KR20080075846A - Abrasive water-jet type cutting apparatus - Google Patents

Abstract

A cutting apparatus comprises a fixing base (50) to which the position of a sealing body (1), i.e., an example of work, is fixed and a nozzle (10) from which abrasive water-jet (2) containing abrasive grains for cutting the sealing body (1) is sprayed out. The fixing base (50) includes a plurality of protrusions (56) and a plurality of bases (57). Each of the protrusions (56) is partitioned by a trench (55) so as to correspond to a plurality of package products (3) after the sealing body (1) is cut and has a through-hole (63) for sucking either the sealing body (1) or the package products (3). Each of the bases (57) mutually connects the protrusions (56) aligned along at least one direction among the protrusions (56). A part of the protrusions (56) or the bases (57) with which the abrasive water-jet collides is formed of a material having hardness higher than that of the abrasive grains.

Description

ABASSIVE WATER-JET TYPE CUTTING APPARATUS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting device having a nozzle for injecting water containing high-pressure abrasive grains, namely an aggressive water jet, for cutting or processing a work mounted on a fixed table.

Conventionally, the method of cutting | disconnecting or processing a workpiece | work by an aggressive water jet is used. This method generally cuts or processes a workpiece | work by applying pressure to the high pressure fluid (water jet) containing an abrasive, and blowing the high pressure fluid from a nozzle. This method is disclosed, for example, in pages 2 to 4 of Japanese Patent Laid-Open No. 2000-767 and FIGS. 1 to 4.

In the workpiece processing method by the abrasive water jet of Unexamined-Japanese-Patent No. 2000-767, garnet, a silica sand, cast iron, a grit, etc. are used as an abrasive (grip). In this method, first, the abrasive is fed into the mixing chamber of the nozzle head from the abrasive tank via the supply pipe and the supply port in a wet state. At this time, the abrasive is fed into the mixing chamber by the high pressure air generated by the compressor. Thereafter, the abrasive is mixed with high pressure water in the mixing chamber.

As a result, the aggressive water jet is ejected from the nozzle. Thereafter, the passive water jet is collected by the catcher after passing through the groove of the table (fixing table) supporting the work. Thereafter, the abrasive is captured by a sieve, and returns to the abrasive tank in a wet state and is reused. Such a technique is disclosed in FIGS. 1 and 4 of Japanese Patent Laid-Open No. 2000-767.

In recent years, the cutting device as mentioned above is used for cutting the sealing body of the semiconductor chip as an example of a workpiece | work. Specifically, the cutting device described above is used when a chip-shaped component (semiconductor chip, etc.) mounted on a circuit board cuts the sealing body (substrate) in which the resin is collectively encapsulated along each of the grid-shaped cutting lines orthogonal to each other. . In addition, for this cutting, a high precision cutting position and a cutting width of 200 mu m remainder are required.

When a conventional cutting device is used, first, the seal is placed on a table having a groove. Next, the seal is cut along a cutting line extending in one direction. Then, the sealing body is cut | disconnected along the cutting line extended to the other orthogonal to the one direction. In the cutting method using this cutting device, after cutting the sealing body in one direction, one table having a groove extending along one direction is exchanged for another table having a groove extending along the other by 90 °. Thereafter, the seal is aligned at a predetermined position on another table. Thereafter, the sealing body is cut along the cutting line extending to the other side.

The reason for performing the table replacement work as described above is to avoid wear of the base portion of the table (fixing table) that supports the sealing body that is the object to be cut. Specifically, the purpose is to allow the aberrant water jet to pass through the groove provided in the table without contacting the base portion. This is described with reference to FIG. 4 in Japanese Patent Laid-Open No. 2000-767.

Thereby, after cutting the workpiece | work (sealed body) fixed to the other table, the passive water jet passes through the groove and is collected by the catcher, without contacting another table.

According to the cutting method using this conventional cutting device, two tables are required. As a result, the cost for the cutting device increases. In addition to the need for alignment of the seals with respect to one table, alignment of the seals with respect to the other table is also required. For this reason, the efficiency of the cutting operation is lowered. Moreover, there exists a possibility that dimensional precision, such as a cutting position and an angle, may fall.

Patent Document 1: Japanese Patent Laid-Open No. 2000-767 (2nd to 4th pages and FIGS. 1 to 4)

The present inventors, in order to solve the problem of the cutting device described above, more specifically, in order to cut the sealing body using only one table (fixing table), while preventing water containing abrasive grains from contacting the base, In the state where the protective member was provided to cover the base of the table, a cutting device capable of cutting the seal was developed. This cutting device is described, for example, in Unexamined Patent Application No. 2005-276904 at the time of filing of the present application. In this application, Japanese Patent Application No. 2005-276904 is incorporated by reference.

