KR20110024243A - Inline type substrate coater apparatus - Google Patents

Abstract

PURPOSE: A floating substrate coater device is provided to reduce the transfer path of a slit nozzle for a bead forming process and improve the coating quality on substrates being processed. CONSTITUTION: A floating substrate coater device comprises a floating stage(110), a slit nozzle, a substrate delivery mechanism, and a priming module. The floating stage sprays or sprays/sucks gas to float a substrate being processed, wherein a cut part is formed in the middle of the substrate transfer path. The slit nozzle is arranged above the floating stage and spreads coating liquid on the surface of the substrate. The substrate delivery mechanism transfers the substrate in the processing direction. The priming module is arranged in the cut part of the floating stage and carries out a bead forming process before the spreading of coating liquid.

Description

Floating Board Coater Device {INLINE TYPE SUBSTRATE COATER APPARATUS}

The present invention relates to a floating substrate coater device, and more particularly, to install a complementary injury module at both ends of a moving injury module capable of opening and closing a cutting area of a floating stage on which a priming module is seated to injure a substrate to be processed. By opening the cutout area during the bead forming process, the floating floating module and the supplementary floating module accurately float the processed substrate during the coating process to prevent sagging of the processed substrate and to smoothly transfer the processed substrate. And a floatable substrate coater device.

In the process of manufacturing flat panel displays, such as LCD, the coating process of apply | coating chemical liquids, such as a resist liquid, to the surface of the to-be-processed substrate made from glass etc. is accompanied. Conventionally, when the size of the LCD was small, a spin coating method was used in which the chemical was applied to the surface of the substrate by rotating the substrate while applying the chemical to the center of the substrate.

However, as the size of the LCD screen increases, the spin coating method is rarely used, and the chemical liquid is processed from the slit nozzle while relatively moving the slit-shaped slit nozzle having a length corresponding to the width of the substrate and the substrate to be processed. The coating method of the method of apply | coating to the surface of a board | substrate is used.

Recently, as part of a method of coating a chemical solution on the surface of a larger number of substrates to be processed at a predetermined time, Japanese Laid-Open Patent Publication No. 2005-243670 discloses a substrate by ejecting air along a direction in which the substrate is loaded, applied, and taken out. A floatation stage is provided, which has a floating stage for floating the liquid, and a substrate discharging mechanism formed on both sides thereof with suction pads and the like, and a technique of supplying and coating a chemical liquid to the surface of the substrate to be continuously supplied by the slit nozzle in a stopped state. Is disclosed.

However, in the conventional floating substrate coater apparatus, since the priming module and the like, in which the discharge port of the slit nozzle is close, are all positioned on the upper side of the floating stage in order to form beads immediately before supplying the chemical liquid to the surface of the substrate to be supplied, the slit nozzle is In the process of forming a bead at the discharge port of the slit nozzle by discharging the chemical solution in the state close to the priming module, or in the cleaning process by the nozzle chemical liquid discharge part cleaner, the chemical liquid floats in the air or falls on the surface of the substrate to be treated. There was a problem causing.

In order to solve the above problems, the present invention provides a cutting area in which a priming module for bead formation of the slit nozzle is seated is formed in the middle of the floating stage, thereby reducing the movement path of the slit nozzle for the bead formation process and forming the beads. It is an object of the present invention to provide a floating substrate coater device capable of preventing a problem that chemicals generated during a process are buried in a substrate to be treated and cause coating defects.

Furthermore, the present invention can form a cutout area, but in the case of the application process, a floating force can be generated in the cutout area to support the to-be-processed substrate and to smoothly transfer it. It is an object of the present invention to provide a floating substrate coater device that can be uniformly supplied to the entire area to prevent sagging of the substrate to be processed and to improve the coating quality of the substrate.

That is, the present invention, in order to solve the problem that the chemical liquid or the cleaning liquid generated by the bead forming process performed before applying the chemical liquid to the substrate to be processed from the slit nozzle buried in the substrate to cause the coating defect of the substrate to be processed, When the priming module is positioned under the transfer path of the substrate to be processed and a movement passage for the slit nozzle to approach the priming module is formed in the incision region of the floating stage, the substrate to be injured is transferred to the incision region during the transfer. The purpose of the present invention is to prevent the floating force of the substrate to be processed by lowering the floating force of the substrate, and to prevent the substrate from sagging by floating the entire floating portion of the substrate. .

