KR20110055212A - Vibration isolation mount using mr damper having magnetic and electro-magnetic shielding device - Google Patents

Abstract

PURPOSE: A vibration-proof mount using an MR damper including a device for opening and closing a magnetic field and an electromagnetic field is provided to minimize influence of an electromagnetic field or a magnetic field generated during the operation of an MR damper. CONSTITUTION: A vibration-proof mount comprises an air barrel(10), an air spring(20), a damper(30), and a support rod(40). The air barrel has a cylindrical shape in which the top is pierced. The air barrel comprises a bottom plate(11), a side cylinder(12), an air barrel flange(13), and an air inlet(14). The air spring is combined with the upper side of the air barrel. The air spring comprises a bellows(21) and a bellows flange(22). The damper is coupled with the center of the internal space of the air spring and the air barrel. The support rod is inserted into the hole of the rod of the damper.

Description

Vibration Mount Using MR Damper Having Magnetic and Electro-Magnetic Shielding Device

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a vibration mount which can be used as a vibration control device for a device requiring precise vibration control, such as a production facility for producing TFT LCDs, semiconductors and the like.

The dustproof system supports the mass, which is the dustproof object, by the spring (here spring means all kinds of elastic bodies that accumulate potential energy due to deformation as well as ordinary metal springs) and dampers that absorb and dissipate kinetic energy as heat. For example, this refers to an exercise system for preventing vibration generated from an object to be transmitted to the surroundings or transmission of surrounding vibrations to the object to be protected from vibration. The mass, spring, and damper are referred to as the three components of vibration. In addition, the anti-vibration mount is a spring or a combination of the spring and the damper and having an attachment structure, means a mechanism configured to support the dust-proof equipment on the floor.

Recently, devices that operate in a strict vibration environment are used in automated precision production facilities such as semiconductor factories and LCD factories. These devices block vibrations transmitted from the surroundings by using vibration mounts made of springs with very low spring constants, such as metal coil springs and air springs, in order to block minute vibrations transmitted from the surroundings.

As a spring used for dustproofing of precision equipment, air spring is often used. The air spring can constitute a dustproof system having a low natural frequency of less than 3Hz, which can achieve a higher dustproof effect than the metal spring. However, air springs also have almost no internal attenuation like metal springs, and thus have long transient response times and greatly amplify vibrations in the resonance region. Therefore, the anti-vibration system constructed using the air spring has low dynamic stability and vibrates greatly due to the vibration generated by itself or abnormal vibration excitations transmitted from the surroundings, and the transient vibration response time is long. It is too long and there is a problem in normal equipment operation.

Damper is used in many ways, but in the field of vibration control, it means an element that functions to suppress vibration by converting kinetic energy of a vibrating object into heat and dissipating it to the surroundings. A typical damper is a shock absorber used in an automobile, and includes a piston having an orifice, which is a small hole, in a closed cylinder filled with a gas or liquid fluid, and the piston moves due to vibration. When the fluid flows through the orifice at a high speed, frictional heat is generated by the viscosity of the fluid, and thus the kinetic energy of the vibrating body is dissipated as heat. The damper as described above suppresses the vibration by applying a force proportional to the operating speed of the piston (proportional constant referred to as "damping coefficient") to the vibrating body.

When the spring and damper are used together in the vibration isolator system, the transient oscillation time is greatly shortened as compared with the use of the spring alone, and the temporary vibration is quickly extinguished. However, in the case of steady vibration by continuous excitation, the dustproofing efficiency is slightly lower than when only the spring is used.

Recently, a semi-active control type vibration control system using various types of dampers has been developed. In the semi-active control system, the anti-vibration control system prevents the surrounding vibrations from being transmitted to the target equipment by the spring-only vibration mount in the normal operating state. If the vibration is large, the damper is operated to restrain the vibration by forcibly restraining the vibration movement of the dustproof equipment.

Recently, a magnetic fluid damper (Magneto-Rheological Damper, commonly referred to as an "MR damper") using a magneto-Rheological Fluid as a fluid filled in a cylinder of a damper is also referred to herein as "MR damper." Has been developed and used. MR dampers are commercially available as commercial items (USA LOAD, Model No.: RD-1005-3, etc.), and its internal structure consists of a cylinder, a piston with an orifice, and a coil wound around the piston as shown in FIG. The inside of the cylinder is filled with a magnetorheological fluid (Magneto-Rheological Fluid, MR fluid, hereinafter also referred to as "MR fluid").

