KR101359415B1 - Method and apparatus of collecting carbon nano tube - Google Patents

Abstract

A method and apparatus for synthesizing carbon nanotubes are disclosed. In the carbon nanotube synthesis method, carbon nanotubes are synthesized by heating a reaction chamber, supplying catalyst particles into the reaction chamber, and supplying a source gas for reacting with the catalyst particles from the lower side of the reaction chamber to the upper direction. . At this time, the catalyst particles which have not reacted with the source gas are led to the path where the source gas is provided so that the catalyst particles which do not react with the source gas are reacted. Therefore, by inducing the unreacted catalyst particles to react with the source gas, the consumption of the catalyst particles can be reduced and the efficiency of the carbon nanotube synthesis process can be improved.

Description

Carbon nanotube synthesis method and apparatus {METHOD AND APPARATUS OF COLLECTING CARBON NANO TUBE}

The present invention relates to a method and apparatus for synthesizing carbon nanotubes, and more particularly, to a method and apparatus for synthesizing carbon nanotubes using high temperature.

Carbon nanotubes, which are carbon isotopes, have a diameter of several nanometers (nm), which is a tube-like material in which one carbon atom is bonded to another carbon atom in a hexagonal honeycomb pattern. In particular, carbon nanotubes have excellent mechanical properties, electrical selectivity, field emission characteristics, and high-efficiency hydrogen storage medium characteristics. Therefore, carbon nanotubes can be applied to a wide range of technical fields such as aerospace, biotechnology, environmental energy, materials industry, medicine medical, electronic computer, security security and the like.

Examples of methods for synthesizing carbon nanotubes include electric discharge, plasma chemical vapor deposition, thermal chemical vapor deposition, and thermal decomposition. Among these methods, thermal chemical vapor deposition and thermal decomposition are common.

In the synthesis of the carbon nanotubes to which the thermal chemical vapor deposition or pyrolysis is applied, as shown in FIG. 1, a cylindrical reactor (1) having a major axis horizontally formed therein and a heating unit for heating the reactor (1) ( Use a synthesis device that includes 3). Here, the heating unit 3 has a structure mainly surrounding the cylindrical reactor 1, and heats the reactor 1 at a temperature of about 600 ℃ to 1,000 ℃. In addition, the synthesis apparatus of FIG. 1 has a structure in which gas is provided to one side of the reactor 1 and gas is discharged to the other side facing the one side. Accordingly, carbon nanotubes are synthesized on the substrate by providing gas while heating the reactor 1 in which the substrate is accommodated at a high temperature.

The synthesis apparatus of FIG. 1 has a structure in which the heating unit 3 does not surround the entire reactor 1 but surrounds a part thereof. This is because when the heating part 3 surrounds the entire reactor 1, it may have a thermal effect on the other member located in the periphery. Therefore, the spatial efficiency of the reactor 1 is lowered because the substrate is placed only at the portion of the reactor 1 corresponding to the portion surrounded by the heating unit 3.

In addition, since the synthesis apparatus directly heats the reactor 1 itself, it may cause a cause of shortening the life of the reactor 1. In addition, the synthesis apparatus is somewhat hindered in size due to the decrease in spatial efficiency.

One object of the present invention is to provide a method for synthesizing carbon nanotubes to prevent the catalyst particles from falling through the injection hole.

Another object of the present invention to provide a carbon nanotube synthesis apparatus that can easily perform the above-mentioned method.

In the carbon nanotube synthesis method according to embodiments of the present invention for achieving the above object, the reaction chamber is heated, and the catalyst particles are supplied into the heated reaction chamber. Then, a source gas for reacting with the catalyst particles is provided from the lower side of the reaction chamber to the upper direction to synthesize carbon nanotubes. At this time, the catalyst particles that have not reacted with the source gas are led to the path where the source gas is provided so that the catalyst particles that do not react with the source gas are reacted.

According to embodiments of the present invention, in the providing of the source gas, the source gas may be provided into the reaction chamber through a dispersion plate having a plurality of injection holes. In addition, an induction gas is injected into the source gas and the catalyst particles which have not reacted to guide the source gas toward the injection hole provided with the source gas. At this time, in the step of injecting the induction gas to the catalyst particles, the first induction gas having a curved trajectory is injected in the direction of the inner wall of the reaction chamber, the second induction gas having a linear trajectory the dispersion plate It can spray in the direction of the upper surface of the.

