KR20070096656A - 선형보정 마이크로 압력센서 - Google Patents
선형보정 마이크로 압력센서 Download PDFInfo
- Publication number
- KR20070096656A KR20070096656A KR1020060027537A KR20060027537A KR20070096656A KR 20070096656 A KR20070096656 A KR 20070096656A KR 1020060027537 A KR1020060027537 A KR 1020060027537A KR 20060027537 A KR20060027537 A KR 20060027537A KR 20070096656 A KR20070096656 A KR 20070096656A
- Authority
- KR
- South Korea
- Prior art keywords
- diaphragm
- pressure sensor
- wafer
- reference body
- pressure
- Prior art date
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00158—Diaphragms, membranes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
- G01L27/005—Apparatus for calibrating pressure sensors
Abstract
Description
Claims (4)
- 유연성을 갖는 다이어프램(5)과;상기 다이어프램(5)의 일측에 상부가 개구된 단면을 갖는 상부챔버(3)를 형성하는 하단웨이퍼(2)와;상기 다이어프램(5)의 대향측에 형성되어, 상기 상부챔버(3)를 밀폐하도록 상기 하단웨이퍼(2)의 상면에 결합되는 상단웨이퍼(1)와;상기 다이어프램(5)의 상면에 증착되는 금속박막(6)과;상기 상단웨이퍼(1)의 하단면 중앙부에 고착되는 기준체(8)와;상기 기준체(8)로 갈수록 단면적이 커지도록 길이방향으로 만곡지게 형성되되, 상기 기준체(8)를 기준으로 양측이 대향되며 상기 상단웨이퍼(1) 하단면에 고착되는 다수개의 저항체(7)와;상기 기준체(8) 및 저항체(7)의 일측에 형성되는 다수개의 전극(9)과;상기 전극(9)을 전기적으로 연결하는 리드선(20)으로 구성되는 전원부(21);를 포함하여 구성되는 것을 특징으로 하는 선형보정 마이크로 압력센서.
- 제 1항에 있어서,상기 저항체(7)는 ITO 소재인 것을 특징으로 하는 선형보정 마이크로 압력센서.
- 제 1항에 있어서,상기 상단웨이퍼(1)는 파이렉스 글래스 소재인 것을 특징으로 하는 선형보정 마이크로 압력센서.
- 제 1항에 있어서,상기 저항체(7)는 곡선의 만곡도를 조절하여 출력전류값의 선형화를 이루는 것을 특징으로 하는 선형보정 마이크로 압력센서.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060027537A KR100828067B1 (ko) | 2006-03-27 | 2006-03-27 | 선형보정 마이크로 압력센서 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060027537A KR100828067B1 (ko) | 2006-03-27 | 2006-03-27 | 선형보정 마이크로 압력센서 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20070096656A true KR20070096656A (ko) | 2007-10-02 |
KR100828067B1 KR100828067B1 (ko) | 2008-05-08 |
Family
ID=38803466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020060027537A KR100828067B1 (ko) | 2006-03-27 | 2006-03-27 | 선형보정 마이크로 압력센서 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100828067B1 (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101518265B1 (ko) * | 2013-12-02 | 2015-05-12 | 한국기계연구원 | 접촉저항 변화를 이용한 고압용 압력 스위치 |
WO2019022465A1 (ko) * | 2017-07-25 | 2019-01-31 | 한국과학기술원 | 탄성도 측정 장치 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101222045B1 (ko) | 2011-05-11 | 2013-01-15 | 세종공업 주식회사 | 압력측정장치 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5889211A (en) | 1995-04-03 | 1999-03-30 | Motorola, Inc. | Media compatible microsensor structure and methods of manufacturing and using the same |
US20020186017A1 (en) | 2001-06-11 | 2002-12-12 | John Liebeskind | Micro high-vacuum pressure sensor |
KR100453976B1 (ko) | 2002-11-27 | 2004-10-20 | 전자부품연구원 | 마이크로 소자용 다이아프램의 제조방법 |
JP2005055313A (ja) | 2003-08-05 | 2005-03-03 | Mitsubishi Electric Corp | 半導体圧力センサ装置 |
-
2006
- 2006-03-27 KR KR1020060027537A patent/KR100828067B1/ko active IP Right Grant
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101518265B1 (ko) * | 2013-12-02 | 2015-05-12 | 한국기계연구원 | 접촉저항 변화를 이용한 고압용 압력 스위치 |
WO2019022465A1 (ko) * | 2017-07-25 | 2019-01-31 | 한국과학기술원 | 탄성도 측정 장치 |
US11385149B2 (en) | 2017-07-25 | 2022-07-12 | Korea Advanced Institute Of Science And Technology | Elasticity measurement device |
Also Published As
Publication number | Publication date |
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KR100828067B1 (ko) | 2008-05-08 |
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