KR20110045489A - Apparatus controlling the ambient pressure of spray nozzle uniformly ? Coating apparatus for solid powder using the same - Google Patents

Abstract

PURPOSE: An apparatus controlling ambient pressure of a spray nozzle uniformly is provided to uniformly form the ambient pressure of a spray nozzle and the flow field inside a vacuum chamber by consecutively exhausting aerosol flowing into the vacuum chamber. CONSTITUTION: An apparatus controlling ambient pressure of a spray nozzle uniformly comprises: a vacuum chamber(23); a spray nozzle(15) which is connected to a transport pipe(14) and has a discharge hole inside the vacuum chamber; vacuum exhaust pipes(25,28) which are connected to one side of the vacuum chamber and form symmetric structure; and an exhaust pump(24) mounted on the vacuum exhaust pipes.

Description

Apparatus controlling the ambient pressure of spray nozzle uniformly & Coating apparatus for solid powder using the same}

The present invention maintains the constant pressure around the injection nozzle so that any coating speed of the transporting gas injected from the nozzle located inside the vacuum chamber is continuously and continuously expressed so that any solid powder can be uniformly coated on the substrate located inside the vacuum chamber. It relates to a device that can be controlled.

When spray coating powder on the substrate inside the vacuum chamber through the spray nozzle, in order to continuously coat the powder on the substrate at a uniform spray speed, the transport gas flowing into the vacuum chamber and the remaining powder after coating are continuously vacuumed. The exhaust air must be continuously maintained at any constant value around the injection nozzle located inside the vacuum chamber.

Therefore, in the powder spray coating method, in order to maintain a constant flow field and pressure around the injection nozzle located inside the vacuum chamber, the position of the vacuum exhaust device, the connection portion between the vacuum exhaust pipe and the vacuum chamber, the substrate position in the vacuum chamber, etc. Appropriately set, the above object can be achieved.

Pressure control method inside the vacuum chamber for coating the powder on the substrate through the injection nozzle located in the conventional vacuum chamber is as follows.

(1) How to adjust the pressure inside the vacuum chamber by evacuating in the left or right direction with respect to the powder injection direction

1) US 6,759,085 ("Method and apparatus for low pressure cold spraying"; PCT / US03 / 18758) places a cold spray gun (labal nozzle; supersonic nozzle) inside a vacuum chamber, and to the right with respect to the nozzle direction. It is described as a technique for connecting the vacuum exhaust device in the direction, spray coating the powder to the inert transport gas through the nozzle, and also recover the powder remaining after the coating. The patent specification As shown in Fig. 1, since the exhaust position for recovering the powder and exhausting the inert transport gas is located on the right side with respect to the powder ejection direction, the pressures around the nozzle and under the substrate and at any position inside the vacuum chamber may be different from each other. There is no choice but to. That is, the closer to the connection to which the vacuum exhaust pump is connected, the lower the vacuum pressure, and the farther the higher the vacuum pressure. If the gas is continuously exhausted from the chamber in which the inert transport gas is not introduced into the vacuum chamber, as time passes, there is almost no pressure difference at any position of the vacuum chamber, and eventually the pressure inside the vacuum chamber is uniformly formed. However, in the powder spray coating system, since the transport gas must be introduced into the vacuum chamber to continuously coat the powder, the flow field and the pressure distribution inside the vacuum chamber due to the transport gas inflow are attributable to the connection position of the vacuum exhaust pump. Inevitably, the pressure distribution is different. In addition, in the system using the Laval nozzle, the injection speed of the transport gas is determined by the ratio of the pressure at the front end of the injection nozzle to the pressure around the nozzle for the supersonic expression (the state of the nozzle neck and the outlet cross-sectional area of the Laval nozzle is already determined). In order to express any constant spray coating rate, it is necessary to constantly control any pressure around the nozzle, so that the flow of transport gas continuously introduced can be made constant. Therefore, the above problems must be solved in order to continuously and consistently coat the powder.

