KR20070023861A - Wire bonding capillary with a device for producing spark - Google Patents

Wire bonding capillary with a device for producing spark Download PDF

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Publication number
KR20070023861A
KR20070023861A KR1020050078143A KR20050078143A KR20070023861A KR 20070023861 A KR20070023861 A KR 20070023861A KR 1020050078143 A KR1020050078143 A KR 1020050078143A KR 20050078143 A KR20050078143 A KR 20050078143A KR 20070023861 A KR20070023861 A KR 20070023861A
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South Korea
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wire
bonding
capillary
conductive metal
wire bonding
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KR1020050078143A
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Korean (ko)
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KR100715978B1 (en
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이정구
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이정구
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301—Capillary
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301—Capillary
    • H01L2224/78302—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

A capillary having a spark generating unit for use in a wire bonding is provided to increase an effective cross sectional area of a bonding by using a two step bonding process to eliminate a bonding defect. A capillary(30) is mounted on a transducer(34) for use in a wire bonding. The transducer applies source power to a conductive metal body(33). The conductive metal body is in the proximity to a lower of a wire(40) inserted into an inner through hole(32) that passes through a body(31) of the capillary. Upon being powered to the transducer and the conductive metal body, sparks are generated at the conductive metal body and the wire to form a fusible wire ball. Therefore, an effective cross sectional area of a bonding is dramatically increased.

Description

스파크 발생수단을 갖는 와이어 본딩용 캐필러리 {Wire bonding capillary with a device for producing spark}Wire bonding capillary with spark generating means {Wire bonding capillary with a device for producing spark}

도 1은 일반적인 와이어 본딩 사이클을 도시한 개략도1 is a schematic diagram illustrating a typical wire bonding cycle

도 2는 종래의 캐필러리를 확대 도시한 단면도Figure 2 is an enlarged cross-sectional view of a conventional capillary

도 3은 본 발명에 따른 캐필러리 고정부를 도시한 확대도Figure 3 is an enlarged view showing a capillary fixing part according to the present invention

도 4는 본 발명에 따른 와이어 본팅 사이클을 도시한 개략도4 is a schematic diagram illustrating a wire bonding cycle according to the present invention.

도 5는 본 발명에 따른 캐필러리 고정부의 타실시예도5 is another embodiment of the capillary fixing part according to the present invention

도 6은 본 발명에 따른 와이어 본딩의 융착력 비교선도6 is a comparison diagram of the welding force of the wire bonding according to the present invention

* 도면의 주요부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings

30 : 캐필러리 31 : 바디30: capillary 31: body

32 : 내부 관통홀 33 : 금속체32: internal through hole 33: metal body

34 : 트랜듀서 35 : 끝단부34: transducer 35: end

40 : 와이어 41 : 와이어볼40: wire 41: wire ball

본 발명은 IC칩 패드와 리드프레임 사이에 와이어를 본딩하기 위한 본딩툴(Capillary)에 대한 것으로, 캐필러리의 몸통에 도전성 금속을 코팅하거나 캐필러리 일측에 도전성 금속핀을 근접 형성하여, 이에 의해 2차 와이어 본딩시 볼 본딩을 수행할 수 있게 하여 볼 쉐어 테스트(Ball Shear Test) 값의 증대 및 풀 테스트(Pull Test)값의 증대는 물론 2차 본딩 과정에서 캐필러리 표면의 빌드 업(Build up) 방지의 효과를 나타내어 캐필러리 수명 연장의 효과를 얻을 수 있으며 이에 따라 불량률을 대폭 감소시켜 고가의 부품손실을 방지할 수 있으면서도 작업성의 향상 및 품질의 향상을 꾀할 수 있는 와이어 본딩용 캐필러리에 대한 것이다.The present invention relates to a bonding tool (Capillary) for bonding the wire between the IC chip pad and the lead frame, by coating a conductive metal on the body of the capillary or by forming a conductive metal pin close to one side of the capillary, thereby Ball bonding can be performed during secondary wire bonding to increase ball shear test and pull test values, as well as to build up the capillary surface during secondary bonding. ) It can prevent the costly parts loss by greatly reducing the defect rate, and can improve the workability and quality, while also improving the capillary life. It is about.

