KR20090103535A - Method for fabricating EMI shielding filter and Structure of EMI shielding filter - Google Patents

Abstract

PURPOSE: A method for manufacturing an electrode for selective plating, a method for manufacturing an EMI shielding filter using the same, and an EMI shielding filter structure are provided to improve transparency and EMI shielding filtering effect by minimizing contamination, damage, or deterioration in a process. CONSTITUTION: A base substrate(100) with a mesh recess is formed in an upper part. The base substrate has an insulated transparent material. A first conductive layer is formed by depositing a first conductive material in the upper part of the base substrate. A dry etching process is performed while rotating the inclined base substrate. The first conductive layer of the remaining part except the bottom or the side of the recess is removed. An electroplating process is performed to fill a second conductive material in the recess using the first conductive layer remaining in the bottom of the recess as a seed layer.

Description

Method for fabricating EMI shielding filter and Structure of EMI shielding filter}

The present invention relates to a method of manufacturing an electromagnetic shielding filter and a structure of an electromagnetic shielding filter, and more particularly, to simplify transparency and prevent or minimize contamination, damage, or deterioration during a process, thereby improving transparency and electromagnetic shielding filtering effect. The present invention relates to a method for manufacturing an electromagnetic shielding filter and a structure of an electromagnetic shielding filter.

As the modern society is highly informationized, photo electronics-related parts and devices are remarkably advanced and widely distributed. Among them, display apparatuses for displaying images are widely used in televisions, computer monitors, and the like, and thinning is progressing at the same time as these displays are enlarged.

In particular, PDP (Plasma Display Panel) devices are in the spotlight as next-generation display devices because they can satisfy both size and thickness at the same time as CRTs representing conventional display devices. Such a PDP apparatus displays an image using a gas discharge phenomenon, and is widely used due to its excellent display capability such as display capacity, brightness, contrast, afterimage, viewing angle, and the like. In addition, the PDP device is easier to be enlarged than other display devices, and is considered to be a thin light emitting display device having the most suitable characteristics as a high quality digital television in the future.

In display devices such as PDP devices, electrostatic discharge and harmful electromagnetic waves have been pointed out as problems, and much discussion has been made on the blocking thereof.

The electromagnetic shielding filter for shielding electromagnetic radiation or electromagnetic radiation includes an electromagnetic shielding layer for shielding electromagnetic waves, and the electromagnetic shielding layer includes a transparent conductive film or a conductive mesh that maintains high transmittance and low reflectivity for visible light. (mesh) is mainly used. In the case of the electromagnetic wave shielding layer composed of the conductive mesh, it is known to exhibit excellent characteristics in shielding electromagnetic waves.

On the other hand, since the electromagnetic shielding filter is mounted on the front part of the panel assembly such as PDP, transparency must be satisfied.

The prior art for the electromagnetic shielding filter is Korean Patent No. 553587.

Korean Patent No. 553587 describes a method of forming a conductive metal foil on a transparent base film, forming a mesh of the metal foil through an etching process after performing a photo process. However, the method as described above requires a process such as a photoresist coating, an etching process, a developing process, and an etching process, so that the process is complicated. In addition, in the photo process, the base film may be attacked and the transparency may be impaired. That is, there is a problem that the base film may be contaminated or deteriorated. Therefore, research is being conducted on ways to minimize the damage of transparency while minimizing the process.

Accordingly, it is an object of the present invention to provide a method for manufacturing an electromagnetic shielding filter and a structure of an electromagnetic shielding filter which can overcome the above-mentioned conventional problems.

Another object of the present invention is to provide a method for manufacturing an electromagnetic shielding filter and a structure of the electromagnetic shielding filter, which can simplify the process.

Still another object of the present invention is to provide a method of manufacturing an electromagnetic shielding filter having excellent transparency and a structure of the electromagnetic shielding filter.

Still another object of the present invention is to provide a method of manufacturing an electromagnetic shielding filter having an improved electromagnetic shielding function and a structure of the electromagnetic shielding filter.