According to this cutting device, the sealing body is cut | disconnected along each of the two directions which cross | intersect using the same fixing stand, without abrasion of a fixing stand. This is described with reference to FIG. 6 in Japanese Patent Application No. 2005-276904. In other words, according to this cutting device, when cutting a sealing body along each of the two directions which cross | intersect, it is possible to prepare a some fixing stand, to replace a holding stand, or to align a several times of sealing bodies. no need.

By the way, according to the cutting device mentioned above, it turned out that the problem different from the above-mentioned problem arises. To understand the problem, refer to Fig. 7A of Japanese Patent Application No. 2005-276904.

The cutting device described above has a fixing table. The fixing table has a plurality of convex portions. Each of the plurality of convex portions has a through hole extending in the axial direction and a recess provided in the tip. In the fixing table, the sealing member is adsorbed to the tip of the convex portion by the suction action passing through the through hole and the recess sequentially. Thereby, the sealing body is fixed to each convex part and the edge part provided in the circumference | surroundings exactly by the fixing stand. In this state, the aggressive water jet is injected from the nozzle at high pressure. Thereby, the sealing body is cut | disconnected along the cutting line of the direction (X direction) of one of the cutting lines extended in each of two directions which cross | intersect.

According to the cutting method using the cutting device mentioned above, the high pressure water (abstract water jet) containing the abrasive grain used for cutting collides with a protection member in a groove part, but does not collide with the upper surface of a base.

However, the pressure (jet force) of the high pressure water (abstract water jet) is hardly reduced by the collision with the protective member. That is, the high pressure water (abstract water jet) is bounced back from the upper surface of the protective member without the pressure being lowered. Then, high pressure water collides with the side surface of the convex part provided in the vicinity of the protection member. The pressure of the high pressure water at this time is roughly equivalent to the pressure of the high pressure water immediately before colliding with the protective member.

The protection member is made of a material having a hardness higher than that of the abrasive grain so as to withstand the pressure of the high pressure water. However, the above-mentioned convex portion is not made of the material. Therefore, the side surface of the convex part wears remarkably.

In addition, when the cutting of the sealing body is completed, the high pressure water is dispersed in all directions without colliding with the protective member. Therefore, the dispersed high pressure water wears the convex portion and the edge portion provided in the vicinity of the protective member.

In the state where the convex part and the rim part are worn out, the sealing body cannot be fixed reliably. Therefore, it becomes necessary to replace the convex part and the edge part with other convex parts and the edge part. In this case, it is necessary to replace all the parts of the holder, including the convex portion and the edge portion which can be used continuously. When the frequency of replacing all the parts of the holder becomes high, the cost for replacing all the parts of the holder becomes higher than the cost of the protection member.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and an object thereof is an absorptive water jet type which can not only prevent wear of the base portion but also prevent wear of portions other than the base portion of the fixing base on which the seal is fixed. It is to provide a cutting device.

The cutting device of one aspect of this invention is equipped with the stationary stand to which the position of a workpiece | work is fixed, and the nozzle which injects the abundant water jet containing the abrasive grain for cutting a workpiece | work. The fixing table includes a plurality of convex portions and a plurality of base portions. Each of the plurality of convex portions is partitioned by the groove portion so as to correspond to the plurality of package products after the work is cut, and has a through hole for sucking one of the workpiece or the plurality of package products. Each of the plurality of base portions connects convex portions arranged along at least one direction among the plurality of convex portions. In addition, the portion where a plurality of convex portions and a plurality of foundation water jets collide with each other is formed of a material having a hardness higher than that of the abrasive grains.

The cutting device of the other situation of this invention is equipped with the nozzle to which the position of a workpiece | work is fixed, and the abrasive water jet containing the abrasive grain for cutting a workpiece | work. The fixing table includes a plurality of convex portions and a plurality of base portions. Each of the plurality of convex portions is partitioned by the groove portion so as to correspond to the plurality of package products after the work is cut, and has a through hole for sucking one of the workpiece or the plurality of package products. Each of the plurality of base portions connects convex portions arranged along at least one direction among the plurality of convex portions. In addition, the holder is provided in the inner space, and also provided with a container in which liquid is injected into the inner space. In addition, the holding table is immersed in the liquid so that the absorptive water jet does not directly collide in the container.

It is preferable that the cutting device of one aspect or another aspect of this invention is further provided with the mounting member provided between a workpiece | work or a plurality of package products, and a some convex part, and each of a workpiece | work or a some package product is mounted. In this case, it is preferable that the mounting member includes a material having a hardness lower than that of the abrasive grains.

Moreover, the characteristics of the cutting device of one aspect mentioned above, and the characteristics of the cutting device of another aspect may be combined.

According to this invention, abrasion of parts other than the base of the fixing stand which fixes a sealing body can also be prevented.