Carbon nanotube synthesizing apparatus according to embodiments of the present invention for achieving the above another object includes a reaction chamber, a catalyst supply, a source gas supply and an induction gas injection. The reaction chamber is formed to have a tubular structure standing vertically, and provides a space for synthesizing carbon nanotubes therein using heat provided from the outside. The catalyst supply unit supplies catalyst particles into the reaction chamber. The source gas providing unit is disposed under the reaction chamber, has a plurality of injection holes formed in the direction of the reaction chamber, and source gas for reacting with the catalyst particles into the reaction chamber through the injection holes. to provide. The induction gas injector is disposed above the dispersion plate, and induces the catalyst particles in the direction of the injection hole by injecting the induction gas to the catalyst particles that have not reacted with the source gas.

According to embodiments of the present invention, the source gas may include a reaction gas for synthesizing carbon nanotubes by reacting with the catalyst particles and a carrier gas for flowing the catalyst particles in the reaction chamber.

According to embodiments of the present invention, the catalyst particles include transition metals such as iron and cobalt, the reaction gas includes acetylene, ethylene, methane, benzene, xylene, carbon monoxide, carbon dioxide, and the like, and the carrier gas Inert gas, such as argon gas and chromium gas, can be included.

According to embodiments of the present invention, the induction gas injector is dispersed except for the first induction gas injector for injecting the first induction gas to the catalyst particles attached to the inner wall of the reaction chamber and a portion in which the injection hole is formed. And a second induction gas injector for injecting a second induction gas to the catalyst particles stacked on the remaining portion of the upper surface of the plate. For example, the first induction gas injector injects the first induction gas to have a curved trajectory in the direction of the inner wall of the reaction chamber, and the second induction gas injector injects the second induction in the direction of the upper surface of the dispersion plate. Spray the gas in a straight line.

According to embodiments of the present invention, the induction gas injection unit may be made of a material coated with chromium on a stainless material, a chromium material, a mixture thereof, or a stainless material. In addition, the induction gas may include an inert gas such as argon gas or neon gas.

According to embodiments of the present invention, the carbon nanotube synthesizing apparatus may further include a heating unit, a gas discharge unit, and a pressure control unit. The heating unit surrounds the reaction chamber and heats the reaction chamber. The gas discharge part is disposed above the reaction chamber and discharges the source gas and the induced gas to the outside of the fraud reaction chamber. The pressure regulator is connected to the reaction chamber to adjust the pressure state inside the reaction chamber.

According to the present invention described above, by inducing a reaction gas with the source gas by injecting the induced gas to the unreacted catalyst particles, it is possible to reduce the consumption of the catalyst particles and improve the efficiency of the carbon nanotube synthesis process.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. In describing the drawings, similar reference numerals are used for similar components. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention in order to clarify the present invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present application, the terms "comprising" or "having ", and the like, are intended to specify the presence of stated features, integers, steps, operations, elements, parts, or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

Carbon nanotube synthesis method

2 is a schematic flowchart illustrating a method for synthesizing carbon nanotubes according to embodiments of the present invention.

2, in the carbon nanotube synthesis method according to the embodiments of the present invention, first heating the interior of the reaction chamber (S100), and supplies the catalyst particles into the heated reaction chamber (S200). Then, the carbon nanotubes are synthesized by providing the source gas from the lower side of the reaction chamber to the upper direction (S300). At this time, the catalyst particles that did not react with the source gas is guided to the path provided with the source gas (S400).

Specifically, first, the inside of the reaction chamber is heated to a set temperature using a heating unit. For example, the interior of the reaction chamber is preheated by heating the interior of the reaction chamber to a temperature lower than the target temperature. Alternatively, the interior of the reaction chamber may be heated to a target temperature at which the source gas and catalyst particles can react. For example, the target temperature may be about 500 to 1,100 ° C. (S100).

Catalyst particles are fed into the heated reaction chamber. For example, the catalyst particles mainly include iron, nitel, and the like. On the other hand, the catalyst particles may have a spherical shape. Here, the use of spherical catalyst particles is to ensure a relatively large area for reacting with the provided source gas. On the other hand, the size, density, agglomeration degree, etc. of the catalyst particles may be variously changed according to the condition, type, etc. of the process (S200).

