KR20100124367A - Probe block - Google Patents

Abstract

PURPOSE: A probe block is provided to implement a guide plate with a secure structure by combining a plurality of plate units and forming the guide plate. CONSTITUTION: A guide plate(GP) includes penetration slots with a uniform interval. The guide plate is formed by combining a plurality of plate units where penetration holes are formed. A first penetration slots are arranged in a line in the lower part of the guide plate. Second penetration slots are arranged in a line in order to cross the first penetration slots in the upper part of the first penetration slots. A plurality of probes are inserted into the penetration slots in a horizontal direction and are fixed by a level difference formed inside the slots.

Description

Probe block

The present invention relates to a probe block, and more particularly, to a probe block having a structure in which the probe can be inserted in the horizontal direction and easily separated in the horizontal direction.

In general, a probe block is used to check whether a semiconductor device or a flat panel display panel such as an LCD or a PDP operates normally without a pixel error.

Recently, as semiconductor devices and flat panel display panels become higher in quality, pixel densities have increased, which increases the need for probe blocks.

Probes developed so far are needle type made of tungsten or rhenium tungsten wire, blade type made of nickel or beryllium copper, copper plate or other polyimide film. Film type produced by etching the conductors, hybrid type in which conductive media is injected by using semiconductor process technology, and pogo pin using spring tension. Pogo type manufactured, MEMS type using semiconductor MEMS process technology, and the like.

Such a conventional probe block is provided with needles in the form of wires, and the needles are bonded to each other by an epoxy resin. Needles are formed at both ends, and needles at both ends are integrally connected by an elongated beam part. It has a structure.

However, in the probe block, the fine pitch between the needles is very important, and thus the size and thickness of the needle block and the beam part are gradually reduced. That is, when the beam portion is getting thinner and the needle is forced up and down, the beam portion may not be able to withstand the force and may be broken or bent, causing a failure of the probe block.

If any of the needles are defective in the probe block, it is necessary to disassemble the probe block and replace the defective needle with a new one. However, various problems occur due to problems such as working time.

Therefore, there is a need for the development of a probe block in which the beam part is not weak in pressure, and in the case of a defective needle, only the defective needle can be easily separated separately.

An object of the present invention is to provide a probe block having a structure in which the probe can be inserted in the horizontal direction and easily separated in the horizontal direction.

Probe block according to an embodiment of the present invention for achieving the above technical problem, has a guide plate and a plurality of probes.

The guide plate is formed by passing through slots in which the probe is inserted in the horizontal direction at a predetermined interval, and is formed by combining a plurality of plate units having through holes for forming the through slots.

The plurality of probes are inserted into the through slots in a horizontal direction and fixed by a step formed in the through slot, and are separated from the through slot by elasticity from the step.

The through slots of the guide plate may include first through slots arranged in a row below the guide plate, and second through slots arranged in a row alternately with the first through slots above the first through slots. The third through nth (n is a natural number) through slots are arranged on the second through slots to be alternately arranged in the lower through slots.

Among the plurality of plate units, the through hole of any one of the plate units has the step, or the step is formed by the height difference between the through holes of the plate unit. The step is formed on the upper and lower surfaces of the through hole of the plate unit, or is formed on the upper or lower surface.

The probe may include a fixing part branched from the center part and extending upwardly at one end, a probe part branching from the center part and extending downward from the fixing part, and a spring structure configured to give elasticity in the horizontal direction. Formed into ends,

The fixing part has elasticity in the vertical direction, and the fixing part is caught and fixed to the step, and the fixing part is released by elasticity to separate the probe from the through slot.

The fixing portion is formed with a protrusion to engage the step, the probe portion is formed of a beam portion extending from the central portion, and a contact portion integrally formed at the end of the beam portion, the beam portion has a high elasticity in the vertical direction It extends from the center portion at a predetermined distance away from the government.

In addition, the probe is formed of a fixed portion which is branched from the central portion extending above the one end portion, a probe portion branched from the central portion and formed to extend below the fixing portion, and formed of a spring structure to give elasticity in the horizontal direction The probe portion is formed of a beam portion extending from the central portion and a contact portion integrally formed at the end of the beam portion, the beam portion is formed with a protrusion to engage the step, the protrusion is elastic The probe is separated from the through slot so that the probe is separated, and the beam part extends from the center part at a predetermined distance from the fixing part to have elasticity in the vertical direction.

