KR20090036693A - Apparatus and method of producting carbon nano tube - Google Patents

Abstract

A carbon nanotube manufacturing apparatus equipped with a horn-like spreader plate is provided to prevent metal catalysts from being wasted, improving productivity and reduce manufacturing costs. A carbon nanotube manufacturing apparatus(100) equipped with a horn-like spreader plate comprises: a reactor(110) supplying a reaction space for producing the carbon nanotube; a plurality of spreader holes, installed inside the reactor, for spreading source gas(SG) into the reaction space; a spreader plate(120) having a horn-like phase; and a catalyst supply pipe(130), arranged in a lower part of the spreader plate, for supplying metal catalysts to produce the carbon nanotube by reacting to the source gas. The spreader plate has an inlet in a center and the metal catalysts are injected through the inlet from the catalyst supply pipe.

Description

Carbon nanotube manufacturing apparatus and method thereof {APPARATUS AND METHOD OF PRODUCTING CARBON NANO TUBE}

The present invention relates to a carbon nanotube manufacturing apparatus and a method thereof, and more particularly, to a carbon nanotube manufacturing apparatus and method for producing carbon nanotubes by flowing metal catalyst particles.

Carbon nanotubes (CNTs) are three adjacent carbon atoms joined together in a hexagonal honeycomb pattern to form a carbon plane and the carbon plane is rolled into a cylindrical shape to form a tube.

Carbon nanotubes exhibit metallic or semiconducting conductivity depending on their structure, and can be widely applied in various technical fields. For example, carbon nanotubes are applicable to electrodes of electrochemical storage devices such as secondary batteries, fuel cells or supercapacitors, electromagnetic shielding, field emission displays, or gas sensors.

Carbon nanotubes are produced by dispersing and reacting metal catalyst particles with a hydrocarbon-based source gas in a high temperature reactor. Specifically, the apparatus for producing carbon nanotubes includes a reactor and a dispersion plate provided in the reactor to disperse the source gas of the carbon component.

Looking at the process of producing carbon nanotubes in the reactor, first, a metal catalyst is provided to the reactor is loaded on the dispersion plate. The source gas flows into the lower portion of the distribution plate and is dispersed to the upper portion of the distribution plate through the distribution holes formed in the distribution plate. The metal catalyst reacts with the source gas to grow carbon nanotubes while floating in the reactor by the source gas provided through the dispersion holes.

In the reactor, the flow of source gas rises along the center of the reactor and then descends while bending toward the side wall of the reactor. This flow of source gas allows the metal catalyst to be loaded at the end of the dispersion plate. As such, the metal catalyst particles remaining on the dispersion plate are agglomerated by heat and adhered to the dispersion plate, and thus a separate operation of removing the metal catalyst particles is required. For this reason, a metal catalyst is lost and productivity falls.

An object of the present invention is to provide a carbon nanotube manufacturing apparatus that can reduce the loss of the metal catalyst.

It is also an object of the present invention to provide a method for producing carbon nanotubes using the carbon nanotube manufacturing apparatus described above.

Carbon nanotube manufacturing apparatus according to one feature for realizing the above object of the present invention, the reactor and the dispersion plate.

The reactor provides a reaction space for forming carbon nanotubes. The dispersion plate is provided in the reactor, and a plurality of dispersion holes are formed to disperse the source gas for generating the carbon nanotubes in the reaction space, and have a horn shape.

In addition, the carbon nanotube manufacturing apparatus further includes a catalyst supply pipe. A catalyst supply pipe supplies a metal catalyst that reacts with the source gas to produce carbon nanotubes, and is disposed below the dispersion plate. The dispersion plate has an injection hole formed at a central portion corresponding to the catalyst supply pipe, and the metal catalyst is introduced into the reaction space through the injection hole from the catalyst supply pipe.

On the other hand, the dispersion plate may further include a plate portion and a gas guide portion. The plate portion has a conical shape which gradually protrudes upward from the end portion to the center portion, the dispersion holes are formed at the end portion, and the injection hole is formed at the center portion. A gas guide part is coupled to a lower surface of the plate part, is disposed to correspond to an end of the plate part, and a guide space into which the source gas flows is formed.

In addition, the dispersion plate may have a conical shape that is gradually recessed downward from the end toward the center.