In order to achieve the object described above, the present invention provides a floating stage provided with a cutout region in the middle of a transfer path of a substrate by floating or spraying and aspirating a gas, and having an incision region in the middle of the transfer path of the substrate, A slit nozzle disposed to apply the chemical to the surface of the substrate, a substrate transfer mechanism for transferring the substrate along the process direction, and aligned with the incision area of the floating stage to apply the chemical to the substrate And a priming module that previously performs a bead formation process by the discharge port of the slit nozzle is in close proximity or contact, the floating stage is a mobile injury module for opening and closing the incision area in conjunction with the bead formation process of the slit nozzle, and a mobile injury module Closing this incision area complements the substrate to be processed at both ends of the mobile injury module. Including the complement injury module that provides a sense unit substrate coater apparatus constituted.

This shortens the movement path of the slit nozzle, blocks the influence of the chemical liquid and the cleaning liquid due to the bead forming process, and forms the incision during the application process by forming an incision area for the bead formation process in the floating stage and seating the priming module in the incision area. This is to generate floating force in the area so that the substrate to be processed can be lifted and supported. In particular, the complementary floating module at both ends of the moving floating module has the advantage of preventing the sagging of the processing substrate by floating the substrate to be processed.

Here, it is preferable that the complementary injury module closes the incision area in association with the movement of the movement injury module and floats by complementing both ends of the substrate to be processed. In other words, during the bead formation process, the complementary injury module also opens the incision area in conjunction with the opening of the incision area by the mobile injury module, and in the application process, the injuries module closes the incision area and injuries the substrate to be processed. Complementary injury module also means closing the incision area and floating the substrate to be treated. This may enable automation of the floating substrate coater device.

In addition, the complementary floating module may be rotatably coupled to the outer sides of both end portions of the incision region, and particularly preferably rotatably coupled in a direction crossing the process progression direction. This is because the complementary floating module closes to both sides of the cutout area during the bead forming process by hinge coupling and does not interfere with the bead forming process, but rotates 90 degrees toward the cutout area during the coating process. This is to support the injury. In particular, when the hinge axis is formed in parallel with the process progress direction, the rotation radius of the complementary floating module is shortened, thereby increasing spatial efficiency.

In addition, the complementary floating module can be slidably coupled to the outer side of the both ends of the incision area, in particular slidably coupled in a direction crossing the process progress direction. This is to allow the complementary floating module to retreat to both sides of the cutout area during the bead forming process and to move forward toward the cutout area to support the to-be-processed substrate during the coating process. In particular, when the complementary injury module is moved forward and backward in the direction crossing the process progress direction, there is an advantage that the spatial efficiency of inserting the complementary injury module in the frame of the floating substrate coater device is increased.

The floating stage includes a substrate supply region for supplying a substrate to be processed in a process progress direction, an application region in which a slit nozzle applies chemicals to the substrate, a relaxation region between the application region and the substrate supply region, and an application region. It comprises a substrate discharge area for discharging the substrate to be processed passing through, it is preferable that the incision area is located in front of the relaxation area. This is because the slit nozzle which performs the application | coating operation in the upper part of an application | coating area | region is located in proximity to the application | coating area | region where the priming module is seated, and can shorten the movement path which moves to the priming module for the bead formation process. .

In addition, the floating stage has a plurality of fixed floating modules separated at predetermined intervals in parallel to the process progress direction, the moving floating module may be provided between the plurality of fixed floating modules to be configured to open and close the incision area, in particular The moving floating module is preferably provided to be slidable in a process progressing direction between a plurality of fixed floating modules. This suggests a specific configuration of the mobile injury module that generates the floating force in the incision area, and the floating injury module is slidably coupled between the fixed floating modules spaced apart from each other, so that the floating force can be evenly applied to the substrate to be processed. It has the advantage of being simple to configure.

In addition, the moving injury module is preferably engaged with the pinion gear to move forward and backward according to the rotation of the pinion gear, and furthermore, the complementary injury module is preferably rotated orthogonally to the axis of rotation of the pinion gear according to the rotation of the bevel gear engaged with the pinion gear. Do. This enables the moving injury module to move forward and backward to open and close the incision region, and furthermore, the complementary injury module can rotate in a direction crossing the process progressing direction in conjunction with the movement of the moving injury module.

The expression 'priming module is aligned with the incision area and positioned' in the present specification and claims means that when the incision area is viewed from above, a surface on which the priming module is projected onto the incision area exists. Thus, the priming module is not limited to being located only at the lower portion of the incision region of the floating stage, but also includes an arrangement parallel to the floating stage or slightly projecting on the upper surface of the floating stage if it is below the transfer path of the substrate to be processed.