According to an embodiment of the present invention for achieving some of the technical problems described above, the method for manufacturing an electromagnetic shielding filter according to the present invention, has a transparent material insulated, a mesh structure with a predetermined depth and a predetermined width on the upper surface Forming a base substrate on which a recess is formed; Depositing a first conductive material on an upper surface of the base substrate to form a first conductive film; Performing a dry etching process in a state of rotating the base substrate at a predetermined angle to remove the first conductive film on the bottom and side portions of the recess or the remaining portions except the bottom surface of the recess. Wow; And performing an electroplating process so that the second conductive material fills the inside of the recess, using the first conductive layer remaining on the bottom surface of the recess as a seed layer.

The base substrate may have a polymer material.

The first conductive material or the second conductive material may be any one conductive material selected from a plurality of conductive materials including copper (Cu) and nickel (ni), and the first conductive material and the second conductive material. May be the same conductive material.

The first conductive film may be formed by deposition using a sputtering method of the first conductive material.

The dry etching process may be an ion etching process using argon (Ar) ions.

The inclination of the base substrate in the dry etching process step is determined based on an aspect ratio of the recess, and the inclination of the base substrate is equal to that of the first conductive film on the bottom surface of the recess. The first conductive film except for the inside of the recess may have an inclination such that the first conductive film is electrically separated through an etching process.

The base substrate may be formed through an imprint process.

The forming of the base substrate may include forming a master substrate having a mesh pattern protruding from an upper surface thereof; In a state where a certain resin mass is placed on one edge of the master substrate, by rolling in the direction of the other edge using a roller, a mesh-shaped recess is formed in a portion corresponding to the mesh pattern portion. Forming the base substrate; Separating the master substrate and the base substrate may be provided.

In another example, the forming of the base substrate may include forming a master substrate having a mesh pattern protruding from an upper surface thereof; A resin film having a predetermined thickness is disposed on the master substrate so as to cover the entire upper portion of the master substrate, and a portion corresponding to the mesh pattern portion of the resin film is formed by rolling and pressing the upper portion of the resin film. Forming a base substrate by forming a recess in the form of a mesh on the substrate; Separating the master substrate and the base substrate may be provided.

According to another embodiment of the present invention for achieving some of the above technical problems, the structure of the electromagnetic wave shielding filter according to the present invention has an insulating transparent material, a mesh structure with a predetermined depth and a predetermined width on the upper surface A base substrate having a recess formed therein; A first conductive film deposited on the bottom and side portions of the recess or on the bottom surface of the recess; A second conductive film having a shape filled in the recess is provided together with the first conductive film.

According to the present invention, there is an effect that a simple and qualitative electromagnetic shielding filter can be manufactured by performing an etching process and an electroplating process by tilting the base substrate without a separate photo process. In addition, it is possible to manufacture an electromagnetic wave shielding filter having excellent transparency and excellent electromagnetic wave shielding characteristics.

1 illustrates a structure of a base substrate for manufacturing an electromagnetic shielding filter according to an embodiment of the present invention.

2 to 7 are process cross-sectional views representing the manufacturing process of the electromagnetic wave shielding filter according to an embodiment of the present invention, in the order of processing based on the cross section of AA ′ of FIG. 1,

8 is a view showing the structure of the electromagnetic shielding filter completed by the process of FIGS.

9 to 12 are process flowcharts showing a first embodiment of the base substrate formation of FIG.

13 to 16 are process flowcharts illustrating a second embodiment of forming the base substrate of FIG. 1.

* Description of the symbols for the main parts of the drawings *

100: base substrate 110: first conductive film

120: second conductive film

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, without any other intention than to provide a thorough understanding of the present invention to those skilled in the art.

1 illustrates a structure of a base substrate for manufacturing an electromagnetic shielding filter according to an embodiment of the present invention.