In addition, the carbon nanotube manufacturing method according to one feature for realizing the above object of the present invention is as follows. First, the reactor in which the reaction space is formed is heated. The source gas is dispersed through the dispersion holes of the dispersion plate provided in the reaction space. A metal catalyst is provided from the center of the dispersion plate. Subsequently, the metal catalyst reacts with the source gas while floating the reaction space by the source gas to generate carbon nanotubes. The source gas descending to the dispersion plate side moves along the inclined surface of the dispersion plate to float the metal catalyst particles seated on the dispersion plate.

According to the present invention described above, the carbon nanotube manufacturing apparatus is provided with a horn-shaped dispersion plate, thereby preventing the metal catalyst from remaining at the end of the dispersion plate. Accordingly, the carbon nanotube manufacturing apparatus can prevent the loss of the metal catalyst, improve productivity, and reduce the manufacturing cost.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention.

1 is a view showing a carbon nanotube manufacturing apparatus according to an embodiment of the present invention, Figure 2 is a view showing in detail the distribution plate and catalyst supply pipe and gas supply pipe shown in FIG.

1 and 2, the apparatus for manufacturing carbon nanotubes (CNTs) according to the present invention 100 includes a reactor 110, a dispersion plate 120, a catalyst supply pipe 130, first and second And gas supply lines 141 and 142, a heating unit 150, and a recovery line 160.

In detail, the reactor 110 includes a body 111 and a cover 112. The body portion 111 has a cylindrical shape with an upper surface opened, and the body portion 111 is made of a metal material having high strength and heat resistance, for example, stainless steel.

The body part 111 is located in the preliminary space PS into which the catalyst supply pipe 130 and the first and second gas supply lines 141 and 142 flow, and the upper portion of the preliminary space PS. It provides a reaction space (RS) is made of carbon nanotubes (CNT). The preliminary space PS and the reaction space RS are separated from each other by the dispersion plate 120.

The cover part 112 is provided on an upper portion of the body part 111, and the cover part 112 is coupled to the body part 111 to seal the body part 111. An exhaust port 112a for discharging the exhaust gas EG formed in the process of generating the carbon nanotubes CNT is formed at the center of the cover part 112. The exhaust port 112a is connected to an external exhaust device (not shown) to provide the exhaust gas EG to the exhaust device.

The dispersion plate 120 is provided inside the body 111. The dispersion plate 120 is provided at a boundary between the reaction space RS and the preliminary space PS, and the dispersion plate 120 includes a source gas SG and a metal catalyst for generating the carbon nanotubes. MC) is introduced into and dispersed in the reaction space RS. A detailed description of the configuration of the dispersion plate 120 will be described in detail with reference to FIGS. 3 and 4 to be described later.

The catalyst supply pipe 130 and the first and second gas supply lines 141 and 142 are provided on a lower surface of the dispersion plate 120. The catalyst supply pipe 130 is located on the bottom surface of the dispersion plate 120 through the bottom surface of the body portion 111, and provides the metal catalyst to the reactor (110). Here, as the metal catalyst (MC), an organometallic compound having a magnetic body such as iron (Fe), cobalt, nickel, or the like is used.

In addition, the first and second gas supply lines 141 and 142 which provide the source gas SG are provided on the bottom surface of the distribution plate 120. In this embodiment, the carbon nanotube manufacturing apparatus 100 is provided with two gas supply lines (141, 142), the number of the gas supply line (141, 142) is the size of the reactor 110 Can be increased or decreased accordingly.

The first and second gas supply lines 141 and 142 have an output terminal provided on a lower surface of the distribution plate 120 and receive the source gas SG from a gas supply device (not shown). Provided at 120. Here, as the source gas (SG), a hydrocarbon-based gas such as acetylene, ethylene, methane, hydrogen gas, or the like is used.

The metal catalyst MC is introduced into the reaction space RS from the catalyst supply pipe 130 through the dispersion plate 120, and the source gas SG is the first and first gas supply lines 141. 142 is dispersed in the reaction space RS through the dispersion plate 120. The source gas SG is suspended so that the metal catalyst MC introduced into the reaction space RS does not fall on the dispersion plate 120, and reacts with the metal catalyst MC to the metal catalyst MC. The carbon nanotubes are grown.

