KR20080049221A - Automatic guided vehicle system and method of conveying substrate using the same - Google Patents

Abstract

An automatic guided vehicle system and a method of conveying a substrate using the same are provided to conduct a transfer command by a rack master robot when transferring substrates into a stocker and to shorten a delay time when the next transfer command is received for reducing the entire transfer time and for increasing the transfer efficiency. An automatic guide vehicle system comprises multiple manufacturing devices, a stocker, an automatic guided vehicle, a rack master robot(133), a stocker center control device(140), and a stocker sub control device(150). The automatic guided vehicle is placed between the manufacturing devices and the stocker to input and output substrates by a cassette unit. The rack master robot transfers the substrates into the stocker. The stocker center control device controls input/output statuses of the cassette, the cassette state in a port of the stocker, and the transferred position of the substrates in the stocker. The stocker sub control device receives the transferred position of the substrate, applies the position to a transfer commend of the rack master robot, and controls the motion of the rack master robot.

Description

AUTOMATIC GUIDED VEHICLE SYSTEM AND METHOD OF CONVEYING SUBSTRATE USING THE SAME}

1 is a plan view showing the structure of an automatic transport cart system according to the prior art.

FIG. 2 is a diagram illustrating a substrate conveyance process using an automatic conveyance cart system according to the prior art in time.

3 is a view schematically showing the structure of an automatic transport cart system according to an embodiment of the present invention.

4 is a diagram illustrating a communication structure of an automatic transport balance system according to an embodiment of the present invention.

5 is a diagram illustrating an overall control method of an automatic transport cart system according to an embodiment of the present invention.

6 is a view for explaining a substrate transfer method using an automatic transfer cart system according to an embodiment of the present invention.

FIG. 7 is a diagram illustrating a substrate transfer cycle time through the substrate transfer method of FIG. 6.

(Explanation of symbols for the main parts of the drawing)

110: a plurality of manufacturing apparatus 120: automatic transport cart

120a, 120b: Automatic Transfer Balance Transfer Line

130: stocker 131a: import port

131b: export port 133: rock master robot

140: stalker central control unit 150: stalker sub-control unit

The present invention relates to an automatic transport cart system, and more particularly, to an automatic transport cart system and a method of manufacturing the same that can increase the productivity by reducing the time required to transport the cassette.

In general, a liquid crystal display (LCD) is formed by arranging two substrates on which electric field generating electrodes are formed to face each other, forming a liquid crystal layer between the two substrates, and then applying a voltage to the two electrodes. By moving the liquid crystal molecules of the liquid crystal layer by the electric field, it is a device that represents the image by controlling the light transmittance that varies accordingly.

Such a liquid crystal display includes a process of manufacturing an upper substrate, a process of manufacturing a lower substrate, a process of joining an upper substrate and a lower substrate, a process of injecting and sealing a liquid crystal between two bonded substrates, and a process of repairing In addition, the liquid crystal panel is manufactured through a process of manufacturing a liquid crystal display module by mounting a backlight or the like and mounting a driving circuit.

At this time, it is necessary to convey or transfer a plurality of substrates sequentially or in a group form to manufacturing equipment used in each manufacturing process.

Therefore, a conveyance trolley for conveying a large number of substrates in cassette units is used.

Compared with the conventional conveyor system, the conveyance trolley is easy to supply parts and can cope with changes in the working environment, and thus, there is an advantage in automating products such as getting in and out of products, transporting workpieces, and supplying parts.

Types of conveying trolleys according to the prior art include a rail guided vehicle (RGV) that moves along a rail, an automatic guided vehicle (AGV) that moves a designated route by its own driving force by a controller, and the like. .

1 is a plan view showing the structure of an automatic transport cart system according to the prior art.

As shown in FIG. 1, the automatic transfer balance system according to the prior art stores a cassette in which a substrate is loaded in a stocker 30 at each stage of a manufacturing process of a liquid crystal display, and then uses an automatic transfer balance 20. ) To carry or return the cassettes to the next manufacturing process.

Accordingly, as illustrated, a plurality of manufacturing apparatuses 10 for performing various manufacturing processes of the liquid crystal display device are arranged, and the automatic transport cart 20 may move between the plurality of manufacturing apparatuses 10 and the stocker 30. Automatic transfer balance moving lines 20a and 20b are provided.

In the stocker 30, a rack master robot (R / M: 33) for loading and unloading a substrate of a loaded cassette is provided.

In addition, the carry-in port 31a and the carry-out port 31b of the cassette provided in the stocker 30 are installed to be connected to the automatic transfer cart moving lines 20a and 20b.

