KR20100100429A - X-ray detector - Google Patents

Abstract

PURPOSE: An x-ray detector is provided to increase the mobility by reducing the weight of an x-ray detector by forming an x-ray blocking sheet with the golden sheet which absorbs and blocks the x-ray. CONSTITUTION: An optical detection substrate(100) changes the light into the electricity to detect. An optical wavelength conversion member(200) changes the X-ray applied from outside into the light of the wave length absorbed in the light detection substrate. A bottom-supporting plate(300) supports the light detection substrate.

Description

X-ray detector {X-RAY DETECTOR}

The present invention relates to an x-ray detecting apparatus, and more particularly, to an x-ray detecting apparatus capable of detecting the x-rays to photograph the inside of the object.

In general, X-rays have a short wavelength and can easily penetrate an object. The amount of X-rays transmitted is determined by the degree of compactness inside the object. That is, the internal state of the object may be indirectly observed through the transmission amount of the X-ray that has passed through the object.

The X-ray detection apparatus is a device for detecting the amount of transmission of the X-rays transmitted through the object. The X-ray detecting apparatus may detect the transmission amount of the X-ray and display the internal state of the object to the outside through a display device. The X-ray detection apparatus may generally be used as a medical inspection apparatus, a non-destructive inspection apparatus, and the like.

The X-ray detecting apparatus generally includes an optical wavelength converting member for converting X-rays applied from the outside into visible light, a photodetecting substrate for converting the visible light into electricity, and electrically connected to the photodetecting substrate to apply a detection signal. The receiving drive circuit board is included. In this case, when the driving circuit board is disposed below the photodetecting substrate, the X-rays transmitted through the photodetecting substrate without being converted into the visible light by the wavelength converting member are applied to the driving circuit board to provide the driving circuit board. Can be damaged.

Accordingly, the X-ray detecting apparatus further includes a lead (Pb) blocking plate interposed between the photodetecting substrate and the driving circuit board to block the progress of the X-ray. However, since the lead blocking plate has a heavy weight, it is possible to increase the overall weight of the x-ray detection apparatus.

As such, when the weight of the X-ray detecting apparatus is increased due to the lead blocking plate or the like, the X-ray detecting apparatus is difficult to use as a portable X-ray detecting apparatus.

Therefore, the present invention is to solve this problem, the problem to be solved by the present invention is to provide an X-ray detection apparatus that can reduce the weight.

The X-ray detecting apparatus according to an embodiment of the present invention includes a light detecting substrate, an optical wavelength converting member, a lower support plate, a main support plate, an X-ray blocking sheet, and a driving circuit board.

The photodetector substrate detects light by converting it into electricity. The optical wavelength converting member is disposed on the photodetecting substrate to convert X-rays applied from the outside into light having a wavelength absorbed by the photodetecting substrate. The lower support plate is disposed below the photodetection substrate to support the photodetection substrate. The main support plate is disposed below the lower support plate to support the lower support plate. The X-ray blocking sheet is disposed between the lower support plate and the main support plate and supported by the main support plate, and includes gold (Au) to absorb the X-rays transmitted without being converted into the light by the optical wavelength conversion member. do. The driving circuit board is disposed under the main support plate and is electrically connected to the photodetecting substrate to receive a detection signal.

The main support plate may include side plates supporting both ends of the base plate and the lower support plate. The base plate supports the X-ray blocking sheet, and the side plates are connected to both ends of the base plate to have an H-shape to form upper and lower receiving spaces. In this case, the X-ray blocking sheet may be disposed in the upper accommodating space, and the driving circuit board may be disposed in the lower accommodating space.

The X-ray detecting apparatus may further include a light generating sheet disposed on the X-ray blocking sheet to provide light to the photodetecting substrate.

The X-ray detection apparatus may further include support protrusions protruding from the upper end of the side plates into the upper receiving space, respectively, in order to increase the support area of the lower support plate.

The X-ray detection apparatus may further include a driving circuit protection unit disposed to surround the driving circuit board in the lower accommodating space, and absorbing and blocking the X-rays passing through the main support plate. In this case, the driving circuit protection unit may be disposed on the lower surface of the base plate facing the driving circuit board and the inner surface of the side plates. The driving circuit protection unit may be a gold sheet or a gold thin film capable of absorbing and blocking the X-rays.

