KR20070080711A - Treatment method and apparatus for autoclave - Google Patents

Abstract

A treatment method and a treatment apparatus using an autoclave are provided to improve a manufacturing yield of a flat panel display device by independently adjusting various treatment conditions in respective autoclave units. A treatment apparatus includes an autoclave horizontal center axis(3), a main body(4), a chamber group, a transfer line(6), a loading/unloading unit(7), and a cover. The horizontal center axis is arranged between both support units and rotated by an external driving source. The main body is arranged at an exterior of the horizontal center axis. The chamber group includes plural unit chambers which are arranged outside the main body with a constant angle. The transfer line transfers a substrate product under the main body, where the unit chamber is arranged. The loading/unloading unit is arranged under the transfer line. The cover is arranged at one side of a base mount(8) and opens/closes the unit chamber(5).

Description

Treatment Method and Apparatus by Autoclave {Treatment Method and Apparatus for Autoclave}

1 is a front view for explaining the concept of the present invention,

2 is a side view of FIG. 1;

3 to 5 is an enlarged cross-sectional view schematically showing the configuration of the unit chamber adopted in the present invention,

3 is a state in which the door is closed,

4 is a state in which the door is open,

Fig. 5 is an enlarged cross-sectional view showing a state in which the door is closed and is pressed.

<Explanation of symbols for the main parts of the drawings>

1: substrate, 2: support,

3: horizontal axis, 4: main body,

5: unit chamber, 6: conveying line,

7: loading / unloading mechanism, 8: expect

The present invention relates to an autoclave to be heated and pressurized in the manufacturing process of a flat panel display including LCD, PDP, OLED, etc., or a composite material having a laminated structure, and is particularly suitable for manufacturing a flat panel display that has been enlarged. The present invention relates to a method and apparatus for autoclave suitable for maximum utilization of space, which can be applied to automation by inlining and occupies less installation space.

In general, a conventional autoclave is mainly composed of heating and pressurization depending on manual operation or a large amount of stacked state. In this conventional case, since the substrate products to be processed are stacked, It takes a long time to reach the heating temperature or pressurization conditions that require processing of the substrate products, and there is a disadvantage that the productivity is low, and in the recent trend of increasing the size of substrate products such as flat panel display, the conventional method as described above The situation is not suitable for adoption.

Moreover, in the case of substrate products that have been enlarged to 80 inches or 102 inches or more, adopting an autoclave processing method in a stacked form is difficult to manufacture since the size of the device has to be correspondingly increased. Even if the production is made, even if the production takes place huge costs for the production or operation of the equipment has a disadvantage that the economic efficiency is significantly lowered.

In particular, in order to be automated or inlined, the stages must be sequentially formed in each process to form a straight line. In this case, the entire production line takes up a long time, which requires a lot of installation space and is inefficient in terms of space utilization. It is

The present invention has been made in order to solve such a conventional problem has the following object.

The main purpose of the present invention is to be able to quickly reach the heating temperature or pressurization conditions inside the autoclave unit in a single-leaf type to match the manufacturing characteristics of the substrate product to be enlarged, and to be independently processed according to the processing conditions required for the substrate product. To significantly improve productivity.

Another object of the present invention is to make the loading step, the processing step and the unloading step sequentially and continuously while the angular rotation is made around the horizontal center axis in the equipment that the processing operation is continuously performed in each step on the existing linear conveying line Compared to this, the space occupied by installation and operation is greatly reduced, so that more efficient use of space is possible.

Another object of the present invention is to install a plurality of unit chambers at a predetermined angle in the outer peripheral position of the main body around the horizontal center axis, and the unit chamber group installed in this way constitutes a plurality of unit chamber groups in the longitudinal direction of the horizontal center axis It is possible to install several unit chambers in a small space so that the efficient use of space is possible.The angle rotation of the main body makes it possible to rotate 360 degrees and to complete the processing work while reaching the original position. Whenever a displacement of one pitch is made, a loading process, a processing process, and an unloading process are sequentially performed, so that the product of the substrate, which is processed, may be shipped, thereby greatly improving productivity.

In order to achieve the above object, the present invention provides a processing operation through a loading step of a substrate product for processing, including a heating and pressing step, a processing step of performing a heating and pressing step, and an unloading step of a processing substrate product. To be performed, a plurality of unit chambers to be heated and pressurized independently of the outer periphery of the main body at a predetermined angle around a horizontal center axis capable of angular rotation are provided, and a separate conveying line is formed at the lower part of the main body And a loading step of loading the substrate product for processing carried in the conveying line into the first unit chamber which is located at the bottom, and rotating the main body about the horizontal center axis and then placing the substrate at the bottom. Substrate product for processing conveyed in the conveying line inside the unit chamber The first substrate product that has been loaded and already loaded corresponds to a loading and processing step in which repetitive loading and processing operations are performed, which are heated and pressurized, and a substrate product which has been processed through repetitive loading and processing steps. When the unit chamber reaches the initial position where loading was performed, the unloading and loading step of unloading and discharging the finished substrate product to the conveying line and reloading the substrate product for processing again in the unloaded unit chamber is performed. There is provided a treatment method that is made repetitively and sequentially.