As described above, in the present invention, an incision region in which the priming module for bead formation of the slit nozzle is seated is formed in the middle of the floating stage, thereby reducing the movement path of the slit nozzle for the bead formation process and occurring during the bead formation process. The chemical liquid can be prevented from getting on the substrate to be treated and causing coating defects.

Furthermore, the present invention can form a cutout area, but in the case of the application process, a floating force can be generated in the cutout area to support the to-be-processed substrate and to smoothly transfer it. It can be supplied evenly over the entire area to prevent sagging of the substrate and improve the coating quality of the substrate.

Hereinafter, a floating substrate coater apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

In the following description, well-known functions or constructions are not described in detail to avoid obscuring the subject matter of the present invention.

1 is a perspective view showing the configuration of a floating substrate coater apparatus according to an embodiment of the present invention, Figure 2 is a perspective view showing a configuration excluding the slit nozzle, gantry, a movable substrate transfer unit from the configuration of FIG. FIG. 3 is a cross-sectional view of FIG. 1, FIG. 3A is provided with a hinged complementary injury module, FIG. 3B is provided with a slide type complementary injury module, and FIG. 4 is an injury stage in the bead formation process of the slit nozzle of FIG. 1. 4A is a hinged complementary injury module and FIG. 4B is a slide type complementary injury module, and FIG. 5 is an arrangement of the floatation stage in the application process of the slit nozzle of FIG. 5A is a hinged complementary injury module, FIG. 5B is a slide type complementary injury module, and FIG. 6 is a feature in the incision area. 6A is a schematic diagram showing the injuries of the substrate, Figure 6a is a case without the complementary injury module, Figure 6b is provided with a hinged complementary injury module, Figure 6c is provided with a slide type complementary injury module, Figure 7 is the intake of the injury stage FIG. 8 is a schematic view showing a control method of a ball and a gas discharge hole, FIG. 8 is a schematic view showing a configuration in which regions of a floating stage are divided, and FIG. 9 is a schematic view showing a movement configuration of a moving injury module for opening and closing a cutout region. 9A is a case of opening and FIG. 9B is a case of closing, FIG. 10 is a perspective view illustrating the appearance of the priming module of FIG. 1, and FIG. 11 is a cross-sectional view taken along the line VII-V of FIG. 10.

As shown in the figure, the floating substrate coater apparatus 100 according to an embodiment of the present invention sprays or injects and sucks gas from the surface along a path through which the substrate G is transferred. The to-be-processed substrate G fixed to the frame 10 so as to float G) and to be stopped while the to-be-processed substrate G is disposed above the float stage 110. The slit-shaped slit nozzle 120 and the slit nozzle 120, which is a chemical liquid supply means for injecting the chemical liquid on the surface of the slit nozzle 120 is fixed to move the gantry transfer rail 131 and is installed to be movable up and down A gantry 130 for moving the slit nozzle 130 to the priming module 180 to be described later, a substrate transfer rail 140 arranged along the length direction on both sides of the floating stage 110, and a substrate transfer. Lifted from the rail 140 for the production of glass A gripping member 150 which transfers the substrate G along the substrate transfer rail 140 and moves the substrate G to pass through the lower portion of the slit nozzle 120 while holding the substrate G; Nozzle chemical liquid provided in the lower part of the transfer path of the substrate G of the front end of the floating stage 110 to clean the discharge port of the slit nozzle 120 after applying the chemical liquid to the surfaces of the two substrates G to be processed. It extends from the front part of the discharge part cleaner (lip rinser module) 160 and the floating stage 110, and is located in the lower part during the transfer of the processing target substrate G, and in front of the nozzle chemical liquid discharge part cleaner 160 during maintenance. The movable substrate conveying unit 170 which is moved to provide a working space and the ejection opening of the slit nozzle 120 are close to or in contact with each other before being applied to the surface of the processing target substrate G, thereby slightly discharging the chemical liquid to form a slit nozzle ( Mold the beads in the outlet of 120) To consist of a priming module 180 which is located at the lower portion of the substrate (G).

As shown in FIG. 8, the floating stage 110 includes a substrate supply region in which a substrate G is floated at a height of about 150 μm to 250 μm and supplied in a process progress direction, and a priming module 180 is provided. The slit nozzle 120 is placed on the surface of the incision area 180c installed to be aligned, the relaxation area transitioned to a height of approximately 50 µm, and the surface of the substrate G to be raised to a precise and constant height of about 50 µm. ) Is divided into an application region (C) to which the chemical liquid is applied, and a substrate discharge region (110 ') for discharging the coated target substrate (G).