The X-ray detecting apparatus may further include an outer case to receive and protect the light detecting substrate, the light wavelength converting member, the lower support plate, the main support plate, the X-ray blocking sheet, and the driving circuit board.

The outer case may include a storage container portion and a top cover portion. The storage container part includes a container bottom plate and container sidewalls formed at an edge of the container bottom plate, and includes the light detecting substrate, the light wavelength conversion member, the lower support plate, the main support plate, the X-ray blocking sheet, and the driving circuit board. To house. The top cover part may be connected to an upper end of the side walls of the container to cover the opening of the storage container part, and the X-ray applied from the outside may be transmitted. Here, the lower ends of the side plates may be connected to and fixed to the container bottom plate.

The X-ray detection apparatus may further include an auxiliary connection substrate disposed on an inner side of one sidewall of the container sidewalls of the storage container and electrically connected to the driving circuit board. In this case, a connection socket may be disposed on a lower surface of the auxiliary connection substrate facing the inner side surface of the one side wall, and a connection receiving hole may be formed in the one side wall to expose the connection socket to the outside. The connection cable may be accommodated in the connection receiving hole and connected to the connection socket. The auxiliary connection board may include a driving power generation board for providing driving power to the driving circuit board.

An X-ray detecting apparatus according to another embodiment of the present invention includes a light detecting substrate, an optical wavelength converting member, a lower support plate, a main support plate, a light generating sheet, a driving circuit board, and a driving circuit protection unit.

The photodetecting substrate converts and converts light into electricity, and the light wavelength converting member is disposed above the photodetecting substrate to convert X-rays applied from the outside into light having a wavelength absorbed by the photodetecting substrate. The lower support plate is disposed under the photodetection substrate to support the photodetection substrate, and the main support plate is disposed under the lower support plate to support the lower support plate. The light generating sheet is disposed above the main support plate to provide light to the photodetecting substrate, and the driving circuit board is disposed below the main support plate and electrically connected to the photodetecting substrate to detect a detection signal. Is applied, and is electrically connected to the light generating sheet to control the driving. The driving circuit protection unit is disposed to surround the driving circuit board under the main support plate, and is made of gold (Au) to absorb and block the X-ray passing through the main support plate.

The main support plate may include a base plate for supporting the light generating sheet, side plates connected to both ends of the base plate to have an H-shape to form upper and lower storage spaces, and supporting both ends of the lower support plate. It may include. In this case, the light generating sheet may be disposed in the upper accommodating space, and the driving circuit board may be disposed in the lower accommodating space. The driving circuit protection unit may be disposed on a lower surface of the base plate facing the driving circuit board and an inner surface of the side plates.

The X-ray detecting apparatus may further include an outer case to receive and protect the light detecting substrate, the light wavelength converting member, the lower support plate, the main support plate, the light generating sheet, the driving circuit board, and the driving circuit protection unit. have.

As described above, according to the X-ray detecting apparatus, an X-ray blocking sheet capable of absorbing and blocking X-rays may be made of a gold sheet to reduce the weight of the X-ray detecting apparatus, thereby increasing mobility.

As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text.

However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "having" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described in the specification, and that one or more other features It should be understood that it does not exclude in advance the possibility of the presence or addition of numbers, steps, actions, components, parts or combinations thereof.

In the drawings, the thickness of each device or film (layer) and regions has been exaggerated for clarity of the invention, and each device may have a variety of additional devices not described herein. When (layer) is mentioned as being located on another film (layer) or substrate, an additional film (layer) may be formed directly on or between the other film (layer) or substrate.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings.

≪ Example 1 >

1 is a cross-sectional view illustrating an X-ray detecting apparatus according to a first exemplary embodiment of the present invention, FIG. 2 is an enlarged plan view of a part of the photodetecting substrate of the X-ray detecting apparatus of FIG. 1, and FIG. It is sectional drawing cut along the line II '.

Referring to FIG. 1, the X-ray detecting apparatus according to the present embodiment includes a light detecting substrate 100, an optical wavelength converting member 200, a lower support plate 300, a main support plate 400, an X-ray blocking sheet 500, and a light. The generation sheet 600, the driving circuit board 700, and the outer case 800 are included.

