KR20050070379A - Controll system for robot transferring a glass and method for controlling the robot - Google Patents

Abstract

The present invention relates to a system for controlling a transfer robot that takes out a substrate stored in a cassette and supplies it to process equipment, and a method for controlling the transfer robot. In one embodiment of the present invention, there is provided an apparatus comprising: means for sensing thickness information of a substrate housed in a cassette; A host that uploads and manages thickness information of the substrate from the means; A device host which sequentially downloads thickness information of the substrate from the host; And loader controller; According to the thickness information of the downloaded substrate, a transfer robot control system comprising a robot controller for instructing the transfer robot by changing the position where the finger of the transfer robot enters into the cassette. In another aspect of the present invention, there is provided a method comprising: (a) checking information about a thickness of a substrate accommodated in a cassette and uploading the information to a host; (b) checking information on the cassette received in the loader of the process equipment, and downloading thickness information of the substrate from the host; (c) determining a position at which the finger of the transfer robot enters the cassette based on the downloaded information; And (d) entering the finger into the cassette according to the determined position, loading the substrate, and taking out the substrate.

Description

Displacement robot control system and control robot method {controll system for robot transferring a glass and method for controlling the robot}

The present invention relates to an LCD manufacturing apparatus, and more particularly, to a system for controlling a transfer robot that takes out a substrate stored in a cassette and supplies the same to a equipment for performing a manufacturing process, and a method for controlling the transfer robot.

As the information society develops, the demand for display devices is increasing in various forms.In recent years, liquid crystal display (LCD), plasma display panel (PDP), electro luminescent display (ELD), and vacuum fluorescent display (VFD) have been developed. Various flat panel display devices have been studied, and some are already used as display devices in various devices.

Among them, LCD is the most widely used as a substitute for CRT (Cathode Ray Tube) for the use of mobile image display device because of the excellent image quality, light weight, thinness, and low power consumption, and mobile type such as monitor of notebook computer. In addition, it is being developed in various ways, such as a television for receiving and displaying broadcast signals, and a monitor of a computer.

Such a liquid crystal display may be broadly divided into a liquid crystal panel displaying an image and a driving unit for applying a driving signal to the liquid crystal panel, and the liquid crystal panel may have a space and be bonded to each other as shown in FIG. 1. And a liquid crystal layer 3 injected between the second substrates 1 and 2 and the first and second substrates 1 and 2.

Here, the first substrate 1 (TFT array substrate) includes a plurality of gate lines 4 arranged in one direction at regular intervals and at regular intervals in a direction perpendicular to the respective gate lines 4. A plurality of pixel electrodes 6 and the gate formed in a matrix form in each of the pixel regions P defined by crossing the plurality of data lines 5 and the gate lines 4 and the data lines 5. A plurality of thin film transistors T, which are switched by the signal of the line 4 and transfer the signal of the data line 5 to the pixel electrodes P, are formed.

The second substrate 2 (color filter substrate) includes a black matrix layer 7 for blocking light in portions other than the pixel region P, and R, G, and B color filter layers for expressing color colors. 8 and a common electrode 9 for implementing an image are formed. Of course, in the transverse electric field type liquid crystal display device, the common electrode is formed on the first substrate.

The liquid crystal display having the above structure includes a process of manufacturing a thin film transistor array on the first substrate 1, a process of manufacturing a color filter array on the second substrate 2, and the first and second substrates 1. , 2) adhering the liquid crystal, injecting and sealing the liquid crystal between the two bonded substrates, testing and repairing each liquid crystal panel in which the liquid crystal is injected, and back light on the good liquid crystal panel It is manufactured through a process of manufacturing a liquid crystal display module by mounting a lamp and a driving circuit.

As described above, the substrate is subjected to various processes to be completed as a liquid crystal display device, and as shown in FIG. 2, a cassette conveying apparatus (not shown) is used to convey the substrate to the equipments 21 and 22 performing each process. 30) (Automatic guided vehicle) is used. In this case, in order to increase the conveyance efficiency of the cassette conveying apparatus 30, the cassette conveying apparatus 30 conveys the cassette 10 after storing the plurality of substrates in the cassette 10. .

