KR20070077012A - 클리닝 시트 및 방법 - Google Patents

클리닝 시트 및 방법 Download PDF

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Publication number
KR20070077012A
KR20070077012A KR1020060036943A KR20060036943A KR20070077012A KR 20070077012 A KR20070077012 A KR 20070077012A KR 1020060036943 A KR1020060036943 A KR 1020060036943A KR 20060036943 A KR20060036943 A KR 20060036943A KR 20070077012 A KR20070077012 A KR 20070077012A
Authority
KR
South Korea
Prior art keywords
abrasive grains
substrate
cleaning
panel
adhesive film
Prior art date
Application number
KR1020060036943A
Other languages
English (en)
Korean (ko)
Inventor
무네히사 우에따니
마사히로 호소이
가쯔라 이꾸따
료오 다까하시
Original Assignee
니혼 미크로 코팅 가부시끼 가이샤
가부시끼가이샤 고요샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 니혼 미크로 코팅 가부시끼 가이샤, 가부시끼가이샤 고요샤 filed Critical 니혼 미크로 코팅 가부시끼 가이샤
Publication of KR20070077012A publication Critical patent/KR20070077012A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Laminated Bodies (AREA)
KR1020060036943A 2006-01-19 2006-04-25 클리닝 시트 및 방법 KR20070077012A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00011129 2006-01-19
JP2006011129A JP2007190643A (ja) 2006-01-19 2006-01-19 クリーニングシート及び方法

Publications (1)

Publication Number Publication Date
KR20070077012A true KR20070077012A (ko) 2007-07-25

Family

ID=38446724

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060036943A KR20070077012A (ko) 2006-01-19 2006-04-25 클리닝 시트 및 방법

Country Status (4)

Country Link
JP (1) JP2007190643A (ja)
KR (1) KR20070077012A (ja)
CN (1) CN101069962A (ja)
TW (1) TW200728022A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170178919A1 (en) * 2013-02-13 2017-06-22 Showa Denko K.K. Surface machining method for single crystal sic substrate, manufacturing method thereof, and grinding plate for surface machining single crystal sic substrate

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5429844B2 (ja) * 2007-10-04 2014-02-26 Ｍｉｐｏｘ株式会社 クリーニングテープ及びその製造方法
TWI476073B (zh) * 2008-12-31 2015-03-11 Metal Ind Res & Developmentct Abrasive grain making device
JP5600400B2 (ja) * 2009-05-26 2014-10-01 株式会社クラレ 研磨装置及び研磨パッドの固定方法
JP2012179704A (ja) * 2011-03-03 2012-09-20 Ebara Corp 研磨テープ、並びに該研磨テープを用いた研磨方法及び研磨装置
CN106847083B (zh) * 2017-03-20 2019-08-09 合肥鑫晟光电科技有限公司 异物收集结构、显示装置及其操作方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170178919A1 (en) * 2013-02-13 2017-06-22 Showa Denko K.K. Surface machining method for single crystal sic substrate, manufacturing method thereof, and grinding plate for surface machining single crystal sic substrate
US9960048B2 (en) * 2013-02-13 2018-05-01 Showa Denko K.K. Surface machining method for single crystal SiC substrate, manufacturing method thereof, and grinding plate for surface machining single crystal SiC substrate
US10453693B2 (en) 2013-02-13 2019-10-22 Showa Denko K.K. Surface machining method for single crystal SiC substrate, manufacturing method thereof, and grinding plate for surface machining single crystal SiC substrate

Also Published As

Publication number Publication date
TW200728022A (en) 2007-08-01
JP2007190643A (ja) 2007-08-02
CN101069962A (zh) 2007-11-14

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