The conventional automatic conveyance truck system comprised in this way is an automatic conveyance truck which moves along the automatic conveyance truck movement lines 20a and 20b in the import / export port 31a, 31b of the cassette provided in the stocker 30 ( 20 carries the cassette into the stocker 30 and stores it, or takes it out of the stocker 30 and transfers it to another manufacturing apparatus 10.

FIG. 2 is a diagram illustrating a substrate conveying process using an automatic conveyance cart system according to the prior art in detail, illustrating a substrate conveyance process performed in a stocker of the automatic conveyance cart system.

For reference, the graph indicated by the thick line in FIG. 2 shows the operation cycle of the lock master robot operating to perform substrate transfer in the stocker.

The ACTIVE section including A, B, C, and D is a section in which the lock master robot operates and is activated, and the IDLE section including E is an inactive section, in which the lock master robot is initialized to its original state.

Specifically, A is a section in which the lock master robot travels to the position of the cassette to be conveyed, B is a section in which the rock master robot unloads the substrate from the cassette to be conveyed, and C is a section in which the rock master robot travels to the position to transfer the substrate. Section D is a section in which the lock master robot loads the substrate at a position to transfer the substrate, and E is a section in which the lock master robot is initialized to its original state.

Therefore, when the cassette is loaded into the stocker and the transfer instruction of the board is received by the lock master robot, the lock master robot continues to operate until the transfer of the board is completed (ACTIVE section), and then the next transfer is performed at the time when the lock master robot is initialized. Search for the command (IDLE interval). After that, if there is a next conveying command, the cassette can be conveyed and then the next conveyance is performed. That is, the ACTIVE section and the IDLE section of the lock master robot are repeatedly performed at one cycle.

However, in the substrate transfer method according to the related art, since the lock master robot checks the next transfer command while the arm is folded, the time taken in the IDLE section is actually the time required for initializing the lock master robot. And the time to wait for the next return order to be received.

Accordingly, there is a problem in that the time for transporting the substrate is unnecessarily increased to reduce productivity.

Accordingly, an aspect of the present invention is to provide an automatic transfer cart system and a conveying method using the same, which can increase productivity by reducing a waiting time of a cassette.

Further technical problems to be achieved by the present invention are not limited to the above-mentioned technical problems, and other technical problems not mentioned above are clearly understood by those skilled in the art from the following description. It can be understood.

An automatic transport cart system according to the present invention for achieving the above technical problem, a plurality of manufacturing apparatus for performing a variety of manufacturing process for a plurality of substrates, a stocker for temporarily storing the substrates put or discharged into the plurality of manufacturing apparatuses (stocker), an automatic guided vehicle for carrying in / carrying the substrate between cassettes between the plurality of manufacturing apparatuses and the stocker, and a rack master robot for transferring the substrate in the stocker. ), A stocker central control unit which controls whether the cassette in the stocker is loaded / exported, whether or not the cassette is in the port of the stocker, and the transfer position of the substrate in the stocker, and when the cassette is inserted in the stocker's port. The locker receives the transfer position of the substrate received from the stocker central controller And a stocker sub-controller which applies a transfer command to the stub robot and controls the travel of the lock master robot.

In the substrate transfer method using the automatic transfer cart system according to the present invention, (a) accepting a transfer command of the lock master robot when the cassette is inserted into the port of the stocker, (b) driving the lock master robot to the port of the stocker; (C) transferring the substrate of the cassette loaded into the port, (d) checking a next conveyance command immediately before the transfer of the substrate is finished, and (e) checking the next conveyance command, And initializing the lock master robot to its original state and waiting.

Specific details of other embodiments are included in the detailed description and the drawings. Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. Like reference numerals refer to like elements throughout.

Hereinafter, with reference to the accompanying drawings will be described in detail with respect to the automatic transfer cart system and the substrate transfer method using the same.

3 is a view schematically showing the structure of an automatic transfer balance system according to an embodiment of the present invention, Figure 4 is a view showing a communication structure of an automatic transfer balance system according to an embodiment of the present invention.

First, referring to FIG. 3, an automatic transport cart system according to an embodiment of the present invention may be supplied or discharged from a plurality of manufacturing apparatuses 110 and various manufacturing apparatuses 110 to perform various manufacturing processes for a plurality of substrates. Transfer the substrate in the stocker 130 for temporarily storing the substrate, the automatic transport cart 120 for carrying in and transporting the substrate between the stocker 130 and the plurality of manufacturing apparatuses 110, and the stocker 130. Includes a rack master robot (R / M) 133.

4, a stocker master controller (SMC) 140, and a stocker central controller for controlling the operation of the stocker 130 and the transfer position of the substrate in the stocker 130. The apparatus further includes a stocker sub-control device 150 for controlling the travel of the lock master robot 133 according to the conveyance command input from the 140.

