KR20100118376A - Pick and place apparatus - Google Patents

Abstract

PURPOSE: A pick and place apparatus is provided to improve the rigidity of the cam plate by forming a plurality of cam grooves to prevent the pass through. CONSTITUTION: A plurality of pickers(10) is respectively arranged in longitudinal direction and traverse direction. A plurality of first cam plates(40) is respectively installed on both ends of a plurality of first deformable members. A cam plate drive device(60) is connected to the plurality of first cam plates.

Description

Pick and place apparatus

The present invention relates to a pick and place device, and more particularly, to absorb an electronic component to transfer the electronic component to be tested in the test handler from the customer tray to the test tray or to transfer the tested electronic component from the test tray to the customer tray. A pick and place device for unlocking.

The test handler is a device for testing the electrical characteristics of an electronic component, such as a semiconductor device, which has been manufactured, and classifying it according to a preset grade according to the test result. In order to test and classify electronic components, the electronic components to be tested are first stored in a customer tray. Electronic components housed in the customer trays are transferred to a test tray and then tested for electrical characteristics. Tested electronic components are classified and stored in test trays and customer trays according to test results.

The test handler is provided with a pick and place apparatus for picking up or releasing the electronic components from the customer tray to the test tray or the test tray to the customer tray. This pick and place device is called a loading hand when transferring electronic components to be tested from a customer tray to a test tray, and an unloading hand when transferring electronic components tested from a test tray to a customer tray. It is called hand). Referring to the accompanying drawings, a conventional pick and place apparatus classified into a loading hand or an unloading hand according to an operation is as follows.

1 is a schematic configuration diagram of a conventional pick and place device, and schematically illustrates a planar configuration of a conventional pick and place device.

As shown in FIG. 1, the pick and place apparatus of the related art has a picker 3a composed of 4 ㅧ 8 in the longitudinal / lateral direction (Y / X), respectively, and includes a linear motion guide 1 and a cam plate. 2), a lift mechanism 3 and a plurality of picker modules 4.

The LM guide 1 is composed of an LM rail 1a and a plurality of moving blocks 1b installed to move along the LM rail 1a. The cam plate 2 is connected to the lifting mechanism 4 to move up and down, and a plurality of cam holes 2a are formed. Each of the plurality of picker modules 3 includes a plurality of pickers 3a and a cam plate 2 for transporting electronic parts to a customer tray (not shown) or a test tray (not shown), or for absorbing the received electronic parts. It consists of a bearing 3b moving along the guide hole 2a.

The bearing 3b is installed at one end of the picker module 3 and installed at the cam hole 2a of the cam plate 2, and the other end of the picker module 3 is installed at the moving block 1b of the LM guide 1. . When the cam plate 2 is moved up and down in the Z-axis direction by the elevating mechanism 4, the plurality of modules 4 are pitch (S) in the transverse direction (X) in accordance with the rise and fall of the cam plate (2). Is adjusted.

When the pitch S of the plurality of picker modules 3 is adjusted, one end of the plurality of picker modules 3 is pitched precisely due to the movement of the bearing 3b along the cam hole 2a as much as the cam plate 2 moves up and down. S) is adjusted. On the other hand, the other end of the picker module 3 connected to the moving block 1b is deformed in the coupling relationship between the components such as the LM guide 1 when the pick-and-place device is used for a long time, so that the pitch S W δ. Can be adjusted. For example, when the other end of the picker module 3 is adjusted to the pitch S ± δ, as shown in FIG. 1, the second picker module 3 located on the left side is different from the first picker module 3. Pitch adjustment is made inclined with respect to the direction (Y). In FIG. 1, the other end of the picker module 3 without the cam plate 2 shows a case in which the pitch S is increased by the interval δ, but may be reduced by the interval δ. As such, when the pitcher module 3 is pitch-adjusted to be inclined in the longitudinal direction Y, an error in pitch adjustment may occur. This pitch adjustment error is more because the length of the picker module 3 further increases in the longitudinal direction Y when the number of the pickers 3a provided in the picker module 3 is arranged in the longitudinal direction Y more. It will cause a serious error.

If a pitch adjustment error occurs like a conventional pick and place device, a longitudinally arranged picker installed in the picker module in which the error occurs has a problem in that it is impossible to hold or receive electronic components accurately.