2) Republic of Korea Patent Registration 10-0724070 ("Composite Structure and Manufacturing Method and Manufacturing Device"; PCT / JP2000 / 007076), Republic of Korea Patent Registration 10-0767395 ("Composite Structure"; PCT / JP2000 / 007076), Republic of Korea Patent Registration 10-0695046 ("Low Temperature Molding Method of Ultrafine Particles Brittle Material"; PCT / JP2003 / 006640), Republic of Korea Patent Registration 10-0499613 ("Method of Manufacturing Electron Emission Device, Electron Atomic Light Emitting Device and Image Forming Device"), Republic of Korea Patent Registration 10-0531165 ("Method and apparatus for fixing carbon fibers on substrate") and US Patent No. 7,306,503 ("Method and apparatus of fixing carbon fibers on a substrate using an aerosol deposition process") are sprayed by aerosol deposition. The coating method is presented. In the same manner as above, the vacuum exhaust pump is installed on the right side with respect to the powder ejection direction of the ejection nozzle located inside the vacuum chamber, so that the powder is ejected by the pressure difference between the aerosol chamber and the vacuum chamber so that the powder is placed on the substrate located inside the vacuum chamber. It is a technique to be coated. However, there is a feature that a subsonic nozzle is used instead of a spray nozzle as a laval nozzle (supersonic nozzle) inside the vacuum chamber. Accordingly, when air is used as the transport gas, the system can express the injection speed of the transport gas at 340 m / s or less, and in addition, helium gas is used to express the injection speed of the transport gas at 340 m / s or more. to be. That is, in order to implement the injection speed, the speed is determined by the ratio of the pressure on the front face of the injection nozzle and the pressure (pressure around the injection nozzle) inside the vacuum chamber. For example, when the carrier gas is used as air in the system, when the ratio of the pressure Po at the front end of the injection nozzle to the internal pressure of the vacuum chamber (pressure around the injection nozzle; P) is less than 0.528, it is about 340 m /. s expresses the injection rate (room temperature) of the transport gas. Accordingly, the coating object may be achieved only by evacuating the transport gas flowing into the vacuum chamber to maintain a constant pressure around the injection nozzle inside the vacuum chamber, and expressing a certain arbitrary injection speed.

On the other hand, the specification of the Republic of Korea Patent Registration 10-0724070 ("Composite structure and its manufacturing method and manufacturing apparatus"; PCT / JP2000 / 007076) as shown in Figure 1, since the exhaust pump is located on the right side with respect to the powder injection direction, The pressures on the right and left sides of the injection nozzle are not constant, and the pressure between the upper part of the substrate and the lower part of the substrate is different. In order to maintain a constant pressure inside the vacuum chamber without such a pressure difference, a vacuum pump capable of continuously exhausting a mass flow rate much larger than the mass flow rate of the transport gas flowing into the vacuum chamber is needed, and also After the transport gas and the coating, the remaining powder is not continuously exhausted to the connecting pipe connected to the exhaust pump on the left side, and a new flow field (vortex) is generated by hitting the right side wall except the exhaust pipe cross section. , The pressure is distributed differently on the floor, the ceiling is not maintained a constant pressure, the injection speed also can not be kept constant, there is a problem that it is difficult to control the coating efficiency, coating thickness and the like.

(2) A method of adjusting the pressure inside the vacuum chamber by evacuating the upper or lower direction with respect to the powder spraying direction

1) Republic of Korea Patent Registration 10-0846148 ("Method and Apparatus for Forming Evaporation Thin Film Using Solid Powder"), Republic of Korea Patent Registration 10-0490112 ("Manufacturing Method of Fiber and Electron Emitting Device, Electron Source and Image Display Device Using the Fiber Each manufacturing method ") applies an aerosol deposition method and discloses coating a powder on a substrate by adjusting a pressure inside the vacuum chamber by installing a vacuum exhaust device downward with respect to the powder injection direction. As shown in FIG. 3 of the Patent Registration 10-0846148 and FIG. 2 of the Patent Registration 10-0490112, the sprayed transport gas and the remaining powder after coating are evacuated downward with respect to the powder spraying direction. As a new flow field (vortex) is generated by continuously hitting a wall excluding the end face of the connection exhaust pipe without continuously exhausting the connection pipe connected to the exhaust pump, pressure is differently distributed at any position in the vacuum chamber, and the pressure around the injection nozzle is also reduced. Since it cannot be kept constant and a constant spray speed cannot be maintained, there is a problem that it is difficult to control the coating efficiency, coating thickness and the like.