The magnetorheological fluid filled inside the MR damper is a fluid whose fluid viscosity changes according to the strength of the surrounding magnetic field.When electricity flows through the coil and a magnetic field is formed, the fluid viscosity increases, causing a large resistance force when passing through the orifice. The damper has a large damping coefficient, and if no electricity flows, the fluid has low viscosity, resulting in a damper having a small damping coefficient. That is, the MR damper is a variable damper that can adjust the damping coefficient according to the strength of the current flowing through the coil.

Recently, the present applicant has developed a motion control device (motion controller) that is a vibration-mounted mount that incorporates a spring damper and an MR damper by incorporating an MR damper inside the air spring, and has received a patent registration No. 10-0811828. This patent invention has no dust supplying MR damper under normal vibration state, so it is a dustproofing system with mass and spring only, so it has high dustproofing efficiency, and when abnormal big vibration is detected, it supplies electricity to MR damper and uses both spring and damper together. It is proposed a dustproof system that quickly stops transient transient vibrations as a system. (In this way, the method of controlling vibration by passively changing the characteristics of the vibration damper according to the vibration situation of the vibrating body is called semi-active vibration control method. The method of controlling vibration by actively applying force to the vibrating body according to the vibrating state of the vibrating body is called the agricultural vibration control method.)

The anti-vibration mount using the MR damper as described above is mainly applied to the vibration control of ultra-precision equipment, such as semiconductor manufacturing equipment, these ultra-precision equipment can be quite likely to cause a malfunction due to the influence of electromagnetic or magnetic fields. As such, if a normal MR damper is used for vibration control of precision equipment that may be affected by electromagnetic or magnetic fields, the precision equipment subject to dust protection may malfunction due to the influence of electromagnetic or magnetic fields generated when the MR damper is operated. .

As described above, it is preferable to construct a semi-active control system using an anti-vibration mount using an MR damper for the highly accurate vibration of the equipment, but it is possible to minimize the influence of electromagnetic or magnetic fields generated during operation of the MR damper. A new type of dust mount is required.

Since the transmission characteristics of the electromagnetic and magnetic fields are different from each other, the dustproof mount should be provided with electromagnetic shielding means and magnetic field shielding means at the same time.

In order to solve the above technical problem, in the present invention, an anti-vibration mount having an MR damper adds an air reservoir to the lower portion of the air spring so that the air spring always supports the equipment with a constant force, and has an MR shield with electromagnetic and magnetic fields. The damper was made to couple to the inside of the air cylinder.

In the shielding device, the magnetic shielding device is made of pure iron, which has a high permeability, into a cylindrical shape with a bottom, so that a coil for applying a magnetic field can be inserted therein. The magnetic shielding device can be charged inside.

Dust damping mount using the MR damper of the present invention is the same function related to the vibration mount and the vibration control using the conventional MR damper, the magnetic field and electromagnetic field generated during the operation of the MR damper is completely shielded does not interfere with the operation of the peripheral precision equipment .

The dustproof mount using the MR damper of the present invention is a modification of the patent invention related to the motion controller according to claims 1 and 2 of the "No. 10-0811828" High precision equipment dustproof motion controller using Mr damper and motion control system using the same ". The invention is an invention in which the damper is specially improved in the configuration of the registered patent.

As shown in Figure 2, the configuration of the anti-vibration mount using the MR damper of the present invention, the air cylinder 10 is fixed to the bottom of the site where the equipment is to be installed, the air spring 20 is coupled to the upper surface of the air cylinder, the air cylinder And a damper 30 coupled to the inner space center of the air spring, and a support rod 40 inserted into the damper and coupled to the dustproof equipment to transfer the load of the equipment to the vibration mount.

Air cylinder 10 is a cylindrical shape with an upper opening, a bottom plate 11 fixed to the bottom of the site where the equipment is to be installed, a side cylinder 12 attached to the upper surface of the bottom plate, is attached to the top of the side cylinder Air cylinder flange 13, and the air inlet 14 is coupled to the side cylinder. At the edge of the bottom plate 11, a plurality of fixing holes for fixing the air cylinder 10 to the bottom with anchor bolts are drilled.

