KR20100063176A - Nesting table in semiconductor apparatus - Google Patents

Nesting table in semiconductor apparatus Download PDF

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KR20100063176A
KR20100063176A KR1020080121565A KR20080121565A KR20100063176A KR 20100063176 A KR20100063176 A KR 20100063176A KR 1020080121565 A KR1020080121565 A KR 1020080121565A KR 20080121565 A KR20080121565 A KR 20080121565A KR 20100063176 A KR20100063176 A KR 20100063176A
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nest
materials
turntable
seating
seated
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KR1020080121565A
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Korean (ko)
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KR100984425B1 (en
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윤점채
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윤점채
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67271—Sorting devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

PURPOSE: A nesting table of a semiconductor equipment is provided to improve a productivity with combining a turn table of a metal and a plastic nest. CONSTITUTION: A pair of nest seating recesses is formed on a turn table(400) to a horizontal direction. A nest of a plastic(420) is settled on the nest seating recess. Material seating recesses arrange materials in the nest of a constant position. A penetrated hole is formed on a center position of the material seating recesses. The nest is fixed to a bolt(430) on the turn table.

Description

반도체 장비의 네스팅 테이블{Nesting Table in semiconductor apparatus}Nesting table in semiconductor apparatus

본 발명은 반도체 장비인 소오 싱귤레이션 핸들러(Saw Singulation Handler)에 관한 것으로, 특히 소잉(Sawing)후 크리닝과 비전 공정을 거친 패키지(Package)들을 소팅(Sroting)하기 쉽도록 배열시키기 위하여 엔지니어링플라스틱 재질의 네스트(Nest)와 금속재질의 턴테이블(Turn Table)을 결합구성시킨 네스팅 테이블에 관한 것이다. BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a soaking Singulation Handler (Saw Singulation Handler), which is a semiconductor device, and in particular, in order to easily arrange the packages after cleaning and vision processing, The present invention relates to a nesting table comprising a combination of a nest and a metal turn table.

