KR20080092262A - Transfer head of laser transfering apparatus - Google Patents

Abstract

A transfer head of a laser transferring apparatus is provided to prevent damage of a repair object by moving a transfer plate vertically and contacting the transfer plate with an upheaval on the transferred surface while moving the transfer plate horizontally. A transfer plate(101) is formed on a transfer head(1) of a laser transferring apparatus. A transfer agent faces a transferred surface(102a) of a transfer object(102). The transfer head includes a transfer plate holder(103) having an opened transfer window(103a), a transfer head base(104) having an empty space(104a) for receiving the transfer plate holder, a holder supporter, a transfer plate lifting unit, and compressed air escape holes(103c). The holder supporter has a leaf spring(107) which is arranged with a viewing window(107a). A flexible tube(108) supplies compressed air of the transfer plate holder to inlet holes(103b). Compressed air passages communicate with the inlet holes and with a plurality of compressed air spraying holes(103e) of a lower surface of the transfer plate holder.

Description

TRANSFER HEAD OF LASER TRANSFERING APPARATUS}

TECHNICAL FIELD This invention relates to the transfer head of the laser transfer apparatus suitable as a laser repair apparatus etc. which perform defect repair of a circuit pattern, for example in display apparatuses, such as a liquid crystal display and a plasma display.

Conventionally, in a display apparatus such as a liquid crystal display or a plasma display, a laser repair apparatus using a laser CVD method is employed to perform defect repair of a circuit pattern.

The laser repair apparatus using the laser CVD method employs a chemical vapor growth method using a laser. Specifically, the laser repair apparatus irradiates a laser onto a substrate placed in the source gas, and performs chemical and physical reactions of the source gas on the laser irradiation surface. By accelerating, the film of source gas is grown on the repair part on a board | substrate.

However, in the laser repair apparatus using such a conventional laser CVD method, only the gasizable material (W, Cr, Mo) can be used as the repair material, and the chemical and physical properties of the source gas on the laser irradiation surface Due to the use of the reaction, the problem of slow recovery speed has been pointed out.

On the other hand, as a laser repair apparatus which can solve such a problem, the laser repair apparatus using the laser transfer method (LMT: Laser Metal Transfer) is known (for example, refer patent document 1).

The principle of the laser repair apparatus using this laser transfer method is shown in FIG. In the figure, a is a quartz glass plate, b is a thin film of a conductive metal to be a repair material, c is a substrate, d is a circuit pattern, e is a lens, f is a laser beam, g is a defect point on a circuit pattern, and b 'is blown. It is a metal thin film. In this example, the combination of the quartz glass plate a and the thin film b serves as a transfer plate.

In this laser transfer method, first, as shown in the figure (a), the thin film b of the repair material is provided on the objective surface on the substrate c having the defect point g. The quartz glass plates a are opposed to each other at a distance L, and the laser beam f is tightened to a predetermined spot shape through the lens e and irradiated as shown in FIG. Then, as shown in FIG. (C), the thin film part b 'irradiated with the laser beam f is scattered, and as shown in FIG. (D), the defect location on the circuit pattern d is shown. Attach on (g). At this time, when the line width of the repaired portion is set to 2 to 5 m, the distance L is about 1 to 20 m.

Patent Document 1: Japanese Patent Application Laid-Open No. 2000-31013

In such a laser repair apparatus using the conventional laser transfer method, various metals such as Al, Ni, Ta, W, Ti, Au, Ag, Cu, Cr, etc. can be selected as the metal film serving as the repair material. Since the transfer plate can be repaired by only irradiating with a laser, there is an advantage that the repair speed is high.

By the way, in this type of laser repair apparatus, in order to obtain a transfer film having a necessary line width on the surface of a display device or the like to be a repair target, the distance between the surface of the transfer target and the transfer material film is always in a micron order (for example, 1 to 20). Micrometers) is required.

However, since the surface of this kind of repair object (such as a substrate of a display device) originally has irregularities of the micron order, the distance from the surface is always kept in the micron order (for example, 1 to 1) at any position on the repair object. 20 micrometers) becomes difficult in the normal servo control technique using a servo motor, a linear motor, or the like.

In addition, this kind of repair object (display device, etc.) is susceptible to electric and magnetic influences, and therefore, it is not possible to adopt a floating control method using static electricity or magnetism.

SUMMARY OF THE INVENTION The present invention has been made in view of such a conventional problem, and an object thereof is that in this type of laser transfer apparatus represented by a laser repair apparatus, the distance between a thin film, which is a transfer material, and a transfer object is always in a micron order ( For example, it is providing the transfer head of the laser transfer apparatus which can be maintained at 1-20 micrometers).

Other objects and effects of the present invention will be readily understood by those skilled in the art by referring to the following description of the specification.

The technical problem mentioned above can be solved by the transfer head of the laser transfer apparatus which has the following structures.

That is, the transfer head of this laser transfer apparatus is a transfer plate formed by depositing a transfer material thin film on the objective surface of a plate-shaped small piece having laser permeability, so that a minute almost constant gap is maintained between the transfer objects. It is for supporting in the state which the transfer material thin film faced to the substantially horizontal to-be-transferred surface of.

