KR101349673B1 - Method and apparatus of collecting carbon nano tube - Google Patents

Abstract

A method and apparatus for synthesizing carbon nanotubes are disclosed. In the carbon nanotube synthesis method, the inside of the reaction chamber is heated, the catalyst particles are supplied into the reaction chamber, and a source gas for reacting with the catalyst particles is provided at the top of the reaction chamber through a dispersion plate having a plurality of injection holes. To provide carbon nanotubes. At this time, upward airflow is generated under the dispersion plate to prevent the catalyst particles from falling through the injection holes. Therefore, it is possible to prevent the catalyst particles from falling through the injection hole and the catalyst particles and the source gas are synthesized outside the reaction chamber.

Description

Carbon nanotube synthesis method and apparatus {METHOD AND APPARATUS OF COLLECTING CARBON NANO TUBE}

The present invention relates to a method and apparatus for synthesizing carbon nanotubes, and more particularly, to a method and apparatus for synthesizing carbon nanotubes using high temperature.

Carbon nanotubes, which are carbon isotopes, have a diameter of several nanometers (nm), which is a tube-like material in which one carbon atom is bonded to another carbon atom in a hexagonal honeycomb pattern. In particular, carbon nanotubes have excellent mechanical properties, electrical selectivity, field emission characteristics, and high-efficiency hydrogen storage medium characteristics. Therefore, carbon nanotubes can be applied to a wide range of technical fields such as aerospace, biotechnology, environmental energy, materials industry, medicine medical, electronic computer, security security and the like.

Examples of methods for synthesizing carbon nanotubes include electric discharge, plasma chemical vapor deposition, thermal chemical vapor deposition, and thermal decomposition. Among these methods, thermal chemical vapor deposition and thermal decomposition are common.

In the synthesis of the carbon nanotubes to which the thermal chemical vapor deposition or pyrolysis is applied, as shown in FIG. 1, a cylindrical reactor (1) having a major axis horizontally formed therein and a heating unit for heating the reactor (1) ( Use a synthesis device that includes 3). Here, the heating unit 3 has a structure mainly surrounding the cylindrical reactor 1, and heats the reactor 1 at a temperature of about 600 ℃ to 1,000 ℃. In addition, the synthesis apparatus of FIG. 1 has a structure in which gas is provided to one side of the reactor 1 and gas is discharged to the other side facing the one side. Accordingly, carbon nanotubes are synthesized on the substrate by providing gas while heating the reactor 1 in which the substrate is accommodated at a high temperature.

The synthesis apparatus of FIG. 1 has a structure in which the heating unit 3 does not surround the entire reactor 1 but surrounds a part thereof. This is because, when the heating unit 3 surrounds the entire reactor 1 may have a thermal effect on other members located around the reactor. Therefore, the spatial efficiency of the reactor 1 is lowered because the substrate is placed only at the portion of the reactor 1 corresponding to the portion surrounded by the heating unit 3.

In addition, since the synthesis apparatus directly heats the reactor 1 itself, it may cause a cause of shortening the life of the reactor 1. In addition, the synthesis apparatus is somewhat hindered in size due to the decrease in spatial efficiency.

One object of the present invention is to provide a method for synthesizing carbon nanotubes to prevent the catalyst particles from falling through the injection hole provided with the source gas.

Another object of the present invention to provide a carbon nanotube synthesis apparatus that can easily perform the above-mentioned method.

In the carbon nanotube synthesis method according to embodiments of the present invention for achieving the above object, the reaction chamber is heated, and the catalyst particles are supplied into the heated reaction chamber. The carbon nanotubes are synthesized by providing a source gas for reacting with the catalyst particles from a lower portion of the reaction chamber to an upper direction through a dispersion plate having a plurality of injection holes. At this time, an upward air flow is generated under the dispersion plate in an upward direction to prevent the catalyst particles from falling through the injection hole.