Specifically, in the automatic transport cart system according to the embodiment of the present invention, a plurality of manufacturing apparatuses 110 for performing various manufacturing processes of the liquid crystal display device are arranged, and the plurality of manufacturing apparatuses 110 and the stocker 130 are provided. ), The automatic conveyance balance moving lines 120a and 120b are provided to which the automatic conveyance balance 120 can move.

In the stocker 130, a lock master robot 133 is installed to load and unload a substrate of a cassette. The stocker 130 communicates with the stocker sub-control device (150 in FIG. 4), and the stocker sub-control device (FIG. 4). 150) communicates with the stocker central control device (140 in FIG. 4), which is a central server, to receive a transfer command of the substrate.

In addition, an input port (131a) and an output port (131b) for transporting to the stocker 130 are installed to be connected to the automatic transport cart moving lines 120a and 120b.

The import port 131a and the export port 131b are linked to the stocker sub-control device 150 to provide the lock master robot 133 with the loading and unloading information of the substrate.

The stocker central control unit 140 controls whether the cassette is loaded / exported, whether or not the cassette exists in the loading / exporting ports 131a and 131b, and the transfer position of the substrate in the stocker 130, respectively.

Therefore, when the cassette is loaded into the carry-in port 131a of the stocker 130, the stocker central control apparatus 140 transmits a return instruction to the lock master robot 133 through the stocker sub-control apparatus 150. When the cassette is taken out to the carrying port 131b of the stocker 130, the transfer command is transmitted to the automatic transfer cart 120 in the automatic transfer cart moving lines 120a and 120b. Then, the number of cassettes to be loaded and the number of substrates loaded on the cassettes are grasped to control the substrate transfer position in the stocker 130.

The stocker sub-control unit 150 receives the transfer position of the substrate received from the stocker central control unit 140 when the cassette is loaded into the stocking port 131a and the stocking port 131b of the stocker 130. 133 is applied to the transfer instruction, and the running of the lock master robot 133 is controlled.

Accordingly, the automatic transfer cart system according to the embodiment of the present invention moves automatically along the automatic transfer cart movement lines 120a and 120b at the loading / exporting ports 131a and 131b of the cassette installed in the stocker 130. The bogie 120 stores the substrate in the stocker 130, or removes the substrate from the stocker 130 and transfers the substrate to another manufacturing apparatus 110. In this case, the plurality of substrates are stacked and transferred in a cassette unit.

Looking at the control method and the substrate transfer method of the automatic transfer cart system according to an embodiment of the present invention configured as described above are as follows.

FIG. 5 is a view illustrating an overall control method of an automatic transport cart system according to an embodiment of the present invention, and FIG. 6 is a view for explaining a substrate transport method using an automatic transport cart system according to an embodiment of the present invention.

First, referring to FIG. 5 in conjunction with FIG. 3, the control method of the automatic conveyance balance system according to the embodiment of the present invention is a first step, and the plurality of manufacturing apparatuses 110 have to finish the manufacturing process and return to the stocker 130. If there is a cassette on which a substrate is to be loaded, the cassette to be conveyed is received at the server (S10).

Thereafter, the server checks the number of cassettes to be conveyed, the destination to which the cassettes are to be transported (loading port in the stocker), and the like, and determines the conveying order of the cassettes when the number of cassettes is two or more (S20).

Thereafter, the automatic transport cart 120 is allocated so as to transport the cassette and conveyed to the carry-in port 131a of the stocker 130 (S40, S50).

Finally, the cassette arrives at the carrying port 131a of the stocker 130 first to finish the stocking of the cassette at the stocker 130 (S60).

At this time, the process of conveying the cassette to the stocker 130 is made in detail as shown in FIG.

In the first step, when the cassette is loaded into the carry-in port 131a of the stocker 130, the transfer of the lock master robot 133 is accepted, and the transfer command and the transfer position of the substrate from the stocker central control unit 140 (FIG. 4). Received (S51).

Thereafter, the lock master robot 133 receiving the transfer command travels to the loading port 131a of the stocker 130 in which the cassette to be conveyed is received (S52).

Thereafter, the substrate of the cassette to be conveyed is transferred (S53).

At this time, the transfer operation of the substrate is driving the lock master robot 133 according to the position information received from the stocker central control device as described above.

Subsequently, the next transfer command is checked when there is no substrate on the arm of the lock master robot 133 during transfer of the substrate (S54, S55).

The point of time when the substrate does not exist on the arm of the lock master robot 133 may be detected by a sensor provided on the arm of the lock master robot 133 to sense the loading of the substrate. For example, if the sensor is in the on state, the substrate to be transferred is present on the arm, and if it is off, it is determined that there is no substrate on the arm and the transfer of the substrate is finished.