The photodetecting substrate 100 may detect the light by absorbing light applied from the outside, for example, visible light and converting the light into electricity. For example, the photodetecting substrate 100 may include a plurality of unit pixels arranged in a matrix or line form to detect different amounts of light according to positions. On the other hand, the photodetecting substrate 100 may have a thickness of about 1.2t (mm).

The optical wavelength converting member 200 is disposed on the photodetecting substrate 100, and converts an X-ray applied from the outside into light having a wavelength detectable by the photodetecting substrate 100. do. That is, the light wavelength converting member 200 may change the X-rays into visible light, for example, green light, and provide the light to the light detecting substrate 100. In this case, the wavelength conversion member 200 may have a thickness of about 0.7t ~ 0.8t.

The light wavelength converting member 200 may include a bottom portion 210, a light wavelength converting portion 220, and a passivation layer 230. The bottom portion 210 may be a metal plate, for example, an aluminum plate, on which crystals may be grown, and may have a thickness of about 0,2t. The optical wavelength converter 220 is composed of scintillator crystals for converting the X-rays into the visible light, and the scintillator crystals are formed by growing downward from the bottom portion 210. For example, the light wavelength converter 220 may be formed of pillar-forming crystals of CsI doped with thallium (Tl), sodium (Na), or the like, and may have a thickness of about 0.5t. The passivation layer 230 may be formed on the bottom portion 210 to cover the light wavelength converter 220 to protect the light wavelength converter 220. For example, the passivation layer 230 may be made of polyparque or polyparacyrylylene.

The light wavelength converting member 200 may be attached to an upper surface of the light detecting substrate 100 through an adhesive layer 250 formed on a lower surface thereof. In this case, the adhesive layer 250 may have a thickness of about 0.2t. In addition, the light wavelength conversion member 200 and the photodetecting substrate 100 may be sealed by at least one seal line 270. For example, two seal lines 270 may be formed at an edge between the wavelength conversion member 200 and the photodetecting substrate 100.

The lower support plate 300 is disposed under the photodetecting substrate 100 to support the photodetecting substrate 100. The lower support plate 300 is preferably made of a transparent material, for example, glass. Alternatively, the lower support plate 300 may be made of a synthetic resin such as acrylate. Here, a support plate adhesive film 310 may be disposed on an upper surface of the lower support plate 300, and as a result, the light detecting substrate 100 may be an upper surface of the lower support plate 300 by the support plate adhesive film 310. It can be attached to. On the other hand, the lower support plate 300 may have a thickness of about 3.2t, the support plate adhesive film 310 may have a thickness of about 0.8t.

The main support plate 400 is disposed below the lower support plate 300 to support the lower support plate 300. The main support plate 400 may include a base plate 410 and side plates 420. The base plate 410 may be disposed below the lower support plate 300 in parallel with the lower support plate 300, and may have a thickness of about 6.0t, for example. The side plates 420 are respectively connected to both ends of the base plate 410 to have an H-shape to form upper and lower receiving spaces. In this case, upper ends of the side plates 420 may be in contact with both ends of the lower support plate 300, and a separate adhesive layer may be provided between the upper ends of the side plates 420 and both ends of the lower support plate 300. (Not shown) may be formed.

The X-ray blocking sheet 500 is disposed in the upper storage space of the main support plate 400 and is supported by the base plate 410. The X-ray blocking sheet 500 may block the X-rays transmitted from the outside without being converted into visible light by the light wavelength converting member 200 to the driving circuit board 700 which will be described later. . The X-ray blocking sheet 500 according to the present embodiment includes gold (Au) to absorb and block the X-rays. That is, the X-ray blocking sheet 500 is preferably a gold sheet having a lower weight than the conventional lead blocking plate, for example, may have a thickness of about 1.5t or less. On the other hand, the X-ray blocking sheet 500 may be attached to the upper surface of the base plate 410 by the blocking sheet adhesive film 510 disposed on the lower surface. In this case, the blocking sheet adhesive film 510 may have a thickness of about 1.0t.

