KR20100059215A - 글래스 패널용 척의 조정장치 및 조정방법 - Google Patents

글래스 패널용 척의 조정장치 및 조정방법 Download PDF

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Publication number
KR20100059215A
KR20100059215A KR1020080117905A KR20080117905A KR20100059215A KR 20100059215 A KR20100059215 A KR 20100059215A KR 1020080117905 A KR1020080117905 A KR 1020080117905A KR 20080117905 A KR20080117905 A KR 20080117905A KR 20100059215 A KR20100059215 A KR 20100059215A
Authority
KR
South Korea
Prior art keywords
chuck
glass panel
clamping pressure
rotation angle
clamping
Prior art date
Application number
KR1020080117905A
Other languages
English (en)
Korean (ko)
Inventor
김진락
Original Assignee
주식회사 탑 엔지니어링
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 탑 엔지니어링 filed Critical 주식회사 탑 엔지니어링
Priority to KR1020080117905A priority Critical patent/KR20100059215A/ko
Priority to CN200910223573A priority patent/CN101734847A/zh
Priority to TW098140073A priority patent/TW201029940A/zh
Publication of KR20100059215A publication Critical patent/KR20100059215A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Joining Of Glass To Other Materials (AREA)
KR1020080117905A 2008-11-26 2008-11-26 글래스 패널용 척의 조정장치 및 조정방법 KR20100059215A (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020080117905A KR20100059215A (ko) 2008-11-26 2008-11-26 글래스 패널용 척의 조정장치 및 조정방법
CN200910223573A CN101734847A (zh) 2008-11-26 2009-11-24 用于控制玻璃面板的卡盘的设备和方法
TW098140073A TW201029940A (en) 2008-11-26 2009-11-25 Apparatus and method for controlling chuck for glass panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080117905A KR20100059215A (ko) 2008-11-26 2008-11-26 글래스 패널용 척의 조정장치 및 조정방법

Publications (1)

Publication Number Publication Date
KR20100059215A true KR20100059215A (ko) 2010-06-04

Family

ID=42360557

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080117905A KR20100059215A (ko) 2008-11-26 2008-11-26 글래스 패널용 척의 조정장치 및 조정방법

Country Status (3)

Country Link
KR (1) KR20100059215A (zh)
CN (1) CN101734847A (zh)
TW (1) TW201029940A (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190059572A (ko) * 2017-11-23 2019-05-31 주식회사 탑 엔지니어링 기판 절단 장치
KR20190059573A (ko) * 2017-11-23 2019-05-31 주식회사 탑 엔지니어링 기판 절단 장치
KR20210025287A (ko) * 2019-08-27 2021-03-09 주식회사 탑 엔지니어링 클램프 장치

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107475679B (zh) * 2017-08-18 2019-11-26 武汉华星光电半导体显示技术有限公司 夹持对位装置及方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190059572A (ko) * 2017-11-23 2019-05-31 주식회사 탑 엔지니어링 기판 절단 장치
KR20190059573A (ko) * 2017-11-23 2019-05-31 주식회사 탑 엔지니어링 기판 절단 장치
KR20210025287A (ko) * 2019-08-27 2021-03-09 주식회사 탑 엔지니어링 클램프 장치

Also Published As

Publication number Publication date
CN101734847A (zh) 2010-06-16
TW201029940A (en) 2010-08-16

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