KR20090105743A - Multi-stacker for test handler and test handler using the same - Google Patents

Abstract

PURPOSE: A multi-stacker for test handler and a test handler using the same are provided to minimize the delay due to the movement of a customer tray. CONSTITUTION: More than one customer tray can be arranged the tray plate(110). A customer tray for transferring is allocated in the corresponding tray plate from the test handler transfer location. The tray plate is corresponded to the transfer customer tray among the tray plate. The transfer customer tray disposed in the correspondence tray plate is moved to the transfer location from the correspondence tray plate. The vertical movement unit(130) performs a rising or falling motion to move to the transfer location. The tray plate moving unit is moved by the vertical movement unit.

Description

MULTI-STACKER FOR TEST HANDLER AND TEST HANDLER USING THE SAME}

The present invention relates to a multi-stacker for a test handler and a test handler using the same. More particularly, the present invention relates to moving a customer tray by moving a tray from a tray plate position to a transfer position or a lowering from a transfer position to a tray plate position. Multiple tray plates are provided while minimizing test delays, thereby increasing classification efficiency and increasing test efficiency by performing a position operation so that each tray plate does not interfere with the rising or falling of the customer tray. A multi-stacker for test handlers and a test handler using the same.

After the assembly process is completed in the semiconductor device manufacturing process, a test is performed to determine whether the device is good or bad before final shipment. A test handler is a device used to test such semiconductor devices. The test handlers automatically load semiconductor devices contained in a customer tray and perform tests at a test site, and then test the semiconductor devices. It is a device configured to support the test by sequentially repeating the process of unloading the customer tray which is classified into several grades according to the result. On the other hand, when loading or unloading a semiconductor device through a test tray at a test site is performed, the test handler may also include a transfer configuration between the customer tray and the test tray.

Such a conventional test handler may include a multi-stacker. The multi-stacker is configured to stack a plurality of customer trays to receive semiconductor devices, such as defective or re-inspected products, generated in a small amount as a result of a test, in a customer-specified tray designated for each grade.

For example, in Patent Publication No. 10-311545, entitled "Tray Plate of Handler," filed May 12, 1999 and filed October 17, 2001 by Mirae Industries, Inc., semiconductor devices are stored in a plurality of test grades. Disclosed is a multi stacker having a structure in which a plurality of tray plates on which stacked trays are stacked are stacked.

In the multi-stacker disclosed in Korean Patent Publication No. 10-311545, when a semiconductor device of a predetermined grade occurs during a test, the tray plates stacked on the tray stacker are lifted by the operation of the tray lifter, and then the tray immediately above the corresponding tray plate. The plates are separated by a stopper, and then the trays of the individual grades are sorted and stacked in such a way that the trays are taken out or brought in on the tray plates of that grade.

However, the above-mentioned multi-stacker for the test handler separates and recombines the tray plate directly above the corresponding tray plate of the stacked trays in order to carry out and carry in the tray containing the semiconductor devices of one class on the corresponding tray plate. Since the operation must be repeated, the structure and operation are complicated, and accordingly, there are problems in that test efficiency is lowered due to a large frequency of errors.

In addition, Korean Patent Publication No. 10-536473, entitled "Multi-Stacker for Semiconductor Device Test Handlers," filed on June 1, 2004 and filed on December 7, 2005 by Mirae Industry Co., Ltd., is a side of the multi-stacker. A configuration is disclosed for loading and then unloading a tray through a tray transfer from a tray plate that is opened and exposed to an open side.

However, this configuration increases the volume of the multi stacker. In addition, the tray transfer lowers from the transfer position to the tray plate to move the customer tray from the tray plate to the transfer position of the test handler or from the transfer position to the tray plate, and then rises from the tray plate to the transfer position again. Since there is a disadvantage that the loading or unloading time of the customer tray is increased.

An object of the present invention is to increase the classification grade by having a plurality of tray plates while moving the customer tray by the operation of ascending from the tray plate position to the transfer position or descending from the transfer position to the tray plate position to minimize the test delay according to the moving time. It is possible to provide a multi-stacker for a test handler that can cope with and increase the test efficiency by performing a position operation so that each of the plurality of tray plates does not interfere with the rising or falling of the customer tray.

Another object of the present invention is to provide a test handler using the multi-stacker for the test handler.