The transfer head of the laser transfer device includes a transfer plate holder having a transfer window supported on a lower surface thereof, and a transfer window for exposing the transfer plate to an upper surface side thereof, and a space for accommodating the transfer plate holder. A transfer head base having a space and giving a positional reference in a horizontal direction and a vertical direction, and a transfer plate holder accommodated in a space for accommodating a transfer plate holder of the transfer head base. And a holder support mechanism for supporting the movable plate in a horizontally movable manner, and by injecting a pressurizer under the transfer plate holder, thereby causing the transfer plate to float on the transfer plate holder for each transfer plate holder. ) Has a transfer plate floating means.

Here, the transfer plate floating means has a plurality of pressure injecting holes for injecting pressure in the lower portion of the transfer plate holder, and the pressure injecting holes surround the outer circumference of the transfer plate. It is disposed on the lower surface of the holder.

Here, as the "pressor", various kinds of gases can be employed depending on the properties of the repair target. In the case where the object to be repaired does not like oxidation of a circuit pattern or the like, an inert gas (for example, nitrogen gas or the like) can be employed as the type of the inflator.

According to such a configuration, the control for maintaining the distance between the transfer surface of the transfer target object and the transfer plate at a minute value is not performed by an electric servo control using a servo motor, a linear motor, or the like, but between the transfer plate holder and the transfer surface. Since it is carried out through a pressure injected into the transfer plate, the transfer plate is transferred to the transfer surface even when the transfer plate and the transfer surface provided in the transfer plate holder are opposed to each other with a small distance therebetween. In order to follow the irregularities of the image and move properly, it is possible to prevent the possibility of contacting a large bump on the surface to be transferred and destroying a repair object constituting the surface to be transferred during horizontal movement of the transfer plate.

In particular, when this type of laser transfer apparatus is realized as a laser repair apparatus, in order to repair a defect on a circuit pattern, a plurality of shots are transferred to the same defect point on the circuit pattern while the transfer plate is moved in the horizontal direction by a predetermined pitch. In this case, if there are irregularities in the micron order on the surface of the repair object, there is a risk of colliding with this and breaking the circuit pattern. In other words, when moving in the horizontal direction while maintaining the distance by the electric servo control, the transfer plate is likely to collide with the repaired object due to the roughness of the precision and the delay of the response speed. According to the relative alignment control that maintains the distance between them by the pressure blown between the repaired object and the transfer plate or transfer plate holder, even if such a ridge exists, the transfer plate follows the movement. It is possible to keep the distance between them at an optimal value at all times without using complicated servo control.

In addition, when realizing this invention as a laser repair apparatus, in order to shorten the tact time of a repair process, if only by electrical control, the transfer plate to a repair target object will be measured, measuring the distance with a repair target object every time. In order to use the self-aligned self-levitation control of the present invention, which requires a relatively long time for each approach, the transfer plate is to be repaired with roughly open loop control. After approaching to the surface, it is possible to leave the floating control by the pressurized air, so that the distance control does not need to be performed for each approach, and the tact time can be shortened.

In addition, by providing a pressure injecting hole for injecting the pressure under the transfer plate holder so as to surround the outer periphery of the transfer plate on the lower surface of the transfer plate holder, the pressure injector is transferred to the transfer plate and the transfer plate rather than the case where the pressure plate injection hole is provided in the transfer plate itself. It becomes difficult to enter between objects, and it becomes difficult to be influenced by an air pressure when blowing a thin film from a transfer plate to a laser beam.

In the present invention described above, between the pressure injecting hole array at the lower surface of the transfer plate holder and the outer periphery of the transfer plate, the pressure inducing hole for evacuating the pressure injected from the pressure injecting hole array to the upper surface side of the transfer plate holder. Can be prepared.

According to such a configuration, the pressure injecting from the pressure injecting hole is provided between the pressure injecting hole array and the transfer plate outer periphery by providing a pressure inducing hole for evacuating the pressure injecting from the pressure injecting hole array to the upper side of the transfer plate holder. When the thin film is blown from the transfer plate to the laser beam, it becomes more difficult to be affected by the pressure.

Next, in the above-mentioned invention, the transfer plate floating which raises the said transfer plate for every said transfer plate holder with respect to the said transfer surface by the pressure | pressure which blows in between the lower surface of the said transfer plate holder and the to-be-transferred surface of the said transfer object. As a means, the following structures can be employ | adopted.

That is, as an example of the transfer plate floating mechanism, there are pressurizing means for supplying the pressurization from a predetermined pressurizing source to the pressurizing inlet hole of the transfer plate holder, the presser inlet hole of the transfer plate holder and the transfer plate holder lower surface. The intake passage in the holder communicating with the plurality of intake ejection holes of the inlet, whereby the intake from the intake source is passed from the intake injection hole of the transfer plate via the intake passage in the holder, By blowing between the transfer surfaces of the transfer object, the transfer plate can be configured to float on each transfer plate holder with respect to the transfer surface.

According to such a configuration, since the pressure injector is ejected from the transfer plate itself to be injured to the lower surface, it is possible to reliably maintain the distance between the transfer plate provided on the transfer plate holder and the transfer surface. At this time, the pressure supply means may be a flexible tube that connects the pressure source and the pressure inlet hole of the transfer plate holder, and is located on the outer circumferential surface of the transfer plate holder on the inner circumferential surface of the transfer plate holder accommodation space. The pressure injection nozzle may be used to blow the pressure into the pressure inlet hole.

In the case of using a flexible tube, the necessary pressure can be reliably taken out from the lower surface of the transfer plate holder without using a high pressure. On the other hand, when the pressure injecting nozzle is used, it is not necessary to couple the flexible tube to the transfer plate holder, and there is an advantage that the shanghai copper of the transfer plate holder is not interfered by the flexible tube.