Accordingly, the cassette conveying apparatus 30 may move the cassette 10 back and forth between the stocker 40 temporarily stored in the cassette 10 and the processing equipments 21 and 22 performing the respective processes. The stocker 40 carries the equipment 21 and 22 and the equipment 21 and 22 to the stocker 40, respectively. To this end, a line 11 is provided at the bottom of the production line to guide the cassette conveying device 30 to move along a predetermined path.

On the other hand, each of the equipment (21, 22) is provided with a loader (21a, 22a) (loader), respectively, as shown in Figure 2, the cassette 10 conveyed by the cassette conveying apparatus 30 is the loader The substrates 15 (see FIGS. 3A and 3B), which are unloaded to the cassettes 21a and 22a and stored in the cassette 10, are transferred to the equipment 21 and 22 one by one by a transfer robot (not shown). Supplied. Of course, the substrate 15, which has been subjected to a specific manufacturing process in the equipment 21, 22, is stored in the cassette 10 again by the transfer robot.

To this end, when taking out the substrate 15 from the cassette 10, the transfer robot inserts under the substrate 15 to load the finger 50 as shown in FIG. 3A and then lifts it. The substrate 15 is loaded. At this time, the finger 50 enters into the cassette 10 at a previously input teaching position.

Here, the cassette 10 is provided with a slot 17 formed between the side support bars 16, the substrate 15 is inserted into each of the slots 17 to enter the teaching position Finger 50 is positioned between substrate 15 and substrate 15, as shown in FIG. 3A.

However, when the thickness and size of the substrate 15 are small, since the deflection of the substrate 15 is small, as shown in FIG. 3A, the finger 50 stably enters the teaching position and then moves the substrate 15. You can load it.

However, as the liquid crystal display device is becoming larger in size, the size and thickness of the substrate 15 are gradually increasing. Therefore, in the case of the thick and large substrate 15, the amount of deflection at the center portion is increased as shown in FIG. 3B. Of course, the rear support bar 18 extending forward from the rear of the cassette 10 supports the substrate 15, but the end of the rear support bar 18 also sags with the substrate 15, so that it is thick and large. In the substrate 15, as shown in FIG. 3B, much deflection may occur.

In this situation, when the transfer robot's finger 50, which handles substrates 15 having different thicknesses and sizes, enters the same teaching position as above, when handling the thick and large substrate 15, it is shown in Fig. 3B. As described above, the finger 50 collides with the drooping portion of the substrate 15, thereby damaging the substrate 15.

In order to prevent this, in the case of the cassette 10 which accommodates the thick and large substrate 15, the distance between the side support bars 16, that is, the size of the slot 17 should be increased, in this case the cassette 10. Since only a small number of substrates 15 can be accommodated therein, the substrate transfer efficiency is lowered, thereby causing a problem of low productivity.

The present invention has been made to solve the above problems, an object of the present invention is to enable the transfer robot to take out the substrates of various thickness from each cassette without damage.

Another object of the present invention is to allow the transfer robot to take out a large substrate from the cassette without damaging the substrate storage capability of the cassette.

In one embodiment of the present invention for achieving the above object, means for detecting information about the thickness of the substrate accommodated in the cassette; A host that uploads and manages thickness information of the substrates stored in each cassette from the means; A device host which downloads the thickness information of the substrate from the host when the cassette is supplied to a loader of a device that performs a manufacturing process; A loader controller for downloading thickness information of the substrate from the equipment host; After downloading the thickness information of the substrate from the loader controller, according to the thickness information of the substrate, by changing the position where the finger of the transfer robot enters the cassette (hereinafter referred to as teaching position) to the transfer robot It provides a transfer robot control system comprising a robot controller for indicating.

According to one aspect of the invention, the means is a first reader for reading the barcode of the glass box on which the substrates are loaded, a second reader for reading the ID display portion of the cassette that is stored after the substrate is taken out of the glass box, And a third controller configured to upload thickness information of the substrate read from the first reader and the second reader and cassette information containing the substrate to the host.

According to another feature of the present invention, the robot controller stores and manages at least two different teaching positions for each thickness of the substrate.

According to another feature of the invention, the teaching position is the first position where the finger enters when the substrate has a first thickness, and the finger is when the substrate has a second thickness thicker than the first thickness A second position, entering a position lower than the first position.