In order to maintain a constant thickness of the chemical liquid applied to the substrate G to be treated, it is very important to keep it floating at a constant height in the coating area C. For this purpose, as shown in FIG. Compared with other areas, a large number of intake holes 110a and gas blowing holes 110b are formed to precisely adjust the height of the floating substrate G to be processed by the floating force 110d. In addition, the air intake hole 110a and the gas ejection hole 110b are more strongly distributed in the substrate supply region and the substrate discharge region 110 ′ where the floating height of the substrate G to be processed is relatively less precisely adjusted. Can be.

On the other hand, since the priming module 180 is located below the transfer path of the substrate G to be processed, in order to secure the transfer path for the slit nozzle 120 to approach the roller 181 of the priming module 180, In the cutout region 180c in which the priming module 180 is installed, the floating stage 110 is opened and closed.

To this end, the floating stage 110 in the substrate supply region is arranged in a long spaced apart from each other in the lateral direction to maintain the shape of the floating stage 110 and the fixed floating module 110, Regions which are arranged alternately with respect to each other and moved relative to the incision region 180c as necessary, and are provided on both sides of the incision region 180c and lacking the floating force of the mobile injury module 111 Complementary complementary injury module 117 is configured to include. Therefore, in the bead forming process in which the slit nozzle 120 moves toward the priming module 180, the moving injury module 111 moves in the direction indicated by reference numeral 111d, and the complementary injury module 117 moves to the incision region 180c. By moving to the outside of both sides to open the cutting region 180c, a space for the bead forming process is provided, and the bead forming process is not interfered with. Similarly, in the application process in which the slit nozzle 120 applies the chemical liquid to the processing target substrate G, the moving floating module 111 closes and complements the incision region 180c according to the rotation 78d of the pinion gear 78. The floating module 117 also moves toward the cutting area 180c to close the cutting area 180c, thereby providing a floating force to the substrate G to be processed, and in particular, the supplementary floating module 117 moves the floating injury module 111. By providing the floating force to the space where the floating force of both ends of the edge is insufficient, the substrate G to be processed can be precisely floated.

In particular, as shown in Figures 4 and 5, the complementary injury module 117 is hinged complementary injury module is hinged to be rotatable to the frame 10, and inserted into the frame 10 so as to be slidable Both slide-type complementary flotation modules are possible. Of course, the scope of the present invention is not limited to that the supplementary injury module 117 is coupled to the frame 10, and is cut in any area to be able to complement the floating force of the mobile injury module 111, even if coupled to any component ( If the configuration that can open and close 180c) belongs to the scope of the present invention.

The function and configuration of the complementary injury module 117 will be described in more detail. As shown in FIG. 5, since the mobile injury module 111 is provided between the plurality of fixed injury modules 110, when the mobile injury module 111 moves to the cutout area 180c, the mobile injury module 111 111, the width that provides the flotation force is bounded by the fixed injury module 110 is smaller than the width that provides the flotation force. Therefore, as shown in FIG. 6A, spaces having insufficient floating force may be generated at both ends of the moving injury module 111, and sagging of the substrate G may occur at this place. In particular, since the thickness of the substrate G to be processed becomes thinner and the area becomes wider, bending deflection may occur, which is an important problem directly affecting the quality of the LCD.

However, as shown in FIGS. 6B and 6C, when the supplementary injury module 117 fills a space in which the floating force at both ends of the moving injury module 111 is insufficient, and compensates for the injury force, the substrate G of the substrate G is processed. Deflection can be prevented. In other words, the complementary floating module 117 provided in the floating substrate coater device according to an embodiment of the present invention has a configuration to secure the cutout region 180c so as not to interfere with the bead forming process of the slit nozzle 120. At the same time, during the application process of the slit nozzle 120 should be able to injure the substrate (G) to be processed, and further must have a function to compensate for the insufficient floating force of the moving injury module 111.

On the other hand, in the figure, the complementary injury module 117 is shown to rotate or move forward / retreat toward the incision area 180c across the process progress direction, the scope of the present invention is not limited thereto, but parallel to the process progress direction You can also rotate or move forward or backward. However, since the complementary floating module 117 has a length corresponding to the width of the cutout area 180c (ie, the distance from the substrate supply area to the relaxation area), the length of the complementary floating module 117 is long and the width thereof is narrow. do. Therefore, if the configuration is rotated in parallel with the process progress direction, the rotation radius is increased, the efficiency of the space is lowered and may interfere with the priming module 180, so the configuration that rotates across the process progress direction is preferable. have.

