KR101044407B1 - Head cleaning unit, chemical liquid discharging apparatus using the same, and head cleaning method - Google Patents

Abstract

The present invention discloses a head cleaning unit, a chemical liquid ejecting apparatus having the same, and a head cleaning method, wherein a residual chemical liquid of a liquid ejecting surface of an inkjet head is removed using a polyolefin sponge, and the sponge is washed and repeatedly used. It is characterized by. According to this feature, it is possible to prevent foreign substances from being inserted into the nozzle of the inkjet head and to reduce the cost by increasing the replacement cycle of the sponge.

Inkjet head, cleaning, sponge, CF substrate, pixel

Description

HEAD CLEANING UNIT, CHEMICAL LIQUID DISCHARGING APPARATUS USING THE SAME, AND HEAD CLEANING METHOD}

The present invention relates to a head cleaning unit, a chemical liquid ejecting apparatus having the same, and a head cleaning method. will be.

In recent years, display devices which are electro-optical devices called liquid crystal devices, electroluminescent devices, and the like have been widely used in the display portions of electronic devices such as mobile phones and portable computers, and display of full colors has been increasing by display devices. .

Full color display by a liquid crystal device is displayed by, for example, passing light modulated by the liquid crystal layer through a color filter. The color filter is, for example, a filter element of red (R), green (G), and blue (B) dots on the surface of a substrate formed of glass or the like as a so-called stripe arrangement, delta arrangement, or mosaic arrangement. Formed by side by side in a predetermined arrangement.

It is known that the photolithographic method is conventionally used when patterning various filter elements, such as R, G, and B of a color filter. However, in the case of using the photolithography method, the process is complicated, or a large amount of various materials, photoresist, and the like are consumed, so that there is a problem such as high cost.

In order to solve such a problem, the method of forming the filter element of a dot arrangement by the discharge of the material (ink) of a filter element in a dot form by the inkjet system which discharges a droplet is proposed.

An object of the present invention is to provide a head cleaning unit capable of improving the efficiency and productivity of a chemical liquid ejecting process, a chemical liquid ejecting apparatus having the same, and a head cleaning method.

The objects of the present invention are not limited thereto, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

In order to achieve the above object, the head cleaning unit according to the present invention comprises a porous absorbing member for contacting the liquid discharge surface of the inkjet head to absorb the remaining chemical liquid on the liquid discharge surface; And a cleaning module for cleaning the porous absorbent member, wherein the cleaning module has a dewatering plate having a plurality of through holes formed therein; And a driving member which presses the porous absorbing member on the upper surface of the dewatering plate and moves the porous absorbing member on the dewatering plate.

In the head cleaning unit according to the present invention having the configuration as described above, the cleaning module is provided on top of the dewatering plate, and further comprises a cleaning nozzle for spraying the cleaning liquid toward the porous absorbing member moving on the dewatering plate. It may include.

The cleaning module may further include a dry gas injection nozzle provided at a rear end of the cleaning nozzle above the dewatering plate and injecting a dry gas toward the porous absorbing member moving on the dewatering plate.

The porous absorbing member may have a columnar shape and disposed in parallel with the dewatering plate, and the cleaning module may further include a rotation driving member configured to rotate the porous absorbing member about its own central axis.

The porous absorbing member may be a sponge made of synthetic resin.

The through holes formed in the dewatering plate may be formed to have a diameter smaller from an upper surface of the dewatering plate to a lower surface of the dewatering plate.

In order to achieve the above object, the chemical liquid discharge apparatus according to the present invention includes a substrate support unit on which a substrate is placed and which is linearly movable in a first direction; A head unit provided on a path through which the substrate support unit is moved and having a plurality of inkjet heads for ejecting a chemical liquid on the substrate; A moving unit for moving the head unit in the first direction and in a second direction perpendicular to the first direction; And a head cleaning unit provided on one side of the substrate support unit, the head cleaning unit cleaning the chemical liquid ejecting surfaces of the inkjet heads, wherein the head cleaning unit is in contact with the liquid ejecting surface of the inkjet head and remains on the liquid ejecting surface. A porous absorbent member absorbing the chemical liquid; A cleaning tank having a dewatering plate in which a plurality of through holes are formed; And a driving member which presses the porous absorbing member on the upper surface of the dewatering plate and moves the porous absorbing member on the dewatering plate.