일반적인 전자 부품들은 단순한 또는 복잡한 회로칩을 포함하고 있으며 근래에는 고밀도화, 고집적화를 달성하기 위하여 0.3㎛ 이하의 선 폭을 이용하여 칩 내에 회로도를 구성하고 있다.General electronic components include simple or complex circuit chips, and recently, circuit diagrams are constructed in chips using a line width of 0.3 μm or less in order to achieve high density and high integration.

이 회로칩과 외부 패키지와의 전기적 연결에는 금, 은, 구리, 알루미늄 세선을 사용하며 와이어 본딩 방식이 널리 사용된다.The electrical connection between the circuit chip and the external package uses fine gold, silver, copper and aluminum wires, and wire bonding is widely used.

이러한 와이어 본딩을 수행하기 위해서 와이어를 삽입하여 사용하는 공구로서 캐필러리 또는 웨지가 사용된다.In order to perform such wire bonding, a capillary or wedge is used as a tool for inserting and using a wire.

상기한 캐필러리를 이용한 와이어 본딩은 도 1의 도시와 같이 리드프레임의 상면에 IC칩(111)을 접착 시켜주는 다이 본딩(Die bonding)과정을 수행한 이후에 와이어 본딩을 수행하기 위하여 일정 온도로 가열되어진 히터 블록 상에 위치시키고 초음파가 공급되는 캐필러리(112)와 캐필러리 내부 관통홀(113)을 통과하는 와이어(114) 끝 단부에 볼(115)을 형성시킨 다음 IC칩의 패드에 접촉시키며 일정한 압력으로 눌러 주면서 용융 압착되어 1차 와이어 본딩(Ball bonding)이 이루어진다.In the wire bonding using the capillary, as shown in FIG. 1, after performing a die bonding process of bonding the IC chip 111 to the upper surface of the lead frame, a predetermined temperature is performed to perform wire bonding. The ball 115 is formed on the end of the wire 114 passing through the capillary 112 and the capillary inner through hole 113 where ultrasonic waves are supplied and placed on the heater block heated by the Primary wire bonding is performed by melting and pressing while contacting the pad and pressing it at a constant pressure.

1차 와이어 본딩(Ball bonding)이 종료되면 캐필러리는 일정한 궤적을 가지는 형태로 리드프레임을 향하여 이동시키며 와이어는 루프(Loop)를 형성하게 되며 리드프레임에 푸르 형성이 완료된 와이어 일부를 일정한 압력을 가하여 눌러 붙이는 2차 와이어 본딩작업(Stich Bonding)을 수행하고 와이어를 절단하면서 한번의 와이어 본딩 싸이클을 완료 하게 된다.After the completion of the primary wire bonding, the capillary moves toward the lead frame in a form of a constant trajectory, and the wire forms a loop, and a portion of the wire formed on the lead frame is subjected to a constant pressure. Add and press the secondary wire bonding (Stich Bonding) and cut the wire to complete one wire bonding cycle.

이와 같은 와이어 본딩 작업을 수행하기 위한 캐필러리는 도 2의 도시와 같은 형상으로 몸체(121)와 20°,30°,50° 등의 각도를 갖는 단부각(123)으로 형성되어지며 끝단부의 직경 모서리부 주위에는 일정 크기의 라운드(126)가 형성되져 있다.Capillary for performing the wire bonding operation is formed in the shape as shown in Figure 2 and the end angle 123 having an angle of 20 °, 30 °, 50 ° and the like with the body 121 and the end portion Around the corner of the diameter is formed a round 126 of a predetermined size.

또한, 상단부 내측으로는 와이어가 삽입되는 백홀(Back hall)(122)가 형성되어지며 끝단에는 와이어의 직경(WD)에 비하여 약간 크기가 큰 와이어 가이드 홀(124)이 형성되어 지며, 홀의 끝 단부로부터 캐필러리 하단부까지는 경사각을 갖 는 챔퍼(125)로 형성되어지는 것이다.In addition, a back hole 122 into which a wire is inserted is formed inside the upper end, and a wire guide hole 124 which is slightly larger than the diameter of the wire WD is formed at the end thereof. From the capillary lower end portion is to be formed of a chamfer 125 having an inclination angle.