In addition, the movement of the complementary injury module 117 is preferably made in conjunction with the movement injury module 111. That is, as shown in FIGS. 9A and 9B, the moving injury module 111 is configured to move forward / reverse according to the rotation of the pinion gear 78, and using the driving force as it is, the hinged complementary injury module 117 is used. Rotate the hinge axis of the hinge when the floating injury module 111 advances, the hinge-type complementary injury module 117 is also rotated 90 degrees to close the incision area (180c), or slide type when the moving injury module 111 is advanced The complementary injury module 117 may also be configured to advance to close the incision region 180c. By such a configuration, automation is possible even with a simple configuration, and the substrate W to be processed is moved by the floating wound module 111 and the complementary wound module 117 to simultaneously lift the substrate G to be processed. The deformation can be prevented from occurring. Of course, the pinion gear 78 for advancing / retracting the moving injury module 111 rotates about an axis that crosses the process progress direction, and thus a bevel gear that rotates about an axis parallel to the process progress direction. By using this, the rotational driving force of the pinion gear 78 can be changed to 90 degrees in the direction of the rotational axis to the complementary flotation module 117 and used as it is. In detail, in the case of the hinged complementary injury module 117, the rotational force transmitted from the pinion gear 78 obtains a rotational force whose rotation direction is changed by 90 degrees through the bevel gear, and connects the bevel gear to the hinge axis to connect the hinged complementary injury module. 117 can be rotated, and in the case of the slide-type complementary injury module 117, the rotational force transmitted from the pinion gear 78 is obtained through the bevel gear to obtain a rotational force whose rotation direction is changed by 90 degrees, and then as a second pinion gear. The complementary injury module 117 may be advanced / retracted. However, the scope of the present invention is not limited to such a configuration, and if the supplementary injury module 117 is configured to rotate or slide in conjunction with the forward / retract of the moving injury module 111, all of the scope of the present invention is included in the scope of the present invention. Belong.

Reference numeral 111h in the figure is a pneumatic tube that provides air pressure to the moving floating module (111).

As shown in FIG. 7, the floating stages 110 and 110 ′ have a blower hole 110b through which gas is injected at a predetermined pressure and a suction hole 110a for sucking gas around the compressor, thereby forming a compressor 116. ) Compressed gas is supplied to the ejection hole 110b by adjusting the valves 114a-114c so that a desired flow rate is supplied to the flowmeter 113 via the regulator 112, and the valve is compressed in the compressor 115. 114c is opened to suck gas from the suction hole 110a. At this time, the amount of gas injected through the blowing hole 110b and the amount of gas sucked through the suction hole 110a are substantially maintained. At this time, the amount of gas ejected or sucked through the ejection hole 110b and the suction hole 110a is controlled differently for each region of the floating stage 110, but the substrate G is processed in the direction indicated by reference numeral 110d. Flotation always works. However, in the exemplary embodiment of the present invention, although the intake hole 110a and the gas ejection hole 110b are exemplarily arranged together, the intake hole 110a is not formed and the floating stage 110 is formed only by the gas ejection hole 110b. The flotation force of may be controlled.

The slit nozzle 120 receives the chemical liquid through the pump 121 and applies the chemical liquid to the surface of the substrate G through a discharge port 120a to a predetermined thickness.

The gantry 130 is engaged with the projection 131a of the gantry conveying rail 131 installed along the longitudinal direction of the levitation stage 110 in a state where the slit nozzle 120 is fixed along the conveying rail 131. It is movable in the longitudinal direction (ie, the process progress direction) of the 110 and 110 ′, and is configured to be able to move the slit nozzle 120 up and down. As shown in FIG. 2, the movable substrate supply unit 170 moves upwardly 170d to perform maintenance work of the slit nozzle 120 in the working space in front of the nozzle chemical liquid discharge part cleaner 160. , The gantry 130 moves the slit nozzle 120 to a position where an empty space is provided below the slit nozzle 120 through the gantry conveying rail 131 extended to protrude forward enough to the front of the floating stage 110. Move it. Through this, the discharge part of the slit nozzle 120 may be scraped and cleaned with a film or the like, and the slit nozzle 120 used for a long time may be replaced with a new slit nozzle.