Thereafter, the lock master robot 133 is initialized to its original state (S56).

For example, the position of the lock master robot 133 is returned to its original state, or the arm of the lock master robot 133 is folded to maintain the standby state.

Thereafter, if there is a next conveying command, the above-described process is repeatedly performed by causing the lock master robot 133 to travel to the cassette to be conveyed (S52).

If there is no next transfer command, the substrate transfer process ends.

FIG. 7 is a diagram illustrating a substrate transfer cycle time through the substrate transfer method of FIG. 6.

The graph shown shows the operating cycle of the lock master robot operating to perform substrate transfer in the stocker.

The ACTIVE section including a, b, and c is a section in which the lock master robot operates and is activated, and the IDLE section including a town is an inactive section and is a section in which the rock master robot is initialized to its original state.

In detail, the temporary section is a section in which the rock master robot travels to the position of the cassette to be transported when the transport of the lock master robot starts, and the b section is a section in which the rock master robot unloads the substrate from the cassette to be transported, and the multi section. Is a section in which the lock master robot travels to a position to transfer the substrate, and a la section is a section in which the rock master robot loads the substrate at the position to transfer the substrate, and a section section is a section for initializing the lock master robot to its original state.

Therefore, when the cassette is loaded into the stocker and the transfer instruction of the board is received by the lock master robot, the lock master robot continues to operate until the transfer of the board is completed, and then the transfer is performed when the lock master robot has no board after the board transfer. Retrieve command (ACTIVE interval). Thereafter, the lock master robot is initialized and waits to perform the next conveyance (IDLE section).

That is, the lock master robot checks the next transfer instruction to be performed next time, when the lock master robot is not initialized, but when there is no substrate on the arm among the substrate transfers. Shorten.

According to this, in fact, since the time required in the IDLE section only takes the time required to initialize the lock master robot, it can be seen that the operation cycle time of the lock master robot is shortened compared to the conventional.

Therefore, the conveyance efficiency can be increased.

For example, assuming that the average return time is 60 seconds and the average communication wait time is reduced by about 2 seconds, when the stocker performs an average of 1200 times a day, the communication wait time is As it is shortened, about 40 more times of conveyance can be performed.

In this way, by increasing the number of times of conveyance, the efficiency and productivity of conveyance can be improved.

Although embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains may implement the present invention in other specific forms without changing the technical spirit or essential features thereof. I can understand that.

Therefore, since the embodiments described above are provided to completely inform the scope of the invention to those skilled in the art, it should be understood that they are exemplary in all respects and not limited. The invention is only defined by the scope of the claims.

The automatic transfer cart system according to the present invention made as described above reduces the overall transfer time by shortening the waiting time until the next master transfer command is received after the lock master robot performs the transfer command when transferring the substrate in the stocker. There is an effect of increasing the efficiency of conveyance.

In addition, the number of transfers that can be performed on average can be increased by reducing the overall transfer time, thereby improving productivity.

Claims (6)

A plurality of manufacturing apparatuses for performing various manufacturing processes on the plurality of substrates; A stocker for temporarily storing the substrates fed or discharged into the plurality of manufacturing apparatuses; An automatic guided vehicle for carrying in / carrying the substrate between cassettes between the plurality of manufacturing apparatuses and the stocker; A lock master robot transferring the substrate in the stocker; A stocker central control device which controls whether a cassette in the stocker is loaded / exported, whether or not a cassette is inserted into a port of the stocker, and a transfer position of the substrate in the stocker; And When the cassette is inserted into the stocker's port, the stocker sub-controller receives the transfer position of the substrate received from the stocker central controller and applies the transfer command to the lock master robot and controls the driving of the lock master robot. Automatic return balance system comprising a. The method of claim 1, The automatic transfer cart system, characterized in that the sensor for detecting the presence of the substrate on the arm (arm) of the lock master robot. (a) receiving a return instruction from the lock master robot when a cassette is inserted into a port of the stocker; (b) driving the rock master robot to the port of the stocker; (c) transferring the substrate of the cassette loaded into the port; (d) checking a next conveyance command immediately before the transfer of the substrate is finished; And (e) after checking the next conveyance command, initializing the lock master robot to its original state and waiting Substrate conveying method of an automatic conveyance balance system comprising a. The method of claim 3, (f) performing the step (b) if there is a next transfer command in the initialization state of the lock master robot; Substrate conveying method of the automatic transfer cart system further comprising. The method of claim 3, In the step (d), the transfer point of the substrate is finished, the substrate transfer method of the automatic transfer cart system, characterized in that the detection via the sensor for sensing the substrate inventory of the cassette. The method of claim 3, The step (e) is a substrate transfer method of the automatic transfer cart system, characterized in that folding the arm (arm) of the lock master robot.

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