As described above, in the conventional powder spray coating system, the pressure control method inside the vacuum chamber is one of the left direction ([FIG. 1A]) and the right one direction ([FIG. 1B]) with respect to the powder spraying direction (based on the drawing). After installing a vacuum exhaust device in one downward direction ([FIG. 1c]) and one upward direction ([FIG. 1d]), the aerosol flowing into the vacuum chamber is sprayed to coat the powder, and then continuously transport gas and remain after the coating. The powder can be exhausted. However, in the conventional pressure control method inside the vacuum chamber, the position of the vacuum exhaust pump, the cross-sectional area of the vacuum exhaust connection pipe, and the position of the substrate are not appropriate, and as described above, the pressure around the nozzle located inside the vacuum chamber is kept constant. It is a well known fact that there is a problem in that a flow field accompanied with vortices is formed inside the vacuum chamber.

Accordingly, in order to continuously coat any powder at a critical coating speed or more, a method and apparatus for forming a constant flow field in the vacuum chamber by maintaining a constant pressure around the nozzle inside the vacuum chamber and spray coating the powder are required. .

It is an object of the present invention to provide a method and apparatus for continuously forming a flow field inside a vacuum chamber and a pressure around an injection nozzle located inside the vacuum chamber by continuously exhausting aerosols introduced into the vacuum chamber.

In the present invention, the following means are applied to solve the above problems.

First, the vacuum exhaust position is set in the vacuum chamber, but the transport gas flowing into the vacuum chamber and the remaining powder after coating flow along the substrate surface, so that the vacuum exhaust pipe is symmetrically in both sides or the radial direction at the connection to the vacuum chamber. By connecting to each of the vacuum exhaust through the exhaust pipe in a predetermined amount continuously, a constant flow field is formed inside the vacuum chamber to maintain a constant pressure around the nozzle located inside the vacuum chamber.

Second, while maintaining a constant pressure around the nozzle located inside the vacuum chamber required for powder spray coating at a certain pressure, the pressure gauge around the nozzle so that the coating is uniform on any substrate is located inside the vacuum chamber the vacuum exhaust Controlled by arbitrary pressure in conjunction with the exhaust mass flow regulator installed in the pump.

Third, in order to prevent vortices from occurring in the space occupied by the substrate holder (transfer device, etc.) located inside the vacuum chamber, the substrate holder (transfer device, etc.) is installed outside the vacuum chamber, and the substrate is formed in close contact with the bottom of the vacuum chamber. Allow the flow field to form.

According to the present invention, it is possible to constantly adjust the pressure around the injection nozzle inside the vacuum chamber, thereby solving various problems raised in the conventional pressure control method.

Specifically,

First, through the vacuum exhaust pipe symmetrically connected to the transport gas flowing into the vacuum chamber and the remaining powder after coating, respectively, the vacuum exhaust in both sides or the radial direction to evacuate any pressure around the injection nozzle It can be controlled constantly.

Second, by placing the substrate in close contact with the bottom of the vacuum chamber to minimize the vortices generated around the substrate to form a constant flow field by the powder spray coating, it is possible to control the pressure inside the vacuum chamber and the injection nozzle uniformly.

Third, it is very easy to realize a constant coating speed of the powder (metal, ceramic, polymer, special material, etc.) to be sprayed with a constant pressure around the nozzle located inside the vacuum chamber.

Fourth, the constant coating speed is maintained by the constant pressure around the nozzle located inside the vacuum chamber, so that the coating efficiency of the powder can be improved, which can drastically reduce the amount of wasted powder (uncoated left). .

