KR20090081718A - Picker system of test handler - Google Patents

Abstract

A picker system of a test handler is provided to adjust an X-pitch of a column direction and a Y-pitch of a row direction simultaneously in order to increase feeding speed of semiconductor devices. A picker system of a test handler includes a plurality of pickers, a first guide unit, a second guide unit, a first pitch adjusting plate and a second pitch adjusting plate. The pickers(110) are arranged in a matrix type and pick up semiconductor devices. The first guide unit(120) connects the pickers in unit of a row and guides row direction movement of the pickers. The second guide unit(130) connects the pickers in unit of a column and guides column direction movement of the pickers. A first pitch adjusting plate(140) has a plurality of rails which extend in different directions in order to adjust column direction X-pitch of the pickers. The second pitch adjusting plate(150) has a plurality of rails which extend in different directions in order to row direction Y-pitch of the pickers.

Description

Picker system of test handler

The present invention relates to a test apparatus for a semiconductor device, and more particularly, to a picker system of a test handler for testing semiconductor devices.

In general, semiconductor devices such as volatile or nonvolatile memory devices and system large-scale integration (LSI) circuit elements are shipped after their operating characteristics are examined through various test procedures.

A test handler transfers the semiconductor devices to a test chamber to inspect the semiconductor devices. In particular, the semiconductor devices to be inspected are transferred from the customer tray to the test tray, and the semiconductor devices inspected in the test chamber are transferred from the test tray to the customer tray via the buffer tray.

Such a test handler may have a picker system for transferring semiconductor devices between the trays. The picker system includes a plurality of pickers so as to be able to transfer a plurality of semiconductor devices at the same time in order to shorten the time required to transport the semiconductor devices in recent years.

Here, the arrangement structure of the pickers in the picker system has a structure corresponding to the arrangement structure of the sockets provided for storing the semiconductor device in the trays.

However, since the pitches of the sockets in which the semiconductor devices are accommodated are not equal to each other, the customer trays, the buffer trays, and the test trays do not adjust the pitches of the pickers in response to the trays. There is a need for a pitch control device.

In particular, as the number of pickers increases, a picker system having a simple structure and a pitch adjusting device capable of effectively adjusting the pitch of pickers is required.

In view of the above mentioned problems, one problem to be solved by the embodiments of the present invention is to increase the feed rate of semiconductor devices in a test handler for testing semiconductor devices. It is to provide a picker system that can adjust the pitch at the same time.

In order to achieve the object of the present invention, the picker system of the test handler according to the present invention includes pickers, first guide parts, second guide parts, first pitch adjustment plate and second pitch adjustment plate. The pickers are arranged in a matrix and serve to pick up a semiconductor device. The first guide parts connect the pickers in a row unit, and guide the movement of the pickers in a row direction. The second guide parts connect the pickers in units of rows and guide the movement of the pickers in the column direction. The first pitch adjustment plate has a plurality of first trajectories extending in different directions to adjust the column direction X-pitch of the pickers, and the first guide portions are configured to operate along the first trajectories. The second pitch adjustment plate has a plurality of second trajectories extending in different directions to adjust the row direction Y-pitch of the pickers, and the second guide portions are configured to operate along the second trajectories.

According to one embodiment of the invention, the first pitch adjustment plate is formed with a plurality of first slots to function as the first trajectories, the end of the first guide portion is disposed in the first slots, respectively, The second pitch adjusting plate may include a plurality of second slots that function as the second tracks, and end portions of the second guide parts may be disposed in the second slots, respectively.

According to another embodiment of the present invention, each of the first guide parts is provided at its end, and includes a first roller in contact with the inner surface of the first slot formed in the first pitch adjustment plate, the second guide parts Each may be provided at its end, and may include a second roller in contact with the inner surface of the second slot formed in the second pitch adjustment plate.