In order to achieve the above technical problem, the present invention is a multi-stacker used in a test handler, a plurality of tray plates on which one or more customer trays can be arranged, and a transfer customer tray to be transferred from a transfer position of the test handler to a corresponding tray. To place on a plate (which is one of the plurality of tray plates corresponding to the transfer customer tray) or to move the transfer customer tray disposed on the corresponding tray plate from the corresponding tray plate to the transfer position Vertical movement means for performing a downward movement, and tray plate movement means for controlling the position of the plurality of tray plates such that only the transfer customer tray is raised or lowered by the vertical movement means; It provides a multi-stackers for the test handler according to claim.

In the multi-stacker for test handlers according to the present invention, it may further comprise a management movement means for simultaneously moving the plurality of tray plates for retrieval or insertion of the one or more customer trays.

In the multi-stacker for test handlers according to the present invention, each of the plurality of tray plates may include a tray support for arranging the one or more customer trays in parallel.

In addition, in the multi-stacker for a test handler according to the present invention, each of the plurality of tray plates may include a tray support for vertically stacking the one or more customer trays.

In addition, in the multi-stacker for a test handler according to the present invention, the transfer customer tray may be a semiconductor device that is classified by grade.

In the multi-stacker for a test handler according to the present invention, the transfer customer tray may have no semiconductor element or a semiconductor element to be tested.

In addition, in the multi-stacker for a test handler according to the present invention, each of the plurality of tray plates may be classified by use.

In addition, in the multi-stacker for test handlers according to the present invention, each of the one or more customer trays disposed in the tray parallel support may be divided so that only semiconductor devices classified into a specific class may be disposed.

In the multi-stacker for a test handler according to the present invention, the vertical movement means may include a transfer tray support for supporting the transfer customer tray, and a vertical mover for moving the transfer tray support in a vertical direction.

In addition, in the multi-stacker for a test handler according to the present invention, the transfer tray support portion includes a lower support structure for supporting the transfer customer tray under the transfer customer tray, wherein each of the plurality of tray plates has the inside An avoidance space for the movement of the transfer tray support may be formed.

In addition, in the multi-stacker for a test handler according to the present invention, the transfer tray support may include a protrusion supporting the transfer customer tray on the side of the transfer customer tray.

In addition, in the multi-stacker for the test handler according to the present invention, the vertical moving unit may include a multi-Z axis robot.

In addition, in the multi-stacker for a test handler according to the present invention, the tray plate moving means is another tray except for the corresponding tray plate among the plurality of tray plates initially disposed at the position where the lifting or lowering is performed by the vertical moving means. The plates can be avoided to move.

In addition, in the multi-stacker for a test handler according to the present invention, the tray plate moving means may be connected to each of the plurality of tray plates to perform a plurality of position moving parts and the plurality of position moving parts. It may include a avoidance movement control unit for controlling to perform the avoidance movement only to the position movement units disposed corresponding to the other tray plate.

In addition, in the multi-stacker for a test handler according to the present invention, each of the plurality of position shifting units includes a cylinder for performing forward or reverse movement, and each of the plurality of tray plates performs the avoidance movement according to the operation of the cylinder. And an LM guide that supports it.

In addition, in the multi-stacker for a test handler according to the present invention, the tray plate moving means may move only the corresponding tray plate to a position at which the up or down is performed by the vertical moving means.

In addition, in the multi-stacker for a test handler according to the present invention, the tray plate position shifting means is connected to each of the plurality of tray plates, a plurality of position shifters for performing the position shift, and the plurality of position shifts The apparatus may include a position movement control unit controlling to perform the position movement only with respect to the position moving unit disposed in correspondence with the corresponding plate.

In addition, in the multi-stacker for a test handler according to the present invention, each of the plurality of position shifting units includes a cylinder for performing a forward or backward operation, and each of the plurality of tray plates performs the position movement according to the operation of the cylinder. And an LM guide that supports it.

In addition, the multi-stacker for test handlers according to the present invention, further comprising a stacking height sensing means for sensing the stacked height when the one or more customer trays are stacked and disposed corresponding to each of the plurality of tray plates, The vertical movement means may perform the up or down movement in consideration of the stacked height detected by the stacked height detecting means.

The present invention further provides a multi-stacker for test handlers according to the present invention as described above, and transfers the transfer customer tray from the transfer position to the unloading performance configuration of the test handler or from the unloading performance configuration of the test handler. It provides a test handler comprising a tray transfer device for transferring to.