A source gas for reacting with the catalyst particles is supplied into the reaction chamber. For example, acetylene, ethylene, methane, benzene, xylene, carbon monoxide, carbon dioxide, or the like may be used as the source gas. In embodiments of the present invention, source gas is provided from the bottom to the top of the reaction chamber. At this time, in order to uniformly provide the source gas at the same time while partially concentrating the inside of the reaction chamber, the source gas providing unit is provided through a dispersion plate disposed under the reaction chamber. Here, the dispersion plate has a plurality of injection holes. Therefore, the source gas supply unit injects the source gas into the reaction chamber through the injection hole of the dispersion plate. Accordingly, the carbon nanotubes are synthesized by reacting the source gas with the catalyst particles in the reaction chamber.

In embodiments of the present invention, source gas is provided from the bottom to the top of the reaction chamber. In particular, the source gas and the catalyst particles react while flowing inside the reaction chamber. The source gas providing unit may supply a reaction gas and a carrier gas. For example, the source gas providing unit may supply a reaction gas for reacting with the catalyst particles and a carrier gas for flowing the catalyst particles in the reaction chamber. The catalyst particles flow upward in the reaction chamber by the carrier gas provided from the source gas supply. In addition, carbon nanotubes may be synthesized by reacting the reactant gas provided from the source gas providing unit with the catalyst particles. In this way, the catalyst particles react with the reaction gas while the catalyst particles flow inside the reaction chamber. Accordingly, the carbon nanotube synthesis of the present invention is compared with the conventional carbon nanotube synthesis apparatus in which the substrate is supplied into the reaction chamber by a separate boat, and the catalyst particles and the reaction gas formed on the substrate are synthesized with carbon nanotubes. The device can make full use of the interior space of the reaction chamber. Therefore, it is possible to improve the synthesis yield and purity of the carbon nanotubes (S300).

On the other hand, catalyst particles that do not react with the provided source gas may occur. For example, when the catalyst particles are supplied, the catalyst particles fall downward by weight. As a result, the catalyst particles may flow upward by the source gas provided through the injection hole. At this time, some of the catalyst particles flowing in the upward direction may be laminated and / or attached to the inner wall of the reaction chamber, and such catalyst particles may not react with the source gas. In addition, catalyst particles stacked on the upper surface of the dispersion plate in which the injection holes are not formed may not react with the source gas. Therefore, the catalyst particles may be continuously stacked on the upper surface of the dispersion plate of the portion where the injection holes are not formed. That is, a channeling phenomenon may occur in which catalyst particles are stacked while forming channels on the upper surface of the dispersion plate of the portion where the injection holes are not formed.

At this time, catalyst particles that have not reacted with the source gas may be guided through the path of the source gas. In embodiments of the present invention, a channeling phenomenon occurs by injecting a gas into catalyst particles attached to the inner wall of the reaction chamber and / or catalyst particles stacked on the upper surface of the dispersion plate of the portion where the injection holes are not formed. The prepared catalyst particles can be directed in the direction of providing a source gas. Here, the supply path of the source gas may be an area adjacent to the injection hole of the dispersion plate. For example, the induction gas may include an inert gas such as argon gas or neon gas.

Specifically, the first guide gas having a curved trajectory may be injected to the catalyst particles attached to the inner wall of the reaction chamber. For example, since the first induction gas is injected with a curved trajectory in the direction of the inner wall of the reaction chamber, the first induction gas may whirl along the inner wall to form a vortex. Thus, the catalyst particles attached to the inner wall of the reaction chamber can be separated from the inner wall of the reaction chamber.

In addition, a second guide gas having a linear trajectory may be injected onto the catalyst particles attached to the upper surface of the dispersion plate. For example, since the second guided gas is injected while having a straight trajectory on the upper surface of the dispersion plate in which the injection hole is not formed, the catalyst particles attached to the upper surface of the dispersion plate may be induced in the injection hole direction ( S400).

In this way, the guide gas may be injected to the catalyst particles which do not react with the source gas to guide the injection hole. Therefore, it is possible to prevent the channeling phenomenon of the catalyst particles and to reduce the amount of spent catalyst particles. Furthermore, the efficiency of the carbon nanotube synthesis process may be improved, and the yield and purity of the carbon nanotubes may be improved.

Hereinafter, a carbon nanotube synthesis apparatus capable of performing the aforementioned carbon nanotube synthesis method will be described.

Carbon Nanotube Synthesis Device

3 is a schematic diagram illustrating a carbon nanotube synthesis apparatus according to embodiments of the present invention. 4 is a configuration diagram illustrating in detail the source gas providing unit of FIG. 3.