이러한 형상을 갖는 캐필러리로 1차 및 2차 와이어 본딩 작업을 수행하게 되면 도 1의 도시와 같이 IC칩 패드 상의 볼 본딩(116)과 리드프레임 상의 스티치 본딩(117)이 된다.When the primary and secondary wire bonding operations are performed with a capillary having such a shape, as shown in FIG. 1, the ball bonding 116 on the IC chip pad and the stitch bonding 117 on the lead frame are shown.

따라서, 상기한 바와 같은 구조를 갖는 캐필러리에 의해 수행되어지는 리드프레임 상의 2차 본딩 작업 즉, 스티치 본딩은 1차 와이어 본딩처럼 볼 본딩 형태를 취할 수 없으며 본딩 와이어의 일부를 리드프레임 상에 본딩하고 절단을 행하여야 한다.Accordingly, the secondary bonding operation on the leadframe, that is, the stitch bonding, which is performed by the capillary having the structure as described above, cannot take the form of ball bonding like the primary wire bonding, and bonds a portion of the bonding wire on the leadframe. And cut.

여기에서 1차 와이어 본딩(볼 본딩)은 본딩 수행 이전에 와이어의 끝단에 소정의 크기의 볼을 형성하고 여기에 초음파를 부과한 캐필러리를 사용하여 용융 압착하여 본딩을 수행하기 때문에 볼의 직경에 해당하는 본딩 면적을 갖음으로서 융착력이 충분한 반면 2차 와이어 본딩(스티치 본딩)은 볼에 비하면 매우 작은 직경(0.02~0.025mm)의 와이어 일부를 리드프레임 상에 본딩하고 다음 본딩 싸이클을 진행하기 위하여 와이어를 절단하는 과정에서 본딩이 수행된 절반의 부분이 제거되기 때문에 1차 와이어 본딩(볼 본딩)에 비하여 매우 작은 본딩 면적을 갖음으로서 융착력이 현저히 약화되는 문제점을 보인다.In this case, the primary wire bonding (ball bonding) is formed by forming a ball having a predetermined size at the end of the wire prior to performing the bonding, and performing the bonding by melt pressing using a capillary imparted with ultrasonic waves. Bonding area is sufficient to have a bonding strength, while secondary wire bonding (stitch bonding) bonds a part of wire having a very small diameter (0.02 ~ 0.025mm) on the lead frame and proceeds to the next bonding cycle. Since half of the portion where the bonding is performed in the process of cutting the wire is removed, the bonding strength is significantly weakened by having a very small bonding area compared to the primary wire bonding (ball bonding).

따라서, 융착력의 저하에 기인한 2차 와이어 본딩 스티치 본딩 불량이 빈번하게 발생하는 것이다.Therefore, secondary wire bonding stitch bonding defects frequently occur due to a decrease in welding strength.

본 발명은 전기한 바와 같은 문제점을 제거코자 안출된 것으로서, 캐필러리의 바디에 도전성 금속층을 형성하거나, 몸체 일측에 도전성 금속핀을 형성하여 이를 고압의 전류와 연결되게 하여, 상기 금속층이나 금속핀과 와이어의 간극에서 발생하는 스파크에 의해 캐필러리 단부의 와이어에 용융상의 볼이 형성되게 하여,The present invention has been made to eliminate the problems described above, by forming a conductive metal layer on the body of the capillary, or by forming a conductive metal pin on one side of the body to be connected to a high-voltage current, the metal layer or of the metal pin and the wire Sparks generated in the gap allow molten balls to form on the wire at the capillary end,

1차 와이어 본딩(볼 본딩)을 수행하고 캐필러리를 일정한 궤적을 가지고 리드프레임을 향하여 이동시키며 캐필러리의 바디에 코팅된 도전성 금속 부위에 고전압을 인가하여 루프(Loop)를 형성한 일정 위치의 와이어 상에 형성된 볼을 이용하여 2차 와이어 본딩을 수행하므로,Perform the first wire bonding (ball bonding), move the capillary toward the lead frame with a constant trajectory, and apply a high voltage to the conductive metal part coated on the body of the capillary to form a loop. Since secondary wire bonding is performed using the ball formed on the wire,