As shown in FIG. 1, the base substrate 100 constituting the electromagnetic shielding filter according to the exemplary embodiment of the present invention has an insulated transparent material and has a mesh-shaped recess on an upper surface thereof. Or a groove (hereinafter referred to as a recess) is formed. In other words, recesses are formed on the upper surface of the base substrate 100 at predetermined intervals, and the recesses are connected to each other to have a mesh structure. At this time, the portion protruding by the recess has a structure in which pillars of a predetermined shape (for example, a square) have a height corresponding to the depth of the recess, and are arranged adjacent to each other at a predetermined interval corresponding to the width of the recess. Have

Here, the width or depth of the recess may have a value of about 10 μm. In addition, the width of the pillars may have a value of about 260 μm. Summarizing the structure of the upper surface of the base substrate 100 by reflecting the above values, the square pillars having a length of about 260 μm in length and about 10 μm in height, and having a distance of about 10 μm It can be represented as having a structure arranged in all directions with the intervening. When expressed based on the recess, the recess having a width and depth of about 10 μm may be represented as having a structure in which a mesh is formed. Here, when the recess is filled with a conductive material, the conductive materials will have a structure electrically connected to each other.

The base substrate 100 may be any material as long as it has a transparent material and can be processed by heat or ultraviolet rays. For example, it may have a glass or a polymer material.

The base substrate 100 may be formed through an imprint process. A method or a process of manufacturing the base substrate 100 will be described with reference to FIGS. 9 through 16.

2 to 7 are process cross-sectional views illustrating a manufacturing process of an electromagnetic wave shielding filter according to an embodiment of the present invention, based on a cross section of AA ′ of FIG. 1.

In the following drawings, the base substrate 100 is hatched and may be confused with a non-transparent material, but this is merely to facilitate identification on the drawing.

2 is a cross-sectional view of the AA ′ of FIG. 1 as it is. As shown in FIG. 2, a base substrate 100 having a recess formed in a mesh structure is prepared for manufacturing an electromagnetic shielding filter according to an exemplary embodiment of the present invention.

As shown in FIG. 3, a first conductive material is deposited on the base substrate 100 to form a first conductive film 110.

The first conductive material may be used as long as it is a metal having excellent electrical conductivity and processability, including copper (Cu), nickel (Ni), silver (Ag), and gold (Au). In the present invention, the first conductive film 110 is formed by depositing copper (Cu) or nickel (Ni) in consideration of process convenience and cost competitiveness.

Deposition of the first conductive material may be used a variety of deposition methods well known to those skilled in the art. For example, a sputtering method can be used. The sputtering method is advantageous in controlling the film thickness to be deposited and in the multilayer stacking. The equipment or method of using the equipment for the sputter deposition is well known to those skilled in the art to which the present invention pertains and description thereof will be omitted.

As shown in FIG. A dry etching process is performed on the base substrate 100 on which the first conductive film 110 is formed. The etching process is performed while rotating the base substrate 100 while tilting the base substrate 100 at a predetermined angle. The reason for rotating the base substrate 100 is to make the etching uniform throughout.

The dry etching process may be an ion etching process using ions such as argon (Ar). In addition to the argon (Ar), ion etching through other ions may be performed.

The reason for performing the etching process while rotating the base substrate 100 at a predetermined angle is that the first conductive film (112 in FIG. 5) of the bottom surface of the recess and the portion excluding the inside of the recess ( For example, this is to electrically separate the first conductive film deposited on the upper surface of the square pillar. Therefore, after the etching process, the first conductive film may remain on a part of the side surface including the bottom surface of the recess. However, the etching may be performed in a direction such that most of the first conductive film 112 of FIG. 5 remains on the bottom surface of the recess. This is because if the first conductive film remaining on the bottom surface of the recess is small, the formation of the second conductive film (120 in FIG. 6) of the subsequent process may not be performed properly.

The inclination (tilt angle) of the base substrate 100 is determined to correspond to the aspect ratio of the recess.