According to the present invention, by moving the customer tray by an operation of ascending from the tray plate position to the transfer position or descending from the transfer position to the tray plate position, a plurality of tray plates are provided to increase the classification level while minimizing the test delay according to the moving time. Correspondence is possible, and each of the multiple tray plates can be positioned so that it does not interfere with the rise or fall of the customer tray, thereby increasing test efficiency.

Hereinafter, a multi-stacker for a test handler of the present invention and an embodiment of a test handler using the same will be described in more detail with reference to the accompanying drawings.

1 is a diagram showing an exemplary configuration of a multi stacker for a test handler according to the present invention.

Referring to FIG. 1, the multi-stacker for a test handler according to the present invention includes a plurality of tray plates 110a to 110f, vertical movement means 130, and tray plate movement means 150. In addition, although not shown, the multi-stacker for a test handler according to the present invention may further include a management moving means.

The plurality of tray plates 110a to 110f are configurations for arranging customer trays.

The customer tray may be configured to include semiconductor devices classified by grade in a test handler (not shown), and may be transported and disposed in each of the plurality of tray plates 110a to 110f. In particular, FIG. 1 shows only the transfer customer tray 190 which is a customer tray moved by the vertical moving means 130 among the customer trays.

Alternatively, the customer tray may be in an empty state, ie, a state in which no semiconductor device is disposed, to place the semiconductor devices classified according to the grades in the test handler, or in a state in which the semiconductor device to be tested is arranged in the test handler.

The plurality of tray plates 110a to 110f is a configuration for arranging such customer trays.

In addition, although the number of the plurality of tray plates 110a to 110f is illustrated as six, in the present invention, the number of tray plates is not limited thereto and may be flexibly changed according to design.

2 is an exemplary configuration diagram of a tray plate in a multi stacker for a test handler according to the present invention. In FIG. 2, the tray plate 110a of the plurality of tray plates 110a to 110f will be described with reference to the tray plate 110a.

Referring to FIG. 2, an avoidance space 117a may be formed in the tray plate 110a to avoid movement of the vertical movement means 130. That is, the tray plate 110a according to the present invention does not perform a vertical movement unlike the prior art, except that the vertical movement means (for moving the customer tray from the tray plate 110a or arranging the customer tray on the tray plate 110a). 130).

The avoidance space 117a is formed for vertical conveyance of the customer tray by the vertical movement means 130. The shape of the avoidance space 117a can be modified according to the shape of the transfer tray support part 133 of FIG. 3 included in the vertical moving means 130 to support the customer tray.

In addition, the tray supports 110a to 113d for supporting the customer tray may be formed in the tray plate 110a.

The tray supports 113a to 113d are configured to prevent rocking when the customer tray is raised or lowered by the vertical moving means 130.

To this end, the tray supports 113a to 113d may be formed to protrude on the tray plate 110a, and the customer tray may be disposed in a space formed by the protrusion of the tray supports 113a to 113d.

For example, only one customer tray may be disposed on the tray plate 110a. In this case, the customer tray may be disposed in a space formed by the tray supports 113a to 113d.

Also, for example, two or more customer trays may be arranged in parallel on the tray plate 110a according to a design variation of the multi stacker and a test handler linked thereto.

In this case, the number of the tray supports 113a to 113d may increase in correspondence with the parallel arrangement of the customer trays.

When two or more customer trays are arranged in parallel in this manner, each customer tray can be divided such that only semiconductor devices classified to a predetermined specific class can be arranged. Such a configuration can be used especially when the class of semiconductor devices is subdivided.

In addition, two or more customer trays may be vertically stacked on the tray plate 110a.

For example, after one customer tray is placed on the tray plate 110a from the test handler, another customer tray may be stacked again on the customer tray already placed on the tray plate 110a.

In this case, the tray supports 113a to 113d may support the customer tray according to such vertical stacking by, for example, increasing the protruding height.

In addition, the tray supports 113a to 113d may include various shapes for supporting the customer tray. For example, the tray supports 113a to 113d may have a concave groove shape, and a customer tray may be disposed in the groove.

Therefore, the shape of the tray support parts 113a to 113d may also be changed to correspond to the shape of the customer tray.

Referring back to FIG. 1, the vertical movement means 130 is a configuration for transferring a customer tray, that is, a transfer customer tray 190, which is a transfer target between the transfer position of the test handler and the plurality of tray plates 110a to 110f.