As a result, according to the present invention, since the pressure around the injection nozzle inside the vacuum chamber is constantly controlled, the spraying speed is continuously exhibited, thereby increasing the powder spray coating efficiency.

Ⅰ. A device that constantly controls the pressure around the injection nozzle

The present invention vacuum chamber; An injection nozzle connected to a transport pipe and having a discharge port inside the vacuum chamber; A vacuum exhaust pipe connected to a side of the vacuum chamber to form left and right symmetry; And an exhaust pump mounted to the vacuum exhaust pipe. It provides a device for constantly controlling the pressure around the injection nozzle characterized in that it comprises a.

In the present invention, the injection nozzle is a slit-type injection nozzle having a discharge port long in the front and rear direction, the vacuum exhaust pipe is a device for controlling the constant pressure around the injection nozzle, characterized in that connected to the left and right sides of the vacuum chamber together to provide.

In addition, in the present invention, the injection nozzle is a slit-type injection nozzle having a discharge port long in the front and rear direction, the vacuum exhaust pipe is a device for constantly controlling the pressure around the injection nozzle, characterized in that connected to the front, rear, left and right sides of the vacuum chamber Comes with.

In addition, in the present invention, the injection nozzle is a circular injection nozzle having a circular discharge port, the vacuum exhaust pipe is provided with a device for constantly controlling the pressure around the injection nozzle, characterized in that connected to the four sides front, rear, left and right of the vacuum chamber. .

In addition, the present invention provides a device for constantly controlling the pressure around the injection nozzle, characterized in that the vacuum chamber connection portion and the vacuum exhaust pipe connection portion in contact with the vacuum chamber and the vacuum exhaust pipe is configured in the same shape and cross-sectional area.

In addition, the present invention is provided in the vacuum pump exhaust mass flow rate adjusting device for adjusting the exhaust amount; And a pressure gauge installed around the injection nozzle; It further provides a device for constantly controlling the pressure around the injection nozzle, characterized in that the configuration further comprises.

In addition, in the present invention, the vacuum exhaust pipe is provided with an apparatus for constantly controlling the pressure around the injection nozzle, characterized in that the exhaust pump and connected to form an integral (main body) while maintaining the left and right symmetry.

In addition, in the present invention, the opening portion is formed in all or part of the lower surface of the vacuum chamber, the lower portion of the vacuum chamber substrate transfer device; Is provided, the opening is provided with a device for constantly controlling the pressure around the injection nozzle, characterized in that configured to be closed by the upper surface of the substrate transfer device.

Hereinafter, specific embodiments of the present invention will be described in detail with the accompanying drawings.

As described above, it is difficult to maintain a constant flow field and pressure around the injection nozzle due to the aerosol flowing into the vacuum chamber because the conventional method and location of the vacuum exhaust pipe and the exhaust pump is not appropriate. That is, conventionally, the exhaust pump is installed on one of the left side ([FIG. 1A]), the right side ([FIG. 1B]), the lower side ([FIG. 1C]), and the upper side ([FIG. 1D]) with respect to the aerosol injection direction. The aerosol flowing into the vacuum chamber was continuously exhausted. However, in the conventional system, it is difficult to maintain a constant pressure around the injection nozzle, depending on the position of the exhaust pump, and a vortex flow field is formed on the inner wall of the vacuum chamber due to the transport gas continuously introduced and the residual powder after coating. When performing the coating process, there was a problem in that it is difficult to maintain constant coating efficiency and arbitrary coating speed of powder as well as loss of powder.

In general, the powder spray coating is coated by spraying the transport gas and powder from the spray nozzle inside the vacuum chamber, and as shown in (a) of FIG. 2, the aerosol (remaining powder after transport and coating) is Follow the mechanism flowing along the substrate upper surface. In particular, depending on the shape of the injection nozzle, the flow field flowing through the aerosol on the upper surface of the substrate appears different, as shown in (b) of Figure 2, using a slit-type injection nozzle (rectangular subsonic or supersonic nozzle) In this case, the main stream is generated in both directions in which the width of the injection nozzle is large, and the flow is minimal in the direction in which the width of the injection nozzle is small. Unlike the slit-type injection nozzle, when using a circular injection nozzle (subsonic or supersonic nozzle), as shown in (c) of FIG. 2, the flow field of the aerosol occurs in the radial direction.

