KR20110000181A - Air leaking detection apparatus for motor sealing structure - Google Patents

Abstract

PURPOSE: A device for detecting an air leak for a vacuum sealing structure of a motor is provided to reduce manufacturing costs and to improve production efficiency by minimizing damage to a wafer. CONSTITUTION: A device for detecting an air leak for a vacuum sealing structure of a motor comprises a vacuum pressure detecting unit(100). A pressure detection groove(52) is installed in the vacuum pressure detecting unit by passing through a part of the inner wall of a housing. The vacuum pressure detecting unit measures and detects a vacuum pressure leak by using a pressure detection connector. The vacuum pressure detecting unit comprises a vacuum pressure detector(50), a vacuum control valve(60), a vacuum pump(80), a vacuum pump connector(70), and a main controller(90).

Description

Air Leaking Detection Apparatus For Motor Sealing Structure

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum airtight detection apparatus for a vacuum sealing structure of a motor, and more particularly to a vacuum sealing structure of a motor that can maintain a vacuum sealing even under high vacuum pressure in semiconductor equipment for a long time in high temperature conditions. The vacuum sealing structure of the motor which detects airtight failure beforehand is related with the vacuum airtight detection apparatus.

The vacuum sealing structure of the motor developed by the present inventor is disclosed and registered in Korean Patent Publication No. 10-2005-105138 (Nov. 03, 2005).

FIG. 3 is a cross-sectional view illustrating a vacuum sealing structure of a motor developed by the present inventors and a vacuum pressure detector for detecting an internal vacuum sealing state. In Fig. 3, reference numeral 10 denotes a housing for protecting the interior, reference numeral 30 denotes a heat dissipation means, one end of which includes a cylindrical portion 31 having a partition wall, and reference numeral 40 denotes a motor providing a driving force. In addition, a recess 11a is formed at an outer circumference of the housing 10 to couple the heat dissipation means 30, and a wafer (shown in an air atmosphere in which rotational force is transmitted by a motor 40 installed inside the housing 10). A shaft 15 is installed to rotate a boat (not shown) on which a seat is omitted. In addition, the helical gear 17 is coupled to the lower portion of the shaft 15 to receive the rotational force of the motor 40, and the first and second sides of the shaft 15 smoothly rotate the head 15a and the lower end. The second bearings 16a and 16b are arranged. A buffer washer 27 is sandwiched between the first and second sealing members 21 and 23 and the dish washer spring 25. The housing cap 19 is installed at the end of the housing 10 to support the elastic force therein.

Referring to Figure 3 describes the improved vacuum sealing structure of the motor, as described in claim 1 of the patent, the motor is provided with a housing coupled to one side, the shaft inside the housing receives the rotational force by the motor In the vacuum sealing structure of the motor provided, coupled to the outer periphery of the shaft, comprising a pair of sealing members and the elastic member overlapped between the pair of sealing members in contact with the inner surface of the housing, when the housing cap of one side of the housing is coupled, A pair of seal members are provided by the elastic member so that the inner circumferential surface is in close contact with the shaft, and the outer circumferential surface is in close contact with the inner wall of the housing to form a vacuum sealing structure.

In this structure, the sealing members 21 and 23 which form and maintain the vacuum mainly use an O-ring member, and wear or damage occurs in the case of prolonged use or exposure to high temperature, thereby maintaining vacuum tightness. If not, it happens. At this time, if the vacuum leak is not found quickly, there is a concern that an abnormality may occur and defective products may be manufactured due to failure to provide proper conditions for the wafer process in the housing. Accordingly, the vacuum in the region where the process of the semiconductor wafer is formed when the first and second sealing members 21 and 23 for forming and maintaining the vacuum state is not maintained in the vacuum hermetic state due to wear or damage during use in the housing. In this maintained state, development of an apparatus for detecting in advance a vacuum hermetic breakdown of the vacuum sealing structure of the motor has been required.