Further, the transfer plate floating mechanism has a plurality of injector injection holes for injecting the pressurized air from the pressurizing source on the lower surface of the inner periphery of the transfer plate holder accommodation space of the transfer head base, whereby the transfer head The transfer to the transfer surface is performed by blowing an injector ejected from the pressurizing injection hole on the lower surface of the inner periphery of the transfer plate holder accommodating space of the gas between the transfer plate holder and the transfer surface of the transfer target object. The plate may be configured to float for each transfer plate holder.

According to such a structure, since it is not necessary to supply a pressurizer from the transfer head base side to the transfer plate holder side, the transfer plate holder can move freely without being restrained by a flexible tube, and the smoothness of the transfer plate holder is carried out. We can guarantee Shanghaidong.

At this time, the upper periphery of the inner periphery of the transfer plate holder accommodating space of the transfer head base has a plurality of pressure injecting holes for injecting the pressure from the pressure source, whereby the pressure from the pressure source is The floating action of the transfer plate holder may be assisted by spraying the lower surface of the flange portion protruding radially outward from the transfer plate holder outer periphery.

According to such a configuration, since the weight of the actual transfer plate is reduced in weight, the transfer plate is moved up and down sensitively to a change in air pressure between the transfer plate holder and the transfer surface, thereby improving the lifting response of the transfer plate. Can be.

In addition, an outer circumferential surface of the transfer plate supported on the bottom surface of the transfer plate holder is formed on the bottom surface of the transfer plate holder by forming an annular protrusion downwardly falling along the outer periphery of the transfer plate holder. And a space functioning as the pressure storage unit may appear between the inner circumferential surface of the annular projection.

According to such a structure, by the presence of the pressure storage unit, the pressure injected from the plurality of pressure injection holes can be smoothly blown between the transfer plate holder and the surface to be transferred.

Next, in the present invention described above, as a holder support mechanism for supporting the transfer plate holder accommodated in the empty space for accommodating the transfer plate holder of the transfer head base, the movable plate body can be moved from the transfer head base without moving horizontally. Various configurations can be adopted.

As an example of the holder supporting mechanism, the inner circumferential edge of the transfer plate holder accommodating space is a fixed end, and the outer periphery of the transfer plate holder accommodated in the transfer plate holder accommodating space is a free end. And it can be comprised by the leaf spring which supports both so that the said transfer plate holder may be movable to the said transfer head base | substrate.

According to such a configuration, only the plate spring is fixed to both the gap between the transfer plate holder and the transfer head base, so that the function of moving horizontally and non-moving horizontally can be realized. It is possible to produce a plated hole on the leaf spring, and to form the punched side plate spring portion in a balanced manner, and to support the outer circumference of the transfer plate holder evenly, thereby providing a transfer plate without distortion. The holder can be moved up and down.

As another example of the holder support mechanism, the transfer plate holder is interposed between an inner circumferential surface of the transfer plate holder accommodating space and an outer circumferential surface of the transfer plate holder accommodated in the transfer plate holder accommodating space, so that the transfer plate holder is moved up and down with respect to the transfer head base. It can be comprised by the steel ball guide which supports both so that a movement is possible.

According to such a structure, since the steel ball guide which is a kind of ball bearing is employ | adopted, the smooth movement of the transfer plate holder can be carried out according to the precision of the roundness of the steel ball, and the transfer plate Following the air pressure between the transfer surface and the transfer surface, the transfer plate holder can be raised and lowered in response to the elevation on the transfer surface.

As another example of the holder support mechanism, the transfer plate holder is interposed between an inner circumferential surface of the transfer plate holder accommodating space and an outer circumferential surface of the transfer plate holder accommodated in the transfer plate holder accommodating space, so that the transfer plate holder is moved up and down with respect to the transfer head base. It can be comprised by the compression spring which elastically press-supports between both so that a movement is possible.

According to such a structure, since the transfer plate holder is pressurized evenly from the outer circumference toward the center through the expansion pressure of the compression spring, the movement of the transfer plate holder in the horizontal direction is reliably regulated, and the transfer The plate holder is subjected to pressure between the transfer plate and the surface to be transferred and moves to Shanghai East.

As another example of the holder support mechanism, the transfer plate holder is interposed between an inner circumferential surface of the transfer plate holder accommodating space and an outer circumferential surface of the transfer plate holder accommodated in the transfer plate holder accommodating space, so that the transfer plate holder is moved up and down with respect to the transfer head base. It can be comprised by the resin bearing which slidably supports between both so that a movement is possible.

According to such a structure, since the resin bearing makes the transfer plate holder move relatively smoothly and relatively smoothly, relatively good shank copper can be realized at low cost.

In the series of inventions described above, as the means for supporting the transfer plate to the transfer plate holder, an adhesive agent, a vacuum suction means, or a coupling mechanism can be used.

When the adhesive is used, the effort of peeling is necessary, but there is an advantage that separate adsorption piping and coupling are unnecessary. On the other hand, when a vacuum chuck mechanism is used, attachment and detachment at the time of exchange becomes easy. On the other hand, when the coupling mechanism is used, the transfer plate can be detached from the transfer plate holder only by replacing the coupling mechanism.