본 발명과 관련하여 동일 출원인에 의한 종래 기술은 특허출원 제 10-2007-99026 호(출원일: 2007.10.2)로 개시되어 있는 바, 이중 본 발명이 포함된 청구범위의 [청구항 1]은 소잉(Sawing)된 자재(1)들을 세척하여 이송시키는 지그(60)와, 상기 자재(1)들의 비전검사를 위해서 상부에서 하부로 조사되도록 설치되는 비전시스템(100)과, 이 비전시스템에 의해 자재들이 용이하고 정확하게 불량여부가 검사되도록 배열시키는 폴딩시스템 (200)과, 비전검사가 끝난 자재들을 이송하는 이송지그(300) 과 이 이송지그(300)로 이송되어온 자재들을 임시로 수납하여 배열하는 턴테이블(400) 및 상기 지그(60)와 폴딩시스템(200)사이에 설치되는 에어노즐(80)로 이루어지되, 상기 비전시스템(100)은 자재(1)들의 평면 촬영용 제1비전(110)과 저면 촬영용의 제2비전(120)으로 이루어지면서 상부에서 하부로 조사하여 비전검사를 하도록 브라켓을 통해 장비몸체에 고정설치 되며, 각 비전(110, 120)은 자재(1)들의 외형(Dimension)과 그 종류 및 특성이 인쇄된 상태를 촬영할 수 있는 카메라와 조명장치가 전원으로 작동하도록 구성되면서 카메라의 높낮이와 렌즈거리 및 조명장치의 조도를 조절할 수 있는 조절구를 갖추며, 상기 폴딩시스템 (200)은 대칭면을 갖는 한쌍의 지그(210,220)가 폴더 (Folder)형태로 조립구성 되면서, 양 지그(210,220)사이에 모우터(230)의 축과 부압라인(240)이 형성되는 공급구가 폴딩축(250)을 구성하고, 상기 접힘지그(220)가 수평지그(210)에 대해 상기 폴딩축(250)을 기준으로 접혀졌다 펴지는 과정으로 수평지그(210)상의 자재(1)들을 접힘지그(220)에 흡착시켜 그 저면을 비전시스템(100)에 노출시키도록 조합되면서 상기 양 지그(210,220)는 장비의 몸체에 고정설치되는 로봇(260)의 이송지지판 (270)상에 고정설치되어서 함께 좌우로 수평이동가능하도록 조합되며,상기 이송지그 (300)는 금속재의 흡착판(310)에 고무나 에폭시 수지재질의 연질 판재가 중앙부에 결합되어 이루어지되, 흡착판(310)은 흡착공(302)이 형성된 연질판재(304)가 흡착판(310)의 표면보다 다소 높게 단을 이루며 결합된 구조이고, 상기 접힘지그 (220)상의 자재흡착공(213)과 마주하는 동일위치에 자재 흡착공(302)들이 형성 되며, 로봇에 의해 수평이동하고 모우터(330)의 회전운동에 의해 승강되도록 볼스크류와 벨트로 조합되고, 상기 턴테이블(400)은 로봇(600)에 의해 전후로 이동되도록 조립 되면서 스텝모우터(450)로 지지설되며, 그 표면에는 2열 3그룹으로 자재(1)들을 수납할 자재수납홀(410)이 바둑판 배열상태에서 하나 건너 형성되는 사각홈을 구성하게 되고, 상기 스텝모우터(450)에 의해 90°회전됨은 물론 짧고 빠른 좌우회전의 반복실행으로 미세한 진동을 유발시키도록 구성시킨 것을 특징으로 하고 있다. Prior art by the same applicant in connection with the present invention is disclosed in Patent Application No. 10-2007-99026 (filed date: 2007.10.2), wherein claim 1 of the claims including the present invention is sawing ( Jig 60 for washing and transporting the sawing material (1), the vision system 100 is installed to be irradiated from the top to the bottom for the vision inspection of the material (1), and the material by this vision system Folding system 200 for easy and accurate inspection of defects, a transfer jig 300 for conveying the finished materials for vision inspection, and a turntable for temporarily storing and arranging materials transferred to the transfer jig 300 ( 400) and an air nozzle 80 installed between the jig 60 and the folding system 200, wherein the vision system 100 is used for the first vision 110 and the bottom surface photographing for planar photographing of materials (1). The second vision 120 of the award It is fixed to the equipment body through the bracket to irradiate from the lower part to the vision inspection, each vision (110, 120) is able to photograph the state (Dimension) and the type and characteristics of the materials (1) printed The camera and the lighting device are configured to operate as a power source and have a control to adjust the height and the lens distance of the camera and the illuminance of the lighting device. The folding system 200 includes a pair of jigs 210 and 220 having a symmetrical surface. While being assembled in the form of a folder, a supply port in which a shaft of the motor 230 and a negative pressure line 240 are formed between both jigs 210 and 220 constitutes a folding shaft 250, and the folding jig 220 is In the process of being folded and unfolded with respect to the horizontal jig 210 based on the folding shaft 250, the materials 1 on the horizontal jig 210 are adsorbed to the folding jig 220, and the bottom of the horizontal jig 210 is transferred to the vision system 100. Both jigs 210,220 while being combined to expose ) Is fixedly installed on the transfer support plate 270 of the robot 260 is fixedly mounted to the body of the equipment is combined to be horizontally movable together left and right, the transfer jig 300 is a rubber or Epoxy resin material is made of a flexible plate is bonded to the central portion, the adsorption plate 310 is a structure in which the soft plate member 304, the adsorption hole 302 is formed to form a stage slightly higher than the surface of the adsorption plate 310, the Material adsorption holes 302 are formed at the same position facing the material adsorption hole 213 on the folding jig 220, and are moved horizontally by a robot and lifted by a rotational movement of the motor 330. The turntable 400 is assembled to be moved back and forth by the robot 600, and is supported by the step motor 450, and a material storage hole for accommodating the materials 1 in two rows and three groups on the surface thereof. (410) One on this board And the configuration of the rectangular groove is formed, by the step Motor 450 is characterized by that configured to induce fine vibrations to repeat the execution of the short course, quick swivel doemeun 90 ° rotation.

