KR20110016002A - Cleaning unit, chemical coating apparatus having the same and cleaning method using the same - Google Patents

Abstract

PURPOSE: A cleaning unit, a chemical coating device with the same and a cleaning method using the same are provided to increase the cleaning efficiency. CONSTITUTION: A rotation driving unit(172) can rotate. A pulley(173) is separately fixed to the rotation driving unit and is arranged to face each other and rotates the rotation force of the rotating driving unit. A belt partially covers the rotation driving unit and the pulley and rotates the rotation driving unit and transmits the rotation force of the rotation driving unit to the pulley. At least one cleaning pad(175a,175b,176a,176b,176c) is installed in the external surface of the belt to be detachable, moves by rotation of the belt, contacts with the discharging surface of a nozzle discharging liquid and cleans the foreign material of the discharging surface.

Description

CLEANING UNIT, CHEMICAL COATING APPARATUS HAVING THE SAME AND CLEANING METHOD USING THE SAME

The present invention relates to an inkjet method of applying a chemical liquid on a substrate, and more particularly to a cleaning unit for cleaning a nozzle from which the chemical liquid is discharged, a chemical liquid applying apparatus having the same and a cleaning method using the same.

A liquid crystal display for displaying an image includes two substrates on which various thin films are deposited and a liquid crystal layer interposed between the two substrates. In general, since the thin films formed on each substrate have patterns of various shapes, they are formed through a deposition process and a photolithography process for the accuracy of the pattern. As such, since a photolithography process using an expensive mask is used to form one thin film, manufacturing cost increases and manufacturing process time increases.

Recently, a thin film forming method using an inkjet printing method has been used as an alternative to the thin film forming method. The inkjet printing method forms a barrier by applying a chemical to a specific position of the substrate, and thus does not require a separate etching process. The ink jet printing method may be used to form a color filter or an alignment layer of a liquid crystal display device.

In general, an inkjet printing apparatus includes a head for applying a chemical liquid on a substrate and a cleaning unit for cleaning the head. The head has a plurality of nozzles for injecting the chemical liquid and injects the chemical liquid at a specific position on the substrate. In general, the chemical liquid used in the inkjet printing apparatus is easily coagulated because of its high viscosity and volatility. In particular, after the chemical liquid is applied, the chemical liquid may remain around the ejection openings of the nozzles, and the residual chemical liquid may solidify around the ejection openings to block the ejection openings of the nozzles or may be applied to the substrate when the chemical liquid is applied to form a non-uniform film.

To prevent this, the cleaning unit cleans the plurality of nozzles to improve the yield of the product. Specifically, the cleaning unit includes a wiper for cleaning the nozzle, a supply roller for supplying the wiper, and a recovery roller for recovering the used wiper. The wiper has a tape shape, and both ends are wound around the supply roller and the recovery roller. The feeding roller and the collecting roller are spaced apart from each other, and the wiper wound on the feeding roller by the rotation of the feeding roller and the collecting roller is wound around the collecting roller. A cushion capable of lifting and lowering is provided between the supply roller and the recovery roller, and the cushion supports a portion of the wiper positioned between the supply roller and the recovery roller. In the cleaning, the nozzles of the head are located on the upper part of the cushion, and the ejection surface of the nozzles is in contact with the wiper located on the upper surface of the cushion to wipe the chemical liquid remaining on the ejection surface of the nozzle through the wiper.

As such, since the cleaning of the nozzle is performed through friction between the wiper and the nozzle discharge surface, foreign matter by the wiper may be caught on the discharge surface of the nozzle during the cleaning process. In addition, the cleaning unit requires a lot of expensive driving parts for moving the cushion and driving the supply roller and the recovery roller, and its structure is complicated, so it is difficult to disassemble and assemble when replacing the wiper. In addition, the use of expensive wipers, which are not reusable and consumables, increase maintenance costs.

It is an object of the present invention to provide a cleaning unit capable of improving the cleaning efficiency of a nozzle.

It is also an object of the present invention to provide a chemical liquid applying apparatus including the cleaning unit described above.

It is also an object of the present invention to provide a method for cleaning a nozzle of a chemical liquid applying apparatus using the above-described cleaning unit.

Cleaning unit according to one feature for realizing the above object of the present invention, the rotatable rotation drive unit; A pulley spaced apart from the rotation driving unit so as to face each other and rotating at a rotational force of the rotation driving unit; A belt partially surrounding the rotation drive unit and the pulley, rotating by the rotation drive unit, and transmitting a rotational force of the rotation drive unit to the pulley; And detachably installed on an outer surface of the belt, extend in the width direction of the belt, have elasticity, move by rotation on the belt, and come into contact with the discharge surface of the nozzle for discharging the chemical liquid. At least one cleaning pad for wiping off the foreign matter.