A probe inserted into the first through slot among the probes, a first probe, a probe inserted into the second through slot, a second probe, and a probe inserted into the third through n th through slots, respectively; When the 3rd to the nth probe, the height at the bottom of the contact end of the probe portion of the first to nth probe is the same,

The distance from the guide plate at the contact end of the probe of the neighboring probe is different. In the center of the contact portion of the second to n-th probe, a probe auxiliary portion for inducing stable vertical movement of the contact portion protrudes toward the center portion.

The plate unit located in front of the plurality of plate units has an auxiliary hole into which the probe auxiliary part is inserted, and the auxiliary hole is vertically downward of the through slot into which the probe having the probe auxiliary part is inserted. It is formed between the through slots disposed in the lower portion of the slot.

A probe inserted into the first through slot among the probes, a first probe, a probe inserted into the second through slot, a second probe, and a probe inserted into the third through n th through slots, respectively; When the third to n-th probes are applied, the heights at the bottom of the contact end of the probe of the first to n-probes are the same, and the distances from the guide plate of the contact end of the probe of the neighboring probe are the same.

At the center of the contact portion of the second to nth probes, a probe auxiliary portion for inducing stable vertical movement of the contact portion protrudes toward the center portion.

The plate unit located in front of the plurality of plate units has an auxiliary hole into which the probe auxiliary part is inserted, and the auxiliary hole is vertically downward of the through slot into which the probe having the probe auxiliary part is inserted. It is formed between the through slots disposed in the lower portion of the slot.

The plate units are stacked in plural in the horizontal direction.

Probe block according to another embodiment of the present invention for achieving the above technical problem, a guide plate and a plurality of probes.

The guide plate has first through slots arranged in a row at the bottom, and second through nth (n is a natural number) through slots arranged alternately with the through slots at the bottom of the first through slots. A plurality of plate units having through holes for forming the through slots are coupled to each other.

The probes are horizontally inserted into the second through n-th through slots and fixed by a step formed in the through slot, and are released from the step by elasticity and separated from the through slot.

The first through slot has a bottom surface open to the bottom surface of the guide plate and the probes are inserted and seated in the vertical direction, and the bottom surface of the guide plate supports the probes to be inserted into the first through slot. Combined with

Among the plurality of plate units, the through hole of any one of the plate units has the step, or the step is formed by the height difference between the through holes of the plate unit. The step is formed on the upper and lower surfaces of the through hole of the plate unit, or is formed on the upper or lower surface.

The probe inserted into the second through n-th through slots includes a fixed part branched from the center part and extending upwardly at one end, a probe part branched from the center part and formed to extend below the fixing part, and horizontally. It is formed of the other end formed with a spring structure for giving elasticity, the fixing portion is elastic in the vertical direction, the fixing portion is fixed to the step is fixed, the fixing portion is released by elasticity so that the probe from the through slot Are separated.

The fixing portion is formed with a protrusion to engage the step, the probe portion is formed of a beam portion extending from the central portion, and a contact portion integrally formed at the end of the beam portion, the beam portion has a high elasticity in the vertical direction It extends from the center portion at a predetermined distance away from the government.

The probe inserted into the second through n-th through slots includes: a fixing part branched from the center part and extending upwardly at one end, a probe part branching from the center part and extending from the lower part of the fixing part, and a horizontal direction. The other end is formed of a spring structure for giving elasticity, the probe portion is formed of a beam portion extending from the central portion, and a contact portion formed integrally with the beam end, the beam portion is a projection to engage the step The protrusion is released by elasticity so that the probe is separated from the through slot, and the beam part extends from the center part at a predetermined distance from the fixing part to have elasticity in the vertical direction.

A probe inserted into the first through slot among the probes, a first probe, a probe inserted into the second through slot, a second probe, and a probe inserted into the third through n th through slots, respectively; In the third to n-th probes, the height at the bottom of the contact end of the probe of the first to n-probes is the same, and the distance from the guide plate of the contact end of the probe of the neighboring probe is different.

In the center of the contact portion of the second to n-th probe, a probe auxiliary portion for inducing stable vertical movement of the contact portion protrudes toward the center portion.

The plate unit located in front of the plurality of plate units has an auxiliary hole into which the probe auxiliary part is inserted, and the auxiliary hole is vertically downward of the through slot into which the probe having the probe auxiliary part is inserted. It is formed between the through slots disposed in the lower portion of the slot. A probe inserted into the first through slot among the probes, a first probe, a probe inserted into the second through slot, a second probe, and a probe inserted into the third through n th through slots, respectively; When the third to n-th probes are applied, the heights at the bottom of the contact end of the probe of the first to n-probes are the same, and the distances from the guide plate of the contact end of the probe of the neighboring probe are the same. The probe inserted into the first through slot includes a fixed part branched from a central part and extending upwardly at one end, a probe part branched and extended from the center part below the fixed part, and elastically horizontally provided. It is formed of the other end formed with a spring structure for.