According to the present invention, the control for maintaining the distance between the transfer surface of the transfer target object and the transfer plate at a fine value is not performed by the electric servo control using a servo motor, a linear motor, or the like, but the pressure injector is injected below the transfer plate holder. Since the transfer plate and the transfer surface face each other at a small distance to each other, even if the two are relatively moved, the transfer plate follows the unevenness on the transfer surface to move properly. During the horizontal movement of, it is possible to prevent the possibility of contacting a large bump on the surface to be transferred and destroying the repair object constituting the surface to be transferred.

In particular, when this type of laser transfer apparatus is realized as a laser repair apparatus, in order to repair a defect on a circuit pattern, a plurality of shots are transferred to the same defect point on the circuit pattern while the transfer plate is moved in the horizontal direction by a predetermined pitch. In this case, if there are irregularities in the micron order on the surface of the repair object, there is a risk of colliding with this and breaking the circuit pattern. In other words, when moving in the horizontal direction while maintaining the distance by the electric servo control, the transfer plate is likely to collide with the repair object due to the roughness of the precision and the delay of the response speed. According to the relative alignment control that maintains the distance between them by the pressure injected between the repair object and the transfer plate or the transfer plate holder, even if such a ridge exists, the transfer plate follows the movement. It is possible to keep the distance between them at an optimal value at all times without using complicated servo control.

In addition, when realizing this invention as a laser repair apparatus, in order to shorten the tact time of a repair process, if only by electrical control, the transfer plate to a repair target object will be measured, measuring the distance with a repair target object every time. The approach of the transfer plate to the surface of the repaired object can be achieved with roughly open loop control by using a relative magnetic force control like the present invention, since it requires a relatively long time for each approach. After that, it can be left to the floating control by pressurization, and it is not necessary to perform distance control every time approaching, and it becomes possible to shorten a tact time.

In addition, a pressure injecting hole for injecting the pressure under the transfer plate holder is provided on the lower surface of the transfer plate holder so as to surround the outer periphery of the transfer plate. It is difficult to enter between the transfer objects, so that when the thin film is blown from the transfer plate to the laser beam, it is difficult to occur that the transfer material is separated from the target position and deposited. Further, here, by providing an inlet escape hole for evacuating the injector ejected from the injector ejection hole array to the upper surface side of the transfer plate holder between the injector ejection hole array and the outer periphery of the transfer plate, the injector ejected from the injector ejection hole is evacuated. Since it escapes from a hole, it becomes hard to be influenced by an indentation at the time of transfer. Moreover, since it ends without providing a blowing hole in a transfer plate, a transfer material can be supplied in low cost.

EMBODIMENT OF THE INVENTION Below, one Embodiment of the suitable transfer head of the laser transfer apparatus which concerns on this invention is described in detail, referring an accompanying drawing.

The structural diagram of 1st Embodiment of the transfer head of the laser transfer apparatus which concerns on this invention is shown in FIG. In addition, FIG. (A) is a top view, (b) is sectional drawing.

As is clear from these drawings, the transfer head 1 of this laser transfer apparatus is formed of a transfer material on an objective surface (lower surface in the drawing) of a plate-shaped piece having a laser permeability (for example, a plate-shaped piece of quartz glass). The transfer plate 101 formed by depositing a thin film (for example, Al, Ni, Ta, W, Ti, Au, Ag, Cu, Cr, etc.) is transferred so that a minute almost constant gap is maintained therebetween. This is for supporting the transfer material thin film (not shown) facing the substantially horizontal transfer surface 102a of the object 102.

The transfer head 1 includes a transfer plate holder 103 on which a transfer plate 101 is supported on a lower surface thereof, and a transfer window 103a for exposing the transfer plate 101 to an upper surface side thereof is opened, and a transfer plate holder accommodation. A transfer head base 104 having a dragon gap 104a and giving a reference position in the horizontal and vertical directions, and a transfer housed in the gap 104a for accommodating the transfer plate holder of the transfer head base 104. A holder support mechanism (detailed later) that supports the plate holder 103 in a movable and non-movably horizontal manner with respect to the transfer head base 104, and a pressurizer 105 below the transfer plate holder 103. ), The transfer plate floating means for causing the transfer plate 101 to rise for each transfer plate holder 103 with respect to the transfer surface 102a, and the pressurizer for escaping the presser 105 above the transfer plate holder 103. It has an evacuation hole 103c.

In this example, the holder supporting mechanism has a fixed end and an outer circumferential edge of the transfer plate holder 103 accommodated in the transfer plate holder accommodation gap 104a as a free end. The transfer plate holder 103 is configured by a leaf spring 107 that supports the transfer plate holder 103 so that the transfer plate holder 103 can move in and out relative to the transfer head base 104. Here, the window 107a for observation is provided in the leaf spring 107, and the observation window 107a measures the distance between the transfer plate 101 and the transfer target object 102, and the specific location on the transfer target object 102. Irradiation to the laser beam can be used. Thereby, for example, when the to-be-transferred object 102 is a board | substrate and there are an excess part in the circuit pattern on a board | substrate, it becomes possible to cut a circuit pattern by irradiating a laser beam to the surplus part from the observation window 107a. In addition, although it is shown in the figure as the leaf spring 107 as a simple plate piece of a long rectangular shape, it will be easily understood by those skilled in the art, but in practice, a plurality of suitable punching holes or cut lines are formed. In this way, the plurality of portions are configured to achieve the function as the leaf spring locally.