According to one aspect of the present invention, there is provided a chemical liquid applying apparatus comprising: a head having a plurality of nozzles for discharging a chemical liquid and applying the chemical liquid onto a substrate; And a cleaning unit for removing foreign substances remaining in the nozzles, wherein the cleaning unit comprises: a rotatable rotation drive unit; A pulley spaced apart from the rotation driving unit so as to face each other and rotating at a rotational force of the rotation driving unit; A belt partially surrounding the rotation drive unit and the pulley, rotating by the rotation drive unit, and transmitting a rotational force of the rotation drive unit to the pulley; And a foreign material of the discharge surface which is installed on the outer surface of the belt so as to be detachable, extends in the width direction of the belt, has elasticity, is moved by rotation on the belt, and comes into contact with the discharge surface of the nozzle for discharging the chemical liquid. At least one cleaning pad to wipe off the.

According to the present invention described above, it is easy to replace the cleaning pad, it is possible to improve the cleaning efficiency.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Hereinafter, an inkjet printing apparatus for forming a color filter of a liquid crystal display device as a chemical liquid applying device will be described as an example. However, the chemical liquid applying device may form various thin films in addition to the color filter, It can be used to form a film.

1 is a perspective view schematically showing a thin film forming apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the thin film forming apparatus 1000 may include an inkjet print unit 100, a chemical solution supply unit 200, a loader unit 300, an unloader unit 400, an indexer unit 500, and a baking unit 600. , And a main controller 700.

The inkjet print unit 100 forms a color filter on the substrate by applying a chemical solution, for example, RGB inks, on the substrate. In this embodiment, the inkjet print unit 100 applies RGB inks to form a color filter. However, the inkjet print unit 100 may apply various kinds of chemical liquids in addition to RGB inks, and thus, various thin films, such as an alignment layer, corresponding to the chemical liquid may be formed on the substrate.

The main controller 700 installed at one side of the inkjet print unit 100 controls process conditions of the inkjet print unit 100, and the inkjet print unit 100 is applied under the control of the main controller 700. Proceed with the process.

The chemical liquid supply unit 200 is installed at one side of the inkjet print unit 100. The chemical liquid supply unit 200 stores the chemical liquid to be applied to the substrate in the inkjet print unit 100, and provides the chemical liquid to the inkjet print unit 100. In this embodiment, the chemical liquid supply unit 200 stores the RGB inks separately from each other.

On the other side of the inkjet print unit 100, the loader 300 for receiving and loading a substrate waiting for processing from the outside and the unloader 400 for loading a substrate processed in the thin film forming apparatus 1000. Are installed side by side.

The loader unit 300 and the unloader unit 400 are installed at one side of the indexer unit 500, and the loader unit 300 and the unloader unit 400 are interposed between the indexer unit 500. The inkjet print unit 100 faces the inkjet print unit 100. The indexer unit 500 communicates with the inkjet print unit 100, the loader unit 300, the unloader unit 400, and the bake unit 600, and the inkjet print unit 100 and the loader. The substrate 300 is transferred between the unit 300, the unloader unit 400, and the bake unit 600.

In detail, the indexer 500 includes a transfer robot (not shown) for transferring a substrate, and the transfer robot draws the substrate from the loader 300 and transfers the substrate to the inkjet print unit 100. When the inkjet printing unit 100 completes the RGB ink coating of the substrate, the transfer robot draws the substrate on which the color filter is formed from the inkjet printing unit 100 and transfers the substrate to the baking unit 600. The bake unit 600 heats the inserted substrate to cure the thin film formed on the substrate, that is, the color filter, thereby completing the thin film forming process by the thin film forming apparatus 1000. The transfer robot withdraws the processed substrate from the bake unit 600 and transfers it to the unloader unit 400. The board | substrate mounted in the said unloader part 400 is carried out by a conveying apparatus.

In the above, the structure of the thin film apparatus 1000 has been schematically described. Hereinafter, the inkjet print unit 100 will be described in detail with reference to the accompanying drawings.

FIG. 2 is a perspective view illustrating the inkjet print unit shown in FIG. 1, and FIG. 3 is a plan view illustrating the inkjet print unit illustrated in FIG. 2.

2 and 3, the inkjet print unit 100 may include a stage 110, a substrate support 120, a gantry 130, first and second head assemblies 140a and 140b, The first and second head moving parts 151 and 152, the first cleaning unit 160, and the second cleaning unit 170 may be included.

On the stage 110, facilities for applying the chemical liquid, that is, the substrate support 120, the gantry 130, the first and second head assemblies 140a and 140b, and the first and second head movements The units 151 and 152, the first cleaning unit 160, and the second cleaning unit 170 are installed. The stage 110 is provided with a central rail 111 extending along one side of the stage 110, and the substrate support 120 is coupled to the central rail 111. The substrate support part 120 supports the substrate on which the chemical liquid is to be applied and is movable along the center rail 111. In addition, the substrate support unit 120 may be rotatably installed on the support on which the substrate is mounted, and fixes the substrate to the support during the chemical liquid application process.