Disclosure of Invention An object of the present invention is to provide a pick-and-place apparatus that has been devised to solve the above-described problems of the prior art, and has a plurality of cam plates in the longitudinal direction so that a plurality of pickers can accurately adjust the lateral pitch.

Another object of the present invention is to provide a pick and place device having a plurality of cam plates respectively in the longitudinal direction and the transverse direction so that the plurality of pickers can be precisely adjusted in the longitudinal or transverse direction.

Still another object of the present invention is to improve the rigidity of the cam plate by forming a plurality of cam grooves so as not to penetrate the cam plate, even if the type of electronic components are replaced by forming the cam groove as the random variable section groove and the fixed variable section groove. The present invention provides a pick and place device that can easily absorb or release an electronic component.

The pick and place device of the present invention comprises: a plurality of pickers arranged in the longitudinal and transverse directions, respectively; A plurality of first variable members respectively installed to move the plurality of pickers arranged in the longitudinal direction; A plurality of first cam plates respectively installed at both ends of the plurality of first variable members and having a plurality of first cam grooves formed therein; And a cam plate driving mechanism connected to the plurality of first cam plates to move up / down the plurality of first cam plates so that the first variable member has a pitch adjusted along the shape of the first cam groove.

Another embodiment of the pick and place device of the present invention comprises: a plurality of pickers arranged in the longitudinal direction and the transverse direction, respectively, with rotation guide members installed therein; A plurality of first variable members each installed to move the plurality of pickers arranged in the longitudinal direction in the longitudinal direction; A plurality of second variable members each installed so that the plurality of pickers arranged in the transverse direction are moved in the transverse direction; A plurality of first cam plates respectively installed at both ends of the plurality of first variable members and having a plurality of first cam grooves formed therein; A plurality of second cam plates respectively installed at both ends of the plurality of second variable members and having a plurality of second cam grooves formed therein; A plurality of first cam plates and a plurality of first cam plates and a plurality of second cam plates are connected to each other so that the first variable member and the second variable member are adjusted in pitch along the shape of the first cam groove and the shape of the second cam groove, respectively. And a cam plate driving mechanism for raising / lowering the second cam plate.

In the pick and place device of the present invention, a plurality of first cam plates are provided in the longitudinal direction so that the plurality of pickers can be accurately adjusted in the horizontal direction, and the plurality of first cam plates and the plurality of first cam plates in the longitudinal direction and the transverse direction, respectively. Providing the second cam plate provides the advantage that the plurality of pickers can be accurately adjusted in the longitudinal or transverse direction.

In addition, the pick and place device of the present invention can improve the rigidity of the first cam plate or the second cam plate by forming a plurality of first cam grooves or second cam grooves so as not to penetrate the first cam plate or the second cam plate. By forming the cam groove or the second cam groove into an arbitrary variable section groove and a fixed variable section groove, even when the type of electronic component is replaced, it provides an advantage of easily adsorbing or releasing the electronic component without a replacement kit. .

(Example)

An embodiment of the pick and place device of the present invention will be described with reference to the accompanying drawings.

2 to 5, the pick and place device of the present invention includes a plurality of pickers 10, a plurality of first variable members 20, a plurality of first cam plates 40, and a cam plate driving mechanism 60. do.

The plurality of pickers 10 are installed to be arranged in the longitudinal direction (Y) and the transverse direction (X), respectively, and the plurality of first variable members 20 are arranged in the longitudinal direction (Y). Each is installed to be moved. The plurality of first cam plates 40 are respectively installed at both ends of the plurality of first variable members 20, and each of the plurality of first cam grooves 41 is formed. The cam plate driving mechanism 60 is connected to the plurality of first cam plates 40 such that the first variable member 20 adjusts the pitch AX and FX along the shape of the first cam groove 41. Raises and lowers 40. Here, the pitch (AX, FX) adjustment by the plurality of first cam plates 40 is called lateral pitch adjustment.

The configuration of the pick and place device of the present invention having the above configuration will be described in detail as follows.

The plurality of pickers 10 are further provided with a pneumatic device (not shown) to adsorb or release the electronic components (not shown).