As such, since the carbon nanotubes are generated while the metal catalyst MC is suspended in the reaction space RS, growth of the carbon nanotubes is activated as the metal catalyst MC is suspended.

On the other hand, the heating unit 150 is provided on the outer wall of the reactor 110. The heating unit 150 heats the reaction chamber 110 to raise and maintain the reaction space RS at an appropriate temperature for activating the reaction between the source gas SG and the metal catalyst MC. In one example of the present invention, the reaction space (RS) is maintained at a high temperature of about 500 degrees Celsius to 5000 degrees Celsius by the heating unit 150.

The carbon nanotubes (CNT) formed in the reaction space (RS) are discharged to the outside through the recovery line (160). That is, the input terminal of the recovery line 160 is provided in the reaction space RS through the side wall of the reactor 110 and is disposed above the dispersion plate 120. The recovery line 160 sucks the metal catalyst on which the carbon nanotubes (CNTs) are grown and provides them to an external carbon nanotube collecting device (not shown).

Hereinafter, the dispersion plate 120 will be described in detail with reference to the accompanying drawings.

3 is a perspective view illustrating the dispersion plate illustrated in FIG. 2, and FIG. 4 is an enlarged view illustrating an enlarged portion 'A' of FIG. 2.

2 and 3, the dispersion plate 120 includes a plate portion 121 and a gas guide portion 122. The plate portion 121 has a catalyst supply hole 121c through which the metal catalyst MC is supplied to a central portion thereof. The catalyst supply pipe 130 is provided corresponding to the catalyst supply hole 121c, and the gold catalyst MC is transferred from the catalyst supply pipe 130 to the reaction space RS through the catalyst supply hole 121c. Inflow.

The plate portion 121 has a conical shape protruding toward the cover portion 112 of the reactor 110 toward the catalyst supply hole 121c side from the end portion 121a. That is, the end portion 121a of the plate portion 121 is formed parallel to the bottom surface of the body portion 111, and a plurality of distribution holes 121b for dispersing the source gas SG are formed. In addition, the plate portion 121 protrudes gradually from the end portion 121a toward the catalyst supply hole 121c, and thus, the surface between the end portion 121a and the catalyst supply hole 121c is It is made of an inclined surface inclined with respect to the bottom surface of the body portion 111.

As such, the plate portion 121 has an inclined surface between the end portion 121a and the catalyst supply hole 121c, and the dispersion holes 121b have an end portion 121a of the plate portion 121. Is formed along Accordingly, the source gas SG flows into and is dispersed into the end portion 121a of the plate portion 121, and the metal catalyst particles introduced into the reaction space RS form an inclined surface of the plate portion 121. Therefore, the dispersion holes 121b are guided to the side.

Therefore, the carbon nanotube manufacturing apparatus 100 may prevent the gold catalyst (MC) from remaining at the end portion 121a of the plate portion 121, and thus, the metal catalyst ( MC) can be prevented from agglomerating, preventing the loss of the metal catalyst (MC), improving product yield and productivity, and reducing manufacturing costs.

In addition, the carbon nanotube manufacturing apparatus 100 prevents the metal catalyst MC from being lost since the metal catalyst MC is introduced from the lower portion of the dispersion plate 120.

On the other hand, the gas guide portion 122 is coupled to the lower surface of the plate portion 121. The gas guide part 122 is provided along the end 121a of the plate part 121 to have a ring shape when viewed in plan view.

2 and 4, the gas guide 122 has a plurality of gas supply holes 122a through which the source gas SG is introduced, and the gas supply holes 122a are formed at the lower surface of the gas guide unit 122. It is formed corresponding to the first and second gas supply lines 141 and 142. The gas guide part 122 has a gas guide space GGS formed therein to move the source gas SG along the end 121a of the plate part 121. Here, the gas guide space GGS is defined by the lower surface of the plate portion 121 and the gas guide portion 122.

The source gas SG flows into the gas guide space GGS from the first and second gas supply lines 141 and 142 through the gas supply holes 122a, and then the gas guide space GGS. As it moves along) it is introduced into the reaction space (RS) through the distribution holes (121b).

As described above, since the dispersion plate 120 first stores the source gas SG in the gas guide space GGS and then disperses it, the amount of the source gas SG may be reduced.

FIG. 5 is a diagram illustrating another example of the dispersion plate illustrated in FIG. 1.