On the other hand, as the transfer plate floating means, a flexible tube functioning as the pressure supply supply means for supplying the pressure from a predetermined pressure source (not shown) to the pressure inlet hole 103b of the transfer plate holder 103. And a pressure inlet passage 103d in the holder communicating with the pressure inlet hole 103b of the transfer plate holder 103 and the plurality of pressure injection holes 103e on the lower surface of the transfer plate holder 103, Thereby, the pressure-transfer surface 102a is injected by injecting the pressure from a pressure source (not shown) from the pressure injecting hole 103e to the lower side of the transfer plate holder 103 via the pressure inlet passage 103d in the holder. With respect to the transfer plate 101, the transfer plate holder 103 is floated.

Moreover, as a means for supporting the transfer plate 101 to the transfer plate holder 103, an adhesive agent, a vacuum suction means, etc. can be used. Here, the vacuum suction means is provided with a suction passage in the holder for communicating a plurality of suction holes provided in the lower surface of the transfer plate holder 103 and suction holes provided in the outer peripheral surface of the transfer plate holder 103, It is a means configured to suck the transfer plate 101 by suctioning from the suction hole provided in the outer peripheral surface of the transfer plate holder 103 by the suction tube connected.

According to the above structure, the transfer plate holder 103 is supported by the transfer head base 104 via the leaf spring 107 and can be moved freely in the vertical direction while the movement in the horizontal direction is restricted. Therefore, when the pressure injector 105 is injected from the plurality of pressure injector injection holes 103e, the fine distance L (1 to 20 µm) is caused by the floating action caused by the pressure between the transfer plate 101 and the transfer surface 102a. ) Is maintained. Therefore, if the whole transfer head 1 is approached to the distance of about 100 micrometers by electrical open-loop control, for example, and the injector 105 is sprayed from the some injector injection port 103e, it will remain as it is. Even if left unattended, the distance between the transfer plate 101 and the transfer surface 102a is maintained at the fine distance L, so that the transfer plate 101 does not collide with the transfer surface 102a.

In addition, between the pressure injecting hole 103e and the outer periphery of the transfer plate 101, the pressure injector 105 injected from the pressure injecting hole array is retracted to the upper surface side of the transfer plate holder 103. Since the pressurizing evacuation hole 103c for evacuating is provided, the pressurizer 105 can be prevented from entering between the transfer plate 101 and the transfer target object 102, and the influence on the film transfer can be prevented.

Next, the configuration diagram of the second embodiment of the transfer head 1 according to the present invention is shown in FIG. In addition, in drawing, the same code | symbol is attached | subjected about the same component as 1st Embodiment, and description is abbreviate | omitted.

The characteristic of this 2nd Embodiment is that a holder support mechanism is interposed between the inner peripheral surface of the transfer plate holder accommodation gap 104a, and the outer peripheral surface of the transfer plate holder 103 accommodated in the transfer plate holder accommodation gap 104a, The compression spring 110 which elastically press-supports both sides is employ | adopted so that the transfer plate holder 103 may be movable to the transfer head base | substrate 104. FIG.

According to the second embodiment, the transfer plate holder 103 having a square shape in plan view is housed in a square transfer plate holder accommodation space 104a formed in the transfer head base 104, and the four thereof. The sides are supported while being press-contacted through the compression spring 110 at six places. Therefore, the transfer plate holder 103 is free to move in the vertical direction in a state where the movement in the horizontal direction is restricted.

Next, the configuration diagram of the third embodiment of the transfer head according to the present invention is shown in FIG. In addition, in the same figure, the same code | symbol is attached | subjected about the same component part as said 1st and 2nd embodiment, and description is abbreviate | omitted.

The transfer head 1 according to the third embodiment is characterized by the transfer plate holder 103 in which the holder support mechanism is accommodated in the inner circumferential surface of the transfer plate holder accommodation space 104a and the transfer plate holder accommodation space 104a. The steel plate guide 111 is interposed between the outer circumferential surfaces of the steel sheet, and is supported by the steel ball guides 111 that support the transfer plate holder 103 so that the transfer plate holder 103 can move in and out of the transfer head base 104.

According to such a structure, the transfer plate holder 103 which was square in planar view is accommodated in the hollow 104a for accommodating the square transfer plate holder formed in the transfer head base 104, and its four sides. It is freely supported by the Shanghai East through six steel ball guide (111).

Therefore, when the presser 105 is sprayed from the lower surface of the transfer plate 101, the transfer plate 101 is guided to the steel ball guide 111 together with the transfer plate holder 103 to move up and down, thereby transferring the transfer plate 101. And the distance L between the transfer surface 102a is maintained at a micron order (for example, 1 to 20 mu m).

The structural diagram of 4th Embodiment of the transfer head which concerns on this invention is shown in FIG. The feature of this fourth embodiment is, as a holder support mechanism, interposed between an inner circumferential surface of the transfer plate holder accommodation gap 104a and an outer circumferential surface of the transfer plate holder 103 accommodated in the transfer plate holder accommodation gap 104a, The resin bearing 112 which slides between both sides of the transfer plate holder 103 so that a transfer plate holder 103 can be moved with respect to the transfer head base | substrate 104 is employ | adopted. In addition, in the same figure, the same code | symbol is attached | subjected about the same component as the previous embodiment, and description is abbreviate | omitted.

According to the fourth embodiment, the transfer plate holder 103 is accommodated in the transfer plate holder accommodation space 104a of the transfer head base 104 and freely supported by the resin bearing 112. Therefore, by injecting the presser 105 from the lower surface of the transfer plate 101, the distance L between the transfer plate 101 and the transfer surface 102a is maintained in the micron order.