According to the embodiments of the present invention, in the step of generating the raised airflow, the rotary blades disposed below the dispersion plate may be rotated, and the raised airflow may be generated by using wind caused by the rotation of the rotary blades. .

Carbon nanotube synthesizing apparatus according to embodiments of the present invention for achieving the above another object includes a reaction chamber, a catalyst supply unit, a source gas providing unit and an air flow generating unit. The reaction chamber is formed to have a tubular structure standing vertically, and provides a space for synthesizing carbon nanotubes therein using heat provided from the outside. The catalyst supply unit supplies catalyst particles into the reaction chamber. The source gas providing unit is disposed under the reaction chamber, has a plurality of injection holes formed in the direction of the reaction chamber, and source gas for reacting with the catalyst particles into the reaction chamber through the injection holes. to provide. The airflow generation unit is disposed below the dispersion plate and generates an upward airflow in an upward direction to prevent the catalyst particles from falling through the injection hole.

According to embodiments of the present invention, the source gas may include a reaction gas for synthesizing carbon nanotubes by reacting with the catalyst particles and a carrier gas for flowing the catalyst particles in the reaction chamber.

According to embodiments of the present invention, the air flow generating unit may be disposed in the central portion of the lower space of the distribution plate. Alternatively, a plurality of air flow generating units may be disposed at edges of the lower space of the distribution plate so as to correspond to edges of the distribution plate.

According to the embodiments of the present invention, the airflow generation unit may include a rotary vane, and prevent the catalyst particles from falling through the injection hole of the dispersion plate by using wind generated from the rotary vane.

According to the present invention described above, therefore, the catalyst particles fall through the injection hole, thereby preventing the catalyst particles and the source gas from synthesizing outside the reaction chamber. In addition, it is possible to reduce the amount of source gas for flowing the catalyst particles in correspondence with the amount of rising airflow.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. In describing the drawings, similar reference numerals are used for similar components. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention in order to clarify the present invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present application, the terms "comprising" or "having ", and the like, are intended to specify the presence of stated features, integers, steps, operations, elements, parts, or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

Carbon nanotube synthesis method

2 is a schematic flowchart illustrating a method for synthesizing carbon nanotubes according to embodiments of the present invention.

2, in the carbon nanotube synthesis method according to the embodiments of the present invention, first heating the interior of the reaction chamber (S100), and supplies the catalyst particles into the heated reaction chamber (S200) . Then, the carbon nanotubes are synthesized by providing the source gas from the lower part of the reaction chamber to the upper direction through the dispersion plate in which the injection holes are formed (S300). At this time, by raising the air flow in the upper direction under the dispersion plate to prevent the catalyst particles falling through the injection holes (S400).

Specifically, first, the inside of the reaction chamber is heated to a set temperature using a heating unit. For example, the interior of the reaction chamber is preheated by heating the interior of the reaction chamber to a temperature lower than the target temperature. Alternatively, the interior of the reaction chamber may be heated to a target temperature at which the source gas and catalyst particles can react. For example, the target temperature may be about 500 to 1,100 ° C. (S100).

Catalyst particles are fed into the heated reaction chamber. For example, the catalyst particles mainly include iron, nitel, and the like. On the other hand, the catalyst particles may have a spherical shape. Here, the use of spherical catalyst particles is to ensure a relatively large area for reacting with the provided source gas. On the other hand, the size, density, agglomeration degree, etc. of the catalyst particles may be variously changed according to the condition, type, etc. of the process (S200).

A source gas for reacting with the catalyst particles is supplied into the reaction chamber. For example, acetylene, ethylene, methane, benzene, xylene, carbon monoxide, carbon dioxide, or the like may be used as the source gas. At this time, in order to concentrate the source gas at the same time and uniformly provide the inside of the reaction chamber, the source gas providing unit is provided through a distribution plate disposed under the reaction chamber. Here, the dispersion plate has a plurality of injection holes. Therefore, the source gas supply unit injects the source gas into the reaction chamber through the injection hole. In addition, the source gas providing unit provides the source gas through the dispersion space formed in the lower portion of the dispersion plate. This is to provide a space for dispersing the source gas and to ensure that the dispersed source gas is partially concentrated by the injection hole and uniformly injected into the reaction chamber as a whole. Accordingly, the carbon nanotubes are synthesized by reacting the source gas with the catalyst particles in the reaction chamber.

