KR20090004521A - Work carrier - Google Patents

Abstract

A work carrier is provided to prevent an insert adhered to an inner girth of a work holding hole from being fallen away or misaligned and to prevent abrasion when workpiece is ground. An opening is formed on a carrier substrate(13) made of metal material. A soft insert(15) is adhered to an inner girth of the opening. An inside of the insert is used as a work holding hole(12). An angular groove-shaped barrier groove(22) is formed in at least a part of the inner girth of the opening. A hooking projection(23) having an angular cross-section is formed in at least a part of an outer periphery of the insert. The insert is fixed to the inner girth of the opening of the carrier substrate at a state that the hooking projection fits in within the barrier groove.

Description

Work Carrier {WORK CARRIER}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work carrier used for holding these workpieces when polishing a workpiece having a disk shape or a square plate shape such as a semiconductor wafer, a magnetic disk substrate, an optical disk substrate, or a glass disk substrate with a planar polishing apparatus.

For example, when polishing the surfaces of the various workpieces described above with a planar polishing apparatus such as a lapping apparatus or a polishing apparatus, the work carrier 1 as shown in FIG. 13 is used to hold the workpieces. The work carrier 1 has a disc shape, has a gear 2 on its outer periphery, and has one or more work holding holes 3, and inserts the work W into the work holding holes 3. In the state held in alignment, as shown in FIG. 14, the gear 2 of the outer circumference is engaged with the sun gear 4 and the internal gear 5 of the planar polishing apparatus, and is disposed between the upper plate 6 and the lower plate 7. And the work W held by the work carrier 1 on the upper and lower surface plates 6 and 7 while rotating and revolving the work carrier 1 with the sun gear 4 and the internal gear 5. By polishing.

The work carrier 1 is usually made of a hard metal material such as stainless steel or carbon steel ball. For this reason, when the said workpiece contacts the inner periphery of the workpiece | work holding hole 3 at the time of the grinding | polishing process of the workpiece | work W, there exists a possibility that it may become a defective item.

Therefore, conventionally, for example, as described in Patent Documents 1 to 4, various work carriers in which annular soft annular inserts are attached to the inner circumference of the work holding holes and the outer circumference of the work is brought into contact with the inserts It is proposed.

However, as shown in FIG. 15, the work carrier described in Patent Document 1 is flat in the thickness direction inside the circular work holding hole 3 having the inner circumferential surface 3a that is flat in the thickness direction of the work carrier 1. The annular insert (thin plate holding part) 8 which has the outer peripheral surface 8a was fitted, and the outer peripheral surface 8a of the insert 8 and the inner peripheral surface 3a of the workpiece holding hole 3 were fixed by adhesive etc. As the flat circumferential surfaces are adhered to each other, their adhesive portions are peeled off by the action force at the time of work polishing, so that the insert 8 is easily inclined or shifted in the axial direction of the work holding hole 3, thereby being easily detached. There is this.

In addition, in patent document 2 and patent document 3, as shown in FIG. 16, the inner peripheral surface 3a of the circular workpiece holding hole 3 is formed in the concave curved surface, and the outer peripheral surface ( Although the ring-shaped insert (cushion member) 8 of 8a) is formed by the protruding curved surface, it is fitted and fixed by bonding. However, the insert 8 inserts the curved inner circumferential surface 3a because it is the adhesion between the smooth curved surfaces. It is also conceivable that the positional shift occurs and eventually the dropout occurs.

On the other hand, the work carrier described in patent document 4 forms the chamfering part 3b in the one part or all part of the entrance edge of the workpiece holding hole (through hole) 3 formed in the metal plate 1a as shown in FIG. The peripheral portion and the inner circumferential portion of the work holding hole 3 are covered with an insert (resin molding laminate) 8, and the insert 8 in the chamfered portion 3b of the work holding hole 3 is formed. The hole edge part is covered in the state wrapped from the outside. In other words, the hole edge 3c which made the square of the workpiece | work holding hole 3 was fitted in the angular groove 8b of the outer periphery of the insert 8 is formed. For this reason, compared with the thing described in the said references 1-3, the position shift of the insert 8 hardly arises, and it is thought that it is effective for fall prevention.