The stage 110 may include first and second guide rails 112a and 112b that face each other with the center rail 111 interposed therebetween. Each of the first and second guide rails 112a and 112b extends in the same first direction D1 as the center rail 111 and extends in the first direction D1. It has almost the same length as one side of.

The gantry 130 is coupled to the first and second guide rails 112a and 112b. Both ends of the gantry 130 may be coupled to the first and second guide rails 112a and 112b, respectively, and may move horizontally along the first and second guide rails 112a and 112b.

The first and second head assemblies 140a and 140b are fixed to the gantry 130. When the gantry 130 is horizontally moved, the first and second head assemblies 140a and 140b installed in the gantry 130 are moved together, and accordingly, the first and the first and second heads D1 are moved in the first direction D1. The position of the two head assemblies 140a and 140b may be changed.

The first and second head assemblies 140a and 140b receive the chemical liquid from the chemical liquid supply part 200 and discharge the chemical liquid to the substrate fixed to the substrate support 120. In this embodiment, the inkjet print unit 100 has two head assemblies 140a and 140b, but the number of the head assemblies 140a and 140b is a process efficiency and the size of the head assemblies 140a and 140b. May increase or decrease depending on the

The first and second head assemblies 140a and 140b are disposed in parallel in the first direction D1 and are spaced apart from each other. In this embodiment, the first and second head assemblies 140a and 140b have the same configuration. Therefore, hereinafter, the configuration of the first head assembly 140a will be described in detail, and the detailed description of the second head assembly 140b will be omitted.

The first head assembly 140a is arranged in parallel with the first direction D1 in the second direction D2 perpendicular to the horizontal direction, and the first, second and third heads 141a, 142a, and 143a are arranged side by side. And each of the first to third heads 141a, 142a, and 143a includes a plurality of nozzles for discharging the chemical liquid.

In this embodiment, the first head assembly 140a includes three heads 141a, 142a, and 143a, but the number of the heads 141a, 142a and 143a depends on the process efficiency and the number of types of chemicals. May increase or decrease.

The first to third heads 141a, 142a, and 143a discharge ink having different colors to form a color filter on the substrate. Specifically, the first head 141a discharges R ink having a red color, the second head 142a discharges G ink having a green color, and the third head 143a has B ink having a blue color. To discharge. Here, the ink arrangement of the first to third heads 141a, 142a, and 143a may be changed according to the color pixel arrangement of the color filter.

Each of the heads 141a, 142a, and 143a is rotatable based on the central axis of each of the heads 141a, 142a, and 143a.

In the chemical liquid applying process, the first to third heads 141a, 142a, and 143a may discharge ink at the same time, or ink may be discharged from only one head at a time. In addition, the first to third heads 141a, 142a, and 143a may alternately discharge ink.

In addition, during the chemical liquid applying process, the first and second head assemblies 140a and 140b may be driven at the same time so that ink may be ejected from the first and second head assemblies 140a and 140b at the same time. And the second head assemblies 140a and 140b may alternately discharge the ink. In addition, when the first or second head assembly (140a, 140b) is first driven to apply ink, and then all the ink supplied to the head assembly is exhausted, the remaining head assembly may be driven to apply ink.

Meanwhile, the first and second head assemblies 140a and 140b are fixedly installed on the first head moving part 151, and the first head moving part 151 extends in the second direction D2. 1 moving rails are provided. The first and second head assemblies 140a and 140b may be coupled to different first moving rails and may reciprocate in the second direction D2 along the combined first moving rails. Here, the heads of the first and second head assemblies 140a and 140b are individually movable along the combined first moving rail.

The first head moving part 151 is fixed to the second head moving part 152, and a second moving rail (not shown) is installed in the second head moving part 152. The second moving rail extends in a direction D3 perpendicular to the first and second directions D1 and D2, that is, in a third direction D3 perpendicular to the upper surface of the stage 110. The first head moving part 151 is coupled to the second moving rail, and can be reciprocated in the up / down direction D2 along the second moving rail. The second head moving part 152 is fixed to the gantry 130. A third moving rail (not shown) extending in the second direction D2 is installed in the gantry 130. The second head moving part 152 is coupled to the third moving rail, and reciprocating in the second direction D2 is possible along the third moving rail.

As such, the first and second head assemblies 140a and 14b may be formed by the gantry 130 and the first and second head moving parts 151 and 152 in the first to third directions D1 and D2. , D3). That is, the first and second head assemblies 140a and 140b are movable in the first direction D1 by the horizontal movement of the gantry 130, and by the movement of the second head moving unit 152. It is movable in the second direction D2, and is movable in the third direction D3 by the movement of the first head moving part 151. In addition, the heads of the first and second head assemblies 140a and 140b are movable in the second direction D2 along the corresponding first moving rail.

During the chemical liquid applying process, the first and second head assemblies 140a and 140b are moved by the first and second head moving parts 151 and 152 and the gantry 130 to apply ink to the substrate. can do. In addition, the substrate support 120 moves in the first direction D1 along the center rail 111, and the first and second head assemblies 140a and 140b are moved in the second and third directions ( The ink application may be performed only by moving to D2 and D3).

