KR20100070814A - Cog 접합부 검사장치 - Google Patents
Cog 접합부 검사장치 Download PDFInfo
- Publication number
- KR20100070814A KR20100070814A KR1020080129535A KR20080129535A KR20100070814A KR 20100070814 A KR20100070814 A KR 20100070814A KR 1020080129535 A KR1020080129535 A KR 1020080129535A KR 20080129535 A KR20080129535 A KR 20080129535A KR 20100070814 A KR20100070814 A KR 20100070814A
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- panel
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- driver
- light emitting
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- 230000021615 conjugation Effects 0.000 title 1
- 238000007689 inspection Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 13
- 230000001678 irradiating effect Effects 0.000 claims description 7
- 230000007547 defect Effects 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 abstract description 2
- 230000002950 deficient Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
- G01N2021/3568—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor applied to semiconductors, e.g. Silicon
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Signal Processing (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Optics & Photonics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
Claims (4)
- 패널의 일방향에 구비되어, 상기 패널의 표면에 실장된 드라이버 IC를 투과할 수 있는 적외선을 조사하는 제 1발광부;상기 제 1발광부로부터 조사된 적외선이 투과된 후, 상기 드라이버 IC에 배치된 마크로부터 반사된 후 입사되는 제 1동축렌즈;상기 제 1동축렌즈를 통하여 입사된 적외선에 의하여 드라이버 IC의 마크 영상을 생성하는 제 1카메라;상기 패널의 다른 방향에 구비되어, 상기 패널을 투과할 수 있는 가시광선을 상기 적외선과 다른 방향에서 조사하는 제 2발광부;상기 제 2발광부로부터 조사된 광이 상기 패널을 투과한 후, 상기 패널에 배치된 패널마크로부터 반사된 후 입사되는 제 2동축렌즈;상기 제 2동축렌즈를 통하여 입사된 광에 의하여 상기 패널마크 영상을 생성하는 제 2카메라; 그리고상기 제 1 및 제 2카메라를 통하여 전송된 영상에 의하여 드라이버 IC의 마크와, 상기 패널마크의 일치여부를 검사하여 불량여부를 판단하는 제어부를 포함하는 COG 접합부 검사장치.
- 제 1항에 있어서,상기 제 1발광부는 광을 발산하는 램프와, 상기 램프에 구비되어 가시광선 영역을 차단함으로써 1100nm 내지 1300nm 주파수 범위의 적외선을 투과시키는 적외선 필터를 포함하는 COG 접합부 검사장치.
- 제 1항에 있어서,상기 제 1가시광선 파장대역의 광원은 차단하고, 1100nm 내지 1300nm 범위의 파장대역의 광원을 받아들일 수 있는 CCD 카메라이며, 상기 제 2카메라는 가시광선 파장대역의 광원을 받아들이는 CCD 카메라인 것을 특징으로 하는 COG 접합부 검사장치.
- 제 1항에 있어서,상기 제어부는 드라이버 IC에 배치된 제 1 및 제 2마크의 X,Y방향과, 패널에 배치된 제 3 및 제 4마크의 X,Y방향을 인식하여 데이터를 얻고, 하기 수식에 의하여 드라이버 IC의 부착각도를 연산하는 것을 특징으로 하는 COG 접합부 검사장치.(수식은X={(C_LX-G_LX)+(C_RX-G_RX)}/2Y={(C_LY-G_LY)+(C_RY-G_RY)}/2θ={(C_LY-G_RY)-(G_LY-G_RY)}/2 이다.)(C_LX:제 1마크의 X방향 위치값, C_LY:제 2마크의 Y방향 위치값G_LX: 제 3마크의 X방향 위치값, G_LY: 제 4마크의 Y방향 위치값)
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KR1020080129535A KR101002441B1 (ko) | 2008-12-18 | 2008-12-18 | Cog 접합부 검사장치 |
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KR1020080129535A KR101002441B1 (ko) | 2008-12-18 | 2008-12-18 | Cog 접합부 검사장치 |
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KR20100070814A true KR20100070814A (ko) | 2010-06-28 |
KR101002441B1 KR101002441B1 (ko) | 2010-12-17 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104792800A (zh) * | 2014-01-22 | 2015-07-22 | V-One技术股份有限公司 | 玻璃上芯片接合检验设备 |
KR20160003608A (ko) | 2015-12-21 | 2016-01-11 | 주식회사 브이원텍 | 칩온글래스 본딩 검사장치 |
CN112630998A (zh) * | 2019-10-08 | 2021-04-09 | 三星显示有限公司 | 制造显示装置的方法及用于制造显示装置的装置 |
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2008
- 2008-12-18 KR KR1020080129535A patent/KR101002441B1/ko active IP Right Grant
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104792800A (zh) * | 2014-01-22 | 2015-07-22 | V-One技术股份有限公司 | 玻璃上芯片接合检验设备 |
CN104792800B (zh) * | 2014-01-22 | 2018-04-17 | V-One技术股份有限公司 | 玻璃上芯片接合检验设备 |
KR20160003608A (ko) | 2015-12-21 | 2016-01-11 | 주식회사 브이원텍 | 칩온글래스 본딩 검사장치 |
CN112630998A (zh) * | 2019-10-08 | 2021-04-09 | 三星显示有限公司 | 制造显示装置的方法及用于制造显示装置的装置 |
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KR101002441B1 (ko) | 2010-12-17 |
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