When it is assumed that the advancing direction of argon ions generated for etching in the ion etching process is the arrow direction of FIG. 4, the inclination of the base substrate 100 includes a portion of the side surface of the recess, the base substrate ( The top surface of 100) may have a slope enough for ions to reach. When the recess has a width and depth as described above, the recess may have an inclination θ of about 5 to 45 degrees with respect to the floor. This is merely a numerical value, and the slope of the base substrate 100 varies depending on the width or depth of the recess, the process is changed, the direction of movement of the ions for etching, or the etching conditions are changed as necessary. Can be changed.

Here, since the first conductive film (114 in FIG. 5) deposited on the edge portion (edge portion) of the base substrate 100 should be used as an electrode for electroplating in a subsequent process, it is removed through the etching process. No. Therefore, when there is a concern that the etching process may be removed through a separate taping process or other etching prevention process, the first conductive film deposited on the edge portion (edge portion) of the base substrate 100 (114 in FIG. 5). ) Will need to be removed.

By using the etching method as described above, the photo process and the like used in the prior art can be omitted, thereby simplifying the process. In addition, it is possible to prevent or minimize contamination, damage, deterioration, etc. of the base substrate 100 according to the photo process.

5 shows the structure after the etching process is performed.

As illustrated in FIG. 5, the first conductive layer 114 except for the first conductive layer 114 at the edge of the base substrate 100 and the first conductive layer 112 at the bottom of the recess is removed. It is. In this case, residues of the first conductive layer 110 may remain on a portion of the side of the recess, and the first conductive layer 110 may also be disposed on the upper surface (parts except the bottom and side of the recess) of the base substrate 100. May leave some residue. These residues can naturally be resolved in subsequent processes. This will be described later.

As illustrated in FIG. 6, the etching process is performed to perform an electroplating process on the base substrate 100 on which portions 112 and 114 of the first conductive film 110 exist. Since the first conductive films 112 and 114 existing on the base substrate 100 are electrically connected as a whole, the second conductive material is formed by using the first conductive film 114 at the edge portion of the base substrate 100 as an electrode. It is possible to perform the electroplating process using.

The electroplating process may be performed by applying electricity (flowing current) while the base substrate 100 is immersed in a plating liquid made of the second conductive material. In this case, the first conductive layer 112 existing at the bottom of the recess becomes a seed layer.

Since the first conductive film 112 existing at the bottom of the recess and the first conductive film 114 at the edge of the base substrate 100 have a structure electrically connected to each other, they are present at the bottom of the recess. The second conductive material is deposited through the first conductive film 112, that is, the seed layer, to fill the inside of the recess. The electroplating process continues until the second conductive material fills the interior of the recess. As a result, a second conductive layer 120 having a shape filling the recess is formed. In this case, the second conductive film 120 has a mesh structure in the same shape as that of the recess. That is, the second conductive film 120 is formed to have the same structure as the conductive mesh generally known to constitute the electromagnetic wave shielding filter.

After the formation of the second conductive film 120, an additional process such as cleaning the base substrate 100 including the second conductive film 120 may be necessary.

The second conductive material may be any conductive material capable of electroplating. For example, copper (Cu) or nickel (Ni) may be used.

The first conductive material and the second conductive material may be the same material. When the second conductive material is the same conductive material as the first conductive material in the electroplating process, the second conductive material may remain on the upper surface (parts except the bottom and side of the recess) of the base substrate 100. Residues of the first conductive film 110 may be removed. For example, when the first conductive material is copper (Cu) and the electroplating process is an electroplating process using a copper plating solution, residues of the first conductive film 110 are dissolved in the copper plating solution to be naturally removed. You can do that. Residues remaining on the side of the recess may be dissolved in the copper plating solution, but in this case, since the inside of the recess is filled with the second conductive material, it may not necessarily be removed.

As shown in FIG. 7, after the formation of the second conductive film 120, the base substrate 100 is removed by removing the first conductive film 114 existing at an edge of the base substrate 100. And an electromagnetic wave shielding filter having the mesh structure of the second conductive film as a component.

FIG. 8 is a perspective view of an electromagnetic shielding filter completed by the process illustrated in FIGS. 2 to 7.

