KR20110014092A - Probe unit and testing apparatus using the same - Google Patents

Abstract

PURPOSE: A probe unit and a testing device using the same are provided to prevent the abrasion and damage to a probe electrode by being separated from an electrode. CONSTITUTION: A support stand(18) is arranged on the probe base(16). A probe unit supported by the support stand includes a plurality of probes having a front probe and a rear probe. A electrical connector(120) has a plurality of wires. The front end of the wiring includes the electrical connector. The support stand comprises a space which is opened forward, rearward, and downward. The rear part of the electrical connector is guided to the upper part of the probe base.

Description

Probe unit and testing apparatus using the same

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe unit used for conduction test of a plate-like object under test, such as a liquid crystal display panel, and a test apparatus using the same.

A flat object such as a liquid crystal display panel is generally inspected or tested by an inspection apparatus or a test apparatus using a probe unit. There is one described in Patent Documents 1 and 2 as one such probe unit.

The probe unit described in Patent Literature 1 includes a plate-shaped probe base attached to a main frame of a test apparatus, and a plurality of probe devices arranged at intervals in the front-back direction on the probe base.

Each probe device includes a connection block (slide base) attached to the probe base, a support block suspended from the connection block to adjust the height position, and a probe assembly (probe block) having a plurality of probes disposed below the probe folder. A probe assembly assembled to the block, and a sheet-shaped electrical connector extending rearward from the rear end of the probe assembly.

In the prior art, sheet-shaped wiring connectors such as TAB (tape automation mounting), TPC (tape carrier bonding), and FPC (flexible printed wiring board) were used as the electrical connection ports.

The connecting block and the support block form a support device for supporting the probe assembly. In addition, the electrical connector has a plurality of wirings extending in the front-rear direction. Each wire is connected to the trailing needle of the probe at its distal end.

The electrical connector extends below the probe base and is electrically connected to the relay substrate at the rear end. The relay board is electrically connected to the electric circuit which generates the test signal for the object under test through the relay wiring.

However, if the electrical connection port extends from the lower side of the probe base, the relay board must be provided below the probe base as in Patent Literature 2, and the relay wiring extending backward from this relay board is located under the probe base to It must be present extending to the rear of the base.

When replacing or inspecting faulty parts or inspection parts such as electrical connectors, relay boards, relay wiring, etc., the probe unit should be separated from the main frame to perform replacement or maintenance work. Not only does the replacement or inspection work of the parts become cumbersome, but the handling of the relay wiring becomes inconvenient.

Also, in a test apparatus that arranges a driving mechanism such as a mechanism for moving the probe assembly up or down with respect to an inspected object under the probe base, the electrical connection, the relay board, and the relay wiring do not interfere with such a driving mechanism. Passed below the drive mechanism, handling of the drive mechanism, electrical connection port, relay board, relay wiring, etc. is inconvenient, and their maintenance management work is complicated.

As one of the methods for solving the above problems, a plurality of wiring passage holes penetrating the probe base in the vertical direction are provided in the probe base at intervals in the left and right direction, and the electrical connection ports or the relay wiring of each probe device are connected to the passage holes. It may be contemplated to allow passage from below the probe base to above.

However, since the mechanical strength at the position where the wiring passage hole of the probe base is installed is reduced in this way, the structure of the probe base must be provided because a plurality of reinforcing members must be provided in the probe base to compensate for such a decrease in mechanical strength. It becomes complicated and the probe unit becomes expensive.

Japanese Patent Laid-Open No. 2004-191064 Japanese Patent Publication No. 2009-115585

An object of the present invention is to provide a structure that allows the electrical connection port to pass to the upper side of the probe base without providing the wiring passage hole in the probe base.

The probe unit according to the present invention is a probe device having a plate-shaped probe base, a support disposed on the probe base, and a probe device supported by the support, the probe device including a plurality of probes having a leading needle and a trailing needle, An electrical connector extending rearward from the probe device, which has a plurality of wires extending in the front-rear direction, and includes an electrical connector whose front end portion is connected to the trailing needle. The support has a space which is opened forward, rearward and downward. The rear region of the electrical connection port extends through the space of the support while leading to the upper side of the probe base.

The support is a plate-shaped body portion extending in the left and right direction, the door portion (shaped like a door, 의해) by the body portion to which the probe device is attached, and the leg portion extending downward from each end in the left and right direction of the body portion It may be formed in the shape of the front face.

One of the legs protrudes in one direction of the left and right directions from the front end of the body portion, the other of the legs protrudes in the other direction of the left and right directions from the rear end of the body portion, accordingly the support is crank ( crank) may be formed in a planar shape.

The support may be attached to the probe base by a screw member which penetrates one of the probe base and the leg in the vertical direction and is screwed to the other side of the probe base and the leg.

The probe unit according to the present invention may include a plurality of the supports and a plurality of the probe devices supported by the supports, respectively. Instead of this, it may include a plurality of the probe devices commonly supported by the support.

The probe unit according to the present invention may further include a relay board on which a rear end of the wiring of the electrical connection port is electrically connected to the relay board disposed above the probe base. The rear end of the electrical connector may be electrically connected to the relay board by a connector.

 The relay board may be disposed above the probe base in an obliquely extending rearward and upward direction, and the rear end of the electrical connector may be electrically connected to the relay board by a connector and a cable connected to the connector. good.

The probe device is attached to the support with a probe assembly having the plurality of probes disposed below the probe holder, a first support device for supporting the probe assembly, and a second support device for supporting the first support device. A second support device can be provided. In addition, the electrical connector may extend rearward from the rear end of the probe assembly.

The electrical connector may extend rearward through the lower portion of the first support device, and may be led from the front end of the probe base to the upper side of the probe base.