Here, in the related art, as the priming module is positioned above the transfer path of the substrate G, the gantry is moved to move the priming module sufficiently high from the floating stage 110 to form beads of the slit nozzle 120. Had to be formed very high. However, the floating substrate coater device 100 according to the embodiment of the present invention is configured to lower the gantry 130 as the priming module 180 is located below the transfer path of the substrate G to be processed. Not only can the aesthetics be more neat, but also lighter than the conventional gantry can be controlled to move only a shorter path, it is easy to control and obtains the advantage that the gantry 130 can be configured at a lower cost .

The substrate transfer rail 140 is arranged parallel to each other on both sides of the floating stage (110, 110 '), along the floating stage (110, 110') to be processed substrate (G) held by the holding member 150 Transfer in the direction indicated by the arrow in FIG.

The gripping member 150 floats in the form of an air bearing 152 from the substrate transfer rail 140, and the substrate G is sucked and gripped by the gripper 151 in the longitudinal direction of the floating stages 110 and 110 ′. The movement is controlled to 150d.

Although the nozzle chemical liquid discharge part cleaner 160 is not shown in detail in the drawing, the cleaner in contact with both sides of the discharge part of the slit nozzle 120 moves along the discharge port of the slit nozzle 120 to clean the discharge part.

The movable substrate transfer unit 170 is located at one front end of the floating stage 110 as shown in FIG. 1 during the process of applying the substrate G, and is indicated by 170d during maintenance. Move upward to provide a work space for maintenance, such as manually cleaning the periphery of the discharge port of the slit nozzle 120 or replacing the slit nozzle 120 in front of the floating stage 110.

As shown in FIGS. 10 and 11, the priming module 180 includes a priming roller 181 which is formed such that the chemical liquid is discharged while the front end of the slit nozzle 120 is close and driven by the servo motor 181a. The case 182 surrounding the priming roller 181 so that only a part of the priming roller 181 is exposed to the outside, and the bead formation to wash the chemical liquid on the surface of the priming roller 181 in the bead forming process of the slit nozzle 120 A thinner applicator 183 for applying thinner to the surface of the priming roller 181 that rotates after the process; and a first squeezer 184 for physically contacting and scraping off the chemical liquid on the surface of the priming roller 181; , A cleaning liquid container 185 for surface cleaning by dipping the priming roller 181, a cleaning liquid injector 186 for jetting the liquid cleaning liquid 186a to the surface of the priming roller 181, and a priming roller 181. On the surface of The second squeezer 187 scrapes in contact with the surface of the priming roller 181 to remove the thinner, and air (188x) to the surface of the priming roller 181 to dry the surface of the priming roller 181. ) And a drying exhaust unit 188 for drying the liquid on the surface and discharging the liquid to the outside.

That is, in the priming module 180, a rotatable priming roller 181 is formed as a bead forming auxiliary surface inside the case 182, and thus, before the chemical liquid is applied to the surface of the substrate G, the roller 181 is formed. By discharging a small amount of chemical liquid into the discharge port of the slit nozzle 120 in a state close to the surface, beads are formed in the discharge port of the slit nozzle 120.

In this case, as shown in FIGS. 9A and 9B, the priming module 180 is positioned below the transfer path of the substrate G to be processed. As a result, the chemical liquid particles of the film or the discharge port of the slit nozzle 120 buried on the surface of the priming roller 181 is formed while the tip of the discharge port of the slit nozzle 120 is close to the priming roller 181. Even if it blows, since this process is performed in the lower part of the conveyance path | route of the to-be-processed board | substrate G, the particle which blows around does not reach the surface of the to-be-processed board | substrate G, and these particles have the defect of the application | coating process of a chemical liquid This can be prevented from occurring.

2 and 8, the priming module 180 is placed in the relaxed region 180c of the relaxation region and the application region immediately before the application region to precisely control the lift height of the substrate G to be processed. It is provided in the lower part of the conveyance path | route of the process board | substrate G. As a result, the movement distance of the slit nozzle 120 proximate to the priming roller 181 may be shortened to a minimum to form beads. At this time, in order to further shorten the moving distance of the slit nozzle 120, it may be considered to be located between the relaxation region and the application region, but if the priming module 180 is located between the relaxation region and the application region, priming Since the floating force of the floating stages 110, 111, and 110 ′ may fluctuate in the cutout area 180c in which the module 180 is located, in order to precisely maintain the processed substrate G at a constant floating height, It is preferable to be located in front of or behind the relaxation area.

In the drawing, reference numeral 181a denotes a rotation axis of the priming roller 181, and reference numeral 180y in the figure denotes a case pedestal of the priming module 180.

Hereinafter, the operating principle of the floating substrate coater device 100 according to an embodiment of the present invention configured as described above will be described with reference to FIGS. 9A and 9B.