On the other hand, another aspect of the present invention for achieving the above object, (a) checking the information on the thickness of the substrate accommodated in the cassette and uploading (uploading) to the host; (b) checking information on the cassette received in the loader of the equipment for performing the manufacturing process and downloading information about the thickness of the substrate stored in the cassette from the host; (c) determining a position where a finger of the transfer robot enters the cassette (hereinafter, referred to as a teaching position) based on the downloaded thickness information of the substrate; And (d) the transfer robot extends the arm according to the determined teaching position, enters the finger into the cassette, loads the substrate, and takes out the substrate.

According to an aspect of the present invention, the step (a) comprises: (a1) obtaining thickness information of the substrate by reading a barcode of the glass box on which the substrates are loaded; (a2) reading the ID display unit of the cassette in which the substrates are stored; (a3) uploading information about the thickness of the substrate and the cassette to the host.

Here, the step (a1) may be performed before the substrates are put into the LCD manufacturing process. The step (a2) may be performed when the substrates are first cleaned and then stored in a cassette.

According to another feature of the invention, the step (b), (b1) when the cassette is loaded into the loader of the equipment, read the ID display of the cassette, the equipment host downloads the thickness information of the substrate from the host Receiving, (b2) the loader controller downloading the board thickness information and the received port information from the equipment host, and (b3) the robot controller relating the board thickness information and the loaded port. And downloading information from the loader controller.

According to another feature of the invention, the step (c), (c1) comparing the information on the teaching position for each thickness of the substrate stored in advance and the thickness information of the downloaded substrate, and (c2) after the comparison to the loader And determining a teaching position corresponding to the thickness of the substrate housed in the loaded cassette.

According to another feature of the invention, the step (d), (d1) extending the arm to the teaching position instructed by the robot controller to enter the finger into the cassette, (d2) the finger is raised to raise the substrate Loading onto a finger, and (d3) removing the substrate while folding the arm to remove the finger from the cassette.

According to another feature of the invention, the teaching position is the first position where the finger enters when the substrate has a first thickness, and the finger is when the substrate has a second thickness thicker than the first thickness A second position, entering a position lower than the first position.

DETAILED DESCRIPTION Hereinafter, embodiments of the present invention in which the above object can be specifically realized are described with reference to the accompanying drawings. In describing the embodiments, the same names and symbols are used for the same components, and additional description thereof will be omitted below.

First, the cassette conveyance system according to the present invention will be described with reference to FIG. The control system for controlling the conveying system according to the present invention comprises first to fifth hosts 101, 102, 103, 104, 105 as shown in FIG. 4.

The first host 101 is the highest host that receives a conveying instruction from the operator to move the cassette 150. When a worker inputs a return command to the first host 101, the first host 101 transmits the return command to the second host 102 and the third host 103.

The second host 102 communicates with the first host 101 and the third host 103 and controls the equipment 200 to perform any LCD manufacturing process. The return command sent from the first host 101 to the second host 102 is transmitted to the equipment 200.

Here, the equipment 200 is provided with a loader 210 for unloading the cassette 150 conveyed by the cassette conveying apparatus 300, the substrate 210 accommodated in the cassette 150 in the loader (210) FIG. 5 is provided with a transfer robot (not shown in FIG. 4, see FIG. 6) for supplying the equipment 200 one by one.

Meanwhile, the third host 103 communicates with the first host 101 and the second host 102, and controls the fourth host 104 and the fifth host 105. The return command transmitted from the first host 101 to the third host 103 is transmitted to the fourth host 104 and the fifth host 105.

The fourth host 104 communicates with the third host 103 and controls the operation of the cassette carrier 300 (automatic guided vehicle). Of course, the conveyance command received by the fourth host 104 is transmitted to the cassette conveyance apparatus 300.

The fifth host 105 communicates with the third host 103 and controls a stocker 400 that stores a plurality of cassettes 150 on which a plurality of glasses are mounted. Of course, the return command received at the fifth host 105 is transmitted to the stocker 400.

Meanwhile, before the stocker 400 supplies the cassettes 150 on which the substrates of which process is completed to other equipment that performs the next process, the substrate processing capability and the processing time of the equipments that perform each process. In order to solve the buffering (buffering) problem caused by the difference of the, is a facility for temporarily storing the cassette 150. Therefore, the cassettes 150 on which substrates which have been finished in a certain process are mounted are temporarily stored in the stocker 400 and then supplied to other equipment which performs another process.