The electrical connector is a first wiring region having a plurality of first wirings in a front-rear direction, a first wiring region in which a tip end of each first wiring is connected to a trailing needle of the probe, and a plurality of first wiring regions extending in a front-rear direction. A second wiring area having a second wiring may include a second wiring region in which a distal end of each second wiring is connected to a rear end of the first wiring, and further includes a second wiring region of the probe base in the second wiring region. It may be guided to the upper side and may pass through the said space of the said support stand.

The first support device is a support block supported by the second support device and a coupling block combined with the support block, and the probe assembly is entirely combined at the lower side, and the first wiring area is disposed at the lower side. And a connection block disposed between the rear side of the rear side of the support block and the rear side of the rear side of the coupling block and attached to the support block, wherein the front end portion of the second wiring region is disposed below. have. The rear end portion of the first wiring region may be folded back from the lower side of the coupling block to the upper side at the rear end of the coupling block so that each wiring may be connected to the wiring of the second wiring region.

The electrical connector may include a sheet-shaped wiring connector.

The test apparatus according to the present invention includes a base, a worktable having a receiving portion supplied with a plate-shaped test object as a worktable supported by the base, and a probe unit disposed on the base as the probe unit as described above. And a unit support mechanism for supporting the probe unit to the base. The unit support mechanism is a first movable member received in the base so as to be movable in the front-rear direction in the XY plane parallel to the inspected object, and includes a first movable body extending in the XY plane in left and right directions and in an oblique vertical direction. A second movable body coupled to the first movable body so as to be movable, the second movable body extending in the lateral direction, a stopper defining the most advanced position of the second movable body, and the first movable body moving forward and backward with respect to the test subject; And a probe displacement mechanism for displacing the second movable body in the vertical direction while moving the second movable body in the front-rear direction. The probe unit is supported by the second moving body.

According to the present invention, it is possible to have a structure that allows the electrical connection port to pass through the upper side of the probe base without providing the wiring passage hole in the probe base.

1 is a plan view showing an embodiment of a probe unit according to the present invention;
FIG. 2 is a front view showing one probe device and its vicinity in the probe unit shown in FIG. 1;
3 is a plan view showing one probe device and its vicinity in the probe unit shown in FIG. 1;
4 is a front view of the probe apparatus with the probe assembly and the coupling block removed;
Fig. 5 is a right side view of the probe unit shown in Figs. 1 and 2, showing the support in cross section;
FIG. 6 is a cross-sectional view taken along line 6-6 of FIG. 5;
7 is an enlarged plan view showing an embodiment of the support;
FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 3 to show an exploded view of the probe unit;
9 is a sectional view of an essential part of the probe device,
10 is an exploded perspective view showing an embodiment of a combination device for combining a coupling block to a support block;
11 is an enlarged cross-sectional view of a connecting portion of an electrical connector;
FIG. 12 is a right side view showing an embodiment of a test apparatus using the probe unit according to the present invention in a state where the probe is pressed against the test object, and a part of which is shown in cross section, FIG.
FIG. 13 is a diagram showing the test apparatus shown in FIG. 12 in a state where the probe is displaced upward from the inspected object. FIG.
FIG. 14 is a view showing the test apparatus shown in FIG. 12 in a state in which the probe is withdrawn from the position under test;
FIG. 15 is a plan view of the inspection apparatus shown in FIG. 12;
16 is a cross-sectional view taken along line 16-16 of FIG. 12,
FIG. 17 is a sectional view taken along line 17-17 of FIG. 12,
FIG. 18 is an enlarged view of a portion indicated by symbol A in FIG. 12.

[About terms]

In the present invention, in Fig. 2, the up-down direction is referred to as the up-down direction or the Z-direction, the left-right direction is referred to as the left-right direction or the X-direction, and the paper back direction is referred to as the front-rear direction or the Y-direction with the tip needle tip side forward. . However, their direction depends on the position of the subject under the acceptance of a panel receiver such as a worktable.

Therefore, the probe unit according to the present invention is attached to the test apparatus in a state in which any direction is possible, such as a state in which the up and down direction (Z direction) in the present invention is actually in the up and down direction, in the up and down direction, and in an oblique direction. Is used.

[Example of probe unit]

1 to 10, the probe unit 10 is used for the lighting inspection of the inspected object 12, with the liquid crystal display panel shown in part in FIGS. 8 and 9 as the flat inspected object 12. FIG. The inspected object 12 has a rectangular shape, and a plurality of electrodes 14 (see Fig. 9) are formed at predetermined pitches at edge portions corresponding to at least two adjacent sides of the rectangle. Each electrode 14 has a band-like shape extending in the direction (X direction or Y direction) orthogonal to the edge portion on which it is disposed.

The probe unit 10 includes a plate-shaped probe base 16 fixed to a main body frame (not shown), and a plurality of supports 18 arranged in parallel at intervals in the left and right directions above the front end of the probe base 16. ), A plurality of probe devices 20 placed in a one-to-one relationship to the support 18, a plate-shaped relay base 22 (see FIG. 5) disposed on the probe base 16, and a relay base 22. ), The relay board 24 (see Fig. 5) is mounted.

The probe base 16 is a test apparatus in the state extending in the longitudinal direction (left-right direction in the example of illustration) of the one edge part in which the electrode 14 of the to-be-tested object 12 is arrange | positioned, and the thickness direction to the up-down direction. It is attached to the body frame of the direct or through the plate-shaped base.

As shown in Fig. 1 to Fig. 3 and Fig. 5 to Fig. 8, each support 18 is a plate-shaped body portion 18a extending in the lateral direction, and downward from the end portion in the lateral direction of the body portion 18a. The pair of extending legs 18b and 18b is formed into a frontal shape of a door shape. Thereby, each support 18 has the space 26 (refer FIG. 2, 6) which opens to the front, back, and downward.