In embodiments of the present invention, source gas is provided from the bottom to the top of the reaction chamber. In particular, the source gas and the catalyst particles react while flowing inside the reaction chamber. The source gas providing unit may supply a reaction gas and a carrier gas. For example, the source gas providing unit may supply a reaction gas for reacting with the catalyst particles and a carrier gas for flowing the catalyst particles in the reaction chamber. The catalyst particles flow upward in the reaction chamber by the carrier gas provided from the source gas supply. In addition, carbon nanotubes may be synthesized by reacting the reactant gas provided from the source gas providing unit with the catalyst particles. In this way, the catalyst particles react with the reaction gas while the catalyst particles flow inside the reaction chamber. Accordingly, the carbon nanotube synthesis of the present invention is compared with the conventional carbon nanotube synthesis apparatus in which the substrate is supplied into the reaction chamber by a separate boat, and the catalyst particles and the reaction gas formed on the substrate are synthesized with carbon nanotubes. The device can make full use of the interior space of the reaction chamber. Therefore, it is possible to improve the synthesis yield and purity of the carbon nanotubes (S300).

On the other hand, the provided catalyst particles may fall into the dispersion space through the injection hole of the dispersion plate. In particular, the catalyst particles may fall down the dispersion plate through the injection hole according to the diameter, the number of injection holes of the dispersion plate, the separation distance between the injection holes, and the like. When the catalyst particles fall into the dispersion space, the source gas passing through the dispersion space may react with the catalyst particles in the dispersion space. That is, carbon nanotubes may be synthesized by reacting the source gas and the catalyst particles in a dispersion space rather than inside the reaction chamber.

Therefore, in order to prevent the catalyst particles from falling into the dispersion space at the bottom of the dispersion plate, it is possible to generate an upward airflow under the dispersion plate in the upward direction. Accordingly, the catalyst particles can be prevented from falling into the dispersion space through the injection hole.

Specifically, the airflow generation unit disposed below the dispersion plate prevents the catalyst particles from falling down the dispersion plate. For example, the airflow generating portion includes a rotary vane. In this way, an upward airflow is generated using the wind caused by the rotation of the rotary blades. That is, the airflow generation unit generates wind in the upward direction by the rotation of the rotary blades, and the rising airflow is generated by the wind to prevent the catalyst particles from falling through the injection hole of the dispersion plate (S400).

In this manner, since the catalyst particles do not fall by the airflow generation unit, the catalyst particles and the source gas react in the dispersion space to prevent the carbon nanobute from being synthesized. Thus, the amount of carrier gas for flowing the supplied catalyst particles inside the reaction chamber can be reduced. Therefore, it is possible to reduce the amount of carrier gas to reduce the cost of the device for carbon nanotube synthesis to improve the overall yield.

Hereinafter, a carbon nanotube synthesis apparatus capable of performing the aforementioned carbon nanotube synthesis method will be described.

Carbon Nanotube Synthesis Device

3 is a schematic diagram illustrating a carbon nanotube synthesis apparatus according to embodiments of the present invention. 4 is a configuration diagram illustrating in detail the source gas providing unit of FIG. 3.

Referring to FIG. 3, the carbon nanotube synthesis apparatus 100 according to the embodiments of the present invention may include a reaction chamber 200, a catalyst supply unit 300, a source gas supply unit 400, and an airflow generation unit 500. Include.