Referring to FIG. 5, the dispersion plate 170 illustrated in FIG. 5 has the same configuration as the dispersion plate 120 illustrated in FIG. 3 except for the shape of the plate portion 171. Therefore, in the following detailed description of the dispersion plate 170, the same reference numerals are given to the same components as those of the dispersion plate 121 shown in FIG. 2, and the description thereof will be omitted.

The dispersion plate 170 includes a plate portion 171 and a gas guide portion 122 formed on the bottom surface of the plate portion 171. The plate part 171 has a catalyst supply hole 171c through which the metal catalyst MC is supplied to a central portion thereof. The catalyst supply pipe 130 is provided corresponding to the catalyst supply hole 121c, and the gold catalyst MC is transferred from the catalyst supply pipe 130 to the reaction space RS through the catalyst supply hole 171c. Inflow.

The plate portion 171 has a conical shape protruding from the end portion 171a toward the catalyst supply hole 171c toward the cover portion 112 side of the reactor 110. Specifically, the end portion 171a of the plate portion 171 has a first region A1 formed in parallel with the bottom surface of the body portion 111 and a second region A2 surrounding the first region A1. )

A plurality of distribution holes 171b for dispersing the source gas SG are formed in the first region A1. The second area A2 is formed of an inclined surface that rises upward from the first area A1 toward the side wall of the body part 111. Accordingly, the metal catalyst particles seated in the second region A2 are guided to the first region A1 in which the dispersion holes 171b are formed. Therefore, the plate portion 171 may reduce the loss of the metal catalyst (MC).

In addition, the plate portion 171 gradually protrudes from the end portion 171a toward the catalyst supply hole 171c, so that the surface between the end portion 171a and the catalyst supply hole 171c is It is made of an inclined surface inclined with respect to the bottom surface of the body portion 111.

The gas guide part 122 is coupled to the bottom surface of the plate part 171. The gas guide part 122 is provided corresponding to the first area A1, and distributes the source gas SG to the first area A1 of the plate part 171.

Hereinafter, a process of generating the carbon nanotubes in the reaction space RS will be described in detail with reference to the accompanying drawings.

6 is a view showing a process of producing carbon nanotubes in the carbon nanotube manufacturing apparatus shown in FIG.

1 and 6, the heating unit 150 heats the reaction chamber 110 to raise the temperature of the reaction space RS to an appropriate temperature.

The gas supply lines 141 and 142 provide the source gas SG to the gas guide space GS of the gas guide part 122 through the gas supply holes 121b. Here, the gas supply lines 141 and 142 are provided with a source gas SG of an appropriate pressure in order to float the metal catalyst MC.

The gas guide part 122 diffuses the source gas SG along the end 121a of the plate part 121. The source gas SG is dispersed in the reaction space RS through the distribution holes 121b while moving along the gas guide space GGS.

Here, looking at the flow (SGF) of the source gas (SG) of the reaction space (RS), the source gas (SG) is raised from the end 121a of the plate portion 121 through the distribution holes 121b. After descending while moving to the center portion of the reaction space (RS).

On the other hand, the metal catalyst MC is introduced into the reaction space RS from the catalyst supply pipe 130 through the catalyst supply hole 121c of the plate portion 121. The metal catalyst MC discharged from the catalyst supply hole 121c reacts with the source gas SG while floating the reaction space RS along the flow SGF of the source gas SG to react with the carbon nanoparticles. Create a tube (CNT).

It is discharged from the reaction chamber 110 through the recovery line 160 grown on the metal catalyst MC and stored in the carbon nanotube collecting device.

7 is a view showing a carbon nanotube manufacturing apparatus according to another embodiment of the present invention, Figure 8 is a view showing in detail the coupling relationship between the dispersion plate shown in Figure 7 and the catalyst supply pipe, Figure 9 is Figure 8 An enlarged perspective view of the dispersion plate shown in FIG.

7 and 8, the carbon nanotube manufacturing apparatus 201 of the present invention includes a reactor 110, a catalyst supply nozzle 210, a dispersion plate 220, a catalyst supply pipe 230, first and second electrodes. And gas supply lines 241 and 242, a heating unit 150, and a recovery line 160. In this embodiment, the reactor 110, the heating unit 150 and the recovery line 160 is the same as the components of the carbon nanotube manufacturing apparatus 100 shown in Figure 1, duplicate description will be omitted .