As shown in FIG. 7, in plan view, one leg portion 18b protrudes in one side direction in the left and right direction at the front end of the body portion 18a, and the other leg portion 18b is the portion of the body portion 18a. Protrudes from the rear end to the other side in the left and right directions. Thereby, the support stand 18 is formed in planar view of substantially Z-shape, ie, crank-shape in plan view.

The support base 18 penetrates the left and right directions of the probe base 16 from the lower side and is probed by a pair of screw members 28 screwed into the female screw hole 18c of the leg portion 18b. (16) is attached. The probe device 20 is attached on the body portion 18a.

As shown in Figs. 2, 3 and 8 and 9, each probe device 20 supports the probe assembly 30, the support block 32 supporting the probe assembly 30, and the support block 32. And a coupling block 36 to support the probe assembly 30 to the support block 32 by being supported at a lower side (any one direction in the Z direction) of the connection block 34 and the support block 32, and a coupling block. An assembly device 38 for combining 36 to the lower side of the support block 32 and a connection block 40 attached to the lower side of the support block 32.

As shown in Fig. 2 to Fig. 6 and Fig. 8 to Fig. 9, the probe assembly 30 has a plurality of probes 42 made of a conductive material spaced in the front and rear direction on the lower surface of the block piece 44. Arranged in a state extending in the front and rear direction at intervals in the left and right directions on the pair of slit bar 46 combined, the bar member 48 having a circular cross-sectional shape through the probe 42 through the bar Both ends of the member 48 are combined with the block piece 44 by a pair of covers 50.

As shown in Fig. 9, each probe 42 has a rectangular plate-shaped needle body portion 42a, a tip region 42b extending integrally from the front end of the needle body portion 42a to the front, and the needle body. The rear end region 42c extending integrally from the rear end of the section 42a to the rear, the tip needle line 42d extending downward from the front end of the front end region 42b, and the rear end region 42c upward. It consists of a blade-type needle having an extended trailing needle 42e. The leading needle 42d and the trailing needle 42e are formed in a triangle, and the ends are made sharp.

The block pieces 44 and each slit bar 46 each have a long columnar shape in the left and right directions by ceramics, synthetic resin, and the like having electrical insulation properties.

Each slit bar 46 is formed in the shape of a column by an electrically insulating material, and is mounted in the state extending in the lateral direction on the entire lower surface or the rear lower surface of the block piece 44. As shown in Fig. 9, each slit bar 46 has a plurality of slits 52 which extend in the front-rear direction at predetermined intervals in the longitudinal direction (left and right directions) thereof and open downward.

The bar member 48 has a circular cross-sectional shape in the example of the figure, and is formed of a hard electrically insulating material such as ceramic. The bar member 48 penetrates through the needle body 42a of the probe 42. However, the bar member 48 may be formed by coating a conductive material with an electrically insulating material, or may have another cross-sectional shape such as a polygon such as a rectangle or a hexagon.

Each probe 42 has a thickness direction of the needle body portion 42a in the left-right direction, and the slit bar with the tip needle 42d and the trailing needle 42e protruding forward and backward from the block piece 44, respectively. It is arrange | positioned in parallel with 46, and also combines the front end area | region 42b and the rear end area | region 42c with the slit 52 of the slit bar 46. As shown in FIG.

Each cover 50 is formed by a plate-shaped cover member 50a located on the inner side and a plate-shaped cover member 50b located on the outer side as shown in FIG.

Each cover 50 penetrates the space | interval in the front-back direction of the cover member 50a, 50b, and the several screw member 54 screwed to the edge part in the left-right direction of the block piece 44 (refer FIG. 5). ) Is detachably attached to the side surface of the block piece 44 in the left-right direction.

Each cover 50 is also positioned relative to the block piece 44 by a plurality of positioning pins 56 (see Fig. 5). Each of the positioning pins 56 is attached to the end portions in the left and right directions of the block pieces 44 so as to protrude from the end to the left and right sides, and is inserted into both cover members 50a and 50b.

The bar member 48 is inserted into the through hole (not shown) provided at the end of each cover member 50a. As a result, the bar member 48 is attached to the block piece 44 by the screw member 54 and the positioning pin 56 together with the cover members 50a and 50b for positioning.

As shown in Fig. 9, the front slit bar 46 and each of the probes 42 have convex portions 60 protruding rearward and concave portions 62 opening forward, respectively, at the rear and front ends. The convex portion 60 and the concave portion 62 are joined to each other while having a cross-sectional shape of a 'co' shape.

Moreover, the convex part 60 and the recessed part 62 are located in the lower edge part and the upper edge parts 60a and 62a which are located below (in one direction of Z direction), respectively, and the upper part (the other direction in Z direction). It has an upper edge and a lower edge 60b and 62b.

The lower edge 60a of the convex portion 60 and the upper edge 62b of the concave portion face downward, and the upper edge 60b of the convex portion 60 and the lower edge 62a of the concave portion 62 are upward. Heading up. The upper edge 62a of the recess 62 is lowered toward the rear side. As a result, an additional recess 62c is formed below the inner bottom of the recess 62.

The probe assembly 30 also includes a plurality of positioning pins 64 (one of which is shown in the figure) spaced in the lateral direction as shown in FIGS. 8 and 9. Each positioning pin 64 is attached to the block piece 44 and extends upward from the block piece 44.

Each positioning pin 64 is also coupled to a positioning hole (not shown) provided in the coupling block 36 to position the probe assembly 30 with respect to the coupling block 36 together with the positioning hole.

Contrary to the above, the positioning pin 64 may be provided in the coupling block 36 and the positioning hole may be provided in the block piece 44.