In the chemical liquid ejecting apparatus according to the present invention having the configuration as described above, the head cleaning unit is provided on an upper portion of the dewatering plate, and the cleaning nozzle for spraying the cleaning liquid toward the porous absorbing member moved on the dewatering plate. It may further include.

The head cleaning unit may further include a dry gas injection nozzle provided at a rear end of the cleaning nozzle above the dewatering plate and injecting a dry gas toward the porous absorbing member moving on the dewatering plate.

The porous absorbing member has a columnar shape and is arranged to be parallel to the dewatering plate, and the head cleaning unit may further include a rotation driving member for rotating the porous absorbing member about its own central axis.

The porous absorbing member may be a sponge made of synthetic resin.

The substrate may be a color filter substrate on which pixels are formed, and the chemical liquid may be red (R), green (G), or blue (B) ink for forming the pixels.

In order to achieve the above object, the head cleaning method according to the present invention is a method for cleaning a liquid ejecting surface of an inkjet head, wherein a porous absorbent member is brought into contact with the liquid ejecting surface of the head to retain the remaining chemical liquid on the liquid ejecting surface. Absorbing and pressing the porous absorbing member to the dewatering plate formed with holes to squeeze the chemical liquid absorbed by the porous absorbing member.

In the head cleaning method according to the present invention having the configuration as described above, the porous absorbing member can be moved along the upper surface of the dehydrating plate while rotating around the magnetic center axis.

The cleaning solution may be sprayed onto the porous absorbent member which is moved on the dehydrating plate, and the porous absorbent member may be dried by supplying a dry gas to the porous absorbent member.

According to the present invention, foreign matter can be prevented from being inserted into the nozzle of the head.

And according to the present invention it is possible to reduce the cost by increasing the replacement cycle of the consumables for head cleaning.

Hereinafter, a head cleaning unit according to a preferred embodiment of the present invention, a chemical liquid discharge apparatus including the same, and a head cleaning method will be described in detail with reference to the accompanying drawings. First, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are assigned to the same components as much as possible, even if shown on different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

(Example)

1 is a perspective view of an inkjet type chemical liquid applying apparatus 1. The chemical | medical solution application facility 1 of FIG. 1 is a facility which apply | coats a chemical | medical solution to an object by the inkjet method. For example, the object may be a color filter substrate of a liquid crystal display panel, and the chemical liquid may be red (R), green (G), or blue (B) ink in which pigment particles are mixed in a solvent. The ink may be applied to the inner region of the black mask arranged in a lattice pattern on the color filter substrate.

Hereinafter, a description will be given with an example of applying the ink to the color filter substrate, but the technical idea of the present invention should not be construed as being limited thereto.

Referring to FIG. 1, the chemical liquid applying apparatus 1 may include a chemical liquid discharge unit 10, a substrate transfer unit 20, a baking unit 30, a loading unit 40, an unloading unit 50, and a chemical liquid supply unit 60. And a control unit 70. The chemical liquid discharge unit 10 and the substrate transfer unit 20 may be disposed in a line in the first direction I and may be adjacent to each other. The chemical liquid supply unit 60 and the control unit 70 are disposed at a position facing the substrate transfer unit 20 around the chemical liquid discharge unit 10, and the chemical liquid supply unit 60 and the control unit 70 are in the second direction (II). Can be arranged in line. The loading part 40 and the unloading part 50 are disposed at a position facing the chemical liquid discharge part 10 with respect to the substrate transfer part 20, and the loading part 40 and the unloading part 50 are arranged in a second manner. It may be arranged in line in the direction (II). The bake unit 30 may be disposed adjacent to one side of the substrate transfer unit 20.

Here, the first direction (I) is the arrangement direction of the chemical liquid discharge unit 10 and the substrate transfer unit 20, the second direction (II) is the direction perpendicular to the first direction (I) on the horizontal plane, the third The direction III is a direction perpendicular to the first direction I and the second direction II.