However, since the insert 8 covers the chamfer 3b of the metal plate 1a from the outside, the work carrier 1 of this patent document 4 works from the said metal plate 1a of the insert 8 The exposure width H of the part 8c extending inwardly of the holding hole 3 and exposed on the upper and lower surfaces of the carrier inevitably becomes large, and as shown in FIG. 18 during the polishing of the work W, the metal plate 1a The insert 8, which is softer than), is polished by the upper and lower surface plates, and is likely to be worn. And when the insert 8 wears in this way, the grinding | polishing amount of the edge part of the workpiece | work W will increase, and the "surface deflection" phenomenon that the flatness will fall in the said edge part will become easy to generate | occur | produce.

Patent Document 1: Japanese Patent Publication No. 2003-305637

Patent Document 2: Japanese Patent Application Laid-Open No. 2000-288922

Patent Document 3: Japanese Patent Laid-Open No. 2006-68895

Patent Document 4: Japanese Patent Application Laid-Open No. 2002-18708

Accordingly, an object of the present invention is to solve the above-mentioned conventional problems in the work carrier, to make it difficult to cause displacement or dropout of the insert formed in the inner circumferential portion of the work holding hole, and at the time of work polishing the insert. It is to provide a work carrier which prevents abrasion in the surface and prevents the surface sagging of the work outer peripheral part according to the wear of the said insert.

In order to achieve the above object, according to the present invention, an opening for forming a workpiece holding hole is formed in a metal carrier substrate, the insert that is softer than the carrier substrate is fixed to the inner circumference of the opening, and the inside of the insert is In the work carrier serving as the retaining hole, at least a portion of the inner circumference of the opening is formed with a angular groove-shaped locking groove having a corner portion in the groove wall extending in the circumferential direction of the opening, and the outer circumference of the insert. At least a part of a locking projection having a rectangular cross section having a corner portion suitable for each of the locking grooves is formed extending in the circumferential direction of the insert, and the locking protrusion is fitted into the locking groove to lock the insert. It is characterized in that it is fixed to the substrate.

In the present invention, the cross-sectional shape of the locking groove and the locking projection is preferably any one of V-shaped, trapezoidal and c-shaped.

In the present invention, by cutting the inlet edge of the opening of the carrier substrate into a concave shape at a predetermined interval, a plurality of recesses and protrusions interposed between the adjacent recesses are formed on the inner circumference of the opening. The outer periphery of the insert is formed with a plurality of convex portions to be fitted to the concave portion, and a recessed portion to be fitted to the protrusion interposed between the adjacent convex portions, the concave portion and the convex portion to be fitted to each other and / or The locking groove and the locking projection may be formed in the protrusion and the depression.

(Effects of the Invention)

According to the present invention, the locking groove of the square groove formed on the outer circumference of the insert is fitted to the locking groove of the square groove type formed on the inner circumference of the opening of the carrier substrate. Slip due to the locking groove, such as a conventional product combining the locking groove and the locking protrusion is difficult to occur. As a result, the position shift of the insert by the action force at the time of grinding | polishing of a workpiece | work, fallout, etc. are reliably prevented.

In addition, even if the insert has a locking protrusion on its outer circumference, even if the insert has a wide inner and outer radial width, the locking protrusion is fitted to the locking groove so that it is covered from both sides with a carrier substrate, so that the inner circumferential end of the opening of the insert is covered. The exposure width which extends further inward and is exposed to the upper and lower surfaces of the carrier is narrow, and therefore, there is an advantage that the wear of the insert during work polishing is prevented and the surface sag of the work outer peripheral part due to the wear of the insert is prevented.

1 shows an embodiment of a work carrier according to the present invention. This work carrier 1 has a disk shape, has a gear 11 on its outer periphery, and has one or more work holding holes 12 which are circular in the carrier surface, similarly to the known example shown in FIG. The outer peripheral gear 11 is engaged with the sun gear 4 and the internal gear 5 of the planar polishing apparatus in a state in which the circular workpiece W is fitted into the workpiece holding hole 12 and held. Interposed between 6) and the lower plate 7, the work W 10 rotates and revolves with the sun gear 4 and the internal gear 5, and the work W is placed on the upper and lower plate 6 and 7. Polishing is performed by.

As can be seen from FIG. 2, the work carrier 10 forms the gear 11 on the outer circumference of a circular carrier substrate 13 made of a hard metal plate such as stainless steel, carbon steel, or titanium. In addition, an opening 14 for forming the work holding hole 12 is formed in the plate surface of the carrier substrate 13, and a hollow shape (ring that contacts the outer circumference of the work W in the inner circumference of the opening 14). The insert 15 of the shape) is fixed, and the inside of this insert 15 is made into the said workpiece holding hole 12. As shown in FIG.