The reaction chamber 200 provides a space for synthesizing carbon nanotubes therein. In particular, the reaction chamber 200 may provide a space for synthesizing the carbon nanotubes using heat provided from the outside. At this time, the heat may be about 500 to 1,100 ℃. The reaction chamber 200 is formed of a material that can withstand the heat. For example, the reaction chamber 200 may be made of quartz, graphite, or a mixture thereof.

In embodiments of the present invention, the reaction chamber 200 has a barrel type structure that is erected vertically. For example, the reaction chamber 200 may have a cylindrical shape in which the long axis is vertically erected. This is to provide a space for synthesizing the catalyst and / or source gas to be described later while flowing vertically. That is, the reaction chamber 200 may be a vertical reactor using a fluidized bed.

The catalyst supply unit 300 supplies catalyst particles into the reaction chamber 200. Here, the catalyst particles include transition metals such as iron and cobalt. In addition, the catalyst supply unit 300 supplies the catalyst particles through one catalyst supply pipe 310 formed through the side wall, and the catalyst particles supplied with the catalyst control valve 320 disposed in one region of the catalyst supply pipe 310. You can adjust the amount. Alternatively, the catalyst supply unit 300 may supply the catalyst particles through the plurality of catalyst supply pipes, and the amount of the catalyst particles may be adjusted by the plurality of valves.

In embodiments of the present invention, the catalyst supply unit 300 may be disposed above the dispersion plate 410 of the source gas providing unit 400 to be described later. This is for flowing the catalyst particles upward by the source gas provided through the dispersion plate 410.

The source gas providing unit 400 provides a source gas into the reaction chamber 200. At this time, the source gas providing unit 400 provides a source gas into the reaction chamber 200 through the source gas providing pipe 410. At this time, the source gas control valve 420 may be disposed in one region of the source gas providing pipe 410 to adjust the amount of source gas provided.

In addition, the source gas providing unit 400 is disposed below the reaction chamber 200. That is, the source gas providing unit 400 is connected to the lower portion of the reaction chamber 200 to provide the source gas in the upper direction from the lower portion of the reaction chamber 200. Thus, the catalyst particles previously supplied by the source gas provided at the bottom can flow in the upper direction inside the reaction chamber 200.

Referring to FIG. 4, the source gas providing unit 400 includes a reaction gas providing unit 430 and a carrier gas providing unit 440.

For example, the reaction gas providing unit 430 may provide a reaction gas to the inside of the reaction chamber 200 to synthesize carbon nanotubes by reacting with the catalyst particles, and the carrier gas providing unit 440 may react the catalyst particles. A carrier gas for flowing in the chamber 200 is provided in the reaction chamber 200. Here, the reaction gas includes acetylene, ethylene, methane, benzene, xylene, carbon monoxide, carbon dioxide, and the like, and the carrier gas includes an inert gas such as argon gas and chromium gas. Accordingly, when the carrier gas providing unit 440 provides the carrier gas into the reaction chamber 200, the catalyst particles flow upward. At this time, the reaction gas may be blocked by the reaction gas control valve 432. When the catalyst particles flow upward, the reaction gas providing unit 430 provides the reaction gas into the reaction chamber 200. At this time, the amount of the carrier gas may be adjusted by the carrier gas control valve 442. For example, since the catalyst particles must continue to flow inside the reaction chamber 200, the carrier gas is not completely blocked and the amount provided will be reduced. For example, the mixing ratio of the carrier gas and / or the reactant gas provided may be adjusted by the reactant gas control valve 432 and the carrier gas control valve 442. As such, the carbon nanotubes are synthesized by reacting the source gas provided from the source gas providing unit 400 with the catalyst particles while flowing in the reaction chamber 200.

Referring back to FIG. 3, the source gas providing unit 400 provides a source gas into the reaction chamber 200 through the dispersion plate 450. For example, a plurality of injection holes 452 may be formed in the dispersion plate 450. The injection holes 452 may be uniformly formed on the front surface of the distribution plate 450 so that the source gas is uniformly provided in the reaction chamber as a whole.

