KR20070076988A - Throttle valve having rotation angle measuring instrument and chamber pressure controller having the throttle valve - Google Patents

Abstract

A throttle valve having rotation angle measuring instrument and a chamber pressure controller having the same are provided to precisely adjust pressure in the chamber by measuring an actual rotation angle of a rotation plate of the throttle valve and to prevent processing error. A chamber pressure controller is installed in a chamber device. A camber(200) is connected to a reaction gas supplying pipe communicated with am reaction gas container(300). The chamber is connected to an exhaust pipe connected to a vacuum pump(400). In order to control pressure of the chamber, the chamber controller is provided to control an amount of the reaction gas introducing into the chamber and an amount of gas exhausted from the chamber. The chamber pressure controller includes throttle valves(100_a,100_b) and a control panel(600). The throttle valves are respectively the reaction gas supplying pipe and the exhaust pipe. The throttle valve connected to the reaction gas supplying pipe is a supply throttle valve and the throttle valve connected to the exhaust pipe is an exhaust throttle valve. The throttle valves control pressure in the chamber by adjusting a flow rate of the reaction gas or the exhaust gas.

Description

Throttle valve having rotation angle measuring instrument and chamber pressure regulator having said throttle valve {Throttle valve having rotation angle measuring instrument and chamber pressure controller having the throttle valve}

1 is a schematic view showing a chamber apparatus having a chamber pressure regulator according to an embodiment of the present invention.

2 is a perspective view showing a throttle valve according to an embodiment of the present invention.

3 is a top view showing a throttle valve according to an embodiment of the present invention.

(Explanation of symbols for main parts of drawing)

100_a, 100_b, 100: Throttle valve 110: Housing

115: rotating plate 117: rotating shaft

127: rotating gear 123: power gear

140: rotation angle sensing gear 130: drive motor

145: rotation angle measuring instrument 200: reaction chamber

600: control panel

The present invention relates to a throttle valve and a chamber pressure regulator having the same, and more particularly, to a throttle valve having a rotation angle measuring instrument and a chamber pressure regulator having the throttle valve.

In general, a semiconductor manufacturing process includes a process of forming a film on a substrate, a process of etching the formed film, and the like. The film forming process and the film etching process are performed by a chemical reaction in a chamber in which pressure, temperature and the like are controlled. Thus, the pressure in the chamber can be an important process condition that determines semiconductor yield.

In order to control the pressure in the chamber, the amount of the reactor gas introduced into the chamber and the amount of gas discharged from the chamber are controlled. Specifically, control valves for adjusting the amount of fluid are respectively provided in the reactor gas supply pipe and the exhaust pipe connected to the chamber. Such regulating valves are often called throttle valves.

Such a throttle valve generally has a rotating shaft rotatable across the pipe and two semicircular plates installed on the rotating shaft. As the axis of rotation rotates, the semicircular plates control the flow of the fluid in the pipe while being converted in the horizontal direction without disturbing the flow of the fluid in the vertical direction that blocks the flow of the fluid in the pipe.

On the other hand, the operator inputs the rotation value of the rotary shaft to the control panel, the rotary shaft rotates by a predetermined angle in accordance with the input rotation value. However, when noise occurs in the rotation value signal input from the control panel, the correct rotation value may not be applied to the rotation shaft. In this case, the actual rotation value of the rotating shaft may not be known, and as a result, the pressure in the chamber may not be adjusted accurately, resulting in a process error.

The technical problem to be achieved by the present invention is to solve the problems of the prior art, a throttle valve having a rotation angle measuring device capable of measuring the actual rotation angle of the rotating plate and the chamber that can display the rotation angle on the control panel To provide a pressure regulator.

One aspect of the present invention to achieve the above technical problem provides a throttle valve. The throttle valve has a housing installed in the conduit. A rotating plate for opening and closing the conduit is installed in the housing according to the rotation of the rotating shaft. A power transmission unit for transmitting power to the rotating shaft is provided. A rotation angle measuring device for measuring the actual rotation angle of the rotating plate is provided.

Another aspect of the present invention to achieve the above technical problem provides a chamber pressure regulator. The chamber pressure regulator has a throttle valve and a control panel. The throttle valve is a housing installed in the pipeline connected to the chamber, a rotary plate installed to open and close the pipeline in accordance with the rotation of the rotary shaft in the housing, a power transmission unit for transmitting power to the rotary shaft and measuring the actual rotation angle of the rotary plate A rotation angle measuring device is provided. The control panel includes an input device for setting the rotation angle of the rotating plate and a display window for displaying the actual rotation angle measured from the rotation angle measuring device.

The power transmission unit may include a power transmission gear connected to the rotation shaft to rotate the rotation shaft. In this case, the rotation angle measuring device measures an actual rotation angle of the power transmission gear.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings in order to describe the present invention in more detail. However, the present invention is not limited to the embodiments described herein but may be embodied in other forms. Like numbers refer to like elements throughout the specification.

1 is a schematic view showing a chamber apparatus having a chamber pressure regulator according to an embodiment of the present invention.

Referring to FIG. 1, a chamber 200 is provided. A reactor supply pipe connected to the reactor reservoir 300 is connected to the chamber 200. In addition, an exhaust pipe connected to the vacuum pump 400 is connected to the chamber 200. In order to adjust the pressure in the chamber 200, a chamber pressure regulator may be arranged to adjust the amount of the reaction gas introduced into the chamber 200 and the amount of gas discharged from the chamber 200.

The chamber pressure regulator may include throttle valves 100_a and 100_b and a control panel 600.