The light generating sheet 600 is disposed on the X-ray blocking sheet 500, and is preferably spaced downward from the lower support plate 300. The light generating sheet 600 may generate light having the same brightness toward the entire upper surface, and the light generated from the light generating sheet 600 passes through the lower support plate 300 and the support plate adhesive film 310. It is applied to the photodetecting substrate 100, thereby saturating all the unit pixels of the photodetecting substrate 100 in the same state. The light generating sheet 600 may have a thickness of about 0.2t to 0.3t.

The driving circuit board 700 is disposed in a lower accommodation space of the main support plate 400. In this case, the driving circuit board 700 may be fixed to the base plate 410 by being spaced apart from the lower surface of the base plate 410 by a plurality of driving substrate supporters 710. In this case, the driving circuit board 700 may have a thickness of about 2.0t to 3.0t.

The driving circuit board 700 is electrically connected to the photodetecting substrate 100 and the light generating sheet 600, respectively, to control the driving of the photodetecting substrate 100 and the light generating sheet 600. Can be. In addition, the driving circuit board 700 may receive the detection signal detected by the photodetector substrate 100, analyze the detection signal, and store the amount of light detected by the unit pixels as data.

The outer case 800 includes all the components listed above, that is, the light detecting substrate 100, the light wavelength converting member 200, the lower support plate 300, the main support plate 400, and the X-ray blocking sheet. 500, the light generating sheet 600, the driving circuit board 700, and the like are stored and protected. The outer case 800 may include, for example, a storage container part 810 and a top cover part 820.

The container 810 includes a container bottom plate and container sidewalls formed at an edge of the container bottom plate to form a storage space. All of the above components are accommodated in the storage space. Here, the lower ends of the side plates 420 may be attached and connected to the container bottom plate by an adhesive or the like, and thus the main support plate 400 may be fixed to the storage container part 810.

The top cover part 820 may be connected to an upper end of the side walls of the container to cover the opening of the storage container part 810 to seal the storage space. In this case, the X-rays applied from the outside may be applied to the light wavelength changing member 200 by passing through the top cover part 820, and may be, for example, a carbon plate. On the other hand, the container 810 may have a thickness of about 1.2t ~ 1.5t, the top cover portion 820 may have a thickness of about 1.5t or more.

Hereinafter, the photodetecting substrate 100 will be described in detail.

2 and 3, the photodetecting substrate 100 may include a base substrate SB, gate lines 110, a gate insulating layer 120, data lines 130, thin film transistors TFT, PIN diodes (DI), the device passivation layer 150, the bias lines 160, the light blocking portions 170, and the outer passivation layer 180 may be included.

The base substrate SB has a plate shape and may be made of a transparent material, for example, glass, quartz, synthetic resin, or the like. The gate lines 110 are formed to extend in a first direction on the base substrate 100, and the gate insulating layer 120 covers the gate lines 110. Is formed on the phase. The data lines 130 are formed to extend in the second direction crossing the first direction on the gate insulating layer 120. At this time, the second direction is preferably a direction orthogonal to the first direction.

The thin film transistors TFT are formed adjacent to a point where the gate lines 110 and the data lines 130 cross each other. Each of the thin film transistors TFT includes a gate electrode G, an active pattern A, an ohmic contact pattern O, a source electrode S, and a drain electrode D. FIG. The gate electrode G is branched from the gate wiring 110, and the active pattern A is formed on the gate insulating layer 120 to overlap the gate electrode G. The source electrode D is branched from the data line 130 to overlap the active pattern A, and the drain electrode D is spaced apart from the source electrode D. Overlapping with the gate insulating layer 120. The ohmic contact pattern O is formed between the source electrode S and the active pattern A, and between the drain electrode D and the active pattern A, respectively, and has a contact resistance between the electrode and the pattern. Decreases.

The PIN diodes DI are formed on the gate insulating layer 120 to be electrically connected to the thin film transistors TFT, respectively. In this case, each of the PIN diodes DI may include a lower electrode part LP, a light conversion semiconductor part 140, and an upper electrode part HP.

The lower electrode part LP is formed on the gate insulating layer 120 and is electrically connected to the drain electrode D. FIG. For example, the lower electrode part LP may be formed by the same process as the drain electrode D and may be directly connected to the drain electrode D. FIG. Alternatively, the lower electrode part LP may be formed by a process different from that of the drain electrode D, and may be disposed above or below the drain electrode D. FIG. In this case, the lower electrode part LP may be made of a transparent conductive material having a lower electrical resistance than the drain electrode D and having a low thermal expansion stress, for example, an indium tin oxide (ITO) material.