The plate units are stacked in plural in the horizontal direction.

Probe block according to an embodiment of the present invention is a guide plate by combining a plurality of plate units to form a guide plate is an advantage, by forming two or more through slots in the guide plate to create a structure in which the probes stacked in multiple layers There is this.

In addition, the probes are inserted into the through slots horizontally and individually, and if a problem occurs in one probe, only the probe in question can be separated individually, eliminating the inconvenience of disassembling the guide plate to separate the probe in the related art. There is an advantage.

Conventionally, in the case of the guide plates in which the probes are arranged in one line, the pitch between the slots in which the probes are inserted is a problem that the guide plate is bent or broken, but the probe block according to the embodiment of the present invention is a conventional probe. Even if the same number of probes are arranged in a block, the probes may be stacked in a plurality of layers in the vertical direction, and thus, the pitch between the through slots into which the probes are inserted may be increased, and thus the guide plate may not be bent or broken.

In addition, the guide plate according to an embodiment of the present invention has a strong strength of the guide plate itself because it is made by combining a plurality of plate units in the horizontal direction.

DETAILED DESCRIPTION In order to fully understand the present invention, the operational advantages of the present invention, and the objects achieved by the practice of the present invention, reference should be made to the accompanying drawings which illustrate preferred embodiments of the present invention and the contents described in the drawings.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference numerals in the drawings denote like elements.

1 is a perspective view illustrating a state in which a probe block according to an embodiment of the present invention is coupled to a body block.

2 is a perspective view illustrating a probe block according to an embodiment of the present invention.

1 and 2, the probe block 200 according to the embodiment of the present invention is coupled to the body block BB, and the body block BB is coupled to the probe unit (not shown).

The probe block 200 includes a guide plate GP and a plurality of probes PB. The guide plate GP is formed with through slots SLT into which the probe PB is inserted in the horizontal direction at a predetermined interval, and has through holes (not shown) for forming the through slots SLT. A plurality of plate units (GPU1 ~ GPU5) formed in the lower is combined.

As shown in FIG. 2, the plate units GPU1 to GPU5 forming the guide plate GP have a structure in which a plurality of plate units GPU1 are stacked in a horizontal direction, and the number thereof may vary depending on the length of the probe PB. have.

The plurality of probes PB are inserted into the through slot SLT in a horizontal direction and fixed by a step (not shown) formed inside the through slot SLT, and are released by elasticity from the step and the through slots SLT. Separated from.

That is, the conventional general probe block has a structure in which the probe is seated on the guide plate in the vertical direction, whereas in the probe block 200 according to the embodiment of the present invention, the probe PB is inserted in the horizontal direction in the guide plate GP. To be fixed and separated.

Since the probe PB can be inserted and separated in the horizontal direction and one probe PB is inserted into one through slot, even if a problem occurs in the probe PB, only the probe PB having the problem can be separated. It is not necessary to disassemble the guide plate GP or separate the entire probe block 200 from the probe unit (not shown).

3 is a front view of the guide plate of FIG. 2.

4 is a cross-sectional view of the guide plate of FIG. 2.

FIG. 5A is a diagram for explaining the structure of the first probe, and FIG. 5B is a diagram for explaining the structure of the second probe.

 6 is a view for explaining the shape when the first probe and the second probe is inserted into the through slot.

7 is a side cross-sectional view illustrating a state in which a probe is inserted into a guide plate.

8 is a perspective view of FIG. 7.

Hereinafter, a structure of a probe block according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 8.

As shown in FIG. 3, the through slots SLT of the guide plate GP include the first through slots SLT1 and the first through slots SLT1 arranged in a row under the guide plate GP. The second through slots SLT2 are arranged in a row alternately with the first through slots SLT1).

Although not shown in FIG. 3, the third through nth ns arranged in a row alternately with the lower first and second through slots SLT1 and SLT2 on the second through slots SLT2. Natural water) through slots (not shown) may continue to be disposed. That is, if necessary, through slots may be continuously stacked and the probe PB may be inserted.