Step 1 : The substrate G is supplied to the floating substrate coater device 100 in order to apply the chemical liquid to the surface of the substrate G.

Step 2 : Before forming the bead in the discharge port of the slit nozzle 120 before applying the chemical to the surface of the substrate to be supplied (G), first, as shown in Figure 9a, the pinion gear 78 By rotating (111d ') the moving injury module 111 to the left of FIG. Although not shown in FIG. 9A, the supplementary injury module 117 also moves (rotates or retracts) to the outside of the incision area 180c in association with the movement of the moving injury module 111 to open the incision area 180c. Let's do it.

Then, the gantry 130 moves along the gantry conveying rail 131 so that the discharge port of the slit nozzle 120 is located at the top of the cutout region 180c of the floating stage 110, 110 ′. The slit nozzle 120 is moved downward 120d to approach 181.

Step 3 : The slit nozzle 120 discharges a small amount of the chemical liquid near the surface of the priming roller 181, and beads are formed in the discharge port of the slit nozzle 120, and discharged from the discharge port of the slit nozzle 120. Part of the chemical liquid is in a state of being buried on the surface of the priming roller 181. Through this, the bead forming process of the slit nozzle 120 is made.

Step 4 : Then, as shown in FIG. 9B, the gantry 130 moves the slit nozzle 120 upward to raise the outlet of the slit nozzle 120 to the top of the floating stage 110, 110 ′. After that, the slit nozzle 120 is moved to the application area of FIG. 8.

At about the same time, when the discharge port of the slit nozzle 120 moves to the upper portion of the cutout region 180c of the floating stage 110, 110 ′, the moving floating module 111 of the floating stage 110 is moved to the pinion gear 78. The drive 78x moves to fill the incision area 180c as shown in FIGS. 5A and 5B, and the supplementary injury module 117 also rotates toward the incision area 180c in conjunction with this (hinge type). Or advance (slide). Accordingly, the floating force acts by the moving injury module 111 even in the cutout region 180c of the floating stage 110, and the floating force lacking at both ends of the moving injury module 111 is supplemented by the supplementary injury module 111. As a result, the substrate G to be processed can be smoothly transported in the cutout region 180c as well as the substrate supply region without fluctuation.

Steps 2 to 4 described above do not need to proceed after the substrate G is supplied to the substrate coater device 100, and are started and progressed immediately after the substrate G of the previous process is coated.

Step 5 : The substrate G is then moved along the transfer path to the application area C in the direction indicated by reference numeral 66d to apply the chemical liquid with uniform thickness by the chemical liquid discharged from the slit nozzle 120. At the same time, the priming module 180 located at the cleaning position 77c cleans the chemical liquid on the surface of the priming roller 181.

More specifically, as shown in FIG. 11, the chemical liquid on the surface of the priming roller 181 is diluted by the thinner applied by the thinner applicator 183 while the priming roller 181 is rotated, and diluted. The first chemical liquid is scratched from the surface by the first squeezer 184 and is first removed. The chemical liquid is dipped into the washing liquid contained in the washing liquid accommodating part 185 to be washed and chemically treated by the washing liquid jet-jetted from the washing liquid injector 186. And mechanically removed, again mechanically removed by the second squeezer 187, and then dried by the drying exhaust 188 to provide a clean, dried surface in the next bead formation process.

As such, the floating substrate coater device 100 according to an embodiment of the present invention forms the cutout region 180c in the middle region (ie, the front of the relaxation region) of the floating stage 110, and the priming module 180. ) At the lower part of the transfer path of the substrate G in the incision region 180c, the chemical liquid discharged from the discharge port of the slit nozzle 120 in the bead forming process is suspended in the form of fine droplets 77x in the air. In addition, it is possible not only to fall to the ground and to prevent the surface of the substrate G to be treated, but also to minimize the moving distance that the slit nozzle 120 moves for the bead forming process, The advantage that the chemical liquid application process can be performed continuously at short time intervals is obtained.

In addition, during the application process of the slit nozzle 120, the floating injury module 111 closes the incision area 180c while supporting the to-be-processed substrate G, and the supplementary injury module 117 moves the floating injury module ( By compensating for the insufficient floating force at both ends of 111, the processing target substrate G can be precisely floated to prevent sagging of the processing target substrate G and to facilitate transportation.

In the above, the preferred embodiments of the present invention have been described by way of example, but the scope of the present invention is not limited to these specific embodiments, and may be appropriately changed within the scope described in the claims.