Next, a more specific external perspective view of the main part (laser transfer unit 100) of the wiring pattern repair apparatus to which the present invention is applied is shown in FIG. The wiring pattern repair apparatus (also referred to as a "laser repair apparatus") includes a stage (not shown) for mounting a liquid crystal display device or a plasma display device to be repaired with the circuit pattern surface facing upward, It is comprised from the upper side and the XY positioning mechanism (not shown) which became positionable by arbitrary XY coordinates in a horizontal plane, and the laser transfer unit 100 suspended by this XY positioning mechanism.

The laser transfer unit 100 includes a unit machine frame (not shown) suspended from the stage by the XY positioning mechanism described above, a three-dimensional positioning mechanism 2 attached to the unit machine frame, and a three-dimensional unit. The transfer head 1 positioned by the positioning mechanism 2 and the laser irradiation optical system 3 freely attached to the unit machine frame are included.

The three-dimensional positioning mechanism 2 includes an X-direction driver 21, a Y-direction driver 22 supporting the X-direction driver 21, and a Z-direction driver 23 supporting the Y-direction driver 22. And a transfer head 1 supporting the transfer plate holder is attached to the X-direction driving part 21.

The laser irradiation optical system 3 introduces a laser beam 4 coming from an upper laser source (not shown) from the entrance port 37, shapes the beam cross section, and restores the object. A beam shaping mechanism 34 for forming an elongated rectangular beam cross section corresponding to the line width of the circuit pattern to be used, and a laser beam shaped by the beam shaping mechanism 34 to guide the beam splitter 31 vertically downward. Laser arriving through the optical path C2 for laser irradiation, the optical path C3 for guiding the shooting light separated by the beam separator 31 toward the electronic camera 37 in the horizontal direction, and the optical path C2 for the laser irradiation. And a common optical path C1 for guiding the beam vertically downward to the objective lens 32 and for guiding the shooting light coming from the objective lens 32 to the beam separator 31 vertically upward. have. Also, 35 is an LED illuminator for illuminating the field of view of the camera.

In other words, the laser irradiation optical system 3 is a coaxial fall-off type having a vertical laser irradiation optical path C2, a horizontal imaging optical path C3, and a vertical common optical path C1 which integrates and integrates these optical paths ( The optical system is configured.

The laser beam emitted vertically downward from the objective lens 32 is condensed at a predetermined distance on the exit light path by the condensing action of the objective lens 32 to generate a condensing point. The thin film transfer process by laser irradiation is performed at the laser condensing point which arises in the predetermined distance on this output light path.

On the other hand, in the electronic camera 37, the focusing is always performed so that the focus is on the object located at this laser converging point. In addition, the electronic camera 37 has a built-in function of externally determining whether or not the focus is corrected based on the video signal. The whole laser irradiation optical system 3 can be moved in the vertical direction by an arbitrary distance along the Z direction guide rail 38 by the action of a ball screw mechanism and a drive motor (not shown).

Accordingly, by monitoring the focus determination output of the electronic camera 37 while raising or lowering the entire laser irradiation optical system 3, it is possible to know whether or not the focusing point matches the laser irradiation object. In addition, if the focus determination output of the electronic camera 37 is monitored while measuring the fall distance from a certain reference height, the drop from the reference height to the laser irradiation object is based on the falling distance measurement value until the focus is met. You can see the distance. As described later, in this embodiment, the height direction positioning control of the transfer plate is realized by utilizing the above-described action of the laser irradiation optical system 3.

5, 36 is a rotating disk for supporting a plurality of objective lenses on a circumference, and 33 is a rotary encoder used for controlling the rotation angle of the rotating disk 32, thereby enabling automatic replacement of the objective lens. Doing.

The external perspective view of the transfer head is shown in FIG. 6, the exploded perspective view is shown in FIG. 7, the external perspective view of the up-down inverted state is shown in FIG. 8, and the top view (the plate spring attachment state) is in FIG. Are respectively shown in FIG. 10.

As is clear from these drawings, the transfer head 1 is configured mainly with the transfer head base 11. This transfer head base 11 has an attachment part 11a for providing the X direction drive part 21 and a support part 11b for supporting the transfer plate holder 13.

The hollow 11c is formed in the center of the support part 11b, and the holder 13 is accommodated in this hollow 11c. In order to support the holder 13 in the space 11c, the leaf spring 12 is used in this example. The leaf spring 12 has a roughly square shape, and an opening 12a is formed at the center thereof, and punching holes 12b and 12c, screw holes 12d and 12e, and an air pressure escape at the outer circumference of the opening 12a. The hole 12f is formed. It will be readily understood by those skilled in the art that the local springability is imparted by these punching holes 12b and 12c.

The leaf spring 12 and the holder 13 are engaged with each other via the screw hole 12e on the leaf spring 12 side and the screw hole 13b on the holder 13 side. In addition, the plate spring 12 and the support part 11b are engaged with each other through the screw hole 12d on the plate spring 12 side and the screw hole 12d on the support part 11b side.

Thereby, the holder 13 is comprised so that the movement to the up-down direction may be permitted within the elastic range of the leaf spring 12, while the movement to the horizontal direction is restrict | limited in the space 11c.