According to another embodiment of the present invention, the first guide portion is disposed at both ends, respectively, and guides the first guide portion to move in the column direction when the first guide portion is moved by the lifting of the first pitch adjustment plate A second guide member disposed at both ends of a first guide member and the second guide portion, and guiding the second guide portion to move in a row direction when the second guide portion is moved by lifting and lowering the second pitch adjustment plate; It may further include.

According to another embodiment of the present invention, a structure surrounding the plurality of pickers arranged in the matrix form, the first frame and the first guide member and the second guide member is installed, and the upper surface of the first frame It may further include a second frame connected to the circumference, the first frame and the second pitch adjustment plate arranged to be movable.

According to another embodiment of the present invention, the pickers include third rollers installed at an upper end thereof, the second guide parts include slots extending in a column direction, and the third rollers are arranged in the second roller. It is located in the slots of the guide parts.

According to another embodiment of the present invention, each of the first guide parts may include a linear motion (LM) guide for reducing friction when the pickers connected in a row unit move in a row direction.

According to another embodiment of the present invention, the driving unit for elevating the first pitch adjusting plate and the second pitch adjusting plate in order to adjust the column direction X-pitch and row direction Y-pitch of the pickers. .

According to still another embodiment of the present invention, a moving part which is provided adjacent to both ends of the first pitch adjustment plate, one end of the first pitch adjustment plate and one end of the second pitch adjustment plate, and The driving unit may further include a connection unit connecting the driving unit and the moving unit to lift and lower the first pitch adjusting plate and the second pitch adjusting plate by the driving force. Herein, the driving part is connected to the first pitch adjusting plate and the second pitch adjusting plate through the moving part and the connecting part.

According to another embodiment of the present invention, the driving portion is located adjacent to both ends of the second guide portion, respectively, the connecting portion is the first driving force so that the driving force of each driving portion can be simultaneously transmitted to both ends of the second pitch adjustment plate Two moving parts located at both ends of the pitch adjustment plate can be connected together.

According to another embodiment of the present invention, it may further include an elastic member installed between each of the second guide parts to impart an elastic force between the second guide parts.

According to another embodiment of the present invention, it is located above the second guide portion and extends in the row direction, the vacuum line for applying a vacuum force to the pickers to prevent the tangled by the movement of the pickers The apparatus may further include an anti-entanglement unit that groups the vacuum lines in rows.

The picker system of the test handler according to the present invention configured as described above can adjust the column X-pitch and the row Y-pitch at the same time in adjusting the pitch between the plurality of pickers for picking up the semiconductor device. The pitch of the pickers can be easily adjusted so as to correspond to them, and thus the transfer time of the semiconductor device can be shortened.

Hereinafter, with reference to the accompanying drawings will be described in detail with respect to the picker system according to an embodiment of the present invention. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. In describing the drawings, similar reference numerals are used for similar elements. In the accompanying drawings, the dimensions of the structures are shown to be larger than the actual for clarity of the invention, or to reduce the scale than the actual to illustrate the schematic configuration. Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described on the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, parts, or combinations thereof.

On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

1 is a schematic diagram illustrating a test handler having a picker system according to an embodiment of the present invention.

Referring to FIG. 1, the picker system 100 according to an embodiment of the present invention may be applied to a test handler for testing semiconductor devices. In particular, the picker system 100 can be used to transfer semiconductor devices between the trays, for example, between the customer tray 12 and the test tray 14 within the test handler. It may also be used to transfer semiconductor devices between the test tray 14 and the buffer tray (not shown), or between the buffer tray (not shown) and the customer tray 12.

That is, the test handler may include the picker system 100 to transport the semiconductor devices between the customer trays 12 and the customer trays 12 and the test tray 30 in which the semiconductor devices to be tested are accommodated. have.

Although not shown in detail, the customer tray 12 may be moved upward by horizontal and vertical conveying devices, and the semiconductor devices housed in the customer tray 12 may be moved by the picker system 100 to the test tray 14. Can be loaded.

The picker system 100 may include a plurality of pickers (not shown) arranged in a plurality of rows and columns, and the pickers may pick up semiconductor devices using vacuum pressure. The picker system 100 may be configured to be movable on a horizontal plane by adopting a driving method of a Cartesian coordinate robot.