Each of the plurality of first variable members 20 includes a variable linear motion guide 21, a plurality of connecting blocks 22, and a plurality of bearings 23. The variable LM guide 21 is installed to move the plurality of pickers 10 arranged in the longitudinal direction (Y), the variable LM guide 21 is installed to move along the LM rail (not identified) and the LM rail It consists of LM blocks (not identified). A plurality of connecting blocks 22 are respectively installed at both ends of the variable LM guide 21, a plurality of bearings 23 are respectively installed in the connecting block 22, each of the plurality of first cam plate 40 A plurality of first cam grooves 41 formed therein are inserted and installed.

The plurality of first cam plates 40 are each formed with a plurality of first cam grooves 41, and the plurality of first cam grooves 41 are formed to be inclined such that the first cam plates 40 do not penetrate. Since the first cam groove 41 is formed so that the first cam plate 40 does not penetrate through, the first cam plate 40 has increased rigidity, thereby making it possible to construct a more robust pick and place device. Each of the plurality of first cam grooves 41 formed in the plurality of first cam plates 40 has a fixed variable section groove (FCS) and a random variable section groove (FCS) communicating with each other as shown in FIG. 5. ACS).

The fixed variable section groove FCS is formed with a fixed pitch FX and one of the first cam grooves 41 adjacent to each other among the plurality of first cam grooves 41 along the fixed variable section FCS. That is, the fixed variable section groove FCS is formed with a fixed pitch FX between one of the plurality of first cam grooves 41 adjacent to each other, but with the other one of the plurality of adjacent first cam grooves 41. Between is formed so as to change from pitch FX1 to pitch FX2, or vice versa to change from pitch FX2 to pitch FX1. Here, the pitch FX2 is larger than the length of the pitch FX1.

The random variable section groove ACS is formed such that the pitch AX between the plurality of first cam grooves 41 is different along the random variable section ACS. For example, the randomly variable section groove ACS has a pitch AX between the plurality of first cam grooves 41 along the randomly variable section ACS. The pitch AX1 is changed from the pitch AX1 to the pitch AX2 and vice versa. It is formed to change from the pitch AX2 to the pitch AX1 so that the pitch AX between the plurality of first cam grooves 41 can be arbitrarily varied. Here, the pitch AX2 is smaller than the length of the pitch AX1.

As described above, the plurality of first cam grooves 41 are formed of the fixed variable section grooves FCS and the random variable section grooves ACS, so that the picker 10 is fixed in the fixed variable section grooves FCS as shown in FIG. 6A. It can be adjusted in pairs to attract or release electronic components such as larger board on chips (BOCs). In addition, the picker 10 in the random variable interval groove (ACS) is individually adjusted as shown in FIG. 6C, so that the electronic component such as a thin small outline package (TSOP) can be absorbed or released. That is, the plurality of first cam grooves 41 are formed of the fixed variable section grooves (FCS) and the random variable section grooves (ACS), so that the picker 10 can measure electronic components without a separate replacement kit (kitT). Regardless, it can be adsorbed or released.

The cam plate drive mechanism 60 includes a base member 61, a plurality of lifting LM guides 62, a plurality of lateral LM guides 63, a plurality of guide plates 65, a plurality of connecting plates 66, and a lifting mechanism. It consists of (67).

The base member 61 generally supports the pick and place device of the present invention, and is composed of a base connecting plate 61a and a plurality of base side plates 61b. The base connecting plate 61a is provided with a pneumatic device (not shown) required for the pick and place device of the present invention or a connection bracket (not shown) for installation in the test handler. The plurality of base side plates 61b are provided at both ends of the base connecting plate 61a, respectively, and are provided with a lifting LM guide 62 and a transverse LM guide 63, respectively.

The plurality of lifting LM guides 62 are respectively installed on the base member 61, and the plurality of lateral LM guides 63 are respectively installed on the base member 61, and the plurality of first variable part materials 20 are provided. Each is installed. The plurality of guide plates 65 are respectively installed on the lifting LM guide 62 so as to be lifted and lowered, and a plurality of first cam plates 40 are installed, and the plurality of connecting plates 66 are respectively mounted on the guide plates 65. Is installed.