Referring to FIG. 3, the carbon nanotube synthesis apparatus 100 according to the embodiments of the present invention includes a reaction chamber 200, a catalyst supply unit 300, a source gas supply unit 400, and an induction gas injection unit 500. It includes.

The reaction chamber 200 provides a space for synthesizing carbon nanotubes therein. In particular, the reaction chamber 200 may provide a space for synthesizing the carbon nanotubes using heat provided from the outside. At this time, the heat may be about 500 to 1,100 ℃. The reaction chamber 200 is formed of a material that can withstand the heat. For example, the reaction chamber 200 may be made of quartz, graphite, or a mixture thereof.

In embodiments of the present invention, the reaction chamber 200 has a barrel type structure that is erected vertically. For example, the reaction chamber 200 may have a cylindrical shape in which the long axis is vertically erected. This is to provide a space for synthesizing the catalyst and / or source gas to be described later while flowing vertically. That is, the reaction chamber 200 may be a vertical reactor using a fluidized bed.

The catalyst supply unit 300 supplies catalyst particles into the reaction chamber 200. Here, the catalyst particles include transition metals such as iron and cobalt. In addition, the catalyst supply unit 300 supplies the catalyst particles through one catalyst supply pipe 310 formed through the side wall, and the catalyst particles supplied with the catalyst control valve 320 disposed in one region of the catalyst supply pipe 310. You can adjust the amount. Alternatively, the catalyst supply unit 300 may supply the catalyst particles through the plurality of catalyst supply pipes, and the amount of the catalyst particles may be adjusted by the plurality of valves.

In embodiments of the present invention, the catalyst supply unit 300 may be disposed above the dispersion plate 410 of the source gas providing unit 400 to be described later. This is for flowing the catalyst particles upward by the source gas provided through the dispersion plate 410.

The source gas providing unit 400 provides a source gas into the reaction chamber 200. At this time, the source gas providing unit 400 provides a source gas into the reaction chamber 200 through the source gas providing pipe 430. At this time, the source gas control valve 440 may be disposed in one region of the source gas providing pipe 430 to adjust the amount of source gas provided.

In addition, the source gas providing unit 400 is disposed below the reaction chamber 200. That is, the source gas providing unit 400 is connected to the lower portion of the reaction chamber 200 to provide the source gas in the upper direction from the lower portion of the reaction chamber 200. Thus, the catalyst particles previously supplied by the source gas provided at the bottom can flow in the upper direction inside the reaction chamber 200.

Referring to FIG. 4, the source gas providing unit 400 includes a reaction gas providing unit 450 and a carrier gas providing unit 460.

For example, the reaction gas providing unit 450 may provide a reaction gas for reacting with the catalyst particles to synthesize carbon nanotubes in the reaction chamber 200, and the carrier gas providing unit 460 may react the catalyst particles with each other. A carrier gas for flowing in the chamber 200 is provided in the reaction chamber 200. Here, the reaction gas includes acetylene, ethylene, methane, benzene, xylene, carbon monoxide, carbon dioxide, and the like, and the carrier gas includes an inert gas such as argon gas and chromium gas. Accordingly, when the carrier gas providing unit 460 provides the carrier gas into the reaction chamber 200, the catalyst particles flow upward. At this time, the reaction gas may be blocked by the reaction gas control valve 452. When the catalyst particles flow upward, the reaction gas providing unit 450 provides the reaction gas into the reaction chamber 200. At this time, the amount of the carrier gas may be adjusted by the carrier gas control valve 462. For example, since the catalyst particles must continue to flow inside the reaction chamber 200, the carrier gas is not completely blocked and the amount provided will be reduced. For example, the mixing ratio of the carrier gas and / or the reactant gas provided may be adjusted by the reactant gas control valve 452 and the carrier gas control valve 462. As such, the carbon nanotubes are synthesized by reacting the source gas and the catalyst particles provided from the source gas providing unit 400 while flowing in the reaction chamber 200.

Referring back to FIG. 3, the source gas providing unit 400 provides a source gas into the reaction chamber 200 through the dispersion plate 410. For example, a plurality of injection holes 412 may be formed in the dispersion plate 410. The injection holes 412 may be uniformly formed on the front surface of the distribution plate 410 so that the source gas may be uniformly provided inside the reaction chamber.