Throttle valves 100_a and 100_b are connected to the reactor supply line and the exhaust line, respectively. The throttle valve connected to the reactor gas supply line may be a supply throttle valve 100_b, and the throttle valve connected to the exhaust pipe may be an exhaust throttle valve 100_a. The throttle valves 100_a and 100_b control the pressure in the chamber 200 by controlling the flow rate of the reactor gas or the exhaust gas. Adjusting the flow rate of the reactor or exhaust gas is performed by the rotation of the rotating plate provided in the throttle valve (100_a, 100_b).

On the other hand, the control panel 600 is installed outside the chamber device having the chamber 200. The control panel 600 may include a display window 600a and an input device 600b. The display window 600a provides a worker with information inside the device, and the worker may change a condition inside the device through the input device 600b.

In detail, the chamber device may include a pressure gauge 500 that reads the pressure in the chamber 200, and the pressure in the chamber read by the pressure gauge 500 may be displayed on the display window 600a. In addition, the operator sets the rotation angle of the rotating plate through the input device 600b, the actual rotation angle of the rotating plate may be displayed on the display window (600a).

2 is a perspective view showing a throttle valve according to an embodiment of the present invention, Figure 3 is a top view showing a throttle valve according to an embodiment of the present invention.

2 and 3, the throttle valve 100 has a housing 110 installed in a conduit. The conduit may be a reactor supply pipe or an exhaust pipe described with reference to FIG. 1. That is, the throttle valve 100 of the present embodiment may be used as the supply throttle valve 100_b or the exhaust throttle valve 100_a described with reference to FIG. 1. The rotating plate 115 is installed in the housing 110. The rotating plate 115 may be fixed to one end of the rotating shaft 117 penetrating one side surface of the housing 110, and may open and close the conduit according to the rotation of the rotating shaft 117.

The power transmission unit 120 for transmitting power to the rotation shaft 117 is disposed on one side of the housing 110. The power transmission unit 120 is coaxially connected to the rotation shaft 117 to be engaged with the first power transmission gear 127 and the first power transmission gear 127 for rotating the rotation shaft 117 and the first power transmission gear. A second power transmission gear 123 for transmitting rotational power to the first power transmission gear 127 is provided. The shaft of the second power transmission gear 123 is connected to a power source 130 located at one side of the power transmission unit 120.

When the operator inputs a predetermined pressure through the input device (600b of FIG. 1) of the control panel, the power source 130 generates a power corresponding to the input value, the second power transmission gear 123 by the generated power Rotates. Thereafter, the first power transmission gear 127 rotates in engagement with the second power transmission gear 123, and the rotating plate 115 rotates by the rotation angle of the first power transmission gear 127. As a result, the rotating plate 115 can be switched from the vertical state to the inclined state or vice versa. The vertical state refers to a state in which the conduit between the conduit and the rotating plate 115 is vertical, so that the conduit is closed, and the inclined state is less than 90 degrees between the conduit and the rotating plate 115, so that the conduit Indicates an open state.

The throttle valve 100 includes a rotation angle measuring instrument 145 for measuring the actual rotation angle of the rotating plate 115. In detail, the rotation angle measuring unit 145 may measure the rotation angle of the first power transmission gear 127 having a rotation angle equal to or proportional to the rotation angle of the rotation plate 115. Furthermore, the throttle valve 100 may further include a rotation angle sensing gear 140 that rotates in engagement with the first power transmission gear 127, in which case the rotation angle measuring unit 145 may be configured to sense the rotation angle. It may be connected to the gear 140. The rotation angle sensing gear 140 may serve to amplify the rotation angle of the first power transmission gear 127. At this time, the gear ratio of the first power transmission gear 127 and the rotation angle sensing gear 140 may be appropriately adjusted. For example, when one tooth of the rotation angle sensing gear 140 is moved, the rotation angle of the first power transmission gear 127 may be adjusted to 0.1 degrees.

The rotation angle measured by the rotation angle measuring instrument 145 is displayed on the display window 600b of FIG. 1. Therefore, the operator may check whether the rotating plate 115 is rotated by the set rotation angle, and if the actual rotation angle of the rotating plate 115 is different from the setting rotation angle, a corresponding action may be quickly taken. As a result, the pressure in the chamber (200 in FIG. 1) can be accurately adjusted to prevent process errors.

As described above, according to the present invention, by measuring and displaying the actual rotation angle of the rotating plate of the throttle valve, it is possible to accurately adjust the pressure in the chamber, thereby preventing the process error.

Claims (4)

A housing installed in the pipeline; A rotating plate installed in the housing and opening and closing the conduit according to the rotation of the rotating shaft; A power transmission unit for transmitting power to the rotating shaft; And Throttle valve, characterized in that it comprises a rotation angle meter for measuring the actual rotation angle of the rotating plate. The method of claim 1, The power transmission unit has a power transmission gear connected to the rotation shaft to rotate the rotation shaft, And the rotation angle measuring device measures an actual rotation angle of the power transmission gear. A housing installed in a conduit connected to the chamber, a rotating plate installed to open and close the conduit according to the rotation of the rotating shaft in the housing, a power transmission unit transmitting power to the rotating shaft, and a rotation angle measuring device for measuring an actual rotation angle of the rotating plate. Including a throttle valve; And And a control panel having an input for setting the rotation angle of the rotating plate and a display window for displaying the actual rotation angle measured from the rotation angle measuring instrument. The method of claim 3, wherein The power transmission unit has a power transmission gear connected to the rotation shaft to rotate the rotation shaft, And said rotation angle measuring device measures an actual rotation angle of said power transmission gear.

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