The above and other objects, features, aspects and advantages of the present invention will become apparent from the following detailed description of the invention which is understood in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS The top view of the cutting device of the active water jet type | mold of embodiment.

2 is a perspective view of a fixing table and a sealing object (substrate) to be cut in the cutting device according to the embodiment;

3 is an exploded perspective view of the holder of the embodiment;

4 is a cross-sectional view of the holder when the cutting device of the embodiment is cutting the work.

5 is a perspective view of a plurality of package products formed by cutting a sealing body (substrate) of the embodiment;

(Explanation of symbols for the main parts of the drawing)

1: sealing body

1a: substrate

1b: resin molded body

2: Absorbent Water Jet

3: package products

4: transfer mechanism

5: conveying rail

6: non-mounting surface

7, 7x, 7y: cutting line

8: pump unit

9: nozzle system piping

10: nozzle

11: CCD (Charge Coupled Devise) Camera

12: moving mechanism

50: holder

51: fixed position

52: cutting position

53: alignment position

54: tactless member

55 groove

56: convex portion

57: Foundation

58: fixed support member

59: side border member

60: side member

61: set stand

62: concave

63: through hole

64: top

65: protection member

66: arrow indicating inspiratory action

100: cutting device

A: conveying stage

B: prestage

C: cutting stage

D: cleaning drying stage

Hereinafter, the cutting device of the passive water jet type | mold of embodiment of this invention is demonstrated, referring FIGS. In addition, the cutting device 100 of the passive water jet type is hereafter called only the cutting device 100.

In addition, any drawing used for the following description is shown typically, abbreviate | omitting or exaggerating suitably for the convenience of description. In addition, in the following embodiment, as an object cut | disconnected by the cutting device 100, as an example of a workpiece | work, the sealing body 1 by which the semiconductor chip etc. mounted in the circuit board etc. collectively sealed by resin is used. . In addition, the sealing body 1 is cut | disconnected along each of the 2 cutting lines which cross a curved part.

In the cutting method using this cutting device, a high precision cutting position and the cutting width around 200 micrometers are calculated | required. Moreover, although the cutting device (unpublished at the time of this application) described by the inventors of this application is described in the above-mentioned patent application 2005-276904, the cutting device disclosed therein is one Embodiment of the cutting device of this invention to the last. The cutting device of the present invention is not limited thereto.

As shown in FIG. 1, the cutting device 100 of this embodiment is equipped with the conveyance stage A, the prestage B, the cutting stage C, and the washing drying stage D. As shown in FIG. The conveyance stage A conveys the sealing body 1 to the cutting device 100. The prestage B receives the sealing body 1 from the conveying stage A, and conveys the sealing body 1 to the next stage. The cutting stage C receives the sealing body 1 from the prestage B. FIG. On the cutting stage C, the sealing body 1 is cut | disconnected into the some package product 3 by the abundant water jet 2. The cleaning drying stage D receives the plurality of package products 3 from the cutting stage C, and the package products 3 are washed and dried therein.

Moreover, the cutting device 100 is equipped with the conveying means (not shown), such as a pusher grip feed pick-up for supplying the sealing body 1 from the conveyance stage A to the prestage B. As shown in FIG. Moreover, the cutting device 100 conveys the sealing body 1 from the pre-stage B to the cutting stage C, and wash | cleans the several package product 3 from the cutting stage C, and the washing-drying stage ( The feed mechanism 4, such as a pusher grip feed pick-up conveyed to D), is provided. In this embodiment, the mechanical chuck type pickup means is provided as the transfer mechanism 4.

In addition, each of the conveying means (not shown) and the conveying mechanism 4 is perpendicular to the left-right direction (X-axis direction) in FIG. 1, ie, the horizontal direction, and the ground in FIG. 1 along the conveyance rail 5. Direction can move along each of a perpendicular direction (Z-axis direction).

In other words, the conveying means (not shown) can move the sealing body 1 from the conveyance stage A to the prestage B. FIG. Moreover, the transfer mechanism 4 can move the sealing body 1 from the pre-stage B to the cutting stage C, and washes and drys several package products 3 from the cutting stage C. The stage D can be moved.

As shown in FIG. 1, in the cutting device 100, a conveyance stage is carried out so that process other than a predetermined process may complete | finished while moving the sealing body 1 and the package product 3 along a straight line (X-axis direction). (A), the prestage B, the cutting stage C, and the cleaning drying stage D are arranged in a substantially straight line shape. According to arrangement | positioning of this conveyance stage A, the prestage B, the cutting stage C, and the washing drying stage D, the movement time of the sealing body 1 and the package product 3 can be shortened. .