종래의 2차 와이어 본딩인 스티치 본딩에 비하여 본딩의 유효 단면적을 대폭 증가시킴으로서 종래의 기술에 의한 융착력(Pull test 값)을 2~3배 이상 증대시켜 융착력 저하에 따른 본딩 불량이 제거되게 하는 효과를 갖는 스파크 발생수단을 갖는 와이어 본딩용 캐필러리를 제공함에 본 발명의 목적이 있는 것이다.Compared to the stitch bonding which is the conventional secondary wire bonding, the effective cross-sectional area of the bonding is greatly increased, thereby increasing the welding force (Pull test value) by 2 to 3 times or more, thereby removing the bonding defect due to the decrease in the welding strength. It is an object of the present invention to provide a capillary for wire bonding having a spark generating means having an effect.

이하, 본 발명의 바람직한 실시예를 설명한다.Hereinafter, preferred embodiments of the present invention will be described.

도 3은 본 발명에 따른 캐필러리 고정부를 도시한 확대도이다.3 is an enlarged view illustrating a capillary fixing part according to the present invention.

전원의 단속이 가능한 도전체로 제작된 와이어 본더용 트랜듀서(34)에 공지의 캐필러리(30)를 장착 하되,The known capillary 30 is mounted on the wire bonder transducer 34 made of a conductor capable of interrupting power,

상기 트랜듀서(34)로부터 전원이 인가되는 도전성 금속체(33)는, 상기 캐필 러리(30)의 바디(31)를 관통하는 내부 관통홀(32)에 삽입되어진 와이어(40)의 하단으로부터 근접 위치되게 하여,The conductive metal body 33 to which power is applied from the transducer 34 is proximate to the lower end of the wire 40 inserted into the inner through hole 32 penetrating the body 31 of the capillary 30. To be positioned,

상기 트랜듀서(34) 및 도전성 금속체(33)에 전원을 인가하면, 상기 도전성 금속체(33)와 도전체인 와이어(40)에 스파크가 발생하여 용융상의 와이어볼(41)이 형성되게 구성한 것으로서,When power is applied to the transducer 34 and the conductive metal body 33, sparks are generated in the conductive metal body 33 and the wire 40 which is a conductor to form a molten wire ball 41. ,

상기한 도전성 금속체(33)는, 캐필러리 바디(31)의 상부 끝단부(35)로부터 0.1~1.0mm를 제외한 표면과 20°,30°,50°등의 각도를 갖는 끝단부(35)의 하부 끝 단부로부터 0.1~1.0mm를 제외한 표면을 도전성 박막 코팅된 금속층을 형성하여 구성하거나,The conductive metal body 33 has an end portion 35 having an angle of 20 °, 30 °, 50 °, etc. with the surface except 0.1 to 1.0 mm from the upper end 35 of the capillary body 31. The surface except for 0.1 ~ 1.0mm from the lower end of the) to form a conductive thin film coated metal layer, or

그 도전성 금속핀(33)을, 상기 트랜듀스(34)로부터 하향 결합되고 그 하단이 상기 캐필러리(30)의 끝단부(35)와 근접 위치한 금속핀으로 형성하여 구성할 수도 있는 것이다.The conductive metal pin 33 may be formed by forming a metal pin coupled downwardly from the transduced 34 and having a lower end thereof located close to the end 35 of the capillary 30.

이상과 같은 구성에 의한 본 발명 스파크 발생수단을 갖는 와이어 본딩용 캐필러리 고정부의 작용 및 작업공정을 보다 상세히 설명하면 다음과 같다.Referring to the action and work process of the capillary fixing portion for wire bonding having the spark generating means of the present invention by the above configuration as follows.