Each probe 42 has a convex portion 60 and a concave portion 62 coupled to each other, a bar member 48 penetrates the probe 42, and also a front end region 42b and a rear end region 42c slit. It is disposed in the slit bar 46 in a state coupled to 52.

Each probe 42 has such a slit bar 46 combined as described above with the block piece 44 by a screw member, an adhesive, or the like, and as the cover 50 is combined with the block piece 44 as described above. It is held in combination with the block piece 44.

The coupling block 36 has a lower end 66 on which the probe assembly 30 is disposed as shown in FIG. The lower end 66 extends the front end portion of the lower portion of the coupling block 36 in the left and right directions.

As shown in FIGS. 8 and 10, the probe assembly 30 includes a head screwed into the female screw hole 68 installed in the block piece 44 through the through hole 67 of the coupling block 36 from above to below. The positioning pin 64 is held in the lower end portion 66 with the positioning member 64 inserted into the positioning hole by the provided screw member 70.

In the figure, the neighboring probes 42 appear to be largely spaced in the left and right directions, but in reality, the arrangement pitch of the probes 42 is small. The number of probes 42, the thickness dimension and the arrangement pitch, and the slit number, placement pitch and width dimension of the slit bar 46 are determined by the type of the inspected object 12, in particular, the placement pitch and width dimension of the electrode 14. different.

The probe assembly 30 has the slit bar 46 for the front end region 42b and the rear end region 42c of each probe 42 with both slit bars 46 attached to the block pieces 44 in the above-described state. The convex portion 60 and the concave portion 62 are engaged while being inserted into the slit 52, the bar member 48 is inserted into the probe 42 and the cover member 50a and then the cover members 50a and 50b. ) Can be assembled by attaching to the block piece 44 with the screw member 54 and the positioning pin 56.

One cover 50 may be attached to the block piece 44 after attaching both slit bars 46 to the block piece 44.

Disassembly of the probe assembly 30 can be performed by performing the opposite operation. The replacement of the probe 42 may be performed by changing the original probe to a new probe by performing the opposite operation to the above, and then performing the above operation.

The combination of the probe assembly 30 to the coupling block 36 engages the screw member 70 with the positioning pin 64 (see FIG. 8) inserted into the above-mentioned positioning hole of the coupling block 36. It can be carried out by passing through the through-hole 67 of the block 36 from the upper side to the lower side to screw the female threaded hole of the block piece 44.

Removal of the probe assembly 30 from the coupling block 36 may be performed by performing the reverse operation.

In this embodiment, the block piece 44 and the slit bar 46 constitute a probe holder arranged in parallel so as to extend the plurality of probes 42 in the front-rear direction at intervals in the left-right direction.

As shown in Figs. 5 and 8, the support block 32 is made into an L-shaped cross section by two plate-shaped supports 32a and 32b. The connecting block 34 has an inverted L shape by a body portion 34a attached to the support 18 and an extension portion 34b extending forward from the upper portion of the body portion 34a.

In the illustrated example, the support block 32 forms a support together with the coupling block 36, and the screw member 70 serves as an assembly unit for combining the probe assembly 30 to the coupling block 36.

The support block 32 is a connecting block 34 by a guide 74 extending in the vertical direction between the guide rail 72 and the two guide rails 72 extending in the vertical direction at intervals in the horizontal direction. While being movably connected to the front of the body portion 34a in the up and down direction, the position of the up and down direction is adjustable to the extension portion 34b of the connection block 34 by the bolt 76.

Both guide rails 72 and guides 74 are linear rails and a linear guide, respectively. Both guide rails 72 are attached to the rear end surface of the support portion 32a of the support block 32. On the other hand, the guide 74 is disposed between the guide rails 72 in the left and right directions so that both guide rails 72 are movable in the vertical direction with respect to the guide 74, and the body of the connecting block 34 is also provided. It is attached to the front end surface of the part 34a.

The bolt 76 penetrates the extension 34b of the connecting block 34 from above to below and is screwed into the screw hole 78 formed in the support block 32. The support block 32 is forced downward by a pair of compression coil springs 80 arranged at intervals in the lateral direction as shown in FIG.

Each compression coil spring 80 includes a plate-shaped spring presser 82 attached to an extension portion 34b of the connecting block 34 by a plurality of screw members 71 (see FIG. 3), and a support block ( It is arrange | positioned in the state which penetrates the extension part 34b of the connection block 34 in the up-down direction between the support part 32a of 32. As shown in FIG. As a result, the height of the support block 32 and the probe assembly 30 can be adjusted by adjusting the screw insertion amount of the bolt 76 into the screw hole 78.

The spring presser 82 has a through-hole 82a that sticks the tip of a tool such as a driver from above and adjusts the amount of rotation of the bolt 76. As a result, the height position of the support block 32 and the probe assembly 30 can be adjusted without removing the spring presser 82 from the connecting block 34, so that the adjustment of the height position is easy. Lose.

The connecting block 34 is detachably attached to the support 18 by a plurality of bolts 86, as shown in Figs. 2, 3, 5, 6 and 8. Each bolt 86 penetrates through the body portion 34a of the connecting block 34 from above and is screwed into a screw hole 88 formed in the body portion 18a of the support 18.

4, 8 and 10, the assembly device 38 is a concave portion 90 formed in the coupling block 36, a connecting member 92 coupled to the concave portion 90, and the connecting member 92 To the lower side of the support block 32, the plurality of screw member 94 (see Fig. 4) for supporting the support block 32 and the through hole 95 of the connecting member 92 penetrates from above to below It includes a screw member 96 screwed to the screw hole 98 of the coupling block 36.

The recess 90 and the connection member 92 have a circular cross-sectional shape. Each screw member 94 penetrates the support portion 32b of the support block 32 from the top to the bottom, as shown in FIG. 4, to screw the female thread hole 93 (see FIGS. 4 and 10) of the connecting member 92. do.