In addition, the arrangement | positioning of the four stage mentioned above is not limited to the arrangement | positioning mentioned above, Any thing may be sufficient as long as it is an arrangement which can achieve the objective of this invention. In addition, the same conveyance mechanism 4 may move the sealing body 1 from the conveyance stage A to the washing-drying stage D. FIG. In addition, the movement of the sealing body 1 between stages may be implement | achieved by the some conveyance mechanism independent of each other. In this case, the conveyance rail 5 may differ for every conveyance mechanism 4.

When the cutting device 100 is used, first, the conveying means (not shown) moves the sealing body 1 from the conveyance stage A to the prestage B. FIG. Next, the sealing body 1 is moved from the prestage B to the cutting stage C by the conveyance mechanism 4 along the conveyance rail 5. Next, in the cutting stage C, the sealing body 1 is cut | disconnected so that it may be divided into the some package product 3.

Moreover, the cutting device 100 is equipped with the product inspection stage and storage stage which are not shown in figure. The product inspection stage is for inspecting the plurality of package products 3 after the cleaning drying step is completed in the cleaning drying stage D. FIG. In addition, the storage stage has a final product tray (not shown) for receiving while receiving a plurality of packaged products 3 transferred from the product inspection stage.

In this embodiment, as shown in FIG. 2 and FIG. 4, the sealing body 1 includes a substrate 1a and a plurality of electronic components mounted on one main surface of the substrate 1a. And the resin molded object 1b which collectively seals and forms a some electronic component with resin.

In addition, in FIG. 5, the other surface of the sealing body 1, ie, the non-mounting surface 6 of the electronic component, in each of the X and Y directions so as to correspond to the position and number of the plurality of electronic components. , The cutting line 7 is drawn. In addition, the sealing body 1 is cut | disconnected along each of the two cutting lines 7 (7x * 7y) mentioned above, and is divided into the some package product 3 by this.

In addition, in FIG. 5, the cutting line 7x of a X direction consists of a curve and a straight line, and the cutting line 7y of a Y direction consists of a straight line only. The cutting line 7 of the corner where the cutting line 7x of an X direction and the cutting line 7y of a Y direction cross | intersects consists only of a curve. That is, in this embodiment, the cutting line 7 (7x * 7y) different from the conventional cutting line which consists only of the straight line group extended along each of two directions so that it may orthogonally cross is used.

Moreover, the sealing body 1 is an object of cutting | disconnection, and has the board | substrate 1a, such as a lead frame and a printed board, and the resin molded body 1b. In addition, each of the some area | region divided by the some cutting line 7x and the some cutting line 7y is corresponded to the package product 3 of the electronic component which is a completed product.

At the time of cutting | disconnection of the sealing body 1, the cutting | disconnection in one short side direction (X direction) in the board | substrate 1a shown in FIG. 5 is performed first, and after that, the cutting line continuous in one short side direction ( According to 7), the sealing body 1 is cut | disconnected by the point of one stroke.

For example, first, three package products 3 adjacent to one short side described above are cut. Next, another three package products 3 adjacent to the three package products 3 described above are cut in the same manner as the three package products 3 described above. Finally, one seal 1 is divided into 18 packaged products 3.

The cutting stage C is equipped with the fixing stand 50 which reciprocates, as shown in FIG. The fixing table 50 has a fixed position 51 at which the sealing body 1 is fixed, and a cutting position 52 for cutting the sealing body 1. Moreover, the cutting stage C is equipped with the reciprocating means (not shown) which reciprocates between the fixed position 51 and the cutting position 52. As shown in FIG. The reciprocating means moves the sealing body 1 from the fixed position 51 to the cutting position 52.

An alignment position 53 is provided between the fixed position 51 and the cutting position 52. The alignment position 53 is a position for alignment of the cutting line 7 (7x * 7y) drawn on the non-mounting surface 6 of the sealing body 1. As shown in FIG.

In addition, the fixing table 50 can reciprocate between the fixing position 51 and the cutting position 52, with the sealing body 1 or the package product 3 being fixed to it.

In addition, as shown in FIG. 1, the cutting device 100 includes a moving mechanism 12. The moving mechanism 12 has an image pickup means such as a CCD (Charge Coupled Device) camera 11 for aligning the nozzle 10 and the sealing member 1 in a horizontal (X-axis direction and Y-axis direction) plane. At and between the cutting position 52 and the alignment position 53.

In addition, although the detailed structure of the fixing stand 50 is mentioned later, the sealing body 1 which is an object to cut | disconnect is fixed to the fixing stand 50 by methods, such as adsorption | suction.

In addition, in the cutting device of this embodiment, the aggressive water jet 2 is injected from the nozzle 10 at high pressure, and the sealing body 1 is cut | disconnected by this.