That is, the vertical movement means 130 moves the transfer customer tray 190 from the transfer position of the test handler to the corresponding tray plates 110a to 110f which are tray plates corresponding to the transfer customer tray 190 among the plurality of tray plates 110a to 110f. To move to the transfer position from the corresponding tray plate (110a to 110f) from the corresponding tray plate (110a to 110f) or to transfer to the transfer position Perform the descent exercise. In FIG. 1, the corresponding tray plates 110a to 110f are shown as tray plates 110a, but other tray plates may also be corresponding tray plates.

The transfer customer tray 190 may be, for example, a state in which a semiconductor device, in which a test is completed in a test handler and is classified by grade, is disposed. In this case, the transfer customer tray 190 is transferred to the transfer position by the test handler and then transferred to the corresponding tray plate 110a to 110f at the transfer position by the vertical moving means 130.

Each of the plurality of tray plates 110a to 110f may be classified according to the use or class of semiconductor device.

For example, good grade 1 in tray plate 110a, good grade 2 in tray plate 110b, good grade 3 in tray plate 110c, defective product in tray plate 110d, re-inspection is necessary. In this case, the tray plate 110f may be configured to be disposed on the tray plate 110f when a DUT-OFF occurs.

In this case, if the transfer customer tray 190 is in a state where a good grade 1 semiconductor element is disposed, the corresponding tray plate 110a to 110f becomes the tray plate 110a, and the vertical movement means 130 transfers the transfer customer. The tray 190 is transferred to the tray plate 110a at the transfer position.

On the other hand, the transfer customer tray 190 may be, for example, empty to accommodate semiconductor devices that have been tested in the test handler and classified according to the grade, or may be in a state where semiconductor devices that have not yet been tested in the test handler are disposed. .

In this case, the transfer customer tray 190 is transferred from the corresponding tray plate 110a to 110f to the transfer position by the vertical moving means 130, and then the test handler is tested on the transfer customer tray 190. The semiconductor device may be placed or the semiconductor device to be tested may be transferred from the transfer customer tray 190.

3 is an exemplary configuration diagram of the vertical movement means in the multi-stacker for the test handler according to the present invention.

Referring to FIG. 3, the vertical moving means 130 includes a transfer tray support 133 and a vertical moving part 137.

The transfer tray support unit 133 is configured to support the transfer customer tray so that a swing does not occur when the transfer customer tray is raised or lowered.

Referring to FIG. 3, the transfer customer tray support 133 may include a lower support structure 134 for supporting the transfer customer tray at the bottom of the transfer customer tray.

That is, as the lower support structure 134 rises, the transfer customer tray rises.

On the other hand, if the conveying customer tray is raised or lowered, fluctuations in the side may occur.

Accordingly, the transfer tray support 133 may include protrusions 135a to 135f supporting the transfer customer tray at the side of the transfer customer tray.

That is, it may be configured to protrude to a certain height from the end of the lower support structure 134 so that the movement of the transfer customer tray is limited in the space defined in the protrusions 135a to 135f.

Although six protrusions 135a to 135f are shown, the number of protrusions 135a to 135f may be changed according to design.

In addition, the shape of the transfer tray support 133 including the lower support structure 134 and the protrusions 135a to 135f may also be variously changed.

The vertical moving part 137 moves the transfer tray support part 133 in a vertical direction.

That is, the vertical moving part 137 is connected to the transfer tray support part 133, and the transfer tray support part 133 rises or descends according to the rising or falling of the vertical moving part 137. The conveying customer tray, which is supported by it, is also raised or lowered.

When the transfer tray support 133 supports the transfer customer tray at the bottom of the transfer customer tray, each of the plurality of tray plates 110a to 110f may have an avoidance space for moving the transfer tray support 133 therein. This may be referred to the description of the avoidance space 117a of FIG. 2 described above.

Meanwhile, as described above, the vertical movement means 130 moves the transfer customer tray from the transfer position of the test handler to any one of the corresponding tray plates 110a to 110f which is a tray plate corresponding to the transfer customer tray among the plurality of tray plates 110a to 110f. To raise or lower the transfer customer tray disposed on the corresponding tray plate 110a to 110f from the corresponding tray plate 110a to 110f to the transfer position, This upward or downward movement is substantially performed by the vertical moving part 137.