The substrate to which the chemical liquid (ink) is to be applied is loaded into the loading part 40. The substrate transfer part 40 transfers the substrate carried in the loading part 40 to the chemical liquid discharge part 10. The chemical liquid discharge unit 10 receives the chemical liquid from the chemical liquid supply unit 60 and discharges the chemical liquid onto the substrate by an inkjet method. The substrate transfer unit 20 transfers the substrate from the chemical liquid discharge unit 10 to the bake unit 30. The baking unit 30 heats the substrate to evaporate the remaining liquid substance (solvent) except for the solid component of the chemical liquid (ink) discharged on the substrate. The substrate transfer unit 20 transfers the substrate from the bake unit 30 to the unloading unit 50. The substrate to which the chemical liquid is applied is carried out from the unloading part 50. The controller 70 controls overall operations of the chemical liquid discharge unit 10, the substrate transfer unit 20, the baking unit 30, the loading unit 40, the unloading unit 50, and the chemical liquid supply unit 60. do.

FIG. 2 is a perspective view of the chemical liquid discharge part 10 of FIG. 1. Referring to FIG. 2, the chemical liquid discharge part 10 includes a substrate support unit 100, a head unit 200, a moving unit 300, 400, and a cleaning unit 500, 600.

The substrate support unit 100 has a support plate 110 on which a substrate is placed. The support plate 110 may be a rectangular plate. The lower surface of the support plate 110 is connected to the rotation axis of the rotation drive motor 120. The rotation drive motor 120 rotates the support plate 110 so that the substrate placed on the support plate 110 is aligned at a predetermined position. The rotation drive motor 120 is installed on the upper surface of the slider 130. The guide member 140 extends in the first direction (I) in the center of the upper surface of the base (B). A linear motor (not shown) is built in the slider 130, and the slider 130 linearly moves in the first direction I along the guide member 140.

The head unit 200 discharges the chemical liquid (ink) to the substrate. The head unit 200 includes inkjet heads 210a and 210b and a bracket 220. One inkjet head 210a of the inkjet heads 210a and 210b is installed at one side facing the first direction I of the bracket 220, and the other inkjet head 210b is disposed at the bracket 220. It may be installed on the other side facing in the first direction (I). Each of the inkjet heads 210a and 210b has a red (R) head 212, a green (G) head 214 and a blue (B) head 216. The red (R) head 212, the green (G) head 214, and the blue (B) head 216 may be arranged in a line in the second direction (II).

The moving units 300 and 400 may move the head unit 200 in the upper portion of the path in which the support plate 110 is moved. The first moving unit 300 linearly moves the head unit 200 in the first direction (I), and the second moving unit 400 moves the head unit 200 in the second direction (II) and the third direction ( Can be moved linearly.

The second moving unit 400 includes a horizontal support 410 and a slider 420. The horizontal support 410 is positioned above the base B such that the longitudinal direction thereof faces the second direction II. The horizontal support 410 is provided with a guide rail 412 along the longitudinal direction. A linear motor (not shown) may be built in the slider 420, and the slider 420 moves linearly in the second direction II along the guide rail 412. The bracket 220 of the head unit 200 is connected to the slider 420, and the inkjet heads 210a and 210b installed in the bracket 220 are moved in the second direction II by the linear movement of the slider 420. Go straight. On the other hand, the slider 420 may be provided with a driving member (not shown) for linearly moving the bracket 220 of the head unit 200 in the third direction (III).

The first moving unit 300 includes a guide rail 310 and a slider 320. The guide rail 310 has a longitudinal direction toward the first direction (I), and is provided at both side edge portions of the upper surface of the base B with respect to the guide member 140 of the substrate support unit 100. The slider 320 includes a linear motor (not shown) and linearly moves in the first direction I along the guide rail 310. Both ends of the horizontal support 410 of the second moving unit 400 are connected to the slider 320, respectively. The second moving unit 400 including the horizontal support 410 is moved in the first direction I by the linear movement of the slider 320, and the second moving unit is moved by the movement of the second moving unit 400. The head unit 200 connected to 400 is linearly moved in the first direction (I).

The head unit 200 may linearly move in the first direction (I), the second direction (II), and the third direction (III) by the first moving unit 300 and the second moving unit 400, and the substrate The laid support plate 110 may be linearly moved in the first direction I by the slider 130 and the guide member 140. When the chemical liquid is discharged onto the substrate, the head unit 200 is fixed at a predetermined position, and the support plate 110 on which the substrate is placed may move in the first direction (I). Alternatively, the support plate 110 on which the substrate is placed may be fixed at a predetermined position, and the head unit 200 may be moved in the first direction (I).