In the illustrated example, the female screw hole 98 is a nut 36b which is not displaceably combined with the body portion 36a of the coupling block 36 as shown in FIG. 8, but may be formed directly on the body portion 36a.

In the assembly device 38, the screw member 96 penetrates the through hole 95 of the connecting member 92 from the top to the lower direction and is screwed into the female screw hole 98 so that the connecting member 92 is the screw member 94. By attaching to the support block 32 by the coupling block 36 is combined to the lower side of the support portion 32b of the support block 32.

The assembly device 38 must also test the coupling block 36 in the XY plane formed by the left and right and front and rear directions with respect to the support block 32 as the recess 90 and the connection member 92 are engaged. It is maintained at a predetermined position in the XY plane parallel to the object to be inspected.

In the example of illustration, the assembly apparatus 38 is formed in the coupling block 36, the recessed part 100 extended in the XY plane, and communicated with the recessed part 90, and the inside of the XY surface in the connection member 92. And a pair of concave portions 104 formed on the lower surface of the support member 32b of the support block 32 and extending to the connecting member 92 and extending toward the concave portion 100 and receiving the concave portion 100. And a pair of pin members 106 extending upward from the connecting member 92 and received as the recesses 104.

The concave portion 100 and the pin member 102 extend in one direction (the X direction in the example in the illustration) in front of the screw member 96 in the XY plane. On the other hand, both the concave portions 104 and the two pin members 106 each have a direction intersecting with a direction in which the concave portions 100 and the pin members 102 extend, preferably in a straight direction (Y direction in the example shown). Separated by).

The assembly device 38 extends in the vertical direction while maintaining the coupling block 36 at the predetermined positions in the left and right directions and the front and right directions with respect to the support block 32 by the concave portions 100 and 104 and the pin members 102 and 106. It is maintained at a predetermined angle position around the θ-axis line.

The concave portion 90 may be installed on the support block 32 and the connecting member 92 may be screwed to the coupling block 36. Further, the concave portions 100 and 104 and the pin members 102 and 106 may be provided on the opposite members.

The combination of the coupling block 36 to the support block 32 is connected to the support block 32 by the screw member 94 while the connecting member 92 is positioned with the pin member 106 at the corresponding recessed portion 104. ), And then the screw member 96 is coupled to the coupling block 36 in a state where the pin member 102 is positioned at the corresponding recessed portion 100 while the connecting member 92 is coupled to the recessed portion 90. It can be carried out by screwing in the female threaded hole (98).

Removal of the coupling block 36 from the support block 32 may be performed by performing the operation opposite to the above.

The relay base 22 is arrange | positioned on the probe base 16 by the some screw member which is not shown in the state which made thickness direction the up-down direction. The relay board 24 is a wiring board each having a plurality of wirings (not shown) corresponding to the probes 42 of the probe device 20.

The wiring of the relay board 24 is electrically connected to the corresponding probe 42 by electrical connectors 120 (Figs. 1, 3, 5, 6, 9, 10 and 11) provided for each probe device 20. .

3, 5 and 8, the connection block 40 extends the lower side of the support block 32 in the lateral direction, and is also disposed between the rear end of the coupling block 36 and the support block 32. have. The connection block 40 is detachably fixed to the lower side of the support block 32 by a plurality of screw members 140 spaced in the left and right directions and a plurality of positioning pins 142 spaced in the front and rear directions. It is.

Each screw member 140 is screwed to the support block 32 through the connection block 40 from below to upward. Each of the positioning pins 142 is fixed to one of the connection block 40 and the support block 32 so as to extend in the up and down direction so that the positioning holes are installed on the other side of the connection block 40 and the support block 32. Is coupled to

In the above probe device 20, the support block 32, the coupling block 36 and the connection block 40 act as a first support device, and the connection block 34 acts as a second support device. do.

1, 3, 5, 6, 9, 10 and 11, each electrical connector 120 has a plurality of wires extending in the front and rear direction, and also in the form of a sheet extending rearward from the probe assembly 30 A first wiring region 122 and a sheet-shaped second wiring region 124 extending rearward from the first wiring region 122.

The first and second wiring regions 122 and 124 respectively extend in the front-rear direction at intervals in the left and right directions, respectively, and the plurality of first wirings 126 and the plurality of second wirings 128 (both refer to Fig. 11). Has

The first wiring region 122 is made of FPC, TAB or a composite circuit sheet combining them, and the second wiring region 124 is made of FPC.

The first wiring region 122 is located below the coupling block 36 by the fixing plate 130 as shown in FIG. 8, and the integrated circuit 132 for driving the inspected object 12 is placed in the middle region. It is arranged and extends rearward of the lower side of the coupling block 36 which also serves as part of the first support device.

5, 8, 10, and 11, the front end portion of the first wiring region 122 is held on the lower surface of the coupling block 36 with the front end portion of the first wiring 126 exposed downward. have. As a result, in the state where the probe device 20 is assembled, the trailing needle 42e of each probe 42 is pressed and electrically connected to the tip of the first wiring 126 as shown in FIG.

5, 8 and 11, the rear end of the first wiring region 122 has the first wiring region 122 transversely U-shaped upward and forward at the rear end of the coupling block 36. As shown in FIGS. As it is folded, the rear end of the first wiring 126 is held on the upper surface of the coupling block 36 in a state where it is exposed upward.

5, 8 and 11, the distal end portion of the second wiring region 124 is located above the retracted portion of the first wiring region 122 and the second wiring 128 is provided. It is held on the lower surface of the connection block 40 in a state where the tip of the lower side becomes downward. As a result, in the state in which the probe device 20 is assembled, the rear end of the first wiring 126 and the front end of the second wiring 128 are pressed to each other and electrically connected.