The light conversion semiconductor unit 140 is formed on the lower electrode part LP to absorb light emitted from the light wavelength conversion member 200 and convert the light into electricity. The photoconversion semiconductor unit 140 includes an N-type semiconductor layer 142 formed on the lower electrode part LP, an intrinsic semiconductor layer 144 formed on the N-type semiconductor layer 142, and the intrinsic semiconductor layer. P-type semiconductor layer 146 formed on 144. In this case, in order to increase light absorption efficiency, the intrinsic semiconductor layer 144 may be formed relatively thicker than the N-type and P-type semiconductor layers 142 and 146.

The upper electrode portion HP is formed on the photoconversion semiconductor portion 140. The upper electrode part HP may be made of a transparent conductive material, for example, indium tin oxide (ITO), indium zinc oxide (IZO), or the like, to transmit light emitted from the light wavelength conversion member 200.

The device protection layer 150 is formed on the gate insulating layer 120 to cover the data lines 130, the thin film transistors TFT, and the PIN diodes DI. Bias contact holes 152 are formed in the device passivation layer 150 to expose portions of the PIN diodes DI, that is, a part of the upper electrode portions HP. The device protection film 150 may be an inorganic insulating film or an organic insulating film, but is preferably an inorganic insulating film made of silicon oxide (SiOx) or silicon nitride (SiNx).

The bias wires 160 are formed on the device protection layer 150 to be in electrical contact with the upper electrode portions HP through the bias contact holes 152, respectively. The bias wires 160 may receive a reverse bias or a forward bias from an external bias driver (not shown), and provide the bias wires 160 to the upper electrode portions HP, respectively.

The bias wires 160 may be formed to extend in the first direction or the second direction on the device protection layer 150. In this case, the bias wires 160 may be formed along the second direction to be substantially parallel to the data wires 130. Meanwhile, each of the bias lines 160 may be formed to be adjacent to or overlap with the data line 130 in order to minimize a region overlapping with the PIN diode DI to increase a fill factor.

Each of the bias wires 160 may include a double layer structure, for example, a transparent wire part 162 and a metal wire part 164. The transparent wiring part 162 is formed on the device protection layer 150 to be in electrical contact with the upper electrode part HP through the bias contact hole 152. In this case, the transparent wiring part 162 is made of substantially the same material as the upper electrode part HP, that is, a transparent conductive material. The metal wire part 164 is formed on the transparent wire part 162 and electrically connected to the bias driver. In the present exemplary embodiment, the transparent wiring portion 162 may be formed to have a larger area than the metal wiring portion 164, and may be omitted in some cases.

The light blocking parts 170 are formed on the thin film transistors TFT to cover the thin film transistors TFT, and as a result, light emitted from the wavelength conversion member 200 is transferred to the thin film transistors. It can block the application into (TFT).

The light blocking parts 170 may be formed at the same time when the bias lines 160 are formed, and thus may be formed on the device protection layer 150 to cover the thin film transistors TFT. In this case, the light blocking units 170 may also be formed in a double layer structure in the same manner as the bias line 160. Alternatively, the light blocking units 170 may be formed in a single layer structure in which the lower layer corresponding to the transparent wiring unit 162 is removed. It may be. The light blocking parts 170 may be connected to and integral with the bias wires 160 as shown in FIG. 2, but may be formed to be spaced apart from the bias wires 160.

The outer passivation layer 180 is formed on the device passivation layer 150 to cover the bias wires 160 and the light blocking portions 170. The outer passivation layer 180 may be an organic insulating layer or an inorganic insulating layer, but it is preferable that the outer protective layer 180 is an organic insulating layer capable of flattening an upper surface while protecting internal components.

As described above, according to the present embodiment, as the X-ray blocking sheet is formed of a gold sheet capable of absorbing and blocking the X-rays, the weight of the X-ray detecting apparatus can be reduced as compared with the conventional one, and thus the mobility of the X-ray detecting apparatus can be reduced. Can be increased.