The cleaning units 500 and 600 periodically clean the chemical liquid discharge surfaces of the inkjet heads 210a and 210b, that is, the surfaces on which the nozzles for discharging the chemical liquid are formed. Typically, after the chemical liquid ejecting process is performed on one substrate, cleaning of the chemical liquid ejecting surfaces of the inkjet heads 210a and 210b may proceed.

The cleaning units 500 and 600 include a first cleaning unit 500 and a second cleaning unit 600. The first cleaning unit 500 and the second cleaning unit 600 may be provided on one side of the substrate support unit 100 on the upper surface of the base B, and may be arranged in a line in the first direction (I). The inkjet heads 210a and 210b are moved to the top of the cleaning units 500 and 600 by the first moving unit 300 and the second moving unit 400, and at the top of the cleaning units 500 and 600 during the cleaning process. It can be moved in the first direction (I).

The first cleaning unit 500 performs a purging process and a blading process, and the second cleaning unit 600 performs a blotting process. The purging process, the blading process, and the blotting process are performed sequentially. Purging is a process of spraying a part of the chemical liquid contained in the inkjet heads 210a and 210b at a high pressure. The blading process is a process of removing the chemical liquid remaining on the chemical liquid discharge surfaces of the inkjet heads 210a and 210b in a non-contact manner using a blade. The blotting process is a process of removing the chemical liquid remaining on the chemical liquid discharge surfaces of the inkjet heads 210a and 210b by a contact method using a porous absorbing member.

3 is a plan view of the second cleaning unit 600 of FIG. 2, and FIG. 4 is a side cross-sectional view of the cleaning tank of FIG. 3. The second cleaning unit 600 is called a head cleaning unit according to the claims.

3 and 4, the second cleaning unit 600 includes a processing chamber 610, a porous absorbing member 601, and a cleaning module provided in the processing chamber 610. The cleaning module cleans the porous absorbent member 601.

The porous absorbing member 601 may have a cylindrical shape and may be disposed horizontally. The porous absorbing member 601 may be disposed in a lengthwise direction perpendicular to the moving direction of the inkjet head 210a during the cleaning process. The porous absorbing member 601 may be a sponge made of synthetic resin, and specifically, may be a sponge made of polyolefin. The porous absorbing member 601 contacts the chemical liquid discharge surface of the inkjet head 210a, absorbs the chemical liquid remaining on the chemical liquid discharge surface, and removes the chemical liquid on the chemical liquid discharge surface. In this case, the porous absorbing member 601 is fixed, and the inkjet head 210a may linearly move in one direction.

Conventionally, a wiper has been used as a means for removing the residual chemical liquid from the chemical liquid discharge surface by a contact method, but the microfiber of the wiper has been inserted into the nozzle of the chemical liquid discharge surface to block the nozzle. However, since the present invention removes the residual chemical liquid on the chemical liquid discharge surface using a sponge made of synthetic resin, it is possible to prevent foreign substances from being inserted into the nozzle.

The cleaning module includes a cleaning tank 620 and driving members 660, 670 and 680. The cleaning tank 620 may be disposed inside the processing chamber 610 and may have a generally hexahedral shape. A drain hole 622 is provided at the bottom of the cleaning tank 620, and an opening 624 is formed at the side wall of the cleaning tank 620 to allow the rotation shaft 662 of the rotation driving member 660 to be described later. Can be.

The dehydration plate 630 is installed inside the cleaning tank 620. The dewatering plate 630 has a plate shape and is installed in the washing tank 620 so as to be spaced apart from the bottom of the washing tank 620 by a predetermined distance. A plurality of through holes 632 is formed in the dehydration plate 630. The through holes 632 may be formed to have a smaller diameter from an upper surface of the dehydrating plate 630 to a lower surface of the dehydrating plate 630. As such, when the inner circumferential surfaces of the through holes 632 are inclined, the contact area between the porous absorbing member 601 and the dehydrating plate 630 may be increased as compared with the case where the inner circumferential surfaces are vertical.