In general, an R axis is used for rotation after loading a wafer in a boat in a vacuum state during a semiconductor process. At this time, in order to enable power transfer at atmospheric pressure while maintaining vacuum tightness without generating particles, a special seal called a magnetic fluid seal or a vacuum sealing structure of the registered motor is known. The structure which maintains a vacuum state is comprised through the dish-shaped washer spring 25 which has elastic force so that it may have a pair of sealing members 21 and 23. As shown in FIG.

By the way, the wafer processing operation in the semiconductor process is carried out at a high temperature of about 600 ~ 1000 ℃ to perform the process on the wafer, the temperature of the sealing member region of the motor is also performed at a high temperature of about 70 ℃ ~ 120 ℃. . Therefore, a large amount of powder (Powder) that causes the generation of foreign particles (Particle) due to the temperature difference in the wafer processing process and the motor sealing portion is accumulated. In order to reduce this phenomenon, efforts are being made to increase the temperature of the motor sealing member region.

According to this tendency, the vacuum is frequently caused by abrasion, deformation and damage of the sealing member installed inside the housing. As is well known, when the vacuum state is destroyed, air flows into the space for depositing a thin film on a semiconductor wafer according to process characteristics, thereby causing a fatal damage to the wafer in process. Moreover, this phenomenon is a big problem in the apparatus for maintaining the vacuum and rotating using a motor in the semiconductor equipment having a vacuum chamber.

The present invention has been made to solve the above problems, the object of which is that the cracks in the sealing (sealing) due to wear or damage to some or all of the sealing member employed in the vacuum sealing structure of the motor. The present invention provides a vacuum airtight detection device in a vacuum sealing structure of a motor having a function of detecting and repairing it early in case of occurrence.

Another object of the present invention is to check in real time the change in the pressure applied to the sealing member in the vacuum sealing structure of the motor to inform the replacement time, the vacuum sealing structure of the motor that can prevent the damage of the wafer in progress in advance In order to provide a vacuum hermetic detection device.

It is still another object of the present invention to provide a vacuum privacy detection apparatus in a vacuum sealing structure of a motor that increases production efficiency and reduces manufacturing costs by minimizing wafer damage and process downtime according to real-time inspection of the vacuum sealing structure of a motor. To do that purpose.

In the vacuum sealing structure of a motor according to the present invention, a vacuum airtight detection device includes a housing, a shaft which is a rotating shaft inside the housing, a pair of sealing members coupled to the shaft outer circumference and in contact with the housing inner surface, and the pair of sealing members. In the vacuum sealing structure of the motor provided with a superimposed elastic member, the inner circumferential surface is in close contact with the shaft, the outer circumferential surface is in close contact with the inner wall of the housing to form a vacuum seal, and the rotational force is transmitted by a motor provided inside the housing, The pressure detecting groove 52 is installed through a portion of the inner wall, and is connected through a pressure detecting connector 52 which is coupled to measure the pressure of the plurality of sealing members installed inside the housing, so that the vacuum pressure leaks inside the housing. It can be achieved by providing a vacuum pressure detection unit 100 for measuring and detecting whether or not, and controlling it.

In addition, the vacuum pressure detector 50 includes a pressure detecting connector 52 provided through the inner wall of the housing to detect the pressure inside the housing, a pressure detecting groove 52h provided at the end of the pressure detecting connector, It is preferable to comprise the pressure detection rod 52p for outflow of pressure.

In addition, the vacuum pressure detector 50 includes a pressure detecting connector 52 provided through the inner wall of the housing to detect the pressure inside the housing, a pressure detecting groove 52h provided at the end of the pressure detecting connector, It is preferable to comprise the pressure detection rod 52p for outflow of pressure.

In addition, the vacuum pressure detector 100 monitors to detect the pressure in order to maintain the space between the pair of sealing members in contact with the inner surface of the housing in a vacuum state, and when the error occurs by comparing the pressure with the reference pressure. It is desirable to generate an error signal to alert the user of this.

According to the present invention, by constituting the vacuum breakage detection device in the vacuum sealing structure of the motor of such a structure, it is possible to prevent vacuum breakage of the area where the process on the wafer is progressed in advance, and thereby fatal damage of the wafer being processed. This can be prevented in advance, so that the productivity and cost reduction of the semiconductor manufacturing line can be achieved.