The second wiring area 124 is led to the upper side of the probe base 16 between the rear end of the connection block 40 and the front end of the probe base 16 and also leads to the space 26 of the support 18. And also extends rearward above the probe base 16.

The second wiring area 124 is coupled to the relay board 24 by a connector 144 provided at the rear end thereof. The connector 144 includes a plurality of terminals connected to the probes 42 of the corresponding probe device 20 through the wiring of the electrical connector 120. These terminals are connected to the above wiring of the relay substrate 24.

The wiring of the relay board 24 is connected to an electric circuit (not shown) that generates a test signal. The test signal is supplied to the probe 42 through the electrical connector 120 in such an electric circuit to drive (light up) the object under test 12.

As shown in Figs. 8 and 11, the elastomer 146 is located below the connection block 40 and is disposed at a position corresponding to the contact portions of the first and second wirings 126 and 128. As shown in Figs. For this reason, as shown in FIG. 11, the elastomer 146, the first wiring region 122, and the second wiring region 124 are formed by combining the coupling block 36 and the connection block 40 with the support block 32. As shown in FIG. Compression deformation in the state. As a result, the first and second wirings 126 and 128 are strongly pressed and reliably contacted.

Exchange of the probe assembly 30 and the electrical connector 120 may be performed in a state in which the coupling block 36 is separated from the support block 32. In addition, the exchange of the probe 42 may be performed in a state in which the coupling block 36 is separated from the support block 32 and the probe assembly 30 is separated from the coupling block 36. In addition, the exchange of the electrical connector 120 may be performed in a state in which the coupling block 36 is separated from the support block 32 and the connection block 40 is separated from the support block 32.

In the probe unit 10, the probe device 20 is supported by the probe base 16 via a support 18 having a space for opening forward, rearward and downward. For this reason, it is possible to guide the rear region of the electrical connector 120 to the upper side of the probe base 16 without providing the wiring passage hole in the probe base 16, and then to pass through the space 26 of the support 18. Can be serialized. As a result, the electrical effective length of the wirings 128 and 128 is shortened, and the amount of attenuation of the signal decreases by that amount, so that an effective test signal can be supplied to the inspected object 12.

In the test apparatus for testing the inspected object 12, a plurality of probenets 10 having the above-described shape structure can be used.

EXAMPLE OF TEST APPARATUS

12 to 18, the test apparatus 200 is disposed on the probe unit 202, the plate-shaped support base 204 for supporting the probe unit 202, and the support base 204, and thus the object to be inspected ( 12 and a unit support mechanism 208 for supporting the probe unit 202 to the support base 204.

The probe unit 202 arranges the plurality of probe devices 20 on a common support 210, and the flexible substrate 24 is flexible to the second relay substrate 212 disposed behind the same as the FPC. 1 to 11, except that the wiring sheet 214 (see FIG. 18) is electrically connected and the second relay board 212 is electrically connected to the electrical circuit of the test apparatus. It has a structure of the same shape as the probe unit 20 shown.

Support 210 is a plate-shaped body portion 210a extending in the horizontal direction in parallel with the probe base 16, as shown in Figure 17, and a pair of legs extending downward from both ends of the body portion (210a) 210b and a plurality of auxiliary portions 210c extending downwardly from the body portion between both leg portions 210b, and further screwed to the probe base 16 by penetrating the support 210 upwards and downwards. It is attached to the upper surface of the probe base 16 by a plurality of coupled screw members 216 (see Fig. 17).

The body portion 210a, the leg portion 210b, and the auxiliary portion 210c form a space 26 for each probe device 20 that opens forward, backward, and downward. Each probe device 20 is disposed on the support 210 so as to be located above the corresponding space 26. The electrical connector 120 of each probe device 20, in particular, the second wiring region 124, passes through the corresponding space 26 in the front-rear direction. However, the plurality of probe devices 20 may use one space 26 in common.

In this embodiment, the relay substrate 24 is common to the plurality of probe devices 20. For this reason, all the second wiring areas 124 are electrically connected to the relay board 212. The relay board 212 is attached to the upper side of the probe base 16 by obliquely upwardly inclined upward by a pair of fasteners 218. The relay board 24 may be provided for each probe device 20, or one relay board 24 may be used in common among the plurality of probe devices 20.

The support base 204 is disposed horizontally in the frame of the test apparatus 200. The work table 206 has a panel receiving surface 206a that receives the inspected object 12 and is releasably adsorbed. The support base 204 may be formed integrally with the work table 206, or may be an outwardly flanged member provided on the panel support having the panel receiving surface 206a.

The unit support mechanism 208 is disposed on the support base 204 so as to be retractable with respect to the worktable 206 in an XY plane parallel to the inspected object 12 and extends in the longitudinal direction (left and right directions) of the probe base 16. Coupled to the first movable body 220 so as to be movable in an inclined direction with respect to the panel receiving surface 206a and extending in the longitudinal direction (left and right directions) of the probe base 16. A probe moving mechanism 224 for advancing and retreating the second moving body 222 and the first moving body 220 with respect to the worktable 206 together with the second moving body 222, and the second moving body 222. A plurality of first stoppers 226 defining the most advanced position (position on the worktable 206 side) and an inverted L-shape in order to restrict the highest position of the second movable body 222. It includes a plurality of second stoppers 228, and supports the probe unit 202 to the second moving body 222.

The first movable member 220 extends in the lateral direction and is relative to the first member 220a having an L-shaped cross section, and the second member 220b extending in the lateral direction and having a wedge-shaped cross section. Attach it unmovably. The first moving body 220 has a pair or several pairs of rails 230 extending in the front-rear direction at intervals in the left and right directions, and guides 232 movably supported in the longitudinal direction on each rail 230. Is coupled on the support base 204 by means of.