The cleaning nozzle 640 and the dry gas injection nozzle 650 may be provided on the dewatering plate 630 inside the cleaning tank 620. The cleaning nozzle 640 may be provided at, for example, a central point above the dewatering plate 630, and sprays the cleaning liquid toward the porous absorbing member 601 moving on the dewatering plate 630. The dry gas injection nozzle 650 may be provided at a rear end of the cleaning nozzle 640 on the dewatering plate 630, and sprays dry gas toward the porous absorbing member 601 moving on the dewatering plate 630.

The porous absorbing member 601 is supported by the rotation driving member 660 and the first and second driving members 670 and 680 and may rotate and linearly move. The rotation drive member 660 includes rotation shafts 662 and a drive motor 664. The rotating shafts 662 are respectively connected to both ends of the longitudinal direction of the porous absorbing member 601, and the driving motor 664 is connected to the rotating shaft 662 of any one of the rotating shafts 662. The porous absorbing member 601 may be rotated about the magnetic center axis along the longitudinal direction by the rotational force of the driving motor 664.

The first driving member 670 may move the porous absorbing member 601 in the vertical direction to press the porous absorbing member 601 on the upper surface of the dehydrating plate 630. The second driving member 680 may linearly move the porous absorbing member 601 in the horizontal direction on the dehydrating plate 630.

The first drive member 670 has sliders 674 connected to the ends of the rotation shafts 662, respectively. The sliders 674 may be guided and moved by guide rails 672 arranged vertically in the vertical direction. One of the sliders 674 may have a linear motor (not shown).

The second driving member 680 has sliders 684 connected to lower ends of the guide rails 672 of the first driving member 670, respectively. The sliders 684 may be guided by guide rails 682 arranged horizontally on both sides of the cleaning tank 620 to move in the horizontal direction. One of the sliders 684 may have a linear motor (not shown).

A process of cleaning the porous absorbing member 601 cleaning the liquid discharge surface of the inkjet head 210a by using the second cleaning unit 600 having the above configuration will be described below.

5A to 5D are views showing an operating state of the second cleaning unit.

5A to 5D and 3, the porous absorbing member 601 is moved upward by the first driving member 670 and is fixed at a predetermined position. The inkjet head 210a moves in the horizontal direction and contacts the porous absorbing member 601 on the liquid discharge surface of the inkjet head 210a. The porous absorbing member 601 absorbs the chemical liquid remaining on the liquid discharge surface of the inkjet head 210a, and removes the residual chemical liquid on the liquid discharge surface. (FIG. 5A).

Thereafter, the porous absorbing member 601 is moved downward by the first driving member 670, and is pressed on the dewatering plate 630 (FIG. 5B).

The rotation driving member 660 rotates the porous absorbing member 601, and the second driving member 680 moves the rotating porous absorbing member 601 along the upper surface of the dehydrating plate 630. The chemical liquid may be separated from the porous absorbing member 601 by the pressing force and rotational force applied to the porous absorbing member 601 and the frictional force acting between the porous absorbing member 601 and the dehydrating plate 630. The separated chemical liquid drops to the bottom surface of the cleaning tank 620 through the through holes 632 of the dehydration plate 630. At this time, the cleaning nozzle 640 may spray the cleaning liquid toward the porous absorbing member 601. (FIG. 5C)

While the process described with reference to FIG. 5C is continuously repeated, the porous absorbing member 601 is moved to the end of the dewatering plate 630, where the dry gas injection nozzle 650 is moved to the porous absorbing member 601. Spray dry gas toward the side (FIG. 5D).

As described with reference to FIGS. 5A to 5D, the present invention can reduce the cost spent on consumable parts and thereby improve productivity by cleaning and repeatedly using the porous absorbent member as the consumable part.

The foregoing description is merely illustrative of the technical idea of the present invention, and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

The drawings described below are for illustrative purposes only and are not intended to limit the scope of the invention.

1 is a perspective view of an inkjet type chemical liquid application equipment.

FIG. 2 is a perspective view of the chemical liquid discharge part of FIG. 1. FIG.

3 is a plan view of the second cleaning unit of FIG. 2.

4 is a side cross-sectional view of the cleaning tank of FIG. 3.

5A to 5D are views showing an operating state of the second cleaning unit.