As shown in FIG. 4, the stocker 400 performing the above functions includes a stock port 410 (input port) in which a cassette 150 on which substrates are completed is mounted, and the cassette ( A plurality of shelves (not shown) for storing 150, an output port 420 from which the cassette 150 is shipped, and between the goods receipt port 410 and the shelf and between the shelf and the delivery port 420 And a stacker robot (not shown) for transporting the cassette 150 in the stocker 400 while moving between them.

Meanwhile, in order to process the plurality of cassettes 150 without errors as described above, each cassette 150 has unique ID information, and the stocker 400 confirms each ID information of each cassette 150. It is then stored on the shelf.

To this end, the receiving port 410 of the stocker 400 is provided with a reader 430 that can check the ID information of the cassette 150, as shown in FIG. In addition, an ID display unit 151 in which ID information of the cassette 150 is recorded is provided on at least one of an upper side and a lower side of the cassette 150. In the present invention, as an example of the ID display unit 151, a bar code is presented.

With the above structure, the reader 430 reads the ID display unit 151 so that the stocker 400 can check the ID information of the cassette 150. In addition, when the cassette 150 is shipped, the storage port of the cassette 150 having the ID information corresponding to the transport information received by the stocker 400 is confirmed, and then the delivery port 420 is released from the shelf using the stacker robot. The cassette 150 is transported.

Meanwhile, the reader capable of reading the ID display unit 151 of the cassette 150 is also provided in the loader 210 of the equipment 200 as shown in FIG. 4. Therefore, after the loader 210 determines the ID information of the cassette 150 supplied to the loader 210 by using the reader 201, the transfer robot supplies the substrate to the equipment 200 one by one. .

Meanwhile, the cassette conveying apparatus 300 controls the cassette 150 from the equipment 200 to the receiving port 410 of the stocker 400 and the stocker under the control of the fourth host 104. The shipment port 420 of 400 is returned to the other equipment (200). Here, the fourth host 104 controls at least one or more cassette conveying apparatuses 300, and each cassette conveying apparatus 300 is provided with a cassette conveying apparatus 300 according to an instruction of the fourth host 104. The conveying apparatus control part which controls each component of the is provided.

The cassette conveying apparatus 300 is provided at one side, for example, the upper portion of the traveling portion 310 and the traveling portion 310, which runs a predetermined section under the control of the conveying apparatus controller. ) Is mounted including a mounting portion 320 is raised. Here, a plurality of wheels 311 driven by the driving motor is provided at the lower end of the driving unit 310 as shown in FIG. 5.

In addition, the mounting unit 320 is provided with a guide block 321 for guiding the cassette 150 to be accurately mounted and fixing the mounted cassette 150 so as not to move when the traveling unit 310 is moved. .

On the other hand, the cassette conveying apparatus 300 is further provided with a robot arm 330 for loading the cassette 150 to the mounting portion 320 or unloading from the mounting portion 320. . Here, the robot arm 330 is mounted on the upper portion of the running portion 310 and the main shaft 331 that can move or rotate in the vertical direction, and mounted on the main shaft 331 can be stretched in the horizontal direction And a slider 335.

When the robot arm 330 is provided in the cassette conveying apparatus 300 as described above, the cassette conveying apparatus 300 is the equipment 200 and the stocking port 410 and the delivery port 420 of the stocker 400. It is possible to directly load the cassette 150 in the mounting portion 320, or to unload the cassette 150 loaded in the mounting portion 320 to the equipment 200 and the stocker 400.

On the other hand, the cassette conveying apparatus 300, when conveying the cassette 150, it should be able to be accurately positioned in front of the storage port 410 and the delivery port 420, or the equipment 200 of the stocker (400). To this end, the cassette conveying apparatus 300 is provided with a position sensor 340 as shown in FIG. 5, and the loader 210 and the stocker 400 of the equipment 200 as shown in FIG. 4. The mark plate 250 is provided. Here, the position sensor 340 reads the mark plate to help the cassette conveying apparatus 300 to be accurately positioned in front of the loader 210 or stocker 400 of the equipment 200.

In addition, the cassette conveying apparatus 300 accurately positioned in front of the loader 210 or the stocker 400 of the apparatus 200 may smoothly and accurately load or unload the cassette 150. Must be able to communicate with To this end, the cassette conveying apparatus 300 is further provided with a communication sensor 350 to communicate with the equipment 200 or the stocker 400 to help the correct loading or unloading operation, as shown in FIG.