Reference numeral 210 denotes a bolt (not shown) for adjusting the alignment of the plate units GPU1 to GPU5 constituting the guide plate GP and also for coupling the plate units GPU1 to GPU5. It is a screw hole.

4 is a cross-sectional view of the guide plate GP configured by combining the plate units GPU1 to GPU5.

The plate units GPU1 to GPU5 of the guide plate GP have through holes UH11 to UH15 and UH21 to UH25 to form the through slot SLT, and the plate units GPU1 to GPU5. This combination constitutes a guide plate GP. That is, in order to form the first through slot SLT1, the play units GPU1 to GPU5 include the first through holes UH11 to UH15 at the same position and to form the second through slot SLT2. The plate units GPU1 to GPU5 have second through holes UH21 to UH25 at the same position.

In addition, the plate units GPU1 to GPU5 are displaced from the first through holes UH11 to UH15 and the second through holes UH21 to UH25 by a coupling member inserted into the screw hole 210, that is, a bolt. Aligned and combined to form a guide plate (GP).

The through hole of any one of the plate units GPU1 to GPU5 may include the step 310, or the step 310 may be formed by a height difference between the through holes of the plate units GPU1 to GPU5. have.

 In FIG. 4, the height of the through hole UH22 of the second plate unit GPU2 is greater than the height of the through hole UH21 of the first plate unit GPU1, so that the space between the through hole UH22 and the through hole UH21 naturally occurs. It is formed as a step 310.

Alternatively, a step 310 may be formed on the inner upper surface of the through hole UH21 of the first plate unit GPU1 to fix and fix the fixing part 410. However, this is only one embodiment, and the step 310 may be formed in a plate unit other than the first plate unit GPU1. In addition, the step 310 is formed on the upper and lower surfaces of the through hole of the plate unit, or is formed on the upper or lower surface.

That is, in FIG. 4, the step 310 is formed on the top surface of the through hole UH21 of the plate unit GPU1. However, the step 310 may be formed on the bottom surface of the through hole UH21. Alternatively, both of the upper and lower surfaces may be formed.

The position at which the fixing part 410 of the probe PB is formed may vary according to the position where the step 310 is formed, which will be described later.

The structure of the first probe PB1 is shown in Fig. 5A, and the structure of the second probe PB2 is shown in Fig. 5B.

Referring to FIGS. 5A and 5B, the probe PB is branched from the center portion 430 to a fixed portion 410 which is formed to extend above the upper portion and a central portion below the fixed portion 410. Probes 419 and 425 branching and extending from 430 are formed, and the other end 450 formed of a spring structure to give elasticity in the horizontal direction. The fixing part 410 has elasticity in the up and down direction, and the fixing part 410 is fixed to the step 310, and the fixing part 410 is released by elasticity so that the probe PB is removed from the through slot SLT. Are separated.

In more detail, the fixing part 410 is formed with a protrusion 415 engaging with the step 310, and the probe parts 419 and 425 are formed by the beam part 417 extending from the center part 430, and the beam part ( 417) consists of contact portions 418 and 421 integrally formed at the ends. The beam part 417 extends from the center part 430 apart from the fixed part 410 by a predetermined interval to have elasticity in the vertical direction.

The probe inserted into the first through slot SLT1 among the probes PB is called the first probe PB1, and the probe inserted into the second through slot SLT2 is called the second probe PB2. If the probes inserted into the n th through slot are third to n th probes, respectively, the first probe PB1 shown in FIG. 5A and the second probe PB2 shown in FIG. 5B are probes. The structure of wealth is different.

That is, in the second probe PB2 illustrated in FIG. 5B, the probe auxiliary part 423 for inducing stable vertical movement of the contact part 421 in the center of the contact part 421 of the probe part 425 has a central part. Protruding in the 430 direction.

The probe assistant 423 is formed in all of the contact portions of the second to n-th probes, and the probe assistant 423 does not exist in the contact portion 418 of the first probe PB1.

The protrusion 415 formed on the middle of the fixing part 410 is engaged with the step 310 to fix the probe PB. 5 (a) and (b), the fixing portion 410 is formed extending from the central portion 430 to the upper end, wherein the fixing portion 410 is formed to be inclined upward toward the end, the probe Since it extends from the center portion 430 apart from the beam portion 417 of the portion 425 by a predetermined distance, it has elasticity in the vertical direction.

The other end 450 of the probe PB is inserted into the through slot SLT, and the fixing part 410 is pushed downward by the through slot SLT while being inserted into the through slot SLT and then the fixing part 410. When the protruding portion 415 is engaged with the step 310, the probe PB is fixed to the through slot SLT.