In addition, a device embodied in order to achieve the treatment method, the horizontal center axis is installed horizontally on both support and rotated by an external drive source, the main body provided on the outer periphery of the horizontal central axis, and the outside of the main body A chamber group configured to install a plurality of unit chambers at predetermined angles in a predetermined position, a conveying line provided to convey substrate products at a lower position of the main body in which the unit chamber is installed, and a lower portion of the conveying line There is provided a processing device comprising a loading / unloading mechanism.

Hereinafter, the present invention will be described with reference to the accompanying drawings.

As shown, according to a preferred example of the processing apparatus by the autoclave of the present invention, the horizontal center shaft (3) which is horizontally installed on both support (2, 2) and driven by an external drive source, and the horizontal center shaft A main body 4 provided on the outer periphery of (3), one chamber group 50 formed by installing a plurality of unit chambers 5 at predetermined angles on the outside of the main body 4, and the unit A conveying line 6 provided for conveying the substrate product 1 to a lower position of the main body 4 where the chamber 5 is installed, and a loading / unloading mechanism 7 provided below the conveying line 6. And an opening / closing mechanism 9 installed at one side of the base 8 to open and close the unit chamber 5.

At this time, the chamber group 50 is a single form in the axial direction of the horizontal center axis (3) according to the demand and design or a pair of chamber group (50, 50) as shown, or not separately shown It can be made up of a plurality of multi-stage form more than that.

Although the external drive source for driving the horizontal center shaft 3 is not specified separately, the number of unit chambers 5 to form one chamber group 50 installed in the main body 4 by installing an index drive motor As determined according to the present invention, it is installed and utilized so that angle rotation is possible by one pitch as much as the angle occupied by one unit chamber 5.

The main body 4 has, for example, a separate heating means as a compressor, a vacuum pump, and a temperature control means for heating and cooling as a pressurizing means required for carrying out an autoclave treatment on the substrate product 1. A separate cooling means is provided and power from outside is supplied to the inside of the main body 4 via the horizontal center axis 3 to operate the pressurizing means and the temperature regulating means.

The unit chamber 5 is provided to be installed at a predetermined angle on the outside of the main body 4, one side of the chamber body 51 is fixed to the vacuum chuck 52 with a built-in heater, the vacuum chuck 52 On the opposite side of the door), a door 53, which is opened and closed in a sliding manner, is fitted to the chamber body 51, and the door 53 is provided with a pressure plate 54 having a heater built therein, and the pressure plate 54 The pneumatic cylinder 55 is installed on the outside of the door 53 is configured to enable the forward, backward operation.

At this time, the silicon plate 56 is installed on the pressure plate 54 to rotate the main body 4 in the state in which the substrate product 1 is embedded between the vacuum chuck 52 and the pressure plate 54. Even if it is preferable to be located more securely to maintain a secure position in the interior of the unit chamber (5).

Next, the conveying line 6 conveys the substrate product 1 in a pitch shift manner, and the loading / unloading mechanism 7 is a portion at which loading and unloading is performed as the lower portion of the conveying line 6. It is provided in, but can be configured in a form in which a pusher is disposed on the tip of the piston rod of the reciprocating mechanism such as a pneumatic cylinder.

In addition, in the case of the support (2), the horizontal center axis (3), the main body (4), the unit chamber (5), the conveying line (6) and the loading / unloading mechanism (7) as components of the present invention. All will be installed inside the base 8 as a whole.

Next will be described the process of the operation of the device of the present invention made as described above.

That is, the processing operation by the autoclave is carried out through the loading step of the substrate product for processing operations, including the heating and pressing process, the processing step of the heating and pressing process, and the unloading step of the processed substrate product, A plurality of unit chambers 5, each of which is heated and pressed independently of the outer circumference of the main body 4 at a predetermined angle around the horizontal center axis 3 that can be rotated, are provided in plural and the lower part of the main body 4 In the loading step of constructing a separate conveying line (6), and loading the substrate product (1) for processing to be conveyed in the conveying line (6) in the first unit chamber (5) located at the bottom; Substrate made for processing carried in the conveying line 6 in the interior of the next unit chamber (5) to rotate the main body 4 about the horizontal center axis (3) to be located at the bottom The first substrate product 1 loaded with the article 1 and already loaded is processed through a loading and processing step in which a repetitive loading and processing operation is performed in which heating and pressurization is performed, and a repetitive loading and processing step. When the unit chamber 5 corresponding to the finished substrate product 1 is different from the initial position where the loading was performed, the unloaded substrate product 1 is unloaded and discharged to the conveying line and the unloaded unit In the chamber 5, the unloading and loading steps of reloading the substrate product 1 for processing are repeated and sequentially performed.