Therefore, in the present invention, as shown in [3] to [5], the effect of the invention is minimized by minimizing the influence on the aerosol injection direction and connecting the vacuum exhaust pipes symmetrically to the vacuum chamber so as to exhaust them at the same displacement. To achieve the purpose. That is, depending on the shape of the injection nozzle, when applying a slit-type injection nozzle (supersonic or subsonic nozzle), the vacuum exhaust pipe is disposed on both the left and right sides (refer to [Fig. 3]) or on four sides (radial direction). Vacuum exhaust by connecting, and in the case of using a circular injection nozzle (subsonic or supersonic nozzle) connected to the four sides (radial direction, radial direction, see Fig. 4) front and rear and symmetrically evacuated and placed inside the vacuum chamber The pressure around the injection nozzle and the flow field inside the vacuum chamber were made constant.

When the vacuum exhaust pipes are connected symmetrically with respect to the vacuum chamber and exhausted at the same displacement through the respective vacuum exhaust pipes, as shown in FIG. 7, the cross-sectional shape of the connection between the vacuum chamber and the vacuum exhaust pipe is circular ([FIG. (A) of FIG. 7), and a connection section such as a quadrangle (see (b) of FIG. 7) can be formed. The cross-sectional shape and cross-sectional area of the vacuum chamber connecting portion and the vacuum exhaust pipe connecting portion, which is a portion where the vacuum chamber and the vacuum exhaust pipe are in contact, are the vacuum chamber connecting portion, which is a portion where the vacuum chamber and the vacuum exhaust pipe are in contact with each other, as shown in FIG. And the vacuum exhaust pipe connection part may be configured to have the same shape and cross-sectional area, and the cross-sectional areas of the vacuum chamber connection part and the vacuum exhaust pipe connection part may not be the same as shown in (b) of FIG. 8. In the case of the configuration as shown in (b) of FIG. 8, the vortex stagnation occurs without the aerosol flowing into the vacuum chamber immediately, whereas in the case of the configuration as shown in (a) of FIG. The exhaust pipe is exhausted through the entire cross section, and the remaining gas is not vortexed after the transport gas and the coating is exhausted immediately so that the pressure around the nozzle is continuously maintained. That is, the more the cross-sectional area of the vacuum chamber connection portion and the vacuum exhaust pipe connection portion is the same, the easier it is to maintain a constant pressure around the nozzle located inside the vacuum chamber.

On the other hand, the conventional vacuum chamber is not easy to constantly adjust the pressure inside the vacuum chamber due to the position of the substrate. That is, in the conventional powder spray coating system, as shown in FIGS. 1A to 1D, since the substrate is mounted on the structure capable of forming a vortex flow field such as a substrate holder in the vacuum chamber, the inside of the vacuum chamber is The pressures at the top and the bottom of the substrate are not the same and show a lower pressure distribution at positions near the vacuum exhaust pump. Therefore, in the present invention, the pressure of the inside of the vacuum chamber (around the spray nozzle) is constantly adjusted by resetting the position of the substrate to be positioned inside the vacuum chamber toward the bottom of the chamber. That is, the substrate is placed on the bottom surface of the vacuum chamber, 2) on the substrate transfer apparatus mounted on the bottom of the vacuum chamber, or 3) on the substrate transfer apparatus mounted on the bottom of the vacuum chamber to vortex in the vacuum chamber. It can prevent the occurrence. When mounting the substrate transport apparatus, the configuration of the above 3) is preferable to the configuration of the 2) to maximize the vortex prevention effect, for the configuration of the 3) to form an opening in all or part of the lower surface of the vacuum chamber, The opening portion should be configured to be closed by the upper surface of the substrate transport apparatus.

Hereinafter, the present invention will be described in detail with reference to various embodiments.

