KR20100079926A - Inspection apparatus for flat panel display - Google Patents

Inspection apparatus for flat panel display Download PDF

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Publication number
KR20100079926A
KR20100079926A KR1020080138524A KR20080138524A KR20100079926A KR 20100079926 A KR20100079926 A KR 20100079926A KR 1020080138524 A KR1020080138524 A KR 1020080138524A KR 20080138524 A KR20080138524 A KR 20080138524A KR 20100079926 A KR20100079926 A KR 20100079926A
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substrate
vacuum
inspection apparatus
joint
adsorption
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KR1020080138524A
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Korean (ko)
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KR101027475B1 (en
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최상진
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엘아이지에이디피 주식회사
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE: An apparatus for inspecting substrate secures the adsorption flow nature of substrate. The adsorption and the stable completeness check of substrate are proceed. CONSTITUTION: A substrate holder comprises the vacuum line having a plurality of vacuum ports(202). The substrate holder comprises the frame accomplishing the outer frame. The vacuum port is flown according to the adsorption angle of substrate. The vacuum port comprises the housing(240) in which the touch pad(232) touched with substrate, and the groove of the hemi spherical type and the joint(238) combined in the touch pad are formed. The o-ring locates in the housing, the joint and interval.

Description

기판검사장치{INSPECTION APPARATUS FOR FLAT PANEL DISPLAY} Substrate Inspection Equipment {INSPECTION APPARATUS FOR FLAT PANEL DISPLAY}

본 발명은 기판검사장치에 관한 것으로, 더욱 상세하게는 기판의 흡착 각도에 따른 틸팅(Tilting)이 가능하여 기판의 흡착 유동성이 확보됨에 따라 기판흡착의 안정성이 향상되는 기판검사장치에 관한 것이다.The present invention relates to a substrate inspection apparatus, and more particularly, to a substrate inspection apparatus capable of tilting according to an adsorption angle of a substrate, thereby improving stability of substrate adsorption as the adsorption fluidity of the substrate is secured.

일반적으로 반도체 웨이퍼나 LCD, PDP, EL 등의 대형 기판을 생산할 때 기판에 남아 있는 이물질이나 얼룩 등의 결함을 발견하기 위하여 목시검사, 즉 검사자의 육안으로 결함 여부를 검사한다. 육안검사는 기판을 진공으로 흡착하는 스테이지에 기판을 올려놓고 광원에 의해 조명을 제공하는 상태에서, 기판을 지지하고 있는 스테이지를 움직이며 기판의 전면과 배면 전체를 관찰하며 결함을 찾아내게 된다.Generally, when producing large sized substrates such as semiconductor wafers, LCDs, PDPs, and ELs, visual inspection, that is, inspection by the inspector's eyes, is performed to detect defects such as foreign substances or stains remaining on the substrates. In the visual inspection, the substrate is placed on a stage where the substrate is adsorbed by vacuum and the illumination is provided by the light source, and the stage supporting the substrate is moved to observe the front and rear surfaces of the substrate and find defects.

이러한 검사장치에는 기판을 진공흡착하기 위한 진공패드가 구비된다. 진공패드에 의해 흡착된 기판은 사용자의 조작에 의해 전면과 배면 전체를 검사하여 결함을 찾아내게 된다.The inspection apparatus is provided with a vacuum pad for vacuum adsorption of the substrate. The substrate adsorbed by the vacuum pads detects defects by inspecting the entire front and rear surfaces by a user's manipulation.

기판의 결함 검사 시 진공패드에는 항상 기판을 흡착하기 위한 진공이 형성되어야 기판의 파손 없이 안정적인 검사가 가능하다. 그러나 종래의 기판검사장치의 진공패드는 검사를 위해 기판을 움직일 경우 진공패드가 기판을 정확하게 흡착하지 못해 진공이 파괴되고 이에 따라 기판이 파손되는 문제가 발생했다. 이러한 문제는 기판을 흡착하고 있는 진공패드가 유동성이 없는 형태로 제작되어 있기 때문이다.When inspecting a defect of a substrate, a vacuum must always be formed on the vacuum pad to adsorb the substrate, so that stable inspection can be performed without damage to the substrate. However, the vacuum pad of the conventional substrate inspection apparatus has a problem that when the substrate is moved for inspection, the vacuum pad does not adsorb the substrate correctly and the vacuum is broken and thus the substrate is broken. This problem is caused by the fact that the vacuum pad adsorbing the substrate is manufactured to have no fluidity.