<Description of Symbols for Main Parts of Drawings>

200: head unit 500: first cleaning unit

600: second cleaning unit 601: porous absorbent member

610: processing chamber 620: cleaning tank

630: dewatering plate 640: cleaning nozzle

650: dry gas injection nozzle 660: rotary drive member

670: first drive member 680: second drive member

Claims (16)

A porous absorbing member in contact with the liquid ejecting surface of the inkjet head to absorb the remaining chemical liquid on the liquid ejecting surface; And Including a cleaning module for cleaning the porous absorbent member, The cleaning module, A cleaning tank having a dewatering plate having a plurality of through holes formed therein; A driving member for pressing the porous absorbing member against an upper surface of the dewatering plate and moving the porous absorbing member on the dewatering plate; And a cleaning nozzle provided on an upper portion of the dewatering plate and spraying a cleaning liquid toward the porous absorbent member moving on the dewatering plate. delete The method of claim 1, The cleaning module, And a dry gas injection nozzle provided at a rear end of the cleaning nozzle above the dewatering plate and injecting a dry gas toward the porous absorbing member moving on the dewatering plate. The method according to claim 1 or 3, The porous absorbing member has a columnar shape and is arranged to be parallel to the dehydrating plate, The cleaning module further comprises a rotation drive member for rotating the porous absorbing member about its own central axis. The method of claim 4, wherein The porous absorbing member is a head cleaning unit, characterized in that the sponge (Sponge) made of a synthetic resin material. A porous absorbing member in contact with the liquid ejecting surface of the inkjet head to absorb the remaining chemical liquid on the liquid ejecting surface; And Including a cleaning module for cleaning the porous absorbent member, The cleaning module, A cleaning tank having a dewatering plate having a plurality of through holes formed therein; A driving member pressurizing the porous absorbing member to an upper surface of the dewatering plate and moving the porous absorbing member on the dewatering plate; The through-holes formed in the dewatering plate is formed so that the diameter becomes smaller toward the lower surface of the dewatering plate from the upper surface of the dewatering plate. A substrate support unit on which the substrate is placed and which is linearly movable in the first direction; A head unit provided on a path through which the substrate support unit is moved and having a plurality of inkjet heads for ejecting a chemical liquid on the substrate; A moving unit for moving the head unit in the first direction and in a second direction perpendicular to the first direction; And A head cleaning unit provided on one side of the substrate support unit, the head cleaning unit cleaning the chemical liquid ejecting surfaces of the inkjet heads, The head cleaning unit, A porous absorbing member in contact with the liquid ejecting surface of the inkjet head to absorb residual chemical liquid on the liquid ejecting surface; A cleaning tank having a dewatering plate in which a plurality of through holes are formed; And And a driving member which presses the porous absorbing member on the upper surface of the dewatering plate and moves the porous absorbing member on the dewatering plate. The method of claim 7, wherein The head cleaning unit, And a cleaning nozzle provided on an upper portion of the dewatering plate and spraying a cleaning liquid toward the porous absorbing member moving on the dewatering plate. The method of claim 8, The head cleaning unit, And a dry gas injection nozzle provided at a rear end of the cleaning nozzle above the dewatering plate and injecting a dry gas toward the porous absorbing member moving on the dewatering plate. The method according to any one of claims 7 to 9, The porous absorbing member has a columnar shape and is arranged to be parallel to the dehydrating plate, The head cleaning unit further comprises a rotation driving member for rotating the porous absorbing member about its own central axis. 11. The method of claim 10, The porous absorbing member is a chemical liquid discharge device, characterized in that the sponge (Sponge) made of a synthetic resin material. The method of claim 11, The substrate is a color filter substrate on which pixels are formed, And the chemical liquid is red (R), green (G), or blue (B) ink forming the pixel. In the method for cleaning the liquid discharge surface of the inkjet head, A porous absorbent member is brought into contact with the liquid discharge surface of the head to absorb residual chemical liquid on the liquid discharge surface, And pressing the porous absorbent member onto the dewatering plate having holes formed therein to squeeze the chemical liquid absorbed into the porous absorbent member. The method of claim 13, And move the porous absorbing member along an upper surface of the dehydrating plate while rotating the magnetic absorbing axis about the magnetic center axis. The method of claim 14, And a cleaning liquid is sprayed onto the porous absorbent member that is moved on the dewatering plate. The method of claim 15, And drying the porous absorbent member by supplying a drying gas to the porous absorbent member.

Images