Specifically, lead (Pb) is generally a lower density material than gold (Au), so the X-ray blocking efficiency is lower than gold. In addition, since lead is relatively soft and heat-resistant, it is generally difficult to manufacture thin films or sheets such as gold. Therefore, the lead shielding plate used in the related art has to be manufactured relatively thicker than the gold sheet, resulting in a problem of increasing the overall weight of the X-ray detection apparatus. However, as in the present embodiment, as the X-ray blocking sheet is made of a gold material capable of absorbing and blocking X-rays, the X-ray blocking sheet may be manufactured in a thin film or sheet shape, thereby reducing the weight of the X-ray detecting apparatus as compared with the conventional art. have.

<Example 2>

4 is a cross-sectional view illustrating an X-ray detecting apparatus according to a second exemplary embodiment of the present invention.

The X-ray detecting apparatus according to the present exemplary embodiment is substantially the same as the X-ray detecting apparatus of the first exemplary embodiment described with reference to FIGS. 1 to 3 except that the X-ray detecting apparatus further includes a driving circuit protecting unit 550. Detailed description of components other than 550 will be omitted, and the same reference numerals will be given to the same components as those in the first embodiment.

Referring to FIG. 4, the X-ray detection apparatus according to the present exemplary embodiment is disposed to surround the driving circuit board 700 in the lower storage space of the main support plate 400, thereby transmitting the X-rays passing through the main support plate 400. It further includes a driving circuit protection unit 550 for absorbing and blocking.

The driving circuit protection unit 550 is a sheet disposed on a lower surface of the base plate 410 facing the driving circuit board 700 and an inner surface of the side plates 420, or of the base plate 410. It may be a thin film formed on the lower surface and the inner surface of the side plates 420. For example, the driving circuit protection unit 550 may be an Au sheet disposed on a lower surface of the base plate 410 and an inner surface of the side plates 420 to absorb and block the X-rays. The thin film may be formed of an Au thin film formed on a lower surface of the base plate 410 and an inner surface of the side plates 420.

5 is a cross-sectional view illustrating a state in which an x-ray blocking sheet is removed of the x-ray detecting apparatus of FIG. 4.

Meanwhile, referring to FIGS. 4 and 5, the X-ray blocking sheet 500 illustrated in FIG. 4 may be omitted due to the provision of the driving circuit protection unit 550. That is, the driving circuit protection unit 550 may protect the driving circuit board 700 by blocking the X-rays in place of the X-ray blocking sheet 500.

As described above, the driving circuit protection unit 550 is disposed to surround the driving circuit board 700 in the lower accommodating space to absorb the X-rays passing through the main support plate 400. As a result of blocking, the driving circuit board 700 may be protected from the X-rays.

In addition, the X-ray blocking sheet 500 is omitted, and the driving circuit protection unit 550 is a thin film of Au formed on the lower surface of the base plate 410 and the inner surface of the side plates 420. In this case, the weight of the x-ray detection apparatus can be further reduced.

<Example 3>

6 is a cross-sectional view illustrating an X-ray detecting apparatus according to a third exemplary embodiment of the present invention.

The X-ray detecting apparatus according to the present exemplary embodiment is substantially the same as the X-ray detecting apparatus of the first exemplary embodiment described with reference to FIGS. 1 to 3 except that the X-ray detecting apparatus further includes an auxiliary connecting substrate 900, and thus, the auxiliary connecting substrate 900 is not limited thereto. Detailed description of the components other than) will be omitted, and the same reference numerals will be given to the same components as those in the first embodiment.

Referring to FIG. 6, the X-ray detection apparatus according to the present exemplary embodiment further includes an auxiliary connection board 900 disposed in the outer case 800 and electrically connected to the driving circuit board 700.

The auxiliary connecting substrate 900 may be disposed on an inner side surface of any one of the side walls of the container of the storage container portion 810 of the outer case 800. In this case, the auxiliary connecting substrate 900 may be fixed to the inner side surface of the one side wall by a plurality of connecting substrate supporters 910.