The insert 15 is formed of a material such as a synthetic resin softer than the carrier substrate 13, and is in buffer contact with the outer circumference of the work W. In the illustrated example, the thickness of the insert 15 is It is formed equal to the thickness of (refer FIG. 4). However, the thickness of the insert 15 can be formed thicker or thinner than the thickness of the carrier substrate 13.

Attachment of the insert 15 to the carrier substrate 13 is preferably performed by injection molding. As the method, a synthetic resin is injection molded into a ring shape along the inner circumference of the opening 14 of the carrier substrate 13 to attach the insert 15 to the carrier substrate 13 simultaneously with the molding thereof, or a synthetic resin. And injection molding the entire interior of the opening 14 into a plate shape, and then punching the synthetic resin plate into a ring shape to form the insert 15 and the work holding hole 12. Thus, the method of attaching the insert 15 to the carrier substrate 13 at the same time as the injection molding is already known as described in Patent Document 4, so a detailed description thereof will be omitted.

In order to firmly fix the insert 15 to the carrier substrate 13, as can be seen from FIGS. 2 and 3, the inlet edge of the opening 14 is spaced at a predetermined distance from the inner circumference of the opening 14. The plurality of concave portions 18 positioned at equal intervals in the circumferential direction of the opening 14 and the plurality of protruding portions 19 interposed between the adjacent concave portions 18 and 18 are formed by cutting out the concave shape. It is. 4 and 5, an inner circumferential surface of the protruding portion 19 has an angular groove-type locking groove 22 having a corner portion 22a in a part of the groove in the circumferential direction of the opening 14. It extends and is formed.

In this way, the insert 15 is injection molded into the opening 14 having the recess 18 and the protrusion 19 formed therein, so that a plurality of convex fittings to the recess 18 are formed on the outer circumference of the insert 15. The portion 20 and the plurality of recesses 21 into which the protrusions 19 are fitted are alternately formed in the circumferential direction of the insert 15, and the locking grooves are formed on the outer circumferential surface of the recess 21. A locking projection 23 having a square cross section having a corner portion 23a suitable for each corner portion 22 is formed extending in the circumferential direction of the insert 15, and the locking projection 23 is formed in the locking groove 22. The insert 15 is attached to the inner circumferential portion of the opening 14 of the carrier substrate 13 in a state where it is firmly fixed.

In the example shown in figure, the inner peripheral surface 18a of the recessed part 18 in the said carrier substrate 13, and the outer peripheral surface 20a of the convex part 20 in the insert 15 are shown in FIG. Similarly, the carrier substrate 13 and the insert 15 have a surface coincident with the thickness direction, and the locking groove 22 and the locking protrusion 23 as described above are not formed on these surfaces.

However, the locking grooves 22 and the locking projections 23 may be formed at the same time on the inner circumferential surface 18a of the concave portion 18 and the outer circumferential surface 20a of the convex portion 20. Alternatively, instead of forming the locking groove 22 and the locking protrusion 23 in the protrusion 19 and the depression 21, the locking groove 22 and the locking groove 22 in the concave portion 18 and the convex portion 20 are engaged. The protrusion 23 may be formed.

The locking groove 22 has a V-shaped cross section, and has two side walls 22b and 22b which are inclined in a shape opposite to each other and narrowing inwardly, and a groove bottom at which these side walls 22b and 22b intersect. The said corner part 22a is formed in the part. Accordingly, the locking protrusion 23 also has a V-shaped cross section, and has two sidewalls 23b and 23b which are inclined in a shape that is opposite to each other and narrows forward, and the corner portions at the tip portions where these sidewalls intersect. 23a is formed. In this case, the cross-sectional shapes of the locking grooves 22 and the locking projections 23 may be symmetrical or asymmetrical as shown in FIGS. 4 and 5.

In addition, the locking groove 22 is formed such that the maximum groove width of the groove inlet portion is the same as the thickness of the carrier substrate 13, and the locking protrusion 23 also has the maximum protruding thickness of the proximal end of the insert 15. 7, the maximum groove width of the locking groove 22 and the maximum protrusion thickness of the locking protrusion 23 are smaller than the thickness of the carrier substrate 13 and the insert 15. It may be.

The insert 15 may be formed as an independent member by a suitable manufacturing method such as punching, press molding or injection molding, and may be inserted into an inner circumference of the opening 14 of the carrier substrate 13 and fixed with an adhesive. Do. At this time, this insert 15 can also be attached so that replacement is possible.