In the cutting method of the sealing body 1 using the cutting device 100 of this embodiment, as mentioned above, the cutting stage C fixes the sealing body 1 on the prestage B using a conveying means. It moves to the position 51, and the sealing body 1 is attached to the fixing stand 50 waiting in the fixed position 51. As shown in FIG.

Next, the fixing table 50 is moved by the reciprocating means. In connection with it, the sealing body 1 moves to the alignment position 53 integrally with the fixing base 50. As shown in FIG. At the same time, the cutting device 100 moves the CCD camera 11 waiting above the alignment position 53 using the moving mechanism 12 in the horizontal direction. Thereafter, the cutting device 100 performs the alignment of the sealing member 1 using the image data obtained from the CCD camera 11.

Next, the sealing body 1 is moved by the reciprocating means from the alignment position 53 to the cutting position 52. At the same time, the cutting device 100 moves the nozzle 10 that is waiting above the cutting position 52 in the horizontal direction by the moving mechanism 12. Thereby, the sealing body 1 is cut | disconnected along the cutting line 7 (7x * 7y) drawn on the non-mounting surface 6, and is divided into the some package product 3.

Next, each of the plurality of package products 3 is moved by the reciprocating means from the cutting position 52 to the fixing position 51 in a state where the plurality of package products 3 are attached to the fixing table 50. On the other hand, parts other than the part which became the some package product 3 in the sealing body 1 fall toward the dust box (not shown) below the cutting position 52. FIG. That is, unnecessary parts of the sealing body 1 are removed from the fixing table 50. At this time, the removal mechanism (not shown) for removing the unnecessary part in the sealing body 1 is provided in the nozzle 10, This removal mechanism is moved by the moving mechanism 12, and the inside of the sealing body 1 is carried out. Unnecessary portions may be removed by a removal mechanism.

Next, after the some package product 3 moves to the fixed position 51 and is attached to the fixing stand 50, by the feed mechanism 4, it cuts from the cutting stage C to the washing drying stage D. It moves along the conveyance rail 5.

Each operation of the components of the cutting device 100 as described above is controlled by a control unit (not shown) provided in the cutting device 100. This control unit controls the conveyance stage A, the prestage B, the cutting stage C, and the cleaning drying stage D, and the absorptive water jet 2 injected from the nozzle 10. Then, the control which cuts the sealing body 1 along each of the cutting line 7 (7x * 7y) of the two directions which intersects a curve is performed.

In addition, the cutting stage C is a component of the system which injects water containing abrasive grains at high pressure, and is equipped with the following components. These components are the high pressure pump which pressurizes the water supplied from an air source, the switching valve connected to the high pressure pump, and the 1st tank connected to the switching valve via the 1st inflow side water piping. And a second tank connected to the switching valve via a second inflow side water pipe, a first outflow water pipe and a second outflow water system connected to the first tank and the second tank, respectively. It is plumbing. These components are drawn as the pump unit 8 in FIG.

In addition, as shown in FIG. 1, the nozzle system piping 9 is connected to the part to which the 1st outflow water pipe and the 2nd outflow water pipe are connected. The nozzle 10 for cutting is connected to the nozzle system pipe 9. Both the first tank and the first tank are substantially filled with water containing abrasive grains.

In addition, although the pump unit 8 is provided in the exterior of cutting stage C (cutting apparatus 100), you may be provided in cutting stage C (cutting apparatus 100).

The abrasive grains in the pump unit 8 are made of silicon carbide (SiC), alumina (Al ₂ O ₃ ), garnet, or the like, and have a particle diameter of about 10 μm to 100 μm. The percentage of these abrasive grains is larger than one. Therefore, in a normal state, in each of the 1st tank and the 3rd tank, the high ratio part in which the precipitated abrasive grain exists in a high ratio, and the low ratio part which consists mostly of water exist.

In addition, in this embodiment, a "ratio" means "the ratio of the abrasive grains contained in this with respect to the water containing an abrasive grain". In addition, in this embodiment, that the 1st tank and the 2nd tank are "substantially filled" with the water containing an abrasive grain, respectively, not only when a tank is completely filled, but also some bubble or space It also means including the case remaining in this tank. In addition, as mentioned later, since a 1st tank and a 2nd tank are switched and used, it is preferable that a 1st tank and a 2nd tank have the same capacity | capacitance.

The cutting device 100 is further provided with the following components as a component of the system which supplies an abrasive grain to the 1st tank and the 2nd tank in the pump unit 8. These components are the abrasive grain tank which stores the water (henceforth "high ratio number") containing a high ratio of abrasive grains, and a high ratio from a grain boundary tank by supplying pressurized water to an abrasive grain tank. An extrusion pump that pushes out water is included.

In addition, the system includes an abrasive grain supply pipe for supplying a high ratio water pushed out from the abrasive grain tank to the first tank and the second tank, and a first abrasive grain supply provided at a portion connected to the first tank in the abrasive grain supply pipe. The valve and the second abrasive grain supply valve provided in the part connected to the 2nd tank in an abrasive grain supply pipe are included.