A connection socket 920 is disposed on a lower surface of the auxiliary connecting substrate 900 facing the one side wall, and a connection receiving hole 812 is formed in the side wall to expose the connection socket 920 to the outside. . An external connection cable 930 may be connected to the connection socket 920 through the connection receiving hole 930 to be electrically connected to the auxiliary connection substrate 900. In this case, the connection cable 930 is accommodated in the connection receiving hole 930 and disposed in the outer case 800, so that the connection cable 930 may not protrude to the outside of the outer case 800.

On the other hand, the auxiliary connecting substrate 900 is a driving power generator substrate that can provide driving power to the driving circuit board 700 or connects between the driving circuit board 700 and an external main system (not shown). The interface board may be an interface board or an integrated circuit board in which the driving power generator board and the interface board are integrated.

As such, according to the present embodiment, as the connection cable 930 is accommodated in the connection receiving hole 930 and disposed in the outer case 800, the connection cable 930 may not protrude to the outside of the outer case 800. As a result, the instrument design of the X-ray detection apparatus may be easier and mobility may be further improved with respect to other peripheral devices.

<Example 4>

7 is a cross-sectional view illustrating an X-ray detecting apparatus according to a fourth exemplary embodiment of the present invention.

The X-ray detection apparatus according to the present embodiment is substantially the same as the X-ray detection apparatus of the first embodiment described with reference to FIGS. 1 through 3 except that the X-ray detection apparatus further includes support protrusions 422, and thus the support protrusions 422. Detailed description of the components other than) will be omitted, and the same reference numerals will be given to the same components as those in the first embodiment.

Referring to FIG. 7, the main support plate 400 of the X-ray detection apparatus according to the present embodiment further includes support protrusions 422 protruding from upper ends of the side plates 420, respectively.

The support protrusions 422 protrude in parallel with the lower support plate 300 into the upper accommodating space of the main plate 400 at the upper ends of the side plates 420. That is, the support protrusions 422 are interposed between the lower support plate 300 and the light generating sheet 600 while supporting the lower support plate 300, and thus the lower support plate 300 as compared to FIG. 1. ) Can increase the support area.

As described above, according to the present exemplary embodiment, the support protrusions 422 are formed at the upper ends of the side plates 420, respectively, to increase the support area of the lower support plate 300. It can be suppressed to some extent to bend at this center part. As a result, the thickness of the lower support plate 300 may be reduced compared to FIG. 1 to further reduce the overall weight of the X-ray detection apparatus.

In the detailed description of the present invention described above with reference to the preferred embodiments of the present invention, those skilled in the art or those skilled in the art having ordinary skill in the art will be described in the claims to be described later It will be understood that various modifications and variations can be made in the present invention without departing from the scope of the present invention.

1 is a cross-sectional view illustrating an X-ray detection apparatus according to a first embodiment of the present invention.

FIG. 2 is an enlarged plan view of a part of the photodetecting substrate in the X-ray detecting apparatus of FIG. 1.

3 is a cross-sectional view taken along line II ′ of FIG. 2.

4 is a cross-sectional view illustrating an X-ray detecting apparatus according to a second exemplary embodiment of the present invention.

5 is a cross-sectional view illustrating a state in which an x-ray blocking sheet is removed of the x-ray detecting apparatus of FIG. 4.

6 is a cross-sectional view illustrating an X-ray detecting apparatus according to a third exemplary embodiment of the present invention.

7 is a cross-sectional view illustrating an X-ray detecting apparatus according to a fourth exemplary embodiment of the present invention.

<Short Description of Main Drawing Numbers>

100: light detection substrate 200: light wavelength conversion member

300: lower support plate 310: support plate adhesive film

400: main support plate 500: X-ray blocking sheet

510: blocking sheet adhesive film 600: light generating sheet

700: driving circuit board 710: driving board supporter

800: outer case 812: connection storage hole

900: auxiliary connecting board 910: connecting board supporter

920: connection socket 930: connection cable

Claims (19)