In addition, according to a preferred embodiment of the present invention, in the vacuum sealing structure of the motor to check the change state of the pressure applied to the sealing member in real time to inform the replacement time, it is possible to prevent damage to the wafer in progress in advance In the vacuum sealing structure of the motor, a vacuum hermetic detection device can be provided.

In addition, according to a preferred embodiment of the present invention, the vacuum sealing in the vacuum sealing structure of the motor to increase the production efficiency and reduce the manufacturing cost by minimizing wafer damage and process downtime according to the real-time check of the vacuum sealing structure of the motor A detection device can be provided.

In addition, such a device can be applied relatively easily even to a device of a similar structure that is being used in the past, but the embodiments of the present invention have been described by way of example, but if the technical idea is the same will belong to the scope of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the accompanying drawings.

(Example)

1 is a schematic view showing the coupling of the vacuum pressure detector connecting portion for detecting whether the vacuum break in the vacuum sealing structure of the motor according to the present invention, Figure 2 is a vacuum breaking in the vacuum sealing structure of the motor according to the present invention Partial coupling diagram showing the coupling of the vacuum pressure detector connecting portion for detecting the, Figure 3 is a state diagram showing a state in which the vacuum pressure detector coupled to the vacuum sealing structure of the motor according to an embodiment of the present invention, Figure 4 Block diagram for explaining the operation of the vacuum tightness detection apparatus in the vacuum sealing structure of the motor having a vacuum pressure detection unit according to an embodiment of the present invention, Figure 5 is a motor having a vacuum pressure detection unit according to an embodiment of the present invention The detailed diagrams for explaining the operation of the vacuum tightness detection apparatus in the vacuum sealing structure of the present invention in more detail are respectively shown.

Referring to the reference numerals used in the drawings, reference numeral 10 denotes a housing for enclosing and protecting the inside, 11a denotes a housing groove provided on an outer circumferential surface of the housing, reference numerals 21 and 23 denote first and second sealing members, and reference numeral 30 denotes Heat dissipation means, 40 is a motor for generating a driving force, 50 is a vacuum pressure detector for detecting the vacuum pressure of the first and second sealing members, 52 is passed through the housing cylindrical to detect the pressure inside the housing Pressure detecting connector is installed, 52h is a pressure detecting groove installed in the pressure detection connector, 52p is a pressure detecting rod for outflow of pressure, 60 is a vacuum control valve for adjusting the degree of vacuum in the housing, 70 is a vacuum Vacuum pump connector for connecting the pump, reference numeral 80 denotes a vacuum pump for generating vacuum, reference numeral 90 denotes a main control for detecting, displaying and controlling the degree of vacuum in the housing A is shown, and the numeral 100 is connected to the housing and detects the pressure control shows the vacuum pressure detector for displaying respectively.

1 to 3, the configuration of the vacuum hermetic detection device in the vacuum sealing structure of the motor according to the present invention can be seen.

In the vacuum sealing structure of the motor according to the present invention, the vacuum airtight detection apparatus 100 includes a housing, a shaft which is a rotating shaft inside the housing, a pair of sealing members coupled to the shaft outer periphery, and in contact with the inner surface of the housing, and the pair of sealing. It is provided with a resilient member overlapped between the members, the inner peripheral surface is in close contact with the shaft, the outer peripheral surface is in close contact with the inner wall of the housing to form a vacuum sealing state, as a vacuum sealing structure of the motor receiving the rotational force by the motor provided inside the housing The pressure detection groove 52 is installed through a portion of the inner wall of the housing, and is connected through a pressure detection connector 52 which is coupled to measure the pressure of the plurality of sealing members installed inside the housing. Measures and detects whether or not the leakage of, characterized in that it comprises a vacuum pressure detection unit 100 for controlling this.