On the other hand, when the cassette 150 is supplied to the loader 210 of the equipment 200 by the cassette conveying apparatus 300, the transfer robot 500 (see Fig. 6) provided in the loader 210 is the The substrates 155 stored in the cassette 150 are taken out one by one and then supplied to the stage 290 of the equipment 200. Hereinafter, the transfer robot 500 having such a role will be described in more detail. Explain.

Referring to FIG. 6, an arm 520 is rotatably connected to one end, for example, an upper end of the main shaft 510. Here, the main shaft 510 can be raised and lowered in the vertical direction. And since the arm 520 is provided with a joint portion, the arm 520 is folded or unfolded along the horizontal direction.

One end of the arm 520 is provided with a hand 530 for loading or unloading the substrate 155. The hand 530 includes a frame 531, a finger 532, and pads 533 provided on an upper surface of the finger 532. Here, the frame 531 extends widely at the end of the arm 520 as shown in FIG. 6, and at least two fingers 532 extend side by side in the frame 531. .

The pads 533 are disposed on the upper surfaces of the fingers 532 at predetermined intervals, and when the substrate 155 is placed on the fingers 532, the pads 533 adsorb the bottom surface of the substrate 155 using a vacuum. Play a role. To this end, a vacuum tube (not shown) connected to the pad 533 is provided inside the arm 520 and the finger 532. Therefore, when the substrate 155 is loaded in the hand 530, the substrate 155 is fixed by the pad 533, so that the transfer robot 500 may stably move the substrate 155. It becomes possible.

On the other hand, since the substrate 155 is accommodated in the cassette 150 in a slightly skewed state, the transfer robot 500 grasps how the substrate 155 is placed and corrects its position, and then stages the equipment 200. Supply (290). To this end, sensors 541 and 542 are provided on an upper surface of the finger 532 to detect the position of the substrate 155.

The transfer robot 500 having the above structure serves to take out the substrate 155 stored in the cassette 150 and then supply it to the stage 290 of the equipment 200. In this case, the transfer robot 500 according to the present invention enters different teaching positions according to the thickness of the substrate 155 accommodated in the cassette 150 (the position where the hand of the transfer robot enters into the cassette). The substrate 155 is then loaded into the hand 530.

Accordingly, unlike the related art, thick and large substrates 155 having a large amount of deflection may be loaded without damage and supplied to the stage 290 of the apparatus 200. This is made possible by the transfer robot control system according to the present invention which grasps the thickness of the substrate 155 accommodated in the cassette 150 and controls the transfer robot 500 by changing the teaching position accordingly. This will be described in more detail with reference to the drawings.

Referring to Figure 7, the transfer robot control system according to the present invention is provided with a means for detecting information about the thickness of the substrate 155 accommodated in the cassette 150. Here, the means includes, for example, a first reader 621, a second reader 622, and a third controller 605. For the sake of understanding, the description of the components constituting the means will be described together briefly describing the process before the substrate 155 is received in the cassette 150 before the LCD manufacturing process begins.

In general, the substrates 155 used in the LCD manufacturing process are supplied to the manufacturing plant in the state of being loaded in the glass box 610 according to the same specifications. A bar code 611 is provided on the outside of the glass box 610 supplied to the manufacturing plant, and the bar code 611 has information for confirming the specification of the substrate 155 loaded inside the glass box 610. have.

Therefore, when the barcode 611 is read, the thickness and size of the substrate 155 can be known by confirming the specification of the substrate 155 that matches the barcode 611. Accordingly, in the present invention, the first reader 621 reads the barcode 611 of the glass box 610 supplied to the manufacturing plant to grasp information about the thickness and size of the substrate 155. .

After reading the barcode 611, the glass box 610 is opened and the substrate 155 accommodated in the glass box 610 is cleaned. After the cleaning of the substrate 155 is completed, the cleaned substrate 155 is first stored in the cassette 150 using a glass input device (not shown). At this time, the second reader 622 reads the ID display unit 151 provided in the cassette 150. Then, it is possible to know in which cassette 150 the substrate 155 of the standard read by the first reader 621 is stored.

Information read from the first reader 621 and the second reader 622, that is, information about the thickness and size of the substrate 155 and information about the cassette 150 in which the substrate 155 is housed are illustrated in FIG. 7. As shown in FIG. 3, the third controller 605 is uploaded. The third controller 605 uploads this information to the host 601. Here, the host 601 serves as the first host 101 described with reference to FIG. 4.