The vertical moving unit 137 may be implemented in the form of a ball screw, for example, or may be performed using a multi Z-axis robot capable of precise control.

The tray plate moving means 150 controls the positions of the plurality of tray plates 110a to 110f so that only the transfer customer tray is raised or lowered by the vertical moving means 130.

The tray plate moving means 150 may be configured in the following two forms according to the arrangement of the plurality of tray plates 110a to 110f.

First, a plurality of tray plates 110a to 110f initially disposed at a position where the raising or lowering is performed by the vertical moving means 130 avoids other tray plates except for the corresponding tray plates 110a to 110f. If it is.

In this case, the tray plate moving means 150 avoids other tray plates other than the corresponding tray plates 110a to 110f among the plurality of tray plates 110a to 110f to avoid interference with the vertical moving means 130. It is a structure for moving.

In other words, in the multi-stacker for the test handler according to the present invention, a plurality of tray plates 110a to 110f are included and used.

If, for example, the tray plate 110a is the corresponding plate among the plurality of tray plates 110a to 110f, the transfer customer tray is disposed on the tray plate 110a or the transfer customer tray is transferred from the tray plate 110a. When the other tray plates 110b to 110f exist in the movement trajectory of the vertical movement means 130 during the movement of the vertical movement means 130, the interference is impossible and the transfer of the transfer customer tray is impossible.

Therefore, the tray plate moving means 150 is configured to avoid other tray plates other than the corresponding tray plates 110a to 110f among the plurality of tray plates 110a to 110f.

An exemplary configuration of the tray plate moving means 150 includes a plurality of position moving parts (not shown) connected to each of the plurality of tray plates 110a to 110f to perform the above-mentioned avoiding movement, and a plurality of position moving. Of the plurality of tray plates 110a to 110f, the avoidance movement control unit controlling to perform the above-described avoidance movement only to the position moving units disposed corresponding to other tray plates except for the corresponding tray plates 110a to 110f. (Not shown).

That is, in the configuration of the tray plate moving means 150, the position moving parts are connected to each of the plurality of tray plates 110a to 110f so as to implement an avoiding movement, and the avoiding moving control unit controls the operations of the plurality of moving parts. Only one of the corresponding tray plates 110a-110f does not move and the other tray plates can be configured to perform the avoiding movement.

Each of the position shifters can be implemented, for example, via a cylinder (not shown) and an LM guide (not shown).

That is, a cylinder and a corresponding LM guide are disposed in each of the plurality of tray plates 110a to 110f.

In this case, the cylinder performs the forward or backward operation under the control of the avoidance movement controller, and the LM guide disposed corresponding to the cylinder performs the avoidance movement by the forward or backward of the cylinder.

Of course, it is also possible to return to the original position after the avoidance movement is performed.

In addition, the vertical movement means 130 may be moved to position the corresponding tray plate (110a to 110f) in the position where the lifting or lowering is performed.

In this case, the tray plate moving unit 150 is connected to each of the plurality of tray plates 110a to 110f to perform a position movement of each of the plurality of tray plates 110a to 110f (not shown). ) And a position movement control unit (not shown) which controls to perform position movement only with respect to the position movement units disposed corresponding to the corresponding tray plates 110a to 110f among the plurality of position movement units (not shown). It may include.

That is, the tray plate moving unit 150 controls only the corresponding tray plates 110a to 110f to be disposed at a position where the vertical plate moving unit 130 moves up or down.

Each of these position shifters can be implemented, for example, via a cylinder (not shown) and an LM guide (not shown).

That is, a cylinder and a corresponding LM guide are disposed in each of the plurality of tray plates 110a to 110f.

In this case, the cylinder performs the forward or backward operation under the control of the position movement control unit, and the LM guide disposed corresponding to the cylinder performs the avoidance movement by the forward or backward of the cylinder.

Of course, it is also possible to return to the original position after the position movement is performed.

Meanwhile, as described above, one or more customer trays may be stacked and disposed on the plurality of tray plates 110a to 110f.

In this case, the vertical movement means 130 must perform the ascending to the transfer position in consideration of the stack height of the customer tray, and the descending from the transfer position must also consider the stack height.

Therefore, the multi-stacker for test handlers according to the present invention includes a stack height detecting means (not shown) for detecting the stacked height when one or more customer trays are stacked and disposed corresponding to each of the plurality of tray plates 110a to 110f. It may further include.