In the example of illustration, the rail 230 is attached to the upper surface of the support base 204, and the guide 232 is attached to the lower surface of the bottom plate part of the 1st member 220a. Thereby, the 1st moving body 220 is comprised so that it may move in the direction (front-back direction) which is near or far from each other with respect to the worktable 206. FIG.

The second moving body 222 extends in the left and right direction and extends in the left and right direction to the first member 222a having a T-shaped cross-sectional shape, and attaches the second member 222b having a prismatic shape to be relatively movable. It is. The top surface of the first member 222a is formed parallel to the XY surface, and supports the probe base 16 on the top surface of the first member 222a. The second member 222b has a guide hole 234 penetrating it obliquely in the vertical direction.

The second movable body 222 is a rod 236 supported by the first movable body 220 in a state extending obliquely up and down, and is received in the guide hole 234 from below, and is coupled relatively displaceably The guide 238 and the rail 240 are coupled to the first moving body 220 so as to be able to move upward and downward in an upward direction by an upward side.

The guide hole 234 and the rod 236 are inclined to the worktable 206 side by the upper portion, and the guide 238 and the rail 240 have the worktable (the relative movement direction by the upper portion) 206 is attached to the first and second movable bodies 220 and 224 so as to be in the extending direction of the guide hole 234 and the rod 236.

The second moving body 222 is always pushed upward by the compression coil spring 242 extending around the rod 236. However, a plurality of second stoppers 228 in which the probe base 16 of the probe unit 202 supported by the second movable body is attached to the first movable body 220 may be positioned at the highest position of the second movable body 222. It is regulated by abutting the upper end portion extending in the front-back direction. For this reason, the highest lift position of the probe unit 202 is also regulated by the second stopper 228.

Each probe movement mechanism 224 moves the first movable body 220 forward and backward to move the first movable body 220 together with the second movable body 222 and the probe unit 202 to the work table 206. Retreat against.

As the probe movement mechanism 224, the motor 246 is connected to the motor 246 arranged on the upper surface of the support base 204 by the bracket 244 and extended in the front-back direction. An example is a mechanism having a ball screw 248 rotated by a screw and a nut (not shown) provided on the first member 220a and screwed to the ball screw 248. The motor 246 may be a position controllable motor such as a pulse motor to maintain the rotation angle position releasably.

The first stopper 226 is disposed between the work table 206 and the second movable body 222 in the front-rear direction and is disposed at intervals in the left-right direction (see FIG. 16). Each first stopper 226 is a roller 250 attached to the upper end of the support 250 so as to be rotatable about an axis extending in the lateral direction, and a support 250 supported by the support base 204 in an upwardly extending state. 252. The roller 252 is a bearing in the example of illustration, and is arrange | positioned in the height position which the front surface of the 2nd moving body 222 can contact.

The test apparatus 200 is provided with the probe unit 202 and the unit support mechanism 208 in each of the edge portions in which the electrode 14 of the test object 12 is disposed.

[Operation of Test Equipment]

In the test apparatus 200, each of the probe units 202, the first moving body 220, and the second moving body 222 is retracted to the standby position shown in FIG. In this state, the second moving body 222 is lifted up by the compression coil spring 242 to the highest lifted position regulated by the stopper 228, and the roller 252 of the stopper 226 by the unit moving mechanism 224. Spaced backwards.

In the above standby position, the probe unit 202 is spaced upward and backward from the worktable 206, so that the probe 42 is spaced upward and backward from the test subject on the worktable 206. Retreat to the location. In this state, the test object 12 is transferred to the work table 206 from the upper side.

When the transfer of the inspected object 12 is finished, the first movable body 220 is unit moving mechanism 224 until the front surface of the second moving mechanism 222 contacts the roller 252 of the stopper 226. Advanced by). As a result, the probe unit 202 is also advanced so that the needle bar of each probe 42 is moved above the electrode 14 of the object 12 as shown in FIG.

When the first moving body 220 is further advanced by the unit moving mechanism 224, the first moving body 220 is moved in a state where the advance of the second moving body 222 is blocked by the stopper 226. Is advanced. For this reason, the second movable body 222 allows the first movable body 220 to move forward by the guide 238, the rail 240, and the rod 236 while the front surface thereof is in contact with the roller 252. Descends. As a result, each probe block 202 is lowered, and the needle bar of each probe 42 is pressed against the electrode 14 of the object under test 12 as shown in FIG. In this state, the test object 12 is energized and the lighting test of the test object 12 is performed.

As is apparent from the above, the guide hole 234, the rod 236, the guide 238, the rail 240 and the compression coil spring 242 is a probe displacement mechanism for displacing the probe unit 202 in an oblique up and down direction. Works.

The above lighting test may be a visual lighting test in which an operator looks down on the subject 12 from above, or may be an automatic lighting test using an area sensor such as a video camera and performing image processing on a control device. good.

When the electrical test is completed, each probe unit 202, each first moving body 220 and each second moving body 222 retreats to the standby position shown in FIG. At this time, each second moving body 222 is lifted by the compression coil spring 242 until the first moving body 220 moves away from the stopper 226, and then together with the first moving body 220. Retreat. Thereafter, the test object 12 is transferred to the work table 206.

As described above, according to the test apparatus 200, the probe unit 202 is lowered after the needle 42 of the probe 42 is advanced above the electrode 14 of the test object 12 so that the needle needle is pressed by the electrode 14. The needle tip of the probe 42 is raised above the electrode 14 of the test subject 12 so that the needle needle is separated from the electrode 12 and retreats. As a result, the needle line of each probe 42 is displaced in the direction of contact and separation with respect to the electrode 14 when the probe unit 202 moves up and down, and when the probe unit 202 itself moves forward and backward, the electrode 12 It is kept separated from. As a result, abrasion and damage of the needle electrode 12 are prevented.