The host 601 uploading the information manages information on the thickness and size of the substrates 155 stored in all the cassettes conveyed and managed in the conveying system described with reference to FIG. For example, it serves to download to the device host 602 of FIG.

Here, the equipment host 602 controls the equipment 200 to perform the manufacturing process, and serves as the second host 102 in the transport system described with reference to FIG. When the cassette 150 is loaded into the loader 210 of the equipment 200, the equipment host 602 downloads information about the thickness and size of the substrate 155 from the host 601.

Here, the loader 210 is provided with a reader 201 capable of reading the ID display unit 151 of the cassette 150 as shown in FIG. 4, so that the equipment host 602 is connected to the loader 210. Only information about the substrate 155 stored in the cassette 150 can be accurately downloaded.

Information regarding the thickness and size of the substrate 155 downloaded to the equipment host 602 and information about the cassette 150 are downloaded to the loader controller 603 controlling the loader 210. Here, the loader 210 of the equipment 200, although not shown, is provided with a port (port) in which the cassette 150 is received.

Accordingly, the loader controller 603 determines which port the cassette 150 is received, information on the thickness and size of the substrate 155, information on the cassette 150, and the loader 210. Information regarding the port of the terminal) is downloaded to the robot controller 604.

The robot controller 604 downloads the information from the loader controller 603 and controls the operation of the transfer robot 500. Therefore, the transfer robot 500 moves to the corresponding port (not shown) of the loader 210 in which the cassette 150 is inserted, and then starts to take out the substrate 155.

In this process, the robot controller 604 is based on the information about the thickness of the substrate 155 downloaded from the loader controller 603, the finger 532 (finger) of the transfer robot 500 is The position to enter the cassette 150, that is, the teaching position is changed to instruct the transfer robot 500.

Here, the robot controller stores and manages at least two different teaching positions for each thickness of the substrate 155. Accordingly, the position at which the hand 530 of the transfer robot 500, more specifically, the finger 532 is inserted into the cassette 150 depends on the thickness of the substrate 155 accommodated in the cassette 150. do.

For example, when the substrate 155 accommodated in the cassette 150 has a first thickness, the finger 532 enters the first position 156 (see FIG. 8), and the substrate 155 When the second thickness is thicker than the first thickness, the finger 532 enters the second position 157 (see FIG. 8) at a position lower than the first position 156.

Therefore, when the finger 532 enters different teaching positions according to the thickness of the substrate 155 as described above, even if the deflection amount of the substrate 155 is large, the substrate 155 and the finger 532 do not collide with each other. 155 can be taken out from the substrate 155.

Hereinafter, a process of controlling the transfer robot by the transfer robot control system according to the present invention having the above-described structure will be described in more detail.

First, information about the thickness of the substrate 155 stored in the cassette 150 is checked and uploaded to the host 601. (a)

To this end, the first reader 621 reads the barcode 611 of the glass box 610 in which the substrates 155 are loaded to obtain information about the thickness of the substrate 155. (a1) This process As described above, the substrates 155 are made before being put into the LCD manufacturing process, that is, before cleaning.

The second reader 622 reads the ID display unit 151 of the cassette 150 in which the substrates 155 are stored to obtain information about the cassette 150. (a2) These processes are performed as described above. When the substrate 155 is taken out from the glass box 610 and cleaned, the substrate 155 is first stored in the cassette 150 by the glass input device.

Information about the thickness of the substrate 155 and the cassette 150 read by the first reader 621 and the second reader 622 is uploaded to the third controller 605, and the third controller 605. ) Uploads it to the host 601.

Next, check the information about the cassette 150 received in the loader 210 of the equipment 200 for performing the manufacturing process, and the information about the thickness of the substrate 155 accommodated in the cassette 150 Download from host 601. (b)

To this end, when the cassette 150 is received in the loader 210 of the equipment 200, the reader 201 provided in the loader 210 of the equipment 200 may display an ID display unit of the cassette 150. After reading 151, the equipment host 602 downloads information about the thickness and size of the substrate 155 from the host 601. (b1)

Information on the thickness of the substrate 155 downloaded to the equipment host 602 and on which port of the loader 150 is loaded into the loader controller 603 is downloaded to the loader controller 603. b2) The thickness of the substrate 155 down to the loader controller 603 and the information regarding the port received are down to the robot controller 604. (b3)

When the information is downloaded to the robot controller 604, the robot controller 604 may move the finger 532 of the transfer robot 500 to the cassette 150 based on the thickness information of the downloaded substrate 155. (C) The robot controller 604 compares the information on the teaching positions for each thickness of the substrate 155 previously stored as described above with the thickness information of the downloaded substrate 155 as described above. After the comparison, the teaching position corresponding to the thickness of the substrate 155 accommodated in the cassette 150 inserted into the loader 210 is determined.