As shown in FIG. 8, the electromagnetic shielding filter includes a base substrate 100 and a second conductive film 120 that is a conductive mesh.

The electromagnetic shielding filter has a structure in which a second conductive film 120 is filled in a recess of a mesh structure of the base substrate 100. Therefore, the second conductive film 120 constitutes a conductive mesh. The second conductive layer 120 includes a portion 112 of the first conductive layer 110.

As described above, according to the present invention, the electromagnetic wave shielding filter can be manufactured simply and qualitatively by performing the etching process and the electroplating process by tilting the base substrate without a separate photo process.

9 to 16 are process flowcharts illustrating a method of forming the base substrate 100 using an imprint process.

Hereinafter, in the drawings, the base substrate 100 and the resin may be hatched or hatched, which may be confused with a non-transparent material. However, this is merely to facilitate identification on the drawings.

9 to 12 are process flowcharts illustrating a first embodiment of the base substrate 100, and FIGS. 13 to 16 are process flowcharts illustrating a second embodiment of the base substrate 100.

As shown in FIG. 9, according to the first embodiment of forming the base substrate 100, in order to form the base substrate 100, first, a master substrate 200 must be formed.

The master substrate 200 has a structure in which a mesh pattern of a metal material is formed on an upper surface thereof.

The formation process of the master substrate 200 is as follows.

First, a pattern is formed by applying photoresist to a silicon substrate, followed by an exposure and development process. The pattern will be a mesh pattern. Thereafter, a seed metal (eg, nickel) film is deposited on the silicon substrate on which a predetermined pattern is formed. Thereafter, the base of the master substrate is formed by using an electroplating process through the seed metal. Thereafter, the base of the silicon substrate and the master substrate are separated, and the master substrate 200 is completed by etching the photoresist and the seed metal.

Thereafter, when the pattern formation surface of the master substrate 200 is viewed as the upper surface, a resin lump 102 of polymer or the like is positioned on one edge of the upper surface of the master substrate 200.

As shown in FIG. 10, a base film 210 of PET (Poly-Ethylen Terephthalate) material having a structure covering the entirety of the master substrate 200 is disposed on the resin mass 102. The upper surface is rolled in the direction of the other edge to the one edge portion where the resin lump 102 is located by using the roller 220. At this time, the process of melting the resin lump 102 by applying ultraviolet rays or heat may be performed at the same time.

As shown in FIG. 11, the micro pattern of the master substrate 200 is transferred to the resin by the rolling process. That is, the base substrate 100 having the recess micro pattern of the mesh structure is formed on one surface.

As shown in FIG. 12, the master substrate 200 and the base substrate 100 are separated to complete the base substrate 100 having a structure as shown in FIG. 1.

As shown in FIG. 13, according to the second embodiment of forming the base substrate 100, a photoresist pattern 330 is formed on the silicon substrate 300 using a photo process.

The photoresist pattern 330 may have a mesh pattern structure protruding upward. Here, the entire silicon substrate 300 on which the photoresist pattern 330 is formed will be referred to as a master substrate.

As shown in FIG. 14, the resin film 302 and PET having a predetermined thickness are formed to cover the entire upper portion of the photoresist pattern 330 on the silicon substrate 300 on which the photoresist pattern 330 is formed. A base film 310 made of Poly-Ethylen Terephthalate (Poly-Ethylen Terephthalate) material is positioned, and a rolling and pressing process is performed on the resin film 302 and the base film 310. At this time, the process of melting the resin film 302 by applying ultraviolet rays or heat may be performed at the same time.

As shown in FIG. 15, the photoresist pattern is transferred to the resin film 302 by the rolling and pressing process. That is, a recess in the form of a mesh is formed at a portion corresponding to the mesh pattern portion of the resin film 302. The resin film 302 to which the fine pattern is transferred is completed to the base substrate 100.

As shown in FIG. 16, the base substrate 100 is separated from the silicon substrate 300 on which the photoresist pattern 330 is formed to complete the base substrate 100 having a structure as shown in FIG. 1. do.