본 발명의 목적은 기판을 흡착하고 있는 진공패드가 기판의 움직임에 대해 흡착 유동성이 확보 가능한 기판검사장치를 제공하기 위한 것이다.SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate inspection apparatus in which a vacuum pad adsorbing a substrate can secure adsorption fluidity against movement of the substrate.

기판검사장치는 다수개의 진공포트를 가지는 진공라인이 복수개 배치되며, 진공에 의해 기판이 흡착유지되는 기판홀더를 구비한 기판검사장치에 있어서, 상기 진공포트는 상기 기판을 흡착유지 함에 있어, 상기 기판의 흡착 각도에 따라 유동이 가능하도록 틸팅(Tilting)이 가능하며, 상기 진공포트는 상기 기판에 접촉되는 접촉패드, 일단이 상기 접촉패드에 결합되며 타단이 반구 형태를 이루는 조인트, 상기 조인트의 타단이 위치하도록 반구형태의 홈이 형성된 하우징, 상기 하우징과 상기 조인트와 사이에 위치하는 오링을 포함한다.In the substrate inspection apparatus, a plurality of vacuum lines having a plurality of vacuum ports are disposed, and the substrate inspection apparatus includes a substrate holder in which a substrate is adsorbed and held by vacuum, wherein the vacuum port is configured to adsorb and hold the substrate. Tilting is possible to allow flow according to the suction angle of the vacuum port, and the vacuum port includes a contact pad contacting the substrate, one end of which is coupled to the contact pad, and the other end of which has a hemispherical shape, and the other end of the joint And a housing in which a hemispherical groove is formed to be positioned, and an O-ring positioned between the housing and the joint.

본 실시예에 따른 기판검사장치에 따르면 진공패드가 기판의 움직임에 대해 흡착 유동성이 확보되는 상태로 움직일 수 있어 안정적인 흡착 및 결함검사가 가능한 기판검사장치를 얻는 효과가 있다.According to the substrate inspection apparatus according to the present embodiment, the vacuum pad can move in a state in which adsorption fluidity is secured with respect to the movement of the substrate, thereby obtaining a substrate inspection apparatus capable of stable adsorption and defect inspection.

도 1은 본 실시예에 따른 기판검사장치의 사시도이고, 도 2는 도 1을 구성하고 있는 기판검사장치의 기판홀더(200)의 사시도이다. 도 3은 기판검사장치 중 진공패드의 분리사시도이다.1 is a perspective view of a substrate inspection apparatus according to the present embodiment, and FIG. 2 is a perspective view of a substrate holder 200 of the substrate inspection apparatus constituting FIG. 1. 3 is an exploded perspective view of the vacuum pad in the substrate inspection apparatus.

도 4는 도 3의 진공패드의 결합 단면도이다. 도 5는 본 실시예에 따른 기판검사장치의 사용상태도이다.4 is a cross-sectional view illustrating a coupling of the vacuum pad of FIG. 3. 5 is a state diagram of use of the substrate inspection apparatus according to the present embodiment.

도 1 및 도 2에 도시된 바와 같이, 본 실시예에 따른 기판검사장치(100)는 외곽틀을 이루는 외곽 프레임(156)을 구비하고 있다. 외곽 프레임(156)에는 검사자(164)의 육안에 의해 기판(G)의 결함유무 판별이 가능하도록 기판홀더(200)에 안착된 기판에 조명을 제공하는 검사용 검사광원(162)이 설치된다. 그리고 외곽 프레임(156)에는 검사광원(162)의 조명을 기판홀더(200)에 흡착된 기판(G)으로 전달하기 위한 반사판(158)이 설치되어 있다. 반사판(158) 및 검사광원(162)은 복수개가 설치된다.1 and 2, the substrate inspection apparatus 100 according to the present embodiment includes an outer frame 156 forming an outer frame. The outer frame 156 is provided with an inspection light source 162 for providing illumination to the substrate seated on the substrate holder 200 so that the defect of the substrate G can be determined by the naked eye of the inspector 164. The outer frame 156 is provided with a reflecting plate 158 for transmitting the illumination of the inspection light source 162 to the substrate G absorbed by the substrate holder 200. The reflecting plate 158 and the inspection light source 162 are provided in plurality.