The catalyst supply nozzle 210 is provided at one side of the body portion 111 of the reactor 110 to provide the metal catalyst MC to the body portion 111. The output end of the catalyst supply nozzle 210 penetrates the side wall 112 of the body part 110 and is provided in the reaction space RS, and is provided on the dispersion plate 220. MC) is introduced into the reaction space.

8 and 9, the dispersion plate 220 has an injection hole 221 through which the metal catalyst MC is supplied. The injection port 221 is connected to the catalyst supply pipe 230 and receives the metal catalyst MC from the catalyst supply pipe 230. In this embodiment, the carbon nanotube manufacturing apparatus 201 includes both the catalyst supply nozzle 210 and the catalyst supply pipe 230, but may include only the catalyst supply pipe 230.

The dispersion plate 220 has a conical shape recessed toward the bottom surface side of the body portion 111 toward the injection column 221 side from the end 222. The dispersion plate 220 is formed with a plurality of distribution holes 223, the distribution holes 223 are formed in the entire region of the distribution plate 220 in the preliminary space (PS) of the reactor 110 The introduced source gas SG is dispersed in the reaction space RS.

The first and second gas supply lines 241 and 242 are provided below the body part 110. In this embodiment, the carbon nanotube manufacturing apparatus 201 is provided with two gas supply lines (241, 242), the number of the gas supply lines (241, 242) is the size of the reactor 110 It may increase or decrease accordingly.

The first and second gas supply lines 241 and 242 are coupled to the bottom surface of the body part 110 and provide the source gas SG to the preliminary space PS. Source gases provided from the first and second source gas lines 241 and 242 are introduced into the reaction space RS through the distribution holes 223 of the distribution plate 220.

10 is a view showing a process of producing carbon nanotubes in the carbon nanotube manufacturing apparatus shown in FIG.

9 and 10, the heating unit 150 heats the reaction chamber 110 to raise the temperature of the reaction space RS to an appropriate temperature.

The first and second gas supply lines 241 and 242 provide the source gas SG to the preliminary space PS of the body part 111, and the source introduced into the preliminary space PS. Gas SG is introduced into the reaction space RS through the distribution holes 223.

Here, looking at the flow (SGF) of the source gas (SG) of the reaction space (RS), after rising upward from the dispersion plate 220, while descending while moving toward the side wall from the central portion of the reactor 110. The source gas SG lowered to the distribution plate 220 is guided to the injection hole 221 along the inclined surface 224 of the distribution plate 220, and the source gas introduced from the distribution holes 223. To rise again by the pressure of.

Meanwhile, the metal catalyst MC is introduced into the reaction space RS from the catalyst supply nozzle 210 and the catalyst supply pipe 230. The metal catalyst MC reacts with the source gas SG while floating the reaction space RS along the flow SGF of the source gas SG to generate the carbon nanotubes CNT.

It is discharged from the reaction chamber 110 through the recovery line 160 grown on the metal catalyst MC and stored in the carbon nanotube collecting device.

As such, the metal catalyst MC is suspended in accordance with the flow SGF of the source gas SG, and is guided to the center side of the dispersion plate 220 by the inclined surface of the dispersion plate 220. Accordingly, the carbon nanotube manufacturing apparatus 201 prevents the metal catalyst MC from remaining at the end of the dispersion plate 220, thereby preventing the metal catalyst MC from being lost.

11 is a view showing a carbon nanotube manufacturing apparatus according to another embodiment of the present invention.

Referring to FIG. 11, the carbon nanotube manufacturing apparatus 202 has the same configuration as the carbon nanotube manufacturing apparatus 201 shown in FIG. 7 except for the third gas supply line 250. Therefore, hereinafter, in the detailed description of the carbon nanotube manufacturing apparatus 202, the same components as the carbon nanotube manufacturing apparatus 201 shown in FIG. do.

The carbon nanotube manufacturing apparatus 202 includes a reactor 110, a catalyst supply nozzle 210, a dispersion plate 220, a catalyst supply pipe 230, first and second gas supply lines 241 and 242, and a heating unit. 150, a recovery line 160, and a third gas supply line 250.