[First Embodiment]

Fig. 3 schematically shows a cross section of the device of the first embodiment of the present invention. In the first embodiment, the slit-type injection nozzle is vertically arranged in the center of the vacuum chamber, and the discharge port of the slit-type injection nozzle is formed long in the front-rear direction. In addition, vacuum exhaust pipes are connected to both left and right sides of the vacuum chamber. In this case, the mass flow rates exhausted through the vacuum exhaust pipes on both the left and right sides are equal (Q ₁ = Q ₂ ), so that the pressures appear at the same distance (a '= b') from the exhaust pump and at positions a and b on the same horizontal line. By using the same, or by using the exhaust mass flow rate control device provided in each of the exhaust pumps on both sides, it is possible to adjust so that the pressure of the pressure gauge located around the injection nozzle is in the same range.

On the other hand, [FIG. 3] shows that the substrate transfer device (including a device that can absorb and fix the substrate, such as adsorption; such as not shown) that can be mounted and move the substrate inside the vacuum chamber, rather than [FIG. 5] and [FIG. 6], the substrate transfer apparatus is disposed under the vacuum chamber, and the substrate positioned above the substrate transfer apparatus is positioned on the bottom plate inside the vacuum chamber, so that the substrate transfer apparatus It is more desirable to constantly adjust the pressure.

[Second Embodiment]

Fig. 4 schematically shows the plane of the device of the second embodiment of the present invention. In the second embodiment, a circular injection nozzle is vertically disposed at the center of the vacuum chamber, and vacuum exhaust pipes are connected to four sides of the vacuum chamber. In this case, as shown in FIG. 4, the mass flow rates exhausted through the radially connected vacuum exhaust pipes are equalized (Q ₅ = Q ₆ = Q ₇ = Q ₈ ), and the same distance from the exhaust pump (c '= d' = e '= f') and the exhaust mass flow control device provided in each of the exhaust pumps arranged in the radial direction with the same pressure shown in the c, d, e, and f positions on the same horizontal line. By using, the pressure of the pressure gauge located around the injection nozzle can be adjusted to be the same range.

[Third Embodiment]

Fig. 5 schematically shows a cross section of the device of a third example of the present invention. In the third embodiment, the vacuum exhaust pipe is connected to the exhaust pump so as to form a unity while maintaining the left and right symmetry. In FIG. 5, the exhaust pump is installed at the center of the integrated vacuum exhaust pipe so that the pressure of the pressure gauge around the injection nozzle can be in the same range (or g and h positions on the horizontal lines of the left and right vacuum exhaust pipes). It can be confirmed that the pressure in the same)), the exhaust mass flow rate control device to control the exhaust mass flow rate to control the pressure around the injection nozzle so that the arbitrary injection speed of the transport gas is expressed. In addition, as shown in FIG. 4, when the vacuum exhaust pipe is symmetrically connected and exhausted in the radial direction from the vacuum chamber, in order to equalize the mass flow rates of Q ₅ , Q ₆ , Q ₇ and Q ₈ , In the same manner as shown in FIG. 5, without using a vacuum exhaust pump, a vacuum exhaust pipe (not shown) connected so that the vacuum exhaust distances are the same and each vacuum connection tube is symmetrically collected at one point. It can be symmetrically evacuated through to adjust the pressure around the injection nozzle.

[Fourth Embodiment]

Fig. 6 schematically shows a cross section of the device of a fourth example of the present invention. This is to arrange two exhaust pumps symmetrically in the left and right vacuum exhaust pipes without centering the exhaust pump. On the other hand, when the two exhaust pumps are arranged so that they are not symmetrical from left to right, that is, the exhaust distances on the left and right sides are not equal (but the cross sectional area of the vacuum exhaust pipe is the same), g on the same horizontal line in the vacuum exhaust pipe path is used. and h where the mass flow rate Q ₃ and the right vacuum exhaust mass flow rate pressure around the spray nozzle to adjust the Q ₄ of the pump of the vacuum exhaust pump at the left side so as to be to make the pressure equal to the pressure of the g and h where constant of You can also adjust. However, in consideration of the efficient aspect, two exhaust pumps are installed symmetrically, or as shown in FIG. It is more preferable and efficient.