In addition, the system is provided with a return pipe that returns water overflowing from the first tank and the second tank to the abrasive tank when the high ratio water is supplied, and is provided at a portion connected to the first tank in the return pipe. The return valve of 1 and the 2nd return valve provided in the part connected to the 2nd tank in a return pipe | tube are included. In addition, this system is provided with a water supply valve for supplying water to the abrasive grain supply pipe from the outside.

As mentioned above, in the system which supplies an abrasive grain to a 1st tank and a 2nd tank, a 1st tank and a 2nd tank are always substantially filled with the water containing an abrasive grain, respectively.

Moreover, the cutting device 100 is a system which appropriately maintains the ratio of the abrasive grains in the 1st tank and the 2nd tank of the pump unit 8, and is equipped with the following components. The system includes a first sensor and a second sensor that are fixed to the bottom of the first tank and the second tank and each consist of a load cell.

This system also includes a controller (controller). The control unit receives signals from the first and second sensors, and calculates the weight of water including the abrasive grains in each of the first tank and the second tank based on those signals. Moreover, the control part controls the valve, the pump, etc. which were provided in the cutting device 100 as needed. In addition, although the control part controls the pump unit 8, each of the components of the cutting device 100 whole including a control part is controlled by a control unit (not shown).

The cutting nozzle 10 includes a holder, a columnar body fixed inside the holder, a support body fitted to the tip of the columnar body inside the holder, and a support body. It has a connecting body integrally fitted inside and a nozzle tip. The columnar body is provided with a passage having a predetermined diameter. The connecting body is provided with a funnel-shaped space which communicates with the flow path and has a tapered shape.

The nozzle tip is provided with a small diameter flow path having a constant diameter in communication with the space. The tip of the nozzle tip protrudes by a predetermined amount from each of the tips of the support and the holder, and the tip of the small-diameter flow path has an injection path.

Here, the holder, columnar body, support body, connector, and nozzle tip are made of, for example, stainless steel or ceramics. Moreover, a wear-resistant film is formed on the inner wall surface of the small diameter flow path of the nozzle tip. This wear resistant film is formed by a known method such as plasma CVD (Chemical Vapor Deposition).

Moreover, the member itself in which the small diameter flow path is formed, ie, the nozzle tip itself, may be made of a wear resistant material made of a diamond sintered body or the like. Also in this case, since the inner wall of the small-diameter flow passage is made of a wear-resistant material, the degree of wear of the inner wall of the small-diameter flow passage is reduced.

Next, the fixed base 50 is demonstrated with reference to FIGS. The fixing stand 50 is a characteristic part of the cutting device 100 of this embodiment.

As shown in FIG. 2, the fixing table 50 of the cutting device 100 of the present embodiment includes a mounting member 54 on which the sealing member 1 and the packaged product 3 are set, and a cutting line 7. Groove portion 55 provided at a position below 7x · 7y, and a plurality of convex portions capable of fixing the sealing member 1 and the plurality of package products 3 as portions other than the groove portion 55 ( 56).

Moreover, the fixed base 50 is equipped with the some base part 57. As shown in FIG. Each of the plurality of base portions 57 is formed with convex portions 56 substantially parallel to the cutting lines 7 and 7x extending along at least one of the two directions described above (in this case, the X direction). It is prepared to connect. The fixed support member 58 is comprised by the some convex part 56 and the some base part 57. FIG. The fixed support member 58 is set to the set stand 61. The side border member 59 is detachably attached to the plurality of base portions 57.

Moreover, the fixing stand 50 extends substantially parallel to the long side of the rectangular fixing support member 58, divides into the both side positions of the fixing stand 50, and is detachably attached to the fixing support member 58. As shown in FIG. The side member 60 is provided. In addition, the fixed table 50 is provided with a set table 61. Each of the mounting member 54, the fixed support member 58, the side rim member 59, and the side member 60 is detachably attached to the set stand 61. Moreover, the opening is provided in the set base 61 so that the opening may be positioned between the fixed support member 58 and the side member 60.

2, the disassembled state of the fixing stand 50 is shown. At the time of assembling of the fixing stand 50, after the fixing supporting member 58, the side edge member 59, and the side member 60 are attached to the set stand 61, the mounting member 54 is fixed fixing member. Is set on top of 58.

In addition, the cutting device 100 of this embodiment may be provided with the container 90 in which the fixing base 50 was installed in the internal space, and the liquid 91 was injected into the internal space, In this case, It is preferable that the fixing table 50 is immersed in the liquid 91 so that the passive water jet 2 does not directly collide in the container 90. According to this, after the energy is absorbed by intruding into the liquid, the speed drops to the plurality of convex portions 56 and the plurality of base portions 57 of the fixing table 50. Contact in one condition. Therefore, the degree of wear of the plurality of convex portions 56 and the plurality of base portions 57 is reduced.