Hereinafter, looking at each step in more detail as follows.

Loading stage

As a loading step of loading the substrate product 1 for processing conveyed from the conveying line 6 into the first unit chamber 5 which is located at the bottom, the door 53 of the unit chamber 5 is opened. Opened from the outside by the opening / closing mechanism 9, the substrate product 1 located on the conveying line 6 in the state where the unit chamber 5 is opened is conveyed in a manner by a pitch shift, where it is loaded and unloaded. When it is reached, the loading / unloading mechanism 7 is operated to raise the substrate product 1 so that the position fixing to the chamber body 51 of the unit chamber 5 is performed by the vacuum chuck 52. As a result, the loading step for the substrate product (1) is made.

Processing stage

Next, the processing step is a step in which the processing for the substrate product 1 loaded in the loading step is performed, by closing the door 53 of the unit chamber 5 by the opening and closing mechanism 9, the pneumatic cylinder 55 The pressure plate 54 is operated to displace the pressure plate 54 to pressurize while the substrate product 1 is positioned between the vacuum chuck 52 and the pressure plate 54 to heat the vacuum chuck 52 and the pressure plate 54. The operation is also performed at the same time, heating to the substrate product (1) is carried out to continue to the appropriate temperature to maintain the proper temperature for the substrate product (1), pressurization to the substrate product (1) is also done at the same time The process is continuously performed by maintaining the proper temperature and pressure.

This processing step is continuously performed during the pitch shift by the angular rotation of the horizontal center axis 3 until the unloading step is performed after the loading step, and the unit chamber 5 which is followed during the processing step is performed. In case of), the loading step and the processing step as described above are continuously performed.

Unloading Step

Next, the unloading step operates the pneumatic cylinder 55 when the unit chamber 5 corresponding to the substrate product 1 on which the processing is completed is reached through the repetitive loading and processing steps. The pressure plate 54 is returned to its original position, the door 53 is reversed by the opening / closing mechanism 9 to open the unit chamber 5, and the loading / unloading mechanism 7 is raised to the lower portion of the substrate product 1. Position and release the operation of the vacuum chuck 52 to separate the finished substrate product 1 from the vacuum chuck 52 and lower it to the loading / unloading mechanism 7 to freeze the conveying line 6. Loading step.

The unloaded substrate product 1 thus treated is discharged and the substrate product 1 to be processed is placed on the conveying line 6 in a pitch shift manner, and then the conveying line 6 is loaded for the loading step. ), The loading step is done.

In addition, even during the operation of the unloading step and the loading step as described above, the processing step is continuously performed, and as a result, the loading step, the unloading step, and the processing step are performed sequentially and repeatedly in the horizontal center axis 3 and the main body 4. ) And pitch movement by angular rotation is made continuously.

As described above, according to the present invention, it is possible to quickly reach the heating temperature or the pressurizing condition within the unit chamber 5 for autoclave processing in a single-leaf type to match the manufacturing characteristics of the substrate product to be enlarged. Depending on the processing conditions required in the product (1) can be processed independently and the processing is carried out continuously can greatly improve the productivity, while the angular rotation around the horizontal center axis (3) loading The steps, processing steps and unloading steps are carried out sequentially and continuously, so that the space occupied by the installation and operation is significantly reduced compared to the equipment in which the processing work is performed continuously in each step on the existing linear conveying line. It will be possible.

In addition, in the present invention, a plurality of unit chambers 5 are provided at a predetermined angle at the outer circumferential position of the main body 4 around the horizontal center axis 3, and the unit chamber groups 50 installed as described above are horizontally installed. Multiple unit chambers 50, 50, ... can be configured in the longitudinal direction of the central axis 1, so that multiple unit chambers 50, 50, ... can be installed in a small space. Efficient utilization of space is possible, and the rotation process of the main body 4 is made 360 degrees and the processing work can be completed while reaching the original position. The process and the unloading process are sequentially performed, so that the processed substrate product is shipped, and thus, the automation and the productivity of the process can be greatly improved.