Hereinafter, with reference to the drawings will be described in detail with respect to the picker system 100 of the test handler according to an embodiment of the present invention.

2 is a schematic plan view illustrating a picker system according to an exemplary embodiment of the present invention, FIGS. 3 and 4 are side views of the picker system of FIG. 2 as viewed from the A and B directions, and FIGS. 5 and 6 are FIGS. A cross-sectional view taken along lines II ′ and II-II ′ of FIG. 7, and FIG. 7 is a diagram for describing a driving unit included in the picker system of FIG. 2.

Here, in order to simplify the drawings illustrated in FIGS. 2 to 7 to help the understanding of the drawings, the members illustrated in one of the drawings may be omitted from other drawings. That is, only the components necessary for helping the understanding of the structure of the picker system 100 are shown.

2 to 7, the picker system 100 according to an embodiment of the present invention includes a plurality of pickers 110 for picking up a semiconductor device, and a plurality of guides for guiding row movement of the pickers 110. First guide portions 120, a plurality of second guide portions 130 for guiding the column movement of the pickers 110, and a first X-pitch for adjusting the column directions of the pickers 110. A pitch adjusting plate 140 and a second pitch adjusting plate 150 for adjusting the row direction Y-pitch of the pickers 110.

The plurality of pickers 110 are arranged in a matrix form. That is, the plurality of pickers 110 are arranged in the form of a plurality of rows and columns. For example, the plurality of pickers 110 may be arranged in a matrix form of eight rows and four columns. However, the arrangement of the pickers 110 is not limited to an eight-row, four-column matrix, and the number of rows and columns may vary.

The pickers 110 may be used to pick up semiconductor devices using a vacuum pressure, and each of the pickers 110 may be configured to move up and down a portion for contacting the semiconductor device with vacuum suction.

Meanwhile, the plurality of pickers 110 arranged in a matrix form is surrounded by the first frame 102. That is, the first frame 102 has a structure enclosing a matrix form, for example, the first frame 102 has a rectangular plate structure, an opening in which the plurality of pickers 110 are located at the center thereof. It may have a plate shape having.

In addition, a second frame 104 may be connected to an upper surface of the first frame 102. The second frame 104 has a skeleton structure, and will be located inside the first pitch adjustment plate 140 and the second pitch adjustment play 150 to be described below. The second frame 104 may be defined as a frame for installing each member including the first pitch adjusting plate 140 and the second pitch adjusting plate 150. Thus, the second frame 104 may have a variety of shapes, and although not shown in detail, the second frame 104 may have a box structure with an opening, for example.

The plurality of first guide parts 120 extend in a row direction and connect the pickers 110 arranged in a matrix form in a row unit. In addition, the first guide parts 120 guide the row direction movement of the pickers 110 connected in units of rows. That is, the first guide parts 120 serve to guide the pickers 110 connected to each of the first guide parts 120 in a row direction while grouping the pickers 110 in a row unit. .

For example, each of the first guide parts 120 may include a first bracket 120a extending in a row direction, and the pickers 110 may be mounted in a direction perpendicular to the first bracket 120a. Can be. At this time, the first bracket 120a may be substantially connected to the pickers 110 and linear motion (LM) guides may be used to reduce friction when the pickers 110 move in a row direction. 122, for example linear bearings) can be installed. The linear motion guide (LM guide) 122 extends in the row direction on the first bracket 120a and is installed to correspond to the row direction moving area of the picker 110.

Meanwhile, the pickers 110 may be connected to the first guide parts 120 by screwing. As a result, when any one of the pickers 110 is damaged and a malfunction occurs in the pick-up operation of the semiconductor device, only the damaged picker 110 may be selectively separated and replaced.