In addition, when the plurality of convex portions 56 and the plurality of base portions 57 are formed of a material harder than the abrasive grains, the container 90 and the liquid 91 are the plurality of convex portions 56 and the plurality of base portions ( 57 is not an essential configuration for preventing wear. In addition, when the fixed base 50 is immersed in the liquid 91 in the container 90, it is a some convex which the some convex part 56 and the some base part 57 are formed from the material harder than an abrasive grain. It is not essential to prevent abrasion of the portion 56 and the plurality of base portions 57. However, according to the combination of the structure of the container 90 and the liquid 91, and the structure of the some convex part 56 and the some base part 57 which are formed from the material harder than an abrasive grain, the several convex is more reliably. Wear of the portion 56 and the plurality of base portions 57 can be prevented.

The plurality of protrusions 56 correspond to the plurality of package products 3. In addition, a recess 62 is provided in the mounting member 54 so as to correspond to each of the plurality of protrusions 56. In the central portion of each of the plurality of recesses 62, a through hole 63 communicating with the through hole 63 extending along the longitudinal direction of the convex portion 56 is provided. Each of the plurality of through holes 63 is connected to a suction mechanism (not shown) via a pipe. Therefore, by driving of the suction mechanism, a suction force is generated in the plurality of through holes 63 as indicated by the arrow 66, and each of the sealing body 1 or the plurality of package products 3 is recessed 62. Is adsorbed on.

Moreover, in the groove part 55 which extends along one direction among the some groove part 55, for example, the groove part 55 which extends in a Y direction, it is elongate plate shape so that the upper surface 64 of the base part 57 may be covered. The protection member 65 which consists of members is provided.

Each of the plurality of protective members 65 can be inserted into the groove portion 55 and can be taken out from the groove portion 55. In addition or alternatively, the portion of the fixed water supporting member 58 in contact with the passive water jet 2 is a material having a hardness higher than the hardness of the abrasive grains used for cutting the sealing body 1. Consists of As such a material, a diamond single crystal, a sapphire single crystal, a diamond sintered compact, a cubic boron nitride (cBN) sintered compact, the composite material which disperse | distributed diamond or cBN in a cemented carbide, or a cemented carbide material etc. are mentioned, for example.

In addition, in this embodiment, only a part of the fixed support member 58, ie, only a part of the convex part 56 and the base part 57, prevents abrasion due to the contact of the passive water jet 2. In order to prevent it, it consists of a material which has higher hardness than an abrasive grain. However, the side edge member 59, the side member 60, the set stand 61, and the container 90 (the outer wall member) may also be made of a material having a hardness higher than that of the abrasive grains. In addition, as long as the whole of the fixed support member 58 is made of a material having a higher hardness than the abrasive grains, the protective member 65 may not be provided in the groove portion 55.

The mounting member 54 is provided between the sealing body 1 and the fixed support member 58, and in order to reliably fix the sealing body 1 and the plurality of package products 3 by adsorption, the sealing body ( 1) Or the part where each of the some package product 3 is mounted consists of the material which has hardness lower than an abrasive grain. As a material of the mounting member 54, an elastic material such as rubber may be employed. In addition, the mounting member 54 has a plurality of through holes 63 which communicate with the plurality of through holes 63 of the plurality of protrusions 56. The plurality of through holes 63 of the mounting member 54 correspond to the plurality of through holes of the plurality of convex portions 56 one-to-one, respectively.

As shown in FIG. 4, the placing member 54 at the position corresponding to the cutting line 7 is cut at the same time as the sealing body 1 placed on the placing member 54 is cut. Then, when cutting the sealing body 1 further, according to the cutting line 7, in this case, the sealing body 1 is cut | disconnected by the point of one stroke as shown in FIG.

In this embodiment, the predetermined part of the mounting member 54 is cut | disconnected. Moreover, this mounting member 54 has hardness lower than an abrasive grain. Therefore, the occurrence of the problem that the sealing body 1 or the plurality of package products 3 fall or fall from the fixing table 50 or is damaged due to the collision between the package products 3 is prevented. have.

As described above, according to the fixing table 50 in the present embodiment, the fixing support member 58 is made of a material having a higher hardness than the abrasive grains. Therefore, the wear phenomenon of the fixing stand 50 which fixes the sealing body 1 can be prevented. The mounting member 54 is made of a material having a lower hardness than the abrasive grains. Therefore, even when the cutting line 7 cut | disconnects the sealing body 1 which contains not only a straight line but a curve, it can be reliably fixed to the mounting member 54 to the fixing stand 50. FIG.

