KR20070068609A - Method and equipment of surface defect detection glass - Google Patents

Abstract

A method for detecting a substrate defect and an apparatus for the same are provided to minimize the interference of lights except for the light used as a light source and flexibly test according to various patterns on a substrate. A apparatus for detecting a substrate defect includes an illumination unit(100), an imaging unit(300), and an optical material unit. The illumination is installed on the top or the bottom of the substrate to detect light with at least one luminary. The illumination unit comprises a plate layer formed to be laminated by a plurality of light emitting bodies and a plurality of optical materials. The imaging unit is installed on a position of corresponding to the illumination unit to receive the light detected from the illumination unit. The optical material unit comprises at least one optical material to control a wave direction of the light by being installed between the illumination unit and the camera unit.

Description

Substrate defect detection method and apparatus {Method and Equipment of Surface Defect Detection Glass}

1 is a schematic view showing a substrate defect detection apparatus of the present invention.

2 is a schematic view showing a lighting unit according to the substrate defect detection apparatus of the present invention.

3 is a block diagram showing a substrate defect detection method of the present invention.

4 is a schematic view showing a substrate detection device of the present invention.

<Explanation of symbols for the main parts of the drawings>

100,100 ': lighting unit 110: invention

120: plate layer 122: diffusion sheet

124: condenser lens 126310: polarizing plate

300: imaging unit 400: substrate

410 stage

The present invention relates to an apparatus and method for detecting a defect in a substrate, and more particularly, by using a light emitter capable of directly irradiating a variety of lights to adjust the diversity of light and the intensity of light to simplify the detection of a substrate defect on a substrate, An easy substrate defect detecting apparatus and a method thereof.

In general, when producing large substrates such as semiconductor wafers, LCDs, PDPs, and OLEDs, visual inspection, or visual inspection of the inspector, inspects the defects to detect defects such as foreign substances or stains remaining on the substrates. At this time, in order to facilitate the detection of defects, a substrate inspector which inspects the entire appearance of the substrate by irradiating light uniformly over the entire substrate. Such a board | substrate tester is comprised from a top illumination part, a back illumination part, and a board chuck.

The upper lighting unit is provided above the substrate position unit, and serves to irradiate light onto the substrate substrate to check whether there is a defect on the substrate substrate, and includes a light source unit, a reflecting unit, a light collecting unit, and a scattering unit. The light source unit is a component that first generates the light irradiated onto the substrate substrate, and the reflector serves to change the direction of the light irradiated from the light source unit to the light collecting unit, and prevents the height of the substrate appearance inspection apparatus from increasing. In addition, the light collecting unit focuses the diffused light emitted from the reflecting unit, and the scattering unit serves to facilitate the inspection of the substrate by the substrate inspector by passing or scattering the light as it is depending on whether the power is applied.

In this case, the light source unit, the reflecting unit, the light collecting unit, and the scattering unit are all provided in a structure capable of adjusting the angle. That is, it is to have a structure that can individually adjust the angle of each component of the upper lighting unit to select the angle of the upper lighting unit that can easily check the presence or absence of defects of the substrate substrate located below the upper lighting unit. .

Next, the rear illumination unit is located at the rear of the substrate position unit, and serves to irradiate the transmitted light from the rear surface of the substrate in order to inspect the internal defect of the substrate. The rear lighting unit is composed of a lighting unit and a moving unit, the lighting unit is a component for generating a transmission light, the moving unit is a component for driving the lighting unit in the front and rear direction. Here, the reason for driving the illumination unit in the front and rear direction is as follows. As the substrate to be inspected becomes larger, the back illumination portion should be spaced at least a considerable distance from the substrate position in order to secure the radius of rotation of the substrate. However, when the rear illumination unit is separated from the substrate position by a considerable distance, there is a problem that the illuminance becomes weak during the inspection of the internal defect of the substrate. Therefore, it is necessary to approach the illumination unit toward the substrate position during the inspection of the internal defect of the substrate. Therefore, it is necessary to provide the lighting unit to be movable in the front-back direction.