Both ends of the first guide parts 120 are positioned on an upper surface of the first frame 102. For example, both ends of the first bracket 120a may be connected to a first extension part 120b positioned on an upper surface of the first frame 102. A first guide member 102a for reducing friction is provided between both ends of the first guide parts 120, that is, between the first extension part 120b and the top surface of the first frame 102. The first guide member 102a serves to guide the first guide part 120 to be movable in the column direction while maintaining both ends of the first guide part 120 on the first frame 102. Do it. As a result, the first guide portion 120 can be moved in the column direction in a state where both ends are connected to the first frame 102 by the first guide member 102a.

The plurality of second guide parts 130 extend in a column direction and connect the pickers 110 arranged in a matrix form in columns. In addition, the second guide parts 130 guide the column direction movement of the pickers 110 connected in units of columns. That is, the second guide parts 130 serve to guide the pickers 110 connected to each of the second guide parts 130 to move in the column direction while grouping the pickers 110 in a row unit. .

For example, each of the second guide parts 130 may include a second bracket 130a extending in a column direction, and upper portions of the pickers 110 may be connected to the bracket 130a. To this end, a lower portion of the second bracket 130a is provided with a slot extending in the column direction, and each of the pickers 110 is accommodated in a slot of the second bracket 130a on an upper side thereof. And a third roller 114 in contact with the. That is, the pickers 110 and the second guide part 130 are connected to each other by the third roller 114 being positioned in the slot of the second bracket 130a. The third roller 114 is rotatably installed at the upper end of each of the pickers 110, and the second pickers 110 are guided in the column direction by the second guide parts 130. It serves to reduce the frictional force with the guide portion 130 to easily slide.

Both ends of the second guide parts 130 are positioned on an upper surface of the first frame 102. For example, second extension parts 130b positioned on the upper surface of the first frame 102 may be connected to both ends of the second bracket 130a. A second guide member 102b is provided between both ends of the second guide parts 130, that is, the second extension part 130b and the upper surface of the first frame 102 to reduce frictional force. The second guide member 102b serves to guide the second guide part 130 to move in a row direction while maintaining both ends of the second guide part 130 on the first frame 102. . As a result, the second guide portion 130 can be moved in a row direction in a state where both ends thereof are connected to the first frame 102 by the second guide member 102b.

On the other hand, the second bracket (130b) of the second guide portion 130 may be connected in a form bent downward to both ends of the second bracket (130a). In addition, the second bracket 130a and the second extension part 130b may be integrally formed.

The first pitch adjustment plate 140 may be installed at an end of the first guide portion 120 to be elevated, and may be installed at both ends of the first guide portion 120, respectively. The first pitch adjusting plate 140 has a plurality of first tracks 142 extending in different directions to adjust the column direction X-pitch of the pickers 110. End portions of the first guide parts 120 are positioned. For example, the pitch of the first tracks 142 may be narrower toward the upper portion, and the difference between the first tracks 142 may be increased toward the lower portion thereof.

For example, the first pitch adjustment plate 140 may be formed with a plurality of first slots that function as the first tracks 142. End portions of the first guide parts 120 are disposed in the first slots, respectively. Here, since the sockets provided in the trays to accommodate the semiconductor devices are grouped by two rows, the first tracks may be formed adjacent to each other. That is, the pitches between the two groups forming the first tracks 142 may have a shape in which the pitch of each group is adjusted in the same state.

The first pitch adjustment plate 140 adjusts the column direction X-pitch of the pickers 110 by, for example, lifting and lowering movement. In detail, the first guide parts 120 connected to the first tracks 142 are moved along the first tracks 142 by the lifting movement. That is, since the first guide parts 120 are moved in parallel by the first guide member 102a, the first guide parts 120 move in parallel in the column direction along the first track 142 so that the pitch is narrowed or widened.

As a result, the pitch between the first guide portion 120 is adjusted according to the lifting and lowering of the first pitch adjustment plate 140, whereby the position of the pickers 110 connected by the first guide portion 120. Is changed in the column direction, thereby adjusting the column direction x-pitch of the pickers 110.