In addition, even when the insert 15 is fixed to the carrier substrate 13 at the same time as injection molding as described above, the insert 15 can be replaced when wear or damage occurs. The replacement is performed by removing the old insert and then fixing the new insert to the carrier substrate 13 simultaneously with injection molding.

The work carrier 10 formed as described above has a angular projection of the square cross section formed on the outer circumferential surface of the insert 15 in the angular groove-shaped locking groove 22 formed on the inner circumferential surface of the opening 14 of the carrier substrate 13. And the insert 15 is attached to the carrier substrate 13 by being fitted, the locking force of the insert 15 against the carrier substrate 13 is large, and the arc-shaped locking groove and the locking protrusion are combined. Slip due to the locking groove like the prior art is difficult to occur. For this reason, the fall of the insert 15 by the action force at the time of grinding | polishing of a workpiece, etc. is reliably prevented.

In addition, the insert 15 extends inwardly from the opening 14 of the carrier substrate 13 so that the exposure width exposed to the upper and lower surfaces of the carrier can be reduced. It is hard to produce the abrasion by. That is, since the locking protrusion 23 is formed on the outer circumference of the insert 15, the locking protrusion 23 is a locking groove of the carrier substrate 13 even if the width of the apparent member in the inner and outer diameter direction of the insert 15 is large. Since it fits in the (22), it covers with the carrier substrate 13 from both sides, and the exposure width of the insert exposed from the carrier substrate 13 actually becomes small. As a result, the exposure width of the insert 15 becomes small in this manner, making it difficult to wear. As a result, the wear of the insert 15 increases the amount of polishing at the end of the workpiece, which makes it difficult to produce a "surface deflection" phenomenon in which the flatness decreases. Lose.

In the above embodiment, the locking groove 22 formed in the carrier substrate 13 and the locking protrusion 23 formed in the insert 15 have a V-shaped cross-sectional shape, but their cross-sectional shapes are mutually suitable square cross-sections. As long as it is a shape, shapes other than this may be sufficient, for example, it can also be set as cross-sectional shape as shown to FIGS. 8-10.

In the work carrier 10 shown in FIG. 8, the engaging groove 22 and the engaging protrusion 23 have a substantially trapezoidal cross-sectional shape, respectively. That is, the engaging groove 22 has two sidewalls 22b and 22b which are inclined in a shape that is opposite to each other and narrows inward, and a flat bottom wall 22c connecting these sidewalls to each other, and these sidewalls 22b, Two corner parts 22a are formed in the part where 22b) and the bottom wall 22c cross | intersect. Similarly, the locking projections 23 also have two side walls 23b and 23b which are inclined in the opposite direction and narrow in the forward direction, and flat end walls 23c which connect the side walls with each other. Two corner portions 23a are formed at the intersection of 23b and the end wall 23c.

Also in this case, as in the example shown in FIG. 7, the maximum groove width of the locking groove 22 and the maximum protrusion thickness of the locking protrusion 23 can be formed smaller than the thicknesses of the carrier substrate 13 and the insert 15. have.

In addition, the work carrier 10 shown in FIG. 9 has a locking groove 22 and a locking protrusion 23 having a substantially C-shaped cross-sectional shape, and the locking groove 22 extends in parallel with each other at a constant interval. It has two side walls 22d and 22d, and the flat bottom wall 22c which connects these side walls, The two corner parts 22a are formed in the part where these side walls 22d and 22d and the bottom wall 22c cross | intersect. The locking protrusion 23 also has two side walls 23d and 23d extending in parallel with each other and a flat end wall 23c, and a portion where these side walls 23d and 23d and the end wall 23c intersect. Two corner portions 23a are formed in the grooves.

In addition, in the work carrier 10 shown in FIG. 10, although the engaging groove 22 and the engaging protrusion 23 have a substantially V-shaped cross-sectional shape, the inclination angle of the two side walls 22b, 22b, 23b, 23b is changed. By changing at the intermediate position, the corner portions 22a and 23a are also formed at the intermediate position of the side wall. Also in this case, you may form the flat bottom wall 22c and the end wall 23c as shown in FIG.

The shapes of the protrusions 19 formed on the carrier substrate 13 and the depressions 21 formed on the insert 15 are also substantially rectangular in the example shown in FIG. 3, but are not limited to such shapes. And other arbitrary shapes that can be fitted together, for example, as shown in FIG. 11 or FIG. 12.