또한, 외곽 프레임(156)에는 다수개의 진공포트(202, vacuum pad)를 가지는 진공라인(204)이 복수개 배치된 기판홀더(200)가 설치된다. 기판홀더(200)는 외곽틀을 이루는 프레임(206)을 구비하고 있으며, 프레임(206)의 내측에는 진공라인(204)이 병렬 형태로 일정한 간격으로 다수개가 배치되어 있다.In addition, the outer frame 156 is provided with a substrate holder 200 in which a plurality of vacuum lines 204 having a plurality of vacuum pads 202 are disposed. The substrate holder 200 is provided with a frame 206 forming an outer frame, and a plurality of vacuum lines 204 are arranged at regular intervals in parallel in the frame 206.

기판홀더(200)의 양측에는 기판홀더(200)를 회전 및 슬라이딩 가능하도록 지지하는 링크결합으로 이루어진 링크 지지부(210)가 구비된다. 이러한 형태의 기판홀더(200)에 기판(G)을 안착시키고 슬라이딩 시켜가며 기판 상부측 및 하부측의 결 함을 찾아내게 된다. 또한, 어느 한 면의 결함 검사가 완료될 경우 기판을 회전시켜 배면측의 결함도 찾아내게 된다. 기판홀더(200)는 별도의 구동부(미도시)를 통해 슬라이딩, 회전 작동이 가능하게 된다.Both sides of the substrate holder 200 are provided with a link support portion 210 made of a link coupling for supporting the substrate holder 200 to be rotatable and slidable. The substrate G is seated on the substrate holder 200 and slides, thereby finding defects on the upper and lower sides of the substrate. In addition, when defect inspection on either side is completed, the substrate is rotated to find a defect on the back side. The substrate holder 200 may be slid and rotated through a separate driver (not shown).

도 3 및 도4에 도시된 바와 같이, 본 실시예에 따른 기판검사장치(100)에 구비된 진공포트(202)는 기판(G)을 흡착유지 함에 있어, 기판(G)의 흡착 각도에 따른 틸팅(Tilting) 기능이 가능하여 기판(G)의 흡착 유동성을 할 수 있는 형태로 구성되어 있다.As shown in FIGS. 3 and 4, the vacuum port 202 provided in the substrate inspection apparatus 100 according to the present embodiment maintains the adsorption of the substrate G, according to the adsorption angle of the substrate G. As shown in FIG. It is configured in a form that allows the tilting function and thus adsorption fluidity of the substrate G.

이를 위해 진공포트(202)는 접촉패드(232), 너트(234), 제 1 실링(236, Sealing), 조인트(238, Joint), 하우징(240), 제 2 실링(242) 및 진공 파이프(244)를 구비한다.For this purpose, the vacuum port 202 may include a contact pad 232, a nut 234, a first sealing 236, a joint 238, a joint, a housing 240, a second sealing 242, and a vacuum pipe ( 244).

접촉패드(232)는 기판(G)에 접촉되고, 조인트(238)는 일단이 접촉패드(232)의 저면에 결합되는 것으로, 타단은 반구 형태를 이루고 있다. 반구 형태(238a)의 조인트(238)의 타단은 하우징(240)의 내부에 위치하게 되며, 하우징(240)의 내부는 조인트(238)의 반구 형태(238a)가 일치하도록 반구 형태의 홈(240a)이 형성된다.The contact pad 232 is in contact with the substrate (G), the joint 238 is one end is coupled to the bottom surface of the contact pad 232, the other end is a hemispherical shape. The other end of the hemispherical shape 238a of the joint 238 is positioned inside the housing 240, and the inside of the housing 240 has a hemispherical groove 240a so that the hemisphere shape 238a of the joint 238 coincides. ) Is formed.

조인트(238)와 하우징(240)의 사이에는 기밀을 유지하기 위한 제 1실링(236)이 위치하며, 조인트(238)는 너트(234)에 의해 하우징(240)에 고정된다.Between the joint 238 and the housing 240 is a first sealing 236 for maintaining airtightness, the joint 238 is fixed to the housing 240 by a nut 234.