On the other hand, the source gas providing unit 400 may further include a dispersion space 460 disposed between the dispersion plate 450 and the source gas providing pipe 420. The dispersion space 460 provides a space for primarily dispersing the source gas provided through the source gas providing pipe 420, and the dispersion space 450 of the dispersion plate 450 disposed between the dispersion space 460 and the reaction chamber 200. The source gas is concentrated through the injection hole 452 and once again dispersed through the injection hole 452. Therefore, the source gas providing unit 400 may uniformly provide the source gas in the reaction chamber 200.

In general, after the catalyst supply unit 300 supplies the catalyst particles, the source gas supply unit 400 provides the carrier gas to flow the catalyst particles inside the reaction chamber 200. When the catalyst particles flow in the reaction chamber 200, the source gas providing unit 400 provides the reaction gas to synthesize carbon nanotubes. At this time, before the carrier gas is provided into the reaction chamber 200, the catalyst particles may fall into the dispersion space 460 through the injection hole 452 of the dispersion plate 450. In addition, the catalyst particles may fall into the dispersion space 460 avoiding the path provided with the carrier gas and / or the reaction gas. In addition, when the amount of the carrier gas is reduced or the carrier gas providing unit 440 is broken, the catalyst particles may fall into the dispersion space 460.

In the embodiments of the present invention, the airflow generation unit 500 is disposed below the dispersion plate 450 to generate an upward airflow from the bottom of the distribution plate 450 to the upper direction. For example, the airflow generation unit 500 includes a rotary vane 510. The airflow generation unit 500 generates the airflow by using the wind generated by the rotation of the rotary blade 510. Accordingly, the airflow generation unit 500 may prevent the catalyst particles from falling into the dispersion space 460 through the injection hole 452. Therefore, the catalyst particles may be prevented from being synthesized with the source gas in a space other than the reaction chamber 200, thereby greatly improving the yield and purity of the carbon nanotubes.

The airflow generation unit 500 will be described in detail with reference to FIGS. 5 and 6.

The carbon nanotube synthesis apparatus 100 further includes a heating part 600, a gas discharge part 700, and a pressure control part 800.

The heating part 600 heats the inside of the reaction chamber 200. For example, the heating unit 600 is disposed surrounding the reaction chamber 200. For example, the heating unit 600 may heat the internal temperature of the reaction chamber 200 to a temperature of about 500 to 1,100 ° C. The heating unit 600 may include a heating coil surrounding the reaction chamber 200.

On the other hand, the heating unit 600 includes a main heating unit 610 disposed surrounding the reaction chamber 200 and an auxiliary heating unit 620 disposed surrounding the dispersion space 460 of the source gas providing unit 400. It may include. For example, when the source gas is primarily provided to the dispersion space 460 through the source gas providing pipe 430, the auxiliary heating unit 620 primarily heats the source gas. Then, the heated source gas is provided into the reaction chamber 200 through the dispersion plate 450 to react with the catalyst particles to synthesize carbon nanotubes. This is because when the catalyst particles and the source gas are difficult to react in the reaction chamber 200 in which the main heating unit 610 does not sufficiently heat, the auxiliary heating unit 620 heats the source gas and provides the source gas and the catalyst. The particles can easily react.

The gas discharge part 700 is disposed above the reaction chamber 200. Accordingly, the gas discharge part 700 discharges the source gas and / or the induction gas from the reaction chamber 200 to the outside of the reaction chamber 200. For example, the gas discharge unit 700 may include an exhaust pump, and a gas discharge pipe 710 connected to the reaction chamber 200 and a source gas and / or an induction gas may be transferred to the reaction chamber 200 using the exhaust pump. Can be discharged to outside.