That is, the present invention is a vacuum sealing structure of a motor having a housing in which a motor is coupled to one side, and a shaft receiving a rotational force by the motor inside the housing, the shaft 15 is coupled to the outer periphery, 10) a pair of sealing members 21 and 23 in contact with the inner surface and a resilient member 25 overlapped between the pair of sealing members. After that, when the housing cap 19 of one side of the housing is coupled, the pair of sealing members 21 and 23 are connected to the shaft by the elastic member, and the outer peripheral surface is in close contact with the inner wall of the housing to form a vacuum seal. Structure. In addition to this, a vacuum pressure detector 50 device for detecting and adjusting the vacuum state inside the housing is attached, and provided with a valve for vacuuming and maintaining the area between the pair of sealing members. When the pressure in the region between the sealing members changes, this signal is used to detect the degree of vacuum tightness using a pressure detection device.

In the vacuum sealing structure of a known motor, the area between the first sealing member 21 and the second sealing member 23 is a state in which the outside of the pair of sealing members 21 and 23 and the vacuum do not leak. It consists of.

Next, a connection hole (Hole) 52h is formed in an area between the pair of sealing members 21 and 23 on the outside of the housing 10 to detect a vacuum pressure leak, and a pressure detection sensor and a vacuum holding valve. 60, etc. can be mounted.

Referring to FIG. 4, the vacuum pressure detector 100 includes a vacuum pressure detector 50 for detecting vacuum pressures of the first and second sealing members installed inside the housing, and a passage of the vacuum pressure detector 50. A vacuum control valve 60 connected to the vacuum control valve 60 for adjusting the degree of vacuum, a vacuum pump 80 for generating a vacuum introduced into the housing, and a vacuum generated from the vacuum pump 80 for the vacuum control valve 60. It can be seen that it comprises a vacuum pump connector 70 for connecting to, and a main controller 90 for detecting, displaying and controlling the degree of vacuum inside the housing. Here, the vacuum control valve 60 is used by attaching a pressure detection sensor (not shown) for detecting the vacuum pressure.

In this configuration, the vacuum air generated in the vacuum pump 80 is provided to the vacuum pressure detector 50 through the vacuum pump connector 70, and the degree of vacuum inside the housing is maintained through the vacuum control valve 60. Done.

Referring to Fig. 5, the operation of the vacuum tightness detection apparatus in the vacuum sealing structure of the motor according to the present invention having such a configuration will be described in more detail.

In the vacuum sealing structure of the motor according to the present invention, the vacuum pressure detector 50 adopted by the vacuum airtight detection device includes a pressure detecting connector 52 provided through the inner wall of the housing to detect the pressure inside the housing. And a pressure detecting groove 52h provided at the end of the pressure detecting connector, and a pressure detecting rod 52p for discharging the pressure. This configuration provides a function of stably maintaining the vacuum inside by adding a simple device to the vacuum sealing structure of a known motor. This achieves a configuration that can measure and detect the pressure of the vacuum at low cost and simple additional work, even if the device is not purchased entirely.

Referring to the drawing, a vacuum pressure detector 50 capable of monitoring the degree of vacuum in a region between a pair of sealing members 21 and 23 is connected to the pressure detection connector 52 connected inside the housing. The rear end of the detector 50 is provided with a vacuum control valve 60 for maintaining and adjusting the vacuum of the area between the pair of sealing members (21, 23). The user may adjust the vacuum introduced from the vacuum pump 80 to adjust the vacuum control valve 60 to compensate for the difference when compared to the pressure applied to the sealing members 21 and 23 inside the housing. At this time, if it is determined that the pressure detected by the sealing members 21 and 23 deviates from the predetermined reference value, it is determined as an error about the reference pressure and the user is notified through an alarm sound and the alarm unit installed in the main controller 90 ( (Not shown).

Next, the vacuum pressure detection unit 100 monitors to detect the pressure in order to maintain the space between the pair of sealing members in contact with the inner surface of the housing in a vacuum state, and an error occurs by comparing the pressure with the reference pressure. In this case, it generates an error signal that alerts you.