The elevating mechanism 67 is connected to the plurality of connecting plates 66 to lift and lower the plurality of first cam plates 40 so that the plurality of first variable members 20 are along the plurality of lateral LM guides 63. The plurality of pickers 10 are moved to adjust the pitch AX and FX in the lateral direction X. FIG. The lifting mechanism 67 is composed of a plurality of belt rotating mechanism 67a, a shaft 67b and a rotational power source 67c.

The plurality of belt rotating mechanisms 67a are respectively installed on the base connecting plate 66 of the base member 61, and the shaft 67b is connected to the plurality of belt rotating mechanisms 67a. The rotary power source 67c is connected to one of the plurality of belt rotating mechanisms 67a, the belt 67d, and the pulley 67e to rotate the plurality of belt rotating mechanisms 67a. The plurality of belt rotating mechanisms 67a each include a roller mounting member 101, a plurality of pulleys 103, and a belt 104. The roller mounting member 101 is installed on the base connecting plate 66 of the base member 61, and the plurality of pulleys 103 are connected to the roller mounting member 101 by bearings 102 and connected to the shaft 66b. do. The belt 104 is connected to the plurality of pulleys 103 and connected to the coupling member 66a installed on the plurality of connecting plates 66.

Another embodiment of the pick-and-place device of the present invention having the above configuration will be described with reference to the accompanying drawings.

As shown in Figures 2 to 5 another embodiment of the pick and place device of the present invention a plurality of pickers 10, a plurality of first variable member 20, a plurality of second variable member 30, a plurality The first cam plate 40, the plurality of second cam plate 50 and the cam plate driving mechanism 60.

The plurality of pickers 10 are arranged in the longitudinal direction Y and the transverse direction X, respectively, and the rotation guide member 11 is provided in each. The plurality of first variable members 20 are installed so that the plurality of pickers 10 arranged in the longitudinal direction Y are moved in the longitudinal direction Y, respectively, and the plurality of second variable members 30 are in the transverse direction, respectively. A plurality of pickers 10 arranged in (X) are provided to move in the lateral direction (X). The plurality of first cam plates 40 are respectively installed at both ends of the plurality of first variable members 20, and each of the plurality of first cam grooves 41 is formed, and the plurality of second cam plates 50 is provided with a plurality of second cam plates. It is provided at both ends of the variable member 30, respectively, a plurality of second cam grooves 51 are formed. The cam plate driving mechanism 60 is connected to the plurality of first cam plates 40 and the plurality of second cam plates 50 such that the first variable member 20 and the second variable member 30 each have a first cam groove 41. The plurality of first cam plates 40 and the plurality of second cam plates 50 are moved up / down so that pitches AX and FX are adjusted according to the shape of the second cam groove 51 and the shape of the second cam groove 51. Here, the pitch (AX, FX) adjustment by the plurality of first cam plates 40 is called lateral pitch adjustment, and the pitch (AX) adjustment by the plurality of second cam plates 50 is called longitudinal pitch adjustment.

A pick and place device according to another embodiment of the present invention having the above configuration will be described in detail as follows.

The picker 10 of the pick and place device according to another embodiment of the present invention is provided with a rotation guide member 11, the rotation guide member 11 is a bearing is used.

Since the plurality of first variable members 20 and the plurality of first cam plates 40 are the same as the above-described embodiments of the present invention, detailed descriptions thereof will be omitted.

The plurality of second variable members 30 are each composed of a variable connecting frame 31, a plurality of connecting blocks 32, and a plurality of bearings 33. The variable connecting frame 31 is formed with a guide groove 31a to which the rotation guide member 11 installed in the plurality of pickers 10 arranged in the transverse direction X is inserted and rotated. The plurality of connection blocks 32 are respectively installed at both ends of the variable connection frame 31, and the plurality of bearings 33 are respectively installed at the connection blocks 32.

The plurality of second cam plates 50 are each formed with a plurality of second cam grooves 51, and the second cam grooves 51 are formed at the same height in the Z-axis direction as the first cam grooves 41, but arbitrary variable section grooves ( ACS only. Each of the plurality of second cam grooves 51 is formed to be inclined so that the second cam plate 50 does not penetrate, thereby increasing the rigidity of the second cam plate 50 so that the pick and place device of the present invention can be more firmly configured. do. In addition, the plurality of second cam grooves 51 may be formed such that the pitch AX between the plurality of second cam grooves 51 is different along the random variable section ACS. As described above, since the plurality of second cam grooves 51 do not have the fixed variable section grooves FCS, the plurality of pickers 10 are moved in the longitudinal direction Y in the pitch AX3 as shown in FIGS. 6C and 6D. ) Or vice versa, from pitch AX4 to pitch AX3.