The present invention can be applied not only to a probe unit for a liquid crystal display panel, but also to a probe unit for another display substrate such as a glass substrate on which a thin film transistor is formed, and to a probe unit for another flat plate-like object such as an integrated circuit.

This invention is not limited to the said Example, A various change can be made, as long as there is no deviation from the meaning of a claim.

10, 202; Probe unit
12; Display board (inspection object)
14; Electrode of display board
16; Probe base
18,210; support fixture
18a, 210a; Body
18b, 210b; Leg
20; Probe device
22; Relay base
24; Relay board
26; space
30; Probe assembly
32; Support block
34; Connection block
36; Joining block
38; Assembly device
40; Connection block
42; Probe
42a; Needle body
42b; Tip area
42c; Trailing area
42d; Tip
42e; Trailing needle
44; Block edition
46; Slit bar
82; Spring press
120; Electrical connection
122,124; First and second wiring area
126,128; First and second wiring
200; Test equipment
204; Support base
206; Worktable
206a; Panel receiving surface
208; Unit support mechanism
212; 2nd relay board
214; Wiring sheet
220,222; First and second moving bodies
224; Unit moving mechanism
226,228; stopper
230; rail
232; guide
234; Guide Hole (Probe Displacement Mechanism)
236; Rod (Probe Displacement Mechanism)
238; Guide (Probe Displacement Mechanism)
240; Rail (Probe Displacement Mechanism)
242; Compression Coil Spring (Probe Displacement Mechanism)

Claims (15)

A probe device having a plate-shaped probe base, a support disposed on the probe base, and a probe device supported by the support, the probe device having a plurality of probes having a leading needle and a trailing needle, and extending rearward from the probe device. An electrical connection port having a plurality of wires extending in the front-rear direction, and further comprising an electrical connection port in which a leading end of each wire is connected to the rear needle tip,
The support has an open space forward, rearward and downward,
And a rear region of the electrical connection port extends through the space of the support while being guided to the upper side of the probe base.
According to claim 1, wherein the support is a plate-shaped body portion extending in the left and right direction, the body portion with the probe device is attached, and the front portion by the leg portion extending downward from each end in the left and right direction of the body portion A probe unit formed in a door shape.
According to claim 2, One of the leg portion is protruded in one direction in the left and right direction from the front end of the body portion, the other side of the leg portion protrudes in the other direction in the left and right direction from the rear end of the body portion The probe unit is thereby formed in a planar shape of the crank shape.
The said support base is attached to the said probe base by the screw member which penetrated one of the said probe base and the said leg part in the up-down direction, and was screwed to the other side of the said probe base and the said leg part. Probe unit.
The probe unit according to claim 1, further comprising a plurality of said supports and a plurality of said probe devices supported on each of said supports.
The probe unit of claim 1, further comprising a plurality of the probe devices commonly supported by the support.
The probe unit of claim 1, further comprising a relay board on which a rear end portion of the wiring of the electrical connector is electrically connected to the relay board disposed above the probe base.
The probe unit of claim 7, wherein a rear end of the electrical connector is electrically connected to the relay board by a connector.
8. The relay board of claim 7, wherein the relay board is disposed above the probe base in an obliquely extending rearward and upward direction, and a rear end of the electrical connector is connected to the relay board by a connector and a cable connected to the connector. Probe units that are electrically connected.
The probe device of claim 1, wherein the probe device includes a probe assembly having the plurality of probes disposed below the probe holder, a first support device for supporting the probe assembly, and a second support for supporting the first support device. A device having a second support device attached to said support,
And the electrical connector extends rearward from the rear end of the probe assembly.
The probe unit of claim 10, wherein the electrical connector extends rearward through a lower portion of the first support device and is led from the front end of the probe base to the upper side of the probe base.
2. The electrical connection port of claim 1, wherein the electrical connector is a first wiring region having a plurality of first wirings in a front-rear direction, a first wiring region in which the front end portion of each first wiring is connected to the trailing needle of the probe, and the front-back direction. A second wiring region having a plurality of second wirings extending to the second wiring region including a second wiring region having a distal end portion of each second wiring connected to a rear end portion of the first wiring; The probe unit is guided to the upper side of the base via the space of the support.
The method of claim 12, wherein the first support device is a support block supported by the second support device, the coupling block is combined to the support block, the probe assembly is all combined on the lower side and the first wiring area is A coupling block disposed at a lower side, and a connecting block disposed between the rear lower side of the support block and the rear upper side of the coupling block and attached to the support block, the connecting block having a distal end portion of the second wiring area disposed below. ,
And a rear end portion of the first wiring region is bent from the lower side to the upper side of the coupling block at the rear end of the coupling block, and the respective wirings are connected to the wiring of the second wiring region.
According to claim 1,
And the electrical connector comprises a sheet-shaped wiring connector.
A base, a worktable supported by the base, the worktable having a receiving portion supplied with a flat object, a probe unit disposed on the base as the probe unit according to claim 1, and the probe unit; A unit support mechanism for supporting the
The unit support mechanism is a first movable member which is received in the base so as to be movable in the front-rear direction in the XY plane parallel to the inspected object, the first movable body which extends in the XY surface in left and right directions, and moves obliquely in the vertical direction. A second movable body extending laterally to a second movable body coupled to the first movable body, a stopper defining the most advanced position of the second movable body, and retreating the first movable body with respect to the test subject; Probe displacement mechanism for displacing in the vertical direction while moving the second moving body in the front and rear direction,
And the probe unit is supported by the second moving body.

Images