그러나, 상기한 종래의 턴테이블(400)은 그 재질이 금속이며, 금속상부면에 자재수납홀(410)들을 형성시킨 후 스텝모우터(450)로 좌우로 짧고 빠르게 회전시키기 때문에 이송지그(300)에 의해 흡착이송되어는 자재(1)들이 자재수납홀(410)에 놓일때 금속면에 접촉하면서 충격을 받게 되고, 이 충격을 완화시키기 위하여 이송안착과정을 느리게 실행시킬 경우 생산속도가 떨어지는 문제가 있게된다.However, since the conventional turntable 400 is made of metal, and the material storage holes 410 are formed on the upper surface of the metal, the transfer jig 300 is rotated shortly and quickly to the left and right by the step motor 450. When the materials (1) to be transported by the adsorption are placed in the material storage hole (410), the metal 1 is in contact with the metal surface and is impacted. Will be.

또한, 자재(1)들이 자재수납홀(410)내에 놓일때는 이러한 충격을 없애기 위하여 자재수납홀(410)의 바닥면보다 다소 높은 위치에서 흡착력을 제거하면서 낙하시키게 되므로 자재(1)들이 자재수납홀(410)내의 바닥에 떨어지면서 튕겨져 나와 다음공정으로의 이송이 곤란할 뿐만 아니라, 정상자재가 손상되거나 자재들의 이탈에 따른 장비의 작업속도가 더디거나 타 부품에 영향을 주어 장비전체의 작동을 멈추어야 하는 문제가 있어왔다.In addition, when the materials 1 are placed in the material storage hole 410, in order to eliminate such an impact, the material 1 is dropped while removing the suction force at a position slightly higher than the bottom surface of the material storage hole 410. It is not only difficult to transfer to the next process by falling off the floor in 410, but also to stop the operation of the entire equipment due to the slow working speed of the equipment due to the damage of normal materials or the departure of materials or the influence of other parts. Has been.

이와같이 종래의 턴테이블은 자재를 수납함에 있어서 금속재질위에 자재가 낙하하도록 설계되어서 자재수납홀로 부터의 이탈이나 충격현상이 발생하므로 자재 의 이탈방지 및 낙하시의 완충수단이 요구되었다.As described above, the conventional turntable is designed so that the material falls on the metal material in storing the material, so that the material is separated or impacted from the material storage hole.

본 발명은 소오 싱귤레이션 핸들러(Saw Singulation Handler)에 있어서, 소잉(Sawing)후 크리닝(Cleaning)과 비전(Vision) 공정을 거친 패키지(Package)들을 소팅(Sroting)하기 쉽도록 배열시키기 위하여 엔지니어링플라스틱 재질의 네스트(Nest)와 금속재질의 턴테이블(Turn Table)을 결합구성시킨 네스팅 테이블을 제공하여 종래 턴테이블의 단점을 해소시킨 것이다. The present invention relates to an engineering plastic material for arranging packages that are subjected to cleaning and vision processes after sawing in a saw singing handler, for easy sorting. By providing a nesting table consisting of a combination of the Nest (Nest) and a metal Turn Table (Turn Table) to solve the disadvantage of the conventional turntable.

네스트(Nest)와 턴테이블(Turn Table)을 결합구성시킨 네스팅 테이블을 제공함에 따라 자재들의 이탈방지와 충격감소, 빠른 작업에 의한 UPH를 증가시키게되어 생산성을 향상시키는 효과를 가져오게 된다.By providing nesting table that combines nest and turn table, it prevents material from falling off, reduces impact, and increases UPH due to fast operation, resulting in improved productivity.

본 발명은 자재(1)들의 불량여부를 촬영하여 검사하는 비전시스템(100)과, 이 비전시스템(100)에 의해 자재(1)들이 용이하고 정확하게 불량여부가 검사되도록 배열시키는 폴딩시스템 (200)과, 비전검사가 끝난 자재들을 부압으로 흡착 이송하는 이송지그(300)와, 이 이송지그 (300)로 이송되어온 자재(1)들을 임시로 수납하여 배열하며 로보트로 이송되는 턴테이블(400)과, 이 턴테이블(400)상의 자재(1)들 을 양품과 불량품으로 구분하여 이송적재시키는 다수의 피커와 플레이서(Picker & Placer, 500) 및 이들 피커와 플레이서(Picker & Placer, 500)에 의해 분류이송되는 자재들을 수납하는 트레이부(600)로 이루어지는 소오 싱귤레이션 핸들러에 있어서, The present invention is a vision system 100 for photographing and inspecting whether the material (1) is defective, and the folding system (200) arranged so that the material (1) is easily and accurately inspected by the vision system 100 And, the transfer jig 300 for adsorption transfer of the material after the non-inspection under negative pressure, and the turntable 400 is temporarily stored and arranged to temporarily store the material (1) transferred to the transfer jig 300, and Classified by a number of pickers and placers (Picker & Placer, 500) and pickers and placers (500) to transfer and classify the materials (1) on the turntable 400 into good and bad In the sour singulation handler consisting of a tray 600 for storing the material to be transferred,