The cam plate drive mechanism 60 includes a base member 61, a plurality of lifting LM guides 62, a plurality of lateral LM guides 63, a plurality of longitudinal LM guides 64, a plurality of guide plates 65, It consists of a plurality of connecting plates 66 and the elevating mechanism 67.

The base member 61 generally supports the pick-and-place device of the present invention, and the plurality of lifting LM guides 62 are respectively installed in the base member 61. The plurality of lateral LM guides 63 are installed on the base member 61, and a plurality of first variable members 20 are respectively installed. The plurality of longitudinal LM guides 64 are installed on the base member 61 and a plurality of second variable members 30 are respectively installed. The plurality of guide plates 65 are provided to be lifted / lowered respectively in the lifting LM guide 62, and a plurality of first cam plates 40 are installed in the lateral direction X. In addition, the plurality of guide plates 65 are provided with a plurality of second cam plates 50 in the longitudinal direction Y, and the plurality of connecting plates 66 are spaced apart from the second cam plate 50 on the guide plates 65. It is installed as possible.

The elevating mechanism 67 is connected to the plurality of connecting plates 66 to move up / down the plurality of first cam plates 40 and the plurality of second cam plates 50 so that the plurality of first variable members 20 and the plurality of first variable plates 20 are lifted. The second variable member 30 moves along the transverse LM guide 63 and the longitudinal LM guide 64, respectively, so that the plurality of pickers 10 moves in the longitudinal direction Y and the transverse direction X in the pitch AX. , FX).

The operation of the pick and place device of the present invention having the above configuration will be described below.

Pitch adjustment of the pick and place device of the present invention maintains a plurality of pickers 10 arranged in the longitudinal direction (Y) and the transverse direction (X), respectively, in the longitudinal direction (Y) and in the transverse direction (X). There are transverse pitch adjustments for adjusting the pitches AX and FX, and longitudinal and transverse pitch adjustments for adjusting the pitches AX and FX in the longitudinal direction Y and the transverse direction X.

The horizontal pitch adjustment is adjusted by the plurality of first cam plates 40. The plurality of first cam plates 40 are each formed with a plurality of cam grooves 41, and each of the plurality of cam grooves 41 is formed of a fixed variable section groove FCS and an arbitrary variable section groove ACS. The first cam groove 41 is fixed to the pitch FX with one of the plurality of first cam grooves 41 in the fixed variable section groove FCS, but the pitch is changed from the pitch FX1 to the pitch FX2 with the other one. Or vice versa from pitch FX2 to pitch FX1.

When the plurality of first cam plates 40 are moved up or down in the fixed variable section groove FCS, the plurality of pickers 10 are adjusted to form a pair of two adjacent ones as shown in FIG. Adsorption or release. For example, the plurality of pickers 10 whose pitch FX is adjusted by the fixed variable interval groove FCS may be paired with one of the pickers 10 adjacent to each other, such as a board on chip (BOC). The electronic components can be adsorbed or released.

The first cam groove 41 in the random variable section groove ACS is varied from the pitch AX1 to the pitch AX2 with the adjacent one of the plurality of first cam grooves 41 or vice versa. Is variable. That is, the pitch AX between the plurality of first cam grooves 41 in the random variable section groove ACS is arbitrarily varied from the pitch AX1 to the pitch AX2. When the plurality of first cam plates 40 are moved up and down in the random variable section groove ACS, the picker 10 adjusts the pitch AX as shown in FIG. 6C, and thus, a smaller electronic component, for example, TSOP (thin). up to a small outline package).