In addition to the method of forming the base substrate 100 described above, the base substrate may be formed by various imprint methods well known to those skilled in the art.

The description of the above embodiments is merely given by way of example with reference to the drawings for a more thorough understanding of the present invention, and should not be construed as limiting the present invention. In addition, it will be apparent to those skilled in the art that various changes and modifications can be made without departing from the basic principles of the present invention.

Claims (15)

In the method of manufacturing an electromagnetic shielding filter: Forming a base substrate having an insulated transparent material and having a recess having a mesh structure at a predetermined depth and a predetermined width on an upper surface thereof; Depositing a first conductive material on an upper surface of the base substrate to form a first conductive film; Performing a dry etching process in a state of rotating the base substrate at a predetermined angle to remove the first conductive film on the bottom and side portions of the recess or the remaining portions except the bottom surface of the recess. Wow; And using the first conductive film remaining on the bottom surface of the recess as a seed layer, performing an electroplating process so that a second conductive material fills the inside of the recess. Method of manufacturing electromagnetic shielding filter. The method according to claim 1, The base substrate is a method of manufacturing an electromagnetic shielding filter, characterized in that it has a polymer (polymer) material. The method according to claim 1 The first conductive material or the second conductive material is a method for manufacturing an electromagnetic shielding filter, characterized in that any one of a conductive material selected from a plurality of conductive materials including copper (Cu) and nickel (Ni). The method according to claim 3, The first conductive material and the second conductive material is a manufacturing method of the electromagnetic shielding filter, characterized in that the same conductive material. The method according to claim 4, The first conductive film is a method of manufacturing an electromagnetic shielding filter, characterized in that formed through the deposition using a sputtering (sputtering) method of the first conductive material. The method according to claim 1, The dry etching process is a method of manufacturing an electromagnetic shielding filter, characterized in that the ion (ion) etching process using argon (Ar) ions. The method according to claim 6, The slope of the base substrate in the dry etching process step, characterized in that determined on the basis of the aspect ratio (aspect ratio) of the recess. The method according to claim 7, The inclination of the base substrate has an inclination such that the first conductive film of the bottom surface of the recess and the first conductive film of the portion except the inside of the recess are electrically separated from each other through an etching process. A method of manufacturing an electromagnetic shielding filter. The method according to claim 1, The base substrate is a method of manufacturing an electromagnetic shielding filter, characterized in that formed through an imprint (imprint) process. The method of claim 9, wherein the forming of the base substrate, Forming a master substrate having a mesh pattern protruding from an upper surface thereof; In a state where a certain resin mass is placed on one edge of the master substrate, by rolling in the direction of the other edge using a roller, a mesh-shaped recess is formed in a portion corresponding to the mesh pattern portion. Forming the base substrate; And separating the master substrate and the base substrate. The method of claim 9, wherein the forming of the base substrate, Forming a master substrate having a mesh pattern protruding from an upper surface thereof; A resin film having a predetermined thickness is disposed on the master substrate so as to cover the entire upper portion of the master substrate, and a portion corresponding to the mesh pattern portion of the resin film is formed by rolling and pressing the upper portion of the resin film. Forming a base substrate by forming a recess in the form of a mesh on the substrate; And separating the master substrate and the base substrate. In the structure of the electromagnetic shielding filter: A base substrate having an insulated transparent material and formed with a recess having a mesh structure at a predetermined depth and a predetermined width on an upper surface thereof; A first conductive film deposited on the bottom and side portions of the recess or on the bottom surface of the recess; And a second conductive film having a shape filled in the recess together with the first conductive film. The method according to claim 12, The base substrate is a structure of the electromagnetic shield filter, characterized in that having a polymer (polymer) material. The method according to claim 12 The structure of the electromagnetic shielding filter, characterized in that the first conductive film or the second conductive film is composed of one conductive material selected from a plurality of conductive materials including copper (Cu) and nickel (Ni). The method according to claim 14, The first conductive film and the second conductive film structure of the electromagnetic shielding filter, characterized in that the same material.