At two locations on the outer circumferential surface of the holder 13, an intake inlet hole (not shown) is provided, and on the lower surface thereof, a plurality of intake outlet holes are arranged in a ring shape by matching with a transfer plate-shaped intake injection hole. A ring-shaped inner passage is formed between these inlet and outlet holes. In addition, the holder 13 is provided with an intake escape hole 13c penetrating from the upper surface to the lower surface. When the leaf spring 12 and the holder 13 are engaged, the intake escape hole 12f of the leaf spring and the intake pressure of the holder are provided. It is comprised so that the escape hole 13c may overlap. In addition, the connectors 15e and 15f are fixed to the pressure inlet inlet on the holder 13 side.

Two connectors 15c and 15d are fixed to the inner circumferential surface of the space 11c provided in the support portion 11b, and two connectors 15a and 15b are fixed to the outer circumferential surface of the support portion 11b. Here, the connector 15a and the connector 15c communicate with each other, and the connector 15b and the connector 15d communicate with each other. The connector 15e and the connector 15c are connected through the flexible tube 16a, and the connector 15f and the connector 15d are likewise connected through the flexible tube 16b. Since the plugs for tube connection are formed in the connector 15a and the connector 15b, respectively, the pressure can be supplied from the support part 11b into the holder 13 by inserting a flexible tube therein. Become.

The transfer window 13a is opened in the center part of the holder 13, and the transfer plate 14 supported by the lower surface side is exposed from this transfer window 13a. In this example, the transfer plate 14 is fixed to the lower surface of the holder 13 with an adhesive. When the pressurizer is supplied from the connectors 15a and 15b, the supplied pressurizer is injected from the injection hole (not shown) on the back side of the holder 13 toward the transfer object. As a result, the transfer plate 14 floats together with the holder 13.

When performing a repair operation with the wiring pattern repair apparatus which consists of the above structure, first, the XY positioning mechanism which is not shown in figure is operated, and the objective lens 32 contained in the laser transfer unit 100 is directly replaced by a repair part. Position on the top. In this positioning, the positioning control of the open loop based on the XY coordinate of the repair point and the XY coordinate of the optical axis of the objective lens 32, and the position of the repair point obtained by image processing the image of the electronic camera 37 and Positioning control of the servo loop performed while measuring the distance from the reference point in the field of view of the electronic camera is used in combination.

After the optical axis of the objective lens 32 is positioned immediately above the repair point, the three-dimensional positioning mechanism 2 is operated to evacuate the optical optical axis from an overlapping position covering the optical axis of the objective lens 32. After evacuating the transfer head 1 to the position, while monitoring the focus determination output of the electronic camera 37 while lowering the entire laser irradiation optical system 3k, the predetermined reference height is determined from the falling distance to the point where the focus is met. Distance (A) from the upper surface of the repair target object is obtained.

Next, the three-dimensional positioning mechanism is operated again to return the transfer head 1 to an overlapping position covering the optical axis of the objective lens 32 from the evacuation position that does not cover the optical axis of the objective lens 32. In the same manner, while the entire laser irradiation optical system 3 is lowered, the focus determination output of the electronic camera 37 is monitored, and the distance (from the predetermined reference height to the upper surface of the repair target object from the falling distance to the point where the focus is met) Obtain B).

Next, based on the distance A and the distance B, the distance X between the transfer plate and the repair target object {(A)-(B)} is calculated, and then the transfer plate 101 from the repair target surface. With the height H1 (about 5 mm) up to) as the first target height, the transfer head base 104 is dropped by the open-loop control by the falling distance X-H1 up to that time. If the transfer head base 104 is lowered by the open loop control by the dropping distance X-H1, the height (H2: about 100 μm) from the surface of the repair object to the transfer plate 101 is subsequently adjusted. The transfer head base 104 is dropped by the open loop control by the falling distance (X-H1-H2) until then.

At this time, since the 2nd target height H2 is set in the height area | region where the magnetic force floating action by an injecting pressure starts to operate, the transfer head base | substrate 104 makes the 2nd target height H2 In the course of descending to), the transfer plate holder 103 magnetically floats against the transfer head base 104. Therefore, even if there are some errors in the open loop control for approaching the first and second target heights, or the surface height fluctuates due to the repair object side, the transfer head 1 is transferred in the process of falling down. It is possible to reliably avoid the possibility that the plate 101 collides with the repair object and destroy the surface, and the distance between the transfer plate 101 and the repair object is determined by the pressure of the pressure inflator due to the magnetic force floating action caused by the pressure injection. By setting the flow rate appropriately, it is maintained in the optimum range (for example, 1 to 20 mu m).

Subsequently, when the laser beam is driven in one shot by driving a laser source (not shown), a thin film of a transfer material corresponding to an irradiation spot (for example, a line shape) is transferred to a repair target location, and if necessary, the proximity distance. The transfer head 1 is shifted to a predetermined pitch horizontal chamber while maintaining the above, and the above one-shot irradiation is repeated a plurality of times.

Then, the thin film of the transfer material is laminated | stacked in the repair target location, and the required laminated thickness can be obtained. During the shift in the horizontal direction, the injection of an air pressure such as nitrogen gas is performed, so that the gap holding action of the transfer portion is performed, thereby preventing the transfer plate from accidentally colliding with the restoration object and destroying it. have.

As described above, according to the transfer head 1 of the present invention, since the distance between the transfer plate 101 and the object to be transferred can be maintained at a predetermined fine distance by injecting an inflator, the Z-direction drive unit 23 is maintained. As for the electrical control through the transfer plate, it is only necessary to roughly control the transfer plate to a certain degree of proximity to the transfer object. Afterwards, the floating action of the opposite ship caused by the injection of the gas acts, thereby safely transferring the transfer plate to the transfer object. Since a large number of defect points exist on the display device or the like to be repaired, the process of moving the transfer head 1 down at a high speed is repeated at a high speed, even if a large number of defect points exist on the display device to be repaired. There is an advantage that the tact time of this kind of work can be greatly shortened.