The longitudinal and lateral pitch adjustments allow the longitudinal pitch adjustments to be made by raising / lowering the plurality of second cam plates 50 simultaneously with the above-described horizontal pitch adjustment. In the longitudinal pitch adjustment, the plurality of second cam plates 50 formed on the plurality of second cam plates 50 are moved up / down by the cam plate driving mechanism 60 together with the plurality of first gamble plates 40. The cam groove 51 allows the plurality of pickers 10 to vary in pitch AX as shown in FIGS. 6B and 6D. That is, the plurality of pickers 10 arranged in the lateral direction X are varied from the pitch AX3 to the pitch AX4 or vice versa and the pitches AX3 are changed from the pitch AX4 to the pitch AX3 to pitch in the longitudinal direction Y. AX) can be adjusted. Here, the second cam groove 51 is formed at the same height as the first cam groove 41, but unlike the first cam groove 41 is made of only a random variable interval groove (ACS).

As described above, the plurality of pickers 10 arranged in the longitudinal direction Y and the transverse direction X may include a plurality of first cam plates 40 at both ends of the first variable member 20 and the second variable member 30, respectively. In addition, the pitches AX and FX are adjusted by the plurality of second cam plates 50, so that the pitches AX and FX can be adjusted more precisely. That is, even when the number of the pickers 10 arranged in the longitudinal direction Y in the first variable member 20 or the number of the pickers 10 arranged in the lateral direction X in the second variable member 30 increases. The plurality of first variable members 20 or the plurality of second variable members 30 are guided by the plurality of first cam plates 40 or the plurality of second cam plates 50, thereby transversing the plurality of pickers 10. The pitch (AX, FX) can be adjusted more precisely in (X) and in the longitudinal direction (Y).

The pick and place device of the present invention can be applied to the field of semiconductor equipment capable of picking and placing test handlers and electronic components.

1 is a schematic configuration diagram of a conventional pick and place device;

2 is a perspective view of a pick and place device of the present invention;

3 is an exploded perspective view of the pick and place device of FIG. 2;

4 is a cross-sectional plan view of the pick and place device shown in FIG.

5 is an enlarged rear view of the first cam plate shown in FIG. 2;

6A-6D illustrate an operating state of the pick and place device of the present invention.

Explanation of symbols on the main parts of the drawings

10: Picker 11: Rotation guide member

20: first variable member 22: variable LM guide

22: connecting block 23: bearing

30: second variable member 31: variable connecting frame

32: connecting block 33: bearing

40: First Camp 41: First Cam Home

50: 2nd Cam Fan 51: 2nd Cam Home

60: cam plate drive mechanism 61: base member

62: elevating LM guide 63: transverse LM guide

64: longitudinal LM guide 65: guide plate

66: connecting plate 67: lifting mechanism

Claims (15)