상기 턴테이블(400)상에 장변의 수평방향으로 한쌍의 네스트 안착요홈(410)을 형성시키고, 이 안착요홈(410)에 안착되는 엔지니어링 플라스틱재질의 네스트(420)를 마련하되, 상기 네스트(420)에는 자재(1)들이 안착되어 정위치에 배열되어지게 하는 사이즈의 자재안착홈(422)들이 형성되고, 이 자재안착홈(422)들의 중심위치에는 관통공(424)이 형성되어지며, 상기 턴테이블(400)의 안착요홈(410)내에는 자재안착홈(422)의 관통공(424)과 일직선상의 부압공(412)들이 연통되게 형성되고, 상기 네스트(420)는 턴테이블(400)상에 볼트(430)로 체결되어 결합되는 구성의 네스팅 테이블이다. A pair of nesting recesses 410 are formed on the turntable 400 in the horizontal direction of the long side, and a nest 420 of an engineering plastic material seated on the seating recesses 410 is provided. Material seating grooves 422 are formed in the size to allow the materials (1) to be seated and arranged in place, and through holes 424 are formed at the center positions of the material seating grooves 422, the turntable In the seating recess 410 of the 400, the through-hole 424 of the material seating groove 422 and the negative pressure hole 412 in a straight line are formed in communication, and the nest 420 is bolted on the turntable 400. 430 is a nesting table of the configuration is fastened and coupled.

도3은 본 발명의 평면도이고, 도4는 도3의 우측면도이다. 또한 도5는 도3의 A부 확대도면이고, 도6은 네스트(420)의 자재안착홈(422)과 관통공(424)의 구조를 보이기 위한 도5의 C-C선 단면도 이다. 도면중 동일구성의 번호는 하나를 사용하고 나머지의 기재는 생략한다.3 is a plan view of the present invention, Figure 4 is a right side view of FIG. 5 is an enlarged view of a portion A of FIG. 3, and FIG. 6 is a cross-sectional view taken along the line C-C of FIG. 5 to show the structure of the material seating groove 422 and the through hole 424 of the nest 420. FIG. In the drawings, the same configuration number is used, and the remaining description is omitted.

도5 에서와 같이,네스트(420)에 형성되는 자재안착홈(422)은 상부둘레(422')와 하부둘레(422")가 다른 상광하협(上廣下狹)의 형상으로 형성되어서 자재(1)가 놓여질때 자재안착홈(422)의 넓은 상부면에서 좁은 바닥면으로 낙하되므로 자재안착홈(422)으로 부터의 이탈현상이 없이 용이한 안착이 이루어진다.As shown in Figure 5, the material seating groove 422 formed in the nest 420 is formed in the shape of the upper and lower sine the upper circumference 422 'and the lower circumference 422 "is different. When 1) is placed, since it falls from the wide top surface of the material seating groove 422 to the narrow bottom surface, it is easily seated without detachment from the material seating groove 422.

여기서 자재안착홈(422)의 바닥면은 자재(1)보다 약간 넓은 크기로 제작되어서 자재(1)는 언제나 정위치가 확보된 안착상태를 이루도록 구성시킨 것이다. 따라서, 자재(1)가 정위치가 아닌 상태로 이송되어오더라도 자재안착홈(422)내에 안착되면서 정위치를 이루게 된다. Here, the bottom surface of the material seating groove 422 is made of a slightly wider size than the material (1) so that the material (1) is always configured to achieve a seating state secured in place. Therefore, even if the material 1 is transported in a state other than the correct position, the material 1 is placed in the material seating groove 422 to achieve the correct position.