7 and 8, the end of the fixing part 410 protrudes out of the guide plate GP. When the end is pressed, the protrusion 415 is separated from the step 310 by elasticity and the probe PB is pressed. ) Is separated from the through slot (SLT).

7 and 8, the end of the fixing part 410 protrudes out of the guide plate GP, but the structure of the fixing part 410 is not limited thereto, and the end of the fixing part 410 may be a guide plate. (GP) It may be a structure that does not protrude to the outside. In this case, by inserting a thin pin or the like into the through slot (SLT) by pressing the end of the fixing portion 410 may be such that the protrusion 415 is separated from the step 310 by elasticity, those skilled in the art can understand this structure There will be.

The first probe PB1 and the second probe PB2 shown in FIGS. 5A and 5B have a prop structure when the step 310 is formed on the upper surface of the through hole. If the step 310 is formed on the lower surface of the through hole of the plate unit, the structure of the probe PB will also be different.

That is, the probe (PB) is a fixed portion which is branched from the central portion extending to the upper end portion, a probe portion branched to extend from the central portion formed below the fixing portion, and a spring structure for giving elasticity in the horizontal direction The other end portion is formed, the probe portion comprises a beam portion extending from the central portion, and a contact portion formed integrally with the beam end portion.

In addition, the beam part may have a structure in which a protrusion that is engaged with a step formed in a lower surface of the through hole is downward, and a probe is fixed by being engaged with a step that is formed in a lower part of the protrusion that is formed in a lower portion. In addition, the protruding portion is released by elasticity to separate the probe from the through slot, the beam portion has a structure extending from the central portion spaced apart from the fixed portion so as to have elasticity in the vertical direction.

When the probe tests the pad under test, the pressure received from the pad under test acts upwards. At this time, the step height formed on the lower surface of the protruding portion from the step formed on the lower surface is higher than the step height formed on the upper surface. Should be large.

Since the probe of this structure will be understood by those skilled in the art, a detailed description thereof will be omitted.

In addition, when the step 310 is formed on both the upper surface and the lower surface of the through-hole of the plate unit, the probe may be formed in a structure in which a protrusion for fixing to the step is formed in both the fixed portion and the beam portion of the probe. Probe of this structure will also be understood by those skilled in the art, so detailed description thereof will be omitted.

The other end 450 of the probe PB is formed in a spring structure to give elasticity in the horizontal direction. As the probe PB is inserted in the horizontal direction, the end ED of the probe PB comes into contact with the TPC film TCP and the other end 450 is compressed while having the horizontal elasticity. The probe PB is fixed while the protrusion 415 of the fixing part 410 is engaged with the step 310.

When the protrusion 415 is separated from the step 310, the front end of the probe PB is bounced out of the through slot SLT by the elasticity of the other end 450 of the probe PB.

7 and 8, the height at the bottom of the contact end of the probe of the first to n-th probes is the same. To test the pad under test, the ends of the contacts of the probe PB should be level with each other.

The distances from the guide plates GP at the ends of the contact portions of the probes of the neighboring probes PB are different from each other. Referring to FIG. 8, the distance from the guide plate GP at the end of the contact portion 421 of the probe portion 425 of the second probe PB2 is the contact portion 418 of the probe portion 419 of the first probe PB1. ) It is longer than the distance from the end of the guide plate GP. That is, the ends of the contact portions of the first probe PB1 and the second probe PB2 are arranged apart from the guide plate GP in a zigzag form.

When the first probe PB1 or the second probe PB2 tests the pad under test, the contact parts 421 and 418 move left and right by the pressure received from the pad under test. It is to prevent becoming.

However, unlike those shown in FIGS. 7 and 8, the distances from the guide plates GP at the ends of the contact portions of the probes of the neighboring probes PB may be equal to each other.

The probe assistant 423 formed at the center of the contact portion 421 of the second probe PB2 is for inducing stable vertical movement of the contact portion 421. That is, the contact portion 421 of the second probe PB2 is longer than the contact portion 418 of the first probe PB1. The second through slot SLT2 into which the second probe PB2 is inserted is above the first through slot SLT1 into which the first probe PB1 is inserted, but maintains the same height at the bottom of the contact portion. To do that.

In this case, since the length of the contact portion 421 of the second probe PB2 is long, when the end of the contact portion 421 is pressed by the pad under test, the contact portion 421 is shaken from side to side due to the pressure to be inspected. It may not be exactly in contact with the object pad. Probe assistant 423 is to eliminate this problem.