The stack height detecting means detects the height of the customer trays stacked on the plurality of tray plates 110a to 110f by using a sensor configuration such as an RF sensor or an infrared sensor or a laser sensor. The height may also be converted to information indicating, for example, how many customer trays are stacked.

In this case, in consideration of the height stacked on the corresponding tray plate, the vertical movement means 130 may perform the rising or falling.

Meanwhile, the multi-stacker for the test handler according to the present invention may further include a management moving means (not shown) for moving the plurality of tray plates 110a to 110f for the recovery or insertion of the customer tray.

That is, the management moving means includes a plurality of tray plates 110a through which the test handler operator has moved or moved the entire tray plates 110a to 110f in order to insert or retrieve the customer tray into the multi-stacker for the test handler according to the present invention. It is a structure for moving 110f) to an original position.

Referring back to FIG. 1, six tray plates 110a to 110f are provided, and the transfer customer tray 190 is disposed on the tray plate 110a.

In addition, the vertical movement means 130 implemented using a multi-Z axis robot is provided at the bottom, the tray plate movement means 150 for performing the position movement corresponding to each of the six tray plates (110a to 110f) on the right side Is provided.

Tray to avoid other tray plates except the corresponding tray plate (110a to 110f) of the plurality of tray plates (110a to 110f) initially arranged in the position where the lifting or lowering is performed by the vertical moving means (130) Assume that the plate moving means 150 is configured.

In this case, in order to transfer the transfer customer tray 190 to the transfer position, the tray plates 110b to 110f other than the tray plate 110a as the corresponding tray plate are first avoided by the tray plate moving means 150.

In this case, the tray plate 110a is maintained as it is.

The vertical movement means 130 is then raised to support the transfer customer tray 190 disposed on the tray plate 110a and then lifted up again to transfer to the transfer position (not shown).

For example, in the case of the conventional configuration such as Korean Patent Publication No. 10-536473, the tray transfer is lowered to hold the transfer customer tray 190 and rises again, which complicates the configuration of the tray transfer and also causes the tray transfer to descend and rise. Time delays may occur.

However, in the case of the present invention, it is possible to transfer the transfer customer tray 190 to the transfer position by the upward movement by the vertical moving means 130, thereby minimizing time delay.

Also, although not shown, lowering the transfer customer tray 190 from the transfer position to the tray plate 110a, which is a corresponding tray plate, may also be performed by the vertical moving means 130.

Although not shown on the other hand, the multi-stacker for the test handler according to the present invention can be used in conjunction with the test handler.

That is, the test handler can be accommodated by the test handler multi-stacker according to the present invention only after transferring the customer tray on which the semiconductor devices classified by the grade are arranged to the transfer position in the unloading configuration. In addition, the test handler may be unloaded by receiving the customer tray from the multi-stacker for the test handler according to the present invention.

Therefore, compared with the conventional case, the structure of the transfer apparatus, such as a tray transfer, can be simplified.

Although the configuration of the present invention has been described in detail, these are merely illustrative of the present invention, and various modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. This will be possible.

Therefore, the embodiments disclosed herein are not intended to limit the present invention but to describe the present invention, and the spirit and scope of the present invention are not limited by these embodiments. It is intended that the scope of the invention be interpreted by the following claims, and that all descriptions within the scope equivalent thereto will be construed as being included in the scope of the present invention.

As described above, according to the present invention, a plurality of tray plates are provided while moving a customer tray by an operation of ascending from the tray plate position to the transfer position or descending from the transfer position to the tray plate position to minimize the test delay according to the moving time. Therefore, it is possible to cope with an increase in the classification level and increase the test efficiency by performing a position operation so that each of the plurality of tray plates does not interfere with the rising or falling of the customer tray. In addition, the test delay can be minimized unlike in the prior art even when the number of tray plates used is increased by classifying the semiconductor devices. In addition, when an additional off occurs, re-inspection is required, etc., the tray plate can be designated and used according to the use, thereby facilitating the test performance.

1 is an exemplary configuration diagram of a multi stacker for a test handler according to the present invention.

2 is an exemplary configuration of a tray plate in the multi-stacker for the test handler according to the present invention.

3 is an exemplary configuration diagram of the vertical movement means in the multi-stacker for the test handler according to the present invention.