That is, the first pitch adjustment plate 140 serves to adjust the x-pitch of the pickers 110 by lifting and lowering driving.

Meanwhile, when the first guide parts 120 are moved along the first tracks 142 by the lifting and lowering of the first pitch adjusting plate 140, the first track 142, that is, within the first slot. A friction force is generated between the first guide parts 120 and the first tracks 142 while contacting the side surface. In order to reduce the frictional force, first rollers 124 are installed at both ends of the first guide parts 120. The first rollers 124 are rotatably installed at both ends of the first guide parts 120, and are substantially positioned in the first tracks 142.

The second pitch adjustment plate 150 may be installed at an end of the second guide part 130 to be elevated, and may be respectively installed at both ends of the second guide parts 130. The second pitch adjustment plate 150 has a plurality of second trajectories 152 extending in different directions to adjust the row direction Y-pitch of the pickers 110. End portions of the second guide portions 130 are positioned.

For example, the second tracks 152 may be formed in a form in which the pitch thereof becomes narrower toward the upper side and the pitch thereof becomes wider toward the lower side. In addition, any one of the plurality of second tracks 152 located inside of the second track 152 has a shape extending in the vertical direction, and the other second track 152 based on the other The pitch of the two trajectories 152 may be formed in a variable shape.

For example, the second pitch adjusting plate 150 may be formed with a plurality of second slots that function as the second tracks 152. Ends of the second guide parts 130 are disposed in the second slots, respectively.

The second pitch adjustment plate 150 adjusts the row direction Y-pitch of the pickers 110 by, for example, lifting and lowering movement. In detail, the second guide parts 130 connected to the second tracks 152 are moved along the second tracks 152 by the lifting movement. That is, since the second guide parts 130 are moved in parallel by the second guide member 102b, the second guide parts 130 move in parallel in the row direction along the second track 152 so that the pitch is narrowed or widened.

As a result, the pitch between the second guide parts 150 is adjusted according to the lifting and lowering of the second pitch adjusting plate 150, whereby the positions of the pickers 110 connected by the second guide part 130. Is changed in the row direction, thereby adjusting the row direction Y-pitch of the pickers 110.

That is, the second pitch adjustment plate 150 serves to adjust the row direction Y-pitch of the pickers 110 through lifting and lowering driving.

Meanwhile, when the second guide parts 130 are moved along the second tracks 152 as the second pitch adjusting plate 150 moves up and down, the second track 152, that is, the inner surface of the second slot. A frictional force is generated between the second guide parts 130 and the second tracks 152 while contacting. In order to reduce the frictional force, second rollers 134 are installed at both ends of the second guide parts 130, respectively. The second rollers 134 are rotatably installed at both ends of the second guide parts 130, and are substantially positioned in the second tracks 9122.

Picker system 100 according to an embodiment of the present invention is the first pitch adjustment plate 140 and the second pitch adjustment plate (to adjust the X-pitch and Y-pitch between the pickers 110 at the same time ( And a driving unit 160 for elevating and driving 150.

The driving unit 160 generates a driving force for elevating the first pitch adjusting plate 140 and the second pitch adjusting plate 150. To this end, the drive unit 160 may be made of a hydraulic cylinder capable of linear reciprocating drive.

The driving unit 160 may be located at end portions of the second guide portions 130. For example, the second guide parts 130 may be positioned to correspond to a central area in a row direction in an end direction of the second guide parts 130, and may be installed at both ends of the second guide parts 130, respectively.

In this embodiment, in order to transmit the driving force of the drive unit 160 to the first pitch control plate 140 and the second pitch control plate 150 at the same time, the drive unit 160 to the first pitch control plate 140. And a moving part 162 and a connecting part 166 connecting to the second pitch adjusting plate 150.

3, 4, and 7, the moving part 162 is installed to be elevated on an end portion of the first pitch adjustment plate 140. Here, the moving parts 162 may be installed at both ends of the first pitch control plate 140 so that the first pitch control plate 140 can be elevated in parallel. That is, the moving part 162 is preferably installed at each of the four corners that the end of the first pitch adjustment plate 140 and the end of the second pitch adjustment plate 150 abut.