However, the substrate defect detection apparatus may cause diffuse reflection of light by its own stain or particles during the complex process of the light emitted from the light source to the substrate when irradiating the light. Thus, the diffuse reflection results in the efficiency of the light source. There is a problem of falling, and there is a problem that it is difficult to accurately read the abnormality of the substrate.

The present invention has been made to solve the above problems, an object of the present invention is to simplify the detection of substrate defects of the substrate by controlling the diversity of light and the intensity of light using a light emitter that can directly irradiate a variety of light It is an object of the present invention to provide a substrate defect detection device and a method thereof that are easy to operate.

The present invention has the following configuration to achieve the above object.

According to an aspect of the present invention, there is provided an apparatus for detecting a defect of a substrate, the apparatus including: an illumination unit configured to irradiate light onto at least one light emitter, the illumination unit being positioned above or below the substrate; And an imaging unit provided at a position opposite to the lighting unit to receive light emitted from the lighting unit.

The lighting unit may further include a plate layer on which at least one optical material is stacked, and the imaging unit may be rotatable according to the position of the lighting unit.

The light emitter may be formed by a combination of LEDs having red, green, blue, and white colors, and the illumination unit may horizontally radiate light emitted by the light emitter. Or it is preferable to further provide the polarizing plate which can selectively select any one of vertical light.

In addition, the substrate defect detection method of the present invention, 1) selecting a light source using at least one light emitter; 2) adjusting the positions of the lighting unit and the imaging unit using the light source selected in step 1); 3) after irradiating the light from the illumination unit, and refracting the irradiated light on a substrate and applying to the imaging unit.

The step 1) is preferably performed by a combination of LEDs having red, green, blue, and white.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

As shown in FIG. 1 or FIG. 2, the apparatus for detecting a defect of a substrate moves the illumination unit 100 and the imaging unit 300 in a rotatable manner. The illumination unit 100 is positioned at an upper portion of the substrate 400 at a predetermined angle, and the imaging unit 300 is positioned at a position opposite to the illumination unit 100 so that the light emitted from the illumination unit 100 By reflecting and refracting the substrate 400 placed on the stage 410 to detect light incident on the imaging unit 300, the pattern of light incident on the imaging unit 300 is applied to the substrate 400. Defects are detected, wherein the intensity and irradiation angle of the light irradiated from the lighting unit 100 are determined by the light emitter 110 of the lighting unit 100 to be described later.

The lighting unit 100 includes a plate layer 120 formed by stacking a plurality of light emitters 110 and a plurality of optical materials , and the light emitters 110 each have a different color (red, blue, green, white). Branches are stacked with LEDs taking up minimal space. By the combination of the light emitted from each of the LED it is possible to adjust the intensity and angle of the light according to the substrate inspection conditions. In addition, the light irradiated by the combined light source of the light emitting unit 110 diffuses and condenses the light using a diffusion plate 122 and a light collecting plate 124 in which a pattern of a specific pattern of the plate layer 120 is formed. By allowing the polarizer 126 to selectively transmit only vertical or horizontal light from the light source, it is possible to detect the light irradiated onto the substrate 400 at a desired intensity and angle.

As described above, the optical material part for controlling the wave of light may be used as long as it can control the wave of light in addition to the polarizing plate, the diffusion plate, the light guide plate, the condenser lens, etc., and should be considered to be included in the technical scope of the present invention.