<Description of the symbols for the main parts of the drawings>

110: tray plate 130: vertical moving means

150: tray plate moving means

Claims (20)

Multi-stacker used in test handlers, A plurality of tray plates on which one or more customer trays can be placed, The transfer customer tray disposed on the corresponding tray plate or for placing the transfer customer tray to be transferred from the transfer position of the test handler to a corresponding tray plate (which is a tray plate corresponding to the transfer customer tray among the plurality of tray plates); Vertical movement means for performing an upward or downward movement to move a from the corresponding tray plate to the transfer position; Tray plate moving means for controlling the position of the plurality of tray plates such that only the transfer customer tray is raised or lowered by the vertical moving means; Multi-stacker for a test handler comprising a. The method of claim 1, Administrative movement means for simultaneously moving said plurality of tray plates for recovery or insertion of said at least one customer tray Multi-stacker for a test handler, characterized in that it further comprises. The method of claim 1, Each of the plurality of tray plates has a tray support for arranging the one or more customer trays in parallel. Multi-stacker for a test handler comprising a. The method of claim 1, Wherein each of said plurality of tray plates comprises a tray support for vertically stacking said one or more customer trays. The method of claim 1, The transfer customer tray is a multi-stacker for a test handler, characterized in that the semiconductor device is classified by class is arranged. The method of claim 1, The transfer customer tray is a multi-stacker for a test handler, characterized in that no semiconductor element is placed or a semiconductor element to be tested is arranged. The method of claim 1, Each of the plurality of tray plate is a multi-stacker for a test handler, characterized in that divided by use. The method of claim 3, And each of the one or more customer trays disposed in the tray parallel support is divided such that only semiconductor devices classified into a specific class can be arranged. The method of claim 1, The vertical movement means, A transfer tray support for supporting the transfer customer tray; Vertical moving unit for moving the transfer tray support in the vertical direction Multi-stacker for a test handler comprising a. The method of claim 9, The transfer tray support includes a lower support structure for supporting the transfer customer tray at the bottom of the transfer customer tray, Each of the plurality of tray plates is a multi-stacker for a test handler, characterized in that the avoidance space for the movement of the transfer tray support is formed therein. The method of claim 10, The transfer tray supporter includes a protrusion for supporting the transfer customer tray at a side of the transfer customer tray. The method of claim 9, Wherein said vertical moving unit comprises a multi-Z axis robot. The method of claim 1, And the tray plate moving means avoids and moves other tray plates except the corresponding tray plate among the plurality of tray plates initially arranged at the position where the vertical moving means is to be moved up or down. The method of claim 13, The tray plate moving means, A plurality of position shifting units connected to each of the plurality of tray plates to perform the avoidance movement; An avoidance movement control unit controlling to perform the avoidance movement only with respect to the position shifters disposed corresponding to the other tray plates among the plurality of position shifters; Multi-stacker for a test handler comprising a. The method of claim 14, Each of the plurality of position shifters A cylinder that performs forward or reverse motion, LM guide for supporting each of the plurality of tray plates to perform the avoidance movement in accordance with the operation of the cylinder Multi-stacker for a test handler comprising a. The method of claim 1, And the tray plate moving means moves only the corresponding tray plate to a position at which the raising or lowering is performed by the vertical moving means. The method of claim 16, The tray plate position moving means, A plurality of position shifters connected to each of the plurality of tray plates to perform the position shift; A position movement control unit controlling to perform the position movement only with respect to the position movement unit disposed corresponding to the corresponding plate among the plurality of position movement units; Multi-stacker for a test handler comprising a. The method of claim 17, Each of the plurality of position shifters A cylinder that performs forward or reverse motion, LM guide for supporting each of the plurality of tray plates to perform the position movement in accordance with the operation of the cylinder Multi-stacker for a test handler comprising a. The method of claim 1, Further comprising a stack height detecting means for detecting the stacked height when the at least one customer tray is stacked and disposed corresponding to each of the plurality of tray plates, The vertical movement means is a multi-stacker for a test handler, characterized in that for performing the lifting or lowering movement in consideration of the stacked height sensed by the stacked height detecting means. As a test handler, A multi-stacker for test handlers according to any one of claims 1 to 19, A tray transfer device for transferring the transfer customer tray from the transfer position to the unloading performance configuration of the test handler or from the unloading performance configuration of the test handler to the transfer position Test handler, characterized in that it comprises a.

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