The air spring 20 is configured similarly to a conventional air spring, and is composed of a bellows 21 made of a flexible rubber membrane, and a bellows flange 22 coupled to the top and bottom of the bellows. A jaw is formed at both ends of the bellows 21 so as to be snapped into the groove formed in the bellows flange 22 so that the air filled therein does not leak. And the outer surface of the upper and lower bellows flange 22 is formed with a groove in which the sealing material 23, such as O-ring, gasket can be installed.

Conventional air springs are manufactured to attach a flange to both ends of the bellows, and to have a fixing bolt hole and an air inlet for fixing to the equipment and the floor to the flange, the air spring 20 of the present invention is made of a conventional air spring A bellows flange may be formed by drilling a hole having a sufficient size in the center of both flanges, and may be manufactured by processing a groove for installing a sealing material on the outer surface of the bellows flange.

The damper 30 is coupled to the inner space of the air cylinder 10 and the air spring 20, as shown in Figure 3, is fixed to the bottom plate 11 of the air cylinder 10. The damper 30 has an outer cylinder 31, an inner cylinder 32, a piston 33 that moves up and down inside the inner cylinder 32, a rod 34 coupled to the center of the piston, and an upper end of the rod. It is composed of a blocking plate 35 to be attached, a coil bundle 36 mounted in the inner cylinder, and an MR fluid 37 filled in the inner cylinder.

The outer cylinder 31 includes a body 311 which is a bottom-closed container and a cover plate 312 covering the upper end of the body 311, and an extension tube 313 may be provided at the upper end of the cover plate 312. . A hole is formed in the center of the cover plate 312 so that the rod penetrates. If the extension tube 313 is provided, it is possible to prevent the MR fluid 37 filled therein from overflowing. The outer cylinder 31 is made of aluminum or aluminum alloy, copper or copper alloy, which is an electrical conductor. When the outer cylinder 31 is made of an electrical conductor, electromagnetic waves are shielded to prevent leakage to the outside.

As the inner cylinder 32 is mounted inside the outer cylinder, a groove to which the coil bundle 36 may be coupled is formed at an inner side surface of the inner cylinder 32. When the inner cylinder 32 is integrally manufactured, it is difficult to combine the coil bunch 36, and thus the upper and lower or left and right two parts are manufactured, and the coil bundle 36 is mounted, and then the two parts are combined. . Inner cylinder 32 is made of high permeability pure iron, such pure iron shields the magnetic field to prevent leakage to the outside.

The piston 33 is a plate that moves up and down inside the inner cylinder 32, the rod 34 is coupled to the central portion, the orifice 331 may be processed on the surface of the plate.

The rod 34 is coupled to the center of the piston 33, the hole is formed in the upper end of the central axis.

The blocking plate 35 is attached to the upper end of the rod 34 and is coupled to the bellows flange 22 of the upper end of the air spring 20.

The coil bundle 36 is mounted inside the inner cylinder 32, and forms a magnetic field when electricity flows. The coil bundle 36 is made of a coil shape by winding an insulated wire several times, and the wires at both ends flow out to receive electricity. Since the piston 33 is reciprocated to the center hole of the coil, it is preferable to wind the wire around the rigid pipe so that the piston can move smoothly.

The MR fluid 37 is filled in the inner cylinder 32, and is a fluid whose viscosity rises under the influence of a magnetic field.

The support rod 40 is coupled to the dustproof equipment to transfer the load of the equipment to the air spring 20 and the damper 30, the support plate 41 having a fixing hole that can be coupled to the dustproof equipment In the center of the rod 42 is coupled. Rod 42 is inserted into the hole formed in the upper end of the rod 34 of the damper 30 is coupled, the end of the rod 42 is preferably spherical surface is free to rotate the support rod.

The operation of the dust mount is as follows.