Claims (7)

A horizontal center shaft (3) installed horizontally on both support members (2, 2) and rotatingly driven by an external driving source; A main body 4 provided on an outer circumference of the horizontal center shaft 3, One chamber group 50 configured by installing a plurality of unit chambers 5 at predetermined angles on the outside of the main body 4, A conveying line 6 provided to convey the substrate product 1 to a lower position of the main body 4 in which the unit chamber 5 is installed; A loading / unloading mechanism 7 installed below the conveying line 6; and An opening / closing mechanism 9 provided at one side of the base 8 to open and close the unit chamber 5; An apparatus according to an autoclave comprising a. The method of claim 1, And said chamber group (50) comprises a plurality of multistage shapes in the axial direction of said horizontal central axis (3). The method of claim 1, The unit chamber (5) is provided is installed at a predetermined angle on the outside of the main body (4), On one side of the chamber body 51 is fixed to the vacuum chuck 52 with a heater is installed, On the opposite side of the vacuum chuck 52, a door 53, which is opened and closed in a sliding manner, is fitted to the chamber body 51, The door 53 is provided with a pressure plate 54 with a heater built therein, and the pressure plate 54 is configured to enable forward and backward operations by a pneumatic cylinder 55 installed outside the door 53. This is done, The pressurizing plate (54) is provided with a silicon pad (56), characterized in that the processing apparatus by the autoclave. Through the loading step of the substrate product for processing operations including the heating and pressing process, the processing step of the heating and pressing process, and the unloading step of the substrate product subjected to the treatment, the processing operation by the autoclave is performed, A plurality of unit chambers 5, each of which is heated and pressed independently of the outer circumference of the main body 4 at a predetermined angle around a horizontal central axis 3 capable of angular rotation, may be provided and In the lower part constitutes a separate conveying line (6), A loading step of loading the substrate product 1 for processing conveyed in the conveying line 6 into the first unit chamber 5 which is located at the bottom; Substrate product (1) for processing to be conveyed in the conveying line (6) in the interior of the next unit chamber (5) which is rotated about the central axis (3) about the main body 4 and located at the bottom The first substrate product (1), which has already been loaded and has already been loaded, has a loading and processing step in which repetitive loading and processing operations are performed, which are heated and pressurized, and When the unit chamber 5 corresponding to the substrate product 1 which has been processed through the repetitive loading and processing steps reaches the initial position at which the loading was performed, the substrate product 1 which has been processed is unloaded to the return line. The unloading and loading steps of reloading the substrate product (1) for processing are carried out repeatedly and sequentially in the unit chamber (5) in which the loading and discharging and unloading are performed. The method of claim 4, wherein The loading step is a loading step of loading the substrate product 1 for processing conveyed from the conveying line 6 into the first unit chamber 5 which is located at the bottom, and the door of the unit chamber 5. (53) is opened from the outside by the opening and closing mechanism (9) in the state in which the unit chamber (5) is opened, the substrate product (1) located on the conveying line (6) is conveyed in a manner by the pitch movement to load and freeze When the loading position is reached, the loading / unloading mechanism 7 is operated to raise the substrate product 1 to be positioned in the chamber body 51 of the unit chamber 5 by the vacuum chuck 52. As a result of the position fixing is carried out eventually the loading step for the substrate product (1) is a processing method by the autoclave. The method of claim 4, wherein The processing step is a step of processing the substrate product 1 is loaded in the loading step, by closing the door 53 of the unit chamber (5) by the opening and closing mechanism (9), the pneumatic cylinder (55) The pressure plate 54 is operated to displace the pressurizing plate 54 to pressurize in a state where the substrate product 1 is positioned between the vacuum chuck 52 and the pressure plate 54, and the vacuum chuck 52 and the pressure plate 54 are heated. At the same time, the heating is performed on the substrate product 1 and the temperature is maintained until the proper temperature is maintained to maintain the proper temperature for the substrate product 1. By maintaining the temperature and pressurization of the process will be made continuously, The processing step is continuously performed during the pitch shift by the angular rotation of the horizontal center axis 3 until the unloading step is performed after the loading step, and the unit chamber 5 which is followed during the processing step is performed. Even if the loading step and the processing step is characterized in that the processing method by the autoclave. The method of claim 4, wherein When the unloading step reaches the initial position where the unit chamber 5 corresponding to the substrate product 1 on which the processing is completed through the loading and processing steps repeatedly reaches the initial position where the loading was performed, the pneumatic cylinder 55 is operated to pressurize the plate. The 54 is returned to the original position, the door 53 is reversed by the opening / closing mechanism 9 to open the unit chamber 5, and the loading / unloading mechanism 7 is raised to be positioned below the substrate product 1. Then, the operation of the vacuum chuck 52 is released to separate the substrate product 1 from which the processing work is completed from the vacuum chuck 52, and lowered to the loading / unloading mechanism 7 to unload the conveying line 6. As a step, The substrate product 1, which has been unloaded and processed, is discharged and the substrate product 1 to be processed is placed on the conveying line 6 in a pitch shift manner, and then the conveying line 6 is loaded for the loading step. In the loading stage is done, Even during the operation of the unloading step and the loading step, the processing step is continuously performed, and the loading step, the unloading step and the processing step are sequentially and repeatedly performed in the horizontal center axis 3 and the main body 4. And a pitch shift by the angular rotation is carried out continuously).

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