On the other hand, the source gas providing unit 400 may further include a dispersion space 420 disposed between the dispersion plate 410 and the source gas providing pipe 420. The dispersion space 420 provides a space for primarily dispersing the source gas provided through the source gas providing pipe 420, and distributes the dispersion plate 410 disposed between the dispersion space 420 and the reaction chamber 200. The source gas is partially concentrated through and dispersed once again through the injection hole 412. Therefore, the source gas providing unit 400 may uniformly provide the source gas in the reaction chamber 200.

At this time, a portion of the catalyst particles flowing upward by the source gas providing unit 400 may be attached to the inner wall 210 of the reaction chamber 200. In addition, catalyst particles may be stacked on the remaining portion of the upper surface of the dispersion plate 410 except for a portion where the injection hole 412 is formed. That is, a portion of the catalyst particles may be attached to the inner wall 210 of the reaction chamber 200 or may be laminated on a portion of the upper surface of the dispersion plate 410 in a state where the catalyst particles do not react with the source gas.

The induction gas injector 500 is disposed on the dispersion plate 410 to inject the induction gas to the catalyst particles. For example, the induction gas may include an inert gas such as argon gas or neon gas. The induction gas injection unit 500 injects the induced gas to the catalyst particles that did not react with the source gas to guide the catalyst particles to the source gas providing path. Accordingly, the induction gas injection unit 500 may prevent the catalyst particles from being attached to the inner wall 210 of the reaction chamber 200 or being laminated to a portion of the upper surface of the dispersion plate 410 in a state where the catalyst particles do not react. have.

For example, the induction gas injection unit 500 may further include an induction gas providing unit 530 that provides an induction gas. The induction gas providing unit 530 provides the induction gas through the induction gas providing pipe 532 and the amount thereof is adjusted by the induction gas control valve 534.

The induction gas injection unit 500 will be described in detail with reference to FIGS. 5 and 6.

The carbon nanotube synthesis apparatus 100 further includes a heating part 600, a gas discharge part 700, and a pressure control part 800.

The heating part 600 heats the inside of the reaction chamber 200. For example, the heating unit 600 is disposed surrounding the reaction chamber 200. For example, the heating unit 600 may heat the internal temperature of the reaction chamber 200 to a temperature of about 500 to 1,100 ° C. The heating unit 600 may include a heating coil surrounding the reaction chamber 200.

On the other hand, the heating unit 600 includes a main heating unit 610 disposed surrounding the reaction chamber 200 and an auxiliary heating unit 620 disposed surrounding the dispersion space 420 of the source gas providing unit 400. It may include. For example, when the source gas is primarily provided to the dispersion space 420 through the source gas providing pipe 430, the auxiliary heating unit 620 primarily heats the source gas. The heated source gas is provided into the reaction chamber 200 through the dispersion plate 410 to react with the catalyst particles to synthesize carbon nanotubes. This is because when the catalyst particles and the source gas are difficult to react in the reaction chamber 200 in which the main heating unit 610 does not sufficiently heat, the auxiliary heating unit 620 heats the source gas and provides the source gas and the catalyst. The particles can easily react.

The gas discharge part 700 is disposed above the reaction chamber 200. Accordingly, the gas discharge part 700 discharges the source gas and / or the induction gas from the reaction chamber 200 to the outside of the reaction chamber 200. For example, the gas discharge unit 700 may include an exhaust pump, and a gas discharge pipe 710 connected to the reaction chamber 200 and a source gas and / or an induction gas may be transferred to the reaction chamber 200 using the exhaust pump. Can be discharged to outside.

The pressure regulator 800 is connected to the reaction chamber 200 to adjust the pressure state inside the reaction chamber 200. For example, the pressure regulating unit 800 includes a pressure regulating tube 810 and a pressure regulating valve 810 which are passages for adjusting a pressure state in the reaction chamber 200. Accordingly, the pressure adjusting unit 800 may maintain the vacuum state by reducing the inside of the reaction chamber 200.

In addition, the carbon nanotube synthesis apparatus 100 may further include a recovery unit (not shown) for recovering the synthesized carbon nanotubes. The recovery unit may be disposed above the reaction chamber 200. This is because the synthesized carbon nanotubes are relatively lighter than the catalyst particles and thus are easily recovered from the top. Alternatively, the recovery unit may be disposed in another region of the reaction chamber 200, and may be recovered by using a separate device after the carbon nanotube synthesis process is completed.