Meanwhile, FIG. 6 illustrates an example in which a roll-to-roll apparatus is applied as a substrate transfer apparatus to coat powder on a flexible substrate. The roll-to-roll apparatus is a device for moving a flexible substrate while winding and unrolling a roller, and may include a device (not shown) for adsorbing and fixing the substrate. Accordingly, no vortex is generated inside the vacuum chamber, and the pressure around the vacuum chamber and the injection nozzle can be adjusted constantly.

II. Solid powder  Coating device

The present invention vacuum chamber; A transport pipe for transporting a transport gas into the vacuum chamber; Solid powder supply unit for supplying a solid powder to the transport pipe; An injection nozzle connected to the transport pipe for injecting an aerosol in which a transport gas and a solid powder are mixed into the vacuum chamber; A vacuum exhaust pipe connected to a side of the vacuum chamber to form left and right symmetry; And an exhaust pump mounted to the vacuum exhaust pipe. It provides a solid-phase powder coating apparatus comprising a.

In addition, the present invention is the opening portion is formed on all or part of the lower surface of the vacuum chamber, the lower portion of the vacuum chamber substrate transfer apparatus; Is mounted, the opening portion provides a solid powder coating apparatus, characterized in that configured to be closed by the upper surface of the substrate transfer device.

In the solid powder coating apparatus provided by the present invention, aerosol (a mixture of a carrier gas and a solid powder) is uniformly spray coated on a substrate in a vacuum chamber by using the above-described "apparatus for controlling the pressure around the injection nozzle." It is a device configured to lose. Therefore, the matters relating to the configuration of the vacuum chamber, the injection nozzle, the vacuum exhaust pipe and the exhaust pump are as described above, and the patent registration No. 0916944 "A solid powder continuous deposition apparatus and a solid powder continuous deposition method", patent application 2008 -0090115 "Solid-Powder Continuous Deposition Roll-to-Roll Device", Patent Application No. 2008-0109254 "Solid-Powder Vacuum Evaporation Apparatus and Method for Evaporating It with Temperature Control Device", Patent Application No. 2008-0111430 "Base Thermal Shock Control Means Solid powder spray deposition apparatus equipped with a temperature control method and a temperature control method for removing the thermal shock of the substrate in the solid powder spray deposition process, Patent Application No. 2009-0021959 "Solid powder supply apparatus and solid powder supply method in the pressure tube", Patent application The technical contents introduced in 2009-0032151, "Solid powder supply device and solid powder supply method in pressure pipe", Patent application 2009-0038240, "Solid powder coating device" Available.

Although the present invention has been described with reference to the accompanying drawings as mentioned above, various modifications and variations are possible within the scope without departing from the spirit of the present invention, and can be used in various fields. Therefore, the claims of the present invention include modifications and variations that fall within the true scope of the invention.

FIG. 1A is a schematic diagram of a conventional apparatus in which an exhaust pump is installed on one side of a vacuum chamber.

1B is a schematic diagram of a conventional apparatus in which an exhaust pump is installed in one direction of the right side of the vacuum chamber.

1C is a schematic diagram of a conventional apparatus in which an exhaust pump is installed in one direction under the vacuum chamber.

FIG. 1D is a schematic diagram of a conventional apparatus in which an exhaust pump is installed in one direction above the vacuum chamber.

2 is a schematic diagram showing the flow field of the aerosol according to the powder spray coating.

3 is a side cross-sectional schematic diagram of the apparatus showing the first embodiment of the present invention.

Fig. 4 is a side sectional schematic view of the apparatus showing the second embodiment of the present invention.

Fig. 5 is a schematic plan view of the apparatus showing the third embodiment of the present invention.

Fig. 6 is a side cross-sectional schematic diagram of the apparatus showing the fourth embodiment of the present invention.

7 is a schematic view showing a vacuum chamber connecting portion and a vacuum exhaust pipe connecting portion of the present invention.