The moving unit 162 may be installed on the second frame 104, and the linear motion guide (LM guide) 164 may be provided on the second frame 104 so that the moving unit 162 can be easily elevated. Is provided.

An end portion of the first pitch adjustment plate 140 and an end portion of the second pitch adjustment plate 150 are commonly connected to the moving part 162. That is, the end of the first pitch control plate 140 and the end of the second pitch control plate 150 adjacent thereto are connected to one moving part 162 together. As a result, the first pitch adjusting plate 140 and the second pitch adjusting plate 150 are guided so as to be lifted and lowered by the moving part 162.

The connection part 166 connects the driving part 160 and the moving part 162. For example, the connection part 166 has a bar shape extending in a row direction, and is connected to the driving part 160 at a central part thereof. In addition, both ends of the connection part 166 are connected to the moving parts 162 located at both ends of the second pitch adjustment plate 150. As a result, the connection unit 166 transmits the driving force of the driving unit 160 to the moving unit 162. As a result, the driving unit 160 raises and lowers the connection unit 166, and the moving unit 162 moves up and down as the connection unit 166 moves up and down. Accordingly, the first pitch adjustment plate 140 and the second pitch adjustment plate 150 are elevated to adjust the column direction X-pitch and the row direction Y-pitch of the pickers 110 at the same time.

Here, the driving force is provided at the same time in the driving unit 160 located at both ends of the second guide portion 130, so that the first pitch adjustment plate 140 and the second pitch adjustment plate 150 is horizontal The lifting and lowering operation is performed in the maintained state.

Meanwhile, an elastic member 136 may be installed between each of the second guide parts 130. The elastic member 136 is mutually elastic with respect to any one of the second guide portion 130 located inside the second guide portion 130, the second guide portion 130 is In the state constrained by the second trajectories 152 of the second pitch adjustment plate 150, the second guide portion 130 is guided so as to be concentrated.

In addition, although not shown in detail, in the picker system 100 according to an embodiment of the present invention, a vacuum line for applying a vacuum force to the pickers 110 to pick up the semiconductor device at the upper end of the pickers 110. (Not shown) may be connected. In the process of adjusting the pitch of the pickers 110, entanglement of the vacuum line may occur. In order to prevent this, for preventing the tangling of the vacuum lines due to the movement of the pickers 110 by extending in the row direction on the second guide portion 130 and grouping the vacuum lines in rows. It may further include a tangle prevention unit ().

The operation of the picker system 100 of the test handler configured as described above will be briefly described with reference to the accompanying drawings.

8 is a diagram illustrating a change in column direction X-pitch according to the operation of the first pitch adjustment plate of FIG. 2, and FIG. 9 is a diagram illustrating a change in row direction Y-pitch according to the operation of the second pitch adjustment plate of FIG. 2. 10 and 11 are schematic diagrams collectively showing pitch changes of the pickers of FIG. 2.

First, as illustrated in FIGS. 3, 4, and 10, the first pitch adjusting plate 140 and the second pitch adjusting plate 150 are initially lifted up and positioned at the upper portion of the driving unit 160.

At this time, the first guide parts 120 are positioned at the lower ends of the first tracks 142 of the first pitch adjustment plate 140, and thus the column direction X-pitch of the pickers 110 is maximized. Maintain the pitch.

In addition, the second guide parts 130 are also located at the lower ends of the second trajectories 152 of the second pitch adjustment plate 150, so that the row direction Y-pitch of the pickers 110 is also provided. Maintain the maximum pitch.

In the state where the column direction X-pitch and the row direction Y-pitch of the pickers 110 maintain the maximum pitch, the plurality of semiconductor devices are picked up by the pickers 110, and when the pickup of the semiconductor devices is completed, The picker system 100 is conveyed by means of a conveying device.