Meanwhile, the first and second cleaning units 160 and 170 are installed in a maintenance area provided between the center rail 111 and the second guide rail 112b of the stage 110.

The first cleaning unit 160 scrapes and removes the ink remaining in the first and second head assemblies 140a and 140b. Specifically, the first cleaning unit 160 includes a cleaning tank that collects the ink remaining in the nozzles of the heads and discharges the ink to the outside, and the ink remaining in the nozzles of the heads on the top of the cleaning tanks. Blades for scraping off are installed. The first and second head assemblies 140a and 140b are transferred to the upper portion of the first cleaning unit 160 by the gantry 130 when ink is applied to a single substrate, and the nozzles are discharged. The surface moves in the first direction D1 while the surface abuts the blades. At this time, the blades scrape off the ink remaining on the discharge surface of the nozzle by friction with the discharge surfaces of the nozzles.

In addition, when the process waiting time is long, ink remaining in each nozzle may solidify. To remove this, the first and second head assemblies 140a and 140b discharge and remove the ink remaining in each nozzle in the cleaning tank. When the first and second head assemblies 140a and 140b discharge the remaining ink therein, the blades scrape off the ink deposited on the discharge surface of each nozzle.

The cleaning tank may be provided with a cleaning liquid. The cleaning liquid separates the ink remaining on the inner wall of the cleaning tank from the inner wall of the cleaning tank to induce residual ink to be discharged to the outside.

On the other hand, the second cleaning unit 170 is installed on one side of the first cleaning unit 160. When the gantry 130 is positioned at the home position, the second cleaning unit 170 faces the gantry 130 with the first cleaning unit 160 interposed therebetween. The second cleaning unit 170 wipes the ink on each nozzle of the first and second head assemblies 140a and 140b to improve the yield of the product. Here, the second cleaning unit 170 may secondary clean the nozzles first cleaned by the first cleaning unit 160, and clean the nozzles not cleaned by the first cleaning unit 160. You may.

Hereinafter, the configuration of the second cleaning unit 170 will be described in detail with reference to the accompanying drawings.

4 is a cross-sectional view showing the second cleaning unit shown in FIG. 2, FIG. 5 is a plan view showing the second cleaning unit shown in FIG. 4, and FIG. 6 shows a part of the second cleaning unit shown in FIG. 4. Perspective view,

4 to 6, the second cleaning unit 170 includes a cleaning tank 171, a rotation driving unit 172, a pulley 173, a belt 174, a first cleaning pad unit 175a, 175b, 175c), second cleaning pad parts 176a, 176b, and 176c, and a plurality of pad fixing parts 177a, 177b, 177c, 177d, 177e, and 177f.

Specifically, the cleaning tank 171 is opened in the upper surface, and provides a space in which the rotation drive unit 172, the pulley 173 and the belt 174 is installed. The cleaning tank 171 includes a bottom surface 171a and first to fourth sidewalls 171b, 171c, 171d, and 171e extending vertically from the bottom surface 171a.

In the cleaning tank 171, the rotation driving unit 172, the pulley 173, and the belt 174 are installed to be spaced apart from the bottom surface 171a. The rotation driving unit 172 is rotatable, is disposed adjacent to the first side wall 171b of the cleaning tank 171, and is installed so that the rotation shaft is parallel to the bottom surface 171a.

The pulley 173 is disposed to face the rotation driver 172 in the horizontal direction of the second and third sidewalls 171c and 171d, and rotates by the rotational force of the rotation driver 172. The rotation driver 172 and the pulley 173 are connected through the belt 174.

The belt 174 partially surrounds the rotation driving unit 172 and the pulley 173 and has a closed loop shape. The belt 174 rotates by the rotational force of the rotational drive 172, and transmits the rotational force of the rotational drive 172 to the pulley 173. The belt 174 may be formed in a mesh form to minimize foreign matters generated in the process of cleaning the head in the belt 174.

On the outer surface of the belt 174, first cleaning pad parts 175a, 175b, and 175c, second cleaning pad parts 176a, 176b, and 176c, and a plurality of pad fixing parts 177a, 177b, 177c, 177d, 177e, 177f) is installed. The first cleaning pad portions 175a, 175b, and 175c may include an R cleaning pad 175a, a G cleaning pad 175b, and a B cleaning pad 175c, and the first head assembly 140a (FIG. Clean heads). The second cleaning pad portions 176a, 176b, and 176c may include an R cleaning pad 176a, a G cleaning pad 176b, and a B cleaning pad 176c, and the second head assembly 140b (FIG. Clean heads).

In this embodiment, the second cleaning unit 170 has two cleaning pad parts 175a, 175b, 175c, 176a, 176b, and 176c, but the number of the cleaning pad parts is the head assembly 140a and 140b. Can be increased or decreased depending on the number of s) and the efficiency of the cleaning process.