In the example shown in FIG. 11, both the protrusions 19 and the recesses 21 have a dovetail shape, of which the protrusions 19 gradually widen forward, and the recesses 21 gradually. It is shaped to be widened inside. Accordingly, in the carrier substrate 13, the concave portion 18 adjacent to the protruding portion 19 gradually expands inward, and in the insert 15, the convex portion 20 adjacent to the depression 21 is formed. ) Gradually forms a forward shape. On the other hand, in the example shown in FIG. 12, the protrusion part 19 and the recessed part 21 are formed in substantially C shape.

In addition, in the said embodiment, in attaching the insert 15 to the opening 14 of a carrier main body, the recessed part 18 and the convex part fitted in mutually to the inlet edge of the said opening 14 and the outer periphery of the insert 15 ( 20 is formed, but the insert 15 having a uniform outer diameter over the entire circumference is formed in the opening 14 having a uniform inner diameter over the entire circumference without forming such a concave portion 18 and the convex portion 20. ) May be attached. In this case, the locking groove 22 and the locking protrusion 23 may be formed continuously or partially or intermittently in the entire inner circumference of the opening 14 and the entire outer circumference of the insert 15.

In addition, the said workpiece holding hole 12 is not limited to the circular thing as shown in the said embodiment, and when the workpiece | work which should be hold | maintained is rectangular or other rectangular shape, it is rectangular or other rectangular shape according to the workpiece | work. It is formed as.

1 is a plan view showing one embodiment of a work carrier according to the present invention.

FIG. 2 is a partially enlarged view of FIG. 1.

3 is a partially enlarged view illustrating a portion of FIG. 2 in an enlarged manner.

4 is a cross-sectional view taken along a line A-A in FIG. 3.

FIG. 5 is an exploded view of the insert separated from the carrier substrate in FIG. 4. FIG.

It is sectional drawing in the B-B line | wire in FIG.

7 is a cross-sectional view at a position similar to FIG. 4 showing another example of the shape of the locking groove and the locking projection.

8 is a cross-sectional view at a position similar to FIG. 4 showing still another example of the shape of the locking groove and the locking protrusion.

9 is a cross-sectional view at a position similar to FIG. 4 showing still another example of the shape of the locking groove and the locking protrusion.

10 is a cross-sectional view at a position similar to FIG. 4 showing still another example of the shape of the locking groove and the locking protrusion.

It is a partial enlarged view in the position similar to FIG. 3 which shows the other example of a shape of a protrusion part and a recessed part.

It is a partial enlarged view in the position similar to FIG. 3 which shows another example of the shape of a protrusion part and a recessed part.

13 is a plan view of a conventional work carrier.

It is a principal part sectional drawing which shows the form which grinds a workpiece | work with a planar polishing apparatus using a workpiece carrier.

15 is a partially enlarged cross-sectional view of a conventional work carrier.

16 is a partially enlarged cross-sectional view of another conventional work carrier.

17 is a partially enlarged cross-sectional view of another conventional work carrier.

18 is a partially enlarged cross-sectional view of another conventional work carrier.

(Explanation of symbols for the main parts of the drawing)

W: Work 10: Work Carrier

12 workpiece holding hole 13 carrier substrate

14: opening 15: insert

18: recess 19: protrusion

20: convex 21: depression

22: locking groove 22a: each part

23: engaging projection 23a: each part

Claims (3)

In a work carrier in which an opening for forming a work holding hole is formed in a metal carrier substrate, an insert softer than the carrier substrate is fixed to an inner circumference of the opening, and the inside of the insert is the work holding hole. A angular groove-type locking groove having a corner portion in the groove wall is formed in at least a portion of the inner circumference of the opening and extends in the circumferential direction of the opening, and at least a portion of the insert outer circumference has a corner portion suitable for the corner portion of the locking groove. A workpiece carrier having a cross section extending in the circumferential direction of the insert, wherein the insert is fixed to the carrier substrate by being caught in the locking groove. The work carrier according to claim 1, wherein the cross-sectional shapes of the locking grooves and the locking protrusions are any one of a V shape, a trapezoidal shape, and a C shape. The projection portion according to claim 1 or 2, wherein the projection portion interposed between the plurality of recesses and the recesses adjacent to the inner circumference of the opening is formed by cutting the inlet edge of the opening of the carrier substrate at a predetermined interval. It is formed, and the outer periphery of the insert is formed between the plurality of convex parts and the adjacent convex parts to be fitted to the concave portion is formed a depression to which the projection is fitted, the concave portion and the convex portion fitted to each other and And / or the locking groove and the locking protrusion are formed in the protrusion and the depression.

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