When the dustproof equipment is normally operated, electricity is not supplied to the coil bundle 36 of the damper 30. In this case, the MR fluid 37 filled in the damper has a very low viscosity so that the piston 33 and the coil bundle ( The clearance of 36 or the orifice formed in the piston 33 frees the flow of fluid so that the damper does not exert a force on the piston to resist movement. In this case, the dustproof equipment is the same as being supported only by the air spring 20, the vibration is blocked by the air spring. An air cylinder 10 is attached to the lower portion of the air spring 20 so that the air spring 20 may be deformed according to the vibration of the dustproof equipment. The pressure change is small, and thus the air spring 20 is a spring with a very low spring constant, and thus a vibration mount having a large vibration blocking effect.

If the dustproof equipment temporarily vibrates due to an abnormal large external load, it detects this with a sensor and supplies electricity to the coil bundle 36 of the damper 30. When electricity is supplied to the coil bundle, a magnetic field is formed in the damper 30 by the coil, and the MR fluid filled in the damper 30 is greatly influenced by the magnetic field to significantly increase the viscosity of the fluid. When a highly viscous fluid passes through the gap between the piston 33 and the coil bundle 36 or the orifice 331 formed in the piston 33, a large viscous resistance is generated, which functions as a damper by resisting the movement of the piston. . When the damper 30 functions as a damper as described above, the vibration of the vibrating body is forcibly stopped, and the equipment is stabilized.

When electricity flows in the coil bundle 36, a strong magnetic field and an electromagnetic field are formed around the coil, which may adversely affect the equipment or the person in the area of influence. In the dustproof mount of the present invention, the magnetic field is a soft iron having a high permeability. The inner cylinder 32 is almost completely shielded, and the electromagnetic field is completely shielded by the outer cylinder 31 made of an electric conductor.

The present invention can be used as a precision manufacturing equipment such as semiconductors, LCDs and the like for dustproof devices of precision equipment sensitive to the influence of magnetic or electromagnetic fields.

1 is a block diagram of a conventional MR damper.

Figure 2 is a block diagram of a vibration mount using the MR damper of the present invention.

3 is a block diagram of a damper.

<Important component number>

10: air cylinder, 20: air spring, 30: damper, 40: support rod,

11: bottom plate, 12: side cylinder, 13: air cylinder flange, 14: air inlet,

21: bellows, 22: bellows flange, 23: sealing material,

31: outer cylinder, 32: inner cylinder, 33: piston, 34: rod, 35: blocking plate,

36: bundle of coils, 37: MR fluid.

Claims (2)

As a cylindrical shape with an upper opening, a bottom plate 11 fixed to the bottom of the site where the equipment is to be installed, a side cylinder 12 attached to an upper surface of the bottom plate, and an air cylinder flange 13 attached to an upper end of the side cylinder. And, consisting of an air inlet (14) coupled to the side cylinder, the air cylinder (10); The air spring 20, which is coupled to the upper surface of the air reservoir, is composed of a bellows 21 made of a flexible rubber membrane, and a bellows flange 22 coupled to the top and bottom of the bellows. It is coupled to the center of the inner space of the air cylinder 10 and the air spring 20, the body 311 is made of an electric conductor and fixed to the bottom plate 11 of the air cylinder 10, the bottom of the container 311 and electric The outer casing 31, which is made of a good conductor and consists of a cover plate 312 covering the upper end of the body 311, and is mounted in the outer casing 31, is made of pure iron and has the following coil bundle 36 on the inner side. The inner cylinder 32 is formed with a groove that can be coupled, the piston 33 to move up and down inside the inner cylinder 32, the hole is formed in the central axis as being coupled to the central portion of the piston 33 A rod 34, a blocking plate 35 attached to an upper end of the rod 34, a coil bundle 36 mounted in the inner cylinder 32, and an MR fluid 37 filled in the inner cylinder. Damper 30 composed of; And, it is inserted into the hole of the rod 34 of the damper 30, coupled to, and coupled to the dustproof target equipment to transfer the load of the equipment to the air spring 20 and the damper 30, dustproof Support rod 40 consisting of a support plate 41 having a fixing hole that can be coupled to the target equipment, and a rod 42 coupled to the center of the support plate and inserted into the hole of the rod 34 of the damper 30. ; Composed of, dustproof mount. The method of claim 1, The outer cylinder (31) of the damper (30) is characterized in that it further provided with an extension pipe (313) on the top of the cover plate (312), dustproof mount.

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