Hereinafter, the function of the mounting member 54, the fixed support member 58, and the protective member 65 is demonstrated with reference to FIG.

First, the sealing body 1 is sucked toward the mounting member 54 by the intake action which arises in the direction shown by the arrow 66 via the some through-hole 63 and the recessed part 62. FIG. Thereby, the sealing body 1 is fixed to the mounting base 50 and to the mounting member 54 more correctly. At this time, the resin molded body 1b is in contact with the mounting member 54.

In the cutting method using the cutting device 100 of this embodiment, when the sealing body 1 is cut | disconnected along the Y-axis direction, as shown in FIG. 4, the passive water jet 2 is a nozzle. It blows off from 10 to the groove part 55 at high pressure, and collides with the upper surface of the protection member 65, but does not collide with the upper surface 64 of the base part 57. As shown in FIG. Thereby, wear of the base 50, more specifically, the base part 57 of the fixed support member 58 is prevented.

On the other hand, when the sealing body 1 is cut | disconnected along the X-axis direction, the same mounting base 50 as the above-mentioned mounting base 50 is used. At this time, the moving direction of the nozzle 10 is changed to the direction along the cutting line 7x including a curve.

In addition, after cutting the sealing body 1, the passive water jet 2 flows as follows. First, when the sealing body 1 is cut | disconnected along the X-axis direction, the passive water jet 2 passes through the opening extended along the X-axis direction of the set base 61 from the groove part 55, Flow down to the position of the opening. Therefore, the passive water jet 2 does not collide with the fixing table 50 at all.

In addition, when the sealing body 1 is cut | disconnected along the Y direction, the passive water jet 2 collides with the protective member 65. FIG. In other words, the passive water jet 2 does not collide with the upper surface 64 of the base portion 57.

Therefore, even if the same holder 50 is used, the sealing body 1 is cut | disconnected without damaging the holder 50. In addition, according to the cutting method using the cutting device of the present embodiment, wear of at least the fixed support member 58 of the holding table 50 is prevented.

In addition, when the some sealing body 1 is cut continuously, the fixed support member 58 and the protection member 65 wear off gradually. In this case, the fixed support member 58 and the protective member 65 may be replaced at an appropriate time. Thereby, the sealing body 1 can be cut | disconnected, preventing the abrasion of the fixing stand 50. FIG.

While the invention has been described and illustrated in detail, it is for the purpose of illustration only and is not to be taken as limiting, the scope of the invention being clearly defined only by the appended claims.

According to this invention, abrasion of parts other than the base of the fixing stand which fixes a sealing body can also be prevented.

Claims (4)

A holding table 50 to which the position of the work 1 is fixed, A cutting device (100) having a nozzle (10) for injecting an abrasive water jet (2) containing abrasive grains for cutting the work (1), The fixture 50, Each is partitioned by the groove portion 55 so as to correspond to the plurality of packaged products 3 after the work 1 is cut off, and suctions the workpiece 1 or one of the plurality of packaged products 3. A plurality of convex portions 56 having through holes 63 for Each includes a plurality of base portions 57 which connect the convex portions 56 arranged along at least one direction among the plurality of convex portions 56, The part which the said water jet 2 collides among the said some convex part 56 and the said base part 57 is formed from the material which has a hardness higher than the said abrasive grain, It is characterized by the above-mentioned. Device. The method of claim 1, A mounting member 54 provided between the workpiece 1 or the plurality of package products 3 and the plurality of convex portions 56, on which the workpiece 1 or the package product 3 is placed, is also provided. Equipped, And said mounting member (54) comprises a material having a hardness lower than said abrasive grain. A holding table 50 to which the position of the work 1 is fixed, A cutting device (100) having a nozzle (10) for injecting an abrasive water jet (2) containing abrasive grains for cutting the work (1), The fixture 50, Each is partitioned by the groove portion 55 so as to correspond to the plurality of packaged products 3 after the work 1 is cut off, and suctions the workpiece 1 or one of the plurality of packaged products 3. A plurality of convex portions 56 having through holes 63 for Each includes a plurality of base portions 57 which connect the convex portions 56 arranged along at least one direction among the plurality of convex portions 56, The cutting device 100 further includes a container 90 in which the stator 50 is installed in the inner space and a liquid 91 is injected into the inner space. The holding device (50) is a cutting device, characterized in that is immersed in the liquid (91) in the vessel (90) so that the passive water jet (2) does not directly collide. The method of claim 3, wherein The mounting member 54 provided between the workpiece 1 or the plurality of packaged products 3 and the plurality of convex portions 56 and on which the workpiece 1 or the packaged product 3 is placed is placed. Also equipped, And said mounting member (54) comprises a material having a hardness lower than said abrasive grain.

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