Specifically, the vacuum pump 80 is connected to the vacuum control valve 60 to make a region between the pair of sealing members 21 and 23 in a vacuum state (at this time, the pressure is 10 mTorr or less), The vacuum control valve 12 is closed to maintain a vacuum state.

In this state, a vacuum leaks due to wear or damage of the sealing member of either the first sealing member 21 or the second sealing member 23 among the pair of sealing members 21 and 23 due to rotation under a high temperature. When the seal is broken, the vacuum pressure detector 50 sends a vacuum error signal to the main controller 90 to notify that there is a problem with the vacuum sealing structure of the motor.

In general, the process pressure of the equipment having the vacuum sealing structure of the motor is in the range of 100 mTorr to several Torr, so that the area between the pair of sealing members 21 and 23 even when the vacuum is destroyed by the damage of the first sealing member during factory progress. It can be seen that there is a problem in the vacuum sealing structure of the motor due to the initial pressure difference of.

Of course, when the second sealing member 23 is vacuum broken due to wear or damage, the pressure outside the second sealing member is changed to an atmospheric pressure state, and thus, it is possible to quickly recognize that there is a problem in the vacuum sealing structure of the motor.

At this time, since the initial pressure of the region between the pair of sealing members 21 and 23 is 10 mTorr or less even during vacuum breakdown due to wear or damage of the first sealing member 21, the process is performed on the wafer (process chamber). ], The vacuum of the housing 10 is normally maintained so as not to damage the wafer.

The first sealing member is also configured to keep the region where the process is completely sealed even in the case of vacuum breakdown due to the damage of the second sealing member.

In this way, by additionally adding a vacuum breakage detection device in the vacuum sealing structure of the motor, it is possible to prevent vacuum breakage in the area where the process on the wafer proceeds in advance, thereby preventing fatal damage of the wafer in process. By preventing it, it is possible to achieve productivity improvement and cost reduction in a semiconductor manufacturing line.

In the above-described bar, the vacuum sealing structure (registration number 10-0698544) of the motor was used as an example applicable, and the configuration of the vacuum breakdown detection apparatus is similarly applicable to the similar structure.

The present inventors put on a separate test heating plate for the vacuum sealing structure (patent registration No. 10-0698544) of the motor to which the vacuum destruction detection device is added as described above, and the housing 10 temperature is currently installed. In the state heated to 100 degreeC which is the temperature applied to, the shaft 15 was rotated and the leaking check was performed after time passed. The results are shown in Tables 1 and 2 below.

Hereinafter, Table 1 shows a leak rate result of the outside (process progress area) of the first sealing member 21, and Table 2 shows a leak rate of the area between the first and second sealing members 21 and 23. rate) results are shown respectively.

No. Rotation Accumulation Time (Hr) Housing temperature (℃) Vacuum rate Leaking detector base pressure Leaking rate One 0 20 3.0e-3torr 5.9 x e-10mbar.l / s 5.9 x e-10mbar.l / s 2 24 100 3.0e-3torr 6.1 x e-10mbar.l / s 6.2 x e-10mbar.l / s 3 72 100 3.0e-3torr 6.4 x e-10mbar.l / s 6.4 x e-10mbar.l / s 4 96 100 3.0e-3torr 5.7 x e-10mbar.l / s 5.8 x e-10mbar.l / s 5 120 100 3.0e-3torr 6.0 x e-10mbar.l / s 6.1 x e-10mbar.l / s 6 168 100 3.0e-3torr 6.3 x e-10mbar.l / s 6.3 x e-10mbar.l / s

No. Rotation Accumulation Time (Hr) Housing temperature (℃) Vacuum rate Leaking detector base pressure Leaking rate One 0 20 5.0e-3torr 5.6 x e-10mbar.l / s 5.7 x e-10mbar.l / s 2 24 100 5.0e-3torr 5.6 x e-10mbar.l / s 6.6 x e-10mbar.l / s 3 72 100 5.0e-3torr 5.8 x e-10mbar.l / s 6.9 x e-10mbar.l / s 4 96 100 5.0e-3torr 5.9 x e-10mbar.l / s 5.9 x e-10mbar.l / s 5 120 100 5.0e-3torr 6.1 x e-10mbar.l / s 6.1 x e-10mbar.l / s 6 168 100 5.0e-3torr 6.2 x e-10mbar.l / s 6.2 x e-10mbar.l / s

As can be seen from the results of Table 1 and Table 2, the leaking rate of the region between the first and second sealing members of the present invention shows an excellent vacuum leaking state with almost no difference based on the leaking detection base pressure. The pressure in the region between the first and second sealing members maintained can be used as a reference point for monitoring the sealing degree of the first and second sealing members.