본 발명은 와이어 본딩을 수행함에 있어 2차 와이어 본딩 직전에 트랜듀스(34)에 전원을 인가시켜 이에 의해 1차 와이어 본딩 된 와이어(40) 상에 와이어볼(41)을 형성하여 2차 와이어 본딩을 볼본딩함으로써 리드프레임과의 융착력이 증대되게 하는 것이다.In the present invention, the wire ball 41 is formed on the primary wire bonded wire 40 by applying power to the transduced 34 immediately before the secondary wire bonding, thereby forming the secondary wire bonding. By ball bonding, the welding force with the lead frame is increased.

즉, 도 4의 도시와 같이 1차 와이어 본딩을 하기 전 와이어 단부에 일차 스 파크를 발생시켜 이에 의한 와이어볼(41)을 형성한 상태에서 이를 IC칩 패드에 가압하여 1차 와이어 본딩을 수행하게 된다.That is, as shown in FIG. 4, primary wire bonding is performed by generating a primary spark at the end of the wire and pressing the IC chip pad in the state where the wire ball 41 is formed thereby. do.

이러한 1차 와이어 본딩이 이루어지면 상기한 캐필러리(30)를 갖는 와이어 본더용 트랜듀서(34)를 이동시키게 되는데, 이러한 이동과정 중에서 상기한 와이어 본더용 트랜듀서(34)에 전원을 재인가시켜 상기 도전성 금속체(33)에 고압의 전류가 인가되게 하면, 그 금속체(33)가 전극이 되면서 근접한 와이어(40)에 용융상의 와이어볼(41)을 형성시키게 된다.When the primary wire bonding is made, the wire bonder transducer 34 having the capillary 30 is moved, and power is re-applied to the wire bonder transducer 34 during the movement. When a high voltage current is applied to the conductive metal body 33, the molten wire ball 41 is formed on the adjacent wire 40 while the metal body 33 becomes an electrode.

이와 같이 또다른 와이어볼(41)이 형성되면 이를 리드프레임 상에 용융시켜 융착시키면 보다 견고한 융착력을 갖는 와이어 본딩이 이루어지는 것이다.When another wire ball 41 is formed as described above, melting and fusing the wire ball 41 on the lead frame results in wire bonding having a more firm welding force.

따라서, 상기와 같이 한 번의 와이어 본딩 싸이클이 완성되면 상기 와이어 본더용 트랜듀서는 원위치로 복귀하여 1차 와이어 본딩을 위한 예비작업(와이어볼 형성)을 하게 되는 것이며, 이들 본딩 사이클의 반복적인 수행에 의해 본딩이 완료되는 것이다.Therefore, when one wire bonding cycle is completed as described above, the transducer for the wire bonder returns to its original position to perform preliminary work (wire ball formation) for primary wire bonding, and to repeatedly perform these bonding cycles. Bonding is completed.

특히, 상기와 같이 전원이 단속되는 와이어 본더용 트랜듀서(34) 및 이에 결합되어진 캐필러리(30)는 그 캐필러리(30) 자체가 부도체여서 전원이 인가될 수 없으므로, 상기한 캐필러리(30) 외주면에 도전성 금속체(33)를 코팅하여 형성하거나, 상기한 트랜듀서(34)로부터 하향 설치된 별도의 금속핀을 이용하여 와이어볼(41)을 형성하게 되는 것인데,In particular, the wire bonder transducer 34 to which the power is interrupted as described above and the capillary 30 coupled to the capillary 30 itself are non-conductors, and thus power cannot be applied. It is to form a wire ball 41 by coating the conductive metal body 33 on the outer peripheral surface of the li 30, or by using a separate metal pin installed downward from the transducer 34,

상기 캐필러리(30) 바디(31)의 내부 관통홀(34)로 삽입되어 그 하단으로 노출되어진 와이어(40)에 전기적 스파크에 의해 용융상의 와이어볼(41)을 형성하게 되는 것이다.The molten wire ball 41 is formed by an electrical spark in the wire 40 inserted into the inner through hole 34 of the capillary 30 body 31 and exposed to the lower end thereof.