A plurality of pickers arranged in the longitudinal and transverse directions, respectively; A plurality of first variable members each installed to move the plurality of pickers arranged in the longitudinal direction; A plurality of first cam plates respectively installed at both ends of the plurality of first variable members and having a plurality of first cam grooves formed therein; Pick and place device which is connected to the plurality of first cam plate is configured to the cam plate driving mechanism for lifting up / down the plurality of first cam plate so that the pitch is adjusted along the shape of the first cam groove . The apparatus of claim 1, wherein the plurality of first variable members comprises: a variable linear motion guide installed to move a plurality of pickers arranged in a longitudinal direction; A plurality of connection blocks respectively provided at both ends of the variable LM guide; Pick and place device, characterized in that consisting of a plurality of bearings respectively installed in the connection block. The pick and place device of claim 1, wherein each of the plurality of first cam grooves formed in the plurality of first cam plates is formed to be inclined so as not to penetrate the first cam plate. The method of claim 1, wherein the plurality of first cam grooves formed in the plurality of first cam plate is formed of a fixed variable section groove, and a random variable section groove in communication with the fixed variable section groove, respectively, the fixed variable section groove A variable pitch is formed at a fixed pitch with one of the first cam grooves adjacent to each other among the plurality of first cam grooves along the variable section, and the random variable section grooves have different random pitches between the plurality of first cam grooves along the random variable section. Pick and place device, characterized in that formed so that. The cam plate driving mechanism includes: a base member; A plurality of lifting LM guides installed on the base member; A plurality of transverse LM guides installed on the base member and provided with a plurality of first variable members respectively; A plurality of guide plates installed on the elevating LM guides so as to be lifted / lowered respectively and installed with a plurality of first cam plates; A plurality of connecting plates installed on the guide plate; A lifting mechanism connected to the plurality of connecting plates to move the plurality of first cam plates up and down to move the plurality of first variable members along the plurality of lateral LM guides so that the plurality of pickers can be adjusted in the lateral direction. Pick and place device, characterized in that configured. The method of claim 5, wherein the base member is a base connecting plate; Pick and place device, characterized in that composed of a plurality of base side plates are respectively installed on both ends of the base connecting plate and the lifting LM guide and the transverse LM guide, respectively. 6. The apparatus of claim 5, wherein the elevating mechanism includes: a plurality of belt rotating mechanisms respectively installed on the base connecting plate of the base member; A shaft connected to the plurality of belt rotating mechanisms; Is composed of a rotating power source connected to one of the plurality of belt rotating mechanism to rotate the plurality of belt rotating mechanism, Each of the plurality of belt rotating mechanisms includes a roller mounting member installed on a base connecting plate of the base member, a plurality of pulleys connected to the roller mounting member by bearings and connected to the shaft, and connected to the plurality of pulleys. Pick and place device, characterized in that consisting of a belt connected to the coupling member installed on the plate. A plurality of pickers arranged in the longitudinal direction and the transverse direction, each of which includes a rotation guide member; A plurality of first variable members each installed to move the plurality of pickers arranged in the longitudinal direction in the longitudinal direction; A plurality of second variable members each installed to move the plurality of pickers arranged in the transverse direction in the transverse direction; A plurality of first cam plates respectively installed at both ends of the plurality of first variable members and having a plurality of first cam grooves formed therein; A plurality of second cam plates respectively installed at both ends of the plurality of second variable members and having a plurality of second cam grooves formed therein; The first variable member and the second variable member are connected to the plurality of first cam plates and the plurality of second cam plates so that the pitch is adjusted along the shape of the first cam groove and the shape of the second cam groove, respectively. Pick and place device comprising a cam plate driving mechanism for moving the first cam plate and the plurality of second cam plate up and down. 9. The apparatus of claim 8, wherein the plurality of first variable members comprises: a variable LM guide installed to move a plurality of pickers arranged in a longitudinal direction; A plurality of connection blocks respectively provided at both ends of the variable LM guide; Pick and place device, characterized in that consisting of the bearings respectively installed in the connection block. The pick and place device of claim 8, wherein the rotation guide member is a bearing. 9. The apparatus of claim 8, wherein the plurality of second variable members include: a variable connecting frame having guide grooves formed by rotating rotation members inserted into a plurality of pickers arranged in the transverse direction; A plurality of connection blocks respectively provided at both ends of the variable connection frame; Pick and place device, characterized in that consisting of a plurality of bearings respectively installed in the connection block. The method of claim 8, wherein the plurality of first cam grooves formed in the plurality of first cam plates and the plurality of second cam grooves formed in the plurality of second cam plates are respectively inclined so as not to penetrate the first cam plate and the second cam plate. Pick and place device. The method of claim 8, wherein the plurality of first cam grooves formed in the plurality of first cam plate is formed of a fixed variable section groove, and a random variable section groove in communication with the fixed variable section groove, respectively, the fixed variable section groove A variable pitch is formed at a fixed pitch with one of the first cam grooves adjacent to each other among the plurality of first cam grooves along the variable section. Pick and place device, characterized in that formed so that. The pick and place device of claim 8, wherein each of the plurality of second cam grooves formed in the plurality of second cam plates is formed to have a different pitch between the plurality of second cam grooves along an arbitrary variable section. 9. The cam plate driving mechanism as claimed in claim 8, further comprising: a base member; A plurality of lifting LM guides installed on the base member; A plurality of transverse LM guides installed on the base member and provided with a plurality of first variable members respectively; A plurality of longitudinal LM guides installed on the base member and provided with a plurality of second variable members respectively; A plurality of guide plates installed on the lifting LM guides, respectively, for lifting / lowering, with a plurality of first cam plates installed in a transverse direction and a plurality of second cam plates installed in a longitudinal direction; A plurality of connecting plates installed on the guide plate to be spaced apart from the second cam plate; A plurality of first variable members and a plurality of second variable members are connected to the plurality of connecting plates to raise and lower the plurality of first cam plates and the plurality of second cam plates, respectively. Pick and place device which comprises a lifting mechanism for moving the pitch so that the plurality of pickers are adjusted in the longitudinal and transverse direction.

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