1 is a schematic view showing the coupling of the vacuum pressure detector connecting portion for detecting whether the vacuum break in the vacuum sealing structure of the motor according to the present invention,

Figure 2 is a partial coupling diagram showing the coupling of the vacuum pressure detector connecting portion for detecting whether the vacuum break in the vacuum sealing structure of the motor according to the present invention,

3 is a state diagram showing a state in which a vacuum pressure detection unit is coupled to a vacuum sealing structure of a motor according to an embodiment of the present invention;

4 is a block diagram illustrating the operation of the vacuum tightness detecting apparatus in the vacuum sealing structure of the motor provided with the vacuum pressure detecting unit according to the embodiment of the present invention;

5 is a detailed view for explaining in more detail the operation of the vacuum privacy detection apparatus in the vacuum sealing structure of the motor provided with a vacuum pressure detection unit according to an embodiment of the present invention.

* Description of the symbols for the main parts of the drawings *

10: housing 11a: housing groove

21 and 23: first and second sealing member 30: heat dissipation means

40: motor 50: vacuum pressure detector

52: pressure detection connector 52h: pressure detection groove

52p: pressure detection rod 60: vacuum control valve

70: vacuum pump connector 80: vacuum pump

90: main controller 100: vacuum pressure detector

2: LEAK detection sensor and vacuum holding valve connection

3: housing 4: motor

5: first sealing member-chamber direction 5: second sealing member-outer direction

10: vacuum sealing structure of motor

Claims (4)

A housing, a shaft which is a rotational shaft inside the housing, and a pair of sealing members coupled to the shaft outer circumference and in contact with the inner surface of the housing, and an elastic member overlapped between the pair of sealing members, the inner circumferential surface being in close contact with the shaft, In the vacuum sealing structure of the motor that is in close contact with the inner wall of the housing to form a vacuum sealed state, and receives a rotational force by a motor provided inside the housing, A pressure detecting groove 52 is provided through a portion of the inner wall of the housing, and is connected through a pressure detecting connector 52 which is coupled to measure the pressure of a plurality of sealing members installed inside the housing. In the vacuum sealing structure of the motor, characterized in that it comprises a vacuum pressure detector (100) for measuring and detecting the leak, and controlling the leak. The vacuum pressure detector (100) of claim 1, wherein the vacuum pressure detector (100) includes a vacuum pressure detector (50) for detecting vacuum pressures of the first and second sealing members provided in the housing, and a passage of the vacuum pressure detector (50). A vacuum control valve 60 connected to the vacuum control valve 60 for adjusting the degree of vacuum, a vacuum pump 80 for generating a vacuum introduced into the housing, and a vacuum generated from the vacuum pump 80 for the vacuum control valve 60. And a vacuum pump connector (70) for connecting to the main controller (90) for detecting, displaying and controlling the degree of vacuum in the housing. 3. The pressure detecting connector 52 according to claim 2, wherein the vacuum pressure detector 50 includes a pressure detecting connector 52 provided through an inner wall of the housing and a pressure detecting groove provided at an end of the pressure detecting connector. 52h) and a pressure detecting rod (52p) for flowing out the pressure. According to claim 1, The vacuum pressure detection unit 100, in order to detect the pressure in order to maintain the space between the pair of sealing members in contact with the housing inner surface in a vacuum state, by comparing the pressure with the reference pressure An apparatus for detecting vacuum tightness in a vacuum sealing structure of a motor, characterized by generating an error signal informing and alerting when an error occurs.

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