이때, 상기한 도전성 금속체(33)와 와이어(40)의 간격이 지나치게 멀게 되면 스파크의 유도발생이 일어나지 않게 되고, 너무 가까울 경우에는 와이어(40)가 도전성 금속체(33)로 붙어버리는 현상이 발생하므로 이들의 간격을 효과적으로 조정할 필요가 있는 것으로서,At this time, when the distance between the conductive metal body 33 and the wire 40 is too far, induction of sparking does not occur, and when too close, the wire 40 sticks to the conductive metal body 33. As it occurs, it is necessary to adjust these intervals effectively,

바디(31)의 표면에 금속의 코팅층을 형성하고자 하는 경우에는, 이를 캐필러리 바디(31)의 상부 끝단부로부터 0.1~1.0mm를 제외한 표면과 20°,30°,50°등의 각도를 갖는 끝단부(35)의 하부 끝 단부로부터 0.1~1.0mm를 제외한 표면을 도전성 박막 코팅을 하는 것이 가장 이상적이며,When the metal coating layer is to be formed on the surface of the body 31, the angle of 20 °, 30 °, 50 ° and the like except for 0.1 to 1.0 mm from the upper end of the capillary body 31 is determined. Ideally, the conductive thin film is coated on the surface except for 0.1 to 1.0 mm from the lower end of the end 35 having

도전성 금속핀을 이용하는 경우에는 그 핀의 끝단이 상기한 박막 코팅층의 하단과 동일한 간격을 갖게 형성하면 되는 것이다.In the case of using a conductive metal pin, the tip of the pin may be formed to have the same spacing as the lower end of the thin film coating layer.

즉, 상기한 바와 같이 널리 공지된 와이어 본딩용 캐필러리를 와이어 본딩을 수행하는 장비 즉, 와이어 본더의 트랜듀서(34)에 종래의 기술에 의하여 고정하며 캐필러리가 고정된 트랜듀서(34)에 캐필러리(30)로부터 일정의 간격과 높이의 차이를 갖도록 바늘 모양의 뾰족한 금속핀으로 된 도전성 금속체(33)를 설치 형성하여,That is, as described above, a device for performing wire bonding of a well-known capillary for wire bonding, that is, a transducer 34 fixed to the transducer 34 of the wire bonder by a conventional technique and having a capillary fixed thereto A conductive metal body 33 made of a needle-shaped sharp metal pin so as to have a predetermined gap and height from the capillary 30,

와이어 본딩을 실시할때 1차 와이어 본딩(볼 본딩) 종료 후 2차 와이어 본딩(볼 본딩)을 위하여 와이어 본더의 트랜듀서(34)에 고전압을 인가하면 와이어의 일정 위치에 와이어 볼(41)이 형성되어 IC칩 패드와 리드프레임 간의 와이어본딩(볼 본딩)을 실시하는 것이다.When the wire bonding is performed, when a high voltage is applied to the transducer 34 of the wire bonder for the second wire bonding (ball bonding) after the completion of the first wire bonding (ball bonding), the wire ball 41 is placed at a predetermined position of the wire. It is formed to perform wire bonding (ball bonding) between the IC chip pad and the lead frame.

따라서, 종래의 2차 와이어 본딩(스티치 본딩)에 비하여 본딩의 유효 단면적을 대폭 증가 시킴으로서, 도 6의 도시와 같이 종래의 기술에 의한 융착력(Pull test 값)은 5~7gr 인데 반하여, 본 발명에 의한 융착력은 12~15gr을 나타내는 것으로 실험되었으며, 이에 따라 융착력 저하에 따른 본딩 불량이 크게 감소하는 것이다.Therefore, by significantly increasing the effective cross-sectional area of the bonding compared to the conventional secondary wire bonding (stitch bonding), as shown in Figure 6 the welding force (Pull test value) by the conventional technique is 5 ~ 7gr, the present invention The fusion force by was tested to represent 12 ~ 15gr, thereby significantly reducing the bonding failure due to the decrease in fusion force.