Further, in this embodiment, each cleaning pad portion 175a, 175b, 175c, 176a, 176b, 176c has three cleaning pads 175a, 175b, 175c, 176a, 176b, 176c, but one cleaning The number of cleaning pads provided in the pad part may increase or decrease according to the number of heads provided in one head assembly and the efficiency of the cleaning process.

The cleaning pads 175a, 175b, 175c, 176a, 176b, and 176c of the first and second cleaning pad parts are spaced apart from each other in the longitudinal direction of the belt 174, and the cleaning pads are continuously formed for each cleaning pad part. Is placed. That is, the cleaning pads 175a, 175b, and 175c of the first cleaning pad part are sequentially spaced apart in the order of the R cleaning pad 175a, the G cleaning pad 175b, and the B cleaning pad 175c. The second cleaning pad part is disposed adjacent to the first cleaning pad part, and the cleaning pads 176a, 176b, and 176c of the second cleaning pad part also include an R cleaning pad 176a, a G cleaning pad 176b, and The B cleaning pads 176c are sequentially spaced apart from each other.

The R cleaning pads 175a and 176a clean nozzles of the heads that discharge R ink among the heads of the first and second head assemblies 140a and 140b. The G cleaning pads 175b and 176b clean nozzles of the heads discharging G ink among the heads of the first and second head assemblies 140a and 140b. The B cleaning pads 175c and 176c clean nozzles of the heads ejecting the B ink among the heads of the first and second head assemblies 140a and 140b.

The RGB cleaning pads 175a, 175b, 175c, 176a, 176b, 176c are fixed to the belt 174 by the pad fixing portions 177a, 177b, 177c, 177d, 177e, 177f. The pad fixing parts 177a, 177b, 177c, 177d, 177e, and 177f are installed in the same number as the RGB cleaning pads 175a, 175b, 175c, 176a, 176b, and 176c, and the RGB cleaning pads ( 175a, 175b, 175c, 176a, 176b, 176c) in one-to-one correspondence.

The pad fixing parts 177a, 177b, 177c, 177d, 177e, and 177f may be spaced apart from each other in the longitudinal direction of the belt 174, and may be detachably coupled to an outer surface of the belt 174. Each cleaning pad 175a, 175b, 175c, 176a, 176b, 176c is detachably coupled to the corresponding pad fixing portion.

In this embodiment, the cleaning paddles 175a, 175b, 175c, 176a, 176b, and 176c have the same configuration, and the pad fixing parts 177a, 177b, 177c, 177d, 177e, and 177f are also identical to each other. In addition, the coupling between the cleaning pads 175a, 175b, 175c, 176a, 176b, and 176c and corresponding pad fixing parts is also the same. Accordingly, the structure and the coupling relationship of each cleaning pad and each pad fixing unit will be described in detail with reference to the R cleaning pad 175a of the first cleaning pad unit and the pad fixing unit 177a corresponding thereto.

FIG. 7 is an exploded perspective view illustrating in detail the cleaning pad and the pad fixing part illustrated in FIG. 6.

6 and 7, the R cleaning pad 175a extends in the width direction of the belt 174, has a semicircular shape having a curved upper surface, and has a smooth surface and elasticity for easy shape change. Has Engaging grooves 75a and 75b are formed on both side surfaces of the R cleaning pad 175a to engage the pad fixing part 177a, respectively. The R cleaning pad 175a has almost no shape change, maintains a wet state, always maintains a soft state, and may be made of a polyolefin (PO) material having a high degree of surface.

When the head is cleaned, the R cleaning pad 175a is rotated by the rotation driving unit 172 while nozzles of the head corresponding to the R cleaning pad 175a are in contact with the top surface of the R cleaning pad 175a. It moves by the rotation of the belt 174 by wiping the foreign matter remaining on the discharge surface of the nozzles.

Meanwhile, the pad fixing part 177a extends in the width direction of the belt 174 and is detachably coupled to the surface of the belt 174. The pad fixing part 177a may include a bottom plate 77a coupled to the surface of the belt 174, and two side plates 77b and 77c facing each other. The side plates 77b and 77c extend vertically from the bottom plate 77a to form a space in which the R cleaning pad 175a is inserted. The upper end portions 77d and 77e of the side plates 77b and 77c are bent inward to face the bottom plate 77a, and are inserted into coupling grooves 75a and 75b formed in the R cleaning pad 175a to be inserted into the R. The cleaning pad 175a is fixed to the pad fixing part 177a. Since the R cleaning pad 175a is made of a material having elasticity, the shape of the R cleaning pad 175a may be easily changed, and thus the R cleaning pad 175a may be easily detached from the pad fixing part 177a. Accordingly, when the second cleaning unit 170 is contaminated with a specific cleaning pad, the second cleaning unit 170 can easily replace it with a new cleaning pad, and shorten the time required for replacing the nozzle cleaning consumable.