Industrial availability

According to the present invention, in this type of laser transfer apparatus represented by a laser repair apparatus, there is an advantage that it is possible to always keep the distance between the thin film of the transfer material and the transfer object at a micron order (for example, 1 to 20 mu m). have.

1 is a configuration diagram of a first embodiment.

2 is a configuration diagram of a second embodiment.

3 is a configuration diagram of a third embodiment.

4 is a configuration diagram of a fourth embodiment.

5 is an external perspective view of a wiring pattern repair apparatus to which the present invention is applied.

6 is an external perspective view of the transfer head.

7 is an exploded perspective view of the transfer head.

8 is an external perspective view of the transfer head in an upside down state.

9 is a plan view of the transfer head (plate spring attachment state).

10 is a plan view of the transfer head (plate spring separated state).

11 is an explanatory diagram of a laser transfer method which is a premise of the present invention.

(Explanation of the sign)

1: transfer head

2: 3D positioning mechanism

3: laser irradiation optical system

4: laser beam

11: transfer head body

11a: Attachment part

11b: support part

11c: void

12: leaf spring

12a: opening

12b: punching hole

12c: punching hole

12d: screw hole

12e: screw hole

12f: pressure escape hole

13: transfer plate holder

13a: transfer window

13b: screw hole

13c: pressure escape hole

14: transfer plate

15a: Connector

15b: Connector

15c: Connector

15d: connector

15e: Connector

15f: Connector

16a: flexible tube

16b: flexible tube

21: X direction drive unit

22: Y direction drive unit

23: Z direction drive unit

31: beam splitter

32: objective lens

33: rotary encoder

34: beam shaping mechanism

35: LED illuminator

36: rotating disc

37: electronic camera

38: Z direction guide rail

39: entrance

100: laser transfer unit

101: transfer plate

101a: pressure injection hole

102: Warrior object

102a: Transmissive Slope

103: transfer plate holder

103a: transfer window

103b: inlet hole

103c: pressure escape hole

103d: Pressure passage in the holder

103e: suction hole

103f: internal passage

104: transfer head body

104a: transfer plate holder accommodating space

105: pressure

106: retreat

107: leaf spring

107a: observation window

108: flexible tube

110: compression spring

111: Steel ball guide

112: resin bearing

C1: common light path

C2: optical path for laser irradiation

C3: light path for shooting

Claims (6)

A transfer plate formed by depositing a transfer material thin film on an objective surface of a plate-shaped piece having laser permeability, so that a minute almost constant gap is maintained between them, and the transfer material thin film is faced to an almost horizontal transfer surface of the transfer object. A transfer head of a laser transfer device for supporting at A transfer plate holder on which a transfer plate is supported and a transfer window for exposing the transfer plate to an upper surface thereof is opened; A transfer head base having a space for accommodating the transfer plate holder and giving a position reference in a horizontal direction and a vertical direction; A holder support mechanism for supporting the transfer plate holder accommodated in the transfer plate holder accommodating space of the transfer head base in a movable and non-movable manner relative to the transfer head base; And a transfer plate floating means for causing the transfer plate to float on the transfer plate holder with respect to the transfer surface by injecting an inflator under the transfer plate holder. The transfer plate floating means, In addition to having a plurality of pressure injecting holes for injecting the pressure in the lower portion of the transfer plate holder, they are disposed on the lower surface of the transfer plate holder so as to surround the outer periphery of the transfer plate. Transfer head of the laser transfer device. The method of claim 1, A laser transfer device is provided between the pressurizing jetting hole array at the lower surface of the transfer plate holder and an outer periphery of the transfer plate for escaping the pressurized jet from the pressurizing jetting hole array to the upper side of the transfer plate holder. Warrior head. The method according to claim 1 or 2, The holder support mechanism, The inner circumferential edge of the transfer plate holder accommodating space is fixed to the outer periphery of the transfer plate holder accommodated in the transfer plate holder accommodating space as a free end, so that the transfer plate holder can be moved to the transfer head base. The transfer head of the laser transfer device, characterized in that it is constituted by a leaf spring supporting both. The method according to claim 1 or 2, The holder support mechanism, Interposed between the inner circumferential surface of the transfer plate holder accommodating void and the outer circumferential surface of the transfer plate holder accommodated in the transfer plate holder accommodating void to support the transfer plate holder with respect to the transfer head base so as to be movable; A transfer head of a laser transfer device, characterized by being formed by a steel ball guide. The method according to claim 1 or 2, The holder support mechanism, It is interposed between the inner circumferential surface of the transfer plate holder accommodating space and the outer circumferential surface of the transfer plate holder accommodated in the transfer plate holder accommodating space, so that the transfer plate holder is elastically movable with respect to the transfer head base. The transfer head of the laser transfer device, characterized in that it is constituted by a compression spring that is pressurized. The method according to claim 1 or 2, The holder support mechanism, It is interposed between the inner circumferential surface of the transfer plate holder accommodating space and the outer circumferential surface of the transfer plate holder accommodated in the transfer plate holder accommodating space, so that the transfer plate holder can slide between the transfer head base so as to be movable. A transfer head of a laser transfer device, characterized by comprising a resin bearing supporting it.

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