하우징(240)은 진공 파이프(244)에 연결되며, 이들의 사이에는 기밀을 위한 제 2실링(242)이 구비된다.The housing 240 is connected to the vacuum pipe 244, between which a second sealing 242 for airtightness is provided.

이러한 형태에 의해 도 5에 도시된 바와 같이, 기판(G)이 흡착된 상태에서 검사를 위해 조작을 할 경우 기판(G)이 경사진 형태로 될 경우에도 진공포트(202)가 틸팅(Tilting)이 가능하여 안정적인 검사가 가능하게 된다. 틸팅 상태는 기판홀더(200)에 흡착된 기판의 위치에 따라서 발생할 수 있다.As shown in FIG. 5, the vacuum port 202 is tilted even when the substrate G is inclined when operating for inspection while the substrate G is adsorbed. This enables stable inspection. The tilting state may occur according to the position of the substrate adsorbed on the substrate holder 200.

도 1은 본 실시예에 따른 기판검사장치의 사시도이다.1 is a perspective view of a substrate inspection apparatus according to the present embodiment.

도 2는 도 1을 구성하고 있는 기판검사장치의 기판홀더의 사시도이다. FIG. 2 is a perspective view of a substrate holder of the substrate inspection device constituting FIG. 1. FIG.

도 3은 도 2를 구성하고 있는 기판홀더의 진공포트의 분해 사시도이다.3 is an exploded perspective view of a vacuum port of the substrate holder constituting FIG. 2.

도 4는 도 3의 결합 단면도이다.4 is a cross-sectional view of the combination of FIG.

도 5는 본 실시예에 따른 기판검사장치의 사용상태도이다.5 is a state diagram of use of the substrate inspection apparatus according to the present embodiment.

Claims (2)

다수개의 진공포트를 가지는 진공라인이 복수개 배치되며, 진공에 의해 기판이 흡착유지되는 기판홀더를 구비한 기판검사장치에 있어서, In the substrate inspection apparatus having a plurality of vacuum lines having a plurality of vacuum ports are arranged, the substrate holder for adsorbing and holding the substrate by vacuum, 상기 진공포트는 상기 기판을 흡착유지 함에 있어, 상기 기판의 흡착 각도에 따라 유동이 가능하도록 틸팅(Tilting)이 가능한 것을 특징으로 하는 기판검사장치.The vacuum port is a substrate inspection apparatus, characterized in that the tilting is possible to flow in accordance with the suction angle of the substrate in holding the substrate. 제 1 항에 있어서, 상기 진공포트는 상기 기판에 접촉되는 접촉패드, 일단이 상기 접촉패드에 결합되며 타단이 반구 형태를 이루는 조인트, 상기 조인트의 타단이 위치하도록 반구형태의 홈이 형성된 하우징, 상기 하우징과 상기 조인트와 사이에 위치하는 오링을 포함하는 것을 특징으로 하는 기판검사장치.According to claim 1, wherein the vacuum port is a contact pad in contact with the substrate, one end is coupled to the contact pad and the other end is a hemisphere shaped joint, the housing is formed with a hemispherical groove so that the other end of the joint is located, Substrate inspection apparatus comprising an O-ring positioned between the housing and the joint.
KR1020080138524A 2008-12-31 2008-12-31 Inspection apparatus for flat panel display KR101027475B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101316904B1 (en) * 2011-01-12 2013-10-11 엘아이지에이디피 주식회사 Supporting apparatus for substrate and Substrate inspection apparatus using the same
KR101367667B1 (en) * 2011-02-07 2014-02-27 엘아이지에이디피 주식회사 Adsorption apparatus for substrate and Substrate inspection apparatus using the same

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JP4524132B2 (en) * 2004-03-30 2010-08-11 東京エレクトロン株式会社 Vacuum processing equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101316904B1 (en) * 2011-01-12 2013-10-11 엘아이지에이디피 주식회사 Supporting apparatus for substrate and Substrate inspection apparatus using the same
KR101367667B1 (en) * 2011-02-07 2014-02-27 엘아이지에이디피 주식회사 Adsorption apparatus for substrate and Substrate inspection apparatus using the same

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