FIG. 8 is a schematic view showing the cross-sectional shape of the vacuum chamber connection in comparison with the case where the vortex flow field does not occur and the vortex flow field may occur.

<Description of the symbols for the main parts of the drawings>

10: aerosol 11: transport gas

12 powder particle 13 vortex

14: transport pipe

15: spray nozzle (supersonic nozzle or subsonic nozzle)

16 pressure gauge 17 vacuum exhaust connector

18: vacuum chamber inner bottom plate 19: coated support plate

20: substrate 21: substrate holder

22: substrate transfer device 23: vacuum chamber

24: vacuum exhaust pump 25: left vacuum exhaust pipe

26: left vacuum exhaust pipe connecting portion 27: exhaust mass flow rate control device
28: right vacuum exhaust pipe 29: right vacuum exhaust pipe connection

30: central vacuum exhaust pipe 31: vortex retention part

32: hollow 33: vacuum chamber left connection

34: roller 35: roll to roll device

36: flexible base material 37: vacuum chamber upper outer plate

38: vacuum exhaust pipe 39: vacuum exhaust pipe connection

40: injection nozzle connection portion 41: the upper surface of the substrate

42: slit jet nozzle (subsonic or supersonic nozzle)

43: circular jet nozzle (subsonic or supersonic nozzle)

Claims (10)

Vacuum chamber; An injection nozzle connected to a transport pipe and having a discharge port inside the vacuum chamber; A vacuum exhaust pipe connected to a side of the vacuum chamber to form left and right symmetry; And An exhaust pump mounted to the vacuum exhaust pipe; Apparatus for constantly controlling the pressure around the injection nozzle, characterized in that it comprises a. In claim 1, The jet nozzle is a slit jet nozzle having a discharge port long in the front and rear directions, The vacuum exhaust pipe is a device for constantly controlling the pressure around the injection nozzle, characterized in that connected to the left and right sides of the vacuum chamber. In claim 1, The jet nozzle is a slit jet nozzle having a discharge port long in the front and rear directions, The vacuum exhaust pipe is a device for constantly controlling the pressure around the injection nozzle, characterized in that connected to the front, rear, left and right four sides of the vacuum chamber. In claim 1, The injection nozzle is a circular injection nozzle having a circular discharge port, The vacuum exhaust pipe is a device for constantly controlling the pressure around the injection nozzle, characterized in that connected to the front, rear, left and right four sides of the vacuum chamber In claim 1, And a vacuum chamber connecting portion and a vacuum exhaust pipe connecting portion in contact with the vacuum chamber and the vacuum exhaust pipe are configured to have the same shape and cross-sectional area. In claim 1, An exhaust mass flow rate adjusting device provided in the vacuum pump to adjust an exhaust amount; And A pressure gauge installed around the injection nozzle; Apparatus for constantly controlling the pressure around the injection nozzle, characterized in that it further comprises. In claim 1, And the vacuum exhaust pipe is connected to the exhaust pump so as to be integrally formed while maintaining left and right symmetry. The method according to any one of claims 1 to 7, Opening portions are formed in all or part of the lower surface of the vacuum chamber, A substrate transfer device below the vacuum chamber; Is equipped with, And the opening part is configured to be closed by an upper surface of the substrate transfer device. Vacuum chamber; A transport pipe for transporting a transport gas into the vacuum chamber; Solid powder supply unit for supplying a solid powder to the transport pipe; An injection nozzle connected to the transport pipe for injecting an aerosol in which a transport gas and a solid powder are mixed into the vacuum chamber; A vacuum exhaust pipe connected to a side of the vacuum chamber to form left and right symmetry; And An exhaust pump mounted to the vacuum exhaust pipe; Solid-phase powder coating apparatus, characterized in that comprises a. The method of claim 9, Opening portions are formed in all or part of the lower surface of the vacuum chamber, A substrate transfer device below the vacuum chamber; Is equipped with, The opening portion solid powder coating apparatus, characterized in that configured to be closed by the upper surface of the substrate transfer device.

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