The probe assistant 423 is inserted into the auxiliary hole SH of the guide plate GP to induce stable vertical movement of the contact part 421 by allowing the probe assistant 423 to move only in the vertical direction. The assistant hole SH is a hole formed by a predetermined length in the vertical direction so that the probe auxiliary part 423 may be inserted into the auxiliary hole SH and move slightly up and down and not move left and right.

The plate unit GPU1 positioned at the front of the plurality of plate units GPU1 to GPU5 includes an auxiliary hole SH into which the probe auxiliary part 423 is inserted. The auxiliary hole SH is formed vertically below the through slot into which the probe having the probe auxiliary part 423 is inserted, and is formed between the through slots disposed below the through slot.

That is, the probe auxiliary portion 423 formed at the contact portion 421 of the second probe PB2 is vertically downward of the second through slot SLT2 into which the second probe PB2 is inserted and is lower than the second through slot SLT2. It is formed between the first through slots (SLT1) disposed in the, shown in Figures 3 and 8.

Although not shown in FIG. 8, auxiliary holes are also formed at positions vertically downward of the third to nth probes.

As described above, the probe block having the structure shown in FIGS. 1 to 8 has a guide plate GP that is coupled to a plurality of plate units GPU1 to GPU5 to form a guide plate GP, and a guide plate GP. By forming the through slots SLT in two or more stages, a structure in which the probes PB are stacked in multiple layers can be made.

In addition, the probes PB are separately inserted horizontally into the through slots SLT, and when a problem occurs in one probe, only a probe having a problem may be separately separated.

9 is a perspective view illustrating a structure of a probe block according to another embodiment of the present invention.

Referring to FIG. 9, a probe block 900 according to another embodiment of the present invention includes a guide plate GP and a plurality of probes PB1 and PB2.

The guide plate GP may include first through slots SLT1 arranged in a row at a lower portion thereof, and second through nth ns arranged in a line with the lower through slots above the first through slots SLT1. Is a natural number) through-slots are formed.

The guide plate GP is formed by combining a plurality of plate units GPU1 to GPU5 having through holes (not shown) for forming through slots.

The probes including the second probe PB2 are horizontally inserted into the second through nth through slots and fixed by a step (not shown) formed inside the through slot, and the fixing part (not shown) is elastically fixed from the step. It is released and separated from the through slot.

The first through slot SLT1 has a bottom surface opened as a bottom surface of the guide plate GP, and the first probes PB1 are inserted and seated in a vertical direction, and the bottom surface of the guide plate GP is formed of a first surface slot SLT1. It is coupled to the support plate 920 for supporting the first probes (PB1) inserted into the first through slot (SLT1).

In the probe block 900 shown in FIG. 9, the second through n th through slots and the probe inserted therein are inserted into the second through n th through slots shown in FIGS. 1 through 8 and the second through n th through slots. It has the same structure as the probe to be inserted.

Instead, the first probe PB1 inserted into the first through slot SLT1 is different from the first through slot SLT1 shown in FIGS. 1 to 8.

That is, the bottom surface of the first through slot SLT1 of FIG. 9 is the same surface as the bottom surface of the guide plate GP, and the bottom surface is opened. That is, as shown in FIG. 9, the first through slot SLT1 has a bottom surface opened so that the first probes PB1 are inserted into the first through slot SLT1 from the bottom to the top of the bottom surface, that is, in the vertical direction. do. The bottom surface of the guide plate GP is coupled to the support plate 920. The support plate 920 covers the bottom of the guide plate GP except for the probe of the first probe PB1.

The shape of the first through slot SLT1 may vary, and FIG. 9 discloses a structure in which the front portion is blocked. The fixing part 910 of the first probe PB1 does not have a protrusion unlike the fixing part 410 of the first probe PB1 of FIG. 5A. This is because the first probe PB1 is inserted into the first through slot SLT1 and fixed by the support plate 920, so that a structure for fixing the first probe PB1 is not necessary.

However, the rights of the present invention are not limited to the shape of the first probe PB1 and the first through slot SLT1 shown in FIG. 9, and if the structure is inserted in the vertical direction and seated on the probe block 900, The structures of the first through slot SLT1 and the first probe PB1 may vary.

In the exemplary embodiment illustrated in FIGS. 1 to 9, the guide plate GP is described based on a structure composed of a plurality of plate units GPU1 to GPU5 stacked in a horizontal direction, but the guide plate GP is described. It may be made of one plate unit, those skilled in the art will understand the structure of such a guide plate (GP).