The pad fixing part 177a may be coupled to the belt 174 using a screw (not shown). To this end, screw holes 77f through which screws are inserted are formed in the bottom plate 77a of the pad fixing part 177a, and the screws are fastened to the belt 174 through the screw holes 77f. .

Again, referring to FIGS. 4-6, the second cleaning unit 170 further includes a plurality of guide rollers 178a, 178b, and 178c supporting the belt 174 at the inner surface of the belt 174. can do.

The plurality of guide rollers 178a, 178b, and 178c are installed in the space defined by the belt 174 and are spaced apart from each other in the longitudinal direction of the belt 174. Each of the guide rollers 178a, 178b, and 178c extends in the width direction of the belt 174 to have a circular columnar shape, and supports the lower surface of the belt 174. The guide rollers 178a, 178b, and 178c support the lower surface of the upper portion of the upper and lower portions of the belt 174 facing from the side. Accordingly, the second cleaning unit 170 may be disposed between the corresponding RGB cleaning pads 175a, 175b, 175c, 176a, 176b, and 176c when the first and second head assemblies 140a and 140b are cleaned. Adhesion can be improved.

In addition, the second cleaning unit 170 may be applied to the cleaning liquid spraying unit 181 and the belt 174 that spray the cleaning liquid CL to the RGB cleaning pads 175a, 175b, 175c, 176a, 176b, and 176c. It may further include an air knife 189 for ejecting air (AF).

The cleaning liquid spraying unit 181 may be fixed to an upper end portion of the first sidewall 171b of the cleaning tank 171, and may include a plurality of spray nozzles 181a for spraying the cleaning liquid CL. The cleaning liquid spraying unit 181 sprays the cleaning liquid CL to make the RGB cleaning pads 175a, 175b, 175c, 176a, 176b, and 176 always wet, and contaminates the RGB cleaning pads 175a. , 175b, 175c, 176a, 176b, 176 are cleaned.

The cleaning liquid spraying unit 181 is connected to the storage tank 183 installed outside the cleaning tank 171 through the first cleaning liquid supply line 182, and the storage tank 183 is the cleaning liquid supplying unit 187 and It is connected to the air supply 188. The cleaning liquid supply unit 187 provides the cleaning liquid CL to the storage tank 183 through the second cleaning liquid supply line 186, and the air supply unit 188 supplies the storage tank through the air supply line 187. Provide air to 183. In the storage tank 183, the cleaning liquid CL provided from the cleaning liquid supply unit 187 is stored, and the cleaning liquid CL in the storage tank 183 is discharged by the air pressure provided from the air supply unit 188, and the cleaning liquid CL is discharged. 1 is provided to the cleaning liquid injection unit 181 through the cleaning liquid supply line 182.

The air knife 189 is fixedly installed at an upper end of the fourth sidewall 171e facing the first sidewall 171b, and sprays air AF toward the belt 174 to provide the belt 174 with the belt 174. Foreign substances caught on the cleaning pads 175a, 175b, 175c, 176a, 176b, and 176c and the pad fixing parts 177a, 177b, 177c, 177d, 177e, and 177f are removed.

The bottom surface 171a of the cleaning tank 171 is formed with a discharge hole (171g) for discharging the foreign substances and the cleaning liquid generated during the cleaning process of the nozzles, the discharge hole (171g) is the first side wall (171b) Adjacent to). In addition, the bottom surface 171a of the cleaning tank 171 may include the first sidewall (from the fourth sidewall 171e to guide foreign matter and residual cleaning liquid in the cleaning tank 171 toward the discharge hole 171g). 171b) is installed to be inclined downward toward the side.

In addition, the fourth sidewall 171e of the cleaning tank 171 is coupled to the bottom surface 171a through white paper 171f. As described above, since the fourth sidewall 171e is coupled to the bottom surface 171a, it is easy to replace the fourth sidewall 171e through the fourth sidewall 171e opened when the cleaning pad is replaced.

Meanwhile, the second cleaning unit 170 may include the RGB cleaning pads 175a, 175b, 175c, 176a, 175a, 175b, 175c, 176a, 176b, and 176 to contain appropriate moisture. The apparatus may further include water removing parts 179a, 179b, 179c, and 179d to partially remove the cleaning liquid from the 176b and 176.

Each water removing unit is composed of fixing rollers 179a and 179c installed in the space defined by the belt 174 and pressure rollers 179b and 179d provided outside the belt 174. The fixing rollers 179a and 179c and the pressure rollers 179b and 179d correspond one to one with each other and are disposed to face each other with the belt 174 interposed therebetween. In this embodiment, the water removing parts 179a, 179b, 179c, and 179d are installed below the guide rollers 178a, 178b, and 178c.