On the other hand, the driving unit 160 generates a driving force to adjust the pitch of the pickers 110 during the transfer in the state of picking up the semiconductor devices. The driving force from the driving unit 160 is transmitted to the first pitch adjusting plate 140 and the second pitch adjusting plate 150 through the connecting unit 166 and the moving unit 162, and the first pitch adjusting plate. 140 and the second pitch adjustment plate 150 is driven to descend.

8, 9, and 11, when the first pitch adjusting plate 140 and the second pitch adjusting plate 150 are positioned below by the driving unit 160, the first The guide parts 120 and the second guide parts 130 also move.

In detail, the first guide parts 120 are moved along the first tracks 142 by the lowering of the first pitch control plate 140 to be positioned on the upper ends of the first tracks 142. Accordingly, the column X-pitch of the pickers 110 has a minimum pitch.

In addition, similarly, the second guide parts 130 are moved along the second tracks 152 by the lowering of the second pitch adjusting plate 150 to be positioned on the upper ends of the second tracks 9152. Accordingly, the row direction Y-pitch of the pickers 1100 has a minimum pitch like the X-pitch.

As such, the first pitch adjusting plate 140 and the second pitch adjusting plate 150 move downward by driving by the driving unit 160, and the X-pitch in the column direction of the pickers 110 is lowered by the lowering operation. And the row direction Y_ pitch is in a state of maintaining the minimum pitch. This state may be defined as a pitch interval corresponding to the arrangement of the sockets so as to lower the previously picked up semiconductor devices into the sockets of the target tray.

As mentioned, the picker system 100 of the test handler according to the embodiment of the present invention adjusts the column X-pitch and the row Y-pitch simultaneously, so that the socket arrangement of the tray when picking up or lowering the semiconductor devices is established. To easily adjust the pitch of the plurality of pickers 110.

Therefore, it is possible to transfer a larger number of semiconductor devices in one operation, and to increase the speed when transferring the semiconductor devices between the trays in the test handler.

Although the detailed description of the present invention has been described with reference to the preferred embodiments of the present invention, those skilled in the art or those skilled in the art will have the idea of the present invention described in the claims to be described later. It will be understood that various modifications and variations can be made in the present invention without departing from the scope of the present invention.

According to the embodiments of the present invention as described above, in the picker system in which a plurality of pickers are arranged in a matrix form, the first guide parts for guiding the row direction movement of the pickers and the second guide parts for guiding the column direction movement are provided. By adjusting the pitch using the first pitch adjusting plate and the second pitch adjusting plate, it is possible to simultaneously adjust the column direction X-pitch and the row direction Y-pitch of the pickers.

Therefore, it is easy to adjust the pitch of the pickers to correspond to the respective trays, so that the time required for the transfer of the semiconductor devices in the test handler can be shortened. In addition, since the column direction X-pitch and the row direction Y-pitch can be adjusted at the same time, the socket arrangement of each tray can be more effectively coped, so that a separate pitch adjustment device can be omitted.

While the foregoing has been described with reference to preferred embodiments of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.

1 is a schematic diagram illustrating a test handler having a picker system according to an embodiment of the present invention.

2 is a schematic plan view showing a picker system according to an embodiment of the present invention.

3 and 4 are side views of the picker system of FIG. 2 viewed in the A and B directions.

5 and 6 are cross-sectional views taken along lines II ′ and II-II ′ of FIG. 2.

FIG. 7 is a diagram for describing a driving unit included in the picker system of FIG. 2.

FIG. 8 is a view illustrating a change in column direction X-pitch according to the operation of the first pitch adjustment plate of FIG. 2.

9 is a view illustrating a change in row direction Y-pitch according to the operation of the second pitch adjustment plate of FIG. 2.

10 and 11 are schematic diagrams collectively showing pitch changes of the pickers of FIG.