As such, the carbon nanotube synthesis apparatus 100 reacts with the catalyst particles and the source gas flowing therein. Accordingly, the efficiency of the process may be improved by injecting an induced gas into the catalyst particles that do not react with the source gas to guide the source gas in the direction of providing the source gas.

FIG. 5 is a detailed view illustrating a part of the carbon nanotube synthesizing apparatus of FIG. 3, and FIG. 6 is a front view of a part of the carbon nanotube synthesizing apparatus of FIG.

3, 5, and 6, the induction gas injector 500 injects the induction gas to the catalyst particles that do not react with the source gas to guide the catalyst particles toward the injection hole 412.

In the embodiments of the present invention, the induction gas injector 500 includes a first induction gas injector 510 and a second induction gas injector 520.

The first induction gas injector 510 and the second induction gas injector 520 are disposed on the inner wall 210 of the reaction chamber 200. For example, a predetermined number of first induction gas injectors 510 may be disposed on the inner wall 210 of the reaction chamber 200, and a second induction gas injector may be disposed between the first induction gas injectors 510. 520 may be displaced. On the contrary, the first induction gas injection unit 510 and the second induction gas injection unit 520 may be disposed upside down without being offset. The first induction gas injector 510 and the second induction gas injector 520 may be disposed at various positions in various numbers according to process conditions such as agglomeration characteristics, sizes, densities, types, and process temperatures of the catalyst particles. .

Meanwhile, the first induction gas injector 510 and the second induction gas injector 520 may be made of stainless steel, chromium, a mixture thereof, or a material coated with chromium. In contrast, the first induction gas injector 510 and the second induction gas injector 520 may withstand the high temperature heat in the reaction chamber 200 for synthesizing the carbon nanotubes using high temperature heat. It may be made of various materials.

The first induction gas injector 510 injects the first induction gas to the catalyst particles attached to the inner wall 210 of the reaction chamber 200. For example, the first induction gas may include an inert gas such as argon gas or neon gas. For example, the first induction gas injector 510 injects the first induction gas to have a curved trajectory toward the inner wall 210 of the reaction chamber 200. In addition, the first induction gas injector 510 may be disposed in parallel with the inner wall 210 to inject the first induction gas in the direction of the inner wall 210. That is, since the first induction gas injected by the first induction gas injector 510 in the direction of the inner wall 210 has a trajectory of a curve, the first induction gas may be in the inner wall 210 of the reaction chamber 200. ) Whilst whirling or whirling along the catalyst particles attached to the inner wall 210 may be dropped or removed. As such, the first induction gas injector 510 attaches the catalyst particles attached to the inner wall 210 or stacked on the upper surface of the dispersion plate 410 adjacent to the inner wall 210 in the direction of the injection hole 412. Can be induced.

The second induction gas injector 520 injects the second induction gas to the catalyst particles stacked on the remaining portion of the upper surface of the dispersion plate 410 except for the portion where the injection hole 412 is formed. For example, the second induction gas may include an inert gas such as argon gas or neon gas. For example, the second induction gas injector 520 injects the second induction gas into a straight trajectory in the direction of the upper surface of the dispersion plate 410. The second induction gas injector 520 is disposed above the dispersion plate 410 to inject the second induction gas in the downward direction. For example, the second induction gas injector 520 disperses the catalyst particles by injecting the second induction gas to the catalyst particles stacked on the upper surface of the dispersion plate 410 in which the injection holes 412 are not formed. Guide to the injection hole (412).

As such, when the catalyst particles supplied through the catalyst supply pipe 310 do not react with the source gas because they are attached to the inner wall 210 or stacked on a portion of the upper surface of the dispersion plate 410, the first induction gas injection unit ( The 510 and the second guided gas injection unit 520 inject the guided gas to the catalyst particles to guide the catalyst particles toward the injection hole 412. Therefore, the induction gas injector 500 is consumed because the catalyst particles are attached and / or stacked on the inner wall 210 and / or the upper surface of the dispersion plate 410 of the reaction chamber 200 so as not to react with the source gas. Can be prevented. Furthermore, the efficiency of the carbon nanotube synthesis process can be increased, and the yield and purity of the synthesized carbon nanotubes can be improved.

According to the present invention, in the method and apparatus for synthesizing carbon nanotubes, an induction gas is injected to catalyst particles which have not reacted with the source gas to guide the path of the source gas. Therefore, the amount of catalyst particles consumed can be reduced, and the reaction rate of catalyst particles reacted with the source gas can be improved. Accordingly, the efficiency of the carbon nanotube synthesis process can be increased, and the yield and purity of the synthesized carbon nanotubes can be improved.

Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims. And changes may be made without departing from the spirit and scope of the invention.

1 is a schematic configuration diagram showing a conventional carbon nanotube synthesis apparatus.

2 is a schematic flowchart illustrating a method for synthesizing carbon nanotubes according to embodiments of the present invention.

3 is a schematic diagram illustrating a carbon nanotube synthesis apparatus according to embodiments of the present invention.

4 is a configuration diagram illustrating in detail the source gas providing unit of FIG. 3.

FIG. 5 is a diagram illustrating in detail a part of the carbon nanotube synthesis apparatus of FIG. 3.

6 is a front view of a portion of the carbon nanotube synthesis apparatus of FIG. 3 viewed from above.

Description of the Related Art

100: carbon nanotube synthesis apparatus 200: reaction chamber

210: inner wall 300: catalyst supply

400: source gas providing unit 410: dispersion plate

412: injection hole 420: distributed space

450: reactive gas providing unit 460: carrier gas providing unit

500: induction gas injection unit 510: first induction gas injection unit

520: second induction gas injection unit 530: induction gas providing unit

600: heating part 700: gas discharge part

800: pressure regulator

Claims (10)

delete delete Iii) heating the interior of the reaction chamber; Ii) feeding catalyst particles into the heated reaction chamber; Iii) synthesizing carbon nanotubes by supplying a source gas for reacting with the catalyst particles into the reaction chamber from the lower side of the reaction chamber to the upper direction through a dispersion plate having a plurality of injection holes; Iii) injecting an induction gas in the direction of the source gas injection hole to the unreacted catalyst particles so that the unreacted catalyst particles react with the source gas; And Iii) inductively transferring unreacted catalyst particles to a path through which a source gas is supplied; In the carbon nanotube synthesis method comprising: Injecting an induction gas to the unreacted catalyst particles Injecting a first induced gas having a curved trajectory toward the inner wall of the reaction chamber; And Injecting a second guide gas having a straight trajectory toward the upper surface of the dispersion plate; Carbon nanotube synthesis method characterized in that it comprises a. Iii) a reaction chamber formed to have a vertically shaped barrel-type structure and providing a space for synthesizing carbon nanotubes therein using heat provided from the outside; Ii) a catalyst supply for supplying catalyst particles into the reaction chamber; Iii) a source gas providing unit disposed below the reaction chamber and having a dispersion plate in which a plurality of injection holes are formed in a direction of the reaction chamber, and providing a source gas for reacting with catalyst particles through the plurality of injection holes into the reaction chamber; ; And Iii) an induction gas injector disposed on an upper part of the dispersion plate for injecting induction gas into the unreacted catalyst particles to guide the unreacted catalyst particles in the injection hole direction; In the carbon nanotube synthesis apparatus comprising: The induction gas injection unit A first induction gas injector for injecting a first induction gas to the catalyst particles attached to the inner wall of the reaction chamber; And A second induction gas injector for injecting a second induction gas to the catalyst particles stacked on the remaining portion of the upper surface of the dispersion plate except a portion where the injection holes are formed; Carbon nanotube synthesis apparatus comprising a. The apparatus of claim 4, wherein the source gas comprises a reaction gas for reacting with the catalyst particles to synthesize carbon nanotubes and a carrier gas for flowing the catalyst particles in the reaction chamber. delete delete The gas injector of claim 4, wherein the first induction gas injector injects the first induction gas to have a curved trajectory in the direction of the inner wall of the reaction chamber, and the second induction gas injector injects the second induction gas in the direction of the upper surface of the dispersion plate. Carbon nanotube synthesis apparatus, characterized in that for spraying in a straight line. The method of claim 4, wherein the induction gas injection unit is made of stainless steel, chromium or a metal mixture coated with chromium on stainless steel, The induction gas is carbon nanotube synthesis apparatus, characterized in that the argon gas or neon gas. 5. The method of claim 4, A heating unit disposed on an outer circumferential surface of the reaction chamber and configured to heat the inside of the reaction chamber; A gas outlet disposed at an upper portion of the reaction chamber and configured to discharge source gas and induced gas to the outside of the reaction chamber; And A pressure regulator connected to the reaction chamber to adjust a pressure state inside the reaction chamber; Carbon nanotube synthesis apparatus further comprising a.

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