As described above, optimal embodiments have been disclosed in the drawings and the specification. Although specific terms have been used herein, they are used only for the purpose of describing the present invention and are not intended to limit the scope of the present invention as defined in the claims or the claims. Therefore, those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS In order to better understand the drawings cited in the detailed description of the invention, a brief description of each drawing is provided.

1 is a perspective view illustrating a state in which a probe block according to an embodiment of the present invention is coupled to a body block.

2 is a perspective view illustrating a probe block according to an embodiment of the present invention.

3 is a front view of the guide plate of FIG. 2.

4 is a cross-sectional view of the guide plate of FIG. 2.

FIG. 5A is a diagram for explaining the structure of the first probe, and FIG. 5B is a diagram for explaining the structure of the second probe.

 6 is a view for explaining the shape when the first probe and the second probe is inserted into the through slot.

7 is a side cross-sectional view illustrating a state in which a probe is inserted into a guide plate.

8 is a perspective view of FIG. 7.

9 is a perspective view illustrating a structure of a probe block according to another embodiment of the present invention.

Claims (26)

In the probe block, A guide plate in which the through slots into which the probe is inserted in the horizontal direction are formed at predetermined intervals, and the plurality of plate units having through holes for forming the through slots are combined; And And a plurality of probes inserted into the through slot in a horizontal direction and fixed by a step formed in the through slot, the plurality of probes being released from the step by elasticity and separated from the through slot. The method of claim 1, wherein the through slots of the guide plate, First through slots arranged in a row in a lower portion of the guide plate; Second through slots arranged in a row alternately with the first through slots on the first through slots; Probe block, characterized in that the third through n-th (n is a natural number) through slots are arranged in a row alternately with the lower through slots on the second through slots. 3. The method of claim 2, Probe block, characterized in that the through-hole of any one of the plurality of plate units having the step or the step is formed by the height difference of the through hole of the plate unit. The method of claim 3, wherein the step is Probe block, characterized in that formed on the upper and lower surfaces of the through-hole of the plate unit, or formed on the upper or lower surface. The method of claim 2, wherein the probe, It is formed of a fixed portion branched from the central portion extending to the upper end portion, a probe portion branched to extend from the central portion formed below the fixing portion, and the other end formed of a spring structure for giving elasticity in the horizontal direction , The fixing portion has an elasticity in the vertical direction, the fixing portion is elastically hung on the step is fixed, the fixing portion is released by elasticity to the probe block characterized in that the probe is separated from the through slot. The method of claim 5, The fixing portion is formed with a protrusion to engage the step, The probe part may include a beam part extending from the center part and a contact part integrally formed at an end of the beam part, and the beam part may be formed to extend from the center part at a predetermined interval away from the fixing part to have elasticity in the vertical direction. Probe block. The method of claim 2, wherein the probe, It is formed of a fixed portion branched from the central portion extending to the upper end portion, a probe portion branched to extend from the central portion formed below the fixing portion, and the other end formed of a spring structure for giving elasticity in the horizontal direction , The probe portion includes a beam portion extending from the center portion and a contact portion integrally formed at the end of the beam portion. The beam portion is formed with a protrusion engaging the step, the protrusion is released by elasticity to separate the probe from the through slot, And the beam portion extends from the center portion at a predetermined interval away from the fixed portion to have elasticity in the vertical direction. The method according to claim 6 or 7, A probe inserted into the first through slot among the probes, a first probe, a probe inserted into the second through slot, a second probe, and a probe inserted into the third through n th through slots, respectively; When 3 to nth probe, The height at the bottom of the contact end of the probe of the first to n-th probe is the same, Probe block, characterized in that the distance from the guide plate of the contact end of the probe of the neighboring probe is different. The method of claim 8, In the center of the contact portion of the second to n-th probe, And a probe assisting part protruding toward the center part for inducing stable vertical movement of the contact part. The method of claim 9, The plate unit located in front of the plurality of plate units, And an auxiliary hole into which the probe auxiliary part is inserted, The auxiliary hole, And a probe slot formed between the through slots disposed below the through slot while being vertically downward of the through slot into which the probe is formed. The method according to claim 6 or 7, A probe inserted into the first through slot among the probes, a first probe, a probe inserted into the second through slot, a second probe, and a probe inserted into the third through n th through slots, respectively; When 3 to nth probe, The height at the bottom of the contact end of the probe of the first to n-th probe is the same, Probe block, characterized in that the