 91 is provided for each target set 61-612 of the film-forming chamber 2, and the target sets 61-612 are comrades by the partition part 91. As shown in FIG. Isolate.

The partition wall part 91 is comprised from the extension part 93 extended in the direction orthogonal to the both ends of the wall surface part 92 and the wall surface part 92, respectively. The tip of the extension 93 extends to a position proximate to the sheet 3 on the conveying path 27.

In the film forming apparatus 1 according to another embodiment, as shown in FIG. 3, individual film forming spaces 94 surrounded by the partition 91 and the two surfaces 31 and 32 of the sheet 3 are formed, respectively. Each target set 61 to 612 is individually disposed in the individual film formation space 94.

According to the film-forming apparatus 1 which concerns on other embodiment, since 12 partition wall parts 91 which isolate | separate target sets 61-612 are provided, the sheet | seat (61-612) does not interfere with each other, A film can be formed in 3). Moreover, according to the film-forming apparatus 1 which concerns on other embodiment, although the partition part 91 isolate | separates each target set 61-612 from the film-forming chamber 2, it is not limited to this, The target part 5 It may be to isolate each other. The number of partition walls 91 is not limited to twelve but can be set arbitrarily.

In addition, since the individual film forming spaces 94 surrounded by the partition wall 91 and the sheet 3 (specifically, both surfaces 31 and 32 of the sheet 3) are formed in the film forming chamber 2, one film forming chamber is formed. The film formation to the sheet | seat 3 can be individually performed in several individual film-forming space 94 (12 individual film-forming space 94 in another embodiment) in (2).

Moreover, in the film-forming apparatus 1 which concerns on other embodiment, since it has the same structure as the film-forming apparatus 1 which concerns on the said this embodiment, the effect and the modification by the same structure of the film-forming apparatus 1 which concerns on this embodiment are shown. Has

Other embodiment especially conveys the sheet | seat 3 once between the 1st winding body 41 and the 2nd winding body 42 using the target material 52 of a different material for each target set 61-612. It is a form suitable for forming a plurality of layers of films on both sides 31 and 32 of the sheet 3 during the process.

In addition, although the film-forming apparatus 1 is comprised by one film-forming chamber 2 in embodiment shown in the said FIG. 1 and FIG. 3, it is not limited to this, The film-forming apparatus 1 in which the some film-forming chamber 2 was provided was provided. ) May be configured. For example, as shown in FIG. 4, you may comprise the film-forming apparatus 1 in which the two film-forming chambers 2 were provided.

In the film-forming apparatus 1 shown in FIG. 4, carrying in and out between two film-forming chambers 2 of the sheet | seat 3 is carried out, maintaining the atmosphere of the film-forming chamber 2 between two film-forming chambers 2 in a vacuum state. The partition part 11 for this purpose is provided.

In the partition part 11, as shown in FIG. 4, the sheet | seat 3 is shown from the film forming room 2 (henceforth a left film forming room 2) on the left side of the figure, and the film forming room 2 on the right of the figure (hereinafter A conveying hole 12 for carrying in and out of the dominant film forming chamber 2, and a valve portion 13 for opening and closing the conveying hole 12 while maintaining the atmosphere of the two film forming chambers 2 in a vacuum state. And the first cylinder portion 14 which opens and closes the conveyance hole 12 by depressurizing and pressurizing the valve portion 13, and the conveying hole 12 by depressurizing and pressurizing the valve portion 13. The 2nd cylinder part 15 which displaces a position (moves the conveyance hole 12) is provided. And this valve part 13 is provided in the edge part adjacent to the seating chamber 2 in the partition part 11, The inside (atmosphere) of the seating chamber 2, and the inside of the partition part 11 ( Atmosphere) and communication. That is, the valve part 13 interrupts and communicates with the left film formation chamber 2 and the right film chamber 2 in the boundary which contact | connects the left film formation chamber 2 of the conveyance hole 12. FIG. Moreover, the valve part 13 displaces the inside of the partition part 11 so that the conveyance hole 12 may be closed with an opening in a horizontal plane.

In the film-forming apparatus 1 shown in this FIG. 4, the 2nd winding body 42 and the 2nd feed roller 45 and the roller 43 of the left film formation chamber 2, and the 1st winding body 41 of the dominant film chamber 2 are shown. ) And the conveyance path 27 located below the left film forming chamber 2 and the right film chamber 2 using the 1st conveyance roller 44 and the roller 43 are used. In addition, it is a suitable example to use the conveyance path 27 located below the left film formation chamber 2 and the right film chamber 2 in the illustration, It is not limited to this, The 1st of the left film deposition chamber 2 is used. Left film forming chamber using the winding body 41, the first conveying roller 44, the roller 43, and the second winding body 42, the second conveying roller 45, and the roller 43 of the dominant film chamber 2 ( 2) and the conveyance path 27 located above the figure of the dominant film chamber 2 may be used.