이상과 같은 본 발명 스파크 발생수단을 갖는 와이어 본딩용 캐필러리는, 1차 와이어 본딩(볼 본딩)을 수행하고 캐필러리를 일정한 궤적을 가지고 리드프레임을 향하여 이동시킬 때 캐필러리의 바디에 코팅된 도전성 금속 부위에 고전압을 인가하여 루프(Loop)를 형성한 일정 위치의 와이어 상에 형성된 볼을 이용하여 2차 와이어 본딩을 수행하므로,The wire bonding capillary having the spark generating means of the present invention as described above is coated on the body of the capillary when performing the primary wire bonding (ball bonding) and moving the capillary toward the lead frame with a constant trajectory. Since the secondary wire bonding is performed by using a ball formed on a wire of a predetermined position where a loop is formed by applying a high voltage to the conductive metal part,

종래의 2차 와이어 본딩인 스티치 본딩에 비하여 본딩의 유효 단면적을 대폭 증가시킴으로서 종래의 기술에 의한 융착력(Pull test 값)을 2~3배 이상 증대시켜 융착력 저하에 따른 본딩 불량이 제거되게 하는 효과를 갖는 것이다.Compared to the stitch bonding which is the conventional secondary wire bonding, the effective cross-sectional area of the bonding is greatly increased, thereby increasing the welding force (Pull test value) by 2 to 3 times or more, thereby removing the bonding defect due to the decrease in the welding strength. It has an effect.

Claims (3)

전원의 단속이 가능한 도전체 상의 와이어 본더용 트랜듀서(34)에 공지의 캐필러리(30)를 장착 하되,The known capillary 30 is mounted on the wire bonder transducer 34 on the conductor capable of interrupting the power supply, 상기 트랜듀서(34)로부터 전원이 인가되는 도전성 금속체(33)는, 상기 캐필러리(30)의 바디(31)를 관통하는 내부 관통홀(32)에 삽입되어진 와이어(40)의 하단으로부터 근접 위치되게 하여,The conductive metal body 33 to which power is applied from the transducer 34 is provided from the lower end of the wire 40 inserted into the inner through hole 32 passing through the body 31 of the capillary 30. In close proximity, 상기 트랜듀서(34) 및 도전성 금속체(33)에 전원을 인가하면, 상기 도전성 금속체(33)와 도전체인 와이어(40)에 스파크가 발생하여 용융상의 와이어볼(41)이 형성되게 구성함을 특징으로 하는 스파크 발생수단을 갖는 와이어 본딩용 캐필러리.When power is applied to the transducer 34 and the conductive metal body 33, sparks are generated in the conductive metal body 33 and the wire 40, which is a conductor, to form a molten wire ball 41. Capillary for wire bonding having a spark generating means characterized in that. 제 1항에 있어서,The method of claim 1, 도전성 금속체(33)는, 캐필러리 바디(31)의 상부 끝단부로부터 0.1~1.0mm를 제외한 표면과 20°,30°,50°등의 각도를 갖는 끝단부(35)의 하부 끝단부로부터 0.1~1.0mm를 제외한 표면을 도전성 박막 코팅된 금속층을 형성하여 구성함을 특징으로 하는 스파크 발생수단을 갖는 와이어 본딩용 캐필러리.The conductive metal body 33 is a lower end portion of the end portion 35 having an angle of 20 °, 30 °, 50 °, etc. with the surface except 0.1 to 1.0 mm from the upper end of the capillary body 31. Capillary for wire bonding having a spark generating means, characterized in that to form a metal layer coated with a conductive thin film on the surface except 0.1 ~ 1.0mm. 제 1항에 있어서,The method of claim 1, 도전성 금속체(33)를, 상기 트랜듀스(34)로부터 하향 결합되고 그 하단이 상기 캐필러리(30)의 끝단부(35)와 근접 위치한 금속핀으로 형성하여 구성함을 특징으로 하는 스파크 발생수단을 갖는 와이어 본딩용 캐필러리.Spark generating means characterized in that the conductive metal body 33 is formed by metal pins which are coupled downwardly from the transduced 34 and whose lower ends are located close to the ends 35 of the capillary 30. Capillary for wire bonding having a.
KR1020050078143A 2005-08-25 2005-08-25 Wire bonding capillary with a device for producing spark KR100715978B1 (en)

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