The pressure rollers 179b and 179d are coupled to the cylinders 91 and 92, and are lifted and lowered by the driving of the connected cylinders 91 and 92. That is, the pressing rollers 179b and 179d are separated from the fixing rollers 179a and 179c by the cylinders 91 and 92. The pressure rollers 179b and 179d may be used when the RGB cleaning pads 175a, 175b, 175c, 176a, 176b, and 176 soaked in the cleaning liquid pass between the belt 174. , 92) to press the cleaning pad, thereby partially removing the cleaning liquid in the RGB cleaning pads 175a, 175b, 175c, 176a, 176b, and 176. That is, the moisture removing unit 179a, 179b, 179c, and 179d presses the cleaning solution from the RGB cleaning pads 175a, 175b, 175c, 176a, 176b, and 176 soaked in the cleaning solution, and squeezes the RGB cleaning pad 175a. , 175b, 175c, 176a, 176b, and 176) are in proper wet condition.

8 is a flowchart illustrating a head cleaning process according to an embodiment of the present invention, and FIGS. 9A to 9C are cross-sectional views illustrating a process of cleaning a head in the second cleaning unit illustrated in FIG. 4.

8 and 9A, first, the gantry 140 moves along the first and second guide rails 112a and 112b to move the first head assembly 140a to the second cleaning unit 170. ) Is placed on the top (step S110).

The first head moving part 151 (see FIG. 2) moves downward to move the processing liquid discharge surface of the R head 141a of the first and second head assemblies 140a and 140b into the first cleaning pad part. It adheres to the upper surface of the R cleaning pad 175a (step S120).

The belt 174 is rotated by the driving of the rotation driving unit 172, and thus the processing liquid remaining on the processing liquid discharge surface of the nozzles of the R head 141a while the R cleaning pad 175a is moved. Wipe off (step S130). In this case, when the cleaning of the first and first head assemblies 140a and 140b is started, the belt 174 is continuously rotated until the cleaning of the first and second head assemblies 140a and 140b is completed. do.

8, 9B, and 9C, the contaminated R cleaning pad 175a is moved toward the cleaning liquid jet 181 by the rotation of the belt 174, and from the cleaning liquid jet 181. It is cleaned by the cleaning liquid CL injected, for example, a solvent (step S140). Here, when the cleaning liquid injection unit 181 starts cleaning of the first and first head assemblies 140a and 140b, the cleaning liquid injection unit 181 continues until the cleaning of the first and second head assemblies 140a and 140b is completed. The cleaning liquid CL is sprayed.

Subsequently, the R cleaning pad 175a is moved toward the water removing parts 179a, 179b, 179c, and 179d by the rotation of the belt 174. FIG.

Meanwhile, when the cleaning of the R head 141a is completed, the cleaning of the G head 142a and the B head 143a of the first head assembly 140a is performed sequentially, and the first head assembly 140a is performed. The cleaning process of the G head 142a and the B head 143a in the same manner as the cleaning process of the R head 141a is performed by the G cleaning pad 175b and the B cleaning pad 175c of the first cleaning pad part. Is done.

8 and 9C, when the R cleaning pad 175a passes between the fixing rollers 179a and 179c and the pressure rollers 179b and 179d by the rotation of the belt 174, the pressure is applied. The rollers 179d and 179d pressurize the R cleaning pad 175a to squeeze the cleaning liquid absorbed into the R cleaning pad 175a (step S150).

Similarly, the G cleaning pad 175b and the B cleaning pad 175c are also cleaned in the same manner as the R cleaning pad 175a.

On the other hand, while the first and second head assemblies 140a and 140b are being cleaned, the air knife 189 continues to inject air AF toward the belt 174 to be caught by the belt 174. Remove the foreign object.

When the cleaning of the first and second head assemblies 140a and 140b is completed and the predetermined replacement cycle of the cleaning pads is reached, the cleaning pad is detached from the pad holder and replaced with a new cleaning pad (step) S160).

Although described with reference to the embodiments above, those skilled in the art will understand that the present invention can be variously modified and changed without departing from the spirit and scope of the invention as set forth in the claims below. Could be.

1 is a perspective view schematically showing a thin film forming apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view illustrating the inkjet print unit shown in FIG. 1.

3 is a plan view illustrating the inkjet print unit illustrated in FIG. 2.

4 is a cross-sectional view of the second cleaning unit illustrated in FIG. 2.

FIG. 5 is a plan view illustrating the second cleaning unit illustrated in FIG. 4.

FIG. 6 is a perspective view illustrating a part of the second cleaning unit illustrated in FIG. 4.

FIG. 7 is an exploded perspective view illustrating in detail the cleaning pad and the pad fixing part illustrated in FIG. 6.

8 is a flowchart illustrating a head cleaning process according to an embodiment of the present invention.

9A to 9C are cross-sectional views illustrating a process of cleaning a head in the second cleaning unit illustrated in FIG. 4.