상기한 형상을 갖춘 네스트(420)는 도3과 같이 턴테이블(400)상에 상하 한쌍이 수평으로 설치되는바, 네스트(420)는 턴테이블(400)상에 상하 한쌍이 수평으로 설치되도록 안착요홈(410)역시 상하 한쌍으로 형성된다.The nest 420 having the above-described shape is provided with a pair of upper and lower horizontally on the turntable 400 as shown in FIG. 3, and the nest 420 has a mounting recess so that the upper and lower pairs are horizontally installed on the turntable 400. 410) is also formed in a pair of upper and lower.

여기서, 각 각 네스트(420)와 안착요홈(410)에는 자재안착홈(422)들이 모여진 칼럼들이 세 칼럼 마련되고, 각 칼럼마다의 자재안착홈(422)은 상하좌우로 자재안착홈(422)하나의 등간격을 두고 형성되어져서 자재(1) 소팅시 이웃하는 자재(1)들간의 간섭을 방지하도록 구성된다.Here, each of the nests 420 and the seating recesses 410 is provided with three columns in which material seating grooves 422 are gathered, and the material seating recesses 422 for each column are provided in the seating recesses 422. It is formed at one equal interval so as to prevent interference between neighboring materials (1) when sorting the material (1).

여기서 각 칼럼내의 자재안착홈(422)은 자재(1)들의 크기에 따라 당연히 그 형성갯수가 틀리게 되지만 상하좌우로 하나씩 간격을 두고 형성되어지는 원리는 동일하다.Here, the material seating grooves 422 in each column are naturally formed according to the size of the materials 1, but the number of formation is different, but the principle is formed at intervals one by one up, down, left, and right.

도1은 소오 싱귤레이션 핸들러의 개략도,1 is a schematic diagram of a sour singulation handler;

도2는 도1의 턴테이블 구성도,2 is a turntable configuration of FIG.

도3은 본 발명의 네스팅 테이블 구성도,3 is a configuration diagram of the nesting table of the present invention;

도4는 도3의 우측 단면도로 B-B선 단면도,4 is a sectional view taken along the line B-B in the right sectional view of FIG.

도5는 도3의 A부 확대도,5 is an enlarged view of a portion A of FIG. 3;

도6은 도5의 C-C선 단면도 이다.6 is a cross-sectional view taken along the line C-C of FIG.

-도면의 주요 부호설명-Explanation of Major Codes in Drawing

1-자재 400-턴테이블1-material 400-turntable

410-안착요홈 412-부압공410-Receiving recess 412-Negative pressure

420-네스트420-nest

422-자재안착홈422-Material Seating Groove

424-관통공(424)424-Through Hole (424)

430-볼트430-volt

Claims (3)