The pressure regulator 800 is connected to the reaction chamber 200 to adjust the pressure state inside the reaction chamber 200. For example, the pressure regulating unit 800 includes a pressure regulating tube 810 and a pressure regulating valve 810 which are passages for adjusting a pressure state in the reaction chamber 200. Accordingly, the pressure adjusting unit 800 may maintain the vacuum state by reducing the inside of the reaction chamber 200.

In addition, the carbon nanotube synthesis apparatus 100 may further include a recovery unit (not shown) for recovering the synthesized carbon nanotubes. The recovery unit may be disposed above the reaction chamber 200. This is because the synthesized carbon nanotubes are relatively lighter than the catalyst particles and thus are easily recovered from the top. Alternatively, the recovery unit may be disposed in another region of the reaction chamber 200, and may be recovered by using a separate device after the carbon nanotube synthesis process is completed.

As described above, the carbon nanotube synthesizing apparatus 100 includes an airflow generation unit 500 disposed below the dispersion plate 450 to generate an upward airflow. Therefore, the airflow generating unit 500 generates an upward airflow from the lower portion of the dispersion plate 450 to the upper direction, thereby preventing the catalyst particles from falling down through the injection hole 452. Accordingly, the amount of catalyst particles consumed can be reduced, and the carbon nanotubes can be prevented from being synthesized in a space other than the reaction chamber 200, thereby improving the yield and purity of the carbon nanotubes.

5 and 6 are configuration diagrams for describing examples of the airflow generation unit of FIG. 3.

3 and 5, the first airflow generating unit 520 according to the embodiments of the present invention is disposed in the central portion of the lower space of the distribution plate 450. For example, one first airflow generation unit 520 is disposed at the central portion of the dispersion space 460.

The first airflow generation unit 520 includes a first rotary vane 522 and generates an upward airflow using wind generated by the rotation of the first rotary vane 522. At this time, the first rotary wing 522 may include a relatively large wing. This is for the first air flow generating unit 520 disposed in the central portion of the dispersion space 460 to flow the catalyst particles falling to the region adjacent to the edge of the dispersion space 460 upwards. This prevents the catalyst particles from falling through the injection hole 452 due to the raised airflow generated by the first airflow generator 520. This prevents the catalyst particles from falling into the dispersion space 460 and combining with the source gas provided through the source gas providing pipe 410. Therefore, the carbon nanotubes can be prevented from being synthesized in a space other than the reaction chamber, thereby improving the yield and purity of the carbon nanotubes.

In addition, when the source gas providing unit 400 injects a carrier gas to flow the catalyst particles from the inside of the reaction chamber 200 to the upper portion, the first air flow generating unit 520 also generates an upward air flow in the upward direction to form the catalyst. It may serve to flow particles upward. Thus, the amount of carrier gas for flowing the catalyst particles can be relatively reduced. Accordingly, when the amount of the source gas is reduced by reducing the carrier gas, the cost of the carbon nanotube synthesis process can be reduced as a whole.

3 and 6, a plurality of second airflow generating units 530 according to other embodiments of the present invention are disposed at edges of a space below the distribution plate 450 so as to correspond to edges of the distribution plate 450. Is placed. For example, a plurality of second air flow generating units 530 are disposed along the edge of the dispersion space 460 having a cylindrical cross section. At this time, the number and arrangement of the second air flow generating unit 530 may vary in accordance with the size, density, number, etc. of the catalyst particles falling into the dispersion space 460.

The second airflow generating unit 530 includes a second rotary vane 523, and generates an upward airflow using wind generated by the rotation of the second rotary vane 523. At this time, the second rotary blade 523 may have a size smaller than the first rotary blade 522. This is because a plurality of second airflow generation units 530 are disposed at the edges of the dispersion space 460 as compared with the first airflow generation unit 520 disposed at the central portion of the dispersion space 460. The catalyst particles are prevented from falling through the injection hole 452 due to the raised airflow generated by the second airflow generator 530 disposed at the edge of the dispersion space 460. This prevents the catalyst particles from falling into the dispersion space 460 and combining with the source gas provided through the source gas providing pipe 410. Therefore, the carbon nanotubes can be prevented from being synthesized in a space other than the reaction chamber, thereby improving the yield and purity of the carbon nanotubes.