The third gas supply line 250 surrounds the catalyst supply pipe 230 and is connected to the inlet 221 of the distribution plate 220. That is, the catalyst supply pipe 230 is provided in the third gas supply line 250, and the third gas supply line 250 reacts the source gas SG through the injection hole 221. It is provided in the space RS. Accordingly, the source gas SG flows into the reaction space RS through the injection hole 221 and the dispersion holes 223, and the metal catalyst MC is injected with the source gas SG. It is introduced into the reaction space (RS) through 221.

As such, the carbon nanotube manufacturing apparatus 202 inserts the catalyst supply pipe 230 into the third gas supply line 250 to simultaneously insert the metal catalyst MC and the source gas SG. It may be provided through the inlet 221. Accordingly, the carbon nanotube manufacturing apparatus 202 may activate the floating of the metal catalyst MC and prevent the loss of the metal catalyst MC.

Although described with reference to the embodiments above, those skilled in the art will understand that the present invention can be variously modified and changed without departing from the spirit and scope of the invention as set forth in the claims below. Could be.

1 is a view showing a carbon nanotube manufacturing apparatus according to an embodiment of the present invention.

FIG. 2 is a view illustrating in detail the dispersion plate, the catalyst supply pipe, and the gas supply pipe shown in FIG. 1.

3 is a perspective view illustrating the dispersion plate illustrated in FIG. 2.

4 is an enlarged view illustrating an enlarged portion 'A' of FIG. 2.

FIG. 5 is a diagram illustrating another example of the dispersion plate illustrated in FIG. 1.

6 is a view showing a process of producing carbon nanotubes in the carbon nanotube manufacturing apparatus shown in FIG.

7 is a view showing a carbon nanotube manufacturing apparatus according to another embodiment of the present invention.

8 is a view showing in detail the coupling relationship between the dispersion plate and the catalyst supply pipe shown in FIG.

9 is an enlarged perspective view of the dispersion plate illustrated in FIG. 8.

10 is a view showing a process of producing carbon nanotubes in the carbon nanotube manufacturing apparatus shown in FIG.

11 is a view showing a carbon nanotube manufacturing apparatus according to another embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

100, 201, 202: carbon nanotube manufacturing apparatus

110: reactor 120, 170, 220: dispersion plate

130: catalyst supply pipe 150: heating unit

Claims (9)

A reactor providing a reaction space for forming carbon nanotubes; And Is provided in the reactor, the carbon nanotube manufacturing apparatus characterized in that it comprises a plurality of dispersion holes for dispersing the source gas for producing the carbon nanotubes in the reaction space, the dispersion plate having a horn shape. The method of claim 1, And supplying a metal catalyst reacting with the source gas to generate carbon nanotubes, the catalyst supply pipe disposed under the dispersion plate, The distribution plate is formed with an injection hole in the center corresponding to the catalyst supply pipe, And the metal catalyst is introduced into the reaction space through the injection hole from the catalyst supply pipe. The method of claim 2, wherein the dispersion plate, A plate portion having a conical shape gradually protruding upward from an end portion to a central portion, wherein the dispersion holes are formed at an end portion, and the injection hole is formed at a central portion thereof; And Carbon nanotube manufacturing apparatus, characterized in that coupled to the lower surface of the plate portion, disposed corresponding to the end of the plate portion, the guide portion is formed therein the guide space in which the source gas flows. The apparatus of claim 3, wherein the source gas flows along the guide space and enters the reaction space through the dispersion holes. According to claim 3, The end of the plate portion, A first region in which the dispersion holes are formed, and a second region surrounding the first region, The second region is carbon nanotube manufacturing apparatus, characterized in that inclined with respect to the ground. The apparatus of claim 2, wherein the dispersion plate has a conical shape that is gradually recessed downward from the end portion toward the center portion. The apparatus of claim 6, wherein the dispersion holes are formed in all regions of the dispersion plate. The method of claim 7, wherein And a supply line surrounding the catalyst supply pipe and connected to the injection hole and supplying the source gas. Heating a reactor in which a reaction space is formed; Dispersing a source gas through dispersion holes of a dispersion plate provided in the reaction space; Providing a metal catalyst from the center of the dispersion plate; And The metal catalyst reacts with the source gas while floating the reaction space by the source gas to generate carbon nanotubes, The source gas descending to the dispersion plate side moves along the inclined surface of the dispersion plate to float the metal catalyst particles seated on the dispersion plate.

Images