According to the film-forming apparatus 1 in which the said two film-forming chambers 2 and the partition part 11 were provided, the conveyance path 27 of the sheet | seat 3 compared with the film-forming apparatus 1 shown in said FIG. 1 and FIG. 3 (conveying) Path) can be further extended, and many target portions 5 can be provided. Therefore, according to the film-forming apparatus 1 shown in FIG. 4, compared with the film-forming apparatus 1 shown in FIG. 1 and FIG. 3, multi-layer multilayer film formation can be performed. In addition, since the film-forming apparatus 1 shown in FIG. 4 can use the conveyance path 27 of two film-forming chambers 2, the film-forming apparatus 1 shown in FIG. 1 and FIG. 3, for example, requires two film-forming processes. By forming the process once, the number of processes can be reduced, and as a result, the production efficiency can be improved. Moreover, in the film-forming apparatus 1 shown in FIG. 4, since the partition part 11 which can respectively block the space of two film-forming chambers 2 is provided, it is individual in each of the two film-forming chambers 2, respectively. Film formation can also be performed. That is, in the film-forming apparatus 1 shown in FIG. 4, the freedom degree of film-forming is high compared with the film-forming apparatus 1 shown in FIG. 1 and FIG.

In addition, this invention can be implemented in other various forms, without deviating from the mind, a knowledge, or a main characteristic. Therefore, the above embodiment is merely a mere example in all respects and should not be interpreted limitedly. The scope of the invention is indicated by the claims and is not limited in any way by the text of the specification. In addition, all the modifications and changes which belong to the equal range of a claim are within the scope of the present invention.

In addition, this application claims the priority based on Japanese Patent Application No. 2010-050960 for which it applied on March 8, 2010. All references are hereby incorporated by reference herein.

The present invention can be applied to a film forming apparatus for forming a film on a sheet.

1: Deposition apparatus 11: Partition part
12: conveying hole 13: valve portion
14: first cylinder portion 15: second cylinder portion
2: deposition chamber 21: vacuum chamber
22: lower part of the deposition chamber 23: exhaust hole
24: upper part of the deposition chamber 25: flange
26: flange ball 27: carrier path
3: sheet 31: one side
32: other side 33: roll
4: turntable 41: the first volume
42: Volume 2 43: Roller
44: first feed roller 45: second feed roller
5: target part 51: one end of the target part
52: target material 6 (61-612): target set
7 (71 to 76): Target group 8: heater section
81: one end of the heater portion 91: partition wall portion
92: wall portion 93: extension portion
94: individual tabernacle space

Claims (12)

In a roll-to-roll type film forming apparatus for forming a film on a sheet:
A conveying path for conveying the sheet is set in the film forming chamber, and a plurality of casing balls are formed in an upper portion of the film forming chamber located above the conveying path side,
A target portion for forming a film on the sheet conveyed to the conveying path in the casing ball is detachably provided;
The film forming apparatus, wherein the target portion is disposed on both sides of the conveying path. The method of claim 1,
The said target part is arrange | positioned in multiple places along the both sides of the said conveyance path, The film-forming apparatus characterized by the above-mentioned. The method according to claim 1 or 2,
And the gas injection portion for injecting a target material, which is a film forming material, and a reactive gas corresponding to the target material, into the film formation chamber. The method of claim 3, wherein
And a heater portion for heating the sheet is provided adjacent to one or more of the target portions in the deposition chamber. The method according to claim 1 or 2,
And the conveying path is set so that the sheet is conveyed in a posture along the vertical direction. The method according to claim 1 or 2,
A film forming apparatus, wherein partition walls are provided to isolate the target portions. The method according to claim 6,
A film forming apparatus, wherein a plurality of individual film forming spaces surrounded by the partition wall part and the sheet are formed in the film forming chamber. The method of claim 3, wherein
And the conveying path is set so that the sheet is conveyed in a posture along the vertical direction. The method of claim 4, wherein
And the conveying path is set so that the sheet is conveyed in a posture along the vertical direction. The method of claim 3, wherein
A film forming apparatus, wherein partition walls are provided to isolate the target portions. The method of claim 4, wherein
A film forming apparatus, wherein partition walls are provided to isolate the target portions. The method of claim 5, wherein
A film forming apparatus, wherein partition walls are provided to isolate the target portions.

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