distance from the guide plate at the end of the contact portion of the probe of the neighboring probe is the same. The method of claim 11, In the center of the contact portion of the second to n-th probe, And a probe assisting part protruding toward the center part for inducing stable vertical movement of the contact part. The method of claim 12, The plate unit located in front of the plurality of plate units, And an auxiliary hole into which the probe auxiliary part is inserted, The auxiliary hole, And a probe slot formed between the through slots disposed below the through slot while being vertically downward of the through slot into which the probe is formed. The method of claim 1, wherein the plate unit, A probe block, characterized in that a plurality of stacked in the horizontal direction. In the probe block, First through slots arranged in a row at a lower portion thereof, and second through nth (n is a natural number) through slots arranged in a line with the lower through slots above the first through slots; A guide plate formed by combining a plurality of plate units having through holes for forming slots; And A probe inserted into the second through nth through slots horizontally and fixed by a step formed in the through slot, released from the step by elasticity, and separated from the through slot; The first through slot has a bottom surface opened as the bottom surface of the guide plate and the probes are inserted and seated in the vertical direction, The bottom surface of the guide plate is coupled to the support plate for supporting the probes inserted into the first through slot. The method of claim 15, Probe block, characterized in that the through-hole of any one of the plurality of plate units having the step or the step is formed by the height difference of the through hole of the plate unit. The method of claim 16, wherein the step is Probe block, characterized in that formed on the upper and lower surfaces of the through-hole of the plate unit, or formed on the upper or lower surface. The method of claim 15, wherein the probe inserted into the second to n-th through slot, It is formed of a fixed portion branched from the central portion extending to the upper end portion, a probe portion branched to extend from the central portion formed below the fixing portion, and the other end formed of a spring structure for giving elasticity in the horizontal direction , The fixing portion has an elasticity in the vertical direction, the fixing portion is fixed to the step is fixed, the fixing portion is released by the elasticity of the probe block, characterized in that the probe is separated from the through slot. The method of claim 18, The fixing portion is formed with a protrusion to engage the step, The probe part may include a beam part extending from the center part and a contact part integrally formed at an end of the beam part, and the beam part may be formed to extend from the center part at a predetermined interval away from the fixing part to have elasticity in the vertical direction. Probe block. The probe of claim 15, wherein the probe is inserted into the second to n th through slot. It is formed of a fixed portion branched from the central portion extending to the upper end portion, a probe portion branched to extend from the central portion formed below the fixing portion, and the other end formed of a spring structure for giving elasticity in the horizontal direction , The probe portion includes a beam portion extending from the center portion and a contact portion integrally formed at the end of the beam portion. The beam portion is formed with a protrusion engaging the step, the protrusion is released by elasticity to separate the probe from the through slot, And the beam portion extends from the center portion at a predetermined interval away from the fixed portion to have elasticity in the vertical direction. The method of claim 19 or 20, A probe inserted into the first through slot among the probes, a first probe, a probe inserted into the second through slot, a second probe, and a probe inserted into the third through n th through slots, respectively; When 3 to nth probe, The height at the bottom of the contact end of the probe of the first to n-th probe is the same, Probe block, characterized in that the distance from the guide plate of the contact end of the probe of the neighboring probe is different. The method of claim 21, In the center of the contact portion of the second to n-th probe, And a probe assisting part protruding toward the center part for inducing stable vertical movement of the contact part. 23. The method of claim 22, The plate unit located in front of the plurality of plate units, And an auxiliary hole into which the probe auxiliary part is inserted, The auxiliary hole, And a probe slot formed between the through slots disposed below the through slot while being vertically downward of the through slot into which the probe is formed. The method of claim 19 or 20, A probe inserted into the first through slot among the probes, a first probe, a probe inserted into the second through slot, a second probe, and a probe inserted into the third through n th through slots, respectively; When 3 to nth probe, The height at the bottom of the contact end of the probe of the first to n-th probe is the same, Probe block, characterized in that the distance from the guide plate at the end of the contact portion of the probe of the neighboring probe is equal to each other. The method of claim 15, wherein the probe inserted into the first through slot, It is formed of a fixed portion which is branched from the central portion extending to the upper end portion, a probe portion branched to extend from the central portion formed below the fixing portion, and the other end formed of a spring structure to give elasticity in the horizontal direction Probe block, characterized in that. The method of claim 15, wherein the plate unit, A probe block, characterized in that a plurality of stacked in the horizontal direction.

Images