Explanation of symbols on the main parts of the drawings

100: inkjet print portion 200: loader portion

300: unloader 400: chemical solution supply

500: indexer 600: baking unit

Claims (20)

 A rotatable rotation drive unit; A pulley spaced apart from the rotation driving unit so as to face each other and rotating at a rotational force of the rotation driving unit; A belt partially surrounding the rotation drive unit and the pulley, rotating by the rotation drive unit, and transmitting a rotational force of the rotation drive unit to the pulley; And It is installed to be detachable on the outer surface of the belt, extends in the width direction of the belt, is elastic, is moved by the rotation of the belt, the foreign material on the discharge surface in contact with the discharge surface of the nozzle for discharging the chemical liquid And at least one cleaning pad for wiping off. The method of claim 1, And at least one pad fixing part detachably installed on the belt, the cleaning pad being detachably inserted and fixed to fix the cleaning pad to the belt. The method of claim 2, The pad fixing part, A bottom plate extending in the longitudinal direction of the belt; And Extending vertically from the bottom plate to form a space into which the cleaning pad is inserted, facing each other, each comprising at least two side plates having an upper end bent inward, The cleaning pad is a cleaning unit, characterized in that the coupling grooves are formed is inserted into the upper end of the side plates. The cleaning unit according to claim 3, wherein the pad fixing part is coupled to the belt through screwing. The cleaning unit according to claim 1, wherein the belt has a net shape. The cleaning unit of claim 1, wherein the cleaning pad is made of a polyolefin material. The method according to any one of claims 1 to 6, And a cleaning solution spraying unit disposed adjacent to the belt, extending in the same direction as the cleaning pad, and spraying the cleaning solution onto the cleaning pad. The method of claim 7, wherein And an air knife disposed to face the cleaning liquid injection unit with the belt interposed therebetween, the air knife injecting air to the belt. The method of claim 7, wherein And at least one moisture removing unit installed adjacent to the belt and partially removing the cleaning liquid absorbed by the cleaning pad by pressing the cleaning pad. The method of claim 9, wherein the water removing unit, A fixing roller located on an inner surface side of the belt; And And a pressure roller positioned on an outer surface side of the belt to face the fixing roller, and pressurizing the cleaning pad toward the fixing roller in a state where the cleaning pad is interposed between the fixing rollers. unit. A head having a plurality of nozzles for discharging the chemical liquid and applying the chemical liquid onto a substrate; And It includes a cleaning unit for removing foreign matter remaining in the nozzles, The cleaning unit, A rotatable rotation drive unit; A pulley spaced apart from the rotation driving unit so as to face each other and rotating at a rotational force of the rotation driving unit; A belt partially surrounding the rotation drive unit and the pulley, rotating by the rotation drive unit, and transmitting a rotational force of the rotation drive unit to the pulley; And It is installed to be detachable on the outer surface of the belt, extends in the width direction of the belt, is elastic, is moved by the rotation of the belt, the foreign material on the discharge surface in contact with the discharge surface of the nozzle for discharging the chemical liquid And at least one cleaning pad for wiping off. The method of claim 11, Detachably installed on the belt, the cleaning pad is detachably inserted and coupled, the chemical liquid applying apparatus further comprises at least one pad fixing portion for fixing the cleaning pad to the belt. The method of claim 12, The pad fixing part, A bottom plate extending in the longitudinal direction of the belt; And A space extending vertically from the bottom plate to form a space into which the cleaning pad is inserted, facing each other, each having at least two side plates having an upper end bent inward, The cleaning pad is a chemical liquid applying apparatus, characterized in that the coupling grooves are formed is inserted into the upper end of the side plates. The cleaning unit according to any one of claims 11 to 13, wherein And a cleaning solution spraying unit disposed adjacent to the belt and extending in the same direction as the cleaning pad and spraying the cleaning solution on the cleaning pad. The method of claim 14, wherein the cleaning unit, And an air knife disposed to face the cleaning liquid injection unit with the belt interposed therebetween, the air knife injecting air to the belt. The method of claim 14, wherein the cleaning unit, And at least one water removing unit installed adjacent to the belt and partially removing the cleaning liquid absorbed by the cleaning pad by pressing the cleaning pad. The method of claim 16, wherein the water removing unit, A fixing roller located on an inner surface side of the belt; And And a pressure roller positioned on an outer surface side of the belt to face the fixing roller, and pressurizing the cleaning pad toward the fixing roller in a state where the cleaning pad is interposed between the fixing rollers. Application device. Disposing a chemical liquid discharge surface of the head for discharging the chemical liquid on an upper surface of the cleaning pad detachably installed on an outer surface of the rotating belt; And And wiping the chemical liquid remaining on the chemical liquid discharge surface by rotating the belt while the cleaning pad and the chemical liquid discharge surface of the head are in close contact with each other. The cleaning pad is made of a resin material having elasticity to maintain a wet state, characterized in that the chemical coating device cleaning method. The method of claim 18, Spraying a cleaning liquid on the contaminated cleaning pad being moved by the rotation of the belt to clean the dirty cleaning pad; And And spraying gas onto the rotating belt to remove foreign matter remaining on the belt. The method of claim 19, And after the spraying of the cleaning solution, removing the cleaning solution absorbed by the cleaning pad by pressurizing the cleaning pad being moved by the rotation of the belt.

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