In addition, when the source gas providing unit 400 injects a carrier gas to flow the catalyst particles from the inside of the reaction chamber 200 to the upper portion, the second air flow generating unit 530 also generates an upward air flow in the upward direction to form the catalyst. It may serve to flow particles upward. In particular, the carrier gas provided and injected into the dispersion space 460 through the source gas providing pipe 410 generates an upward airflow in the central portion of the dispersion space 460 and is disposed at the edge of the dispersion space 460. The second airflow generating unit 530 may generate an upward airflow at the edge of the dispersion space 460. Therefore, since the catalyst particles supplied to the edge of the reaction chamber 20 flow upward by the second air flow generating unit 530, the amount of carrier gas provided for flowing the catalyst particles can be relatively reduced. . In this case, if the total amount of source gas is reduced by reducing the carrier gas, the overall cost of the carbon nanotube synthesis process can be reduced.

According to the present invention, in the method and apparatus for synthesizing carbon nanotubes, the airflow generation unit disposed under the dispersion plate prevents the catalyst particles from falling through the injection hole. Therefore, the amount of catalyst particles consumed can be reduced, and the reaction rate of the source gas and the catalyst particles in the reaction chamber can be improved. Accordingly, the efficiency of the carbon nanotube synthesis process can be increased, and the yield and purity of the synthesized carbon nanotubes can be improved.

As described above, although described with reference to preferred embodiments of the present invention, those skilled in the art will be variously modified without departing from the spirit and scope of the invention described in the claims below. And can be changed.

1 is a schematic configuration diagram showing a conventional carbon nanotube synthesis apparatus.

2 is a schematic flowchart illustrating a method for synthesizing carbon nanotubes according to embodiments of the present invention.

3 is a schematic diagram illustrating a carbon nanotube synthesis apparatus according to embodiments of the present invention.

4 is a configuration diagram illustrating in detail the source gas providing unit of FIG. 3.

5 is a configuration diagram illustrating an example of the airflow generation unit of FIG. 3.

6 is a configuration diagram illustrating another example of the airflow generation unit of FIG. 3.

<Description of the symbols for the main parts of the drawings>

100: carbon nanotube synthesis apparatus 200: reaction chamber

210: inner wall 300: catalyst supply

400: source gas providing unit 430: reactive gas providing unit

440: carrier gas providing unit 450: dispersion plate

452: injection hole 460: distributed space

500: air flow generating unit 510: rotary wing

520: first air flow generating unit 522: first rotary blade

530: second air flow generating unit 532: second rotary wing

600: heating part 700: gas discharge part

800: pressure regulator

Claims (7)

delete delete A reaction chamber formed to have a vertically cylindrical tubular structure and providing space for synthesizing carbon nanotubes therein using heat provided from the outside; A catalyst supply unit supplying metal catalyst particles into the reaction chamber; A source gas providing unit disposed below the reaction chamber and having a dispersion plate having a plurality of injection holes formed in the reaction chamber direction, and providing a carbon source gas for reacting with the metal catalyst particles through the injection hole into the reaction chamber. ; And An airflow generation unit disposed below the dispersion plate and generating upward airflow in an upward direction to prevent the metal catalyst particles from falling through the injection hole; Carbon nanotube synthesis apparatus comprising a. delete The apparatus of claim 3, wherein the airflow generating unit is disposed at a central portion of the lower space of the dispersion plate. The apparatus of claim 3, wherein a plurality of airflow generators are disposed at edges of the lower space of the dispersion plate so as to correspond to edges of the dispersion plate. The apparatus of claim 3, wherein the airflow generation unit includes a rotary vane, and prevents the metal catalyst particles from falling through the injection holes of the dispersion plate by using wind generated from the rotary vane. .

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