Explanation of symbols on the main parts of the drawings

100: picker system 102: first frame

102a: first guide member 102b: second guide member

104: second frame 110: picker

114: third roller 120: first guide part

120a: first bracket 120b: first extension portion

122: linear motion guide 124: first roller

130: second guide portion 130a: second bracket

130b: second extension 134: second roller

140: first pitch adjustment plate 142: first slot

150: second pitch adjustment plate 152: second slot

160: drive unit 162: moving unit

166: connection

Claims (12)

A plurality of pickers, arranged in a matrix form, for picking up the semiconductor device; A plurality of first guides connecting the pickers in a row unit and guiding movement of the pickers in a row direction; A plurality of second guide parts connecting the pickers in a row unit and guiding the movement of the pickers in a column direction; A first pitch adjustment plate having a plurality of first trajectories extending in different directions to adjust the column direction X-pitch of the pickers, wherein the first guide portions are configured to operate along the first trajectories; And A test comprising a second pitch adjustment plate having a plurality of second trajectories extending in different directions to adjust the row direction Y-pitch of the pickers, the second guide portions being configured to operate along the second trajectories The picker system of the handler. According to claim 1, The first pitch adjustment plate is formed with a plurality of first slots to function as the first trajectories, the end of the first guide portion is disposed in the first slots, respectively, The second pitch adjustment plate is formed with a plurality of second slots that function as the second trajectories, and the ends of the second guide portions are disposed in the second slots, respectively. . According to claim 2, wherein the first guide portion is provided at each end thereof, and includes a first roller in contact with the inner surface of the first slot formed in the first pitch adjustment plate, And each of the second guide parts includes a second roller installed at an end thereof and in contact with an inner surface of a second slot formed in the second pitch adjusting plate. The first guide member of claim 1, wherein the first guide member is disposed at both ends of the first guide portion, and guides the first guide portion to move in the column direction when the first guide portion is moved by lifting and lowering the first pitch adjusting plate. ; And A second guide member which is disposed at both ends of the second guide portion and guides the second guide portion to move in a row direction when the second guide portion is moved by lifting and lowering the second pitch adjustment plate. Picker system of test handlers. 5. The apparatus of claim 4, further comprising: a first frame having a structure surrounding the plurality of pickers arranged in the matrix form, wherein the first guide member and the second guide member are installed; And And a second frame connected to an upper surface of the first frame and arranged around the first frame such that the first pitch adjusting plate and the second pitch adjusting plate are movable. The method of claim 1, wherein the pickers include third rollers installed at an upper end thereof, the second guide parts include slots extending in a row direction, and the third rollers are slots of the second guide parts. Picker system of a test handler, characterized in that located within. The test handler of claim 1, wherein each of the first guide parts includes a linear motion (LM) guide for reducing friction when the pickers connected in rows are moved in a row direction. system. The test handler of claim 1, further comprising a driving unit for elevating the first pitch adjusting plate and the second pitch adjusting plate to adjust the column direction X-pitch and the row direction Y-pitch of the pickers. Picker system. 9. The apparatus of claim 8, further comprising: moving parts disposed adjacent to both ends of the first pitch adjustment plate, and coupled to one end of the first pitch adjustment plate and one end of the second pitch adjustment plate; And And a connecting part connecting the driving part and the moving part to lift and lower the first pitch adjusting plate and the second pitch adjusting plate by a driving force of the driving part. And the driving part is connected to the first pitch adjusting plate and the second pitch adjusting plate through the moving part and the connecting part. The second pitch adjusting plate of claim 9, wherein the driving part is positioned adjacent to both ends of the second guide parts, and the connection part allows the driving force of each driving part to be simultaneously transmitted to both ends of the second pitch adjusting plate. Picker system of the test handler, characterized in that for connecting the moving parts located at both ends of the together. 2. The picker system of claim 1, further comprising an elastic member disposed between the second guide parts to impart an elastic force between the second guide parts. The vacuum line of claim 1, wherein the vacuum line is disposed above the second guide part and extends in a row direction, and the vacuum line for imparting vacuum force to the pickers is prevented from being entangled by movement of the pickers. Picker system of the test handler, characterized in that it further comprises a tangle prevention unit grouping by unit.

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