When the teaching position of the finger 532 is determined by the robot controller 604, the transfer robot 500 extends the arm 520 according to the determined teaching position to enter the finger 532 into the cassette 150. After the substrate 155 is loaded and taken out, this process will be described in more detail with reference to FIGS. 8A and 8B.

First, as shown in FIG. 8A, when the thickness of the substrate 155 accommodated in the cassette 150 is thin, the robot controller 604 moves the finger 532 at the first position 156 shown in FIG. 8A. Command the transfer robot 500 to enter. Then, the transfer robot 500 extends the arm 520 to the teaching position, that is, the first position 156, instructed by the robot controller 604 to enter the finger 532 into the cassette 150. (d1) Then, as illustrated in FIG. 8A, the finger 532 is stably inserted under the substrate 155.

When the finger 532 is inserted into the first position 156, the transfer robot 500 raises the finger 532 to load the substrate 155 on the finger 532. (d2) In this case, the pad Since the substrate 533 adsorbs the bottom surface of the substrate 155 using a vacuum force, the substrate 155 is stably loaded on the finger 532. When the substrate 155 is loaded on the finger 532, the transfer robot 500 folds the arm 520 to remove the finger 532 from the cassette 150, and then the substrate 155 is removed. It is taken out from the cassette 150 to the outside. (D3)

On the other hand, when the thickness of the substrate 155 accommodated in the cassette 150 is thick, even if the substrate 155 is supported by the support bar 154 extending forward from the rear side of the cassette 150, FIG. As shown in 8b, the middle part sags a lot. Therefore, when the finger 532 enters the first position 156 in this state, the finger 532 collides with the substrate 155 and the substrate 155 is damaged.

Therefore, the robot controller 604 according to the present invention has a position where the finger 532 is lower than the first position 156 to the transfer robot 500 based on the downloaded information about the thickness of the substrate 155. Command to enter the second position 157.

The transfer robot 500 commanded by the robot controller 604 moves the finger 532 to the second position 157 as shown in FIG. 8B. Accordingly, the finger 532 stably enters under the substrate 155 and, after entering, rises to load the substrate 155. The finger 532 loaded with the substrate 155 exits the cassette 150, whereby the thick substrate 155 is safely removed without being damaged.

As described above, according to the present invention, even if the slot 153 of the cassette 150 accommodating the thick substrate 155 has the same standard as before, the slot 153 is changed by changing the entry position of the finger 532. The substrate 155 inserted in the can be safely taken out.

Although several embodiments have been described above, it will be apparent to those skilled in the art that the present invention may be embodied in many other forms without departing from the spirit and scope thereof. Accordingly, the described embodiments are to be considered as illustrative and not restrictive, and all embodiments within the scope of the appended claims and their equivalents are included within the scope of the present invention.

As described above, according to the present invention, the teaching position at which the finger of the transfer robot enters into the cassette is changed according to the thickness of the substrate accommodated in the cassette. Therefore, in the process of manufacturing a large LCD, the transfer robot can safely take out a thick substrate from the cassette without failure and damage and supply it to equipment for performing the manufacturing process.

Further, according to the present invention, it is not necessary to increase the slot size of the cassette so as to distance the substrate from the substrate so that the thick substrate can be safely taken out from the cassette. Therefore, the substrate storage capacity of the cassette is not lowered, which brings about an improvement in the carrying capacity and productivity.