자재(1)들의 불량여부를 촬영하여 검사하는 비전시스템(100)과, 이 비전시스템(100)에 의해 자재(1)들이 용이하고 정확하게 불량여부가 검사되도록 배열시키는 폴딩시스템 (200)과, 비전검사가 끝난 자재들을 부압으로 흡착 이송하는 이송지그 (300)와, 이 이송지그 (300)로 이송되어온 자재(1)들을 임시로 수납하여 배열하며 로보트로 이송되는 턴테이블(400)과, 이 턴테이블(400)상의 자재(1)들을 양품과 불량품으로 구분하여 이송적재시키는 다수의 피커와 플레이서(Picker & Placer, 500) 및 이들 피커와 플레이서(Picker & Placer, 500)에 의해 분류이송되는 자재들을 수납하는 트레이부(600)로 이루어지는 소오 싱귤레이션 핸들러에 있어서, Vision system 100 for photographing and inspecting whether the materials (1) is defective, Folding system (200) for arranging materials (1) to be easily and accurately inspected by the vision system 100, and vision A transfer jig 300 for suction-transferring the inspected materials under negative pressure, a turntable 400 temporarily storing and arranging the materials 1 transferred to the transfer jig 300, and the turntable ( The pickers and placers (Picker & Placer, 500) and the pickers and placers (Picker & Placer, 500) which classify and transport the materials (1) on the 400 to good and defective In the sour singulation handler comprising a tray 600 for storing, 상기 턴테이블(400)상에 장변의 수평방향으로 한쌍의 네스트 안착요홈(410)을 형성시키고, 이 안착요홈(410)에 안착되는 엔지니어링 플라스틱재질의 네스트 (420)를 마련하되, 상기 네스트(420)에는 자재(1)들이 안착되어 정위치에 배열되어지게 하는 사이즈의 자재안착홈(422)들이 형성되고, 이 자재안착홈(422)들의 중심위치에는 관통공(424)이 형성되어지며, 상기 턴테이블(400)의 안착요홈(410)내에는 자재안착홈(422)의 관통공(424)과 일직선상의 부압공(412)들이 연통되게 형성되고, 상기 네스트(420)는 턴테이블(400)상에 볼트(430)로 체결되어 결합되어서 자재(1)들이 네스트(420)상에 놓여져 소팅되도록 구성되는 것을 특징으로 하는 네스팅 테이블.A pair of nested recesses 410 are formed on the turntable 400 in the horizontal direction of the long side, and a nest 420 of an engineering plastic material seated on the seated recesses 410 is provided. Material seating grooves 422 are formed in the size to allow the materials (1) to be seated and arranged in place, and through holes 424 are formed at the center positions of the material seating grooves 422, the turntable In the seating recess 410 of the 400, the through-hole 424 of the material seating groove 422 and the negative pressure hole 412 in a straight line are formed in communication, and the nest 420 is bolted on the turntable 400. The nesting table, characterized in that the fastening is coupled to the (430) so that the material (1) is placed and sorted on the nest (420). 제1항에 있어서, 네스트(420)에 형성되는 자재안착홈(422)은 상부둘레(422')와 하부둘레(422")가 다른 상광하협(上廣下狹)의 형상으로 형성되고, 그 바닥면은 자재(1)의 크기보다 약간 넓은 크기로 제작되어서 자재(1)는 언제나 정위치가 확보된 안착상태를 이루도록 구성시킨 것을 특징으로 하는 네스팅 테이블. According to claim 1, The material seating groove 422 formed in the nest 420 is formed in the shape of the upper and lower sine the upper circumference 422 ′ and the lower circumference 422 ″ different, The bottom surface is made of a size slightly larger than the size of the material (1) so that the material (1) is always nesting table, characterized in that configured to achieve a seated state secured in place. 제1항에 있어서, 네스트(420)는 턴테이블(400)상에 상하 한쌍이 수평으로 설치되도록 상하 한쌍의 안착요홈(410)이 마련되며, 각 각 네스트(420)와 안착요홈(410)에는 자재안착홈(422)들이 모여진 칼럼들이 세 칼럼 마련되고, 각 칼럼마다 자재안착홈(422)은 상하좌우로 자재안착홈(422)하나의 등간격을 두고 형성되어져서 자재(1) 소팅시 이웃하는 자재(1)들간의 간섭을 방지하도록 구성시킨 것을 특징으로 하는 네스팅 테이블. According to claim 1, the nest 420 is provided with a pair of upper and lower mounting recesses 410 so that the upper and lower pairs are horizontally installed on the turntable 400, each of the nest 420 and the mounting recess 410 material Three columns are provided in which the seating grooves 422 are gathered, and the material seating grooves 422 are formed at equal intervals in each of the material seating grooves 422 in each column. A nesting table, characterized in that configured to prevent interference between materials (1).
KR1020080121565A 2008-12-03 2008-12-03 Nesting Table in semiconductor apparatus KR100984425B1 (en)

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CN107134425A (en) * 2017-05-04 2017-09-05 北京中电科电子装备有限公司 A kind of table assembly of separator
KR20210021502A (en) * 2015-02-11 2021-02-26 (주)테크윙 Apparatus for checking mounting status of electronic component

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KR102193675B1 (en) * 2019-07-10 2020-12-21 ㈜토니텍 Turntable for transporting semiconductor packages
KR102654553B1 (en) * 2023-12-13 2024-04-04 주식회사 프로이천 Nest plate

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KR20050110487A (en) * 2004-05-19 2005-11-23 삼성전자주식회사 Handler system for electrical parallel test of semiconductor device and testing method thereof
KR100806376B1 (en) 2006-07-21 2008-02-27 세크론 주식회사 test handler
KR20080015621A (en) * 2006-08-16 2008-02-20 미래산업 주식회사 Test tray for handler for testing semiconductors

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KR20210021502A (en) * 2015-02-11 2021-02-26 (주)테크윙 Apparatus for checking mounting status of electronic component
CN107134425A (en) * 2017-05-04 2017-09-05 北京中电科电子装备有限公司 A kind of table assembly of separator

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