1 is a perspective view showing the configuration of a floating substrate coater device according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a configuration excluding a slit nozzle, a gantry, and a movable substrate transfer unit from the configuration of FIG. 1.

3 is a cross-sectional view of FIG.

Figure 3a is provided with a hinged complementary injury module, Figure 3b is provided with a slide-like complementary injury module.

FIG. 4 is a schematic view showing the arrangement configuration of the floating stage in the bead forming step of the slit nozzle of FIG. 1;

4a is provided with a hinged complementary injury module,

Figure 4b is equipped with a slide type complementary injury module.

FIG. 5 is a schematic view showing an arrangement configuration of the floating stage in the application process of the slit nozzle of FIG. 1;

5a is provided with a hinged complementary injury module,

5B is provided with a slide-type complementary injury module.

6 is a schematic diagram showing the rise of the substrate to be treated in the incision region;

Figure 6a is the case without a complementary injury module,

6b is provided with a hinged complementary injury module,

Figure 6c is equipped with a slide type complementary injury module.

7 is a schematic view showing a control method of the intake hole and the gas discharge hole of the floating stage.

8 is a schematic diagram illustrating a configuration in which regions of the floating stage are divided.

9 is a schematic diagram showing a movement configuration of a moving injury module that opens and closes an incision region;

9A illustrates the opening;

9B shows a case of closing.

FIG. 10 is a perspective view illustrating an appearance of the priming module of FIG. 1. FIG.

FIG. 11 is a cross-sectional view taken along the line VII-VII of FIG. 10.

** Description of symbols for the main parts of the drawing **

100: floating substrate coater 110, 110 ': floating stage

111: mobile injury module 117: complementary injury module

120: slit nozzle 130: gantry

131: chemical liquid supply means transfer rail 140: substrate transfer rail

150: holding member 160: nozzle chemical liquid discharge part cleaner

170: removable substrate transfer unit 180: priming module

Claims (12)

A floating stage which injects or injects and sucks gas to float the substrate to be processed and has an incision region in the middle of a transfer path of the substrate; A slit nozzle disposed above the floating stage to apply a chemical to a surface of the substrate; A substrate transfer mechanism for transferring the substrate to be processed along a process progress direction; A priming module which is aligned with the cutout region of the floating stage and performs a bead forming process by bringing the discharge port of the slit nozzle into close proximity or contact with each other before applying the chemical liquid to the substrate to be processed; Including, The floating stage includes a moving floating module that opens and closes the cutout region in association with the bead forming process of the slit nozzle, and the substrate to be processed at both ends of the moving floating module when the moving floating module closes the cutout region. Floating substrate coater device, characterized in that configured to include a supplementary floating module to complement. The method of claim 1, The complementary floating module closes the incision region in conjunction with the movement of the moving floating module and the floating substrate coater device, characterized in that to rise by complementing both ends of the substrate to be processed. The method of claim 1, The complementary floating module is a floating substrate coater device, characterized in that rotatably coupled to the outer side of both ends of the incision region. The method of claim 3, wherein The complementary floating module is a floating substrate coater device, characterized in that rotatably coupled in a direction crossing the process progress direction. The method of claim 1, And the complementary floating module is slidably coupled to the outer sides of both end portions of the incision region. The method of claim 5, The complementary floating module is a floating substrate coater device, characterized in that the sliding sliding coupling in the direction crossing the process direction. The method of claim 1, The injury stage, A substrate supply region for supplying the substrate to be processed in the process progress direction; An application region in which the slit nozzle applies a chemical liquid to the substrate to be processed; A relaxation region between the application region and the substrate supply region; A substrate discharge area for discharging the substrate to be processed that has passed through the application area; And the incision region is located adjacent to the application region. The method of claim 7, wherein And the incision region is located in front of the relaxation region. The method of claim 1, The floating stage has a plurality of fixed floating modules separated at predetermined intervals in parallel to the process progress direction, the moving floating module is provided between each of the plurality of fixed floating modules is configured to open and close the incision area Floating substrate coater device characterized in that. The method of claim 9, The floating floating module is a floating substrate coater device, characterized in that provided between the plurality of fixed floating module to be slidable in the process progress direction. The method of claim 10, The floating floating module is a floating substrate coater device, characterized in that the meshing with the pinion gear to move forward and backward according to the rotation of the pinion gear. The method of claim 11, And the complementary floating module rotates perpendicularly to the axis of rotation of the pinion gear according to the rotation of the bevel gear engaged with the pinion gear.

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