1 is an exploded perspective view showing a part of a general liquid crystal display panel;

2 is a schematic diagram for explaining a general cassette conveyance process;

3A and 3B are cross-sectional views showing a state in which a conventional transfer robot inserts a hand in a teaching position to take out a substrate housed in a cassette;

3A is a cross-sectional view illustrating a case in which a thin substrate is accommodated in a cassette;

3B is a cross-sectional view illustrating a case where a thick substrate is accommodated in a cassette;

4 is a schematic view for explaining a cassette conveying system according to the present invention;

5 is a side view showing the cassette conveying apparatus of FIG. 4;

6 is a perspective view showing a transfer robot according to the present invention;

7 is a schematic view showing a transfer robot control system according to the present invention; And

8A and 8B are cross-sectional views showing a state in which a transfer robot inserts a hand in a teaching position to take out a substrate housed in a cassette according to the present invention;

8A is a cross-sectional view illustrating a case in which a thin substrate is accommodated in a cassette;

8B is a cross-sectional view illustrating a case where a thick substrate is accommodated in a cassette.

Explanation of symbols on the main parts of the drawings

150: cassette 155: substrate

156: first position 157: second position

200: equipment 210: loader

300: cassette conveying apparatus 400: stocker

500: jaebok robot 520: cancer

530: hand 530: finger

601: host 602: equipment host

603: loader controller 604: robot controller

605: third controller 610: glass box

621: first reader 622: second reader

Claims (12)

Means for sensing information regarding the thickness of the substrate housed in the cassette; A host that uploads and manages thickness information of the substrates stored in each cassette from the means; A device host which downloads the thickness information of the substrate from the host when the cassette is supplied to a loader of a device that performs a manufacturing process; A loader controller for downloading thickness information of the substrate from the equipment host; After downloading the thickness information of the substrate from the loader controller, according to the thickness information of the substrate, by changing the position where the finger of the transfer robot enters the cassette (hereinafter referred to as teaching position) to the transfer robot Displacement robot control system comprising a robot controller to direct. The method of claim 1, The means, A first reader for reading a barcode of a glass box loaded with the substrates, A second reader which reads the ID display unit of the cassette which is taken out of the glass box and cleaned and stored therein; and And a third controller configured to upload thickness information of the substrate read from the first reader and the second reader and cassette information containing the substrate to the host. The method of claim 1, The robot controller, Transfer robot control system, characterized in that for storing and managing at least two different teaching positions for each thickness of the substrate. The method of claim 3, wherein The teaching position is A first position into which the finger enters when the substrate has a first thickness, and And a second position, a position lower than the first position, into which the finger enters when the substrate has a second thickness thicker than the first thickness. (a) checking information about the thickness of the substrate contained in the cassette and uploading it to the host; (b) checking information on the cassette received in the loader of the equipment for performing the manufacturing process and downloading information about the thickness of the substrate stored in the cassette from the host;  (c) determining a position where a finger of the transfer robot enters the cassette (hereinafter, referred to as a teaching position) based on the downloaded thickness information of the substrate; And and (d) the transfer robot extends the arm according to the determined teaching position, enters the finger into the cassette, loads the substrate, and takes out the substrate. The method of claim 5, In step (a), (a1) reading the barcode of the glass box on which the substrates are loaded to obtain thickness information of the substrate; (a2) reading the ID display unit of the cassette in which the substrates are stored; (a3) a transfer robot control method comprising uploading information about the thickness of the substrate and a cassette to the host. The method of claim 6, Step (a1) is a transfer robot control method characterized in that the substrate is made before being put into the LCD manufacturing process. The method of claim 6, Wherein (a2) is the transfer robot control method, characterized in that when the substrates are first stored in the cassette after being cleaned. The method of claim 5, In step (b), (b1) when the cassette is loaded into the loader of the equipment, reading the ID display of the cassette, and the equipment host downloading the thickness information of the substrate from the host, (b2) the loader controller downloading information about the thickness of the board and information about the received port from the equipment host; (b3) a robot controller, comprising the step of downloading, by the robot controller, information about the thickness information of the board and the port received from the loader controller. The method of claim 5, In step (c), (c1) comparing the thickness information of the downloaded substrate with the information about the teaching position of each substrate of the previously stored thickness, and (C2) transfer robot control method comprising the step of determining the teaching position corresponding to the thickness of the substrate accommodated in the cassette after the comparison. The method of claim 5, In step (d), (d1) extending the arm to the teaching position instructed by the robot controller to enter the finger into the cassette; (d2) raising the finger to load the substrate onto the finger, and and (d3) removing the substrate while folding the arm to remove the finger from the cassette. The method of claim 5, The teaching position is A first position into which the finger enters when the substrate has a first thickness, and And a second position, a position lower than the first position, into which the finger enters when the substrate has a second thickness thicker than the first thickness.