A photodetecting substrate converting light into electricity and detecting the light; An optical wavelength converting member disposed on the photodetecting substrate and converting an X-ray applied from the outside into light having a wavelength absorbed by the photodetecting substrate; A lower support plate disposed under the photodetection substrate to support the photodetection substrate; A main support plate disposed below the lower support plate to support the lower support plate; An X-ray blocking sheet disposed between the lower support plate and the main support plate and supported by the main support plate, the x-ray blocking sheet including gold (Au) to absorb X-rays transmitted from the optical wavelength conversion member without being converted into the light; And And a driving circuit board disposed under the main support plate and electrically connected to the photodetecting substrate to receive a detection signal. The method of claim 1, wherein the main support plate A base plate supporting the x-ray blocking sheet; And And side plates connected to both ends of the base plate to have an H-shape to form upper and lower receiving spaces, and supporting both ends of the lower support plate. The method of claim 2, wherein the x-ray blocking sheet is disposed in the upper receiving space, And the driving circuit board is disposed in the lower receiving space. The x-ray detecting apparatus of claim 3, further comprising a light generating sheet disposed on the X-ray blocking sheet to provide light to the photodetecting substrate. The method of claim 4, wherein the main support plate And a plurality of support protrusions projecting from the upper ends of the side plates into the upper receiving space, respectively, to increase the support area of the lower support plate. 4. The x-ray detection apparatus of claim 3, further comprising a driving circuit protection unit disposed to surround the driving circuit board in the lower accommodating space to absorb and block the X-rays passing through the main support plate. The method of claim 6, wherein the driving circuit protection unit And a lower surface of the base plate facing the driving circuit board and an inner surface of the side plates. The method of claim 7, wherein the driving circuit protection unit X-ray detection apparatus, characterized in that the gold sheet or gold thin film that can absorb and block the X-rays. 4. The X-ray of claim 3, further comprising an outer case accommodating and protecting the light detecting substrate, the light wavelength conversion member, the lower support plate, the main support plate, the X-ray blocking sheet, and the driving circuit board. Detection device. The method of claim 9, wherein the outer case A container for accommodating the light detecting substrate, the light wavelength conversion member, the lower support plate, the main support plate, the X-ray blocking sheet, and the driving circuit board, including a container bottom plate and container sidewalls formed at an edge of the container bottom plate. Container section; And And a top cover part connected to an upper end of the side walls of the container to cover an opening of the storage container part, and through which the X-ray applied from the outside is transmitted. The method of claim 10, wherein the lower end of the side plates are X-ray detection apparatus characterized in that the fixed to the container bottom plate connected. The x-ray detection apparatus of claim 10, further comprising an auxiliary connecting substrate disposed on an inner side of one of the sidewalls of the container portion and electrically connected to the driving circuit board. The method of claim 12, wherein the connecting socket is disposed on the lower surface of the auxiliary connecting substrate facing the inner surface of the one side wall, The side wall is formed with a connection receiving hole for exposing the connection socket to the outside, An external connection cable is received in the connection receiving hole and the x-ray detection device, characterized in that connected to the connection socket. The method of claim 12, wherein the auxiliary connecting substrate And a driving power generator substrate for supplying driving power to the driving circuit board. A photodetecting substrate converting light into electricity and detecting the light; An optical wavelength conversion member disposed on the photodetecting substrate and converting X-rays applied from the outside into light having a wavelength absorbed by the photodetecting substrate; A lower support plate disposed under the photodetection substrate to support the photodetection substrate; A main support plate disposed below the lower support plate to support the lower support plate; A light generating sheet disposed on the main support plate to provide light to the photodetecting substrate; A driving circuit board disposed under the main support plate, electrically connected to the photodetecting substrate to receive a detection signal, and electrically connected to the light generating sheet to control driving; And And a driving circuit protection unit formed under the main support plate to surround the driving circuit board, and formed of gold (Au) to absorb and block the X-rays passing through the main support plate. The method of claim 15, wherein the main support plate A base plate for supporting the light generating sheet; And And side plates connected to both ends of the base plate to have an H-shape to form upper and lower receiving spaces, and supporting both ends of the lower support plate. The method of claim 16, wherein the light generating sheet is disposed in the upper receiving space, And the driving circuit board is disposed in the lower receiving space. The method of claim 18, wherein the driving circuit protection unit And a lower surface of the base plate facing the driving circuit board and an inner surface of the side plates. 16. The method of claim 15, further comprising an outer case to receive and protect the photodetecting substrate, the light wavelength conversion member, the lower support plate, the main support plate, the light generating sheet, the driving circuit board, and the driving circuit protection unit. X-ray detection device characterized in.

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