In this case, the light is a vibration surface of the light, that is, light in which the direction of the electric and magnetic fields are always limited to a constant plane. On the other hand, natural light is light which has the same intensity in a certain direction on the average while the vibration direction and intensity are changed irregularly like the direct light from the light source, and the vibration plane is symmetric in the direction of light propagation. In addition, light mixed with natural light and polarized light is called partial polarized light, and polarized light having a constant oscillation plane is called fully polarized light or linearly polarized light. Such natural light and polarized light cannot be distinguished directly, but when passing through a filter that passes only light having a specific vibration plane, the polarized light changes with the rotation of the filter, and thus the brightness of the transmitted light changes. It is to use something different from natural light that always has the same brightness regardless of rotation.

As shown in FIG. 4, the illumination unit 100 ′ is positioned below the substrate 400, and the light emitted from the illumination unit 100 ′ passes through the substrate 400 so that the imaging unit is located. It may be possible to make the detection 300, the intensity and angle of the light irradiated from the illumination unit (100 ') is adjustable.

In this case, the illumination parts 100 and 100 ′ may be configured by stacking a plurality of plate layers and light emitters, thereby minimizing damage to the light emitter and plate layers, and minimizing light loss, thereby optimizing substrate defect detection.

Hereinafter, a substrate defect detection method of the present invention will be described with reference to the accompanying drawings.

As shown in FIG. 3, the detection method includes a light source selection step S10, a position adjustment step S20, and a light irradiation and imaging step S30.

The light source selection step (S10) enables the light to be emitted by combining one or more LEDs among the plurality of LEDs stacked on the lighting unit according to the substrate inspection condition, thereby selecting the intensity and divergence angle of the light.

The positioning step (S20) is a step of increasing the accuracy of the inspection of the substrate by adjusting the position of the illumination unit and the position of the imaging unit in accordance with the light intensity and the irradiation angle of the light emitter to set the correct incidence angle.

The light irradiation and imaging step (S30) is a step to determine the state of the substrate by refracting and reflecting on the substrate by irradiating light from the illumination unit after the position adjustment.

By controlling the light irradiation intensity and the angle according to the light irradiation intensity of the lighting unit it is possible to vary the substrate inspection conditions.

The present invention is not limited to the embodiments described above, and various modifications and changes can be made by those skilled in the art, which are included in the spirit and scope of the present invention as defined in the appended claims.

The present invention has the following effects by the above configuration.

The present invention has the effect of simplifying the detection of substrate defects on the substrate by controlling the diversity of the light and the intensity of the light by using a light emitter capable of directly irradiating a variety of light, it is easy to operate.

In addition, it is possible to minimize the interference of light (disturbance) other than the light used as the light source, there is an effect that can be inspected elastically in accordance with various types of patterns on the substrate.

Claims (9)

In the inspection device for inspecting defects by irradiating light to the substrate, An illumination unit positioned above or below the substrate to enable irradiation of light by at least one light emitter; An imaging unit provided at a position opposite to the lighting unit to receive light emitted from the lighting unit; And an optical material part including at least one optical material positioned between the illumination part and the image pickup part to control a wave direction of light irradiated from the illumination part. The method of claim 1, The optical material portion is a substrate defect detection device, characterized in that the polarizing plate. The method of claim 1, The optical material unit substrate defect detection device, characterized in that consisting of a light guide plate, a condenser lens, a diffusion sheet, a polarizing plate. The method according to any one of claims 1 to 3, And the optical material portion is rotatable. The method of claim 1, And the light emitter is formed by a combination of LEDs having red, green, blue, and white. In a substrate defect detection method for inspecting a defect of a substrate, 1) selecting a light source using at least one light emitter; 2) adjusting an optical material part made of at least one optical material for controlling the wave direction of the light source selected and irradiated by step 1); And 3) applying light whose direction is controlled via the optical material portion to the image pickup portion. The method of claim 6, The optical material portion is a substrate defect detection method, characterized in that the polarizing plate. The method of claim 7, wherein The optical material unit is a substrate defect detection method, characterized in that consisting of a light guide plate, a condenser lens, a diffusion sheet, a polarizing plate. The method of claim 6, And the light emitter is formed by a combination of LEDs having red, green, blue, and white.

Images